Nozzle device and evaporation equipment

Abstract

The invention provides a nozzle device and evaporation equipment, relates to the technical field of evaporation, and aims to solve the problems that in the prior art, the mounting position of a nozzle is fixed, and the nozzle is not easy to replace according to actual needs. The nozzle device comprises a mounting base and a nozzle assembly; the nozzle assemblies and the mounting base are both movable and detachably connected, so that the positions of the multiple nozzle assemblies relative to the mounting base are adjustable. The nozzle assembly can be mounted at any position of the mounting base according to actual needs, the flexibility is higher, the coating requirements of different products can be met, meanwhile, only the corresponding nozzle assembly needs to be replaced, the whole nozzle device does not need to be replaced, the replacement efficiency is improved, and the replacement cost is saved.

Description

Technical Field

[0001] The present application relates to the field of evaporation technology, and in particular to a nozzle device and evaporation equipment. Background Art

[0002] In the field of display technology, vacuum coating is a relatively mature film-forming method in the display manufacturing process. The base material used for film formation is heated and evaporated onto the substrate through an evaporation device.

[0003] The vacuum evaporation process is as follows: the required coating material is placed in a container, a nozzle with a through hole is placed on top of the container, and the container is heated. When the temperature reaches the evaporation temperature of the internal material, the material will vaporize and spray upward through the through hole of the nozzle, and adhere to the substrate to form a thin film. In related technologies, the nozzle is generally installed above the container through a base.

[0004] However, the installation position of the existing nozzle is fixed, and it is not easy to replace it according to actual needs. The replacement cost is high, the replacement efficiency is low, and the evaporation effect is single. Summary of the invention

[0005] The embodiments of the present application provide a nozzle device and an evaporation device, and the nozzle assembly can be installed at any position of a mounting base according to actual needs. It is more flexible and can meet the coating requirements of different products. At the same time, only the corresponding nozzle assembly needs to be replaced, and there is no need to replace the entire nozzle device, which is beneficial to improving replacement efficiency and saving replacement costs. In addition, the installation method of the present application is beneficial to avoiding the occurrence of leakage, thereby maximizing the evaporation effect.

[0006] In order to achieve the above objectives, this application provides the following technical solutions:

[0007] In a first aspect, an embodiment of the present application provides a nozzle device, which is used in an evaporation device and is connected to a material chamber of the evaporation device; the nozzle device comprises a mounting base and a nozzle assembly; the mounting base is used to buckle the cavity opening of the material chamber, the nozzle assembly is located on a side of the mounting base away from the material chamber, and the nozzle assembly is connected to the material chamber through the mounting base;

[0008] Wherein, the number of the nozzle assemblies includes a plurality, and the plurality of nozzle assemblies are arranged at intervals along the length direction of the mounting base;

[0009] Furthermore, the plurality of nozzle assemblies and the mounting base are movably and detachably connected, so that the positions of the plurality of nozzle assemblies relative to the mounting base are adjustable.

[0010] In a possible implementation, along the length direction of the mounting base, the disassembly directions of the plurality of nozzle assemblies relative to the mounting base are consistent.

[0011] In a possible implementation, the mounting base and the nozzle assembly are slidably and detachably connected.

[0012] In a possible implementation, one of the mounting base and the nozzle assembly is provided with a slide groove, and one of the mounting base and the nozzle assembly is provided with a slider;

[0013] The sliding block slides in the sliding groove correspondingly, forming a sliding state of the nozzle assembly on the mounting base.

[0014] In a possible implementation manner, a magnetic member is provided between the mounting base and the nozzle assembly, and the nozzle assembly is adsorbed to the mounting base through the magnetic member.

[0015] In a possible implementation, one of the mounting base and the nozzle assembly is provided with a plug-in component, and the other of the mounting base and the nozzle assembly is provided with a slot, and the plug-in component is correspondingly plugged into the slot;

[0016] And / or, one of the mounting base and the nozzle assembly is provided with a connecting portion, and the other of the mounting base and the nozzle assembly is provided with a connecting hole, the outer wall surface of the connecting portion has an external thread, the inner wall surface of the connecting hole has an internal thread, and the connecting portion is fitted and connected in the connecting hole.

[0017] In one possible implementation, the nozzle assembly includes a nozzle base and a nozzle arranged on the nozzle base, and the nozzle is located on a side of the nozzle base facing away from the mounting base; the nozzle base has the nozzle mounting portion, and the mounting base has a base mounting portion, and the nozzle base and the mounting base are slidably and detachably connected through the nozzle mounting portion and the base mounting portion.

[0018] In one possible implementation, the number of the nozzle assemblies includes multiple, the nozzle is provided on at least a part of the nozzle bases, and the nozzle assembly provided with the nozzle is connected to the material chamber; the nozzle mounting part is respectively provided on each of the nozzle bases, and the multiple nozzle bases are embedded in the base mounting part through the multiple nozzle mounting parts in a one-to-one correspondence.

[0019] In one possible implementation, the base mounting portion includes a base mounting body and a base mounting groove provided on the base mounting body; the base mounting groove extends along the length direction of the mounting base, and the base mounting groove forms a slide groove; the nozzle base includes a nozzle mounting body, and the nozzle mounting portion is arranged on the nozzle mounting body; the nozzle mounting body slides in the base mounting groove.

[0020] In one possible implementation, a plurality of mounting bosses are provided on one of the base mounting body and the nozzle mounting portion, and a base assembly groove is provided on the other of the base mounting body and the nozzle mounting portion, wherein the base assembly groove extends along the length direction of the mounting base, and the base assembly groove forms a slide groove; when the nozzle mounting portion is embedded in the base mounting body, the mounting boss slides in the base assembly groove.

[0021] In a possible implementation, the mounting base also includes a first mounting platform and a second mounting platform, and the base mounting portion is arranged on the first mounting platform; when the nozzle mounting portion is embedded in the base mounting body, the surface of the base mounting body is flush with the surface of the nozzle mounting body.

