Leveling platform and leveling method thereof

Abstract

The invention relates to a leveling platform and a leveling method thereof.The leveling platform comprises a supporting plate with a supporting plane and a leveling system, the leveling system comprises at least three leveling mechanisms and a parallelism detection assembly, and the at least three leveling mechanisms are distributed in the datum plane at intervals and are not located on the same straight line; the leveling mechanism comprises a supporting seat, a leveling seat and a driving mechanism, the driving mechanism is connected with the leveling seat and the supporting seat and used for driving the leveling seat to move relative to the supporting seat in the first linear direction perpendicular to the reference plane, and the supporting plate is supported on the leveling seat and supported by the leveling seat through an elastic piece. The parallelism detection assembly is used for detecting the parallelism of the supporting plane and the reference plane. According to the leveling platform, the leveling mechanism and the elastic piece are arranged, the supporting plane can be leveled through the leveling mechanism, the vibration reduction effect is achieved through elastic deformation of the elastic piece, the leveling platform has the leveling and vibration reduction functions, and vibration reduction installation and table top leveling of precision equipment can be achieved.

Description

Technical Field

[0001] The invention relates to the technical field of leveling equipment, and in particular to a leveling platform and a leveling method thereof. Background Art

[0002] Precision equipment has high requirements on the horizontality of the work surface, and the surface needs to be leveled during the vibration reduction installation process of precision equipment.

[0003] How to achieve vibration reduction installation and table leveling of precision equipment is a technical problem that needs to be solved. Summary of the invention

[0004] Based on the above description, the present invention provides a leveling platform and a leveling method thereof to achieve vibration reduction installation and table leveling of precision equipment.

[0005] The technical solution of the present invention to solve the above technical problems is as follows: In the first aspect, the present application provides a leveling platform, and the technical solution adopted is as follows: A leveling platform, comprising: a support plate having a support plane; A leveling system includes at least three leveling mechanisms and a parallelism detection component. At least three of the leveling mechanisms are spaced apart from each other in a reference plane and are not in a straight line. The leveling mechanism includes a support seat, a leveling seat and a driving mechanism. The driving mechanism connects the leveling seat and the support seat and is used to drive the leveling seat to move relative to the support seat along a first straight line direction perpendicular to the reference plane. The support plate is supported on the leveling seat and the leveling seat supports the support plate through an elastic member. The parallelism detection component is used to detect the parallelism of the support plane and the reference plane.

[0006] Preferably, the reference plane includes at least three detection points that are not on a straight line, and the parallelism detection component is used to detect the distance between the at least three detection points and the support plane in the direction of the first straight line.

[0007] Preferably, the parallelism detection component includes displacement sensors fixedly arranged relative to the reference plane, the number of the displacement sensors is the same as the number of the detection points and corresponds one to one, and each of the displacement sensors is used to detect the distance between the corresponding detection point and the support plane.

[0008] Preferably, the parallelism detection component includes a displacement detection member or a deformation detection member, the number of the displacement detection members is the same as the number of the leveling seats and corresponds one to one, the number of the deformation detection members is the same as the number of the elastic members and corresponds one to one, each of the displacement detection members is connected to the corresponding leveling seat and is used to detect the movement speed and movement distance of the leveling seat along the first straight line direction, and each of the deformation detection members is used to detect the deformation of the corresponding elastic member in the first straight line direction.

[0009] Preferably, the parallelism detection component includes a displacement detection component and a deformation amount detection component, the number of the displacement detection components is the same as the number of the leveling seats and corresponds one to one, the number of the deformation amount detection components is the same as the number of the elastic components and corresponds one to one, each of the displacement detection components is connected to the corresponding leveling seat and is used to detect the movement speed and movement distance of the leveling seat along the first straight line direction, and each of the deformation amount detection components is used to detect the deformation amount of the corresponding elastic component in the first straight line direction.

[0010] Preferably, the elastic member is compressed when supporting the support plate, and the deformation detection member includes a pressure sensor, which is arranged between the elastic member and the support plate / the leveling seat, and the pressure sensor is used to detect the pressure between the elastic member and the support plate / the leveling seat.

[0011] Preferably, the driving mechanism includes a power member, a screw rod, a driving gear and a first transmission structure, the screw rod is connected to the support seat and its axis is parallel to the first straight line direction, the leveling seat is threadedly connected to the screw rod and is restricted to rotate with the screw rod, the driving gear is coaxially fixed to the screw rod, the power member is connected to the driving gear through the first transmission structure and is suitable for driving the driving gear to rotate through the first transmission structure, the driving gear is connected to the displacement detection member through the second transmission structure, and the displacement detection member is used to detect the rotation speed and number of rotations of the driving gear.

