A leveling platform and its leveling method

Abstract

The present invention relates to a leveling platform and a leveling method thereof. The leveling platform includes: a support plate having a support plane and a leveling system. The leveling system includes at least three leveling mechanisms and a parallelism detection component. The at least three leveling mechanisms are spaced apart from each other within a reference plane and are not on a straight line. Each leveling mechanism includes a support base, a leveling base, and a driving mechanism. The driving mechanism is connected to the leveling base and the support base, and is configured to drive the leveling base to move relative to the support base along a first linear direction perpendicular to the reference plane. The support plate is supported on the leveling base, and the leveling base supports the support plate through an elastic member. The parallelism detection component is used to detect the parallelism between the support plane and the reference plane. By providing the leveling mechanism and the elastic member, the present application can level the support plane through the leveling mechanism, and the elastic deformation of the elastic member can play a vibration damping effect, enabling the leveling platform to have the functions of leveling and vibration damping, and realizing the vibration damping installation and tabletop leveling of precision equipment.

Description

Technical Field

[0001] The present invention relates to the technical field of leveling equipment, and particularly relates to a leveling platform and a leveling method thereof. Background Art

[0002] Precision equipment has high requirements for the flatness of the workbench surface, and the tabletop needs to be leveled during the vibration damping installation of precision equipment.

[0003] How to achieve the vibration damping installation of precision equipment and the leveling of the tabletop is a technical problem to be solved. Summary of the Invention

[0004] Based on the above description, the present invention provides a leveling platform and a leveling method thereof to achieve the vibration damping installation of precision equipment and the leveling of the tabletop.

[0005] The technical solution of the present invention to solve the above technical problems is as follows:

[0006] In a first aspect, the present application provides a leveling platform, and the technical solution adopted is as follows:

[0007] A leveling platform includes:

[0008] A support plate having a support plane;

[0009] A leveling system includes at least three leveling mechanisms and a parallelism detection component. The at least three leveling mechanisms are spaced apart from each other in a reference plane and are not on a straight line. The leveling mechanism includes a support base, a leveling base, and a driving mechanism. The driving mechanism connects the leveling base and the support base and is used to drive the leveling base to move relative to the support base along a first straight line direction perpendicular to the reference plane. The support plate is supported on the leveling base, and the leveling base supports the support plate through an elastic member. The parallelism detection component is used to detect the parallelism between the support plane and the reference plane.

[0010] Preferably, the reference plane includes at least three detection points that are not on a straight line, and the parallelism detection component is used to detect the distances between the at least three detection points and the support plane in the first straight line direction.

[0011] Preferably, the parallelism detection component includes displacement sensors fixedly arranged relative to the reference plane. The number of displacement sensors is the same as the number of detection points and they are in one-to-one correspondence. Each displacement sensor is used to detect the distance between the corresponding detection point and the support plane.

[0012] Preferably, the parallelism detection component includes a displacement detection component or a deformation amount detection component. The number of the displacement detection components is the same as and corresponds one by one to the number of the leveling seats. The number of the deformation amount detection components is the same as and corresponds one by one to the number of the elastic members. Each of the displacement detection components is connected to the corresponding leveling seat and is used to detect the moving speed and moving distance of the leveling seat along the first straight line direction. Each of the deformation amount detection components is used to detect the deformation amount of the corresponding elastic member in the first straight line direction.

[0013] Preferably, the parallelism detection component includes a displacement detection component and a deformation amount detection component. The number of the displacement detection components is the same as and corresponds one by one to the number of the leveling seats. The number of the deformation amount detection components is the same as and corresponds one by one to the number of the elastic members. Each of the displacement detection components is connected to the corresponding leveling seat and is used to detect the moving speed and moving distance of the leveling seat along the first straight line direction. Each of the deformation amount detection components is used to detect the deformation amount of the corresponding elastic member in the first straight line direction.

[0014] Preferably, when the elastic member supports the support plate, it is compressed. The deformation amount detection component includes a pressure sensor. The pressure sensor is arranged between the elastic member and the support plate / the leveling seat. The pressure sensor is used to detect the pressure between the elastic member and the support plate / the leveling seat.

[0015] Preferably, the driving mechanism includes a power member, a lead screw, a driving gear and a first transmission structure. The lead screw is connected to the support seat and its axis is parallel to the first straight line direction. The leveling seat is in threaded connection with the lead screw and is restricted from rotating with the lead screw. The driving gear is coaxially fixed with the lead screw. The power member is connected to the driving gear through the first transmission structure and is adapted to drive the driving gear to rotate through the first transmission structure. The driving gear is connected to the displacement detection component through a second transmission structure. The displacement detection component is used to detect the rotation speed and the number of rotation turns of the driving gear.

