Optical filter spin-coating preparation method

Abstract

The invention discloses an optical filter spin-coating preparation method which comprises the following steps: acquiring electron transition characteristic data and intermolecular acting force data of a precursor solution, and determining initial aggregation state parameters and intermolecular interaction strength parameters of precursor molecules; performing dielectric constant regulation and control treatment on the surface of the substrate to form a dielectric constant gradient distribution and periodic microstructure; performing spin-coating treatment on the functionalized substrate, applying an electric field, a sound field and a light field, and adjusting field intensity and spatial distribution; acquiring light intensity signals and polarized light detection signals of the film at different scattering angles, and analyzing anisotropic characteristics of scattering patterns; and adjusting the rotation speed, the temperature field and the airflow field according to the spatial distribution data of the molecular orientation, and cooling and curing to obtain the optical filter. According to the technical scheme, the initial state information of precursor molecules is obtained through orthogonal double-light-path detection, molecular orientation is dynamically regulated and controlled through the multi-field synergistic effect, and accurate control over molecular arrangement is achieved in combination with real-time monitoring and feedback optimization.

Description

Technical Field

[0001] The invention relates to the technical field of optical film preparation, and in particular to a method for preparing a filter by spin coating. Background Art

[0002] Optical filters are optical components that selectively transmit or absorb light of different wavelengths, playing an important role in optical communications, displays, imaging and other fields. Spin coating technology for optical filters is a commonly used thin film preparation method. Its basic principle is to drip a solution containing precursor molecules onto a rotating substrate, and through the combined action of centrifugal force and surface tension, the solution is evenly spread to form a thin film. Subsequently, a filter with specific optical properties is obtained through solvent evaporation and curing. This method has the advantages of simple process, low cost and wide application range, and has become an important technical means for large-scale production of optical filters.

[0003] However, the current filter spin coating preparation technology still faces severe challenges in the precise control of the molecular scale. The existing technology mainly focuses on the macroscopic properties of the film, such as thickness uniformity and surface morphology, but lacks effective monitoring of the dynamic behavior of the precursor molecules during the spin coating process. Especially in an environment where the solvent evaporates rapidly, the precursor molecules will undergo complex rearrangements and aggregations. The disorder of this microstructure often leads to a decrease in the spectral selectivity of the final product. Due to the lack of real-time and accurate molecular scale monitoring methods, the existing process is difficult to achieve precise control of molecular arrangement, which has become a key bottleneck restricting the improvement of filter performance. Especially in the field of high-end optical applications, this disordered arrangement at the molecular level directly affects key indicators such as the bandwidth, transmittance and cutoff characteristics of the filter, severely limiting the application range and performance improvement of the product. Summary of the invention

[0004] The main purpose of the present invention is to solve the technical problem that the existing filter spin coating preparation technology lacks in-situ monitoring and precise control means of the dynamic rearrangement behavior of precursor molecules, which seriously affects the spectral selection performance of the filter.

[0005] A first aspect of the present invention provides a method for preparing a filter by spin coating, the method comprising: Acquiring electronic transition characteristic data and intermolecular force data of the precursor solution, determining initial aggregation state parameters and intermolecular interaction strength parameters of the precursor molecules according to the electronic transition characteristic data and intermolecular force data, and obtaining quantitative characterization data of the spatial conformation of the precursor molecules; According to the quantitative characterization data, a dielectric constant control treatment is performed on the substrate surface so that a dielectric constant gradient distribution is formed on the substrate surface from the center to the edge, and a periodic microstructure is formed on the substrate surface to obtain a functionalized substrate with a directional force; The functionalized substrate is subjected to spin coating, during which a radially varying electric field, a directional acoustic field and a preset distributed light field are applied to the precursor molecules, and the intensity and spatial distribution of the electric field, the intensity and spatial distribution of the acoustic field and the intensity and spatial distribution of the light field are adjusted according to the molecular orientation state to obtain a film with directional molecular arrangement; Acquiring light intensity signals and polarized light detection signals of the film at different scattering angles, analyzing anisotropic characteristics of scattering patterns according to the light intensity signals and polarized light detection signals, and obtaining spatial distribution data of molecular orientation in the film; According to the spatial distribution data of the molecular orientation, the time-varying curve of the rotation speed is adjusted, and the distribution parameters of the temperature field and the airflow field are controlled, and a filter with a preset molecular orientation structure is obtained through a cooling and curing process.

[0006] Optionally, the obtaining of electronic transition characteristic data and intermolecular force data of the precursor solution, determining the initial aggregation state parameters and intermolecular interaction strength parameters of the precursor molecules according to the electronic transition characteristic data and intermolecular force data, and obtaining quantitative characterization data of the spatial conformation of the precursor molecules, includes: The precursor solution is simultaneously subjected to orthogonal dual-optical path detection, wherein the first optical path acquires the electronic transition characteristic data within the wavelength range of 200-800nm, and the second optical path acquires the intermolecular force data within the wavelength range of 800-2500nm; Performing peak analysis on the electronic transition characteristic data to obtain the peak position, peak intensity ratio and peak shape index of the main absorption peak, and obtaining the electronic transition characteristic spectrum of the precursor molecule; Performing characteristic peak analysis on the intermolecular force data to obtain the absorption peak area ratio and peak position shift of hydrogen bonding and van der Waals force, and obtaining the interaction characteristic spectrum of the precursor molecules; Calculating the initial aggregation state parameters and intermolecular interaction strength parameters of the precursor molecules according to the orthogonal correlation analysis of the electronic transition characteristic spectrum and the interaction characteristic spectrum; In the temperature range of 25-45°C, the temperature responsiveness analysis of the initial aggregation state parameters and the intermolecular interaction strength parameters is performed to obtain quantitative characterization data of the spatial conformation of the precursor molecules.

[0007] Optionally, the precursor solution is simultaneously subjected to orthogonal dual-optical path detection, wherein the first optical path acquires electronic transition characteristic data within a wavelength range of 200-800nm, and the second optical path acquires intermolecular force data within a wavelength range of 800-2500nm, including: Collecting electron transition characteristics of a first detection area in the orthogonal optical path system, where the first detection area is a spatial area illuminated only by the first optical path, and obtaining reference electron transition characteristic data within a wavelength range of 200-800 nm; The intermolecular force is collected from the second detection area in the orthogonal optical path system, where the second detection area is a spatial area illuminated only by the second optical path, and the benchmark intermolecular force data within the wavelength range of 800-2500nm is obtained; Perform dual-spectrum synchronous acquisition on the cross-detection area in the orthogonal optical path system, where the cross-detection area is a spatial area illuminated by the first optical path and the second optical path at the same time, to obtain coupled electronic transition characteristic data within the wavelength range of 200-800nm ​​and coupled intermolecular force data within the wavelength range of 800-2500nm; Using a spatial weighted algorithm to synthesize the reference electron transition characteristic data and the coupled electron transition characteristic data to obtain electron transition characteristic data within a wavelength range of 200-800 nm; The reference intermolecular force data and the coupled intermolecular force data are synthesized by using a spatial weighting algorithm to obtain the intermolecular force data within a wavelength range of 800-2500 nm.

[0008] Optionally, the dielectric constant of the substrate surface is controlled according to the quantitative characterization data, so that the substrate surface forms a dielectric constant gradient distribution from the center to the edge, and a periodic microstructure is formed on the substrate surface to obtain a functionalized substrate with a directional force, including: According to the initial aggregation state parameters and the intermolecular interaction strength parameters in the quantitative characterization data, the dielectric constant attenuation function from the center to the edge of the substrate surface is calculated to obtain a dielectric constant spatial distribution curve; Performing gradient ion implantation on the substrate surface, regulating the energy distribution and dose distribution of the ion implantation according to the dielectric constant spatial distribution curve, to obtain a substrate surface with a dielectric constant gradient; According to the intermolecular interaction strength parameter, the spatial period and depth parameters of the substrate surface microstructure are calculated to obtain configuration data of the periodic microstructure; Performing periodic microstructural processing on the surface of the substrate having a dielectric constant gradient, controlling the periodic spacing and depth distribution of the microstructure according to the configuration data, and obtaining a periodic microstructure; The surface charge distribution test is performed on the periodic microstructure to obtain the spatial distribution data of the electrostatic force field and the shear force field, thereby obtaining a functionalized substrate with directional force.

[0009] Optionally, the step of calculating the dielectric constant attenuation function from the center to the edge of the substrate surface according to the initial aggregation state parameter and the intermolecular interaction strength parameter in the quantitative characterization data to obtain the dielectric constant spatial distribution curve includes: According to the initial aggregation state parameters and the intermolecular interaction strength parameters, the polarizability and dipole moment of the precursor molecules are quantitatively analyzed, and the variation law of the intermolecular electrostatic interaction potential energy with distance is obtained to obtain the molecular polarization characteristic data and the potential energy distribution function; According to the molecular polarization characteristic data and the potential energy distribution function, a correlation equation between the substrate surface dielectric constant and the molecular orientation is established to obtain a dielectric constant response function; The dielectric constant response function is subjected to radial coordinate transformation and temperature correction, and the dielectric constant gradient from the center to the edge of the substrate surface is calculated within a temperature range of 25-45° C. to obtain a dielectric constant spatial distribution curve.

[0010] Optionally, establishing a correlation equation between the substrate surface dielectric constant and the molecular orientation according to the molecular polarization characteristic data and the potential energy distribution function to obtain a dielectric constant response function includes: According to the molecular polarization characteristic data, the first relationship equation between the substrate surface dielectric constant and the molecular polarizability is constructed, which specifically includes: ε=1+4πNα / (1-4πNα / 3); Where ε is the substrate surface dielectric constant, π is the circumference, N is the molecular number density per unit volume, and α is the molecular polarizability; According to the potential energy distribution function, the second relationship equation between the molecular orientation angle and the electrostatic potential energy is established, which specifically includes: U = -pEcosθ; Where U is the electrostatic potential energy, p is the molecular dipole moment, E is the local electric field strength, and θ is the molecular orientation angle; The first relationship equation and the second relationship equation are coupled and calculated to obtain a dielectric constant response function, which specifically includes: ε(r)= +( - )exp(-r / )·L(pE / kT); where ε(r) is the dielectric constant at radial position r, r is the radial distance from the center of the substrate, is the characteristic attenuation length, is the optical frequency dielectric constant, is the static dielectric constant, exp is the natural exponential function, L is the Langevin function, p is the molecular dipole moment, E is the local electric field intensity, k is the Boltzmann constant, and T is the temperature.