[0012] Preferably, the leveling system also includes a control device, which is used to control the operation or stop of the driving mechanism, and is suitable for controlling the operation of the driving mechanisms of at least three leveling mechanisms according to the detection results of the parallelism detection component to adjust the parallelism between the supporting plane and the reference plane.

[0013] Preferably, the leveling system comprises four leveling mechanisms, and the four leveling mechanisms are distributed in a rectangular shape in the reference plane.

[0014] In a second aspect, the present application provides a leveling method for leveling the leveling platform as described above, comprising: When the device is placed on the support plate and the support plane is parallel to the reference plane, the difference in deformation amount of any two of the four elastic members of the four leveling mechanisms is within a set range; Alternatively, the leveling system includes four leveling mechanisms, and when the four leveling mechanisms are distributed in a rectangular shape in the reference plane, when the device is placed on the support plate and the support plane is parallel to the reference plane, the sum of the deformation amounts a of the two elastic members in the two leveling mechanisms located at both ends of a diagonal of the rectangle, and the sum of the deformation amounts b of the two elastic members in the two leveling mechanisms located at both ends of the other diagonal of the rectangle, make the difference between a and b within a set range.

[0015] Compared with the prior art, the technical solution of the present application has at least the following beneficial technical effects: 1. The present application supports the support plate by setting at least three leveling mechanisms, and at least three leveling seats respectively support the support plate at different support points, and at least three support points are not in a straight line to stably support the support plate. By moving the leveling seat along the first straight line direction, the distance between the support plate and the support seat at each support point position can be adjusted respectively, so that the distance between the support plane and the reference plane of the support plate can be adjusted to a set value as needed, and the distance between the support plane and the reference plane at multiple support points can be made the same, that is, the support plane and the reference plane can be made parallel. When the reference plane is horizontal, the support plane can be adjusted to be horizontal to achieve the purpose of leveling the support plane. The leveling seat supports the support plate through an elastic member. During leveling, the elastic member is in a deformed state under the action of the gravity of the support plate and the equipment thereon, and the elastic force of the elastic member and the gravity of the support plate and the equipment thereon can reach a balance, which does not affect the leveling of the supporting plane. After leveling, the vibration of the equipment during use can be absorbed by the elastic member, so that the support plate has a vibration reduction function, and even the leveling platform has a vibration reduction function, thereby realizing the vibration reduction installation of precision equipment and table leveling.

[0016] 2. The parallelism detection component of the present application detects the distance between at least three detection points that are not on a straight line and the support plane, and determines whether the support plane is parallel to the reference plane based on whether the at least three distance values ​​are consistent, thereby realizing the detection of the parallelism between the support plane and the reference plane. The detection of the distance between the detection point and the support plane can be realized by a displacement sensor, which has high accuracy and low cost.

[0017] 3. The present application uses a displacement detection member or a deformation detection member in conjunction with a displacement sensor. The displacement detection member detects the displacement of the leveling seat. Based on the displacement and the detection data of the displacement sensor, the deformation of the elastic member can be calculated, and the deformation detection member directly detects the deformation of the elastic member. Therefore, the deformation size of each elastic member can be detected, so that by adjusting the moving distance of each leveling seat in at least three leveling mechanisms, the deformation difference of at least three elastic members is within a suitable range while achieving the purpose of leveling the support plane, thereby ensuring the consistency of the vibration reduction performance of at least three elastic members and the uniformity of the vibration reduction performance of the support plate in the entire support plane.

[0018] 4. The present application cooperates with a displacement detection member and a deformation detection member. The displacement detection member detects the displacement of the leveling seat, and the deformation detection member detects the deformation of the elastic member. According to the distance between the initial position of the leveling seat and the reference plane, the displacement of the leveling seat, the distance between the leveling seat and the support plane when the elastic member is not deformed, and the deformation of the elastic member, the distance between the support plane and the reference plane at each leveling mechanism can be calculated, so as to judge whether the support plane and the reference plane are parallel according to whether at least three distance values ​​are consistent, and realize the detection of the parallelism between the support plane and the reference plane. Therefore, the purpose of leveling the support plane can also be achieved, and the deformation size of each elastic member can be detected. By adjusting the moving distance of each leveling seat in at least three leveling mechanisms, on the premise of achieving the purpose of leveling the support plane, the deformation difference of at least three elastic members can be made within a suitable range, thereby ensuring the consistency of the vibration reduction performance of at least three elastic members and ensuring the uniformity of the vibration reduction performance of the support plate in the entire support plane.

