Air inlet device of silicon carbide chemical vapor deposition furnace

Abstract

The invention relates to a chemical vapor deposition technology, in particular to a silicon carbide chemical vapor deposition furnace which comprises a mounting frame, one end of the mounting frame is fixedly connected with a gas mixing cylinder, the bottom of the gas mixing cylinder is rotatably connected with a circular plate, the top surface of the circular plate is fixedly connected with a rotating rod, and the rotating rod is connected with a stirring assembly and a gas spraying assembly from top to bottom. The rotating rod rotates through a driving piece installed on the top face of the gas mixing cylinder, and the top end of the gas mixing cylinder is connected with a gas outlet assembly. Parts such as the mounting box, the nozzle and the rotating rod are arranged, the driving piece is started, then the driving piece drives the rotating rod to rotate, the rotating rod drives the mounting box to rotate, then the first air pump and the nozzle are started, then the first air pump extracts air from the air storage compartment, the air is conveyed into the sleeve through the pipeline, the flow valve and the connecting pipe, and the air is sprayed out through the nozzle; and the nozzle rotates along with the mounting box while spraying out the gas, so that the gas can be uniformly distributed in the gas mixing cylinder, and the mixing effect is improved.

Description

Technical Field

[0001] The invention relates to chemical vapor deposition technology, in particular to an air intake device of a silicon carbide chemical vapor deposition furnace. Background Art

[0002] Silicon carbide is a compound composed of silicon and carbon, which is widely used in electronics, optoelectronics, mechanics, chemistry and other fields. Silicon carbide can be synthesized by a variety of methods, among which the vapor deposition method is to use chemical vapor deposition technology to react silicon and carbon-containing precursors (such as silane, methane, etc.) under gaseous conditions to produce silicon carbide films. The chemical vapor deposition method can accurately control the composition, structure and film thickness of silicon carbide, so it is suitable for manufacturing high-quality silicon carbide materials. The gas inlet device of the silicon carbide chemical vapor deposition furnace is responsible for introducing the reaction gas into the furnace and ensuring that the gas flow, concentration and distribution meet the requirements to achieve an efficient and uniform deposition process.

[0003] The existing air intake device of the silicon carbide chemical vapor deposition furnace, such as the patent with announcement number CN212770948U, discloses an auxiliary air intake device of the chemical vapor deposition furnace. Although the device can drive different gases to be fully mixed through the stirring paddle, in the actual operation process, since the position of the air intake pipe is fixed, when different gases enter the mixing box through the air intake pipe, it is easy to form a concentration gradient. Although the stirring paddle plays a mixing role to a certain extent, the mixing time is long and the effect is not good, which may affect the deposition quality and consistency of the silicon carbide film. In view of this, the present invention proposes an air intake device for a silicon carbide chemical vapor deposition furnace to solve the above-mentioned technical problems. Summary of the invention

[0004] In order to overcome the technical problems mentioned in the background technology, the present invention provides an air intake device for a silicon carbide chemical vapor deposition furnace.

[0005] The technical scheme is as follows: An air intake device for a silicon carbide chemical vapor deposition furnace comprises a mounting frame, one end of the mounting frame is fixedly connected to a gas mixing cylinder, the bottom of the gas mixing cylinder is sealed and rotatably connected to a circular plate, the top surface of the circular plate is fixedly connected to a rotating rod, the rotating rod is respectively connected to a stirring assembly and an air injection assembly from top to bottom, the rotating rod is rotated by a driving member installed on the top surface of the gas mixing cylinder, and the top of the gas mixing cylinder is connected to a gas outlet assembly;

[0006] The jet assembly includes an installation box fixedly connected to the rotating rod, a first partition is fixedly connected in the installation box, the first partition divides the installation box into an upper partition and a lower partition, a second partition is installed in the upper partition, the second partition divides the upper partition into an air storage compartment, sleeves are distributed circumferentially on the outside of the installation box, the sleeves are connected with the corresponding air storage compartments through a connecting pipe, a first air pump and a flow valve, a nozzle is installed on the outer wall of the sleeve, a straight cylinder is connected in the air storage compartment, the bottom end of the straight cylinder passes through the circular plate, a one-way valve is arranged on the straight cylinder, a battery and a controller are installed in the lower partition, the first air pump, the flow valve and the nozzle are all electrically connected to the controller, and the first air pump, the flow valve and the nozzle are all powered by the battery.