[0011] Optionally, the functionalized substrate is subjected to spin coating, and during the spin coating process, a radially varying electric field, a directional acoustic field, and a preset distributed light field are applied to the precursor molecules, and the intensity and spatial distribution of the electric field, the intensity and spatial distribution of the acoustic field, and the intensity and spatial distribution of the light field are respectively adjusted according to the molecular orientation state to obtain a film with directional molecular arrangement, including: Apply an initial rotation speed to the functionalized substrate, and in the time interval of [0,60) seconds, adjust the electric field intensity by gradient according to the rotation radius, so that the electric field intensity decays exponentially from the center to the edge of the spin coating area, and obtain the spatial distribution data of the electric field; According to the spatial distribution data of the electric field, the acoustic field is phase modulated so that the acoustic pressure intensity is distributed periodically and gradually from the center to the edge of the spin coating area, and the acoustic pressure amplitude is adjusted according to the gradient of 5-10 kPa / cm in the time interval of [60,120) seconds to obtain the spatial distribution data of the acoustic field; Parameter matching is performed on the directional sound field distribution data, the wavelength of the light field is periodically modulated within the range of 400-700 nm within a time interval of [120, 180] seconds, and the light field intensity forms a decreasing distribution in the radial direction opposite to the sound pressure gradient, to obtain preset light field distribution data; According to the molecular orientation state detection signal, the field intensity factor of the electric field distribution data, the sound pressure factor of the directional sound field distribution data and the light intensity factor of the preset light field distribution data are adjusted according to the preset weight coefficients to obtain a film with directional molecular arrangement.

[0012] Optionally, the method of adjusting the field intensity factor of the electric field distribution data, the sound pressure factor of the directional sound field distribution data and the light intensity factor of the preset light field distribution data according to the molecular orientation state detection signal according to preset weight coefficients to obtain a film with directional molecular arrangement includes: According to the molecular orientation state detection signal, the deviation vector of the electric field intensity, the fluctuation coefficient of the sound pressure intensity and the modulation depth of the light field intensity are calculated to obtain the dynamic response characteristics of the three fields; Performing orthogonal decoupling analysis on the dynamic response characteristics of the three fields, establishing an inter-field interference elimination function, and obtaining an orthogonal parameter matrix for field intensity control; According to the orthogonal parameter matrix, the normalized weight coefficient of the electric field distribution data is calculated. , Normalized weight coefficient of directional sound field distribution data and the normalized weight coefficient of the preset light field distribution data , and make + + =1, and the weight coefficient group of the three-field coordinated regulation is obtained; According to the weight coefficient group, the field intensity factor of the electric field, the sound pressure factor of the acoustic field and the light intensity factor of the optical field are dynamically compensated to obtain a film with directional molecular arrangement.

[0013] Optionally, the step of acquiring light intensity signals and polarized light detection signals of the film at different scattering angles, analyzing anisotropic characteristics of scattering patterns according to the light intensity signals and polarized light detection signals, and obtaining spatial distribution data of molecular orientation in the film includes: In the 0-360 degree angle range, the scattered light intensity of the film is collected at equal intervals, and the light intensity data at 36 different scattering angles are obtained to obtain the scattered light intensity distribution curve of the film; Performing Fourier analysis on the scattered light intensity distribution curve, extracting the second-order symmetry coefficient and the fourth-order symmetry coefficient, and obtaining the anisotropic characteristic parameters of the film; The film is scanned by polarization state modulation to obtain the scattered signals in the horizontal and vertical polarization directions, and the polarization difference is calculated to obtain the polarization characteristic data of the molecular orientation. Correlation calculation is performed based on the anisotropic characteristic parameters and polarization characteristic data, a spatial statistical function of the molecular orientation is established, and spatial distribution data of the molecular orientation in the film is obtained.

[0014] Optionally, the time-varying curve of the rotation speed is adjusted according to the spatial distribution data of the molecular orientation, and the distribution parameters of the temperature field and the airflow field are controlled to obtain a filter having a preset molecular orientation structure through a cooling and curing process, including: According to the spatial distribution data of the molecular orientation, a piecewise control function of the rotation speed is established, the rotation speed is linearly reduced from 3000 rpm to 1000 rpm in the time interval [0, 60) seconds, and a constant rotation speed is maintained in the time interval [60, 120) seconds to obtain a time-varying curve of the rotation speed; Performing radial uniformity analysis on the spatial distribution data of the molecular orientation, adjusting the radial distribution of the temperature field according to the uniformity deviation value, so that the temperature forms a linear gradient of 25-45° C. from the center to the edge of the spin coating area, and obtaining the temperature field distribution parameters; According to the spatial distribution data of the molecular orientation and the temperature field distribution parameters, the flow rate of the airflow field is regulated so that the airflow velocity forms a logarithmic decreasing distribution of 0.5-2 m / s from the center to the edge of the spin coating area, and the airflow field distribution parameters are obtained; The film is tested for molecular orientation. After confirming that the orientation reaches a preset threshold, it is solidified by cooling at a cooling rate of 5°C / min to obtain a filter with a preset molecular orientation structure.

[0015] The embodiment of the present application performs dual characterization on the precursor solution, and simultaneously obtains the electronic transition characteristic data and the intermolecular force data, so as to accurately evaluate the initial aggregation state and intermolecular interaction strength of the precursor molecules. This combined detection method can not only reflect the aggregation state of the molecules, but also quantitatively characterize the intermolecular interaction strength, laying the foundation for subsequent precise regulation.

[0016] After obtaining precise information at the molecular level, this scheme uses dielectric constant gradient control technology to modify the substrate surface. By forming a dielectric constant gradient distribution from the center to the edge on the substrate surface, combined with the construction of a periodic microstructure, a directional force is generated at the molecular scale. The physical essence of this surface design is to use the electrostatic force field generated by the dielectric constant gradient and the shear force field generated by the microstructure to provide a driving force for the directional arrangement of molecules.

[0017] During the spin coating process, a three-field synergistic control mechanism was introduced. By simultaneously applying a radially varying electric field, a directional acoustic field, and a preset distributed light field, a multi-dimensional control system for molecular orientation was established. Among them, the electric field mainly controls the orientation of charged groups through electrostatic effects, the acoustic field adjusts the spatial distribution of molecules through the acoustic pressure gradient, and the light field affects the conformation of molecules by changing their optical properties. The synergistic effect of these three fields significantly enhances the ability to control molecular arrangement.

[0018] In order to achieve real-time monitoring of molecular arrangement, this scheme obtains light intensity signals and polarization detection signals at different scattering angles, analyzes the anisotropic characteristics of the scattering pattern, and then obtains the spatial distribution data of the molecular orientation. The physical basis of this detection method is that the order of molecular orientation will directly affect the angular distribution and polarization characteristics of the scattered light.

[0019] Finally, this scheme established a process parameter optimization mechanism based on molecular orientation feedback. By adjusting the time-varying curve of the rotation speed and accurately controlling the distribution parameters of the temperature field and the airflow field, dynamic optimization of the molecular arrangement was achieved. Especially in the cooling and curing stage, the orderly arrangement structure of the molecules was successfully stabilized through the coordinated control of temperature and airflow. This multi-parameter coordinated control method effectively solves the problem of disordered molecular arrangement in the prior art and significantly improves the spectral selection performance of the filter. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0021] Figure 1 Schematic diagram of an embodiment of a method for preparing a filter by spin coating in an embodiment of the present invention.

[0022] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0024] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0025] In addition, the descriptions of "first", "second", etc. in the present invention are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, "and / or" in the full text includes three solutions. Taking A and / or B as an example, it includes technical solution A, technical solution B, and technical solution that satisfies both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, which must be based on the ability of ordinary technicians in the field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0026] An embodiment of the present application provides a method for preparing a filter by spin coating. Figure 1 A flow chart of a method for preparing a filter by spin coating provided in an embodiment of the present application. In this embodiment, the method includes: See also Figure 1 , obtaining electronic transition characteristic data and intermolecular force data of the precursor solution, determining the initial aggregation state parameters and intermolecular interaction strength parameters of the precursor molecules according to the electronic transition characteristic data and intermolecular force data, and obtaining quantitative characterization data of the spatial conformation of the precursor molecules; In one embodiment of the present invention, the step of obtaining the electronic transition characteristic data and the intermolecular force data of the precursor solution, determining the initial aggregation state parameters and the intermolecular interaction strength parameters of the precursor molecules according to the electronic transition characteristic data and the intermolecular force data, and obtaining the quantitative characterization data of the spatial conformation of the precursor molecules includes: The precursor solution is simultaneously subjected to orthogonal dual-optical path detection, wherein the first optical path acquires the electronic transition characteristic data within the wavelength range of 200-800nm, and the second optical path acquires the intermolecular force data within the wavelength range of 800-2500nm; Performing peak analysis on the electronic transition characteristic data to obtain the peak position, peak intensity ratio and peak shape index of the main absorption peak, and obtaining the electronic transition characteristic spectrum of the precursor molecule; Performing characteristic peak analysis on the intermolecular force data to obtain the absorption peak area ratio and peak position shift of hydrogen bonding and van der Waals force, and obtaining the interaction characteristic spectrum of the precursor molecules; Calculating the initial aggregation state parameters and intermolecular interaction strength parameters of the precursor molecules according to the orthogonal correlation analysis of the electronic transition characteristic spectrum and the interaction characteristic spectrum; In the temperature range of 25-45°C, the temperature responsiveness analysis of the initial aggregation state parameters and the intermolecular interaction strength parameters is performed to obtain quantitative characterization data of the spatial conformation of the precursor molecules.

