A composite plasma method nano silicon nitride preparation device and process

Abstract

The invention discloses a composite plasma method nano silicon nitride preparation device and process, and the invention relates to the technical field of nano silicon nitride preparation. The composite plasma method nano silicon nitride preparation device and process realize the cyclic alternating operation of four gas mixing conveying parts through the cooperation of an assembly plate, a support frame and a rotating conveying assembly, and realize the premixing of silane and ammonia in the alternating process, cooperate with the setting of a rotating docking part and a guide docking part, and realize convenient connection and separation with a gas phase output part and a gas phase introduction part during the rotation process, so as to ensure that the gas delivery pump can stably introduce a premixed set ratio of gas phase raw materials into a composite plasma reaction tank, ensure the mixing uniformity of the gas phase raw materials, provide support for improving the production quality of finished nano silicon nitride, and effectively avoid the waste of gas phase raw materials by intermittently conveying the uniformly mixed gas phase raw materials.

Description

Technical Field

[0001] The invention relates to the technical field of nano silicon nitride preparation, in particular to a composite plasma method nano silicon nitride preparation device and a process thereof. Background Art

[0002] Silicon nitride powder is the main raw material for silicon nitride ceramics and related products. The main preparation methods currently include direct nitridation of silicon powder, carbon thermal reduction, thermal decomposition, sol-gel, chemical vapor deposition and self-propagating method. For the existing production of nano silicon nitride, ball milling is used, but the production efficiency will be very low if the ball milling method is used to grind to nano size.

[0003] As described in the application number 201410749900.6, a device for producing silicon and silicon nitride nanoparticles uses a gas phase method to produce silicon nanoparticles. Silane or silicon tetrachloride is decomposed by plasma and then crystallized into nuclei and grown into nano silicon particles. The particle size distribution of the particles is very narrow, and the size of the nanoparticles can be accurately controlled by adjusting the residence time of the gas in the reaction chamber and the density of the reaction gas in the reaction chamber. A certain space is formed between the quartz cover and the gas cover, that is, after the gas is input from the air inlet, it will collide between the convex conical lower surface on the air inlet cover and the convex conical upper surface on the quartz cover like the reflection of light. The cone shape makes its collision path longer, so that there are more collisions, and finally the purpose of very uniform gas distribution is achieved.

[0004] Based on the search of the above information, it can be seen that when using the gas phase method to produce nano-silicon nitride, it is necessary to continuously introduce gas to ensure uniform distribution of the gas, so as to facilitate the production of nano-silicon nitride. However, although this method of continuously introducing raw material gas can ensure the stability of gas concentration during the reaction, thereby controlling the reaction rate and product quality, the continuous introduction of raw material gas is likely to lead to waste of raw materials and increase in costs, and the mixing effect of raw material gas is poor, and the production quality of finished nano-silicon nitride cannot be effectively improved. For this reason, a composite plasma method nano-silicon nitride preparation device and process are proposed. The raw material gas is premixed and injected into the composite plasma reaction tank, which effectively avoids the waste of raw material gas. Summary of the invention

[0005] 1. Technical issues to be resolved In view of the shortcomings of the prior art, the present invention provides a composite plasma method for preparing nano-silicon nitride and a process thereof, which solves the problems that continuous introduction of raw material gas in the gas phase method for producing nano-silicon nitride easily leads to raw material waste and increased costs, and the raw material gas mixing effect is poor, and the production quality of the finished nano-silicon nitride cannot be effectively improved.

[0006] To achieve the above objectives, the present invention is implemented through the following technical solutions: a composite plasma method nano silicon nitride preparation device, including a composite plasma reaction tank and a gas delivery pump connected thereto, the input end of the gas delivery pump is connected to a gas premixing component through a first hose, the gas premixing component includes an assembly plate, a rotating conveying component is fixedly provided on the assembly plate through a support frame, four gas mixing conveying parts are evenly spaced on the rotating conveying component, a gas phase introduction part and a gas phase output part are also provided on the assembly plate, the output end of the gas phase introduction part and the input end of the gas phase output part are both provided with a rotating docking part, and the gas mixing conveying part is provided with a guide docking part compatible with the rotating docking part.

