Method for controlling carrying by using combined state machine

By adopting a combined state machine control handling method in the multi-station handling device, the problem of a sharp increase in process judgment overhead in the prior art is solved, clearer logical hierarchy and more efficient handling processes are achieved, and the stability and reliability of the system are improved.

CN119725191APending Publication Date: 2025-03-28AIHUA (WUXI) SEMICON TECH CO LTD
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Patent Information

Application Number
CN202411829456.9
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-12-12
Publication Date
2025-03-28

AI Technical Summary

Technical Problem

In the prior art, the process determination overhead of the multi-station handling device has increased dramatically, resulting in huge state machines and tedious switching logic, and the mapping state cannot be effectively monitored.

Method used

The combined state machine controls the handling method, and uses a combined state machine to uniformly plan the action state of the handling process, receive interactive signals, combine them into a complete state, and use a combined state machine to distinguish the process actions and control specific switching.

Benefits of technology

Significantly reduce the size of the state machine, and the logical hierarchical switching is clearer and easier to understand. The resulting final state can be used to monitor specific process mappings, improve handling efficiency, reduce costs, and enhance system stability and reliability.

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Abstract

The invention belongs to the technical field of photovoltaic ALD (Atomic Layer Deposition), and particularly relates to a method for controlling carrying by using a combined state machine, which comprises the following steps: S1, uniformly planning the action state of a carrying process, the action state comprising an initial position, a target position, state information and an execution action; s2, interaction signals of all corresponding positions in the action states are received, values are assigned to the initial position, the target position, the state information and the execution actions respectively, and then a complete state is obtained through combination and serves as a combined state machine of the carrying process; s3, a combined state machine is used for distinguishing process actions, and specific switching of the process actions is controlled; by adopting the combined state machine to control the carrying method, the carrying process is decomposed into a series of clear states and actions, so that the automation and intelligence of the carrying process are realized, the carrying efficiency is improved, the cost is reduced, the combined state machine is used for controlling, the size of the state machine is obviously reduced, logic layering switching is realized, and the carrying process is clearer and easier to understand.
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Description

Technical Field

[0001] The present invention belongs to the technical field of photovoltaic ALD, and in particular is a method for controlling transportation using a combined state machine. Background Art

[0002] In the automated handling process of ALD equipment, in order to improve production efficiency and reduce costs, a multi-station handling device is usually designed. This device uses a handling component to achieve material handling between multiple stations to reduce system expenses.

[0003] In the prior art, the interaction signals sent by each workstation and the preset priority are often used to directly jump to specific process actions. However, as the number of workstations increases, the combination of interaction signals will increase dramatically. The process judgment overhead without a state machine is A(n, 2)+m, where m is an additional mapping of workpiece status and action, such as Figure 2 As shown, the mapping status cannot be monitored, which makes it difficult to clarify the programming logic. In addition, since the process actions are directly jumped and the processes are often reused, it is also difficult to distinguish the specific process mapping during monitoring.

[0004] To solve the problem of monitoring process mapping, a state machine can be used. However, for ordinary state machines, as the number of workstations increases, the number of states that need to be preset will increase dramatically, just like the combination of interactive signals. The process judgment overhead is [A(n, 2)+m]*2, where m is an additional mapping of workpiece states and actions, such as Figure 3 As shown, the state machine is huge and the switching logic is cumbersome.

[0005] In the prior art, the process judgment overhead of a stateless state machine is A(n, 2)+m, and it is impossible to monitor the mapping state. An ordinary state machine can monitor the mapping state, but the process judgment overhead is [A(n, 2)+m]*2, which will cause the preset states to increase sharply like the combination of interactive signals, resulting in a large state machine and cumbersome switching logic.

[0006] To this end, the present invention provides a method for controlling a transport using a combined state machine. Summary of the invention

[0007] In order to make up for the shortcomings of the prior art and solve the problem that the process judgment overhead of the stateless machine proposed in the background technology is A(n, 2)+m and the mapping state cannot be monitored, the ordinary state machine can monitor the mapping state, but the process judgment overhead is [A(n, 2)+m]*2, which will cause the preset state to increase sharply like the combination of interactive signals, resulting in a huge state machine and cumbersome switching logic.