[0016] Preferably, the leveling system further includes a control device. The control device is used to control the operation or stop of the driving mechanism and is adapted to control the driving mechanisms of at least three of the leveling mechanisms to operate according to the detection results of the parallelism detection component so as to adjust the parallelism between the support plane and the reference plane.

[0017] Preferably, the leveling system includes four leveling mechanisms, and the four leveling mechanisms are distributed in a rectangle within the reference plane.

[0018] In a second aspect, the present application provides a leveling method for leveling the leveling platform described above, including:

[0019] When a device is placed on the support plate and the support plane is parallel to the reference plane, the difference in the deformation amounts of any two of the four elastic members of the four leveling mechanisms is within a set range;

[0020] Alternatively, the leveling system includes four leveling mechanisms, and when the four leveling mechanisms are arranged in a rectangular distribution in the reference plane, when a device is placed on the support plate and the support plane is parallel to the reference plane, among the four leveling mechanisms, for the two leveling mechanisms located at both ends of one diagonal of the rectangle, the sum a of the deformation amounts of the two elastic members, and for the two leveling mechanisms located at both ends of the other diagonal of the rectangle, the sum b of the deformation amounts of the two elastic members, the difference between a and b is within a set range.

[0021] Compared with the prior art, the technical solution of the present application has at least the following beneficial technical effects:

[0022] 1. In the present application, at least three leveling mechanisms are provided to support the support plate. At least three leveling seats support the support plate at different support points, and at least three support points are not on a straight line to stably support the support plate. By moving the leveling seat along the first straight line direction, the distance between the support plate and the support seat at each support point can be adjusted respectively, so that the distance between the support plane of the support plate and the reference plane can be adjusted to a set value as needed, and the distances between the support plane and the reference plane at multiple support points are the same, that is, the support plane and the reference plane can be made parallel. When the reference plane is horizontal, the support plane can be adjusted to be horizontal to achieve the purpose of leveling the support plane. The setting that the leveling seat supports the support plate through the elastic member makes the elastic member in a deformed state under the action of the gravity of the support plate and the device thereon during leveling, and the elastic force of the elastic member and the gravity of the support plate and the device thereon can reach equilibrium, which does not affect the leveling of the support plane. And after leveling, the vibration during the use of the device can be absorbed by the elastic member, so that the support plate has a vibration damping function, that is, the leveling platform has a vibration damping function, thereby realizing the vibration damping installation and table leveling of precision equipment.

[0023] 2. The parallelism detection component of the present application detects the distances between at least three detection points that are not on a straight line and the support plane. Whether the support plane is parallel to the reference plane can be judged according to whether at least three distance values are the same, thereby realizing the detection of the parallelism between the support plane and the reference plane. The detection of the distance between the detection point and the support plane can be realized by a displacement sensor, with high precision and low cost.

[0024] 3. In this application, a displacement detection component or a deformation amount detection component is combined with a displacement sensor. The displacement detection component detects the displacement of the leveling seat. Based on this displacement and the detection data of the displacement sensor, the deformation amount of the elastic component can be calculated. The deformation amount detection component directly detects the deformation amount of the elastic component. Therefore, the deformation amount of each elastic component can be detected, and by adjusting the moving distance of each leveling seat in at least three leveling mechanisms, on the premise of achieving the purpose of leveling the support plane, the difference in the deformation amounts of at least three elastic components can be within an appropriate range, thereby ensuring the consistency of the vibration damping performance of at least three elastic components and the uniformity of the vibration damping performance of the support plate across the entire support plane.

[0025] 4. In this application, a displacement detection component and a deformation amount detection component are combined. The displacement detection component detects the displacement of the leveling seat, and the deformation amount detection component detects the deformation amount of the elastic component. Based on the distance between the initial position of the leveling seat and the reference plane, the displacement of the leveling seat, the distance between the leveling seat and the support plane when the elastic component is in the undeformed state, and the deformation amount of the elastic component, the distance between the support plane and the reference plane at each leveling mechanism can be calculated. Thus, it can be determined whether the support plane is parallel to the reference plane based on whether at least three distance values are consistent, achieving the detection of the parallelism between the support plane and the reference plane. Therefore, the purpose of leveling the support plane can also be achieved, and the deformation amount of each elastic component can be detected. By adjusting the moving distance of each leveling seat in at least three leveling mechanisms, on the premise of achieving the purpose of leveling the support plane, the difference in the deformation amounts of at least three elastic components can be within an appropriate range, thereby ensuring the consistency of the vibration damping performance of at least three elastic components and the uniformity of the vibration damping performance of the support plate across the entire support plane.