[0022] In a possible implementation, a step portion is formed between the first mounting platform and the second mounting platform; the nozzle device also includes a stopper, which is arranged at the edge of the step portion along the moving direction of the nozzle assembly, and the stopper stops the nozzle assembly.

[0023] In one possible implementation, the mounting base is provided with a first through hole, which is connected to the material chamber of the evaporation equipment; at least a portion of the nozzle assemblies are provided with a second through hole; when the nozzle assembly is embedded in the base mounting portion, the second through hole corresponds to the first through hole and is connected to each other, and the second through hole is connected to the material chamber through the first through hole.

[0024] In a possible implementation, at least a portion of the nozzles are rotatably connected to the nozzle base, and a rotation direction of the nozzles intersects with a length direction of the mounting base.

[0025] In a possible implementation manner, at least a portion of the nozzles are detachably connected to the nozzle base.

[0026] In a possible implementation, the nozzle has a spray hole facing away from the material chamber, and the shape of the longitudinal cross-section of the spray hole includes a circular hole, a square hole or a fan-shaped hole.

[0027] In a possible implementation, the nozzle base is a heat-conducting metal part; and / or the nozzle is a heat-conducting metal part; and / or the mounting base is a heat-conducting metal part.

[0028] In a second aspect, an embodiment of the present application provides an evaporation device, comprising an evaporation crucible and a nozzle device, wherein the evaporation crucible has a material cavity, the mounting base of the nozzle device is snapped into the cavity opening of the material cavity, and the nozzle assembly of the nozzle device is connected to the material cavity through the mounting base.

[0029] In a possible implementation, a heating device is further included, wherein the heating device is configured to heat the evaporation crucible;

[0030] And / or, the evaporation equipment includes a heat preservation device, and the heat preservation device is arranged outside the evaporation crucible.

[0031] The nozzle device and evaporation equipment provided by the present application are connected to the mounting base in a movable and detachable manner. In this way, the mounting base is a universal base, and the nozzle assembly can be installed at any position of the mounting base according to actual needs, which is more flexible and can meet the coating requirements of different products. At the same time, only the corresponding nozzle assembly needs to be replaced, and there is no need to replace the entire nozzle device, which is conducive to improving replacement efficiency and saving replacement costs; at the same time, it is beneficial to avoid the occurrence of material leakage during the evaporation process, thereby maximizing the evaporation effect.

[0032] The structure of the present application and its other application objects and beneficial effects will be more clearly understood through the description of the preferred embodiments in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0034] Figure 1 A schematic diagram of the structure of the evaporation device provided in the embodiment of the present application;

[0035] Figure 2 A schematic diagram of the structure of the nozzle device and the mounting base provided in the embodiment of the present application after installation;

[0036] Figure 3 A schematic diagram of the assembly structure of the nozzle device and the mounting base provided in this application;

[0037] Figure 4 A schematic diagram of the structure of the mounting base of the nozzle device provided in the embodiment of the present application;

[0038] Figure 5 for Figure 4 A partial enlarged schematic diagram of part I;

[0039] Figure 6 A schematic diagram of the structure of a nozzle assembly of a nozzle device provided in an embodiment of the present application;

[0040] Figure 7A schematic diagram of the structure of a nozzle base of a nozzle device provided in an embodiment of the present application;

[0041] Figure 8 The working principle of the nozzle device provided in the embodiment of the present application is shown in FIG. Figure 1 ;

[0042] Fig. 9 The working principle of the nozzle device provided in the embodiment of the present application is shown in FIG. Figure 2 ;

[0043] Fig.10 The working principle of the nozzle device provided in the embodiment of the present application is shown in FIG. Figure 3 ;

[0044] Fig.11 Schematic diagram of the structure of the nozzle in the nozzle device provided in the embodiment of the present application Figure 1 ;

[0045] Fig.12 Schematic diagram of the structure of the nozzle in the nozzle device provided in the embodiment of the present application Figure 2 .

[0046] Description of reference numerals:

[0047] 100-nozzle device;

[0048] 110-mounting base; 111-first mounting platform; 112-second mounting platform;

[0049] 113-base mounting portion; 1131-base mounting body; 1132-base mounting slot;

[0050] 1133-base mounting boss; 1134-base mounting groove; 114-step portion;

[0051] 115-first through hole; 120-nozzle assembly; 121-nozzle base;

[0052] 1211-nozzle mounting body; 1212-nozzle mounting portion; 1213-mounting boss;

[0053] 1214-mounting groove; 122-nozzle; 123-second through hole;

[0054] 124-spray hole;

[0055] 130- stopper;

[0056] 200-evaporation equipment; 210-evaporation crucible; 211-material chamber;

[0057] 212- cavity opening; 220- target substrate. DETAILED DESCRIPTION

[0058] The vacuum evaporation process is as follows: the required coating material is placed in a container, a nozzle with a through hole is placed on top of the container, and the container is heated. When the temperature reaches the evaporation temperature of the internal material, the material will vaporize and spray upward through the through hole of the nozzle, attaching to the substrate to form a thin film.

[0059] In the related art, the nozzle is generally installed above the container through a base, and the nozzle is fixed on the base. The nozzle and the base are designed in an integrated manner, and the nozzle and the base are a whole. In this way, the installation position of the nozzle is fixed during the production process and cannot be changed later. The aperture, size, and angle of the nozzle cannot be changed well. If it corresponds to the coating requirements of different products, a whole set of new nozzles needs to be replaced, resulting in high production costs, high material consumption, low nozzle replacement efficiency, and extended product development cycle. In addition, according to different product requirements, the nozzle needs to be replaced and re-prepared, which will consume a lot of time and money, greatly reducing work efficiency.

[0060] Based on the above-mentioned technical problems, the embodiments of the present application provide a nozzle device and a vapor deposition device. The mounting base is a universal base, and the nozzle assembly can be installed at any position of the mounting base according to actual needs. It is more flexible and can meet the coating requirements of different products. At the same time, only the corresponding nozzle assembly needs to be replaced, and there is no need to replace the entire nozzle device, which is conducive to improving replacement efficiency and saving replacement costs.