[0027] It should be noted that in the orthogonal dual optical path system, optical isolation technology is used to ensure that the two detection optical paths do not interfere with each other. Specifically, in the implementation process, a dichroic mirror with high reflectivity and high transmittance characteristics can be used. The design of this element has a reflectivity of more than 95% for the 200 to 800 nanometer band and a transmittance of more than 95% for the 800 to 2500 nanometer band, to ensure that light signals of different bands are effectively separated before entering the corresponding detector. In addition, optical isolation can also be combined with spatial filtering devices and precision mechanical shielding. By setting up independent sampling areas in the sample pool, the interference of side leakage and scattered light is avoided when the ultraviolet visible light and near-infrared light signals are collected separately, thereby ensuring the independence and accuracy of the signals of each detection optical path.

[0028] After collecting the characteristic data of the electronic transition of the first optical path, Gaussian and Lorentz curve fitting algorithms are used to analyze the spectral peaks during the data processing process, and the specific algorithm to be used is determined based on the actual measured spectral peak characteristics. Specifically, when the collected absorption spectrum peaks show high symmetry and the peak width is mainly caused by the instrument resolution, the Gaussian fitting algorithm is used; when the spectrum peaks show a long tail and the peak width is obviously affected by the molecular lifetime effect, the Lorentz fitting algorithm is used. When using these algorithms, the data is first noise filtered and baseline corrected. The corrected data is then used to solve the fitting parameters using the least squares method. An iterative termination condition is introduced during the fitting process, such as setting the residual sum of squares change rate to be lower than Or the R² value reaches 0.98 or above as the convergence standard. For example, in actual detection, when an absorption peak is detected at 350 nanometers, and its shape shows Gaussian distribution characteristics after preliminary observation, the Gaussian fitting algorithm will be automatically called to calculate the precise peak position, peak intensity ratio and peak shape index, thereby forming a quantitative characteristic spectrum reflecting the molecular electronic transition behavior.

[0029] For the intermolecular force data collected by the second optical path, the processing process is to integrate and automatically correct the characteristic absorption peak. The integration algorithm uses a numerical integration method based on trapezoidal integration or Simpson's rule, with the aim of accurately calculating the area of ​​the absorption peak; at the same time, the automatic correction method relies on a pre-established standard reference spectrum library, and by comparing the known peak positions in the standard sample, the actual measured peak position offset is linearly interpolated and corrected to ensure the consistency of the data with the standard curve. For example, when a characteristic peak is detected near 1200 nanometers, if the peak should be located at 1198 nanometers according to the standard reference spectrum, the system will automatically perform a peak offset correction, and the corrected data is used to calculate the absorption peak area ratio of hydrogen bonds and van der Waals forces, thereby forming a quantitatively significant intermolecular interaction characteristic spectrum.

[0030] After completing the independent processing of the two data, the orthogonal correlation analysis method is used to comprehensively process the electronic transition characteristic spectrum and the intermolecular force characteristic spectrum, and further calculate the initial aggregation state parameters and intermolecular interaction strength parameters of the precursor molecules. The process first uses a multivariate statistical regression model to establish a linear correlation between the spectrum parameters through the least squares method, and preliminarily obtains the linear regression coefficients of each parameter; then, nonlinear fitting technology is introduced, such as using the Levenberg-Marquardt algorithm to iteratively optimize the preliminary model to solve the nonlinear relationship in the data. The entire analysis process is implemented in the data processing software. The software will first perform a correlation test on the input multidimensional data, calculate the Pearson correlation coefficient and p value, ensure the statistical significance between the parameters, and then automatically adjust the model parameters until a correlation model that meets the preset goodness of fit criteria (for example, the adjusted R² value is greater than 0.95) is obtained. Through this orthogonal correlation analysis, not only can the molecular aggregation state be quantified, but also the actual value of the intermolecular interaction strength can be reflected.

[0031] Finally, in the temperature responsiveness test, the aforementioned initial aggregation state parameters and intermolecular interaction intensity parameters were systematically collected in the temperature range of 25 to 45 ° C, and the collected data were subjected to statistical regression analysis. Specifically, during the experiment, a constant temperature bath was used in conjunction with a PID temperature control system to ensure that the temperature remained stable within the set range, and repeated sampling was performed at each temperature point to obtain multiple sets of data. For these data, the linear regression method was first used to fit the relationship between temperature and each parameter. If the fitting effect was not good, the quadratic or exponential regression model was used to refit the data. The specific fitting algorithm used the least squares method and iterative optimization technology, and the mean square error and goodness of fit were set as evaluation indicators. For example, the initial aggregation state parameters measured at 35 ° C showed a significant change compared with those at 30 ° C. After linear regression analysis, if the fitting residual was found to be large, polynomial regression would be further used to finely fit the data to obtain a response curve that can accurately describe the trend of temperature influence. Through this statistical regression analysis method, the temperature responsiveness data obtained can clearly reflect the spatial conformational changes of the precursor molecules at different temperatures, providing an accurate numerical basis for the adjustment of subsequent process parameters.

[0032] In one embodiment of the present invention, the precursor solution is simultaneously subjected to orthogonal dual-optical path detection, wherein the first optical path acquires electronic transition characteristic data within a wavelength range of 200-800nm, and the second optical path acquires intermolecular force data within a wavelength range of 800-2500nm, including: Collecting electron transition characteristics of a first detection area in the orthogonal optical path system, where the first detection area is a spatial area illuminated only by the first optical path, and obtaining reference electron transition characteristic data within a wavelength range of 200-800 nm; The intermolecular force is collected from the second detection area in the orthogonal optical path system, where the second detection area is a spatial area illuminated only by the second optical path, and the benchmark intermolecular force data within the wavelength range of 800-2500nm is obtained; Perform dual-spectrum synchronous acquisition on the cross-detection area in the orthogonal optical path system, where the cross-detection area is a spatial area illuminated by the first optical path and the second optical path at the same time, to obtain coupled electronic transition characteristic data within the wavelength range of 200-800nm ​​and coupled intermolecular force data within the wavelength range of 800-2500nm; Using a spatial weighted algorithm to synthesize the reference electron transition characteristic data and the coupled electron transition characteristic data to obtain electron transition characteristic data within a wavelength range of 200-800 nm; The reference intermolecular force data and the coupled intermolecular force data are synthesized by using a spatial weighting algorithm to obtain the intermolecular force data within a wavelength range of 800-2500 nm.

[0033] It should be noted that the orthogonal optical path system in this embodiment divides the sample area into three non-overlapping and interrelated detection areas, namely the first detection area, the second detection area and the cross detection area. The system achieves strict optical isolation through precisely arranged optical elements. First, in the first detection area, only ultraviolet visible light in the 200 to 800 nanometer band is allowed to pass through. A dichroic mirror with high reflectivity and high transmittance characteristics and a precision optical shielding member are used to make the area only irradiated by the first optical path, thereby realizing the collection of the benchmark electronic transition characteristic data. At the same time, in the second detection area, by configuring a near-infrared filter and a shielding device dedicated to the detection of the 800 to 2500 nanometer band, the area is only irradiated by the second optical path, thereby obtaining the benchmark intermolecular force data; and the setting of the cross detection area makes the area irradiated by the first optical path and the second optical path at the same time. With the help of a dual-channel spectrometer, the coupled electronic transition characteristic data in the 200 to 800 nanometer band and the coupled intermolecular force data in the 800 to 2500 nanometer band can be collected simultaneously. The detection area is physically strictly divided by optical isolation elements, spatial filtering devices and mechanical shielding. The boundaries between the areas are carefully designed to ensure that the collected signals are clearly distinguished in space and to obtain accurate spatial weighting factors in subsequent data synthesis.

[0034] The electronic transition characteristic data collected in the first detection area is first subjected to noise filtering and baseline correction by the preprocessing module. After the continuous spectral signal is converted into high-precision data by a digital conversion device, the spectral peak is analyzed by a calibrated spectral instrument. For the peak analysis in this area, the Gaussian or Lorentz curve fitting algorithm will be selected according to the morphology of the spectral data. Specifically, when the spectral peak shows high symmetry and is mainly affected by the instrument resolution, the system will automatically use the Gaussian fitting algorithm; when the spectral peak has a long tail and is greatly affected by the molecular lifetime effect, the Lorentz fitting algorithm is used for processing. The algorithm uses the least squares method to iteratively optimize the fitting parameters, and introduces the residual square sum convergence condition and the R² value evaluation index to ensure that the fitting accuracy meets the preset standard. For example, in actual measurement, when a clear absorption peak is detected at 350 nanometers, the precise peak position, peak intensity ratio and peak shape index are calculated by Gaussian fitting, and the resulting electronic transition characteristic spectrum is saved as the benchmark data for subsequent synthesis processing with the cross-detection area data.

[0035] In the second detection area, the processing of intermolecular force data first involves preprocessing the collected near-infrared spectral signals to ensure that the data is free of background noise interference. The preprocessed data is calculated using a numerical integration method based on trapezoidal integration or Simpson's rule. At the same time, with the help of a pre-established standard reference spectrum library, the detected peak position is linearly interpolated and corrected through an automatic correction algorithm to eliminate minor deviations caused by instrument drift or local environmental influences. For example, in a certain test, when the characteristic peak near 1200 nanometers is integrated to obtain the absorption peak area, and the peak position is corrected by standard spectrum comparison, the resulting intermolecular force characteristic spectrum is saved as the baseline data. This data accurately reflects the molecular interaction information under the action of hydrogen bonds and van der Waals forces, providing an accurate baseline indicator for subsequent data synthesis.

[0036] Data collection in the cross-detection area is achieved through a dual-spectrum synchronous detection system. This area is illuminated by the first light path and the second light path at the same time, and the collected data contains signals of both electronic transitions and intermolecular forces. This area uses a dual-channel detector and is equipped with an optical separation element. The signals in the two bands are collected separately in different channels, and the timing of data collection in the two channels is ensured to be consistent through time synchronization technology. The data processing in the cross-detection area is similar to the benchmark data processing process, and also undergoes preprocessing, peak analysis, and integral correction. However, the spectral data obtained contains the coupling effect of the two optical information in the sample area. This coupling data is of great significance for correcting spatial inhomogeneity and improving the final data accuracy.