[0007] The present invention is further configured as follows: the rotating conveying assembly comprises a positioning gearwheel, the bottom of the positioning gearwheel is fixedly connected to a stepper motor, the output end of the stepper motor is fixedly connected to a rotating shaft through a coupling, and the bottom end of the rotating shaft is fixedly connected to a carrier plate; The positioning gear is fixedly mounted on the top of the inner cavity of the support frame, the bottom of the assembly plate is fixedly connected with a U-shaped reinforcement frame, and the bottom of the carrying plate is in sliding contact with the top of the U-shaped reinforcement frame.

[0008] The present invention is further configured as follows: the gas-mixing conveying member comprises an air storage cylinder, a stirring shaft is rotatably installed through the top of the air storage cylinder, a pinion is fixedly connected to the top of the stirring shaft, and a curved stirring plate frame is sleeved and fixedly connected to the outer periphery of the stirring shaft located inside the air storage cylinder; The air storage cylinder is fixedly mounted on the top of the carrier plate, and four air storage cylinders are evenly distributed on the top of the carrier plate, and the outer surface of the small gear is meshed with the outer surface of the positioning large gear; The guide docking piece is arranged on the outer periphery of the air storage cylinder.

[0009] The present invention is further configured as follows: the guide docking member comprises two arc-shaped guide plates, the outer arc surface of the arc-shaped guide plates is provided with a plug-in hole, the plug-in hole is fixedly connected with a guide cylinder, a blocking ring is slidably installed between the outer periphery of the guide cylinder and the inner surface of the plug-in hole, a first spring is also sleeved on the outer periphery of the guide cylinder, the two ends of the first spring are respectively fixedly connected to the plug-in hole and the side opposite to the blocking ring, and a plurality of first air guide holes are evenly spaced on the outer periphery of the guide cylinder, and when the first spring is not subjected to an extrusion force, the blocking ring is pushed to block the plurality of first air guide holes; The two arc guide plates are fixedly installed on the outer circumference of the air storage cylinder in sequence from top to bottom. The interior of the plug hole is connected to the guide cylinder through a first connecting hole, and a second connecting hole connected to the first connecting hole is opened on the outer circumference of the air storage cylinder.

[0010] The present invention is further configured as follows: the rotating docking piece includes a flange docking tube, a sleeve is sleeved and slidably installed on the outer circumference of the flange docking tube, an isolation plate is fixedly installed inside the flange docking tube, a sealing cylinder is fixedly connected to one side of the isolation plate through a second spring, and the sealing cylinder is slidably installed inside the sleeve, a plurality of first air guide grooves and second air guide grooves are evenly spaced on both sides of the inner surface of the sleeve, and an air guide channel connected to the first air guide groove and the second air guide groove is opened inside the shell of the sleeve, a plurality of second air guide holes are opened on the outer circumference of the flange docking tube, and the plurality of second air guide holes are all arranged on the other side of the isolation plate, a third spring is also sleeved on the outer circumference of the flange docking tube, and two ends of the third spring are respectively fixedly connected to the sleeve and the opposite side of the flange portion of the flange docking tube; The second air guide hole is communicated and matched with the second air guide groove, the first air guide hole is communicated and matched with the first air guide groove, and the diameter of the blocking cylinder is set equal to the diameter of the guide cylinder, the inner diameter and outer diameter of the sleeve are respectively set equal to the inner diameter and outer diameter of the blocking ring, and the sleeve is used in conjunction with the outer arc surface of the arc guide plate; A ventilation groove is provided on the outer periphery of the sleeve, a linkage plate is fixedly connected to the outer periphery of the blocking cylinder, and the linkage plate is in sliding contact with the inner surface of the ventilation groove.