[0007] Preferably, the second partition is a heating plate, the second partition is electrically connected to the controller, and the second partition is powered by the battery.

[0008] Preferably, a swing component is also included, which includes a movable ball fixedly connected to the bottom of the sleeve through a bent rod, a reciprocating thread is provided at the lower end of the rotating rod, a conical block is threadedly connected to the lower end of the rotating rod, and the conical block is sleeved on the straight cylinder. The conical block is frustum-shaped and has a larger upper end and a smaller lower end. The sleeve is rotatably connected to the connecting pipe, and a torsion spring is provided between the sleeve and the connecting pipe, and the movable ball abuts against the outer wall of the conical block.

[0009] Preferably, an inflation component is also included, which includes an air intake cylinder fixedly connected to the bottom surface of the mixing cylinder, a telescopic tube is installed in the air intake cylinder, the bottom end of the telescopic tube passes through the air intake cylinder and extends to the outside, an electromagnet is fixedly connected to the top of the telescopic tube, a magnetic part is fixedly connected to the bottom end of the straight cylinder, and the electromagnet is magnetically connected to the magnetic part when energized.

[0010] Preferably, the inflation assembly also includes an airbag fixedly connected to the top end of the telescopic tube, a second air pump is installed in the air inlet cylinder, the second air pump is connected to the airbag through a hose, and a slot matching the airbag is provided at the bottom end of the straight tube.

[0011] Preferably, the stirring assembly includes a fixed block fixedly connected to the top of the mixing cylinder, a fixed rod fixedly connected to the bottom surface of the fixed block, three fixed boxes fixedly connected to the fixed rod, the three fixed boxes are arranged in sequence from top to bottom, the fixed box is coaxially arranged with the rotating rod, a rotating rod is rotatably connected to the outer wall of the fixed box, one end of the rotating rod passes through the fixed box and extends to the interior of the fixed box, a second bevel gear is fixedly connected to the rotating rod, a first bevel gear is fixedly connected to the rotating rod, the first bevel gear and the second bevel gear are meshed with each other, a stirring plate is fixedly connected to the rotating rod located in the middle, and toggle plates are fixedly connected to the rotating rods located at the upper and lower parts.

[0012] Preferably, the toggle plate is arranged in an arc shape, and the toggle plate located at the upper part and the toggle plate located at the lower part rotate in opposite directions.

[0013] Preferably, the air outlet assembly comprises an air outlet cylinder fixedly connected to the top of the air mixing cylinder, an air inlet pipe is fixedly connected to the air outlet cylinder, an air outlet hole is arranged on the top surface of the air mixing cylinder, and the air outlet hole is connected to the air inlet pipe through a third air pump and an air supply pipe.

[0014] Compared with the prior art, the present invention has the following advantages:

[0015] 1. The present invention is provided with components such as an installation box, a nozzle and a rotating rod. The driving member is started, and then the driving member drives the rotating rod to rotate, and the rotating rod drives the installation box to rotate, and then the first air pump and the nozzle are started, and then the first air pump extracts gas from the gas storage compartment, and transports it to the sleeve through a pipeline, a flow valve and a connecting pipe, and sprays it out from the nozzle. While the nozzle sprays gas, it rotates with the installation box, so that the gas can be evenly distributed in the mixing cylinder, reducing the local excess or deficiency phenomenon and improving the mixing effect.