[0008] The technical solution adopted by the present invention to solve the technical problem is: a method for controlling transportation using a combined state machine described in the present invention comprises the following steps:

[0009] S1: Unified planning of the action status of the handling process, the action status including the starting position, target position, status information and execution action;

[0010] S2: receiving the interaction signals of the corresponding positions in the action state, assigning values ​​to the starting position, the target position, the state information and the execution action respectively, and then deriving a complete state through combination as a combined state machine of the handling process;

[0011] S3: Use a combined state machine to distinguish process actions and control the specific switching of process actions.

[0012] Preferably, the method for planning the action state of the transport process in S1 is:

[0013] List the starting positions of all transport process action states as a set: SP = {P1, P2, ... P n}, where P represents the starting position;

[0014] List the target positions of all transport process action states as a set: EP = {P1,,P2,,…P n ,}, where P, represents the target position;

[0015] List all the status information of the workpieces to be transported as a collection: Sta a ={S1,S2,…S m}, where S represents the status information;

[0016] List all the execution actions of the transport process action state as a set: Act = {A1, A2, ...A O}, where A represents the execution action.

[0017] Preferably, the state combination method of the transport process action state machine in S2 is:

[0018] Receive the interaction signals of each corresponding position, confirm the current position of the operable workpiece to be transported through the interaction signals, and obtain the starting position of the transport process action, which is recorded as SP a , S.P. a ∈SP, where the current judgment cost is n;

[0019] Read the status information of the workpiece to be transported, denoted as Sta a , Sta a ∈ Sta;

[0020] Through the interaction signal of the target position and Sta a The information is used to confirm the destination of the workpiece to be transported and obtain the target position of the transport process action, which is recorded as EP a , E.P.a ∈EP, where the current judgment cost is n-1;

[0021] Confirm the current execution action based on the process progress, recorded as Act a , Act a ∈Act, where Sta a To Act a The additional mapping overhead is m;

[0022] Based on the starting position, target position, state information and execution action, the current state combination (SP a , E.P. a , Sta a , Act a ).

[0023] Preferably, the combined state machine in S3 is based on the current state combination of the combined state machine (SP a , E.P. a , Sta a , Act a ), based on the set logical mapping relationship, enable the corresponding execution action.

[0024] Preferably, the status information is used to describe the status of the item during transportation, and the status information includes item type, identification information, transportation progress and location information.

[0025] Preferably, the execution action is a specific operation performed in the handling process, and the execution action includes moving, rotating, grabbing and placing.

[0026] Preferably, the combined state machine combines m final states, and the number of final state judgments is 2n-1+m.

[0027] Preferably, the logical mapping relationship is implemented using an if-else statement, a switch-case structure or a decision tree.

[0028] The beneficial effects of the present invention are as follows:

[0029] 1. A method for controlling a transport process using a combined state machine according to the present invention, by using a combined state machine to control a transport process, firstly, each action state in the transport process is uniformly planned, and the starting positions of all transport process actions are listed as a set; the target positions of all transport process actions are listed as a set; all state information of the workpiece to be transported is listed as a set; all execution actions of the transport process are listed as a set; then, interactive signals from different positions are received and processed, and interactive signals of each corresponding position are received; the starting position of the operable workpiece to be transported is confirmed by the interactive signal; the state information of the workpiece to be transported is read; the target position of the workpiece to be transported is confirmed by the interactive signal and information of the optional target position; the current action is confirmed according to the process progress, and the additional mapping overhead is considered; the current state combination of the transport process action state machine is obtained. Finally, according to the current state combination of the above combined state machine, the specific process action is confirmed and enabled by the specific logical mapping relationship. This method realizes the automation and intelligence of the transport process by decomposing the transport process into a series of clear states and actions, and using the combined state machine for control, which helps to improve the transport efficiency, reduce the cost, and enhance the stability and reliability of the system.

