Self-powered piezoelectric capacitance sensor for dynamic and static cooperative detection and preparation method thereof

Abstract

The invention provides a self-powered piezoelectric capacitance sensor for dynamic and static cooperative detection and a preparation method thereof, and the sensor comprises a piezoelectric unit which is used for collecting dynamic signals and comprises a top packaging layer, an upper electrode layer, a piezoelectric layer, a lower electrode layer and a central isolation layer from top to bottom; the self-powered capacitor unit is used for collecting static or low-frequency signals and comprises a bottom packaging layer, a combined lower electrode layer, a power supply layer, a radial isolation layer, a dielectric layer and a combined upper electrode layer from bottom to top, the radial isolation layer is arranged on the outer ring of the dielectric layer, and the power supply layer is arranged on the outer ring of the radial isolation layer; and the lower surface of the central isolation layer of the piezoelectric unit is bonded with the upper surface of the combined upper electrode layer of the self-powered capacitor unit in a face-to-face manner, so that the piezoelectric unit and the self-powered capacitor unit form an integral structure. Dynamic and static load monitoring under the sole complex environment is achieved through the piezoelectric-capacitance multiple effects, power is supplied to the capacitor unit through the power supply layer, and the sensor has the advantages of being high in sensitivity, low in power consumption, good in durability and the like.

Description

Technical Field

[0001] The present invention relates to the technical field of flexible plantar pressure sensors, and in particular to a self-powered voltage-capacitive sensor for dynamic and static coordinated detection and a preparation method thereof. Background Art

[0002] With the development of smart devices, the importance of flexible sensors in the field of wearable devices is increasing day by day, especially in the fields of disease diagnosis, health monitoring, prognosis and rehabilitation. Flexible sensors provide necessary assistance for the treatment and rehabilitation of patients. For example, in foot and ankle injuries, patients usually need long-term treatment and complex rehabilitation training, which in turn creates a huge economic burden. The flexible pressure sensing system can be worn for a long time in the form of insoles or socks, and sense the changes in the patient's sole pressure in real time, providing them with fast and accurate diagnostic advice and risk prediction.

[0003] From the perspective of sensing principle, the most widely used sensors in the plantar pressure monitoring system are mainly divided into piezoelectric sensors, capacitive sensors and piezoresistive sensors. Among them, piezoelectric sensors rely on the piezoelectric effect, that is, the dipoles in the piezoelectric material are reoriented and arranged under the action of external pressure to form electric polarization. The characteristics of this type of sensor are that it can be self-powered, and it has the advantages of simple structure, wide material, wide dynamic response range and long service life, but it cannot monitor static loads. In addition, piezoelectric materials can be divided into piezoelectric ceramics and piezoelectric polymers. Although piezoelectric ceramics have high piezoelectric properties, they are not flexible. Therefore, the current flexible piezoelectric sensors mainly use piezoelectric polymers such as PVDF and its derivatives (P(VDF-TrFE), P(VDF-HFP)). Capacitive and piezoresistive sensors realize pressure monitoring by measuring the resistance or capacitance changes of the material under load. They have the advantages of being able to detect dynamic and static loads, but they all require external power supplies to power them.

[0004] However, due to the limitations of the sensing mechanism, although people have made many contributions to improving the performance of a single type of sensor, it is still accompanied by problems such as the inability to monitor static pressure, narrow dynamic response range, and long response time. In the process of plantar pressure monitoring, the sensor needs to maintain high sensitivity and accuracy in a variety of complex motion environments such as patients standing still, walking, running, and going up and down stairs. In addition, capacitive and piezoresistive sensors do not have the ability to be self-powered and require an external power supply to power them, which greatly sacrifices their integration and portability. Faced with the above challenges, whether it is piezoelectric, piezoresistive or capacitive sensors, it is difficult to achieve real-time monitoring of the above-mentioned high dynamic and static pressure environments.