[0016] 2. The present invention is provided with components such as a movable ball, a conical block and a sleeve. When the rotating rod rotates, the conical block is driven to move up and down through a threaded connection. When the conical block moves downward, the conical block squeezes the movable ball, causing the movable ball to rotate around the sleeve as the center, and then the movable ball drives the sleeve to rotate through the bent rod, and then drives the nozzle to rotate, and then the torsion spring stores elastic potential energy. When the conical block moves upward, the torsion spring releases the elastic potential energy, and then drives the nozzle to rotate in the opposite direction, thereby realizing the reciprocating swing of the nozzle, and then the jet angle of the nozzle changes periodically, so that the ejected gas distribution is more uniform. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention.

[0018] Figure 2 It is a cross-sectional view of the gas mixing cylinder, the mounting box, the rotating rod and other components of the present invention.

[0019] Figure 3 It is a cross-sectional view of the installation box, flow valve, sleeve and other components of the present invention.

[0020] Figure 4 It is a cross-sectional view of the rotating rod, the conical block, the movable ball and other components of the present invention.

[0021] Figure 5 It is a cross-sectional view of the sleeve, torsion spring, flow valve and other components of the present invention.

[0022] Figure 6 It is a cross-sectional view of the air intake cylinder, telescopic tube, electromagnet and other components of the present invention.

[0023] Figure 7 It is a schematic structural diagram of the stirring assembly of the present invention.

[0024] Figure 8 It is a cross-sectional view of the stirring assembly and other components of the present invention.

[0025] Fig. 9 It is a cross-sectional view of the air intake assembly and other components of the present invention.

[0026] Description of the accompanying drawings: 100, mounting frame, 101, mixing cylinder, 1011, air outlet, 102, circular plate, 103, rotating rod, 1031, reciprocating thread, 104, driving member, 201, mounting box, 2011, upper partition, 2012, lower partition, 2013, air storage compartment, 202, first partition, 203, second partition, 204, sleeve, 205, connecting pipe, 206, first air pump, 207, flow valve, 208, nozzle, 209, straight cylinder, 2091, slot, 210, one-way valve, 211, Battery, 301, bending rod, 302, movable ball, 303, conical block, 304, torsion spring, 401, air inlet tube, 402, telescopic tube, 403, electromagnet, 404, magnetic part, 405, air bag, 406, second air pump, 501, fixed block, 502, fixed rod, 503, fixed box, 504, rotating rod, 505, second bevel gear, 506, first bevel gear, 507, stirring plate, 508, toggle plate, 601, air outlet tube, 602, air inlet pipe, 603, third air pump, 604, air supply pipe. DETAILED DESCRIPTION

[0027] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments.

[0028] An air intake device for a silicon carbide chemical vapor deposition furnace, such as Figure 1-Figure 9As shown, it includes a mounting frame 100, a gas mixing cylinder 101 for mixing gas is fixedly connected to the lower end of the mounting frame 100, and a gas outlet assembly is connected to the top of the gas mixing cylinder 101, and the gas outlet assembly includes a gas outlet cylinder 601 fixedly connected to the top of the gas mixing cylinder 101, and an air inlet pipe 602 is fixedly connected to the upper part of the gas outlet cylinder 601, and the top surface height of the air inlet pipe 602 is higher than the mounting frame 100, so that the present invention can be installed at the bottom end of the silicon carbide chemical vapor deposition furnace, wherein the mounting frame 100 is installed on the bottom outer side of the silicon carbide chemical vapor deposition furnace, and the air inlet pipe 602 extends into the interior of the silicon carbide chemical vapor deposition furnace, so as to transport the mixed gas The top surface of the mixing cylinder 101 is provided with six air outlet holes 1011, and the air outlet holes 1011 are communicated with the air inlet pipe 602 through the third air pump 603 and the air delivery pipe 604. The bottom of the mixing cylinder 101 is sealed and rotatably connected with a circular plate 102, and the top surface of the circular plate 102 is fixedly connected with a rotating rod 103. The rotating rod 103 is respectively connected with a stirring assembly and an injection assembly from top to bottom. The rotating rod 103 is rotated by a driving member 104 installed on the top surface of the mixing cylinder 101. The driving member 104 is specifically a motor. The motor has an encoder and a position sensor, which can track the number of rotations and position changes of the motor shaft in real time. This motor is a prior art.