[0030] 2. The method of controlling transportation using a combined state machine described in the present invention adopts a combined state machine, and obtains the final state through layered combination in the combined state machine judgment, and then jumps to the specific process according to the final state. The combined state machine can combine n final states with a small number of states preset in each layer, and the number of logical judgments is 2n-1+m, where m is an additional mapping of the workpiece state and action, which significantly reduces the size of the state machine, and the logical layered switching is clearer and easier to understand, and the final state obtained can be used to monitor the specific process mapping. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] The present invention will be further described below in conjunction with the accompanying drawings.

[0032] Figure 1 It is a flow chart of the handling control based on the combined state machine in the present invention;

[0033] Figure 2 It is a flow chart of the stateless machine in the present invention;

[0034] Figure 3 It is a flow chart of a common state machine in the present invention;

[0035] Figure 4 It is a schematic diagram of the flow of the combined state machine in the present invention; DETAILED DESCRIPTION

[0036] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods.

[0037] like Figures 1 to 4 As shown, a method for controlling transportation using a combined state machine according to an embodiment of the present invention includes the following steps:

[0038] S1: Unified planning of the action status of the handling process, the action status including the starting position, target position, status information and execution action;

[0039] S2: receiving the interaction signals of the corresponding positions in the action state, assigning values ​​to the starting position, the target position, the state information and the execution action respectively, and then deriving a complete state through combination as a combined state machine of the handling process;

[0040] S3: Use a combined state machine to distinguish process actions and control the specific switching of process actions.

[0041] When the control transport method provided by the present invention is used, it is first necessary to uniformly plan the action states of the transport process, including the four parts of the starting position, the target position, the state information and the execution action; by receiving the interactive signals of each corresponding position in the action state, the starting position, the target position, the state information and the execution action are assigned respectively, and then a complete state is obtained by combination as a combined state machine of the transport process; finally, the combined state machine is used to distinguish the process actions and control the specific switching of the process actions; by using the combined state machine, the size of the state machine is significantly reduced, the logical layered switching is clearer and easier to understand, and the final state obtained can be used to monitor the specific process mapping.

[0042] like Figure 1 As shown, the method for planning the action state of the transport process in S1 is:

[0043] List the starting positions of all transport process action states as a set: SP = {P1, P2, ... P n}, where P represents the starting position;

[0044] List the target positions of all transport process action states as a set: EP = {P1,,P2,,…P n ,}, where P, represents the target position;

[0045] List all the status information of the workpieces to be transported as a collection: Sta a ={S1,S2,…S m}, where S represents the status information;

[0046] List all the execution actions of the transport process action state as a set: Act = {A1, A2, ...A O}, where A represents the execution action.

[0047] The state combination method of the transport process action state machine in S2 is:

[0048] Receive the interaction signals of each corresponding position, confirm the current position of the operable workpiece to be transported through the interaction signals, and obtain the starting position of the transport process action, which is recorded as SP a , S.P. a ∈SP, where the current judgment cost is n;

[0049] Read the status information of the workpiece to be transported, denoted as Sta a , Sta a ∈ Sta;

[0050] Through the interaction signal of the target position and Sta a The information is used to confirm the destination of the workpiece to be transported and obtain the target position of the transport process action, which is recorded as EP a , E.P. a ∈EP, where the current judgment cost is n-1;

[0051] Confirm the current execution action based on the process progress, recorded as Act a , Act a ∈Act, where Sta a To Act a The additional mapping overhead is m;

[0052] Based on the starting position, target position, state information and execution action, the current state combination (SP a , E.P. a , Sta a , Act a ).

[0053] In S3, the combined state machine in S3 is based on the current state combination of the combined state machine (SP a , E.P. a , Sta a , Act a ), based on the set logical mapping relationship, enable the corresponding execution action.

[0054] When the combined state machine control transport provided by the present invention is used,

[0055] First, each action state in the handling process is planned uniformly, and the starting positions of all handling process actions are listed as a set; the target positions of all handling process actions are listed as a set; all the state information of the workpieces to be handled is listed as a set; and all the execution actions of the handling process are listed as a set;

[0056] Then, the interaction signals from different positions are received and processed, and the interaction signals of each corresponding position are received; the starting position of the operable workpiece to be transported is confirmed through the interaction signal; the status information of the workpiece to be transported is read; the target position of the workpiece to be transported is confirmed through the information of the interaction signal of the optional target position; the current action is confirmed according to the progress of the process, and the additional mapping overhead is taken into account; and the current state combination of the transport process action state machine is obtained.