[0011] The present invention is further configured as follows: the gas phase output member and the gas phase introduction member both include a slide plate, a fixing plate and a disengagement guide rail; the top of the slide plate is fixedly connected to the bottom of the outer periphery of the flange portion of the flange butt joint pipe through a support plate; the top of the assembly plate is provided with an arc groove concentric with the bearing plate; the bottom of the slide plate is fixedly connected to a slide rod; the bottom end of the slide rod passes through the arc groove and is fixedly connected to a limit plate; the top of the limit plate is in sliding contact with the bottom of the assembly plate; the bottom of the slide plate is in sliding contact with the top of the assembly plate; A circular ring is fixedly connected to the top of the carrying plate, and one side of the sliding plate is in sliding contact with the outer circumference of the circular ring; A backing plate is slidably mounted on the top of the slide plate, and a reinforcing plate is fixedly connected to the top of the backing plate, the top of the reinforcing plate is fixedly connected to the bottom of the outer periphery of the sleeve, the fixing plate is fixedly connected to the top of the assembly plate, and a fourth spring is fixedly connected between the fixing plate and the reinforcing plate; The disengagement guide rail is fixedly connected to the top of the assembly plate through a connecting block, the bottom of the disengagement guide rail is in sliding contact with the top of the slide plate, and the outer arc surface of the disengagement guide rail is in sliding contact with a side of the pad close to the circular ring.

[0012] The present invention is further configured as follows: the input end of the gas delivery pump is connected to the flange butt joint in the rotating butt joint on the gas phase output part through a first hose; There are two rotating docking parts on the gas phase introduction part, the two sleeves in the two rotating docking parts are fixedly connected by a first vertical plate, the flange parts of the two flange docking tubes in the two rotating docking parts are fixedly connected by a second vertical plate, and the two flange docking tubes on the gas phase introduction part are both connected to the second hose through flange fixation, and control valves are provided on the two second hoses.

[0013] The present invention is further configured as follows: a U-shaped plug rod is penetrated and slidably installed on one side of the support plate, the U-shaped plug rod is composed of a long rod portion, a transition portion and a short rod portion, and the long rod portion and the short rod portion are respectively arranged on both sides of the transition portion, an arc-shaped extrusion block is also fixedly installed on the outer periphery of the gas storage cylinder, the long rod portion of the U-shaped plug rod penetrates the reinforcement plate and is used in conjunction with the arc-shaped extrusion block, the long rod portion of the U-shaped plug rod is sleeved with a fifth spring, and the two ends of the fifth spring are respectively fixedly connected to one side of the support plate and one side of the U-shaped plug rod transition portion, a pin plate with a hole is also fixedly installed on the top of the assembly plate, and the pin plate with a hole is used in conjunction with the short rod portion of the U-shaped plug rod; A circular arc guide plate which is concentric with the bearing plate is also fixed on the top of the assembly plate, and the outer arc surface of the circular arc guide plate is used in cooperation with one side of the U-shaped plug-in rod adapter.

[0014] The present invention also discloses a composite plasma method for preparing nano silicon nitride, which specifically comprises the following steps: Step 1, connect the external silane delivery device with the second hose set at the top, connect the external ammonia delivery device with the second hose set at the bottom, open the control valve, and deliver silane and ammonia to the flange docking pipe through the second hose, and then pass through the second air guide hole, the second air guide groove, the air guide channel, the first air guide groove and the first air guide hole in turn into the guide cylinder, and then pass through the first connecting hole and the second connecting hole in turn into the air storage cylinder. After the corresponding silane and ammonia are introduced according to the preset ratio, close the control valve on the corresponding second hose; Step 2: Start the stepper motor, and rotate the output shaft of the stepper motor 90 degrees as one stroke. During one stroke, the stepper motor drives the rotating shaft to rotate the carrier plate, the carrier plate drives the air storage cylinder to rotate, and the air storage cylinder drives the arc guide plate to move. The movement process of a single stroke includes separation section - reset section - docking section. Circular movement is achieved in several strokes, and the cyclic movement process includes separation section - reset section - docking section - separation section. In the separation section, the arc-shaped guide plate drives the sleeve to move the flange docking tube, that is, the flange docking tube drives the support plate to move the slide plate around the circular ring. During the process, the slide plate drives the pad to stretch the fourth spring of the reinforcement plate. At this time, the pad moves along the outer arc surface of the disengagement guide rail, and the pad pulls the sleeve through the reinforcement plate to gradually disengage from the plug-in hole. The sleeve squeezes the third spring, and the sleeve gradually disengages from the blocking ring. The first spring gradually resets and pushes the blocking ring to move along the guide cylinder. After the sleeve disengages from the blocking ring, the blocking ring completes the encirclement of the first air guide hole. At this time, the sleeve squeezes the linkage plate to make the blocking cylinder squeeze the second spring, and the blocking cylinder blocks the first air guide groove. In the reset section, after the sleeve is separated from the plug hole, the fourth spring is reset, and the reinforcing plate is pulled so that the pad drives the slide plate to reset. During the process, the third spring pushes the sleeve to reset, and the second spring pushes the blocking cylinder to reset, thereby blocking the first air guide groove; In the docking section, as the carrier plate continues to rotate, the gas storage cylinder adjacent to the gas phase output member approaches the rotating docking member on the gas phase output member, and the gas storage cylinder drives the arc guide plate to squeeze the sleeve on the rotating docking member, and the sleeve squeezes the third spring. When the sleeve moves to the plug hole, the third spring pushes the sleeve to insert into the plug hole, and the second spring pushes the blocking cylinder to fit with the end surface of the guide cylinder. Since the elastic force of the third spring is greater than the elastic force of the first spring, the sleeve squeezes the blocking ring to squeeze the first spring, so that the first gas guide groove is connected to the first gas guide hole. At this time, the second gas guide groove is connected to the second gas guide hole. The stepper motor completes a stroke and starts the gas delivery pump. The silane and ammonia mixed gas in the gas storage cylinder passes through the second connecting hole, the first connecting hole, the first gas guide hole, the first gas guide groove, the gas guide channel, the second gas guide groove, the second gas guide hole and the flange docking tube in turn into the first hose, and then is transported to the composite plasma reaction tank by the gas delivery pump to be catalyzed by the electric arc to generate nano silicon nitride and hydrogen; Step 3: In step 2, when the carrier plate drives the gas cylinder to rotate, the gas cylinder drives the small gear to move along the surface of the positioning large gear, the small gear drives the stirring shaft to rotate, and the stirring shaft drives the curved stirring plate frame to stir the silane and ammonia in the gas cylinder to achieve premixing.