[0026] 5. In this application, the displacement detection component detects the moving speed of the leveling seat. During the leveling process, based on the distance between the support plane and the reference plane at each leveling mechanism and the changing speed of the distance, the moving speeds of at least three leveling seats can be controlled respectively, so that the distances between the support planes and the reference planes at at least three leveling mechanisms and the changing speeds of the distances are kept consistent or close, thereby preventing one side of the support plane from tilting too much, ensuring the stable lifting of the support plate and the equipment thereon, and ensuring the smooth progress of the leveling work.

[0027] 6. In this application, a control device is provided to control the operation or stop of the driving mechanism, and is adapted to control the driving mechanisms of at least three leveling mechanisms to operate according to the detection results of the parallelism detection component, so as to adjust the parallelism between the support plane and the reference plane. The detection data of the displacement sensor, the displacement detection component and the deformation amount detection component are fed back to the control device. The control device controls the operation or stop of the driving mechanisms of at least three leveling mechanisms according to the detection data of the displacement sensor, the displacement detection component and the deformation amount detection component, and controls parameters such as the running speed, so that the support plate and the equipment thereon can be lifted and lowered smoothly, avoiding excessive inclination on one side of the support plane, until the support plane is adjusted to be parallel to the reference plane, thereby realizing the automatic adjustment of the levelness of the support plane on the support plate and realizing the automatic leveling function of the leveling platform.

[0028] 7. In the leveling method of this application, according to the deformation amount data of each elastic member, by adjusting the moving distance of each leveling seat in at least three leveling mechanisms, on the premise of achieving the purpose of leveling the support plane, the difference in the deformation amounts of any two elastic members is within a set range, ensuring the consistency of the vibration damping performance of the elastic members, and thus ensuring the uniformity of the vibration damping performance of the support plate within the entire support plane. Or the difference between a and b can be within a set range to ensure as much as possible the consistency of the vibration damping performance of the support plate at each position within the support plane, so as to achieve a better vibration damping effect during the operation of the equipment. Description of the Drawings

[0029] Figure 1 It is a schematic structural diagram of the leveling platform provided by an embodiment of the present invention;

[0030] Figure 2 It is a schematic side view of the leveling platform provided by an embodiment of the present invention;

[0031] Figure 3 It is a schematic structural diagram of the leveling mechanism in the leveling platform provided by an embodiment of the present invention;

[0032] Figure 4 It is a schematic structural diagram of the bottom plate in the leveling platform provided by an embodiment of the present invention;

[0033] Figure 5 It is a schematic installation diagram of the pressure sensor in the leveling platform provided by an embodiment of the present invention.

[0034] Description of the Reference Numerals:

[0035] 1. Support plate; 11. Support plane; 12. Reference block; 2. Leveling mechanism; 21. Support base; 211. Guide rod; 22. Leveling base; 221. Limiting rod; 222. Limiting groove; 223. Support ring; 23. Driving mechanism; 231. Motor; 232. Lead screw; 233. Driving gear; 234. First transmission structure; 235. Potentiometer; 236. Second transmission structure; 24. Elastic member; 3. Reference plane; 4. Parallelism detection component; 41. Displacement sensor; 5. Limiting block; 51. Damping rubber block; 52. Support block; 6. Pressure sensor; 7. Bottom plate; 71. Positioning hole. Detailed implementation manner

[0036] To facilitate the understanding of the present application, the present application will be described more comprehensively below with reference to the relevant drawings. Embodiments of the present application are shown in the drawings. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present application more thorough and comprehensive.

[0037] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those of ordinary skill in the technical field to which this application belongs. The terms used in the description of the present application herein are only for the purpose of describing specific embodiments and are not intended to limit the present application.

[0038] It can be understood that spatial relationship terms such as "under", "below", "beneath", "underneath", "above", "upper", etc. can be used herein to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that in addition to the orientation shown in the figure, spatial relationship terms also include different orientations of the device during use and operation. For example, if the device in the drawing is flipped, the element or feature described as "under other elements" or "beneath it" or "under it" will be oriented "above" other elements or features. Therefore, the exemplary terms "under" and "beneath" can include both the upper and lower orientations. In addition, the device may also include other orientations (for example, rotated 90 degrees or other orientations), and the spatial description terms used herein are accordingly interpreted.