[0061] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0062] Reference Figure 1 As shown, the embodiment of the present application provides an evaporation device 200. The evaporation device 200 in the present embodiment is a device for forming an organic coating film by evaporation on a target substrate 220 through a vacuum evaporation process.

[0063] The vacuum evaporation process can be understood as: placing the required evaporation material in the evaporation crucible 210, covering the evaporation crucible 210 with a nozzle 122 with a through hole, heating the evaporation crucible 210, and when the temperature reaches the evaporation temperature of the internal material, the evaporation material converted into a vapor state can be ejected upward through the through hole of the nozzle 122 and adhere to the target substrate 220 to form a thin film.

[0064] Exemplarily, the evaporation material may include a variety of metals, alloys, oxides and other compounds. Exemplarily, the metal material may include aluminum, gold, silver, and copper; the alloy material may include nickel chromium or titanium aluminum; the oxide may include indium tin oxide, zinc oxide, and silicon oxide. This embodiment does not limit this.

[0065] For example, the eruption path can refer to Figure 1 Indicated by the direction of the arrow.

[0066] It should be noted that, in this embodiment, the application scenario of the evaporation device 200 is not limited. For example, it can be used to make a display panel (Organic Light-Emitting Diode, referred to as OLED), which is not limited in this embodiment. In addition, the target substrate 220 in this embodiment can be a glass substrate, which is not limited in this embodiment.

[0067] It should be noted that, in this embodiment, the heating type in the vacuum evaporation process is not limited. For example, it can be resistance heating, electron beam heating, high-frequency induction heating, etc. This embodiment does not limit this.

[0068] In the embodiments of this application, specifically, refer to Figure 1 As shown, the evaporation device 200 may include an evaporation crucible 210 and a nozzle device 100 . The evaporation crucible 210 has a material cavity 211 . The nozzle device 100 is buckled into a cavity opening 212 of the material cavity 211 . The nozzle device 100 is in communication with the material cavity 211 .

[0069] In the embodiment of the present application, there is no limitation on the material and shape of the evaporation crucible 210. It is understandable that the material cavity 211 of the evaporation crucible 210 is used to accommodate the evaporation material, and the evaporation crucible 210 can be a rectangular parallelepiped, and a plurality of interconnected troughs can be designed inside for loading the material. This embodiment does not limit this.

[0070] In the embodiment of the present application, the evaporation device 200 may further include a heating device, which heats the evaporation material in the evaporation crucible 210. For example, the heating device may be composed of a high-temperature resistant electric heating tube, which is powered by a power supply unit of the evaporation machine; or the heating device may be an induction heater, which utilizes the principle of electromagnetic heating to heat the evaporation material by generating an alternating magnetic field around the crucible. This embodiment is not limited to this.

[0071] In the embodiment of the present application, the evaporation device 200 may further include a heat preservation device, which is arranged outside the evaporation crucible. Exemplarily, the heat preservation device may be composed of a plurality of heat preservation plates, for example, the heat preservation device may include a top heat preservation plate, a side heat preservation plate and a bottom heat preservation plate.

[0072] Specifically, the top insulation plate can be a metal plate with a through hole for use with the nozzle, so that the nozzle and the top insulation plate are used in combination to allow the material to spray upward; the side insulation plates and the bottom insulation plates are not in direct contact with the heating device, which can play a role in insulation and thus reduce heat loss.

[0073] The structure of the nozzle device provided in the embodiment of the present application is described in detail below.

[0074] In the embodiment of the present application, the nozzle device 100 may include a mounting base 110 and a nozzle assembly 120. The evaporation crucible 210 has a material cavity 211. The mounting base 110 is snapped into the cavity opening of the material cavity 211. The nozzle assembly 120 is located on the side of the mounting base 110 away from the material cavity 211. The nozzle assembly 120 is connected to the material cavity 211 through the mounting base 110.

[0075] In the embodiment of the present application, the evaporation crucible 210 is used to load the evaporation material to be evaporated, wherein the evaporation crucible 210 has a material cavity 211, and the evaporation material is located in the material cavity 211. The material cavity 211 can provide a stable and high-purity vacuum environment for the evaporation material, so that the evaporation material can be freely diffused in the vacuum after being vaporized and attached to the target substrate 220. It should be noted that the evaporation material can include metals such as silver, magnesium, aluminum, etc.; or the evaporation material can include compounds, etc. This embodiment does not limit this.

[0076] In the embodiment of the present application, the mounting base 110 is buckled with the cavity opening 212 of the material cavity 211. This helps to ensure the sealing of the material cavity 211, thereby ensuring that the material cavity 211 provides a stable and high-purity vacuum environment for the evaporation material, thereby ensuring the evaporation effect to the greatest extent.

[0077] It should be noted that there is no limitation on the snap-fitting method of the mounting base 110 and the material cavity 211. For example, the mounting base 110 can be a flat structure, and the mounting base 110 directly covers the cavity opening 212 of the material cavity 211, or the mounting base 110 can be provided with an extended flange, which is engaged with the edge of the cavity opening 212.

[0078] This helps to increase the connection area between the mounting base 110 and the evaporation crucible 210, thereby improving the connection stability between the nozzle device 100 and the evaporation crucible 210 and helping to ensure the sealing effect. This embodiment does not limit this, and can be specifically set according to actual needs.

[0079] In the embodiment of the present application, the nozzle assembly 120 is located on the side of the mounting base 110 away from the material chamber 211. It can be understood that the nozzle assembly 120 is located on the side of the mounting base 110 close to the target substrate 220. In this way, the evaporation material converted into a vapor state can be sprayed out through the nozzle assembly 120. When the target substrate 220 to be evaporated passes above the nozzle assembly 120, the vapor can adhere to the area to be evaporated on the target substrate 220 to form a coating film on the target substrate 220.