[0019] 5. The present application detects the movement speed of the leveling seat through a displacement detection component. During the leveling process, according to the distance between the supporting plane and the reference plane at each leveling mechanism and the speed of change of the distance, the movement speed of at least three leveling seats can be controlled, so that the distance between the supporting plane and the reference plane at at least three leveling mechanisms and the speed of change of the distance remain consistent or close, thereby avoiding excessive tilting of one side of the supporting plane, ensuring the smooth lifting and lowering of the support plate and the equipment thereon, and ensuring smooth leveling work.

[0020] 6. The present application sets a control device, which controls the operation or stop of the driving mechanism, and is suitable for controlling the operation of the driving mechanisms of at least three leveling mechanisms according to the detection results of the parallelism detection component to adjust the parallelism between the support plane and the reference plane. The detection data of the displacement sensor, the displacement detection member and the deformation detection member are fed back to the control device. The control device controls the operation or stop of the driving mechanisms of at least three leveling mechanisms according to the detection data of the displacement sensor, the displacement detection member and the deformation detection member, and controls the parameters such as the operation speed, so that the support plate and the equipment thereon can be raised and lowered smoothly, and one side of the support plane is prevented from tilting too much, until the support plane is adjusted to be parallel to the reference plane, thereby realizing the automatic adjustment of the horizontality of the support plane on the support plate and realizing the automatic leveling function of the leveling platform.

[0021] 7. In the leveling method of the present application, according to the deformation data of each elastic member, by adjusting the moving distance of each leveling seat in at least three leveling mechanisms, the difference in deformation between any two elastic members is within a set range under the premise of achieving the purpose of leveling the support plane, so as to ensure the consistency of the vibration reduction performance of the elastic members, thereby ensuring the uniformity of the vibration reduction performance of the support plate in the entire support plane. Alternatively, the difference between a and b can be within a set range to ensure the consistency of the vibration reduction performance of the support plate at each position in the support plane as much as possible, thereby achieving a better vibration reduction effect during the operation of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 A schematic diagram of the structure of a leveling platform provided in an embodiment of the present invention; Figure 2 A side view schematic diagram of a leveling platform provided in an embodiment of the present invention; Figure 3 A schematic diagram of the structure of a leveling mechanism in a leveling platform provided in an embodiment of the present invention; Figure 4 A schematic diagram of the structure of a bottom plate in a leveling platform provided in an embodiment of the present invention; Figure 5 A schematic diagram of the installation of a pressure sensor in a leveling platform provided in an embodiment of the present invention.

[0023] Description of reference numerals: 1. Support plate; 11. Support plane; 12. Reference block; 2. Leveling mechanism; 21. Support seat; 211. Guide rod; 22. Leveling seat; 221. Limit rod; 222. Limit groove; 223. Support ring; 23. Driving mechanism; 231. Motor; 232. Screw rod; 233. Driving gear; 234. First transmission structure; 235. Potentiometer; 236. Second transmission structure; 24. Elastic member; 3. Reference plane; 4. Parallelism detection assembly; 41. Displacement sensor; 5. Limit block; 51. Damping rubber block; 52. Support block; 6. Pressure sensor; 7. Bottom plate; 71. Positioning hole. DETAILED DESCRIPTION

[0024] In order to facilitate understanding of the present application, the present application will be described more fully below with reference to the relevant drawings. Embodiments of the present application are provided in the drawings. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present application more thorough and comprehensive.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application.

[0026] It will be appreciated that spatial relationship terms such as "under," "beneath," "below," "under," "above," "above," etc., may be used herein to describe the relationship of an element or feature shown in the figures to other elements or features. It will be appreciated that, in addition to the orientations shown in the figures, spatial relationship terms also include different orientations of the device in use and operation. For example, if the device in the accompanying drawings is flipped, an element or feature described as "under other elements" or "under it" or "under it" will be oriented as being "above" the other elements or features. Thus, the exemplary terms "under" and "under" may include both upper and lower orientations. In addition, the device may also include additional orientations (e.g., rotated 90 degrees or other orientations), and the spatial descriptors used herein are interpreted accordingly.

[0027] It should be noted that when an element is considered to be "connected" to another element, it can be directly connected to the other element, or connected to the other element through an intermediate element. The "connection" in the following embodiments should be understood as "electrical connection", "communication connection", etc. if the connected circuits, modules, units, etc. have electrical signals or data transmission between each other.

[0028] When used herein, the singular forms "a", "an", and "said / the" may also include plural forms, unless the context clearly indicates otherwise. It should also be understood that the terms "include / comprise" or "have" etc. specify the presence of stated features, wholes, steps, operations, components, parts or combinations thereof, but do not exclude the possibility of the presence or addition of one or more other features, wholes, steps, operations, components, parts or combinations thereof.