[0037] After obtaining the reference data and coupled data, the spatial weighting algorithm is used to synthesize the respective data to obtain unified and representative spectral data. For the electronic transition characteristic data in the 200 to 800 nanometer band, the reference electronic transition characteristic data obtained in the first detection area and the coupled electronic transition characteristic data in the cross detection area are first synthesized by the spatial weighting algorithm. The algorithm sets the weight coefficients of different areas. The weight coefficients are dynamically adjusted according to the signal-to-noise ratio, acquisition position and reference standard data of the signal in each detection area, and the final electronic transition characteristic data is generated by weighted averaging. The implementation process of the weighting algorithm involves calculating the weighting coefficient for each sampling point, and then fusing the data of each sampling point point by point to ensure that the final output data not only reflects the accuracy of the reference data, but also integrates the local spatial variation information that may exist in the cross area, thereby eliminating the data deviation caused by regional differences. For example, in an experiment, when the data of the first detection area shows a higher signal-to-noise ratio at a certain position, and the data of the cross detection area is slightly deviated due to local scattering, the system will automatically give the data of the first detection area a higher weight, thereby ensuring that the synthesized electronic transition characteristic data is more accurate.

[0038] For the intermolecular force data in the 800 to 2500 nanometer band, a similar spatial weighting algorithm is used to synthesize the benchmark intermolecular force data collected in the second detection area and the coupled intermolecular force data collected in the cross detection area. The algorithm also determines the weight coefficient of each area based on the signal-to-noise ratio, local data stability and the degree of conformity with the standard reference data, and realizes the fine fusion of the two sets of data through a mathematical model. The data processing software calculates the corresponding weight for each spatial sampling point and generates the overall intermolecular force characteristic spectrum by weighted summation to ensure that the synthesized data can truly reflect the balanced distribution and change trend of molecular interactions in the sample in the entire space. For example, when the data in the second detection area in a certain area is weak due to a slightly low instrument response, the supplementary information provided by the coupled data in the cross detection area can be amplified by a weighted algorithm to ensure that the final generated intermolecular force characteristic data maintains a high degree of accuracy and stability.

[0039] In general, the orthogonal optical path system used in this embodiment realizes the independent collection of reference data and coupling data by setting a strictly distinguished first detection zone, a second detection zone and a cross detection zone, and then scientifically synthesizes the respective data through a spatial weighted algorithm, eliminating the data errors caused by spatial inhomogeneity and instrument response differences. The entire process, from sample irradiation, data acquisition to data processing, is carried out under strictly controlled experimental conditions, and the parameters of each step are set according to pre-calibrated standards and precise mathematical models, so that the final output spectral data accurately reflects the electronic transition characteristics of the precursor molecules in the 200 to 800 nanometer band, and accurately reflects the intermolecular force characteristics in the 800 to 2500 nanometer band. Through this implementation method, the data obtained provides a basis for the quantitative calculation of the subsequent aggregation state and interaction strength of the precursor molecules, and also provides accurate and reliable data support for the dynamic regulation of key process parameters in the entire filter spin coating preparation method.

[0040] Please continue reading Figure 1 , according to the quantitative characterization data, performing dielectric constant control processing on the substrate surface, so that the substrate surface forms a dielectric constant gradient distribution from the center to the edge, and forms a periodic microstructure on the substrate surface, so as to obtain a functionalized substrate with directional force; In one embodiment of the present invention, the dielectric constant of the substrate surface is controlled according to the quantitative characterization data, so that the substrate surface forms a dielectric constant gradient distribution from the center to the edge, and a periodic microstructure is formed on the substrate surface to obtain a functionalized substrate with a directional force, including: According to the initial aggregation state parameters and the intermolecular interaction strength parameters in the quantitative characterization data, the dielectric constant attenuation function from the center to the edge of the substrate surface is calculated to obtain a dielectric constant spatial distribution curve; Performing gradient ion implantation on the substrate surface, regulating the energy distribution and dose distribution of the ion implantation according to the dielectric constant spatial distribution curve, to obtain a substrate surface with a dielectric constant gradient; According to the intermolecular interaction strength parameter, the spatial period and depth parameters of the substrate surface microstructure are calculated to obtain configuration data of the periodic microstructure; Performing periodic microstructural processing on the surface of the substrate having a dielectric constant gradient, controlling the periodic spacing and depth distribution of the microstructure according to the configuration data, and obtaining a periodic microstructure; The surface charge distribution test is performed on the periodic microstructure to obtain the spatial distribution data of the electrostatic force field and the shear force field, thereby obtaining a functionalized substrate with directional force.

[0041] It should be noted that, in this embodiment, the spatial attenuation of the dielectric constant of the substrate surface is quantitatively calculated using the following formula by using the initial aggregation state parameters and the intermolecular interaction strength parameters obtained in the quantitative characterization data: ε(r)= +( - )exp(-r / ); Where ε(r) is the dielectric constant on the substrate surface at a distance r from the center. is the static dielectric constant at the center of the substrate (typically 10 to 20), is the dielectric constant at optical frequencies (typically 2 to 5), and is the characteristic attenuation length, which is usually determined to be in the range of 10 to 50 microns after experimental fitting.

[0042] Through this mathematical model, the aggregation state of precursor molecules in the solution and the information on intermolecular interactions are converted into the spatial distribution curve of the dielectric constant on the substrate surface, ensuring that accurate dielectric constant gradient data is obtained before ion implantation and seamlessly connected with subsequent process parameters.

[0043] After obtaining the dielectric constant spatial distribution curve, the substrate surface is subjected to gradient ion implantation. The ion implantation process uses an ion beam device, and its operating parameters are dynamically controlled according to the dielectric constant attenuation function. In the specific operation, the ion energy is set in the range of 5 to 30 kiloelectron volts (keV), and the ion implantation dose is controlled at 1× Up to 1× ions per square centimeter. The ion implantation equipment processes the substrate surface regionally through a scanning control system so that the center area of ​​the substrate receives the highest dose (e.g. 1× ions / cm², and gradually decreases to the lowest dose (e.g. 1× ions / cm²), thus physically forming a dielectric constant gradient that decays from the center to the edge. In this process, by real-time monitoring of ion beam parameters and comparing and correcting with the dielectric constant spatial distribution curve, it is ensured that the ion energy distribution and implantation dose are highly consistent with the predetermined model, providing a stable foundation for subsequent microstructure processing.

[0044] According to the intermolecular interaction strength parameter, the numerical simulation method is further used to calculate the configuration data of the substrate surface microstructure. Specifically, the following mathematical mapping relationship is established to convert the intermolecular interaction strength I into the microstructure period L and the microstructure depth D: L = A·I + B; D=C·I+ ; Where A and B are calibration constants, typically A is about 10 nanometers per unit, B is about 100 nanometers, and C and After experimental confirmation, the depth of the microstructure can be controlled between 20 and 100 nanometers. By using numerical simulation software such as COMSOL Multiphysics, inputting the above-mentioned intermolecular interaction parameters and combining with actual measurement data for iterative solution, a set of configuration data with clear numerical indicators is obtained. This data accurately defines the periodic spacing and depth of the periodic microstructure on the substrate surface, providing reliable size parameters for subsequent process implementation.

[0045] After obtaining the configuration data, mature micromachining technologies such as electron beam etching are used to perform periodic microstructure processing on the substrate surface with a dielectric constant gradient. During the processing, the period of the microstructure on the mask pattern used is generally set in the range of 200 to 500 nanometers, and the exposure dose is controlled at 100 to 150 mJ / The power of etching equipment such as reactive ion etching (RIE) equipment is set between 80 and 120 watts, and the etching time is controlled within 30 to 120 seconds. The formation of the microstructure is monitored in real time through online detection instruments to ensure that the periodic spacing and depth of the microstructure strictly meet the configuration data requirements, so that a periodic microstructure with regular arrangement and precise size control is formed on the substrate surface after processing.

[0046] After the microstructure processing is completed, the surface charge distribution is tested to obtain the spatial distribution data of the electrostatic force field and the shear force field. The test generally uses scanning probe microscopy technology, such as Kelvin probe force microscopy (KPFM). The test area is set to 100 microns × 100 microns, the collection point density is set to 256 × 256 points, the spatial resolution can reach 50 nanometers, and the measurement accuracy of the test system for surface potential changes can be controlled within ±5 millivolts. At the same time, microfluidic test equipment can be used to collect surface shear force data to ensure that the final electrostatic force field and shear force field data accurately reflect the local physical field changes caused by the periodic microstructure. The data verification results provide a direct and reliable physical basis for constructing a functionalized substrate with directional force, and ensure the directionality and consistency of molecular arrangement in the subsequent filter spin coating preparation process.

[0047] In summary, this embodiment calculates the dielectric constant attenuation function by utilizing quantitative characterization data, and uses this to guide the gradient ion implantation process, and then combines the intermolecular interaction parameters to solve the substrate surface microstructure configuration data, and then through precision micromachining technology and strict surface charge distribution testing, it realizes the whole process control of substrate surface functional modification and microstructure customization.

[0048] In one embodiment of the present invention, the dielectric constant attenuation function of the substrate surface from the center to the edge is calculated according to the initial aggregation state parameter and the intermolecular interaction strength parameter in the quantitative characterization data to obtain the dielectric constant spatial distribution curve, including: According to the initial aggregation state parameters and the intermolecular interaction strength parameters, the polarizability and dipole moment of the precursor molecules are quantitatively analyzed, and the variation law of the intermolecular electrostatic interaction potential energy with distance is obtained to obtain the molecular polarization characteristic data and the potential energy distribution function; According to the molecular polarization characteristic data and the potential energy distribution function, a correlation equation between the substrate surface dielectric constant and the molecular orientation is established to obtain a dielectric constant response function; The dielectric constant response function is subjected to radial coordinate transformation and temperature correction, and the dielectric constant gradient from the center to the edge of the substrate surface is calculated within a temperature range of 25-45° C. to obtain a dielectric constant spatial distribution curve.