[0015] The present invention is further configured as follows: in the docking section of step 2, the gas cylinder drives the arc-shaped extrusion block to move, the arc-shaped extrusion block squeezes the U-shaped insertion rod to move outward, the U-shaped insertion rod stretches the fifth spring, and when the sleeve is inserted into the insertion hole, the short rod portion of the U-shaped insertion rod is separated from the pin plate with a hole; In the separation section of step 2, the support plate drives the U-shaped rod to move together, so that one side of the transition portion of the U-shaped rod slides on the outer arc surface of the circular arc guide plate; In the reset section of step 2, the slide plate drives the support plate to reset the U-shaped rod. After the U-shaped rod adapter is separated from the arc guide plate, the fifth spring is reset, pulling the U-shaped rod to reset, so that the short rod portion of the U-shaped rod is inserted into the pin plate with holes.

[0016] The present invention provides a composite plasma method nano silicon nitride preparation device and process thereof, which has the following beneficial effects: (1) The present invention realizes the cyclic alternating operation of four gas mixing conveying parts by cooperating with the assembly plate, the support frame and the rotating conveying assembly, and realizes the premixing of silane and ammonia during the alternating process. By cooperating with the setting of the rotating docking part and the guide docking part, convenient connection and separation with the gas phase output part and the gas phase introduction part are realized during the rotation process, ensuring that the gas delivery pump can stably introduce the premixed set ratio of gas phase raw materials into the composite plasma reaction tank, ensuring the mixing uniformity of the gas phase raw materials, providing support for improving the production quality of finished nano silicon nitride, and at the same time, the waste of gas phase raw materials is effectively avoided by intermittently conveying the uniformly mixed gas phase raw materials.

[0017] (2) The present invention achieves stirring of the internal gas phase raw materials and efficient premixing of the gas phase raw materials by coordinating the arrangement of a support frame, four gas storage cylinders, a positioning gear, a small gear, a stepping motor, a rotating shaft, a carrying plate, a stirring shaft and a curved stirring plate frame. When the four gas storage cylinders alternately supply gas to the gas delivery pump, the gas phase raw materials are stirred.

[0018] (3) The present invention can realize convenient connection and separation with the gas phase inlet component and the gas phase output component by setting the rotating docking component and the guiding docking component during the process of the carrier plate driving the four gas storage cylinders to move, and through the cooperation of the second connecting hole, the first connecting hole, the first gas guide hole, the first gas guide groove, the gas guide channel, the second gas guide groove, the second gas guide hole and the flange docking tube, when the gas phase raw materials are input into the gas phase output component, the uniformity of mixing between the gas phase raw materials is further improved, thereby providing effective support for the efficient production of nano silicon nitride.

