Air inlet system of batch type ALD equipment reaction cavity

Abstract

The invention belongs to the technical field of coating equipment, particularly relates to a gas inlet system of a batch-type ALD (atomic layer deposition) equipment reaction chamber, and provides the following scheme aiming at the problem of poor coating effect caused by non-uniform distribution of reaction gas in the existing ALD equipment reaction chamber: the gas inlet system comprises a reaction chamber, and a rectangular opening is formed in the outer part of the reaction chamber. According to the gas inlet system of the batch type ALD equipment reaction cavity, the gas inlet pipe I and the gas inlet pipe II which are independently arranged can be utilized, so that each gas corresponds to one passage, advanced reaction is avoided, particles are reduced, the maintenance frequency of a pipeline is reduced, and the maintenance cost is reduced; by means of the diffusion pipe and the flow dividing pipe, gas is transversely diffused through the diffusion pipe, first-stage flow dividing is achieved, then transverse gas is longitudinally diffused through the flow dividing pipe to enter the cavity, second-stage flow dividing is achieved, and after second-stage flow dividing, the gas is distributed in the whole cavity more evenly; and the uniformity difference of upper and lower space film layers can be improved.

Description

Technical Field

[0001] The present invention relates to the technical field of film coating equipment, and in particular to an air intake system of a reaction chamber of a batch type ALD equipment. Background Art

[0002] ALD equipment refers to atomic layer deposition equipment, which is an advanced chemical vapor deposition technology device used to prepare thin film materials. ALD equipment is a high-precision, large-scale, uniform thin film material preparation technology. It has important applications in the fields of electronic device nanotechnology, especially in the chemical vapor deposition process, it can prepare thin films of uniform thickness.

[0003] The reaction chamber space of existing batch-type ALD equipment is relatively large, and all reaction gases enter the chamber through an inlet pipe through a manifold. The manifolds at the inlet are all diverted from the top to the lower space, which may cause a difference in the reaction gas flow rate between the upper space and the lower space, resulting in uneven coating, affecting the properties of the film layer, and ultimately affecting product performance. Summary of the invention

[0004] The present invention discloses an air intake system for a reaction chamber of a batch type ALD device, aiming to solve the technical problem in the background technology that uneven distribution of reaction gas in the reaction chamber of the existing ALD device leads to poor coating effect.

[0005] The present invention proposes an air intake system for a reaction chamber of a batch-type ALD device, comprising a reaction chamber, wherein a rectangular opening is provided on the outside of the reaction chamber, a containing frame is fixedly connected in the rectangular opening, a closing plate is connected to the side of the containing frame away from the reaction chamber via a hinge, and two circular holes are provided on the closing plate, delivery pipes are slidably connected in the circular holes, quick connection modules are provided on the outside of both, air intake pipe one and air intake pipe two are provided in the two quick connection modules respectively, diffusion pipes are connected to the sides of the two delivery pipes close to the reaction chamber via flanges, a fixing frame is fixedly connected to the outside of the diffusion pipes, the outside of the fixing frame is fixedly connected to the inner wall of the containing frame, three equidistantly distributed shunt pipes are provided on the side of the diffusion pipe away from the delivery pipe, the positions of the shunt pipes on the two diffusion pipes are staggered, angle adjustment modules are provided on the diffusion pipes, and the angle adjustment modules are both located in the containing frame.

[0006] By providing a reaction chamber, a containing frame, a closing plate, an air inlet pipe 1, an air inlet pipe 2, a quick connection module, an angle adjustment module, a delivery pipe, a fixing frame, a diffusion pipe and a diversion pipe, the device utilizes the separately arranged air inlet pipe 1 and air inlet pipe 2 to make each gas correspond to a passage respectively, so as to avoid premature reaction and reduce the generation of particles, thereby reducing the maintenance frequency of the pipeline and reducing the maintenance cost; utilizing the diffusion pipe and the diversion pipe, the gas first diffuses laterally through the diffusion pipe, which is a primary diversion, and then the lateral gas diffuses longitudinally through the diversion pipe into the interior of the chamber, which is a secondary diversion. After the secondary diversion, the gas distribution in the entire chamber will be more uniform, which is beneficial to improving the difference in uniformity of the membrane layer in the upper and lower spaces.