[0029] Reference Figure 1-5 As shown, an embodiment of the present application provides a leveling platform, which includes a support plate 1 and a leveling system, the support plate 1 has a support plane 11, the leveling system includes at least three leveling mechanisms 2 and a parallelism detection component 4, at least three leveling mechanisms 2 are distributed in a reference plane 3 at intervals and are not in a straight line, the leveling mechanism 2 includes a support seat 21, a leveling seat 22 and a driving mechanism 23, the driving mechanism 23 connects the leveling seat 22 and the support seat 21, and is used to drive the leveling seat 22 to move relative to the support seat 21 along a first straight line direction perpendicular to the reference plane 3, the support plate 1 is supported on the leveling seat 22 and the leveling seat 22 supports the support plate 1 through an elastic member 24, and the parallelism detection component 4 is used to detect the parallelism of the support plane 11 and the reference plane 3.

[0030] The support plate 1 is used as a mounting platform for the equipment. When the support plate 1 is supported on the leveling seat 22, the support plane 11 is away from the leveling seat 22. In this embodiment, the reference plane 3 is horizontal for illustration. The support plate 1 is located above the leveling seat 22 and the support plane 11 is arranged upward. The purpose of leveling is to adjust the support plane 11 to a horizontal level.

[0031] In this embodiment, the support seat 21 is plate-shaped and horizontally arranged, and the top surface of the support seat 21 is coplanar with the reference plane 3. The driving mechanism 23 includes a power member and a driving structure, the power member is connected to the leveling seat 22 through the driving structure and is suitable for driving the leveling seat 22 to move along the first straight line direction through the driving structure.

[0032] Reference Figure 1-3 As shown, the power member adopts a motor 231, and the driving structure includes a screw rod 232, a driving gear 233 and a first transmission structure 234. The screw rod 232 is connected to the support seat 21 and its axis is parallel to the first straight line direction. The leveling seat 22 is threadedly connected to the screw rod 232 and is restricted to rotate with the screw rod 232. The driving gear 233 is coaxially fixed with the screw rod 232. The power member is connected to the driving gear 233 through the first transmission structure 234 and is suitable for driving the driving gear 233 to rotate through the first transmission structure 234.

[0033] Reference Figure 3As shown, specifically, the axis of the screw rod 232 is perpendicular to the reference plane 3, and the screw rod 232 is rotatably connected to the support seat 21. The first transmission structure 234 adopts gear transmission, and in order to achieve precise control of the moving speed and displacement of the leveling seat 22, the first transmission structure 234 adopts a reduction gear set to reduce the output power of the motor 231 and transmit it to the driving gear 233. For example, the reduction gear set may include a first driving gear and a first driven gear fixed coaxially, a second driving gear and a second driven gear fixed coaxially, and an output gear fixed coaxially with the output shaft of the motor 231, the diameter of the first driving gear is larger than the diameter of the first driven gear and larger than the diameter of the output gear, the diameter of the second driving gear is larger than the diameter of the second driven gear, the output gear is meshed with the first driving gear, the first driven gear is meshed with the second driving gear, and the second driven gear is meshed with the driving gear 233, so that the purpose of reducing the output power of the motor 231 and transmitting it to the driving gear 233 can be achieved.

[0034] Reference Figure 3 As shown, in order to achieve the purpose of limiting the leveling seat 22 to rotate with the screw rod 232, in this embodiment, a limiting rod 221 is connected to the leveling seat 22, and the axis of the limiting rod 221 is perpendicular to the axis of the screw rod 232, and two guide rods 211 are arranged on the support seat 21, and the axis of the guide rod 211 is parallel to the axis of the screw rod 232. The two guide rods 211 are arranged at intervals and the limiting rod 221 extends between the two guide rods 211. The interval distance between the two guide rods 211 is consistent with the diameter of the limiting rod 221 or slightly larger than the diameter of the limiting rod 221, so that the limiting rod 221 is limited to rotate with the leveling seat 22 by the two guide rods 211, and then the leveling seat 22 is limited to rotate relative to the screw rod 232, so that when the screw rod 232 rotates, the leveling seat 22 can be driven to move relative to the support seat 21 along the axial direction of the screw rod 232, that is, the first straight line direction.