[0080] In the embodiment of the present application, there is no limitation on the materials of the nozzle assembly 120 and the mounting base 110. For example, the nozzle assembly 120 and the mounting base 110 can both be made of metal materials. Among them, the metal material has excellent thermal conductivity, so that the heat of the evaporation crucible 210 is more easily transferred to the mounting base 110 and the nozzle assembly 120, so that the mounting base 110 and the nozzle assembly 120 can maintain a high temperature, and prevent the organic vapor from returning to liquid due to the low temperature when it reaches the mounting base 110 and the nozzle assembly 120.

[0081] Exemplarily, the thermally conductive material used in the nozzle assembly 120 may include graphene, thermally conductive adhesive, thermally conductive silicone sheet, thermally conductive insulating material, thermally conductive interface material, thermally conductive tape, thermally conductive silicone grease, thermally conductive paste, heat dissipation paste, heat dissipation silicone grease, heat dissipation oil, heat dissipation film, thermally conductive film, etc.; the thermally conductive material used in the mounting base 110 may also include graphene, thermally conductive adhesive, thermally conductive silicone sheet, thermally conductive insulating material, thermally conductive interface material, thermally conductive tape, thermally conductive silicone grease, thermally conductive paste, heat dissipation paste, heat dissipation silicone grease, heat dissipation oil, heat dissipation film, thermally conductive film, etc. This embodiment does not limit this.

[0082] In the embodiment of the present application, the heat conductive material of the nozzle assembly 120 and the mounting base 110 may be the same, or may be different. In the present embodiment, the heat conductive material of the nozzle assembly 120 and the mounting base 110 is the same as an example for description. In this way, it helps to ensure that the nozzle assembly 120 and the mounting base 110 absorb the same amount of heat.

[0083] In the embodiment of the present application, a heat conductive layer may be further provided between the nozzle assembly 120 and the mounting base 110, so that the heat of the evaporation crucible 210 can be transferred to the nozzle assembly 120 more and faster, thereby ensuring the high temperature of the nozzle assembly 120, helping to minimize heat loss during the heat transfer process, and improving the heat transfer performance.

[0084] In order to improve the installation flexibility of the nozzle assembly 120, the problem that the nozzle 122 is fixed in the installation position in the related art and cannot meet the coating requirements of different products is avoided. Figure 2 and Figure 3As shown, the number of nozzle assemblies 120 may include multiple nozzle assemblies 120, and the multiple nozzle assemblies 120 are arranged at intervals along the length direction of the mounting base 110. There is no limitation on the number of nozzle assemblies 120, and the number can be set according to actual needs. In this way, the design of multiple nozzle assemblies 120 can expand the spray coverage.

[0085] To facilitate the disassembly of the nozzle assembly 120 , in the embodiment of the present application, the multiple nozzle assemblies 120 and the mounting base 110 are movable and detachably connected, so that the positions of the multiple nozzle assemblies 120 relative to the mounting base 110 are adjustable.

[0086] It should be noted that the nozzle assembly 120 and the mounting base 110 are movably arranged, so that the nozzle assembly 120 can be moved on the mounting base 110. By moving the nozzle assembly 120, it helps to expand the spraying coverage of the nozzle assembly 120, improve the spraying efficiency, and reduce the difficulty of adjustment.

[0087] In the embodiment of the present application, there is no limitation on the detachable connection between the nozzle assembly 120 and the mounting base 110. For example, the nozzle assembly 120 and the mounting base 110 can be detachable by sliding or rotating. This embodiment does not limit this, and it can be specifically set according to actual needs.

[0088] In the embodiment of the present application, since the nozzle assembly 120 and the mounting base 110 are movably and detachably connected, the user can adjust the position and spacing of the nozzle assembly 120 according to specific process requirements. This flexibility allows the device to adapt to substrates or products of different sizes and shapes, thereby enhancing the versatility of the device.

[0089] In addition, by adjusting the position of the nozzle assembly 120, the material distribution and deposition process can be optimized to ensure that a uniform layer or deposition layer is obtained on the target substrate 220; moreover, the detachable design makes the maintenance and replacement of the nozzle assembly 120 more convenient, reduces equipment downtime, and improves production efficiency. In addition, users can replace nozzle assemblies 120 of different specifications or types as needed to adapt to different process requirements.

[0090] In addition, this design allows the number of nozzles to be increased or decreased when needed, thereby adjusting the equipment's capacity or adapting to new process flows. Moreover, by optimizing the layout and number of nozzles, material waste and energy consumption can be reduced, thereby reducing production costs.

[0091] In a possible implementation, along the length direction of the mounting base 110 , the disassembly directions of the plurality of nozzle assemblies 120 relative to the mounting base 110 are consistent.

[0092] For example, the disassembly direction of the nozzle assembly 120 can refer to Figure 3 Indicated by the direction of arrow A.

[0093] In this way, with consistent disassembly directions, operators can more easily understand and perform installation or disassembly operations, which helps to reduce complexity, reduce adjustment and repositioning time, simplify operating procedures, and improve efficiency and safety.

[0094] The movable connection method between the mounting base and the nozzle assembly provided in the embodiment of the present application is described below.

[0095] In a possible implementation, the mounting base 110 and the nozzle assembly 120 can be slidably and detachably connected. In this way, the sliding connection allows the nozzle assembly 120 to be easily slid into place or removed from the mounting base 110, simplifying the installation and removal process.

[0096] For example, refer to Figure 8 As shown, the nozzle 122 can slide in the A direction, or the nozzle 122 can slide in the B direction.

[0097] Specifically, one of the mounting base 110 and the nozzle assembly 120 may be provided with a slide groove, and one of the mounting base 110 and the nozzle assembly 120 may be provided with a slider; the slider slides in the slide groove accordingly to form a sliding state of the nozzle assembly 120 on the mounting base 110. The positions of the slide groove and the slider are not limited.

