Large-size silicon wafer flower basket structure

Abstract

The invention relates to the technical field of silicon wafer flower baskets, in particular to a large-size silicon wafer flower basket structure which comprises a moving seat, a silicon wafer flower basket seat is placed on the moving seat, two placing roll shafts are rotatably connected to the silicon wafer flower basket seat, an adjustable silicon wafer limiting mechanism is rotatably connected to the silicon wafer flower basket seat, and a rotating frame is rotatably connected to an adjusting block. A silicon wafer driving mechanism is installed on the rotating frame, a protective cover is arranged on the silicon wafer basket seat in a sliding fit mode, and when the silicon wafer basket seat is placed in cleaning liquid for silicon wafer cleaning, the silicon wafer driving mechanism is utilized to drive the silicon wafer basket seat to rotate under the cooperation of the silicon wafer driving wheel and the placing roll shaft. The silicon wafer rotating during cleaning can ensure that cleaning liquid uniformly covers the whole surface of the silicon wafer, cleaning dead angles are avoided, the cleaning effect is improved, flowing contact between the silicon wafer and the cleaning liquid can be increased through rotation, the cleaning speed is increased, bubbles can be prevented from being retained on the surface of the silicon wafer through rotation, and the better cleaning effect is ensured.

Description

Technical Field

[0001] The invention relates to the technical field of silicon wafer flower baskets, and in particular to a large-size silicon wafer flower basket structure. Background Art

[0002] Silicon wafers are basic materials in the semiconductor industry and are widely used in integrated circuits (ICs), optoelectronic devices, solar cells, and other fields. The following are several important aspects about silicon wafers:

[0003] Silicon wafers are thin slices made of high-purity single-crystal silicon materials, usually with a thickness between 200 microns and 1 mm, and common diameters of 100 mm, 150 mm, 200 mm, 300 mm, etc. The surface of the silicon wafer is smooth and has a high degree of flatness and finish, which is convenient for subsequent processes such as lithography, deposition and etching.

[0004] Large wafer baskets usually refer to carriers used in the manufacturing process of integrated circuits (ICs) or other semiconductor devices composed of multiple silicon wafers. Large wafer baskets are a type of equipment used to store, transport and handle multiple silicon wafers, and are typically used in semiconductor manufacturing and testing processes. The basket is designed to minimize physical contact with the silicon wafers to avoid scratches and contamination. In the silicon wafer cleaning process, the basket structure plays a vital role, mainly used to load, protect and optimize the cleaning process.

[0005] When cleaning silicon wafers, the existing silicon wafer basket neatly places the silicon wafers in the separation grooves of the basket. At this time, a blind area may be formed where the silicon wafers contact the basket, resulting in the cleaning liquid not being able to evenly cover the entire surface of the silicon wafer. As a result, some areas may not be cleaned thoroughly, leaving contaminants or residues, affecting subsequent processing.

[0006] In summary, the prior art lacks a technology for driving a silicon wafer when cleaning a silicon wafer. Summary of the invention

[0007] The purpose of the present invention is to solve the shortcomings of the background technology and propose a large-size silicon wafer basket structure.

[0008] To achieve the above objectives, the technical solution adopted by the present invention is: a large-size silicon wafer basket structure, comprising a movable seat, a silicon wafer basket seat is placed on the movable seat, two placing rollers are rotatably connected on the silicon wafer basket seat, an adjustable silicon wafer limiting mechanism is rotatably connected on the silicon wafer basket seat, a fixed frame is connected and fixedly arranged on one side of the silicon wafer basket seat, an electric push rod A is connected and fixedly arranged in the fixed frame, the other end of the electric push rod A is connected and fixedly arranged with an adjustment block, an adjustment rack is connected and fixedly arranged on one side of the upper end of the fixed frame, an adjustment block is slidably matched in the fixed frame, a worm is rotatably connected at one end of the adjustment block, an adjustment wheel is connected and fixed at one end of the worm close to the adjustment rack, the adjustment wheel is meshed with the adjustment rack for transmission, and the adjustment block is rotatably connected to the fixed frame. A rotating frame is provided, and one end of the rotating frame connected to the adjusting block is connected and fixedly provided with a worm gear, and the worm gear is meshed with the worm for transmission. A silicon wafer driving mechanism is installed on the rotating frame, and the silicon wafer driving mechanism comprises a U-shaped frame, both ends of the U-shaped frame are connected and fixedly provided with guide shafts, and the guide shaft and the rotating frame are slidably matched, one end of the guide shaft is connected and fixedly provided with a spring, and the other end of the spring is connected and fixedly provided with the rotating frame, a transmission rod is rotatably connected on the U-shaped frame, and a plurality of silicon wafer driving wheels are connected and fixedly provided on the transmission rod in a linear structure, one end of the U-shaped frame is connected and fixedly provided with a motor cover, and a motor is fixedly installed in the motor cover, the output end of the motor is connected and fixedly provided with one end of the transmission rod, and a protective cover is slidably matched on the silicon wafer basket seat.