[0019] (4) The present invention can ensure that when the arc guide plate squeezes the sleeve, the sleeve can stably squeeze the third spring through the coordinated arrangement of the U-shaped plug rod, the arc extrusion block, the fifth spring, the pin plate with holes and the arc guide plate, so as to facilitate the docking and connection between the rotating docking part and the guide docking part, and when the arc guide plate drives the sleeve to move, the sleeve can be stably moved. In combination with the arrangement of the fixed plate, the slide plate, the pad, the reinforcement plate, the fourth spring and the disengagement guide rail, a reliable guarantee is provided for the automatic reset of the rotating docking part after the separation from the guide docking part, and support is provided for once again realizing the docking and connection between the rotating docking part and the guide docking part, so as to achieve the effect of cyclic docking and separation. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the external structure of the present invention; Figure 2 It is a schematic structural diagram of the gas phase premixing assembly of the present invention; Figure 3It is a structural schematic diagram of the support frame, the rotating conveying assembly and the gas-mixing conveying member of the present invention; Figure 4 It is a schematic diagram of the structure of the gas-mixing conveying device of the present invention; Figure 5 A bottom view of the assembly plate structure of the present invention; Figure 6 It is a structural schematic diagram of the assembly plate of the present invention; Figure 7 is a transverse cross-sectional view of the present invention; Figure 8 It is a schematic diagram of the connection between the rotating docking piece and the guide docking piece structure of the present invention; Fig. 9 It is a longitudinal cross-sectional view of the present invention; Fig.10 It is a schematic diagram of the connection between the gas phase output component and the gas mixing transmission component structure of the present invention; Fig.11 It is a schematic diagram of the connection structure of the gas-mixing conveying member, the gas phase introducing member, the rotating docking member and the guiding docking member of the present invention; Fig.12 It is a schematic diagram of the connection of the casing, the plugging cylinder, the venting groove, the linkage plate, the support plate, the pad, the reinforcement plate, the U-shaped plug rod, the fifth spring and the pin plate with holes structure of the present invention; Fig.13 It is a schematic diagram of the connection of the isolation plate, the second spring, the blocking cylinder and the linkage plate structure of the present invention; Fig.14 It is a schematic structural diagram of the U-shaped plug rod, the fifth spring and the arc guide plate of the present invention; Fig.15 It is a schematic diagram of the internal structure of the sleeve of the present invention.

[0021] In the figure, 1, composite plasma reaction tank; 2, gas delivery pump; 3, first hose; 4, gas phase premixing assembly; 5, assembly plate; 6, support frame; 7, rotating delivery assembly; 8, gas mixing delivery member; 9, gas phase introduction member; 10, gas phase output member; 11, rotating docking member; 12, guide docking member; 13, positioning gear; 14, stepping motor; 15, rotating shaft; 16, bearing plate; 17, U-shaped reinforcement frame; 18, gas storage cylinder; 19, stirring shaft; 20, small gear; 21, curved stirring plate frame; 22, arc guide plate; 23, plug hole; 24, guide cylinder; 25, blocking ring; 26, first spring; 27, first air guide hole; 28, first connecting hole; 29, second connecting hole; 30, Flange connecting pipe; 31, sleeve; 32, isolation plate; 33, second spring; 34, blocking cylinder; 35, first air guide groove; 36, second air guide groove; 37, air guide channel; 38, second air guide hole; 39, third spring; 40, air permeable groove; 41, linkage plate; 42, slide plate; 43, fixed plate; 44, detachment from guide rail; 45, support plate; 46, arc groove; 47, slide bar; 48, limit plate; 49, ring; 50, pad; 51, reinforcement plate; 52, fourth spring; 53, first vertical plate; 54, second vertical plate; 55, second hose; 56, control valve; 57, U-shaped plug rod; 58, arc extrusion block; 59, fifth spring; 60, pin plate with holes; 61, arc guide plate. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0023] See also Figure 1-15 , the embodiment of the present invention provides the following two technical solutions: Example

[0024] A composite plasma method nano silicon nitride preparation device includes a composite plasma reaction tank 1 and a gas delivery pump 2 connected thereto, the gas delivery pump 2 is electrically connected to an external power supply and is controlled by a control switch, the composite plasma reaction tank 1 is a tank structure with a cathode arranged in an inner layer and an anode arranged in an outer layer, and an air passage chamber is left between the cathode and the anode as a reaction chamber, which is a prior art and will not be described in detail below.