[0057] Finally, according to the current state combination of the above combined state machine, the specific process action is confirmed and enabled by the specific logical mapping relationship.

[0058] In summary, this method realizes the automation and intelligence of the handling process by decomposing the handling process into a series of clear states and actions and using a combined state machine for control, which helps to improve handling efficiency, reduce costs, and enhance the stability and reliability of the system.

[0059] like Figure 1 As shown, the state information is used to describe the state of the object during transportation, and the state information includes position, posture and speed.

[0060] The execution action is a specific operation performed in the handling process, and the execution action includes moving, rotating, grabbing and placing.

[0061] When the status information and execution actions provided by the present invention are used, the status information describes the current status of the item or equipment during the transportation process, including key parameters such as item type, identification information, transportation progress and location information; real-time updating and monitoring of status information is of great significance for dynamically adjusting the transportation process, responding to emergencies, and ensuring the safety and stability of the transportation process; actions refer to specific operations performed in the transportation process, such as moving, rotating, grabbing, placing, etc., and planning a reasonable action sequence can optimize transportation efficiency, reduce energy consumption, and reduce wear and tear on equipment and items.

[0062] The starting position refers to the specific location of the item or equipment at the beginning of the handling process. When planning the handling process, clarifying the starting position helps determine the starting point of the handling path and provides a benchmark for the subsequent target position setting.

[0063] The target location is the specific location where the object or equipment is expected to arrive at the end of the handling process. Setting a clear target location is crucial to ensure the accuracy and efficiency of the handling task. It can help the system plan the optimal path and reduce unnecessary movement and time waste.

[0064] Unifying each action state of the handling process into four parts: starting position, target position, status information, and action, not only helps improve handling efficiency and accuracy, but also provides a basis for realizing the automation and intelligent control of the handling process. In this way, the handling process can be better managed and controlled to ensure the safe, fast, and accurate movement of items.

[0065] like Figure 4 As shown, preferably, the combined state machine combines m final states, and the number of final state judgments is 2n-1+m.

[0066] When the combined state machine provided by the present invention is used, the final state is obtained by layered combination in the combined state machine judgment, and then the specific process is jumped according to the final state. The combined state machine can combine m final states when a small number of states are preset in each layer (the maximum number is n), and the number of logical judgments is 2n-1+m, where m is an additional mapping of the workpiece state and the action, which significantly reduces the size of the state machine, and the logical layered switching is clearer and easier to understand, and the final state obtained can be used to monitor the specific process mapping;

[0067] Take one of the determination signals as an example: the current position of the operable workpiece to be transported is confirmed through the interactive signal, and the starting position of the transport process action is obtained as P1. At the same time, the status information of the workpiece to be transported is read as S1. The destination position of the workpiece to be transported is confirmed through the interactive signal and status information of the target position, and the target position of the transport process action is obtained as P1. Finally, based on the set logical mapping relationship, the corresponding execution action A1 is enabled.

[0068] like Figure 2 As shown, for a stateless machine, by utilizing the interaction signals sent by each workstation and the preset priority, it directly jumps to a specific process action. However, as the number of workstations increases, the combination of each interaction signal will increase dramatically. The process judgment overhead of the stateless machine is A(n, 2)+m, where m is an additional mapping of the workpiece state and action. The mapping state cannot be monitored, making it difficult to clarify the programming logic. In addition, since the process action is a direct jump and the process is often reused, it will also make it difficult to distinguish the specific process mapping during monitoring.

[0069] like Figure 3As shown, for the state machine, the problem of monitoring process mapping can be solved, but for ordinary state machines, as the number of workstations increases, the states that need to be preset will also increase sharply, just like the combination of interactive signals. The process judgment overhead is [A(n, 2)+m]*2, where m is the additional mapping of workpiece states and actions, resulting in a large state machine and cumbersome switching logic.

[0070] In summary, in multiple workstations, especially when the number of workstations is large, the use of a combined state machine can significantly reduce the size of the state machine; through hierarchical judgment, the logic is clearer; using a state machine, the specific action process mapping can be directly monitored.