[0009] Preferably, a push handle is fixedly connected to one side of the movable seat, a plurality of plug holes are provided on the movable seat, and a plurality of brake wheels are installed at the bottom of the movable seat.

[0010] Preferably, a plurality of plug-in rods are fixedly connected to the bottom of the silicon wafer flower basket seat, the bottom ends of the plug-in rods are arranged in a conical structure, the plug-in rods are movably connected to the plug-in holes, a bending guide groove is provided on one side of the silicon wafer flower basket seat, handles are fixedly connected to both sides of the silicon wafer flower basket seat, and the bottom end of the silicon wafer flower basket seat is arranged in an inclined structure.

[0011] Preferably, the adjustable silicon wafer limiting mechanism includes a bidirectional screw rod, which is rotatably connected to the silicon wafer basket seat, one end of the bidirectional screw rod is connected and fixed with a handle, a plurality of groups of bidirectional threads are provided on the bidirectional screw rod in a linear structure, a plurality of groups of silicon wafer limiting plates are threadedly connected on the bidirectional screw rod in a linear structure, both ends of the silicon wafer limiting plates are slidably matched with the placement roller, a scale is fixedly connected to the silicon wafer limiting plate close to the handle side, and the scale is slidably matched with the silicon wafer basket seat.

[0012] Preferably, a guide head is fixedly connected to the bottom end of one side of the protective cover, and the guide head is slidably matched with the bending guide groove. A slide rod is fixedly connected to the protective cover, and a movable frame is slidably matched on the slide rod. An electric push rod B is fixedly connected to the bottom of the movable frame, and the other end of the electric push rod B is fixedly connected to the silicon wafer basket seat.

[0013] Compared with the prior art, the present invention has the following beneficial effects:

[0014] 1. When the silicon wafer basket is placed in the cleaning liquid for silicon wafer cleaning, the silicon wafer driving mechanism is used. With the cooperation of the silicon wafer driving wheel and the placement roller, the silicon wafer can be rotated during cleaning to ensure that the cleaning liquid evenly covers the entire silicon wafer surface, avoiding cleaning dead corners and improving the cleaning effect. Through continuous rotation, the dirt and impurities on the silicon wafer surface can be removed faster by the cleaning liquid, thereby shortening the cleaning time. The rotation can increase the flow contact between the silicon wafer and the cleaning liquid, improve the cleaning rate, and prevent bubbles from being retained on the silicon wafer surface, ensuring better cleaning effect.

[0015] 2. By setting the adjustment block, the position of the silicon wafer drive mechanism can be adjusted and turned, so that the silicon wafer drive mechanism can drive silicon wafers of different sizes, increasing the versatility of the equipment. At the same time, the silicon wafer drive mechanism can be turned to facilitate the placement of the silicon wafer on the silicon wafer basket seat, thereby improving production efficiency;

[0016] 3. By setting up silicon wafer limit plates with adjustable spacing, it is convenient to limit silicon wafers of different thicknesses, thereby ensuring that the silicon wafers remain stable during storage and transportation to prevent tilting or displacement. At the same time, by setting up protective covers, additional protection is provided during the transportation of silicon wafers to prevent the influence of foreign objects, dust or chemicals on the silicon wafers, which can effectively prevent external pollution, reduce the risk of silicon wafers during transportation, and improve the safety and stability of the silicon wafer transportation process. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the overall structure of a large-size silicon wafer basket structure during transportation according to the present invention;

[0018] Figure 2 This is a schematic diagram of the overall structure of a large-size silicon wafer basket structure of the present invention;

[0019] Figure 3 This is a schematic diagram of the structure of a mobile seat of a large-size silicon wafer basket structure of the present invention;

[0020] Figure 4 It is a schematic diagram of the structure of a silicon wafer flower basket seat of a large-size silicon wafer flower basket structure of the present invention;

[0021] Figure 5This is a schematic diagram of the structure of an adjustable silicon wafer limiting mechanism of a large-size silicon wafer basket structure of the present invention;

[0022] Figure 6 This is a schematic diagram of the structure of a fixing frame of a large-size silicon wafer basket structure of the present invention;

[0023] Figure 7 It is a partial cross-sectional expansion schematic diagram of a silicon wafer driving mechanism and other structures of a large-size silicon wafer basket structure of the present invention;

[0024] Figure 8 This is a schematic diagram of the protective cover structure of a large-size silicon wafer basket structure of the present invention.