[0007] In a preferred embodiment, the quick connection module includes four symmetrical gripping pieces, two symmetrical gripping pieces are arranged on the outside of the two delivery tubes, a rubber pad is bonded to the side of the gripping piece close to the delivery tube, the rubber pad is fitted with the side opposite to the delivery tube, and one of the two gripping pieces on the outside of the delivery tube is fixedly connected to the side opposite to the closing plate, and a sliding plate is fixedly connected to the outside of the other gripping piece, four symmetrical sliding grooves are provided on the side of the closing plate away from the reaction chamber, and the sides of the two sliding plates close to the closing plate are slidably connected to the inner walls of the two sliding grooves on the same side respectively; the two circular holes on the closing plate are provided with cutting grooves, and the cutting grooves are located on one side of the sliding plate close to the closing plate On the other hand, a connecting piece is fixedly connected to one side of the sliding plate away from the closing plate, and two fixing seats are fixedly connected to one side of the closing plate away from the reaction chamber, and a spring 1 is fixedly connected to the side of the fixing seat on the same side opposite to the connecting piece, and outer covering tubes are arranged on the outside of the two delivery tubes, and the inner walls of the two outer covering tubes are respectively fixedly connected to the outside of the air inlet pipe 1 and the air inlet pipe 2, and the outside of the outer covering tubes are fixedly connected to fixing rings; sleeves are slidably connected to the outside of the outer covering tubes, and an annular groove 1 is provided on the inner wall of the sleeve on the side close to the fixing ring, and the inner wall of the annular groove 1 is slidably connected to the outside of the fixing ring, and a spring 2 is arranged in the annular groove 1, and the spring 2 is located on the outside of the outer covering tube, and one of the springs 2 One end is fixedly connected to the outside of the fixing ring, and the other end is fixedly connected to the inner wall of the annular groove one, and the inner wall of the outer covering tube is fixedly connected to a limiting ring, and the limiting ring is fixedly connected to a sealing ring on the side close to the conveying tube, and the sealing ring fits the side opposite to the conveying tube; an annular groove is opened on the outside of the conveying tube, and three hole grooves equidistantly distributed on the circumference are opened on the outside of the outer covering tube, and balls are slidably connected in the hole grooves, and the outsides of the balls are clamped with the annular grooves, and an annular groove two is opened on the inner wall of the sleeve, and an annular groove three is opened on the side close to the ball, and the inner wall of the annular groove three contacts the outside of the ball, and an annular incision is opened on the outside of the fixing ring; the outside of the sleeve They are all fixedly connected with a positioning seat, and three narrow grooves with equal distances around the circumference are opened on the side of the positioning seat away from the conveying pipe, and a clamping block is slidably connected in the narrow groove, and a short shaft is fixedly connected to the side of the clamping block away from the positioning seat, and a short shaft is arranged on the outside of the sleeve, and the rotating frame on the same side is movably connected to the side opposite to the positioning seat; three curved grooves with equal distances around the circumference are opened on the rotating frame, and the inner walls of the three curved grooves on the same side are respectively slidably connected to the outside of the three short shafts, and the outsides of the three clamping blocks on the same side are clamped with the inner wall of the annular incision, and the inner wall of the rotating frame is fixedly connected with a coil spring, and the end of the coil spring away from the rotating frame is fixedly connected to the outside of the positioning seat on the same side.

[0008] By providing a quick connection module, the quick connection module utilizes the cooperation of annular groove two, annular groove three and balls to make the connection between the delivery pipe and the intake pipe one or the intake pipe two more convenient, greatly shortening the time consumption when installing the intake pipe one and the intake pipe two, and improving the work efficiency of the installer.