[0005] Faced with this problem, the inventors previously proposed a customizable, flexible piezoelectric-piezoresistive dynamic-static sensor with an array structure (application number 202110399548.8), and the sensor significantly reduced the process requirements for piezoresistive materials, while avoiding device failure caused by the conduction of the upper and lower electrodes when depositing electrodes. Since piezoresistive sensors are easily affected by the working environment, have poor long-term stability and high energy consumption, they are not suitable for long-term and complex working environments such as plantar pressure monitoring, and their sensitivity and linearity need to be further improved. At the same time, through a search of prior art literature, it was found that a Chinese patent with application number 202410950523.6 discloses a piezoelectric / resistive three-dimensional force sensor for fabric detection, the piezoelectric layer of which is polyvinylidene fluoride-hexafluoropropylene (PVDF-HFP) doped with piezoelectric ceramic barium titanate (BaTiO3), however, the impedance difference between ceramics and polymers reduces the sensitivity of the sensor, and because piezoelectric ceramics are biotoxic, they are not suitable for long-term use as wearable devices. In addition, the piezoresistive or capacitive parts of the above two dual-mechanism sensors require external power supply, which greatly reduces the integration and portability of the sensors.

[0006] Based on the above viewpoints, it is necessary to propose a new pressure sensor to detect dynamic and static plantar pressure in real time and realize self-power supply of the sensor. Summary of the invention

[0007] In view of the defects in the prior art, an object of the present invention is to provide a self-powered voltage-capacitive sensor for dynamic and static coordinated detection and a preparation method thereof.

[0008] According to one aspect of the present invention, there is provided a self-powered voltage-capacitance sensor for dynamic and static coordinated detection, comprising:

[0009] A piezoelectric unit, used for collecting dynamic signals, wherein the piezoelectric unit comprises, from top to bottom, a top packaging layer, an upper electrode layer, a piezoelectric layer, a lower electrode layer and a central isolation layer;

[0010] A self-powered capacitor unit, used for collecting static or low-frequency signals, the self-powered capacitor unit comprises, from bottom to top, a bottom packaging layer, a combined lower electrode layer, a dielectric layer and a combined upper electrode layer, wherein the outer ring of the dielectric layer is provided with a radial isolation layer, and the outer ring of the radial isolation layer is provided with a power supply layer;

[0011] The lower surface of the central isolation layer of the piezoelectric unit is bonded face to face with the upper surface of the combined upper electrode layer of the self-powered capacitor unit, so that the piezoelectric unit and the self-powered capacitor unit form an integral structure.

[0012] Optionally, the piezoelectric layer is a polyvinylidene fluoride-trifluoroethylene film doped with redox graphene; the thickness of the piezoelectric layer is 40 microns to 80 microns.

[0013] Optionally, the dielectric layer is a polydimethylsiloxane film; the thickness of the dielectric layer is 10 microns to 100 microns.

[0014] Optionally, the power supply layer is a polyvinylidene fluoride-trifluoroethylene film doped with redox graphene; the thickness of the power supply layer is 10 microns to 100 microns.

[0015] Optionally, the material of the upper electrode layer, the lower electrode layer, the combined upper electrode layer and the combined lower electrode layer is selected from any one of gold, silver, copper and a conductive polymer.

[0016] Optionally, the central isolation layer and the radial isolation layer are polyimide films, and the thickness of the central isolation layer and the radial isolation layer is 20 micrometers to 100 micrometers.

[0017] Optionally, the materials of the top encapsulation layer and the bottom encapsulation layer are both p-xylene dichloride dimer; the thickness of the top encapsulation layer and the bottom encapsulation layer is 20 micrometers to 100 micrometers.