[0049] It should be noted that, according to the initial aggregation state parameters and intermolecular interaction strength parameters obtained in the embodiment, the polarizability and dipole moment of the precursor molecule are quantitatively analyzed, the purpose of which is to obtain molecular polarization characteristic data from the molecular level, and further determine the law of the change of the potential energy of the intermolecular electrostatic interaction with the intermolecular distance. To achieve this goal, a high-resolution spectrometer and quantum chemical calculation are combined to analyze the spectral data of the precursor solution in detail, determine the molecular absorption characteristics and the change information related to the molecular conformation, and on this basis, use the quantum chemical model to calculate the molecular polarizability and dipole moment, and form a potential energy distribution function by comparing the theoretical calculation and experimental data of the intermolecular electrostatic interaction potential energy (for example, using the Coulomb potential and the modified potential energy function) at different distances. The function can accurately reflect the trend of the change of the intermolecular interaction with the distance, thereby providing key physical quantities for the subsequent establishment of the dielectric constant response model. The process uses a calibrated spectrometer for data acquisition, and uses the calculation software to numerically fit the data to ensure that the obtained molecular polarization characteristic data and the potential energy distribution function have sufficient accuracy and repeatability.

[0050] After obtaining the above molecular polarization characteristic data and potential energy distribution function, the correlation equation between the substrate surface dielectric constant and the molecular orientation is established based on the relationship between the two. Specifically, by incorporating the molecular polarizability into the classical dielectric theory, the following correlation equation can be used to describe it, namely: ε=1+4πNα / (1-4πNα / 3); Where ε is the substrate surface dielectric constant, π is the circumference, N is the molecular number density per unit volume, and α is the molecular polarizability; This formula reflects the direct effect of molecular polarization on the dielectric constant. At the same time, the potential energy distribution function reflects the relationship between molecular orientation and local electrostatic potential energy, which can be expressed as: U = -pEcosθ; Where U is the electrostatic potential energy, p is the molecular dipole moment, E is the local electric field strength, and θ is the molecular orientation angle; By coupling the above two formulas, a dielectric constant response function that comprehensively considers the molecular polarization and molecular orientation effects can be constructed. This response function provides a theoretical basis for subsequent processes.

[0051] After establishing the dielectric constant response function, the function is then subjected to radial coordinate transformation and temperature correction so that the dielectric constant gradient from the center to the edge of the substrate surface can be reflected in the actual process. The radial coordinate transformation mainly converts the local physical quantities involved in the response function into an expression directly related to the radial distance r on the substrate, so that the dielectric constant response can accurately describe the changes in the spatial distribution of the substrate surface. The temperature correction is based on the experimental data of the change of the polarizability and interaction strength of the precursor molecules with temperature in the temperature range of 25°C to 45°C. The response function is adjusted using the temperature correction factor to compensate for the effect of temperature on the polarization and orientation of the molecules. The temperature correction process uses a high-precision thermostatic bath and a PID temperature control system. While controlling the temperature to be stable, the temperature response data of the precursor molecule-related parameters are collected in real time. The quantitative relationship between temperature and dielectric constant response is determined by regression analysis, and the relationship is substituted into the response function after radial transformation, so as to finally calculate the spatial distribution curve of the dielectric constant on the substrate surface.

[0052] Throughout the entire process, through the quantitative analysis of the polarizability, dipole moment, and intermolecular electrostatic potential energy of the precursor molecules, detailed molecular polarization characteristic data and potential energy distribution function can be obtained, which lays a solid foundation for establishing the correlation equation between the substrate surface dielectric constant and molecular orientation. The dielectric constant response function obtained by this correlation equation can be accurately calculated from the center to the edge of the substrate surface within the actual processing temperature range after radial coordinate transformation and temperature correction. The above method not only ensures the consistency of physical quantities between each step, but also ensures the repeatability and feasibility of the technical solution in actual operation through specific mathematical models and parameter calibration, thereby providing an accurate and reliable numerical basis for the subsequent use of dielectric constant gradients to regulate molecular arrangement.

[0053] In a specific implementation, in a feasible embodiment, the correlation equation between the substrate surface dielectric constant and the molecular orientation is established according to the molecular polarization characteristic data and the potential energy distribution function to obtain the dielectric constant response function, including: According to the molecular polarization characteristic data, the first relationship equation between the substrate surface dielectric constant and the molecular polarizability is constructed, which specifically includes: ε=1+4πNα / (1-4πNα / 3); Where ε is the substrate surface dielectric constant, π is the circumference, N is the molecular number density per unit volume, and α is the molecular polarizability; According to the potential energy distribution function, the second relationship equation between the molecular orientation angle and the electrostatic potential energy is established, which specifically includes: U = -pEcosθ; Where U is the electrostatic potential energy, p is the molecular dipole moment, E is the local electric field strength, and θ is the molecular orientation angle; The first relationship equation and the second relationship equation are coupled and calculated to obtain a dielectric constant response function, which specifically includes: ε(r)= +( - )exp(-r / )·L(pE / kT); where ε(r) is the dielectric constant at radial position r, r is the radial distance from the center of the substrate, is the characteristic attenuation length, is the optical frequency dielectric constant, is the static dielectric constant, exp is the natural exponential function, L is the Langevin function, p is the molecular dipole moment, E is the local electric field intensity, k is the Boltzmann constant, and T is the temperature.

[0054] Please continue reading Figure 1 , subjecting the functionalized substrate to spin coating, applying a radially varying electric field, a directional acoustic field, and a preset distributed light field to the precursor molecules during the spin coating process, and adjusting the intensity and spatial distribution of the electric field, the intensity and spatial distribution of the acoustic field, and the intensity and spatial distribution of the light field according to the molecular orientation state, to obtain a film with directional molecular arrangement; In one embodiment of the present invention, the functionalized substrate is subjected to spin coating, and during the spin coating process, a radially varying electric field, a directional acoustic field, and a preset distributed light field are applied to the precursor molecules, and the intensity and spatial distribution of the electric field, the intensity and spatial distribution of the acoustic field, and the intensity and spatial distribution of the light field are adjusted according to the molecular orientation state to obtain a film with directional molecular arrangement, including: Apply an initial rotation speed to the functionalized substrate, and in the time interval of [0,60) seconds, adjust the electric field intensity by gradient according to the rotation radius, so that the electric field intensity decays exponentially from the center to the edge of the spin coating area, and obtain the spatial distribution data of the electric field; According to the spatial distribution data of the electric field, the acoustic field is phase modulated so that the acoustic pressure intensity is distributed periodically and gradually from the center to the edge of the spin coating area, and the acoustic pressure amplitude is adjusted according to the gradient of 5-10 kPa / cm in the time interval of [60,120) seconds to obtain the spatial distribution data of the acoustic field; Parameter matching is performed on the directional sound field distribution data, the wavelength of the light field is periodically modulated within the range of 400-700 nm within a time interval of [120, 180] seconds, and the light field intensity forms a decreasing distribution in the radial direction opposite to the sound pressure gradient, to obtain preset light field distribution data; According to the molecular orientation state detection signal, the field intensity factor of the electric field distribution data, the sound pressure factor of the directional sound field distribution data and the light intensity factor of the preset light field distribution data are adjusted according to the preset weight coefficients to obtain a film with directional molecular arrangement.

[0055] It should be noted that: in this embodiment, by applying an initial rotation speed to the functionalized substrate, the substrate is firstly provided with a uniform centrifugal force distribution, thereby creating a stable physical environment for subsequent field intensity control. In the time interval [0,60) seconds, the system uses the rotation radius as a key variable and performs gradient control of the electric field intensity on the substrate through a pre-set electric field control program. In the specific implementation, a standard high-voltage power supply and a precision controller are used, and the electric field intensity E(r) = exp(-r / ), where r is the radial distance from the center of rotation, is the initial electric field strength in the central region, is the characteristic attenuation length, and its value is determined by experimental calibration), so that the electric field intensity shows an exponential decay distribution from the center to the edge of the spin coating area. In this process, the system collects electric field distribution data in real time, and through the feedback of the built-in sensor, the electric field intensity information at each position is stored and forms complete spatial distribution data, providing a quantitative basis for the subsequent regulation of the sound field and light field.

[0056] After obtaining the electric field spatial distribution data, the system enters the time interval [60,120) seconds to regulate the sound field. At this time, according to the aforementioned electric field distribution data, the phase modulation technology is used to precisely control the sound field, so that the sound pressure intensity presents a periodically increasing distribution from the center to the edge of the spin coating area in the radial direction. In the specific implementation, a high-precision sound wave generator and a phase modulator are used to control the phase and frequency of the sound wave so that the sound pressure intensity at each point in the spin coating area increases with distance at a fixed gradient. To ensure the stability of the gradient, the system adjusts the sound pressure amplitude according to a preset gradient of 5 to 10 kPa / cm at this stage, and collects sound field data in real time, and finally forms quantitative data describing the sound field distribution in the entire spin coating area. This data not only reflects the local phase information of the acoustic field on the substrate surface, but also provides a necessary reference for subsequent light field parameter matching.

[0057] Subsequently, within the time interval [120,180) seconds, the system performs parameter matching based on the aforementioned directional acoustic field distribution data and periodically modulates the light field. In this stage, a standard laser or LED light source is used, whose wavelength changes periodically in the range of 400 to 700 nm, and the light field intensity is controlled by an optical modulator. The modulation goal is to make the light field intensity present a decreasing distribution in the radial direction opposite to the acoustic pressure gradient, that is, the light intensity is higher in the central area of ​​the substrate, and the light intensity gradually decreases as the radial distance increases. To achieve this goal, the system matches the acoustic field data with the light field modulation parameters, uses a built-in algorithm to adjust the output mode of the light field, and monitors the light intensity distribution in real time until the preset light field distribution data that meets the preset requirements is formed. This data describes the specific situation of the light field changing with the radial position in the spin coating area, and complements the electric field and acoustic field data, providing a spatial regulation basis for the synergistic effect of multiple physical fields to achieve molecular directional arrangement.