[0009] In a preferred embodiment, the angle adjustment module includes four symmetrical hydraulic rods, and the sides of the two diffusion tubes close to the reaction chamber are fixedly connected to the sides of the two hydraulic rods away from the reaction chamber, respectively. The output ends of the hydraulic rods are fixedly connected to the connecting platform, and the outside of the diverter tube is provided with a plurality of vertically symmetrical fine holes, and hoses are fixedly connected in the fine holes; the hoses are provided with nozzles at the ends away from the diverter tube, and the nozzles on the diverter tube are divided into upper and lower layers, and the outsides of the nozzles of the upper layer and the lower layer are provided with two symmetrical connecting frames, and shaft rods are provided between the connecting frames away from the connecting platform; the outside of the connecting platform is movably connected with two symmetrical push-pull rods, and the ends of the two push-pull rods on the same connecting platform away from the connecting platform are respectively movably connected to the outsides of the two outermost connecting frames.

[0010] By providing an angle adjustment module, the angle adjustment module can conveniently help the device change the angle at which the reaction gas is released into the reaction chamber by using a connecting frame and a push-pull rod, so that the device can adjust the angle according to the flow rate and type of the gas so that the reaction gas can be fully diffused into the reaction chamber, thereby ensuring the uniformity of gas diffusion and improving the coating quality of the device.

[0011] From the above, it can be seen that the air intake system of the reaction chamber of a batch-type ALD device provided by the present invention has a separately arranged air intake pipe 1 and air intake pipe 2, so that each gas corresponds to a passage respectively, avoiding premature reaction and reducing the generation of particles, thereby reducing the maintenance frequency of the pipeline and reducing maintenance costs; using the diffusion tube and the diversion tube, the gas is first diffused laterally through the diffusion tube, which is a primary diversion, and then the lateral gas is diffused longitudinally through the diversion tube into the interior of the chamber, which is a secondary diversion. After the secondary diversion, the gas distribution in the entire chamber will be more uniform, which is beneficial to improving the difference in uniformity of the film layer in the upper and lower spaces. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is a schematic diagram of the overall structure of an air intake system for a reaction chamber of a batch-type ALD device proposed by the present invention;

[0013] Figure 2 A schematic cross-sectional view of the gas inlet system of a batch-type ALD equipment reaction chamber proposed by the present invention;

[0014] Figure 3A schematic diagram of the structure of a quick connection module of an air intake system of a batch type ALD equipment reaction chamber proposed by the present invention;

[0015] Figure 4 A schematic diagram of the structure of a sliding plate of an air intake system of a reaction chamber of a batch type ALD device proposed by the present invention;

[0016] Figure 5 A schematic diagram of the outer covering tube structure of the gas inlet system of the reaction chamber of a batch type ALD device proposed by the present invention;

[0017] Figure 6 A schematic diagram of the structure of a positioning seat of an air intake system of a reaction chamber of a batch type ALD device proposed by the present invention;

[0018] Figure 7 This is a schematic diagram of the angle adjustment module structure of the air intake system of the reaction chamber of a batch-type ALD device proposed by the present invention.

[0019] In the figure: 1, reaction chamber; 2, containing frame; 3, closing plate; 4, air inlet pipe 1; 5, air inlet pipe 2; 6, quick connection module; 601, outer tube; 602, sleeve; 603, gripping piece; 604, rubber pad; 605, coil spring; 606, sliding plate; 607, connecting piece; 608, fixing seat; 609, spring 1; 610, cutting groove; 611, sliding groove; 612, fixing ring; 613, annular groove 1; 614, spring 2; 615, annular groove 2; 616, annular Groove three; 617, ball bearing; 618, limit ring; 619, sealing ring; 620, annular incision; 621, positioning seat; 622, narrow groove; 623, positioning block; 624, short shaft; 625, rotating frame; 626, curved groove; 7, angle adjustment module; 701, hydraulic rod; 702, connecting platform; 703, push-pull rod; 704, hose; 705, nozzle; 706, connecting frame; 707, shaft rod; 8, delivery pipe; 9, fixing frame; 10, diffusion pipe; 11, diverter pipe. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0021] The present invention discloses a gas intake system for a batch type ALD equipment reaction chamber, which is mainly used in the scenario where the uneven distribution of reaction gas in the reaction chamber of the existing ALD equipment leads to poor coating effect.