[0035] Reference Figure 3 As shown, in order to stably support the support plate 1 through the elastic member 24, the leveling seat 22 is sleeved outside the screw rod 232, and a limiting groove 222 surrounding the screw rod 232 is provided on the side of the leveling seat 22 away from the support seat 21, and the limiting groove 222 is coaxially arranged with the screw rod 232. The elastic member 24 is a spring, which is coaxially sleeved outside the screw rod 232 and one end of which is embedded in the limiting groove 222. At the same time, a limiting block 5 is provided at the other end of the spring, and the limiting block 5 is cylindrical and has a groove body for the spring to be embedded in one end face. The end of the spring away from the leveling seat 22 is embedded in the groove body and the spring and the limiting block 5 are coaxial. The spring is restricted to move relative to the leveling seat 22 and the limiting block 5 in the radial direction, and contacts with the support plate 1 through the limiting block 5 to increase the contact area, so that the support plate 1 can be stably supported.

[0036] Reference Figure 3As shown, in this embodiment, the end face of the limit block 5 away from the spring is connected to the support block 52 through the damping rubber block 51, and the side of the support block 52 away from the damping rubber block is in contact with the support plate 1 and fixed to the support plate 1, thereby ensuring that the support plate 1 is stably supported on the spring through the cooperation of the limit block 5, the support block 52 and the damping rubber block 51, and the damping rubber block 51 can further improve the vibration reduction effect.

[0037] Reference Figure 4 As shown, in this embodiment, the support plate 1 is supported on the leveling system through the base plate 7. The base plate 7 is located between the support plate 1 and the leveling system. The base plate 7 and the support plate 1 are attached to and fixed to each other. A positioning hole 71 is provided on the base plate 7 for the support block 52 to pass through. The support block 52 passes through the positioning hole 71 and is fixed to the support plate 1.

[0038] Through the above arrangement, the support plate 1 can be stably supported by at least three leveling mechanisms 2, and the height and levelness of the support plate 1 can be adjusted.

[0039] In order to achieve the purpose of the parallelism detection component 4 detecting the parallelism between the supporting plane 11 and the reference plane 3, in the first implementation of this embodiment, the reference plane 3 includes at least three detection points that are not on a straight line, and the parallelism detection component 4 is used to detect the distance between the at least three detection points and the supporting plane 11 in the direction of the first straight line.

[0040] Reference Figure 1-2 As shown, in this embodiment, the parallelism detection component 4 includes a displacement sensor 41 fixedly arranged relative to the reference plane 3, the number of the displacement sensors 41 is the same as the number of detection points and corresponds one to one, and each displacement sensor 41 is used to detect the distance between the corresponding detection point and the support plane 11.

[0041] Through this arrangement, the principle of determining a plane by three points is utilized, and the distances between at least three detection points on the reference plane 3 and the supporting plane 11 are detected by at least three displacement sensors 41, so as to control the operation of the driving mechanisms 23 of the three leveling mechanisms 2, adjust the spacing between the leveling seat 22 and the supporting seat 21, and make the distances between the at least three detection points and the supporting plane 11 remain consistent, thereby achieving the purpose of adjusting the supporting plane 11 to be parallel to the reference plane 3, that is, achieving the leveling of the supporting plane 11.

[0042] Reference Figure 1-2 As shown, in order to achieve the relative fixation of the displacement sensor 41 and the reference plane 3, the number of the displacement sensors 41 is the same as the number of the leveling mechanisms 2 and corresponds one to one, and each displacement sensor 41 is connected to the support seat 21 of the corresponding leveling mechanism 2. That is, the displacement sensor 41 is fixed on the support seat 21, and the relative fixed setting of the displacement sensor 41 and the reference plane 3 is achieved.

[0043] Reference Figure 2 and Figure 4 As shown, specifically, a reference block 12 is provided on the support plate 1 at a position corresponding to each detection point, the reference block 12 includes a reference plane parallel to the reference plane 3 and spaced apart by a set distance, and the displacement sensor 41 detects the distance to the reference plane to indirectly detect the distance between the support plane 11 and the detection point on the reference plane 3.

[0044] Since the distances between the center of gravity of the device and at least three leveling mechanisms 2 are different when the device is placed on the support plate 1, the deformation amounts of at least three elastic members 24 may be different after the support plane 11 is leveled, which may cause the vibration reduction performance of the support plate 1 at different positions in the entire support plane 11 to be quite different. In order to solve this problem, in the first embodiment, the parallelism detection component 4 also includes a displacement detection member and / or a deformation detection member, the number of the displacement detection members is the same as the number of the leveling seats 22 and corresponds one-to-one, the number of the deformation detection members is the same as the number of the elastic members 24 and corresponds one-to-one, each displacement detection member is connected to the corresponding leveling seat 22 and is used to detect the moving speed and moving distance of the leveling seat 22 along the first straight line direction, and each deformation detection member is used to detect the deformation amount of the corresponding elastic member 24 in the first straight line direction.