[0025] As a preferred solution, in order to improve the production quality of nano silicon nitride and reduce the waste of production raw materials, the input end of the gas delivery pump 2 is connected to a gas premixing component 4 through a first hose 3, and the gas premixing component 4 includes an assembly plate 5, on which a rotating conveying component 7 is fixedly provided through a support frame 6, and four gas mixing conveying parts 8 are evenly spaced on the rotating conveying component 7, and a gas phase inlet part 9 and a gas phase output part 10 are also provided on the assembly plate 5, and a rotating docking part 11 is provided at the output end of the gas phase inlet part 9 and the input end of the gas phase output part 10, and a guide docking part 12 compatible with the rotating docking part 11 is provided on the gas mixing conveying part 8.

[0026] As a preferred solution, the rotating conveying assembly 7 includes a positioning large gear 13, which is fixedly mounted on the top of the inner cavity of the support frame 6, and a stepper motor 14 is fixedly connected to the bottom of the positioning large gear 13. The stepper motor 14 is electrically connected to an external power supply and is controlled by a control switch. The stepper motor 14 is fixedly mounted on the support frame 6, wherein the support frame 6 includes two vertical poles and a bending plate, and the two vertical poles are respectively fixedly mounted on both sides of the bottom of the bending plate, and the bottom ends of the two vertical poles are fixedly mounted on the top of the assembly plate 5. At this time, the stepper motor 14 is fixedly mounted on the bottom of the bending plate, and the output end of the stepper motor 14 is fixedly connected to a rotating shaft 15 through a coupling, and the bottom end of the rotating shaft 15 is fixedly connected to a carrying plate 16. Further explanation: in order to ensure the stability of the carrying plate 16, a U-shaped reinforcement frame 17 is fixedly connected to the bottom of the assembly plate 5, and the bottom of the carrying plate 16 is in sliding contact with the top of the U-shaped reinforcement frame 17.

[0027] As a preferred embodiment, the gas-mixing conveying element 8 includes an air cylinder 18, which is fixedly mounted on the top of the supporting plate 16, and four air cylinders 18 are evenly spaced and distributed on the top of the supporting plate 16. A stirring shaft 19 is penetrated and rotatably mounted on the top of the air cylinder 18. It is further explained that a sealing sleeve is sleeved on the stirring shaft 19 to improve the air tightness of the connection between the stirring shaft 19 and the air cylinder 18. A pinion 20 is fixedly connected to the top of the stirring shaft 19, and the outer surface of the pinion 20 is meshed with the outer surface of the positioning gear 13. The stirring shaft 19 is located inside the air cylinder 18. The outer periphery is sleeved and fixedly connected with a curved stirring plate frame 21, and the guide docking member 12 is arranged on the outer periphery of the air cylinder 18 to facilitate the entry and exit of the gas phase.

[0028] As a preferred solution, the guide docking member 12 includes two arc-shaped guide plates 22, which are fixedly mounted on the outer periphery of the gas storage cylinder 18 in sequence from top to bottom. The outer arc surface of the arc-shaped guide plate 22 is provided with a plug hole 23, and the inside of the plug hole 23 is fixedly connected with a guide cylinder 24. The side of the guide cylinder 24 away from the plug hole 23 is sealed, that is, a single opening design is adopted to facilitate communication with the first connecting hole 28 described below. A blocking ring 25 is slidably mounted between the outer periphery of the guide cylinder 24 and the inner surface of the plug hole 23. The guide cylinder 24 is A first spring 26 is also sleeved on the outer periphery, and both ends of the first spring 26 are fixedly connected to the opposite side of the plug-in hole 23 and the sealing ring 25, respectively, and a plurality of first air guide holes 27 are evenly spaced on the outer periphery of the guide cylinder 24. When the first spring 26 is not subjected to the extrusion force, the sealing ring 25 is pushed to seal the plurality of first air guide holes 27. The interior of the plug-in hole 23 is connected to the guide cylinder 24 by opening a first connecting hole 28, and a second connecting hole 29 connected to the first connecting hole 28 is opened on the outer periphery of the air storage cylinder 18.