[0022] Reference Figure 1-7, an air intake system for a reaction chamber of a batch type ALD device, comprising a reaction chamber 1, a rectangular opening is provided on the outside of the reaction chamber 1, a containing frame 2 is connected to the inside of the rectangular opening by bolts, a side of the containing frame 2 away from the reaction chamber 1 is connected to a closing plate 3 by a hinge, and two circular holes are provided on the closing plate 3, a delivery pipe 8 is slidably connected to the circular holes, a quick connection module 6 is provided on the outside of both, an air intake pipe 1 4 and an air intake pipe 2 5 are provided in the two quick connection modules 6, respectively, a diffusion pipe 10 is connected to the side of the two delivery pipes 8 close to the reaction chamber 1 by a flange, a fixing frame 9 is connected to the outside of the diffusion pipe 10 by bolts, the outside of the fixing frame 9 is connected to the inner wall of the containing frame 2 by bolts, and three equidistantly distributed shunt pipes 11 are provided on the side of the diffusion pipe 10 away from the delivery pipe 8, the positions of the shunt pipes 11 on the two diffusion pipes 10 are staggered, an angle adjustment module 7 is provided on the diffusion pipe 10, and the angle adjustment module 7 is located in the containing frame 2.

[0023] Specifically, before starting the coating operation, two diffusion tubes 10 connected with the shunt tubes 11 are fixed on the fixing frame 9, the closing plate 3 is rotated to close, and the screws are tightened to keep it closed, and the quick connection module 6 connected with the air inlet pipe 1 4 and the air inlet pipe 2 5 is aligned with the two delivery pipes 8, and the air inlet pipe 1 4 and the air inlet pipe 2 5 are connected with the two delivery pipes 8 by using the quick connection module 6 to ensure that they are connected, and different reaction gases are delivered into the delivery pipe 8 through the air inlet pipe 1 4 and the air inlet pipe 2 5, and the delivery pipe 8 delivers the gas into the diffusion tube 10 for diffusion, and finally the gas is diffused up and down in the reaction chamber 1 through the shunt tube 11, and the angle is used. The regulating module 7 is used to control the diffusion angle of the gas by the diverter pipe 11; the device utilizes the separately arranged air inlet pipe 1 4 and air inlet pipe 2 5 to make each gas correspond to a passage respectively, so as to avoid premature reaction and reduce the generation of particles, thereby reducing the maintenance frequency of the pipeline and reducing the maintenance cost; utilizing the diffusion pipe 10 and the diverter pipe 11, the gas first diffuses laterally through the diffusion pipe 10, which is the primary diversion, and then the lateral gas diffuses longitudinally through the diverter pipe 11 into the interior of the chamber, which is the secondary diversion. After the secondary diversion, the gas distribution in the entire chamber will be more uniform, which is beneficial to improving the difference in uniformity of the membrane layer in the upper and lower spaces.