[0029] More specifically, the jet assembly includes a mounting box 201 fixedly connected to the rotating rod 103, the mounting box 201 adopts a regular hexagonal structure, the mounting box 201 and the rotating rod 103 are coaxially arranged, a first partition 202 is fixedly connected to the mounting box 201, the first partition 202 divides the mounting box 201 into an upper partition 2011 and a lower partition 2012, a second partition 203 is installed in the upper partition 2011, and the second partition 203 divides the upper partition 2011 into six storage tanks. The second partition plate 203 can be a heating plate, which can preheat the gas in the gas storage compartment 2013. Six sleeves 204 are evenly distributed along the circumference on the outside of the installation box 201. The sleeves 204 are connected to the corresponding gas storage compartment 2013 through the connecting pipe 205, the first air pump 206 and the flow valve 207. The first air pump 206 is installed inside the gas storage compartment 2013, and the flow valve 207 is installed on the side wall of the installation box 201. 06 is connected with the flow valve 207 through a pipeline, and the flow valve 207 is connected with the sleeve 204 through a connecting pipe 205. A nozzle 208 is installed on the upper half of the outer wall of the sleeve 204, wherein the flow valve 207 can adjust the flow rate, and then the amount of gas sprayed by the nozzle 208 can be adjusted to achieve the gas ratio. The gas storage compartment 2013 is connected with a straight cylinder 209, and the bottom end of the straight cylinder 209 passes through the circular plate 102. A one-way valve 210 is arranged on the straight cylinder 209. The flow direction of the one-way valve 210 is from the straight tube 209 to the air storage compartment 2013. A battery 211 and a controller are installed in the lower compartment 2012. The first air pump 206, the flow valve 207, the nozzle 208 and the second partition 203 are all electrically connected to the controller, and the first air pump 206, the flow valve 207, the nozzle 208 and the second partition 203 are all powered by the battery 211. In this way, it does not rely on external power, and can avoid entanglement of the lines during operation.

[0030] It can be seen that the mounting frame 100 is installed on the outside of the bottom of the silicon carbide chemical vapor deposition furnace, and the air inlet pipe 602 is extended into the interior of the silicon carbide chemical vapor deposition furnace to transport the mixed gas. The specific transportation method is to start the third air pump 603, and the third air pump 603 extracts the mixed gas from the mixing cylinder 101 through the air outlet 1011, and then transports the gas to the air inlet pipe 602 through the air delivery pipe 604, and then the air inlet pipe 602 transports the gas to the interior of the silicon carbide chemical vapor deposition furnace; transport the gas to the gas storage compartment 2013 through the straight cylinder 209, each gas storage compartment 2013 corresponds to different gases, and six different gases can be input at the same time. Since a one-way valve 210 is provided in the straight cylinder 209, the gas storage compartment 201 3 forms a relatively closed space, so that gas can be temporarily stored, and the second partition 203 is a heating plate, which can preheat the gas. When the present invention is needed, the driving member 104 is started, and then the driving member 104 drives the rotating rod 103 to rotate, and then the rotating rod 103 drives the installation box 201 to rotate, and then the first air pump 206 and the nozzle 208 are started, and then the first air pump 206 extracts gas from the gas storage compartment 2013, and transports it to the sleeve 204 through the pipeline, the flow valve 207 and the connecting pipe 205, and is sprayed out by the nozzle 208. While the nozzle 208 sprays the gas, it rotates with the installation box 201, so that the gas can be evenly distributed in the mixing cylinder 101, reducing the local excess or deficiency phenomenon and improving the mixing effect.