[0045] Specifically, when only the displacement detection element is set, refer to Figure 3 As shown, the displacement detection member is connected to the driving gear 233 through the second transmission structure 236, and the displacement detection member is used to detect the rotation speed and the number of rotations of the driving gear 233. The displacement detection member can be a potentiometer 235, specifically a rotary potentiometer 235, on whose rotating shaft an input gear is coaxially fixedly connected, and the second transmission structure 236 includes a coaxially fixed third driving gear and a third driven gear, the diameter of the third driving gear is larger than the diameter of the third driven gear, and the diameter of the third driven gear is smaller than the diameter of the input gear, the third driving gear is meshed with the driving gear 233, and the third driven gear is meshed with the input gear, so that when the driving gear 233 rotates, the second transmission structure 236 can be used to drive the input gear and the rotating shaft of the potentiometer 235 to rotate, so as to detect the rotation speed and the number of rotations of the driving gear 233 through the potentiometer 235, and the moving speed and moving distance of the leveling seat 22 can be obtained according to the detection data and parameters such as the pitch of the screw rod 232, so as to realize the detection of the moving speed and moving distance of the leveling seat 22.

[0046] When setting only the deformation detection part, refer to Figure 5 As shown, since the elastic member 24 is compressed when supporting the support plate 1, the deformation amount detection member is a pressure sensor 6 disposed between the elastic member 24 and the support plate 1 / leveling seat 22, and the pressure sensor 6 is used to detect the pressure between the elastic member 24 and the support plate 1 / leveling seat 22. The compression amount of the spring can be calculated based on the detection data of the pressure sensor 6 and parameters such as the elastic coefficient of the spring.

[0047] Reference Figure 5 As shown, the pressure sensor 6 adopts a strain gauge pressure sensor and is arranged in the limit groove 222. Specifically, a support ring 223 is provided in the limit groove 222. The support ring 223 is coaxially arranged with the limit groove 222. The spring is supported on the support ring 223, and the pressure sensor 6 is arranged between the support ring 223 and the bottom of the limit groove 222 to detect the pressure between the support ring 223 and the leveling seat 22 through the pressure sensor 6, that is, to detect the pressure between the elastic member 24 and the support plate 1.

[0048] By separately setting a displacement detection member or a deformation detection member, when the displacement detection member or the deformation detection member cooperates with the displacement sensor 41 respectively, the displacement detection member detects the displacement of the leveling seat 22, and the deformation of the elastic member 24 can be calculated based on the displacement and the detection data of the displacement sensor 41, and the deformation detection member directly detects the deformation of the elastic member 24. Therefore, the deformation size of each elastic member 24 can be detected during leveling, and by adjusting the moving distance of each leveling seat 22 in at least three leveling mechanisms 2, the deformation difference of at least three elastic members 24 is within a suitable range under the premise of achieving the purpose of leveling the support plane 11, thereby ensuring the consistency of the vibration reduction performance of at least three elastic members 24, and ensuring the uniformity of the vibration reduction performance of the support plate 1 in the entire support plane 11.

[0049] In the first embodiment, a displacement detection member and a deformation detection member can also be set at the same time. At this time, the deformation of the elastic member 24 is detected by the deformation detection member, and the displacement detection member detects the movement speed of the leveling seat 22, so that in the leveling process, according to the distance between the support plane 11 and the reference plane 3 at each leveling mechanism 2 and the speed of change of the distance, the movement speed of at least three leveling seats 22 is controlled, so that the distance between the support plane 11 and the reference plane 3 at at least three leveling mechanisms 2 and the speed of change of the distance are kept consistent or close, thereby avoiding excessive tilting of one side of the support plane 11, ensuring the smooth lifting and lowering of the support plate 1 and the equipment thereon, and ensuring the smooth progress of the leveling work. In the drawings of this embodiment, the first embodiment is illustrated by including both a displacement detection member and a deformation detection member.