[0098] In this way, the sliding of the slider in the slide groove provides precise linear guidance, allowing the nozzle assembly 120 to move stably and accurately on the mounting base 110, helping to ensure that the nozzle maintains a stable position during operation and reducing position deviation caused by vibration or other factors.

[0099] In a possible implementation, a magnetic member may be disposed between the mounting base 110 and the nozzle assembly 120 , and the nozzle assembly 120 is adsorbed to the mounting base 110 via the magnetic member.

[0100] Exemplarily, the magnetic member may be a magnet. For example, a magnetic member may be disposed at the relative positions of the mounting base 110 and the nozzle assembly 120 to achieve the attraction between the two.

[0101] In this way, the magnetic connection allows the nozzle assembly 120 to be quickly and easily installed on or removed from the mounting base 110 without the use of tools, thereby simplifying the operating process; in addition, due to the non-mechanical nature of the magnetic connection, the replacement and maintenance of the nozzle assembly 120 becomes more efficient, thereby improving production efficiency; in addition, the magnetic connection can provide an automatic alignment function to a certain extent, thereby reducing operational errors caused by misaligned installation, and the magnetic connection has no mechanical wearing parts, thereby helping to reduce wear and damage caused by frequent disassembly and assembly, thereby extending the service life of the component.

[0102] In a possible implementation, one of the mounting base 110 and the nozzle assembly 120 may be provided with a plug-in component, and the other of the mounting base 110 and the nozzle assembly 120 may be provided with a slot, and the plug-in component is correspondingly plugged into the slot. The specific positions of the slot and the plug-in component are not limited.

[0103] Exemplarily, the connector may be a plug.

[0104] In this way, the cooperation between the connector and the slot provides a reliable and stable connection, ensuring that the nozzle assembly 120 will not loosen or shift during operation. The structure of the connector and the slot is usually simple, easy to manufacture and maintain, and reduces the manufacturing and cost of the equipment.

[0105] In some embodiments, one of the mounting base 110 and the nozzle assembly 120 may be provided with a connecting portion, and the other of the mounting base 110 and the nozzle assembly 120 may be provided with a connecting hole, the outer wall surface of the connecting portion has an external thread, the inner wall surface of the connecting hole has an internal thread, and the connecting portion is fitted and connected in the connecting hole.

[0106] In this way, the threaded connection provides a strong mechanical locking capability to ensure that the nozzle assembly 120 remains stable during operation and is not easy to loosen or shift. Moreover, the threaded connection allows precise positioning and alignment. By rotating the threaded connection, the tightening force of the connection can be adjusted to meet different operating conditions and requirements, which is more flexible.

[0107] In a possible implementation, the nozzle base 121 has a nozzle mounting portion 1212 (see Figure 6 As shown), the mounting base 110 has a base mounting portion 113, the nozzle assembly 120 is embedded in the base mounting portion 113 through the nozzle mounting portion 1212, and the nozzle assembly 120 and the mounting base 110 are movably and detachably connected through the nozzle mounting portion 1212 and the base mounting portion 113.

[0108] In the embodiment of the present application, the nozzle assembly 120 and the mounting base 110 are movably and detachably connected via the nozzle mounting portion 1212 and the base mounting portion 113. Herein, "sliding" means that the nozzle assembly 120 can move in the horizontal direction on the mounting base 110, or the nozzle assembly 120 can move in the vertical direction on the mounting base 110. This is not limited in the present embodiment. Herein, "detachably connected" means that the nozzle assembly 120 and the mounting base 110 are not fixedly connected.

[0109] In the embodiment of the present application, the specific structure of the base mounting portion 113 and the nozzle mounting portion 1212 is not limited. For example, the base mounting portion 113 may be provided with a protrusion, and the nozzle mounting portion 1212 may be provided with a groove, and the protrusion is correspondingly embedded in the groove, or the arrangement may be reversed. For example, the base mounting portion 113 may be provided with a buckle, and the nozzle mounting portion 1212 may be provided with a slot, or the arrangement may be reversed, and the buckle is correspondingly inserted into the slot. This embodiment does not limit this.

[0110] It should be noted that the mounting base 110 of this embodiment is a universal base, so the nozzle assembly 120 can be installed at any position of the mounting base 110 according to actual needs, which is more flexible and can meet the coating requirements of different products. At the same time, since the nozzle assembly 120 and the mounting base 110 are movably and detachably connected, only the corresponding nozzle assembly 120 needs to be replaced, and there is no need to replace the entire nozzle device 100, which is conducive to improving replacement efficiency and saving replacement costs.

[0111] In addition, by including the base mounting portion 113 and the nozzle mounting portion 1212, the nozzle assembly 120 is embedded in the base mounting portion 113 through the nozzle mounting portion 1212, so that the installation accuracy of the mounting base 110 and the nozzle assembly 120 can be guaranteed, and at the same time, it is beneficial to avoid the occurrence of material leakage during the evaporation process, thereby maximizing the evaporation effect. In addition, the present application can adjust the position, aperture, size and angle of the nozzle 122 at any time according to actual needs, which is beneficial to improving the versatility of the nozzle device 100, and the application range is wider, improving the user experience.

[0112] In one possible implementation, referring to Figure 6 and Figure 7 As shown, the nozzle assembly 120 may include a nozzle base 121 and a nozzle 122 disposed on the nozzle base 121, and the nozzle 122 is located on a side of the nozzle base 121 away from the mounting base 110. The nozzle mounting portion 1212 is disposed on the nozzle base 121, and the nozzle base 121 is embedded in the base mounting portion 113, and the nozzle base 121 and the mounting base 110 are movably and detachably connected through the nozzle mounting portion 1212 and the base mounting portion 113.

[0113] In the embodiment of the present application, there is no limitation on the assembly relationship between the nozzle base 121 and the nozzle 122. For example, the nozzle base 121 and the nozzle 122 may be an integral part, or the nozzle base 121 and the nozzle 122 may be movable and detachably connected. This embodiment does not limit this.