[0031] Furthermore, it also includes a swing component, which includes a movable ball 302 fixedly connected to the bottom of the sleeve 204 through a bent rod 301, a reciprocating thread 1031 is provided at the lower end of the rotating rod 103, and a conical block 303 is threadedly connected to the lower end of the rotating rod 103. The conical block 303 is sleeved on the straight cylinder 209, and the conical block 303 is truncated and has a larger upper end and a smaller lower end. The sleeve 204 is rotatably connected to the connecting tube 205, and a torsion spring 304 is provided between the sleeve 204 and the connecting tube 205. The movable ball 302 abuts against the outer wall of the conical block 303. It can be seen that when the rotating rod 103 rotates, the conical block 303 is driven to move up and down through the threaded connection. When the conical block 303 moves downward During movement, the conical block 303 squeezes the movable ball 302, causing the movable ball 302 to rotate around the sleeve 204, and then the movable ball 302 drives the sleeve 204 to rotate through the bent rod 301, and then drives the nozzle 208 to rotate, and then the torsion spring 304 stores elastic potential energy. When the conical block 303 moves upward, the torsion spring 304 releases elastic potential energy, and then drives the nozzle 208 to rotate in the opposite direction, thereby realizing the reciprocating swing of the nozzle 208, and then the jet angle of the nozzle 208 changes periodically, so that the ejected gas distribution is more uniform. Among them, during the up and down movement of the conical block 303, the movable ball 302 always abuts against the inclined surface of the conical block 303.

[0032] Furthermore, the stirring assembly includes a fixed block 501 fixedly connected to the top of the mixing cylinder 101, a fixed rod 502 is fixedly connected to the bottom surface of the fixed block 501, and three fixed boxes 503 are fixedly connected to the fixed rod 502. The three fixed boxes 503 are arranged in sequence from top to bottom, and the fixed boxes 503 are coaxially arranged with the rotating rod 103. A rotating rod 504 is rotatably connected to the outer wall of the fixed box 503. One end of the rotating rod 504 passes through the fixed box 503 and extends to the inside of the fixed box 503. The second bevel gear 505 is fixedly connected to the moving rod 504, and the first bevel gear 506 is fixedly connected to the rotating rod 103. The first bevel gear 506 and the second bevel gear 505 are meshed with each other. The stirring plate 507 is fixedly connected to the rotating rod 504 in the middle, and the toggle plates 508 are fixedly connected to the rotating rods 504 in the upper and lower parts. The rotating rod 504 in the middle is shorter than the rotating rods 504 in the upper and lower parts, and the toggle plates 508 are arranged in an arc shape, and the toggle plates 507 in the upper part are arranged in an arc shape. 08 and the toggle plate 508 at the bottom rotate in opposite directions. It can be seen that when the rotating rod 103 rotates, the rotating rod 103 drives the first bevel gear 506 to rotate, and the first bevel gear 506 drives the second bevel gear 505 to rotate through meshing transmission, and then the second bevel gear 505 drives the rotating rod 504 to rotate, thereby causing the toggle plate 508 and the stirring plate 507 to rotate. Since the toggle plate 508 is arranged in an arc shape, and the toggle plate 508 at the upper part and the toggle plate 508 at the lower part rotate in opposite directions, the toggle plate 508 at the lower part will drive the gas below to be thrown upward, and the toggle plate 508 at the upper part will drive the gas above to be thrown downward, thereby mixing the upper and lower parts of the gas once to avoid gas stratification. The gas is driven to the stirring plate 507 by the toggle plate 508. Due to the rotation of the stirring plate 507, the gas will be mixed again, thus making the gas more uniform and reducing the uneven distribution of gas components.