[0058] Finally, the system integrates the molecular orientation state detection signal and coordinates the distribution data of the above three fields. In the specific implementation, high-sensitivity optical and electrical detection equipment is used to collect the orientation state of the molecular arrangement during the spin coating process in real time, and according to the preset weight coefficient, the field intensity factor of the electric field distribution data, the sound pressure factor of the directional acoustic field distribution data, and the light intensity factor of the preset light field distribution data are dynamically compensated and adjusted. This compensation process adopts a multi-parameter collaborative control algorithm to ensure that the interaction of the three fields achieves the expected superposition effect in the local area, thereby inducing the precursor molecules to be oriented in a specific direction and finally forming a film with directional molecular arrangement. In this process, the regulation of each parameter is fine-tuned based on the real-time detection signal feedback to ensure that the effects of each physical field in the film formation process are optimally coordinated, thereby achieving high-precision molecular arrangement control.

[0059] In one embodiment of the present invention, the method of adjusting the field intensity factor of the electric field distribution data, the sound pressure factor of the directional sound field distribution data, and the light intensity factor of the preset light field distribution data according to the molecular orientation state detection signal respectively according to the preset weight coefficient to obtain a film with directional molecular arrangement includes: According to the molecular orientation state detection signal, the deviation vector of the electric field intensity, the fluctuation coefficient of the sound pressure intensity and the modulation depth of the light field intensity are calculated to obtain the dynamic response characteristics of the three fields; Performing orthogonal decoupling analysis on the dynamic response characteristics of the three fields, establishing an inter-field interference elimination function, and obtaining an orthogonal parameter matrix for field intensity control; According to the orthogonal parameter matrix, the normalized weight coefficient of the electric field distribution data is calculated. , Normalized weight coefficient of directional sound field distribution data and the normalized weight coefficient of the preset light field distribution data , and make + + =1, and the weight coefficient group of the three-field coordinated regulation is obtained; According to the weight coefficient group, the field intensity factor of the electric field, the sound pressure factor of the acoustic field and the light intensity factor of the optical field are dynamically compensated to obtain a film with directional molecular arrangement.

[0060] It should be noted that, in this embodiment, the molecular orientation state detection signal collected in real time is first quantitatively processed, and the dynamic responses of the electric field, acoustic field and optical field are mathematically described. For the electric field intensity deviation vector, the electric field intensity actually measured at several sampling points is (i=1,2,…,N), its ideal design value is ; Then the electric field deviation vector can be defined as: Its quantitative index can be expressed by combining standard deviation and mean deviation, namely: These two indicators jointly reflect the deviation of the electric field in spatial distribution. For the sound field, the coefficient of variation (CV) is used to describe the fluctuation of the sound pressure intensity. The sound pressure at each sampling point is recorded as , whose average value is and the standard deviation is , then the calculation formula of the volatility coefficient is: This reflects the relative fluctuation amplitude of the sound pressure intensity in the spin coating area. For the light field, the modulation depth M is introduced to characterize the change of the light field intensity, which is defined as: in and are the maximum and minimum values ​​of light intensity in the sampling period. These mathematical expressions provide specific quantitative indicators for the dynamic response characteristics of the three fields.

[0061] Next, orthogonal decoupling analysis is performed on the data matrix consisting of the dynamic response characteristics of the electric field, acoustic field and light field. In this embodiment, the principal component analysis (PCA) method is used as a tool for orthogonal matrix decomposition. Suppose the original data matrix consisting of the dynamic response characteristics of the three fields is , where each row corresponds to the electric field deviation (or its quantized value ), sound pressure fluctuation coefficient And the data of light field modulation depth 𝑀 at different sampling points. Perform PCA decomposition on 𝑋 and get: Among them U An orthogonal matrix whose column vectors are principal components, is a diagonal matrix, is the projection of the sampled data under the orthogonal basis. The orthogonal parameter matrix 𝑈 reflects the independent contribution of each physical field in the overall dynamic response, and its dimension is fixed to 3×3; at the same time, the field interference elimination function can be defined as the reconstruction operation of the original data under the U basis, so that the cross-interference term is minimized, that is: ; Among them, Y is the independent response data after decoupling. In this way, through the PCA method, not only the interference between the fields is stripped away, but also the independent action of each field is clarified.

[0062] Based on the independent components in the orthogonal parameter matrix 𝑈, the normalized weight coefficients of the electric field, acoustic field and light field are calculated. Assume that the independent actions of the electric field, acoustic field and light field are , and (The variance contribution of the corresponding principal components in their respective directions can be taken), then the normalized weight coefficient calculation formula is: make sure + + =1. In actual operation, The value of can be determined based on the square of the singular value of the corresponding principal component in the Σ matrix, thereby quantifying the independent contribution of each field to the overall dynamic response.

[0063] Finally, according to the above normalized weight coefficient group, the field intensity factor of the electric field, the sound pressure factor of the acoustic field, and the light intensity factor of the light field are dynamically compensated. A closed-loop control algorithm (such as a PID control algorithm) is used to achieve real-time adjustment. Specifically, the error signal between the current output of each field and the design target is calculated at each sampling moment. ; And according to the PID control law: The electric field, acoustic field and optical field are adjusted respectively, , and is the control parameter of each field, and the compensation signal is multiplied by the corresponding weight coefficient , and Then they act on each field output respectively, so that the adjusted physical field output reaches the optimal coordinated state. The time scale of compensation update is determined by the sampling frequency of the control system, which is usually set at around 100Hz; the judgment indicator of the optimal coordinated state can be that the root mean square value of the molecular orientation state error is lower than the preset threshold. After multiple real-time feedback adjustments, the film finally formed in the spin coating process shows the expected molecular orientation arrangement effect, thus verifying the effectiveness of the three-field coordinated control scheme.

[0064] Please continue reading Figure 1 , obtaining light intensity signals and polarized light detection signals of the film at different scattering angles, analyzing anisotropic characteristics of the scattering pattern according to the light intensity signals and polarized light detection signals, and obtaining spatial distribution data of molecular orientation in the film; In one embodiment of the present invention, the step of acquiring the light intensity signal and polarized light detection signal of the film at different scattering angles, analyzing the anisotropic characteristics of the scattering pattern according to the light intensity signal and polarized light detection signal, and obtaining the spatial distribution data of the molecular orientation in the film includes: In the 0-360 degree angle range, the scattered light intensity of the film is collected at equal intervals, and the light intensity data at 36 different scattering angles are obtained to obtain the scattered light intensity distribution curve of the film; Performing Fourier analysis on the scattered light intensity distribution curve, extracting the second-order symmetry coefficient and the fourth-order symmetry coefficient, and obtaining the anisotropic characteristic parameters of the film; The film is scanned by polarization state modulation to obtain the scattered signals in the horizontal and vertical polarization directions, and the polarization difference is calculated to obtain the polarization characteristic data of the molecular orientation. Correlation calculation is performed based on the anisotropic characteristic parameters and polarization characteristic data, a spatial statistical function of the molecular orientation is established, and spatial distribution data of the molecular orientation in the film is obtained.

[0065] It should be noted that, in this embodiment, in order to achieve quantitative characterization of the spatial distribution of molecular orientation in the film, a high-precision optical detection system is first used to collect scattered light intensity at equal intervals from the film within an angle range of 0 to 360 degrees. In specific operations, the film is fixed on a rotating platform with a precision angle control system so that the film rotates evenly within the entire 360-degree range, and light intensity data is collected every 10 degrees, and finally light intensity data at 36 different scattering angles are obtained. After digital signal processing, these data form a distribution curve of the scattered light intensity of the film as a function of angle. This curve reflects the overall light scattering characteristics of the film and is an important basis for subsequent analysis of anisotropic characteristics.

[0066] After obtaining the scattered light intensity distribution curve, the Fourier analysis technology is used to process the curve to extract the anisotropic characteristic parameters of the film. As a mature spectrum analysis method, Fourier analysis can decompose complex angle-dependent signals into a series of sine and cosine components. In actual operation, the second-order and fourth-order symmetry components are focused on because these two components can usually reflect the specific anisotropic effects caused by the directional arrangement of molecules. After Fourier transforming the scattered light intensity data, the system automatically extracts the two-order symmetry coefficients to form a set of parameters that describe the anisotropic characteristics of the film. These parameters intuitively reflect the symmetry of the molecular arrangement in each region of the film and its changing trend, providing a quantitative basis for the subsequent spatial statistics of molecular orientation.

[0067] At the same time, the film is subjected to polarization state modulation scanning. An optical detection device equipped with a high-precision polarization filter is used to collect scattered signals in horizontal polarization and vertical polarization states. During the scanning process, the detection system synchronously records the scattered light intensity of the film in the two polarization states, and calculates a parameter called polarization difference by comparing and analyzing the difference in light intensity under horizontal polarization and vertical polarization. This parameter is defined as the ratio of the difference between the two polarization signals and their sum, and its value can reflect the influence of the molecular orientation in the film on the optical polarization response. Through the calculation of this polarization difference, polarization characteristic data closely related to the molecular orientation is obtained, which provides another dimension of information support for the subsequent spatial statistics of molecular arrangement.

[0068] After obtaining the anisotropic characteristic parameters obtained by Fourier analysis and the polarization characteristic data obtained by polarization state modulation scanning, the next step is to use multivariate statistical methods to correlate the two sets of data and establish a spatial statistical function of molecular orientation. In the specific operation, by inputting the anisotropic parameters and polarization characteristic data into the data processing software, a mathematical model describing the orientation distribution of molecules in the film is constructed using regression analysis or correlation analysis methods. This model can quantitatively describe the uniformity, directionality and local change trend of molecular arrangement in different spatial regions, and finally form a set of spatial statistical data of molecular orientation. This statistical function can not only reveal the overall molecular arrangement state, but also be detailed to the arrangement differences in local areas, thereby providing a clear numerical basis for the evaluation of film performance and the optimization of process parameters.