[0025] The following are marked in the figure: 1. Moving seat; 2. Silicon wafer basket seat; 3. Roller shaft; 4. Adjustable silicon wafer limit mechanism; 5. Fixed frame; 6. Adjustment block; 7. Rotating frame; 8. Silicon wafer drive mechanism; 9. Protective cover; 101. Push handle; 102. Plug-in hole; 103. Brake wheel; 201. Plug-in rod; 202. Bending guide groove; 203. Handle; 401. Bidirectional screw rod; 402. Handle; 403. Silicon wafer 404, scale; 501, electric push rod A; 502, adjusting rack; 601, worm; 602, adjusting wheel; 701, worm wheel; 801, U-shaped frame; 802, guide shaft; 803, spring; 804, transmission rod; 805, silicon wafer driving wheel; 806, motor cover; 807, motor; 901, guide head; 902, sliding rod; 903, moving frame; 904, electric push rod B. DETAILED DESCRIPTION

[0026] The following description is used to disclose the present invention so that those skilled in the art can implement the present invention. The preferred embodiments described below are only examples, and those skilled in the art may think of other obvious variations.

[0027] like Figure 1-Figure 8A large-size silicon wafer basket structure is shown, comprising a moving seat 1, on which a silicon wafer basket seat 2 is placed, on which two placing rollers 3 are rotatably connected, on which an adjustable silicon wafer limiting mechanism 4 is rotatably connected, a fixed frame 5 is connected and fixedly arranged on one side of the silicon wafer basket seat 2, an electric push rod A501 is connected and fixedly arranged in the fixed frame 5, and the other end of the electric push rod A501 is connected and fixedly arranged with an adjusting block 6, one side of the upper end of the fixed frame 5 is connected and fixedly arranged with an adjusting rack 502, an adjusting block 6 is slidably arranged in the fixed frame 5, one end of the adjusting block 6 is rotatably connected and arranged with a worm 601, and one end of the worm 601 close to the adjusting rack 502 is connected and fixedly arranged with an adjusting wheel 602, and the adjusting wheel 602 is meshed with the adjusting rack 502 for transmission, and a rotating frame 7 is rotatably connected and arranged on the adjusting block 6, and the rotating frame 7 is connected to the adjusting block 6. A worm gear 701 is fixedly provided at one end, and the worm gear 701 is meshed with the worm 601 for transmission. A silicon wafer driving mechanism 8 is installed on the rotating frame 7, and the silicon wafer driving mechanism 8 includes a U-shaped frame 801. Guide shafts 802 are fixedly provided at both ends of the U-shaped frame 801. The guide shaft 802 and the rotating frame 7 are slidably matched. A spring 803 is fixedly provided at one end of the guide shaft 802, and the other end of the spring 803 is fixedly provided with the rotating frame 7. A transmission rod 804 is rotatably connected to the U-shaped frame 801, and a plurality of silicon wafer driving wheels 805 are fixedly provided on the transmission rod 804 in a linear structure. A motor cover 806 is fixedly provided at one end of the U-shaped frame 801, and a motor 807 is fixedly installed in the motor cover 806. The output end of the motor 807 is fixedly provided with one end of the transmission rod 804, and a protective cover 9 is slidably matched on the silicon wafer basket seat 2.

[0028] like Figure 3 As shown, a push handle 101 is fixedly connected to one side of the moving base 1, a plurality of plug holes 102 are opened on the moving base 1, and a plurality of brake wheels 103 are installed at the bottom of the moving base 1.