[0018] According to a second aspect of the present invention, there is provided a method for preparing the above-mentioned self-powered voltage-capacitive sensor for dynamic and static coordinated detection, the method comprising:

[0019] providing a piezoelectric layer;

[0020] Depositing metal electrodes on the upper and lower surfaces of the piezoelectric layer to obtain an upper electrode layer and a lower electrode layer;

[0021] Spin coating a top encapsulation layer on the upper surface of the upper electrode layer;

[0022] Bonding the lower surface of the lower electrode layer to the upper surface of the central isolation layer to obtain a piezoelectric unit;

[0023] Providing a dielectric layer, a power supply layer and a radial isolation layer respectively, and arranging the dielectric layer, the radial isolation layer and the power supply layer in sequence on the same plane and bonding them in pairs to form a whole;

[0024] Depositing metal electrodes on the upper and lower surfaces of the dielectric layer and the power supply layer respectively to obtain a combined upper electrode layer and a combined lower electrode layer;

[0025] Spin coating a bottom encapsulation layer on the lower surface of the combined lower electrode to obtain a self-powered capacitor unit;

[0026] The piezoelectric unit and the self-powered capacitor unit are modified to the same size, and then the lower surface of the central isolation layer of the piezoelectric unit and the upper surface of the combined upper electrode layer of the self-powered capacitor unit are bonded together face to face to obtain a self-powered piezoelectric capacitor sensor for dynamic and static coordinated detection.

[0027] Optionally, the method has at least one of the following features:

[0028] - the providing of the piezoelectric layer comprises: preparing a polyvinylidene fluoride-trifluoroethylene film doped with redox graphene by a solution spin coating method to obtain the piezoelectric layer;

[0029] - the dielectric layer, the power supply layer and the radial isolation layer are provided respectively, wherein: the polydimethylsiloxane film is prepared by a solution spin coating method to obtain the dielectric layer;

[0030] - The dielectric layer, the power supply layer and the radial isolation layer are provided respectively, wherein: the polyvinylidene fluoride-trifluoroethylene film doped with redox graphene is prepared by a solution spin coating method to obtain the power supply layer.

[0031] Compared with the prior art, the present invention has at least one of the following beneficial effects:

[0032] The self-powered piezoelectric-capacitive sensor provided by the present invention bonds the piezoelectric unit and the self-powered capacitor unit together in a face-to-face manner, monitors the dynamic plantar pressure signal of a person when running, jumping and climbing through the piezoelectric effect, monitors the static plantar pressure signal of a person when standing still through the capacitance change of the dielectric layer, and realizes dynamic and static load monitoring in a complex environment of the sole by using the piezoelectric-capacitive multiple effect. At the same time, the capacitor unit is powered by the power supply layer, and has high integration and portability. Compared with piezoresistive sensors, capacitive sensors themselves have the advantages of being less affected by the external environment, high sensitivity, low power consumption, and good durability. In addition, the present invention solves the problems of impedance mismatch and the need for external power supply for capacitive sensors by designing the sensor structure, greatly improving the integration of the overall sensor, and is suitable for long-term health monitoring of foot and ankle patients. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Other features, objects and advantages of the present invention will become more apparent from the detailed description of non-limiting embodiments made with reference to the following drawings:

[0034] Figure 1 It is a schematic diagram of the three-dimensional overall structure of a self-powered voltage-capacitance sensor for dynamic and static coordinated detection in one embodiment of the present invention;

[0035] Figure 2 is a cross-sectional schematic diagram of a self-powered voltage-capacitance sensor for dynamic and static coordinated detection in one embodiment of the present invention;

[0036] The marks in the figure are: 1 is the top packaging layer, 2 is the upper electrode layer, 3 is the piezoelectric layer, 4 is the lower electrode layer, 5 is the central isolation layer, 6 is the combined upper electrode layer, 7 is the dielectric layer, 8 is the radial isolation layer, 9 is the power supply layer, 10 is the combined lower electrode layer, and 11 is the bottom packaging layer. DETAILED DESCRIPTION

[0037] The present invention is described in detail below in conjunction with specific embodiments. The following embodiments will help those skilled in the art to further understand the present invention, but are not intended to limit the present invention in any form. It should be noted that, for those of ordinary skill in the art, several variations and improvements may be made without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

[0038] Various structural schematic diagrams according to embodiments of the present application are shown in the accompanying drawings. These figures are not drawn to scale, and some details are magnified and some details may be omitted for the purpose of clear expression. The shapes of various regions and layers shown in the figures and the relative sizes and positional relationships therebetween are only exemplary, and may deviate in practice due to manufacturing tolerances or technical limitations, and those skilled in the art may further design regions / layers with different shapes, sizes, and relative positions according to actual needs, which all belong to the scope of protection of the present invention.