[0069] Throughout the entire process, data collection, processing and correlation between each step are achieved with the support of high-precision instruments and stable control systems. The collection of scattered light intensity data relies on precise angle control and high-sensitivity detectors, while Fourier analysis and polarization state modulation scanning use existing mature optical data processing algorithms for quantitative conversion. The statistical analysis method used in the correlation calculation stage has been verified by a large amount of experimental data to ensure that the established molecular orientation space statistical function can truly reflect the actual situation of molecular arrangement in the film. Through this multi-level, multi-angle data acquisition and processing method, not only a quantitative description of the anisotropy and polarization characteristics of the film is provided, but also these characteristic data are organically combined to establish a complete model that can reflect the spatial distribution of molecular orientation.

[0070] For example, in a certain experiment, the scattered light intensity data collected at equal intervals by the rotating platform showed obvious second-order symmetry characteristics after Fourier analysis, and its value indicated that there was a strong bidirectional arrangement trend in the film; at the same time, the polarization difference obtained by polarization scanning was high, which further verified the directional nature of the molecular arrangement. After inputting these two sets of data into the statistical model, the established spatial statistical function showed that the molecular orientation was uniform in the central area of ​​the film and slightly deviated at the edge. This result was consistent with the physical structure distribution of the film obtained by ion implantation regulation, indicating that there was good consistency between the molecular arrangement and the microstructure of the film. This multi-step, multi-parameter collaborative analysis method ensures that the spatial distribution data of the molecular orientation is both highly accurate and can provide a reliable and quantitative basis for subsequent process optimization.

[0071] Please continue reading Figure 1 According to the spatial distribution data of the molecular orientation, the time-varying curve of the rotation speed is adjusted, and the distribution parameters of the temperature field and the airflow field are controlled, and a filter with a preset molecular orientation structure is obtained through a cooling and curing process.

[0072] In one embodiment of the present invention, the time-varying curve of the rotation speed is adjusted according to the spatial distribution data of the molecular orientation, and the distribution parameters of the temperature field and the airflow field are controlled to obtain a filter having a preset molecular orientation structure through a cooling and curing process, including: According to the spatial distribution data of the molecular orientation, a piecewise control function of the rotation speed is established, the rotation speed is linearly reduced from 3000 rpm to 1000 rpm in the time interval [0, 60) seconds, and a constant rotation speed is maintained in the time interval [60, 120) seconds to obtain a time-varying curve of the rotation speed; Performing radial uniformity analysis on the spatial distribution data of the molecular orientation, adjusting the radial distribution of the temperature field according to the uniformity deviation value, so that the temperature forms a linear gradient of 25-45° C. from the center to the edge of the spin coating area, and obtaining the temperature field distribution parameters; According to the spatial distribution data of the molecular orientation and the temperature field distribution parameters, the flow rate of the airflow field is regulated so that the airflow velocity forms a logarithmic decreasing distribution of 0.5-2 m / s from the center to the edge of the spin coating area, and the airflow field distribution parameters are obtained; The film is tested for molecular orientation. After confirming that the orientation reaches a preset threshold, it is solidified by cooling at a cooling rate of 5°C / min to obtain a filter with a preset molecular orientation structure.

[0073] It should be noted that, based on the spatial distribution data of the molecular orientation, the local distribution of the molecular arrangement in the spin-coating area is accurately calculated, and a set of segmented control functions is used to realize the dynamic adjustment of the rotation speed. The whole process is centered on the digital control system. The principle is to set a program controller on the rotating platform. In the first 60 seconds, according to the preset linear change formula, the rotation speed is linearly reduced from 3000 rpm to 1000 rpm with a constant slope. The formula can be expressed as v(t)=3000-(2000 / 60)t (where t is time, in seconds, 0≤t<60), and in the next 60 seconds, a constant rotation speed of 1000 rpm is maintained, thereby forming a time-varying rotation speed curve. In this process, the spatial distribution analysis of the molecular orientation data can be used to determine the unevenness of the molecular arrangement in the local area of ​​the film, so that the thickness and flow state of the liquid film during the rotation process can be reflected and corrected in real time during the rotation speed control. For example, in actual operation, the uniformity of the liquid film on the rotating platform is monitored by high-speed video and laser interferometer. When it is found that the molecular arrangement in the central area tends to be consistent and there is a slight deviation in the edge area, the control system outputs an adjustment signal according to a predetermined function to match the rotation speed curve with the molecular arrangement data, thereby achieving the optimal liquid film distribution state.

[0074] Next, radial uniformity analysis is performed on the spatial distribution data of molecular orientation, and the spin coating area is divided into multiple concentric ring areas. The molecular orientation angle data is collected in each area and the standard deviation is calculated to obtain the uniformity deviation value. Based on this value, the temperature field of the substrate is finely adjusted using the temperature control system. Specifically, a program is set in the temperature control unit so that the center temperature of the substrate is 25°C, and gradually increases toward the outer diameter until the edge temperature reaches 45°C, forming a linear gradient distribution. This process monitors the temperature in real time through temperature sensors distributed at multiple locations on the substrate, and the microprocessor adjusts the output power of the heating or cooling module according to the measured temperature error to ensure a smooth transition of the temperature in each area. For example, in one experiment, the center temperature was accurately controlled at 25°C and the edge temperature was stabilized at 45°C through the calibrated temperature control system, ensuring that the solvent evaporation rate forms a uniform physical driving force in the film, which is conducive to the orderly arrangement of molecules.

[0075] At the same time, the wind speed control device is used to adjust the airflow field according to the molecular orientation data and the temperature field distribution parameters. The control process uses a preset logarithmic function model to make the airflow velocity show a logarithmic decreasing distribution from the center to the edge of the spin coating area. Its mathematical model can be expressed as (r)= -klog((r / R)+1), where The air velocity is set to 2m / s, R is the radius of the spin coating area, and the parameter k is determined through experimental calibration to make the edge speed reach 0.5m / s). The air velocity at each radial position is adjusted in real time by installing a micro fan and flow velocity sensor in the air duct to achieve precise distribution and control of the air velocity in the entire spin coating area, so that the airflow has a uniform shearing effect on the evaporation of solvent on the surface of the film and the solidification process of the liquid film. For example, in a certain preparation process, after the airflow field is regulated, the air velocity in the center area is maintained at 2m / s, while the air velocity in the edge area is steadily reduced to 0.5m / s, ensuring that the molecular orientation in the film is controlled and consistent.

[0076] During the film preparation process, the film is also tested for molecular orientation. Polarized light microscopes and related optical instruments are used to perform statistical tests on the molecular orientation of the formed film. When the test data reaches the preset orientation threshold, the cooling and curing stage is started. In this stage, a precision temperature-controlled cooling box is used to reduce the film temperature to room temperature at a constant rate of 5°C / min. During the curing process, the built-in sensor monitors the temperature change in real time to ensure that the cooling rate and temperature curve are completely consistent with the preset parameters, so that the molecular arrangement state is locked during the curing process. For example, after a batch of films is detected to have reached the set standard for orientation, it immediately enters the cooling program, and the temperature decreases from the initial state at 5°C / min until it stabilizes at room temperature. The filter obtained after curing shows a uniform and stable molecular orientation arrangement structure.

[0077] The above description is only a preferred embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the inventive concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A method for preparing a filter by spin coating, characterized in that: include: Acquiring electronic transition characteristic data and intermolecular force data of the precursor solution, determining initial aggregation state parameters and intermolecular interaction strength parameters of the precursor molecules according to the electronic transition characteristic data and intermolecular force data, and obtaining quantitative characterization data of the spatial conformation of the precursor molecules; According to the quantitative characterization data, a dielectric constant control treatment is performed on the substrate surface so that a dielectric constant gradient distribution is formed on the substrate surface from the center to the edge, and a periodic microstructure is formed on the substrate surface to obtain a functionalized substrate with a directional force; The functionalized substrate is subjected to spin coating, during which a radially varying electric field, a directional acoustic field and a preset distributed light field are applied to the precursor molecules, and the intensity and spatial distribution of the electric field, the intensity and spatial distribution of the acoustic field and the intensity and spatial distribution of the light field are adjusted according to the molecular orientation state to obtain a film with directional molecular arrangement; Acquiring light intensity signals and polarized light detection signals of the film at different scattering angles, analyzing anisotropic characteristics of scattering patterns according to the light intensity signals and polarized light detection signals, and obtaining spatial distribution data of molecular orientation in the film; According to the spatial distribution data of the molecular orientation, the time-varying curve of the rotation speed is adjusted, and the distribution parameters of the temperature field and the airflow field are controlled, and a filter with a preset molecular orientation structure is obtained through a cooling and curing process.

2. The method for preparing a filter by spin coating according to claim 1, characterized in that: The step of obtaining the electronic transition characteristic data and the intermolecular force data of the precursor solution, determining the initial aggregation state parameters and the intermolecular interaction strength parameters of the precursor molecules according to the electronic transition characteristic data and the intermolecular force data, and obtaining the quantitative characterization data of the spatial conformation of the precursor molecules includes: The precursor solution is simultaneously subjected to orthogonal dual-optical path detection, wherein the first optical path acquires the electronic transition characteristic data within the wavelength range of 200-800nm, and the second optical path acquires the intermolecular force data within the wavelength range of 800-2500nm; Performing peak analysis on the electronic transition characteristic data to obtain the peak position, peak intensity ratio and peak shape index of the main absorption peak, and obtaining the electronic transition characteristic spectrum of the precursor molecule; Performing characteristic peak analysis on the intermolecular force data to obtain the absorption peak area ratio and peak position shift of hydrogen bonding and van der Waals force, and obtaining the interaction characteristic spectrum of the precursor molecules; Calculating the initial aggregation state parameters and intermolecular interaction strength parameters of the precursor molecules according to the orthogonal correlation analysis of the electronic transition characteristic spectrum and the interaction characteristic spectrum; In the temperature range of 25-45°C, the temperature responsiveness analysis of the initial aggregation state parameters and the intermolecular interaction strength parameters is performed to obtain quantitative characterization data of the spatial conformation of the precursor molecules.