[0050] In the second implementation of the present embodiment, the parallelism detection assembly 4 only includes the displacement detection member and the deformation detection member as described above. In the second implementation, the displacement detection member detects the displacement of the leveling seat 22, and the deformation detection member detects the deformation of the elastic member 24. According to the distance between the initial position of the leveling seat 22 and the reference plane 3, the displacement of the leveling seat 22, the distance between the leveling seat 22 and the support plane 11 when the elastic member 24 is not deformed, the deformation of the elastic member 24 and other parameters, the distance between the support plane 11 and the reference plane 3 at each leveling mechanism 2 can be calculated, so as to judge whether the support plane 11 is parallel to the reference plane 3 according to whether at least three distance values ​​are consistent, so as to realize the detection of the parallelism between the support plane 11 and the reference plane 3. Therefore, the purpose of leveling the support plane 11 can also be achieved, and the deformation amount of each elastic member 24 can be detected. By adjusting the moving distance of each leveling seat 22 in at least three leveling mechanisms 2, the deformation amount difference of at least three elastic members 24 can be made within a suitable range under the premise of achieving the purpose of leveling the support plane 11, thereby ensuring the consistency of the vibration reduction performance of at least three elastic members 24 and ensuring the uniformity of the vibration reduction performance of the support plate 1 in the entire support plane 11. Since the structure of the displacement detection member and the deformation amount detection member is the same as that of the first embodiment described above, they will not be described in detail here, and will not be separately illustrated in the drawings.

[0051] Furthermore, in this embodiment, the leveling system further includes a control device, which is used to control the operation or stop of the driving mechanism 23, and is suitable for controlling the operation of the driving mechanisms 23 of at least three leveling mechanisms 2 to adjust the parallelism between the support plane 11 and the reference plane 3 according to the detection result of the parallelism detection component 4. Specifically, the displacement sensor 41, the motor 231, the displacement detection element, and the deformation detection element are all electrically connected to the control device, and the detection data are fed back to the control device. The control device receives and processes the feedback data, and controls the running speed of the motor 231 in at least three leveling mechanisms 2 according to the feedback data, so that the moving speed and moving displacement of the support plane 11 at each leveling mechanism 2 relative to the reference plane 3 are consistent or close, so that the support plate 1 and the equipment thereon are smoothly raised and lowered, and one side of the support plane 11 is prevented from tilting too much, until the distance between each detection point and the support plane 11 reaches the set value, the motor 231 is controlled to stop running, that is, the support plane 11 is adjusted to be parallel to the reference plane 3, so that the horizontality of the support plane 11 on the support plate 1 can be automatically adjusted, and the automatic leveling function of the leveling platform can be realized. The control device is not shown in the drawings of this embodiment, and the above process can be implemented through a set control program as needed. The specific program is not within the scope of protection of this application and will not be described here.

[0052] In this embodiment, four leveling mechanisms 2 are provided for illustration, and the four leveling mechanisms 2 are distributed in a rectangular shape.

[0053] This embodiment also provides a leveling method for leveling the leveling platform, including: When the device is placed on the support plate 1 and the support plane 11 is parallel to the reference plane 3, the difference in deformation between any two elastic members 24 of the four leveling mechanisms 2 is within a set range. For example, the difference can be set within a range of 1-5 mm, preferably 2 mm.

[0054] Alternatively, the leveling system includes four leveling mechanisms 2, and when the four leveling mechanisms 2 are distributed in a rectangular shape in the reference plane 3, when the device is placed on the support plate 1 and the support plane 11 is parallel to the reference plane 3, the sum of the deformation amounts a of the two elastic members 24 in the two leveling mechanisms 2 located at both ends of one diagonal of the rectangle among the four leveling mechanisms 2, and the sum of the deformation amounts b of the two elastic members 24 in the two leveling mechanisms 2 located at both ends of another diagonal of the rectangle, make the difference between a and b within a set range. For example, the difference between a and b is within the range of 1-5 mm, preferably 2 mm.

[0055] During actual leveling, according to the deformation data of the elastic member 24, by controlling the moving distance of each leveling seat 22, the deformation difference between any two elastic members 24 can be made within a set range under the premise of achieving the purpose of leveling the support plane 11, thereby ensuring the consistency of the vibration reduction performance of the elastic member 24, thereby ensuring the uniformity of the vibration reduction performance of the support plate 1 in the entire support plane 11. Alternatively, when the leveling system includes four leveling mechanisms 2, and the four leveling mechanisms 2 are distributed in a rectangular shape in the reference plane 3, the difference between a and b can be made within a set range to ensure the consistency of the vibration reduction performance of the support plate 1 at each position in the support plane 11 as much as possible, thereby achieving a better vibration reduction effect during the operation of the equipment.

[0056] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A leveling platform, characterized in that: include: A support plate (1) having a support plane (11); A leveling system comprises at least three leveling mechanisms (2) and a parallelism detection assembly (4), wherein at least three leveling mechanisms (2) are spaced apart from each other in a reference plane (3) and are not on a straight line, wherein the leveling mechanism (2) comprises a support seat (21), a leveling seat (22) and a driving mechanism (23), wherein the driving mechanism (23) connects the leveling seat (22) and the support seat (21) and is used to drive the leveling seat (22) to move relative to the support seat (21) along a first straight line direction perpendicular to the reference plane (3), wherein the support plate (1) is supported on the leveling seat (22) and the leveling seat (22) supports the support plate (1) via an elastic member (24), and the parallelism detection assembly (4) is used to detect the parallelism between the support plane (11) and the reference plane (3).