[0024] Reference Figure 3 , Figure 4 , Figure 5 and Figure 6In a preferred embodiment, the quick connection module 6 includes four symmetrical gripping members 603, and two symmetrical gripping members 603 are arranged on the outside of the two delivery pipes 8. A rubber pad 604 is bonded to the side of the gripping members 603 close to the delivery pipe 8, and the rubber pad 604 fits the side opposite to the delivery pipe 8. One of the two gripping members 603 on the outside of the delivery pipe 8 is connected to the side opposite to the closing plate 3 by bolts, and the outside of the other gripping member 603 is connected to a sliding plate 606 by bolts. Four symmetrical sliding grooves 611 are opened on the side of the closing plate 3 away from the reaction chamber 1, and the two sliding plates 606 are respectively connected to the side of the closing plate 3 close to the closing plate 3. The two circular holes on the closing plate 3 are both provided with grooves 610, and the grooves 610 are both located on the side of the sliding plate 606 close to the closing plate 3. The side of the sliding plate 606 away from the closing plate 3 is connected with a connecting piece 607 by bolts. The side of the closing plate 3 away from the reaction chamber 1 is connected with two fixing seats 608 by bolts. The fixing seats 608 on the same side are connected with the same spring 1 609 by bolts on the side opposite to the connecting piece 607. The outsides of the two delivery pipes 8 are both provided with outer covering pipes 601, and the inner walls of the two outer covering pipes 601 are respectively connected with the outsides of the intake pipe 1 4 and the intake pipe 2 5. The outer part of the outer tube 601 is connected by bolts to a fixing ring 612; the outer part of the outer tube 601 is slidably connected to a sleeve 602, and an inner wall of the sleeve 602 close to the fixing ring 612 is provided with an annular groove 613, and the inner wall of the annular groove 613 is slidably connected to the outer part of the fixing ring 612, and a spring 614 is arranged in the annular groove 613, and the spring 614 is located on the outer part of the outer tube 601, and one end of the spring 614 is connected to the outer part of the fixing ring 612 by bolts, and the other end is connected to the inner wall of the annular groove 613 by bolts, and the inner wall of the outer tube 601 is connected to a limiting ring 618 by bolts, The side of the limiting ring 618 close to the delivery pipe 8 is connected with a sealing ring 619 by bolts, and the sealing ring 619 is fitted with the side opposite to the delivery pipe 8; the outside of the delivery pipe 8 is provided with an annular groove, and the outside of the outer tube 601 is provided with three holes and grooves distributed equidistantly around the circumference, and the holes and grooves are slidably connected with balls 617, and the outside of the balls 617 is clamped with the annular groove, and the inner wall of the sleeve 602 is provided with an annular groove 2 615, and the side of the annular groove 2 615 close to the ball 617 is provided with an annular groove 3 616, and the inner wall of the annular groove 3 616 is in contact with the outside of the ball 617, and the outside of the fixing ring 612 is provided with an annular cutout 620;The outside of the sleeve 602 is connected with a positioning seat 621 by bolts, and the side of the positioning seat 621 away from the delivery pipe 8 is provided with three circumferentially equidistantly distributed narrow grooves 622, and the narrow grooves 622 are slidably connected with a positioning block 623, and the side of the positioning block 623 away from the positioning seat 621 is connected with a short shaft 624 by bolts, and the outside of the sleeve 602 is provided with a short shaft 624, and the rotating frame 625 on the same side is rotatably connected to the side opposite to the positioning seat 621 by a bearing. The rotating frame 625 is provided with three curved grooves 626 which are equally spaced around the circumference. The inner walls of the three curved grooves 626 on the same side are respectively slidably connected to the outer parts of the three short shafts 624, and the outer parts of the three positioning blocks 623 on the same side are all clamped to the inner wall of the annular cutout 620. The inner wall of the rotating frame 625 is connected to the coil spring 605 by bolts, and the end of the coil spring 605 away from the rotating frame 625 is connected to the outer part of the positioning seat 621 on the same side by bolts.

[0025] Specifically, after the diffuser 10 is fixed on the fixing frame 9, the sliding plate 606 connected to the connecting piece 607 is pulled open to overcome the elastic force of the spring 1 609, so that the groove 610 is exposed, the closing plate 3 is rotated to make the closing plate 3 fit with the containing frame 2, so that the inner wall of the groove 610 fits with the outside of the conveying pipe 8, and the connecting piece 607 is loosened. Under the thrust of the spring 1 609, the sliding plate 606 pushes the gripping piece 603 to merge, so that the rubber pad 604 fits with the outside of the conveying pipe 8, and the rotating frame 625 is rotated to overcome the torsion of the coil spring 605, so that the curved groove 626 pushes the positioning block 623 connected to the short shaft 624 to slide outward on the narrow groove 622, thereby releasing the lock on the annular incision 620, and the sleeve 602 is gently pushed to make the sleeve 602 slide on the fixing ring 612 against the thrust of the spring 2 614. When the annular groove 615 moves to the position of the ball 617, the delivery tube 8 is inserted into the outer tube 601. After the outer part of the delivery tube 8 contacts the ball 617, a part of the ball 617 enters the annular groove 615, so that the delivery tube 8 can be completely inserted into the outer tube 601. After one side of the delivery tube 8 contacts the sealing ring 619 and stops, the sleeve 602 is released. Under the push of the spring 614, the sleeve 602 is quickly reset, and the ball 617 is squeezed by the annular groove 616, so that the ball 617 is pressed back to its original position, so that the ball 617 is engaged with the annular groove on the delivery tube 8, and the rotating frame 625 is released. Under the torsion of the coil spring 605, the rotating frame 625 rotates and recovers, so that the blocking block 623 is re-engaged with the annular cutout 620, so that the sleeve 602 can no longer move, thereby completing the connection between the delivery tube 8 and the intake pipe 1 4 or the intake pipe 2 5.