3. The method for preparing a filter by spin coating according to claim 2, characterized in that: The simultaneous orthogonal dual-optical path detection of the precursor solution, wherein the first optical path acquires the electronic transition characteristic data within the wavelength range of 200-800nm, and the second optical path acquires the intermolecular force data within the wavelength range of 800-2500nm, comprises: Collecting electron transition characteristics of a first detection area in the orthogonal optical path system, where the first detection area is a spatial area illuminated only by the first optical path, and obtaining reference electron transition characteristic data within a wavelength range of 200-800 nm; The intermolecular force is collected from the second detection area in the orthogonal optical path system, where the second detection area is a spatial area illuminated only by the second optical path, and the benchmark intermolecular force data within the wavelength range of 800-2500nm is obtained; Perform dual-spectrum synchronous acquisition on the cross-detection area in the orthogonal optical path system, where the cross-detection area is a spatial area illuminated by the first optical path and the second optical path at the same time, to obtain coupled electronic transition characteristic data within the wavelength range of 200-800nm ​​and coupled intermolecular force data within the wavelength range of 800-2500nm; Using a spatial weighted algorithm to synthesize the reference electron transition characteristic data and the coupled electron transition characteristic data to obtain electron transition characteristic data within a wavelength range of 200-800 nm; The reference intermolecular force data and the coupled intermolecular force data are synthesized by using a spatial weighting algorithm to obtain the intermolecular force data within a wavelength range of 800-2500 nm.

4. The method for preparing a filter by spin coating according to claim 1, characterized in that: According to the quantitative characterization data, the dielectric constant of the substrate surface is controlled so that the substrate surface forms a dielectric constant gradient distribution from the center to the edge, and a periodic microstructure is formed on the substrate surface to obtain a functionalized substrate with directional force, including: According to the initial aggregation state parameters and the intermolecular interaction strength parameters in the quantitative characterization data, the dielectric constant attenuation function from the center to the edge of the substrate surface is calculated to obtain a dielectric constant spatial distribution curve; Performing gradient ion implantation on the substrate surface, regulating the energy distribution and dose distribution of the ion implantation according to the dielectric constant spatial distribution curve, to obtain a substrate surface with a dielectric constant gradient; According to the intermolecular interaction strength parameter, the spatial period and depth parameters of the substrate surface microstructure are calculated to obtain configuration data of the periodic microstructure; Performing periodic microstructural processing on the surface of the substrate having a dielectric constant gradient, controlling the periodic spacing and depth distribution of the microstructure according to the configuration data, and obtaining a periodic microstructure; The surface charge distribution test is performed on the periodic microstructure to obtain the spatial distribution data of the electrostatic force field and the shear force field, thereby obtaining a functionalized substrate with directional force.

5. The method for preparing a filter by spin coating according to claim 4, characterized in that: The method of calculating the dielectric constant attenuation function from the center to the edge of the substrate surface according to the initial aggregation state parameters and the intermolecular interaction strength parameters in the quantitative characterization data to obtain the dielectric constant spatial distribution curve includes: According to the initial aggregation state parameters and the intermolecular interaction strength parameters, the polarizability and dipole moment of the precursor molecules are quantitatively analyzed, and the variation law of the intermolecular electrostatic interaction potential energy with distance is obtained to obtain the molecular polarization characteristic data and the potential energy distribution function; According to the molecular polarization characteristic data and the potential energy distribution function, a correlation equation between the substrate surface dielectric constant and the molecular orientation is established to obtain a dielectric constant response function; The dielectric constant response function is subjected to radial coordinate transformation and temperature correction, and the dielectric constant gradient from the center to the edge of the substrate surface is calculated within a temperature range of 25-45° C. to obtain a dielectric constant spatial distribution curve.

6. The method for preparing a filter by spin coating according to claim 5, characterized in that: The method of establishing a correlation equation between the substrate surface dielectric constant and the molecular orientation according to the molecular polarization characteristic data and the potential energy distribution function to obtain a dielectric constant response function includes: According to the molecular polarization characteristic data, the first relationship equation between the substrate surface dielectric constant and the molecular polarizability is constructed, which specifically includes: ε=1+4πNα / (1-4πNα / 3); Where ε is the substrate surface dielectric constant, π is the circumference, N is the molecular number density per unit volume, and α is the molecular polarizability; According to the potential energy distribution function, the second relationship equation between the molecular orientation angle and the electrostatic potential energy is established, which specifically includes: U = -pEcosθ; Where U is the electrostatic potential energy, p is the molecular dipole moment, E is the local electric field strength, and θ is the molecular orientation angle; The first relationship equation and the second relationship equation are coupled and calculated to obtain a dielectric constant response function, which specifically includes: ε(r)= +( - )exp(-r / )·L(pE / kT); where ε(r) is the dielectric constant at radial position r, r is the radial distance from the center of the substrate, is the characteristic attenuation length, is the optical frequency dielectric constant, is the static dielectric constant, exp is the natural exponential function, L is the Langevin function, p is the molecular dipole moment, E is the local electric field intensity, k is the Boltzmann constant, and T is the temperature.

7. The method for preparing a filter by spin coating according to claim 1, characterized in that: The functionalized substrate is subjected to spin coating, and during the spin coating process, a radially varying electric field, a directional acoustic field, and a preset distributed light field are applied to the precursor molecules, and the intensity and spatial distribution of the electric field, the intensity and spatial distribution of the acoustic field, and the intensity and spatial distribution of the light field are respectively adjusted according to the molecular orientation state to obtain a film with directional molecular arrangement, including: Apply an initial rotation speed to the functionalized substrate, and in the time interval of [0,60) seconds, adjust the electric field intensity by gradient according to the rotation radius, so that the electric field intensity decays exponentially from the center to the edge of the spin coating area, and obtain the spatial distribution data of the electric field; According to the spatial distribution data of the electric field, the acoustic field is phase modulated so that the acoustic pressure intensity is distributed periodically and gradually from the center to the edge of the spin coating area, and the acoustic pressure amplitude is adjusted according to the gradient of 5-10 kPa / cm in the time interval of [60,120) seconds to obtain the spatial distribution data of the acoustic field; Parameter matching is performed on the directional sound field distribution data, the wavelength of the light field is periodically modulated within the range of 400-700 nm within a time interval of [120, 180] seconds, and the light field intensity forms a decreasing distribution in the radial direction opposite to the sound pressure gradient, to obtain preset light field distribution data; According to the molecular orientation state detection signal, the field intensity factor of the electric field distribution data, the sound pressure factor of the directional sound field distribution data and the light intensity factor of the preset light field distribution data are adjusted according to the preset weight coefficients to obtain a film with directional molecular arrangement.

8. The method for preparing a filter by spin coating according to claim 7, characterized in that: The method of adjusting the field intensity factor of the electric field distribution data, the sound pressure factor of the directional sound field distribution data and the light intensity factor of the preset light field distribution data according to the molecular orientation state detection signal according to the preset weight coefficient to obtain a film with directional molecular arrangement includes: According to the molecular orientation state detection signal, the deviation vector of the electric field intensity, the fluctuation coefficient of the sound pressure intensity and the modulation depth of the light field intensity are calculated to obtain the dynamic response characteristics of the three fields; Performing orthogonal decoupling analysis on the dynamic response characteristics of the three fields, establishing an inter-field interference elimination function, and obtaining an orthogonal parameter matrix for field intensity control; According to the orthogonal parameter matrix, the normalized weight coefficient of the electric field distribution data is calculated. , Normalized weight coefficient of directional sound field distribution data and the normalized weight coefficient of the preset light field distribution data , and make + + =1, and the weight coefficient group of the three-field coordinated regulation is obtained; According to the weight coefficient group, the field intensity factor of the electric field, the sound pressure factor of the acoustic field and the light intensity factor of the optical field are dynamically compensated to obtain a film with directional molecular arrangement.

9. The method for preparing a filter by spin coating according to claim 1, characterized in that: The step of acquiring light intensity signals and polarized light detection signals of the film at different scattering angles, analyzing anisotropic characteristics of scattering patterns according to the light intensity signals and polarized light detection signals, and obtaining spatial distribution data of molecular orientation in the film includes: In the 0-360 degree angle range, the scattered light intensity of the film is collected at equal intervals, and the light intensity data at 36 different scattering angles are obtained to obtain the scattered light intensity distribution curve of the film; Performing Fourier analysis on the scattered light intensity distribution curve, extracting the second-order symmetry coefficient and the fourth-order symmetry coefficient, and obtaining the anisotropic characteristic parameters of the film; The film is scanned by polarization state modulation to obtain the scattered signals in the horizontal and vertical polarization directions, and the polarization difference is calculated to obtain the polarization characteristic data of the molecular orientation. Correlation calculation is performed based on the anisotropic characteristic parameters and polarization characteristic data, a spatial statistical function of the molecular orientation is established, and spatial distribution data of the molecular orientation in the film is obtained.

10. The method for preparing a filter by spin coating according to claim 1, characterized in that: According to the spatial distribution data of the molecular orientation, the time-varying curve of the rotation speed is adjusted, and the distribution parameters of the temperature field and the airflow field are controlled, and a filter having a preset molecular orientation structure is obtained by cooling and curing, comprising: According to the spatial distribution data of the molecular orientation, a piecewise control function of the rotation speed is established, the rotation speed is linearly reduced from 3000 rpm to 1000 rpm in the time interval [0, 60) seconds, and a constant rotation speed is maintained in the time interval [60, 120) seconds to obtain a time-varying curve of the rotation speed; Performing radial uniformity analysis on the spatial distribution data of the molecular orientation, adjusting the radial distribution of the temperature field according to the uniformity deviation value, so that the temperature forms a linear gradient of 25-45° C. from the center to the edge of the spin coating area, and obtaining the temperature field distribution parameters; According to the spatial distribution data of the molecular orientation and the temperature field distribution parameters, the flow rate of the airflow field is regulated so that the airflow velocity forms a logarithmic decreasing distribution of 0.5-2 m / s from the center to the edge of the spin coating area, and the airflow field distribution parameters are obtained; The film is tested for molecular orientation. After confirming that the orientation reaches a preset threshold, it is solidified by cooling at a cooling rate of 5°C / min to obtain a filter with a preset molecular orientation structure.

Images