[0114] It can be understood that the nozzle base 121 and the nozzle 122 are made of the same thermally conductive material.

[0115] In one possible implementation, referring to Figure 2 and Figure 3 As shown, the number of nozzle assemblies 120 may include multiple nozzles, and at least some of the nozzle bases 121 may be provided with nozzles 122, and the nozzle assemblies 120 provided with nozzles 122 are communicated with the material chamber 211. Each nozzle base 121 is respectively provided with a nozzle mounting portion 1212, and the multiple nozzle bases 121 are embedded in the base mounting portion 113 through the multiple nozzle mounting portions 1212 in a one-to-one correspondence.

[0116] In the embodiment of the present application, there is no limitation on the number of nozzle assemblies 120. For example, the number of nozzle assemblies 120 may include two, three or more. This is not limited in the present embodiment.

[0117] In the embodiment of the present application, there is no limitation on the spacing between any adjacent nozzle assemblies 120 of the plurality of nozzle assemblies 120. In addition, there is no limitation on the outlet diameters, outlet angles, etc. of different nozzles 122, which can be set according to actual coating requirements.

[0118] It should be noted that at least some of the nozzle bases 121 may be provided with nozzles 122, which means that the nozzles 122 may be installed as required, and the nozzle bases 121 without holes may be used to cover the positions where the nozzles 122 are not required to be installed. The nozzle bases 121 with holes may be used at the positions where the nozzles 122 are required to be installed. In this way, the nozzle bases 121 may be reasonably utilized, so that different nozzles 122 may be installed and used according to the use requirements, which is more flexible and can meet the coating requirements of different products.

[0119] In one possible implementation, referring to Figure 4 and Figure 5 As shown, the base mounting portion 113 may include a base mounting body 1131 and a base mounting groove 1132 opened on the base mounting body 1131 .

[0120] The base installation groove 1132 extends along the length direction of the installation base 110 , and the base installation groove 1132 forms a sliding groove.

[0121] Reference Figure 6 and Figure 7 As shown, the nozzle base 121 may include a nozzle mounting body 1211, and a nozzle mounting portion 1212 is disposed on the nozzle mounting body 1211. The nozzle mounting body 1211 slides in the base mounting groove 1132.

[0122] In the embodiment of the present application, there is no limitation on the groove depth, groove width, etc. of the base mounting groove 1132, and they can be set according to actual needs.

[0123] In the embodiment of the present application, there is no limitation on the assembly relationship between the nozzle mounting portion 1212 and the nozzle mounting body 1211. For example, the nozzle mounting portion 1212 and the nozzle mounting body 1211 may be an integral part, or the nozzle mounting portion 1212 and the nozzle mounting body 1211 may be connected by welding, bonding, etc. In the present embodiment, the nozzle mounting portion 1212 and the nozzle mounting body 1211 are mainly described as an integral part, which helps to improve the structural strength of the nozzle base 121.

[0124] In one possible implementation, a plurality of mounting bosses may be provided on one of the base mounting body 1131 and the nozzle mounting portion 1212, and a plurality of mounting grooves may be provided on the other of the base mounting body 1131 and the nozzle mounting portion 1212; when the nozzle mounting portion 1212 is embedded in the base mounting body 1131, the plurality of mounting bosses are respectively disposed in the plurality of mounting grooves.

[0125] In the embodiment of the present application, there is no limitation on the specific locations of the mounting boss and the mounting groove, and they can be arranged according to actual needs.

[0126] For example, refer to Figure 5 As shown, along the height direction of the base mounting body 1131, a plurality of base mounting bosses 1133 and base assembly grooves 1134 may be provided on the base mounting body 1131, and the base assembly grooves 1134 extend along the length direction of the mounting base 110, and the base assembly grooves 1134 form sliding grooves.

[0127] Correspondingly, refer to Figure 6 and Figure 7 As shown, along the height direction of the nozzle base 121, the nozzle mounting portion 1212 may be provided with a mounting boss 1213 and a mounting groove 1214, the mounting boss 1213 is correspondingly embedded in the base assembly groove 1134, and the base mounting boss 1133 is correspondingly embedded in the mounting groove 1214. This embodiment is not limited to this.

[0128] Exemplarily, the base mounting boss 1133 and the base mounting body 1131 may be an integral part, which is beneficial to improving the structural strength of the mounting base 110 , and the mounting boss 1213 and the nozzle mounting portion 1212 may be an integral part, which is beneficial to improving the structural strength of the nozzle base 121 .

[0129] Through the above-mentioned assembly method, the installation accuracy of the mounting base 110 and the nozzle assembly 120 can be guaranteed. At the same time, it is beneficial to improve the installation sealing of the mounting base 110 and the nozzle assembly 120 during the evaporation process, thereby avoiding the occurrence of leakage, thereby maximizing the evaporation effect.

[0130] In one possible implementation, referring to Figure 2 and Figure 3 As shown, the mounting base 110 may include a first mounting platform 111 and a second mounting platform 112 , and the base mounting portion 113 is disposed on the first mounting platform 111 .

[0131] In the embodiment of the present application, there is no limitation on the assembly relationship between the first mounting platform 111 and the second mounting platform 112, and the first mounting platform 111 and the base mounting portion 113. For example, the first mounting platform 111 and the second mounting platform 112, and the first mounting platform 111 and the base mounting portion 113 can be an integral part, which is beneficial to improving the structural strength of the mounting base 110.

[0132] When the nozzle mounting portion 1212 is embedded in the base mounting body 1131, the surface of the base mounting body 1131 can be flush with the surface of the nozzle mounting body 1211. In this way, after the mounting base 110 and the nozzle assembly 120 are installed, there is no gap between the surface of the base mounting body 1131 and the surface of the nozzle mounting body 1211, which is beneficial to avoid the occurrence of material leakage, thereby maximizing the evaporation effect.