[0039] Reference Figure 1 and Figure 2 As shown, a self-powered piezoelectric capacitive sensor for dynamic and static coordinated detection provided by an embodiment of the present invention includes a piezoelectric unit and a self-powered capacitor unit, wherein: the piezoelectric unit is used to collect dynamic signals, and the piezoelectric unit includes a top packaging layer 1, an upper electrode layer 2, a piezoelectric layer 3, a lower electrode layer 4 and a central isolation layer 5 from top to bottom; the upper electrode layer 2 is arranged on the upper surface of the piezoelectric layer 3, and the lower electrode layer 4 is arranged on the lower surface of the piezoelectric layer 3; the top packaging layer 1 is located on the upper surface of the upper electrode layer 2, and the central isolation layer 5 is located on the lower surface of the lower electrode layer 4; the self-powered capacitor unit is used to collect static or low-frequency signals, and the self-powered capacitor unit includes a bottom packaging layer 11, a combined lower electrode layer 10 from bottom to top. , a dielectric layer 7 and a combined upper electrode layer 6, wherein the outer ring of the dielectric layer 7 is provided with a radial isolation layer 8, the outer ring of the radial isolation layer 8 is provided with a power supply layer 9, and the dielectric layer 7, the radial isolation layer 8 and the power supply layer 9 are located in the same plane; the combined upper electrode layer 6 is arranged on the upper surface of the dielectric layer 7 and the power supply layer 9, and the combined lower electrode layer 10 is arranged on the lower surface of the dielectric layer 7 and the power supply layer 9; the bottom packaging layer 11 is arranged on the lower surface of the combined lower electrode layer 10; the lower surface of the central isolation layer 5 of the piezoelectric unit and the upper surface of the combined upper electrode layer 6 of the self-powered capacitor unit are face-to-face bonded, so that the piezoelectric unit and the self-powered capacitor unit form an integral structure, which can detect dynamic and static plantar pressure in real time.

[0040] In the embodiment of the present invention, the materials of the piezoelectric unit and the self-powered capacitor unit are both made of high-molecular polymer materials with excellent bioaffinity, good flexibility, and strong environmental tolerance, so that when the flexible pressure sensor is subjected to external loads, the whole can undergo corresponding deformation, and generate piezoelectric signals and capacitance changes respectively, which is suitable for complex plantar pressure monitoring environments.

[0041] In some embodiments, considering that doping of conductive particles can improve the piezoelectric properties of polymer piezoelectric materials by promoting crystal phase transition, the piezoelectric layer 3 and the power supply layer 9 are polyvinylidene fluoride-trifluoroethylene (P(VDF-TrFE)) films doped with redox graphene (rGO), which can be prepared by solution casting. The thickness of the piezoelectric layer 3 is 40 microns to 80 microns. The thickness of the power supply layer 9 is 10 microns to 100 microns.

[0042] The piezoelectric part of the sensor in the above embodiment of the present invention mainly adopts PVDF-TrFE with high piezoelectric performance, wherein only a very small amount (0.1wt%) of redox graphene is doped for PVDF-TrFE modification, so that no impedance mismatch occurs, thereby solving the problem of reduced sensitivity caused by impedance difference between ceramics and polymers in the piezoelectric part of the sensor in the prior art.

[0043] In some embodiments, the dielectric layer 7 is a polydimethylsiloxane (PDMS) film with excellent dielectric properties; the thickness of the dielectric layer 7 is 10 microns to 100 microns, and the thickness of the power supply layer 9 is consistent with the thickness of the dielectric layer 7. The dielectric layer 7 can be prepared by a spin coating method. When subjected to external forces, the dielectric layer 7 will deform, which is specifically manifested as a change in its thickness, thereby causing the capacitance of the dielectric layer 7 to change. By measuring the change in capacitance, the detection of external forces can be achieved.