[0029] As a preferred embodiment, the rotating docking member 11 includes a flange docking tube 30, the input end of the gas delivery pump 2 is connected to the flange docking tube 30 in the rotating docking member 11 on the gas phase output member 10 through the first hose 3, the outer periphery of the flange docking tube 30 is sleeved and slidably installed with a sleeve 31, the interior of the flange docking tube 30 is fixedly installed with an isolation plate 32, one side of the isolation plate 32 is fixedly connected with a blocking cylinder 34 through a second spring 33, and the blocking cylinder 34 is slidably installed in the interior of the sleeve 31, and a plurality of first gas guide grooves 35 and second gas guide grooves 36 are evenly spaced on both sides of the inner surface of the sleeve 31, and a gas guide channel 37 connected to the first gas guide groove 35 and the second gas guide groove 36 is opened inside the shell of the sleeve 31, a plurality of second gas guide holes 38 are opened on the outer periphery of the flange docking tube 30, and the plurality of second gas guide holes 38 are all arranged on the other side of the isolation plate 32, and the outer periphery of the flange docking tube 30 is also A third spring 39 is sleeved, and the two ends of the third spring 39 are fixedly connected to the sleeve 31 and the flange portion of the flange docking tube 30 on the opposite side. The elastic force of the third spring 39 is 3-6 times the elastic force of the first spring 26 to ensure the effective communication between the first air guide hole 27 and the first air guide groove 35, the second air guide hole 38 is communicated and coordinated with the second air guide groove 36, the first air guide hole 27 is communicated and coordinated with the first air guide groove 35, and the diameter of the blocking cylinder 34 is set equal to the diameter of the guide cylinder 24, the inner diameter and outer diameter of the sleeve 31 are respectively set equal to the inner diameter and outer diameter of the blocking ring 25, and the sleeve 31 is used in conjunction with the outer arc surface of the arc guide plate 22, and the outer periphery of the sleeve 31 is provided with a breathable groove 40, and the outer periphery of the blocking cylinder 34 is fixedly connected with a linkage plate 41, and the linkage plate 41 is in sliding contact with the inner surface of the breathable groove 40. The setting of the breathable groove 40 can ensure the effective sliding of the blocking cylinder 34 inside the sleeve 31.

[0030] As a preferred embodiment, the gas phase output component 10 and the gas phase inlet component 9 both include a slide plate 42, a fixed plate 43 and a disengagement guide rail 44. The top of the slide plate 42 is fixedly connected to the bottom of the outer periphery of the flange portion of the flange docking tube 30 through a support plate 45. The disengagement guide rail 44 is fixedly connected to the top of the assembly plate 5 through a connecting block. The bottom of the disengagement guide rail 44 is in sliding contact with the top of the slide plate 42. The top of the assembly plate 5 is provided with an arc groove 46 concentric with the supporting plate 16. The bottom of the slide plate 42 is fixedly connected with a slide rod 47. The bottom end of the slide rod 47 passes through the arc groove 46 and is fixedly connected with a limiting plate 48. The top of the limiting plate 48 is in sliding contact with the bottom of the assembly plate 5. The bottom of the slide plate 42 is in sliding contact with the top of the assembly plate 5. The top of the supporting plate 16 is fixedly connected with a ring 49. One side of the slide plate 42 is in sliding contact with the outer periphery of the ring 49 to ensure the stability of the movement of the slide plate 42.

[0031] Further explanation, in order to ensure convenient separation between the sleeve 31 and the plug-in hole 23, and to ensure automatic resetting of the slide plate 42 after separation, a pad 50 is slidably installed on the top of the slide plate 42. Specifically, a step block is fixedly installed on the bottom of the pad 50, and a step groove matching the step block is opened on the top of the slide plate 42 to realize the sliding of the pad 50, and a reinforcement plate 51 is fixedly connected to the top of the pad 50, and the outer arc surface of the detachable guide rail 44 is in sliding contact with the side of the pad 50 close to the ring 49, the top of the reinforcement plate 51 is fixedly connected to the bottom of the outer periphery of the sleeve 31, the fixed plate 43 is fixedly connected to the top of the assembly plate 5, and a fourth spring 52 is fixedly connected between the fixed plate 43 and the reinforcement plate 51.