[0133] In one possible implementation, referring to Figure 2 and Figure 3 As shown, a step portion 114 may be formed between the first mounting platform 111 and the second mounting platform 112. The nozzle device 100 may further include a stopper 130 disposed at an edge of the step portion 114 along the length direction of the mounting base 110, and the stopper 130 stops the nozzle assembly 120.

[0134] In the embodiment of the present application, there is no limitation on the shape, material, size, etc. of the stopper 130, which can be set according to actual needs. For example, the stopper 130 can be a baffle.

[0135] In this way, the stopper 130 is arranged at the edge of the step portion 114. After the nozzle assembly 120 and the mounting base 110 are installed, the nozzle assembly 120 and the mounting base 110 can be fixed at the edge position, thereby helping to ensure that the installation position of the nozzle assembly 120 remains unchanged, thereby ensuring the evaporation effect. In addition, the step portion 114 can support and fix the stopper 130, further ensuring the stopping effect.

[0136] In one possible implementation, referring to Figure 1As shown, the mounting base 110 may be provided with a first through hole 115, and the first through hole 115 is connected to the material chamber 211 of the evaporation equipment 200; a second through hole 123 may be provided on at least a portion of the nozzle assemblies 120; when the nozzle assembly 120 is embedded in the base mounting portion 113, the second through hole 123 corresponds to the first through hole 115 and is connected to each other, and the second through hole 123 is connected to the material chamber 211 through the first through hole 115.

[0137] The shapes and sizes of the first through hole 115 and the second through hole 123 are not limited and can be set according to actual needs. It is understandable that the second through hole 123 passes through the nozzle 122 and the nozzle base 121 .

[0138] In a possible implementation, at least some of the nozzles 122 are rotatably connected to the nozzle base 121, and the rotation direction of the nozzle 122 intersects with the length direction of the mounting base 110. Exemplarily, the center axis of the nozzle 122 may have an angle with respect to the length direction of the mounting base 110.

[0139] Exemplarily, at least a portion of the nozzles 122 means that a portion of the nozzles 122 can be rotatably connected to the nozzle base 121 , and a portion of the nozzles 122 can be fixedly connected to the nozzle base 121 ; or, all of the nozzles 122 can be rotatably connected to the nozzle base 121 .

[0140] For example, refer to Fig. 9 and Fig.10 As shown, the nozzle 122 can be along Fig. 9 The nozzle 122 can be rotated clockwise in the direction of the arrow in FIG. Fig.10 As shown, the rotation angle of the nozzle 122 can be a.

[0141] It should be noted that, in this embodiment, the rotation direction of the nozzle 122 is not limited, and the nozzle 122 can rotate clockwise or counterclockwise.

[0142] In this way, the rotation of the nozzle 122 can change the direction in which the gaseous evaporation material is sprayed from the nozzle 122, thereby expanding the range of the target substrate 220 that the nozzle 122 can cover in its rotation direction, reducing the overlapping area of ​​the evaporated film layer, and improving the uniformity of the evaporated film layer.

[0143] In a possible implementation, at least a portion of the nozzles 122 are detachably connected to the nozzle base 121. In this way, since the nozzles 122 can be individually removed and replaced, the cost of replacing the entire nozzle assembly 120 due to wear or blockage of the nozzles 122 is reduced.

[0144] In one possible implementation, referring to Figure 2 and Figure 3As shown, the nozzle 122 has a spray hole 124 on the side away from the material chamber 211, and the shape of the longitudinal cross section of the spray hole 124 may include a circular hole, a square hole or a fan-shaped hole. This embodiment does not limit this.

[0145] For example, a circular spray hole 124 is helpful to provide a uniform spray flow, a square hole can provide a spray flow with a clear boundary, and a fan-shaped hole provides a wide spray flow, which is suitable for applications that require large area coverage. This embodiment does not limit this.

[0146] In a possible implementation, the diameter of the spray hole 124 can be adjusted according to actual needs. Fig.11 and Fig.12 As shown, Fig.11 The diameter of the nozzle hole 124 may be D1, Fig.12 The aperture of the spray hole 124 may be D2, wherein D1 is greater than D2.

[0147] It should be noted that this embodiment does not limit this, and a suitable aperture can be selected according to actual needs.

[0148] In this way, by adjusting the aperture, the performance of the nozzle 122 can be optimized to achieve the best effect, including improving the uniformity, coverage and efficiency of the spray, thereby improving the overall process effect; in addition, it helps to reduce the waste of materials and energy. For example, when a smaller flow rate is required, the aperture can be reduced to reduce material consumption.

[0149] The nozzle device and evaporation equipment provided by the present application can be installed at any position of the mounting base according to actual needs, with higher flexibility, and can meet the coating requirements of different products. At the same time, only the corresponding nozzle assembly needs to be replaced, and there is no need to replace the entire nozzle device, which is conducive to improving replacement efficiency and saving replacement costs.

[0150] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0151] In the description of the present application, it should be understood that the terms "including" and "having" and any variations thereof used herein are intended to cover non-exclusive inclusions. For example, a process, method, system, product or apparatus comprising a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to these processes, methods, products or apparatuses.

[0152] Unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium, and it can make the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0153] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A nozzle device, used for a vapor deposition device, connected to a material chamber of the vapor deposition device, characterized in that: The nozzle device comprises a mounting base (110) and a nozzle assembly (120); The mounting base (110) is used to buckle with the cavity opening (212) of the material cavity (211); the nozzle assembly (120) is located on a side of the mounting base (110) away from the material cavity (211); and the nozzle assembly (120) is connected to the material cavity (211) through the mounting base (110); The number of the nozzle assemblies (120) includes a plurality, and the plurality of nozzle assemblies (120) are arranged at intervals along the length direction of the mounting base (110); Furthermore, the plurality of nozzle assemblies (120) and the mounting base (110) are movably and detachably connected, so that the positions of the plurality of nozzle assemblies (120) relative to the mounting base (110) are adjustable.