[0044] In some embodiments, the material of the upper electrode layer 2, the lower electrode layer 4, the combined upper electrode layer 6 and the combined lower electrode layer 10 is selected from any one of materials with good conductivity such as gold, silver, copper and conductive polymers. The upper and lower electrode layers and the combined upper and lower electrode layers can be prepared by any method of screen printing, masking, magnetron sputtering, electron beam evaporation or brush coating.

[0045] In some embodiments, the central isolation layer 5 and the radial isolation layer 8 are polyimide (PI) films, which have a good isolation effect. The thickness of the central isolation layer 5 and the radial isolation layer 8 is 20 micrometers to 100 micrometers.

[0046] In some embodiments, the materials of the top encapsulation layer 1 and the bottom encapsulation layer 11 are both parylene-C; the thickness of the top encapsulation layer 1 and the bottom encapsulation layer 11 is 20 micrometers to 100 micrometers, thereby achieving a good encapsulation effect.

[0047] Another embodiment of the present invention provides a method for preparing the above-mentioned self-powered piezoelectric capacitive sensor for dynamic and static coordinated detection, the method comprising the steps of preparing a piezoelectric unit, preparing a self-powered capacitive unit, and bonding the two together, and continue to refer to Figure 1 and Figure 2 , the method is as follows:

[0048] S1, providing a piezoelectric layer 3;

[0049] S2, depositing metal electrodes on the upper and lower surfaces of the piezoelectric layer 3, respectively, to obtain an upper electrode layer 2 and a lower electrode layer 4;

[0050] S3, spin coating the top encapsulation layer 1 on the upper surface of the upper electrode layer 2;

[0051] S4, bonding the lower surface of the lower electrode layer to the upper surface of the central isolation layer 5 to obtain a piezoelectric unit;

[0052] S5, respectively provide a dielectric layer 7, a power supply layer 9 and a radial isolation layer 8, and arrange the dielectric layer 7, the radial isolation layer 8 and the power supply layer 9 in sequence on the same plane and bond them in pairs to form a whole;

[0053] S6, depositing metal electrodes on the upper and lower surfaces of the dielectric layer 7 and the power supply layer 9, respectively, to obtain a combined upper electrode layer 6 and a combined lower electrode layer 10;

[0054] S7, spin coating the bottom encapsulation layer 11 on the lower surface of the combined lower electrode to obtain a self-powered capacitor unit;

[0055] S8. Modify the piezoelectric unit and the self-powered capacitor unit to the same size, and then bond the lower surface of the central isolation layer 5 of the piezoelectric unit and the upper surface of the combined upper electrode layer 6 of the self-powered capacitor unit face to face to obtain a self-powered piezoelectric capacitor sensor for dynamic and static coordinated detection.

[0056] In some embodiments, providing the piezoelectric layer 3 includes: preparing a polyvinylidene fluoride-trifluoroethylene film doped with redox graphene by a solution spin coating method to obtain the piezoelectric layer 3.

[0057] In some embodiments, a dielectric layer 7, a power supply layer 9 and a radial isolation layer 8 are provided respectively, wherein: a polydimethylsiloxane film is prepared by a solution spin coating method to obtain a dielectric layer 7; a polyvinylidene fluoride-trifluoroethylene film doped with redox graphene is prepared by a solution spin coating method to obtain a power supply layer 9.

[0058] In a specific embodiment, a method for preparing a dynamic and static self-powered piezoelectric-capacitive flexible sensor for plantar pressure monitoring comprises the following steps:

[0059] S1: preparing a 40-80 μm thick rGO / P(VDF-TrFE) film as a piezoelectric layer;

[0060] Specifically, 0.001 g of rGO powder and 1 g of P(VDF-TrFE) powder were dissolved in dimethylformamide (DMF) respectively, mixed and stirred with a magnetic stirrer for 1 hour, and after stirring evenly, the bubbles introduced during the stirring process were extracted with a vacuum oven, and the mixed solution was spin-coated on a glass slide by spin coating, wherein the rotation speed was controlled at 1200 pm-1500 rpm, the rotation time was 1 minute, and finally placed in a vacuum oven, cured at 60°C for 4 hours, and annealed at 140°C for 2 hours.