[0029] like Figure 4 As shown, a plurality of plug-in rods 201 are fixedly connected to the bottom of the silicon wafer basket seat 2, the bottom of the plug-in rods 201 are arranged in a conical structure, the plug-in rods 201 are movably plugged with the plug-in holes 102, a bending guide groove 202 is provided on one side of the silicon wafer basket seat 2, handles 203 are fixedly connected to both sides of the silicon wafer basket seat 2, and the bottom of the silicon wafer basket seat 2 is arranged in an inclined structure. After the silicon wafer basket seat 2 is taken out of the cleaning device, the plug-in rods 201 at the bottom thereof are aligned with the plug-in holes 102 on the mobile seat 1 and inserted, so as to fix the silicon wafer basket seat 2 on the mobile seat 1.

[0030] like Figure 5As shown, the adjustable silicon wafer limiting mechanism 4 includes a bidirectional screw rod 401, which is connected to the silicon wafer basket seat 2 for rotation, and a handle 402 is fixedly provided at one end of the bidirectional screw rod 401, and a plurality of bidirectional threads are provided on the bidirectional screw rod 401 in a linear structure, and a plurality of silicon wafer limiting plates 403 are provided on the bidirectional screw rod 401 in a linear structure for thread connection, and both ends of the silicon wafer limiting plates 403 are provided for sliding cooperation with the placement roller 3, and a scale 404 is fixedly provided on the silicon wafer limiting plates 403 near the handle 402, and the scale 404 is provided for sliding cooperation with the silicon wafer basket seat 2. Hold the handle 402 and rotate the bidirectional screw rod 401, and the bidirectional screw rod 401 will drive the spacing between the plurality of silicon wafer limiting plates 403 to be adjusted, and the spacing value is determined by observing the scale 404.

[0031] like Figure 8 As shown, a guide head 901 is connected and fixedly arranged at the bottom end of one side of the protective cover 9, and the guide head 901 is slidably matched with the bending guide groove 202. A slide bar 902 is connected and fixedly arranged on the protective cover 9, and a moving frame 903 is slidably matched on the slide bar 902. An electric push rod B904 is connected and fixedly arranged at the bottom of the moving frame 903, and the other end of the electric push rod B904 is connected and fixedly arranged with the silicon wafer basket seat 2. The electric push rod B904 is used to drive the moving frame 903 to move downward, and at this time, the protective cover 9 connected to the slide bar 902 will be driven to move downward. At this time, under the action of the bending guide groove 202, the protective cover 9 will cover the silicon wafer basket seat 2 to protect the silicon wafer inside.

[0032] Working principle: When the silicon wafer needs to be cleaned, first adjust the spacing between the silicon wafer limiting plates 403 according to the thickness of the silicon wafer, hold the handle 402 and rotate the bidirectional screw 401, then the bidirectional screw 401 will drive the spacing between the multiple sets of silicon wafer limiting plates 403 to be adjusted, and then observe and determine the spacing value through the scale 404;

[0033] Then, the silicon wafer is placed between the two silicon wafer limiting plates 403, and then the electric push rod A501 is used to drive the adjustment block 6 to move downward. At this time, under the action of the adjustment rack 502, the adjustment wheel 602 is rotated, so that the adjustment wheel 602 drives the connected worm 601 to rotate, so that the worm 601 drives the rotating frame 7 connected to the worm wheel 701 to be leveled, and then when the adjustment block 6 continues to move downward, the silicon wafer driving wheel 805 will contact the silicon wafer;

[0034] Then, the silicon wafer basket 2 is removed from the movable seat 1 by the handle 203 and placed in the cleaning device. Then, when cleaning the silicon wafer, the motor 807 is used to drive the connected transmission rod 804 to rotate. At this time, when the silicon wafer driving wheel 805 on the transmission rod 804 rotates, it cooperates with the placement roller 3 to drive the silicon wafer to rotate and clean.

[0035] After cleaning, the silicon wafer basket seat 2 is taken out from the cleaning equipment, and the plug-in rod 201 at the bottom is aligned with the plug-in hole 102 on the movable seat 1 and inserted to fix the silicon wafer basket seat 2 on the movable seat 1, and then the electric push rod B904 is used to drive the movable frame 903 to move downward, which will drive the protective cover 9 connected to the slide rod 902 to move downward. At this time, under the action of the bending guide groove 202, the protective cover 9 will cover the silicon wafer basket seat 2 to protect the silicon wafer inside, and then push the movable seat 1 to realize the transportation of the silicon wafer.

[0036] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions only describe the principles of the present invention. The present invention may be subject to various changes and improvements without departing from the spirit and scope of the present invention. These changes and improvements fall within the scope of the present invention. The scope of protection claimed by the present invention is defined by the attached claims and their equivalents.