[0033] Furthermore, it also includes an inflation component, which includes an air inlet cylinder 401 fixedly connected to the bottom surface of the mixing cylinder 101, a telescopic tube 402 is installed in the air inlet cylinder 401, the bottom end of the telescopic tube 402 passes through the air inlet cylinder 401 and extends to the outside, an electromagnet 403 is fixedly connected to the top of the telescopic tube 402, a magnetic member 404 is fixedly connected to the bottom end of the straight cylinder 209, and the magnetic member 404 is specifically a magnet. The electromagnet 403 is energized and magnetically connected to the magnetic member 404. The inflation component also includes an air bag 405 fixedly connected to the top of the telescopic tube 402, a second air pump 406 is installed in the air inlet cylinder 401, and the second air pump 406 is connected to the air bag 405 through a hose, and the bottom end of the straight cylinder 209 is provided with The card slot 2091 matched with the airbag 405, it can be known that the pump body is connected to the bottom surface of the telescopic tube 402, and the pump body is connected to the gas tank. When it is necessary to deliver gas to the gas storage compartment 2013, the electromagnet 403 is started, and then the electromagnet 403 is energized to generate magnetism, and then the electromagnet 403 is magnetically connected with the magnetic member 404, and then the electromagnet 403 drives the upper end of the telescopic tube 402 to communicate with the straight cylinder 209, and then the gas can be delivered to the gas storage compartment 2013 through the telescopic tube 402 and the straight cylinder 209. Since the driving member 104 is specifically a motor with an encoder and a position sensor, each telescopic tube 402 can be connected to the corresponding straight cylinder 209, and the connection After completion, the second air pump 406 is started, and the second air pump 406 delivers gas to the airbag 405 through the hose, so that the airbag 405 expands and extends out of the card slot 2091, and then the airbag 405 blocks the gap at the connection between the telescopic tube 402 and the straight tube 209 to prevent gas leakage. When the rotating rod 103 rotates, the electromagnet 403 is turned off, and then the electromagnet 403 is no longer magnetic, and then the electromagnet 403 and the magnetic part 404 are no longer magnetically connected, and the telescopic tube 402 retracts under its own action, and then drives the electromagnet 403 to retract, and then the telescopic tube 402 and the straight tube 209 are no longer connected. At the same time, the second air pump 406 extracts the gas in the airbag 405, so that Automatic connection reduces manual operation. It should be noted that if the telescopic tube 402 and the straight cylinder 209 are not docked, a combination of sensors and alarms can be installed to warn the operator, that is, the electromagnet 403 and the magnetic part 404 are not completely aligned. When the airbag 405 is inflated, the airbag 405 will squeeze the electromagnet 403 and the magnetic part 404, and then the electromagnet 403 will be disconnected from the magnetic part 404 under the squeezing of the airbag 405. In this way, the combination of sensors and alarms can be used to warn the operator that the telescopic tube 402 and the straight cylinder 209 are not docked. The combination of sensors and alarms is specifically a prior art and will not be further elaborated in this embodiment.

[0034] The above descriptions are merely embodiments of the present invention and are not intended to limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made using the contents of the present invention specification, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. An air intake device for a silicon carbide chemical vapor deposition furnace, characterized in that: The invention comprises a mounting frame (100), one end of which is fixedly connected to a mixing cylinder (101), the bottom of the mixing cylinder (101) is sealed and rotatably connected to a circular plate (102), the top surface of the circular plate (102) is fixedly connected to a rotating rod (103), the rotating rod (103) is respectively connected to a stirring assembly and an air injection assembly from top to bottom, the rotating rod (103) is rotated by a driving member (104) mounted on the top surface of the mixing cylinder (101), and the top end of the mixing cylinder (101) is connected to an air outlet assembly; The jet assembly comprises a mounting box (201) fixedly connected to the rotating rod (103); a first partition (202) is fixedly connected inside the mounting box (201); the first partition (202) divides the mounting box (201) into an upper partition (2011) and a lower partition (2012); a second partition (203) is installed inside the upper partition (2011); the second partition (203) divides the upper partition (2011) into an air storage compartment (2013); sleeves (204) are distributed along the circumferential direction on the outer side of the mounting box (201); the sleeves (204) are connected to the corresponding air pump (2013) through a connecting pipe (205), a first air pump (206) and a flow valve (207). The first air pump (206), the flow valve (207) and the nozzle (208) are connected to the corresponding air storage compartment (2013), a nozzle (208) is installed on the outer wall of the sleeve (204), a straight cylinder (209) is connected to the air storage compartment (2013), the bottom end of the straight cylinder (209) passes through the circular plate (102), a one-way valve (210) is arranged on the straight cylinder (209), a battery (211) and a controller are installed in the lower compartment (2012), the first air pump (206), the flow valve (207) and the nozzle (208) are all electrically connected to the controller, and the first air pump (206), the flow valve (207) and the nozzle (208) are all powered by the battery (211).