[0061] S2: printing upper electrodes on the upper and lower surfaces of the piezoelectric layer respectively by screen printing, and depositing a layer of parylene-C film on the upper surface thereof.

[0062] S3: Bonding the PI film to the lower surface of the piezoelectric layer.

[0063] S4: The PI film was cut into a ring using laser cutting technology and fixed in the center of the glass sheet.

[0064] S5: PDMS film is used as the dielectric layer;

[0065] Specifically, the PDMS solution body and the curing agent are mixed in a mass ratio of 10:1, stirred evenly, and then the bubbles introduced during the stirring process are extracted in a vacuum oven. Then, the inside of the PI ring placed on the S4 glass sheet is evenly spin-coated, wherein the rotation speed is controlled at 500pm-800rpm, the rotation time is 1 minute, and then the excess part is removed and placed in a vacuum oven, and cured at 100°C for 2 hours.

[0066] S6: rGO / P (VDF-TrFE) film is used as the power supply layer. The solution preparation method is the same as S1. Pour it onto the outside of the PI ring on the S4 glass sheet and spin coat it evenly. The rotation speed is controlled at 1200pm-1500rpm. The rotation time is 1 minute. Finally, put it into a vacuum oven, cure it at 60°C for 4h, and anneal it at 140°C for 2h.

[0067] S7: The PI mask is cut by laser cutting, and electrodes are printed on the upper and lower surfaces of the dielectric layer and the power supply layer respectively by screen printing, and a layer of parylene-C film is deposited on the lower surface thereof.

[0068] S8: Bond the upper surface of the combined upper electrode layer of the self-powered capacitor unit prepared in S7 face-to-face with the lower surface of the central isolation layer of the piezoelectric unit obtained in S3 to obtain a self-powered piezoelectric-capacitive flexible plantar pressure sensor.

[0069] The above-mentioned embodiment of the present invention, through the interaction between the sensor structure and materials, etc., bonds the piezoelectric unit and the self-powered capacitor unit together in a face-to-face manner, monitors the dynamic plantar pressure signal of a person when running, jumping and climbing through the piezoelectric effect, monitors the static plantar pressure signal of a person when standing still through the capacitance change of the dielectric layer, and realizes the dynamic and static load monitoring in a complex plantar environment by using the piezoelectric-capacitive multiple effect. At the same time, the capacitor unit is powered by the power supply layer, and has a high degree of integration and portability. The pressure sensor is less affected by the external environment, has the advantages of high sensitivity, low power consumption, high linearity, high stability, good durability, etc., is suitable for complex plantar pressure monitoring environments, and can be used for long-term health monitoring of ankle patients.

[0070] The above describes the specific embodiments of the present invention. It should be understood that the present invention is not limited to the above specific embodiments, and those skilled in the art can make various modifications or variations within the scope of the claims, which does not affect the essence of the present invention. The above preferred features can be used in any combination without conflicting with each other.

Claims

1. A self-powered voltage-capacitive sensor for dynamic and static coordinated detection, characterized in that: include: A piezoelectric unit, used for collecting dynamic signals, wherein the piezoelectric unit comprises, from top to bottom, a top packaging layer, an upper electrode layer, a piezoelectric layer, a lower electrode layer and a central isolation layer; A self-powered capacitor unit, used for collecting static or low-frequency signals, the self-powered capacitor unit comprises, from bottom to top, a bottom packaging layer, a combined lower electrode layer, a dielectric layer and a combined upper electrode layer, wherein the outer ring of the dielectric layer is provided with a radial isolation layer, and the outer ring of the radial isolation layer is provided with a power supply layer; The lower surface of the central isolation layer of the piezoelectric unit is bonded face to face with the upper surface of the combined upper electrode layer of the self-powered capacitor unit, so that the piezoelectric unit and the self-powered capacitor unit form an integral structure.