[0039] It should be noted that when an element is considered to be "connected" to another element, it can be directly connected to the other element or connected to the other element through an intermediate element. In the following embodiments, "connection" should be understood as "electrical connection", "communication connection", etc. if there is an electrical signal or data transmission between the connected circuits, modules, units, etc.

[0040] As used herein, the singular forms "a", "an" and "the" may also include the plural forms unless the context clearly dictates otherwise. It should also be understood that the terms "comprising", "including" or "having", etc. specify the presence of the stated features, integers, steps, operations, components, parts or combinations thereof, but do not preclude the possibility of the presence or addition of one or more other features, integers, steps, operations, components, parts or combinations thereof.

[0041] Referring to Figures 1-5 As shown, an embodiment of the present application provides a leveling platform, which includes a support plate 1 and a leveling system. The support plate 1 has a support plane 11. The leveling system includes at least three leveling mechanisms 2 and a parallelism detection component 4. The at least three leveling mechanisms 2 are spaced apart from each other in a reference plane 3 and are not on a straight line. The leveling mechanism 2 includes a support base 21, a leveling base 22 and a driving mechanism 23. The driving mechanism 23 connects the leveling base 22 and the support base 21 and is used to drive the leveling base 22 to move relative to the support base 21 along a first straight line direction perpendicular to the reference plane 3. The support plate 1 is supported on the leveling base 22, and the leveling base 22 supports the support plate 1 through an elastic member 24. The parallelism detection component 4 is used to detect the parallelism between the support plane 11 and the reference plane 3.

[0042] Among them, the support plate 1 serves as an installation platform for the device. When it is supported on the leveling base 22, the support plane 11 faces away from the leveling base 22. In this embodiment, for illustration purposes, the reference plane 3 is horizontal. The support plate 1 is located above the leveling base 22 and the support plane 11 is arranged upward. The purpose of leveling is to adjust the support plane 11 to be horizontal.

[0043] In this embodiment, the support base 21 is plate-shaped and horizontally arranged, and the top surface of the support base 21 is coplanar with the reference plane 3. The driving mechanism 23 includes a power member and a driving structure. The power member is connected to the leveling base 22 through the driving structure and is adapted to drive the leveling base 22 to move along the first straight line direction through the driving structure.

[0044] Referring to Figures 1-3 As shown, among them, the power member uses a motor 231, and the driving structure includes a lead screw 232, a driving gear 233 and a first transmission structure 234. The lead screw 232 is connected to the support base 21 and its axis is parallel to the first straight line direction. The leveling base 22 is threadedly connected to the lead screw 232 and is restricted from rotating with the lead screw 232. The driving gear 233 is coaxially fixed to the lead screw 232. The power member is connected to the driving gear 233 through the first transmission structure 234 and is adapted to drive the driving gear 233 to rotate through the first transmission structure 234.

[0045] Referring to Figure 3As shown in the figure, specifically, the axis of the lead screw 232 is perpendicular to the reference plane 3, and the lead screw 232 is rotatably connected to the support base 21. The first transmission structure 234 adopts gear transmission. In order to accurately control the moving speed and displacement of the leveling seat 22, the first transmission structure 234 uses a reduction gear set to reduce the output power of the motor 231 and transmit it to the driving gear 233. For example, the reduction gear set may include a first driving gear and a first driven gear fixed coaxially, a second driving gear and a second driven gear fixed coaxially, and an output gear fixed coaxially with the output shaft of the motor 231. The diameter of the first driving gear is larger than the diameter of the first driven gear and larger than the diameter of the output gear. The diameter of the second driving gear is larger than the diameter of the second driven gear. The output gear meshes with the first driving gear, the first driven gear meshes with the second driving gear, and the second driven gear meshes with the driving gear 233, so as to achieve the purpose of reducing the output power of the motor 231 and transmitting it to the driving gear 233.

[0046] Referring to Figure 3 As shown in the figure, in order to achieve the purpose of restricting the leveling seat 22 from rotating with the lead screw 232, in this embodiment, a limiting rod 221 is connected to the leveling seat 22. The axis of the limiting rod 221 is perpendicular to the axis of the lead screw 232, and two guide rods 211 are arranged on the support base 21. The axes of the guide rods 211 are parallel to the axis of the lead screw 232. The two guide rods 211 are arranged at intervals and the limiting rod 221 extends between the two guide rods 211. The interval distance between the two guide rods 211 is the same as or slightly larger than the diameter of the limiting rod 221. Thus, the rotation of the limiting rod 221 with the leveling seat 22 is restricted by the two guide rods 211, and further the rotation of the leveling seat 22 relative to the lead screw 232 is restricted. Therefore, when the lead screw 232 rotates, the leveling seat 22 can be driven to move relative to the support base 21 along the axial direction of the lead screw 232, that is, the first straight line direction.