[0026] In specific application scenarios, the quick connection module 6 is mainly suitable for the quick connection link in the quick connection process, that is, the quick connection module 6 uses the cooperation of the annular groove 2 615, the annular groove 3 616 and the ball 617 to make the connection between the delivery pipe 8 and the intake pipe 1 4 or the intake pipe 2 5 more convenient, which greatly shortens the time consumption when installing the intake pipe 1 4 and the intake pipe 2 5, and improves the work efficiency of the installer.

[0027] Reference Figure 7 In a preferred embodiment, the angle adjustment module 7 includes four symmetrical hydraulic rods 701, and the sides of the two diffusion tubes 10 close to the reaction chamber 1 are respectively connected to the sides of the two hydraulic rods 701 away from the reaction chamber 1 by bolts, and the output ends of the hydraulic rods 701 are connected to the connecting platform 702 by bolts, and the outside of the shunt tube 11 is provided with a plurality of symmetrical fine holes, and the fine holes are connected with hoses 704 by bolts; the ends of the hoses 704 away from the shunt tube 11 are provided with nozzles 705, and the nozzles 705 on the shunt tube 11 are divided into upper and lower layers, and the outsides of the nozzles 705 of the upper layer and the lower layer are provided with two symmetrical connecting frames 706, and shafts 707 are provided between the connecting frames 706 away from the connecting platform 702; the outside of the connecting platform 702 is rotatably connected to two symmetrical push-pull rods 703 through bearings, and the ends of the two push-pull rods 703 located on the same connecting platform 702 away from the connecting platform 702 are rotatably connected to the outsides of the two outermost connecting frames 706 through bearings.

[0028] Specifically, when the gas diffuses into the reaction chamber 1 through the shunt pipe 11 and the nozzle 705 on the shunt pipe 11, the hydraulic rod 701 can be started according to the flow rate of the gas, and the output end of the hydraulic rod 701 drives the push-pull rod 703 on the connecting platform 702 to push and pull the connecting frame 706 connected to the nozzle 705, thereby changing the angle of the nozzle 705 toward the reaction chamber 1.

[0029] In a specific application scenario, the angle adjustment module 7 is mainly suitable for the angle adjustment link in the angle adjustment process, that is, the angle adjustment module 7 uses the connecting frame 706 and the push-pull rod 703 to conveniently help the device change the angle at which the reaction gas is released into the reaction chamber 1, so that the device can adjust the angle according to the flow rate and type of the gas so that the reaction gas can be fully diffused into the reaction chamber 1, thereby ensuring the uniformity of gas diffusion and improving the coating quality of the device.

[0030] Working principle: After the diffuser 10 is fixed on the fixing frame 9, the sliding plate 606 connected to the connecting piece 607 is pulled apart to overcome the elastic force of the spring 1 609, so that the groove 610 is exposed, the closing plate 3 is rotated to make the closing plate 3 fit with the receiving frame 2, so that the inner wall of the groove 610 fits with the outside of the conveying pipe 8, the connecting piece 607 is loosened, and the sliding plate 606 pushes the gripping piece 603 to merge under the thrust of the spring 1 609, so that the rubber pad 604 fits with the outside of the conveying pipe 8, and the rotating frame 625 is rotated to make the rotating The frame 625 overcomes the torsion of the coil spring 605 and rotates, so that the curved groove 626 pushes the block 623 connected to the short shaft 624 to slide outward on the narrow groove 622, thereby releasing the lock of the annular cutout 620, and gently pushes the sleeve 602 to make the sleeve 602 slide on the fixed ring 612 against the thrust of the spring 614. When the annular groove 615 on the sleeve 602 moves to the position of the ball 617, the delivery tube 8 is inserted into the outer tube 601, and the outer part of the delivery tube 8 will become a part of the ball 617 after contacting with the ball 617. The conveying tube 8 is partially inserted into the annular groove 615, so that the conveying tube 8 can be completely inserted into the outer tube 601. After one side of the conveying tube 8 contacts the sealing ring 619 and stops, the sleeve 602 is released. Under the push of the spring 614, the sleeve 602 is quickly reset, and the ball 617 is squeezed by the annular groove 616, so that the ball 617 is pressed back to its original position, so that the ball 617 is engaged with the annular groove on the conveying tube 8. The rotating frame 625 is released. Under the torsion of the coil spring 605, the rotating frame 625 rotates to restore, so that the blocking block 6 23 is re-engaged with the annular incision 620, so that the sleeve 602 can no longer move, thereby completing the connection between the delivery pipe 8 and the air inlet pipe 1 4 or the air inlet pipe 2 5. When the gas diffuses into the reaction chamber 1 through the shunt pipe 11 and the nozzle 705 on the shunt pipe 11, the hydraulic rod 701 can be started according to the flow rate of the gas. The output end of the hydraulic rod 701 drives the push-pull rod 703 on the connecting platform 702 to push and pull the connecting frame 706 connected to the nozzle 705, thereby changing the angle of the nozzle 705 toward the reaction chamber 1.