[0071] like Figure 4 As shown, as an implementation method, the logical mapping relationship is implemented using an if-else statement.

[0072] When the if-else statement provided by the present invention is used, first, all possible state combinations and their corresponding process actions are defined, which usually involve all possible combinations of starting positions, target positions, state information, and execution actions, and a unique name is assigned to each combination; then, the if-else statement is used to check whether the current state combination matches the predefined combination. If it matches, the corresponding process action is executed; if the current state combination does not meet any predefined conditions, it may be necessary to take a default action or record error information for subsequent processing.

[0073] Using the switch-case structure to implement logical mapping relationships is an efficient and flexible control method.

[0074] like Figure 4 As shown, as an implementation method, the logical mapping relationship is implemented using a switch-case structure.

[0075] When the switch-case structure provided by the present invention is used, first, all possible state combinations and their corresponding process actions are defined, which usually involve all possible combinations of starting positions, target positions, state information and execution actions, and a unique name is assigned to each combination; then, a switch statement is used to check the current state combination, and the switch statement will jump to the corresponding case label according to the value of the current state combination and execute the process action under the case; if the current state combination does not match any predefined case, a default case can be added to handle this situation, such as logging an error message or executing a default action.

[0076] Using the switch-case structure to implement logical mapping relationships is an efficient and easy-to-maintain approach.

[0077] like Figure 4 As shown, as an implementation method, the logical mapping relationship is implemented using a decision tree.

[0078] When the decision tree provided by the present invention is used, first, all possible state combinations and their corresponding process actions are defined, which usually involve all possible combinations of starting positions, target positions, state information and execution actions, and a unique name is assigned to each combination; then, a decision tree model is used to learn the mapping relationship between these state combinations and process actions; during the training process, the decision tree will select the optimal attribute for division according to metrics such as information gain or Gini index of the attribute, and generate child nodes, and this process is repeated until the stopping condition is met; finally, the trained decision tree model can be used to predict specific process actions according to the current state combination.

[0079] Using a decision tree model to implement logical mapping relationships is an efficient and easy-to-understand way.

[0080] Working principle: First, each action state in the handling process is planned uniformly, and the starting positions of all handling process actions are listed as a set; the target positions of all handling process actions are listed as a set; all the state information of the workpiece to be handled is listed as a set; all the execution actions of the handling process are listed as a set; then receive and process the interaction signals from different positions, receive the interaction signals of each corresponding position; confirm the starting position of the operable workpiece to be handled through the interaction signal; read the state information of the workpiece to be handled; confirm the target position of the workpiece to be handled through the information of the interaction signal of the optional target position; confirm the current action according to the process progress, and consider the additional mapping overhead; derive the current state combination of the handling process action state machine. Finally, according to the current state combination of the above combined state machine, the specific process action is confirmed and enabled by the specific logical mapping relationship. This method realizes the automation and intelligence of the handling process by decomposing the handling process into a series of clear states and actions and using the combined state machine for control, which helps to improve the handling efficiency, reduce costs, and enhance the stability and reliability of the system.

[0081] The starting position refers to the specific location of the object or equipment at the beginning of the handling process. When planning the handling process, clarifying the starting position helps determine the starting point of the handling path and provides a benchmark for the subsequent target position setting; the target position is the specific location where the object or equipment is expected to arrive at the end of the handling process. Setting a clear target position is crucial to ensuring the accuracy and efficiency of the handling task. It can help the system plan the optimal path and reduce unnecessary movement and time waste; the status information describes the current state of the object or equipment during the handling process, including key parameters such as position, posture, and speed; real-time updating and monitoring of status information is of great significance for dynamically adjusting the handling process, responding to emergencies, and ensuring the safety and stability of the handling process; actions refer to specific operations performed in the handling process, such as moving, rotating, grabbing, placing, etc. Planning a reasonable action sequence can optimize the handling efficiency, reduce energy consumption, and reduce wear and tear on equipment and objects; planning each action state of the handling process into four parts: starting position, target position, status information, and action, which not only helps to improve the handling efficiency and accuracy, but also provides a basis for realizing the automation and intelligent control of the handling process. In this way, the handling process can be better managed and controlled to ensure the safe, fast and accurate movement of objects.