[0047] Referring to Figure 3 As shown in the figure, in order to stably support the support plate 1 through the elastic member 24, the leveling seat 22 is sleeved outside the lead screw 232, and a limiting groove 222 surrounding the lead screw 232 is formed on the side of the leveling seat 22 away from the support base 21. The limiting groove 222 is coaxially arranged with the lead screw 232. The elastic member 24 uses a spring. The spring is coaxially sleeved outside the lead screw 232 and one end is embedded in the limiting groove 222. At the same time, a limiting block 5 is arranged at the other end of the spring. The limiting block 5 is cylindrical and a groove for the spring to be embedded is arranged on one end face. One end of the spring away from the leveling seat 22 is embedded in the groove and the spring and the limiting block 5 are coaxially arranged. The spring is restricted from moving radially relative to the leveling seat 22 and the limiting block 5, and contacts the support plate 1 through the limiting block 5 to increase the contact area, so as to stably support the support plate 1.

[0048] Referring to Figure 3As shown, in this embodiment, one end face of the limit block 5 away from the spring is connected with a support block 52 through a damping rubber block 51. One side face of the support block 52 away from the damping rubber block fits against the support plate 1 and is fixed to the support plate 1. Thus, through the cooperation of the limit block 5, the support block 52 and the damping rubber block 51, it is ensured that the support plate 1 is stably supported on the spring, and the damping rubber block 51 can further improve the damping effect.

[0049] Referring to Figure 4 As shown, in this embodiment, the support plate 1 is supported on the leveling system through a bottom plate 7. The bottom plate 7 is located between the support plate 1 and the leveling system. The bottom plate 7 is in contact with and fixedly connected to the support plate 1. A positioning hole 71 for the support block 52 to pass through is provided on the bottom plate 7. The support block 52 passes through the positioning hole 71 and is fixed to the support plate 1.

[0050] Through the above settings, the support plate 1 can be stably supported by at least three leveling mechanisms 2, and the height and levelness of the support plate 1 can be adjusted.

[0051] To achieve the purpose of the parallelism detection component 4 detecting the parallelism between the support plane 11 and the reference plane 3, in the first implementation manner of this embodiment, the reference plane 3 includes at least three detection points not on the same straight line. The parallelism detection component 4 is used to detect the distances between at least three detection points and the support plane 11 in the first straight line direction.

[0052] Referring to Figures 1-2 As shown, in this implementation manner, the parallelism detection component 4 includes displacement sensors 41 fixedly arranged relative to the reference plane 3. The number of displacement sensors 41 is the same as the number of detection points and they are in one-to-one correspondence. Each displacement sensor 41 is used to detect the distance between the corresponding detection point and the support plane 11.

[0053] Through this setting, using the principle that three points determine a plane, the distances between at least three detection points on the reference plane 3 and the support plane 11 are detected by at least three displacement sensors 41, so as to control the operation of the driving mechanisms 23 of the three leveling mechanisms 2, adjust the distance between the leveling seat 22 and the support seat 21, and make the distances between at least three detection points and the support plane 11 consistent, achieving the purpose of adjusting the support plane 11 to be parallel to the reference plane 3, that is, realizing the leveling of the support plane 11.

[0054] Referring to Figures 1-2 As shown, to achieve the relative fixation of the displacement sensor 41 and the reference plane 3, the number of displacement sensors 41 is the same as the number of leveling mechanisms 2 and they are in one-to-one correspondence. Each displacement sensor 41 is connected to the support seat 21 of the corresponding leveling mechanism 2. That is, the displacement sensor 41 is fixed on the support seat 21 to achieve the relative fixed setting of the displacement sensor 41 and the reference plane 3.

[0055] Referring toFigure 2 and Figure 4 As shown in Figure 4 , specifically, reference blocks 12 are provided at positions corresponding to each detection point on the support plate 1. The reference block 12 includes a reference surface parallel to the reference plane 3 and spaced apart by a set distance. The displacement sensor 41 detects the distance to this reference surface to indirectly detect the distance between the support plane 11 and the detection point on the reference plane 3.