2. The leveling platform according to claim 1, characterized in that: The reference plane (3) comprises at least three detection points which are not on a straight line, and the parallelism detection component (4) is used to detect the distance between the at least three detection points and the support plane (11) in the direction of a first straight line.

3. The leveling platform according to claim 2, characterized in that: The parallelism detection component (4) comprises a displacement sensor (41) fixedly arranged relative to the reference plane (3); the number of the displacement sensors (41) is the same as the number of the detection points and corresponds one to one; each displacement sensor (41) is used to detect the distance between the corresponding detection point and the support plane (11).

4. The leveling platform according to claim 2 or 3, characterized in that: The parallelism detection component (4) comprises a displacement detection member or a deformation detection member, the number of the displacement detection members is the same as the number of the leveling seats (22) and corresponds one to one, the number of the deformation detection members is the same as the number of the elastic members (24) and corresponds one to one, each of the displacement detection members is connected to the corresponding leveling seat (22) and is used to detect the moving speed and moving distance of the leveling seat (22) along a first straight line direction, and each of the deformation detection members is used to detect the deformation of the corresponding elastic member (24) in the first straight line direction.

5. The leveling platform according to any one of claims 1 to 3, characterized in that: The parallelism detection component (4) comprises a displacement detection member and a deformation detection member, the number of the displacement detection members is the same as the number of the leveling seats (22) and corresponds one to one, the number of the deformation detection members is the same as the number of the elastic members (24) and corresponds one to one, each of the displacement detection members is connected to the corresponding leveling seat (22) and is used to detect the moving speed and moving distance of the leveling seat (22) along a first straight line direction, and each of the deformation detection members is used to detect the deformation of the corresponding elastic member (24) in the first straight line direction.

6. The leveling platform according to claim 4, characterized in that: The elastic member (24) is compressed when supporting the support plate (1), and the deformation detection member comprises a pressure sensor (6). The pressure sensor (6) is arranged between the elastic member (24) and the support plate (1) / the leveling seat (22), and the pressure sensor (6) is used to detect the pressure between the elastic member (24) and the support plate (1) / the leveling seat (22).

7. The leveling platform according to claim 4, characterized in that: The driving mechanism (23) comprises a power piece, a screw rod (232), a driving gear (233) and a first transmission structure (234); the screw rod (232) is connected to the support seat (21) and its axis is parallel to the first straight line direction; the leveling seat (22) is threadedly connected to the screw rod (232) and is restricted to rotate along with the screw rod (232); the driving gear (233) is coaxially fixed to the screw rod (232); the power piece is connected to the driving gear (233) through the first transmission structure (234) and is suitable for driving the driving gear (233) to rotate through the first transmission structure (234); the driving gear (233) is connected to the displacement detection piece through the second transmission structure (236); the displacement detection piece is used to detect the rotation speed and the number of rotations of the driving gear (233).

8. The leveling platform according to claim 1, characterized in that: The leveling system further comprises a control device, which is used to control the operation or stop of the driving mechanism (23), and is suitable for controlling the operation of the driving mechanisms (23) of at least three leveling mechanisms (2) according to the detection result of the parallelism detection component (4) to adjust the parallelism between the support plane (11) and the reference plane (3).

9. The leveling platform according to claim 1, characterized in that: The leveling system comprises four leveling mechanisms (2), and the four leveling mechanisms (2) are distributed in a rectangular shape in a reference plane (3).

10. A leveling method, used for leveling a leveling platform as claimed in any one of claims 1 to 9, characterized in that: include: When the device is placed on the support plate (1) and the support plane (11) is parallel to the reference plane (3), the difference in deformation amount between any two of the four elastic members (24) of the four leveling mechanisms (2) is within a set range; Alternatively, the leveling system comprises four leveling mechanisms (2), and when the four leveling mechanisms (2) are distributed in a rectangular shape in the reference plane (3), when the device is placed on the support plate (1) and the support plane (11) is parallel to the reference plane (3), the sum a of the deformation amounts of the two elastic members (24) in the two leveling mechanisms (2) located at the two ends of a diagonal of the rectangle among the four leveling mechanisms (2) and the sum b of the deformation amounts of the two elastic members (24) in the two leveling mechanisms (2) located at the two ends of another diagonal of the rectangle are such that the difference between a and b is within a set range.

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