[0082] For the stateless machine, by utilizing the interactive signals sent by each workstation and the preset priority, it directly jumps to the specific process action. However, as the number of workstations increases, the combination of each interactive signal will increase sharply. The process judgment overhead of the stateless machine is A(n, 2)+m, and the mapping state cannot be monitored. For the state machine, the problem of monitoring process mapping can be solved, but as the number of workstations increases, the states that need to be preset will also increase sharply like the combination of interactive signals. The process judgment overhead is [A(n, 2)+m]*2, which makes the state machine huge and the switching logic cumbersome. By combining the layers in the combined state machine judgment, the final state is obtained, and then the specific process is jumped according to the final state. The combined state machine can combine m final states with a small number of states preset in each layer (the maximum number is n), and the number of logical judgments is 2n-1+m, where m is the additional mapping of the workpiece state and the execution action, which significantly reduces the size of the state machine, and the logical layered switching is clearer and easier to understand. In addition, the final state obtained can be used to monitor the specific process mapping. In the case of multiple workstations, especially when the number of workstations is large, the use of a combined state machine can significantly reduce the size of the state machine.

[0083] The above shows and describes the basic principles, main features and advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A method for controlling transport using a combined state machine, characterized in that: The following steps are involved: S1: Unified planning of the action status of the handling process, the action status including the starting position, target position, status information and execution action; S2: receiving the interaction signals of the corresponding positions in the action state, assigning values ​​to the starting position, the target position, the state information and the execution action respectively, and then deriving a complete state through combination as a combined state machine of the handling process; S3: Use a combined state machine to distinguish process actions and control the specific switching of process actions.

2. A method for controlling transport using a combined state machine according to claim 1, characterized in that: The method for planning the action state of the handling process in S1 is: List the starting positions of all transport process action states as a set: SP = {P1, P2, ... P n }, where P represents the starting position; List the target positions of all transport process action states as a set: EP = {P1,,P2,,…P n ,}, where P, represents the target position; List all the status information of the workpieces to be transported as a collection: Sta a ={S1,S2,…S m }, where S represents the status information; List all the execution actions of the transport process action state as a set: Act = {A1, A2, ...A O }, where A represents the execution action.

3. A method for controlling transport using a combined state machine according to claim 1, characterized in that: The state combination method of the transport process action state machine in S2 is: Receive the interaction signals of each corresponding position, confirm the current position of the operable workpiece to be transported through the interaction signals, and obtain the starting position of the transport process action, which is recorded as SP a , S.P. a ∈SP, where the current judgment cost is n; Read the status information of the workpiece to be transported, denoted as Sta a , Sta a ∈ Sta; Through the interaction signal of the target position and Sta a The information is used to confirm the destination of the workpiece to be transported and obtain the target position of the transport process action, which is recorded as EP a , E.P. a ∈EP, where the current judgment cost is n-1; Confirm the current execution action based on the process progress, recorded as Act a , Act a ∈Act, where Sta a To Act a The additional mapping overhead is m; Based on the starting position, target position, state information and execution action, the current state combination (SP a , E.P. a , Sta a , Act a ).

4. A method for controlling transport using a combined state machine according to claim 3, characterized in that: The combined state machine in S3 is based on the current state combination of the combined state machine (SP a , E.P. a , Sta a , Act a ), based on the set logical mapping relationship, enable the corresponding execution action.

5. A method for controlling transport using a combined state machine according to claim 1, characterized in that: The status information is used to describe the status of the object during the transportation process, and the status information includes the object type, identification information, transportation progress and location information.

6. A method for controlling transport using a combined state machine according to claim 1, characterized in that: The execution action is a specific operation performed in the handling process, and the execution action includes moving, rotating, grabbing and placing.

7. A method for controlling transport using a combined state machine according to claim 3, characterized in that: The combined state machine combines m final states, and the number of final state judgments is 2n-1+m.

8. A method for controlling transport using a combined state machine according to claim 4, characterized in that: The logical mapping relationship is implemented by using an if-else statement, a switch-case structure or a decision tree.