[0056] Since the distances from the center of gravity of the device to at least three leveling mechanisms 2 are different when the device is placed on the support plate 1, after the support plane 11 is leveled, the deformation amounts of at least three elastic members 24 may be different, which may result in a large difference in the vibration damping performance at different positions within the entire support plane 11 of the support plate 1. To solve this problem, in this first embodiment, the parallelism detection assembly 4 further includes a displacement detection member and / or a deformation amount detection member. The number of displacement detection members is the same as and corresponds one-to-one to the number of leveling seats 22, and the number of deformation amount detection members is the same as and corresponds one-to-one to the number of elastic members 24. Each displacement detection member is connected to the corresponding leveling seat 22 and is used to detect the moving speed and moving distance of the leveling seat 22 along the first straight line direction, and each deformation amount detection member is used to detect the deformation amount of the corresponding elastic member 24 in the first straight line direction.

[0057] Specifically, when only the displacement detection member is provided, referring to Figure 3 As shown in Figure 3 , the displacement detection member is connected to the driving gear 233 through the second transmission structure 236, and the displacement detection member is used to detect the rotation speed and the number of rotation turns of the driving gear 233. The displacement detection member can adopt a potentiometer 235, specifically a rotary potentiometer 235. An input gear is coaxially and fixedly connected to its rotating shaft. The second transmission structure 236 includes a coaxially fixed third driving gear and a third driven gear. The diameter of the third driving gear is larger than that of the third driven gear, and the diameter of the third driven gear is smaller than that of the input gear. The third driving gear meshes with the driving gear 233, and the third driven gear meshes with the input gear. Thus, when the driving gear 233 rotates, the input gear and the rotating shaft of the potentiometer 235 can be driven to rotate through the second transmission structure 236, so as to detect the rotation speed and the number of rotation turns of the driving gear 233 through the potentiometer 235. The moving speed and moving distance of the leveling seat 22 can be obtained according to the detection data and parameters such as the pitch of the lead screw 232, so as to realize the detection of the moving speed and moving distance of the leveling seat 22.

[0058] When only the deformation amount detection member is provided, referring to Figure 5 As shown in Figure 5 , since the elastic member 24 is compressed when supporting the support plate 1, the deformation amount detection member is a pressure sensor 6 provided between the elastic member 24 and the support plate 1 / leveling seat 22. The pressure sensor 6 is used to detect the pressure between the elastic member 24 and the support plate 1 / leveling seat 22. The compression amount of the spring can be calculated according to the detection data of the pressure sensor 6 and parameters such as the elastic coefficient of the spring.

[0059] Referring to Figure 5 as shown, the pressure sensor 6 adopts a strain gauge type pressure sensor and is arranged in the limit groove 222. Specifically, a support ring 223 is arranged in the limit groove 222. The support ring 223 is coaxially arranged with the limit groove 222. The spring is supported on the support ring 223, and the pressure sensor 6 is arranged between the support ring 223 and the bottom of the leveling seat 22 to detect the pressure between the support ring 223 and the leveling seat 22 through the pressure sensor 6, that is, to detect the pressure between the elastic member 24 and the support plate 1.

[0060] By separately arranging a displacement detection member or a deformation amount detection member, when the displacement detection member or the deformation amount detection member is respectively matched with the displacement sensor 41, the displacement detection member detects the displacement of the leveling seat 22. According to this displacement and the detection data of the displacement sensor 41, the deformation amount of the elastic member 24 can be calculated, and the deformation amount detection member directly detects the deformation amount of the elastic member 24. Therefore, during leveling, the deformation amount of each elastic member 24 can be detected, and by adjusting the moving distance of each leveling seat 22 in at least three leveling mechanisms 2, on the premise of achieving the purpose of leveling the support plane 11, the deformation amount difference of at least three elastic members 24 is within a suitable range, so as to ensure the consistency of the vibration damping performance of at least three elastic members 24 and the uniformity of the vibration damping performance of the support plate 1 within the entire support plane 11.

[0061] In this first embodiment, a displacement detection member and a deformation amount detection member can also be arranged simultaneously. At this time, the deformation amount of the elastic member 24 is detected by the deformation amount detection member, and the displacement detection member detects the moving speed of the leveling seat 22, so as to control the respective moving speeds of at least three leveling seats 22 according to the distance between the support plane 11 and the reference plane 3 at each leveling mechanism 2 and the change speed of the distance during the leveling process, so that the distance and the change speed of the distance between the support plane 11 and the reference plane 3 at at least three leveling mechanisms 2 are kept consistent or close, thereby avoiding excessive inclination on one side of the support plane 11, ensuring the stable lifting of the support plate 1 and the equipment thereon, and ensuring the smooth progress of the leveling work. In the drawings of this embodiment, this first embodiment including both a displacement detection member and a deformation amount detection member is schematically shown.