[0031] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A gas inlet system for a batch type ALD equipment reaction chamber, comprising a reaction chamber (1), characterized in that: The reaction chamber (1) is provided with a rectangular opening on the outside, a receiving frame (2) is fixedly connected to the inside of the rectangular opening, a side of the receiving frame (2) away from the reaction chamber (1) is connected to a closing plate (3) via a hinge, and the closing plate (3) is provided with two circular holes, each of which is slidably connected to a delivery pipe (8), both of which are provided with a quick connection module (6) on the outside, and an air intake pipe 1 (4) and an air intake pipe 2 (5) are provided in the two quick connection modules (6), respectively, and the two delivery pipes (8) are close to one side of the reaction chamber (1). The sides of the diffuser (10) are connected to the diffuser (10) via flanges, the outside of the diffuser (10) is fixedly connected to a fixing frame (9), the outside of the fixing frame (9) is fixedly connected to the inner wall of the containing frame (2), and the side of the diffuser (10) away from the conveying pipe (8) is provided with three equally spaced flow dividers (11), the positions of the flow dividers (11) on the two diffuser pipes (10) are staggered, and the diffuser (10) is provided with an angle adjustment module (7), and the angle adjustment module (7) is located in the containing frame (2).

2. The gas inlet system of a batch type ALD equipment reaction chamber according to claim 1, characterized in that: The quick connection module (6) includes four symmetrical gripping members (603), and two symmetrical gripping members (603) are arranged on the outside of the two conveying tubes (8). A rubber pad (604) is bonded to the side of the gripping member (603) close to the conveying tube (8), and the rubber pad (604) is fitted with the side opposite to the conveying tube (8). One of the two gripping members (603) on the outside of the conveying tube (8) is fixedly connected to the side opposite to the closing plate (3), and the other gripping member (603) is fixedly connected to the outside with a sliding plate (606). Four symmetrical sliding grooves (611) are opened on the side of the closing plate (3) away from the reaction chamber (1), and the two sliding plates (606) are slidably connected to the inner walls of the two sliding grooves (611) on the same side on the side close to the closing plate (3).

3. The gas inlet system of a batch type ALD equipment reaction chamber according to claim 2, characterized in that: The two circular holes on the closing plate (3) are both provided with grooves (610), the grooves (610) are both located on the side of the sliding plate (606) close to the closing plate (3), the side of the sliding plate (606) away from the closing plate (3) is fixedly connected with a connecting piece (607), the side of the closing plate (3) away from the reaction chamber (1) is fixedly connected with two fixing seats (608), the fixing seats (608) on the same side opposite to the connecting piece (607) are fixedly connected with the same spring 1 (609), and the outsides of the two conveying pipes (8) are both provided with outer covering pipes (601), the inner walls of the two outer covering pipes (601) are respectively fixedly connected to the outsides of the intake pipe 1 (4) and the intake pipe 2 (5), and the outsides of the outer covering pipes (601) are fixedly connected with fixing rings (612).