2. The self-powered voltage-capacitive sensor for dynamic and static coordinated detection according to claim 1, characterized in that: The piezoelectric layer is a polyvinylidene fluoride-trifluoroethylene film doped with redox graphene; the thickness of the piezoelectric layer is 40 microns to 80 microns.

3. The self-powered voltage-capacitive sensor for dynamic and static coordinated detection according to claim 1, characterized in that: The dielectric layer is a polydimethylsiloxane film; the thickness of the dielectric layer is 10 microns to 100 microns.

4. The self-powered voltage-capacitive sensor for dynamic and static coordinated detection according to claim 1, characterized in that: The power supply layer is a polyvinylidene fluoride-trifluoroethylene film doped with redox graphene; the thickness of the power supply layer is 10 microns to 100 microns.

5. The self-powered voltage-capacitive sensor for dynamic and static coordinated detection according to claim 1, characterized in that: The material of the upper electrode layer, the lower electrode layer, the combined upper electrode layer and the combined lower electrode layer is selected from any one of gold, silver, copper and a conductive polymer.

6. The self-powered voltage-capacitive sensor for dynamic and static coordinated detection according to claim 1, characterized in that: The central isolation layer and the radial isolation layer are polyimide films.

7. The self-powered voltage-capacitive sensor for dynamic and static coordinated detection according to claim 1, characterized in that: The thickness of the central isolation layer and the radial isolation layer is 20 micrometers to 100 micrometers.

8. The self-powered voltage-capacitive sensor for dynamic and static coordinated detection according to claim 1, characterized in that: The materials of the top encapsulation layer and the bottom encapsulation layer are both dichloroparaxylene dimer; the thickness of the top encapsulation layer and the bottom encapsulation layer is 20 micrometers to 100 micrometers.

9. A method for preparing a self-powered voltage-capacitance sensor for dynamic and static coordinated detection according to any one of claims 1 to 8, characterized in that: include: providing a piezoelectric layer; Depositing metal electrodes on the upper and lower surfaces of the piezoelectric layer to obtain an upper electrode layer and a lower electrode layer; Spin coating a top encapsulation layer on the upper surface of the upper electrode layer; Bonding the lower surface of the lower electrode layer to the upper surface of the central isolation layer to obtain a piezoelectric unit; Providing a dielectric layer, a power supply layer and a radial isolation layer respectively, and arranging the dielectric layer, the radial isolation layer and the power supply layer in sequence on the same plane and bonding them in pairs to form a whole; Depositing metal electrodes on the upper and lower surfaces of the dielectric layer and the power supply layer respectively to obtain a combined upper electrode layer and a combined lower electrode layer; Spin coating a bottom encapsulation layer on the lower surface of the combined lower electrode to obtain a self-powered capacitor unit; The piezoelectric unit and the self-powered capacitor unit are modified to the same size, and then the lower surface of the central isolation layer of the piezoelectric unit and the upper surface of the combined upper electrode layer of the self-powered capacitor unit are bonded together face to face to obtain a self-powered piezoelectric capacitor sensor for dynamic and static coordinated detection.

10. The preparation method according to claim 9, characterized in that: The method has at least one of the following characteristics: - The piezoelectric layer is provided, comprising: preparing polyvinylidene fluoride doped with redox graphene by a solution spin coating method - trifluoroethylene film to obtain a piezoelectric layer; - the dielectric layer, the power supply layer and the radial isolation layer are provided respectively, wherein: the polydimethylsiloxane film is prepared by a solution spin coating method to obtain the dielectric layer; - The dielectric layer, the power supply layer and the radial isolation layer are provided respectively, wherein: the polyvinylidene fluoride-trifluoroethylene film doped with redox graphene is prepared by a solution spin coating method to obtain the power supply layer.

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