2. The gas inlet device of a silicon carbide chemical vapor deposition furnace according to claim 1, characterized in that: The second partition (203) is a heating plate, the second partition (203) is electrically connected to the controller, and the second partition (203) is powered by the battery (211).

3. The gas inlet device of a silicon carbide chemical vapor deposition furnace according to claim 2, characterized in that: The invention also includes a swing assembly, which includes a movable ball (302) fixedly connected to the lower part of the sleeve (204) through a bent rod (301); a reciprocating thread (1031) is provided at the lower end of the rotating rod (103); a conical block (303) is threadedly connected to the lower end of the rotating rod (103); the conical block (303) is sleeved on the straight cylinder (209); the conical block (303) is truncated cone-shaped and has a larger upper end and a smaller lower end; the sleeve (204) is rotatably connected to the connecting tube (205); a torsion spring (304) is provided between the sleeve (204) and the connecting tube (205); and the movable ball (302) is in contact with the outer wall of the conical block (303).

4. The gas inlet device of a silicon carbide chemical vapor deposition furnace according to claim 3, characterized in that: The invention also includes an inflation component, which includes an air intake cylinder (401) fixedly connected to the bottom surface of the mixing cylinder (101), a telescopic tube (402) installed in the air intake cylinder (401), the bottom end of the telescopic tube (402) passes through the air intake cylinder (401) and extends to the outside, an electromagnet (403) is fixedly connected to the top end of the telescopic tube (402), a magnetic part (404) is fixedly connected to the bottom end of the straight cylinder (209), and the electromagnet (403) is magnetically connected to the magnetic part (404) when energized.

5. The gas inlet device of a silicon carbide chemical vapor deposition furnace according to claim 4, characterized in that: The inflation assembly also includes an air bag (405) fixedly connected to the top end of the telescopic tube (402), a second air pump (406) is installed in the air inlet cylinder (401), the second air pump (406) is connected to the air bag (405) through a hose, and a slot (2091) matching the air bag (405) is provided at the bottom end of the straight tube (209).

6. The gas inlet device of a silicon carbide chemical vapor deposition furnace according to claim 5, characterized in that: The stirring assembly comprises a fixed block (501) fixedly connected to the top of the mixing cylinder (101), the bottom surface of the fixed block (501) is fixedly connected to a fixed rod (502), and three fixed boxes (503) are fixedly connected to the fixed rod (502). The three fixed boxes (503) are arranged in sequence from top to bottom, and the fixed boxes (503) are coaxially arranged with the rotating rod (103). The outer wall of the fixed box (503) is rotatably connected to a rotating rod (504) (103), and one of the rotating rods (504) is The end passes through the fixed box (503) and extends to the interior of the fixed box (503); the rotating rod (504) is fixedly connected to a second bevel gear (505); the rotating rod (103) is fixedly connected to a first bevel gear (506); the first bevel gear (506) and the second bevel gear (505) are meshed with each other; the rotating rod (504) located in the middle is fixedly connected to a stirring plate (507); the rotating rod (504) located in the upper and lower parts are fixedly connected to toggle plates (508).

7. The gas inlet device of a silicon carbide chemical vapor deposition furnace according to claim 6, characterized in that: The toggle plate (508) is arranged in an arc shape, and the toggle plate (508) located at the upper part and the toggle plate (508) located at the lower part rotate in opposite directions.

8. The gas inlet device of a silicon carbide chemical vapor deposition furnace according to claim 7, characterized in that: The gas outlet assembly comprises a gas outlet cylinder (601) fixedly connected to the top of the gas mixing cylinder (101), an air inlet pipe (602) fixedly connected to the gas outlet cylinder (601), a gas outlet hole (1011) provided on the top surface of the gas mixing cylinder (101), and the gas outlet hole (1011) is connected to the air inlet pipe (602) through a third air pump (603) and an air delivery pipe (604).

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