4. The gas inlet system of a batch type ALD equipment reaction chamber according to claim 3, characterized in that: The outer part of the outer covering tube (601) is slidably connected to the sleeve (602), and the inner wall of the sleeve (602) close to the fixed ring (612) is provided with an annular groove (613), and the inner wall of the annular groove (613) is slidably connected to the outer part of the fixed ring (612). A spring (614) is arranged in the annular groove (613), and the spring (614) is located outside the outer covering tube (601). One end of the spring (614) is fixedly connected to the outer part of the fixed ring (612), and the other end is fixedly connected to the inner wall of the annular groove (613). The inner wall of the outer covering tube (601) is fixedly connected to a limit ring (618), and a sealing ring (619) is fixedly connected to the side of the limit ring (618) close to the conveying tube (8), and the sealing ring (619) is in contact with the side opposite to the conveying tube (8).

5. The gas inlet system of a batch type ALD equipment reaction chamber according to claim 3, characterized in that: The outside of the delivery pipe (8) is provided with an annular groove, the outside of the outer covering pipe (601) is provided with three holes and grooves which are equidistantly distributed around the circumference, the holes and grooves are slidably connected with balls (617), the outside of the balls (617) is clamped with the annular groove, and the inner wall of the sleeve (602) is provided with an annular groove 2 (615), the side of the annular groove 2 (615) close to the balls (617) is provided with an annular groove 3 (616), the inner wall of the annular groove 3 (616) is in contact with the outside of the balls (617), and the outside of the fixing ring (612) is provided with an annular cutout (620).

6. The gas inlet system of a batch type ALD equipment reaction chamber according to claim 5, characterized in that: The outside of the sleeve (602) is fixedly connected to a positioning seat (621); the side of the positioning seat (621) away from the delivery pipe (8) is provided with three narrow grooves (622) equidistantly distributed around the circumference; a positioning block (623) is slidably connected in the narrow groove (622); the side of the positioning block (623) away from the positioning seat (621) is fixedly connected to a short shaft (624); and the outside of the sleeve (602) is provided with a short shaft (624); and the rotating frame (625) on the same side is movably connected to the side opposite to the positioning seat (621).

7. The gas inlet system of a batch type ALD equipment reaction chamber according to claim 6, characterized in that: The rotating frame (625) is provided with three curved grooves (626) which are equidistantly distributed around the circumference; the inner walls of the three curved grooves (626) on the same side are respectively slidably connected to the outside of the three short shafts (624); the outsides of the three positioning blocks (623) on the same side are all engaged with the inner wall of the annular cutout (620); the inner wall of the rotating frame (625) is fixedly connected to a coil spring (605); and one end of the coil spring (605) away from the rotating frame (625) is fixedly connected to the outside of the positioning seat (621) on the same side.

8. The gas inlet system of a batch type ALD equipment reaction chamber according to claim 1, characterized in that: The angle adjustment module (7) comprises four symmetrical hydraulic rods (701), the sides of the two diffusion tubes (10) close to the reaction chamber (1) are respectively fixedly connected to the sides of the two hydraulic rods (701) away from the reaction chamber (1), the output ends of the hydraulic rods (701) are fixedly connected to the connecting platform (702), and the outside of the diverter tube (11) is provided with a plurality of vertically symmetrical fine holes, and the fine holes are fixedly connected to the hoses (704).

9. The gas inlet system of a batch type ALD equipment reaction chamber according to claim 8, characterized in that: The hose (704) is provided with a nozzle (705) at one end away from the shunt pipe (11). The nozzle (705) on the shunt pipe (11) is divided into two layers, an upper layer and an lower layer. Two symmetrical connecting frames (706) are provided outside the nozzles (705) of the upper layer and the lower layer, and shafts (707) are provided between the connecting frames (706) away from the connecting platform (702).

10. The gas inlet system of a batch type ALD equipment reaction chamber according to claim 9, characterized in that: The outside of the connecting platform (702) is movably connected to two symmetrical push-pull rods (703), and the ends of the two push-pull rods (703) on the same connecting platform (702) away from the connecting platform (702) are movably connected to the outside of the two outermost connecting frames (706).

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