[0062] In the second implementation manner of this embodiment, the parallelism detection component 4 only includes the displacement detection component and the deformation amount detection component described above. In this second implementation manner, the displacement detection component detects the displacement of the leveling seat 22, and the deformation amount detection component detects the deformation amount of the elastic member 24. According to parameters such as the distance between the initial position of the leveling seat 22 and the reference plane 3, the displacement of the leveling seat 22, the distance between the leveling seat 22 and the support plane 11 when the elastic member 24 is in an undeformed state, and the deformation amount of the elastic member 24, the distance between the support plane 11 and the reference plane 3 at each leveling mechanism 2 can be calculated, so as to determine whether the support plane 11 is parallel to the reference plane 3 according to whether at least three distance values are consistent, and realize the detection of the parallelism between the support plane 11 and the reference plane 3. Therefore, the purpose of leveling the support plane 11 can also be achieved, and the deformation amount of each elastic member 24 can be detected. By adjusting the moving distance of each leveling seat 22 in at least three leveling mechanisms 2, on the premise of achieving the purpose of leveling the support plane 11, the difference in the deformation amounts of at least three elastic members 24 can be made within a suitable range, so as to ensure the consistency of the vibration damping performance of at least three elastic members 24 and the uniformity of the vibration damping performance of the support plate 1 within the entire support plane 11. Since the structures of the displacement detection component and the deformation amount detection component are the same as those in the first implementation manner described above, they will not be elaborated here and will not be shown separately in the drawings.

[0063] Furthermore, in this embodiment, the leveling system further includes a control device. The control device is used to control the driving mechanism 23 to run or stop, and is adapted to control the driving mechanisms 23 of at least three leveling mechanisms 2 to run according to the detection results of the parallelism detection component 4 to adjust the parallelism between the support plane 11 and the reference plane 3. Specifically, the displacement sensor 41, the motor 231, the displacement detection component, and the deformation amount detection component are all electrically connected to the control device. The detection data is fed back to the control device. The control device receives and processes the feedback data, and controls the running speed of the motor 231 in at least three leveling mechanisms 2 according to the feedback data, so that the moving speed and moving displacement of the support plane 11 relative to the reference plane 3 at each leveling mechanism 2 are kept consistent or close, enabling the support plate 1 and the equipment thereon to be lifted and lowered smoothly, avoiding excessive inclination on one side of the support plane 11, and controlling the motor 231 to stop running until the distance between each detection point and the support plane 11 reaches a set value, that is, adjusting the support plane 11 to be parallel to the reference plane 3, thereby realizing the automatic adjustment of the levelness of the support plane 11 on the support plate 1 and the automatic leveling function of the leveling platform. The control device is not shown in the drawings of this embodiment, and the above process can be realized according to a set control program as needed. The specific program is not within the scope of protection of this application, so it will not be elaborated here.

[0064] In this embodiment, four leveling mechanisms 2 are schematically shown, and the four leveling mechanisms 2 are arranged in a rectangular distribution.

[0065] This embodiment also provides a leveling method for leveling the above leveling platform, including:

[0066] When the device is placed on the support plate 1 and the support plane 11 is parallel to the reference plane 3, among the four elastic members 24 of the four leveling mechanisms 2, the difference in the deformation amounts of any two elastic members 24 is within a set range. For example, the difference can be set within the range of 1 - 5 mm, preferably 2 mm.

[0067] Alternatively, when the leveling system includes four leveling mechanisms 2 and the four leveling mechanisms 2 are arranged in a rectangular distribution in the reference plane 3, when the device is placed on the support plate 1 and the support plane 11 is parallel to the reference plane 3, among the four leveling mechanisms 2, for the two leveling mechanisms 2 located at both ends of one diagonal of the rectangle, the sum a of the deformation amounts of the two elastic members 24, and for the two leveling mechanisms 2 located at both ends of the other diagonal of the rectangle, the sum b of the deformation amounts of the two elastic members 24, the difference between a and b is within a set range. For example, the difference between a and b is within the range of 1 - 5 mm, preferably 2 mm.

[0068] During actual leveling, according to the deformation amount data of the elastic members 24, by controlling the moving distance of each leveling seat 22, on the premise of achieving the purpose of leveling the support plane 11, the difference in the deformation amounts of any two elastic members 24 can be within a set range, ensuring the consistency of the vibration damping performance of the elastic members 24, and thus ensuring the uniformity of the vibration damping performance of the support plate 1 within the entire support plane 11. Or when the leveling system includes four leveling mechanisms 2 and the four leveling mechanisms 2 are arranged in a rectangular distribution in the reference plane 3, the difference between a and b can be within a set range to ensure as much as possible the consistency of the vibration damping performance of the support plate 1 at each position within the support plane 11, so as to achieve a better vibration damping effect during the operation of the device.