Claims

1. A large-size silicon wafer basket structure, comprising a movable seat (1), characterized in that: A silicon wafer basket seat (2) is placed on the movable seat (1), two placement rollers (3) are rotatably connected to the silicon wafer basket seat (2), an adjustable silicon wafer limiting mechanism (4) is rotatably connected to the silicon wafer basket seat (2), a fixing frame (5) is fixedly connected to one side of the silicon wafer basket seat (2), an electric push rod A (501) is fixedly connected to the inside of the fixing frame (5), the other end of the electric push rod A (501) is fixedly connected to the adjusting block (6), and one side of the upper end of the fixing frame (5) is fixedly connected to The fixing frame (5) is provided with an adjusting rack (502), an adjusting block (6) is slidably matched in the fixing frame (5), one end of the adjusting block (6) is rotatably connected with a worm (601), one end of the worm (601) close to the adjusting rack (502) is connected and fixed with an adjusting wheel (602), the adjusting wheel (602) is meshed with the adjusting rack (502) for transmission, a rotating frame (7) is rotatably connected on the adjusting block (6), and one end of the rotating frame (7) connected to the adjusting block (6) is connected and fixed with a worm wheel (701), the worm wheel (701) and the worm (601) are meshed and driven, a silicon wafer driving mechanism (8) is installed on the rotating frame (7), and the silicon wafer driving mechanism (8) includes a U-shaped frame (801), both ends of the U-shaped frame (801) are connected and fixedly provided with a guide shaft (802), the guide shaft (802) and the rotating frame (7) are slidably matched, one end of the guide shaft (802) is connected and fixedly provided with a spring (803), and the other end of the spring (803) is connected to the rotating frame (7). The U-shaped frame (801) is fixedly provided with a transmission rod (804) rotatably connected thereto, and a plurality of silicon wafer driving wheels (805) are fixedly connected thereto in a linear structure, one end of the U-shaped frame (801) is fixedly provided with a motor cover (806), a motor (807) is fixedly installed in the motor cover (806), an output end of the motor (807) is fixedly connected to one end of the transmission rod (804), and a protective cover (9) is slidably provided on the silicon wafer basket seat (2).

2. A large-size silicon wafer basket structure according to claim 1, characterized in that: A push handle (101) is fixedly connected to one side of the movable seat (1), a plurality of plug holes (102) are provided on the movable seat (1), and a plurality of brake wheels (103) are installed at the bottom of the movable seat (1).

3. The large-size silicon wafer basket structure according to claim 1, characterized in that: A plurality of plug-in rods (201) are fixedly connected to the bottom of the silicon wafer flower basket seat (2); the bottom ends of the plug-in rods (201) are arranged in a conical structure; the plug-in rods (201) are movably plugged into the plug holes (102); a bending guide groove (202) is provided on one side of the silicon wafer flower basket seat (2); handles (203) are fixedly connected to both sides of the silicon wafer flower basket seat (2); and the bottom end of the silicon wafer flower basket seat (2) is arranged in an inclined structure.

4. The large-size silicon wafer basket structure according to claim 1, characterized in that: The adjustable silicon wafer limiting mechanism (4) comprises a bidirectional screw rod (401), the bidirectional screw rod (401) is rotatably connected to the silicon wafer basket seat (2), one end of the bidirectional screw rod (401) is connected and fixedly provided with a handle (402), a plurality of groups of bidirectional threads are provided on the bidirectional screw rod (401) in a linear structure, a plurality of groups of silicon wafer limiting plates (403) are provided on the bidirectional screw rod (401) in a linear structure and threadedly connected, both ends of the silicon wafer limiting plates (403) are slidably matched with the placement roller (3), a scale (404) is connected and fixedly provided on the silicon wafer limiting plates (403) on the side close to the handle (402), and the scale (404) is slidably matched with the silicon wafer basket seat (2).

5. The large-size silicon wafer basket structure according to claim 1, characterized in that: A guide head (901) is fixedly connected to the bottom end of one side of the protective cover (9), and the guide head (901) is slidably matched with the bending guide groove (202). A slide bar (902) is fixedly connected to the protective cover (9), and a movable frame (903) is slidably matched with the slide bar (902). An electric push rod B (904) is fixedly connected to the bottom of the movable frame (903), and the other end of the electric push rod B (904) is fixedly connected to the silicon wafer basket seat (2).

Images