2. The nozzle device according to claim 1, characterized in that Along the length direction of the mounting base (110), the disassembly directions of the plurality of nozzle assemblies (120) relative to the mounting base (110) are consistent.

3. The nozzle device according to claim 1, characterized in that The mounting base (110) and the nozzle assembly (120) are slidably and detachably connected.

4. The nozzle device according to claim 3, characterized in that One of the mounting base (110) and the nozzle assembly (120) is provided with a slide groove, and one of the mounting base (110) and the nozzle assembly (120) is provided with a sliding block; The sliding block slides correspondingly in the sliding groove, forming a sliding state of the nozzle assembly (120) on the mounting base (110).

5. The nozzle device according to claim 1, characterized in that A magnetic component is provided between the mounting base (110) and the nozzle assembly (120), and the nozzle assembly (120) is adsorbed on the mounting base (110) via the magnetic component.

6. The nozzle device according to claim 1, characterized in that One of the mounting base (110) and the nozzle assembly (120) is provided with a plug-in component, and the other of the mounting base (110) and the nozzle assembly (120) is provided with a slot, and the plug-in component is correspondingly plugged into the slot; And / or, one of the mounting base (110) and the nozzle assembly (120) is provided with a connecting portion, and the other of the mounting base (110) and the nozzle assembly (120) is provided with a connecting hole, the outer wall surface of the connecting portion has an external thread, the inner wall surface of the connecting hole has an internal thread, and the connecting portion is fitted and connected in the connecting hole.

7. The nozzle device according to claim 3, characterized in that The nozzle assembly (120) comprises a nozzle base (121) and a nozzle (122) arranged on the nozzle base (121), wherein the nozzle (122) is located on a side of the nozzle base (121) facing away from the mounting base (110); The nozzle base (121) has a nozzle mounting portion (1212), and the mounting base (110) has a base mounting portion (113); the nozzle base (121) and the mounting base (110) are slidably and detachably connected via the nozzle mounting portion (1212) and the base mounting portion (113).

8. The nozzle device according to claim 7, characterized in that The number of the nozzle assemblies (120) includes a plurality, and the nozzles (122) are arranged on at least a portion of the nozzle bases (121); Each of the nozzle bases (121) is provided with a nozzle mounting portion (1212), and a plurality of the nozzle bases (121) are embedded in the base mounting portion (113) in a one-to-one correspondence via a plurality of the nozzle mounting portions (1212).

9. The nozzle device according to claim 8, characterized in that The base mounting portion (113) comprises a base mounting body (1131) and a base mounting groove (1132) provided on the base mounting body (1131), wherein the base mounting groove (1132) extends along the length direction of the mounting base (110), and the base mounting groove (1132) forms a slide groove; The nozzle base (121) comprises a nozzle mounting body (1211), and the nozzle mounting body (1211) slides in the base mounting groove (1132).

10. The nozzle device according to claim 9, characterized in that A mounting boss (1213) is provided on one of the base mounting body (1131) and the nozzle mounting portion (1212), and a base assembly groove (1134) is provided on the other of the base mounting body (1131) and the nozzle mounting portion (1212), wherein the base assembly groove (1134) extends along the length direction of the mounting base (110), and the base assembly groove (1134) forms a slide groove; When the nozzle mounting portion (1212) is embedded in the base mounting body (1131), the mounting boss (1213) slides in the base assembly groove (1134).

11. The nozzle device according to claim 10, characterized in that The mounting base (110) comprises a first mounting platform (111) and a second mounting platform (112), and the base mounting portion (113) is arranged on the first mounting platform (111); When the nozzle mounting portion (1212) is embedded in the base mounting body (1131), the surface of the base mounting body (1131) is flush with the surface of the nozzle mounting body (1211).

12. The nozzle device according to claim 11, characterized in that A step portion (114) is formed between the first mounting platform (111) and the second mounting platform (112); The nozzle device further comprises a stopper (130), which is arranged at the edge of the step portion (114) along the length direction of the mounting base (110), and the stopper (130) stops the nozzle assembly (120).

13. The nozzle device according to any one of claims 1 to 12, characterized in that The mounting base (110) is provided with a first through hole (115), the first through hole (115) being connected to the material chamber (211) of the evaporation device; at least some of the nozzle assemblies (120) are provided with a second through hole (123); The second through hole (123) corresponds to the first through hole (115) and is in communication with each other; the second through hole (123) is in communication with the material cavity (211) via the first through hole (115).

14. The nozzle device according to claim 7, characterized in that At least a portion of the nozzles (122) are rotatably connected to the nozzle base (121), and the rotation direction of the nozzles (122) intersects with the length direction of the mounting base (110).

15. The nozzle device according to claim 7, characterized in that At least a portion of the nozzles (122) are detachably connected to the nozzle base (121).

16. The nozzle device according to claim 7, characterized in that The nozzle (122) has a spray hole (124) on a side away from the material chamber (211); the shape of the longitudinal cross-section of the spray hole (124) includes a circular hole, a square hole or a fan-shaped hole.

17. The nozzle device according to claim 7, characterized in that The nozzle base (121) is a heat-conducting metal part; and / or the nozzle (122) is a heat-conducting metal part; and / or the mounting base (110) is a heat-conducting metal part; Alternatively, a heat-conducting layer is provided between the nozzle assembly (120) and the mounting base (110).

18. A vapor deposition device, characterized in that: The invention comprises a vapor deposition crucible and a nozzle device according to any one of claims 1 to 17, wherein the vapor deposition crucible (210) has a material cavity (211), a mounting base (110) of the nozzle device is buckled into a cavity opening (212) of the material cavity (211), and a nozzle assembly (120) of the nozzle device is connected to the material cavity (211) via the mounting base (110).

19. The evaporation device according to claim 18, characterized in that: Also included is a heating device, the heating device being configured to heat the evaporation crucible; And / or, the evaporation equipment includes a heat preservation device, and the heat preservation device is arranged outside the evaporation crucible.

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