[0069] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A leveling platform, characterized in that: include: A support plate (1) having a support plane (11); A leveling system, comprising at least three leveling mechanisms (2) and a parallelism detection assembly (4), wherein at least three leveling mechanisms (2) are spaced apart from each other in a reference plane (3) and are not on a straight line, wherein the leveling mechanism (2) comprises a support seat (21), a leveling seat (22) and a driving mechanism (23), wherein the driving mechanism (23) connects the leveling seat (22) and the support seat (21) and is used to drive the leveling seat (22) to move relative to the support seat (21) along a first straight line direction perpendicular to the reference plane (3), wherein the support plate (1) is supported on the leveling seat (22) and the leveling seat (22) supports the support plate (1) via an elastic member (24), and the parallelism detection assembly (4) is used to detect the parallelism between the support plane (11) and the reference plane (3); The reference plane (3) comprises at least three detection points which are not on a straight line, and the parallelism detection component (4) is used to detect the distance between the at least three detection points and the support plane (11) in the direction of a first straight line; The parallelism detection assembly (4) comprises a displacement sensor (41), a displacement detection member and a deformation detection member. The displacement sensor (41) is fixedly arranged relative to the reference plane (3). The number of the displacement sensors (41) is the same as the number of the detection points and corresponds one to one. The number of the displacement detection members is the same as the number of the leveling seats (22) and corresponds one to one. The number of the deformation detection members is the same as the number of the elastic members (24) and corresponds one to one. Each of the displacement sensors (41) is used to detect the distance between the corresponding detection point and the support plane (11). Each of the displacement detection members is connected to the corresponding leveling seat (22) and is used to detect the moving speed and moving distance of the leveling seat (22) along the first straight line direction. Each of the deformation detection members is used to detect the deformation of the corresponding elastic member (24) in the first straight line direction.

2. The leveling platform according to claim 1, characterized in that: The elastic member (24) is compressed when supporting the support plate (1), and the deformation detection member comprises a pressure sensor (6). The pressure sensor (6) is arranged between the elastic member (24) and the support plate (1) or the leveling seat (22), and the pressure sensor (6) is used to detect the pressure between the elastic member (24) and the support plate (1) or the leveling seat (22).

3. The leveling platform according to claim 1, characterized in that: The driving mechanism (23) comprises a power piece, a screw rod (232), a driving gear (233) and a first transmission structure (234); the screw rod (232) is connected to the support seat (21) and its axis is parallel to the first straight line direction; the leveling seat (22) is threadedly connected to the screw rod (232) and is restricted to rotate along with the screw rod (232); the driving gear (233) is coaxially fixed to the screw rod (232); the power piece is connected to the driving gear (233) through the first transmission structure (234) and is suitable for driving the driving gear (233) to rotate through the first transmission structure (234); the driving gear (233) is connected to the displacement detection piece through the second transmission structure (236); the displacement detection piece is used to detect the rotation speed and the number of rotations of the driving gear (233).

4. The leveling platform according to claim 1, characterized in that: The leveling system further comprises a control device, which is used to control the operation or stop of the driving mechanism (23), and is suitable for controlling the operation of the driving mechanisms (23) of at least three leveling mechanisms (2) according to the detection result of the parallelism detection component (4) to adjust the parallelism between the support plane (11) and the reference plane (3).

5. The leveling platform according to claim 1, characterized in that: The leveling system comprises four leveling mechanisms (2), and the four leveling mechanisms (2) are distributed in a rectangular shape in a reference plane (3).

6. A leveling method for leveling a leveling platform as claimed in any one of claims 1 to 5, characterized in that: include: When the device is placed on the support plate (1) and the support plane (11) is parallel to the reference plane (3), the difference in deformation amount between any two of the four elastic members (24) of the four leveling mechanisms (2) is within a set range; Alternatively, the leveling system comprises four leveling mechanisms (2), and when the four leveling mechanisms (2) are distributed in a rectangular shape in the reference plane (3), when the device is placed on the support plate (1) and the support plane (11) is parallel to the reference plane (3), the sum a of the deformation amounts of the two elastic members (24) in the two leveling mechanisms (2) located at the two ends of a diagonal of the rectangle among the four leveling mechanisms (2) and the sum b of the deformation amounts of the two elastic members (24) in the two leveling mechanisms (2) located at the two ends of another diagonal of the rectangle are such that the difference between a and b is within a set range.

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