[0032] As a preferred solution, in order to achieve efficient introduction of different gaseous raw materials, two rotating docking parts 11 are provided on the gas phase introduction part 9, and the two sleeves 31 in the two rotating docking parts 11 are fixedly connected by a first vertical plate 53, and the flange parts of the two flange-jointed tubes 30 in the two rotating docking parts 11 are fixedly connected by a second vertical plate 54, and the two flange-jointed tubes 30 on the gas phase introduction part 9 are both connected to the second hose 55 through flange fixing, and the two second hoses 55 are both provided with a control valve 56, and the two second hoses 55 are respectively connected to the external silane delivery device and the ammonia delivery device.

[0033] In this embodiment, while premixing the gaseous raw materials, intermittent feeding to the composite plasma reaction tank 1 is achieved, thereby avoiding waste of the gaseous raw materials and ensuring the production quality of nano silicon nitride. Example

[0034] This embodiment is an improvement of the previous embodiment. A composite plasma method nano silicon nitride preparation device also includes a U-shaped rod 57 that penetrates and slides on one side of the support plate 45. The U-shaped rod 57 is composed of a long rod portion, a transition portion and a short rod portion, and the long rod portion and the short rod portion are respectively arranged on both sides of the transition portion. An arc-shaped extrusion block 58 is also fixedly installed on the periphery of the gas storage cylinder 18. The long rod portion of the U-shaped rod 57 penetrates the reinforcing plate 51 and is used in conjunction with the arc-shaped extrusion block 58. The long rod portion of the U-shaped insertion rod 57 is sleeved with a fifth spring 59, and the two ends of the fifth spring 59 are respectively fixedly connected to one side of the support plate 45 and one side of the U-shaped insertion rod 57 adapter portion. A pin plate 60 with a hole is also fixedly installed on the top of the assembly plate 5, and the pin plate 60 with a hole is used in conjunction with the short rod portion of the U-shaped insertion rod 57. An arc guide plate 61 concentric with the supporting plate 16 is also fixed on the top of the assembly plate 5, and the outer arc surface of the arc guide plate 61 is used in conjunction with one side of the U-shaped insertion rod 57 adapter portion.

[0035] The advantage of the second embodiment over the first embodiment is that when the arc guide plate 22 squeezes the sleeve 31, the sleeve 31 can stably squeeze the third spring 39, so as to achieve the docking connection between the rotating docking member 11 and the guide docking member 12, and when the arc guide plate 22 drives the sleeve 31 to move, the sleeve 31 can be stably moved, providing reliable guarantee for the long-term and effective use of the device.

[0036] A composite plasma method for preparing nano silicon nitride, specifically comprising the following steps: Step 1: connect the external silane delivery device with the second hose 55 set at the top, connect the external ammonia delivery device with the second hose 55 set at the bottom, open the control valve 56, and deliver silane and ammonia to the flange docking pipe 30 through the second hose 55, and then pass through the second air guide hole 38, the second air guide groove 36, the air guide channel 37, the first air guide groove 35 and the first air guide hole 27 to enter the guide cylinder 24, and then pass through the first connecting hole 28 and the second connecting hole 29 to enter the gas storage cylinder 18. After the corresponding silane and ammonia are introduced according to the preset ratio, close the control valve 56 on the corresponding second hose 55; Step 2: Start the stepper motor 14, and rotate the output shaft of the stepper motor 14 by 90 degrees as one stroke. During one stroke, the stepper motor 14 drives the rotating shaft 15 to rotate the carrier plate 16, and the carrier plate 16 drives the air storage cylinder 18 to rotate, and the air storage cylinder 18 drives the arc guide plate 22 to move. The movement process of a single stroke includes a separation section-reset section-docking section, and a cyclic movement is realized in several strokes, and the cyclic movement process includes a separation section-reset section-docking section-separation section; In the separation section, the arc guide plate 22 drives the sleeve 31 to move the flange docking tube 30, that is, the flange docking tube 30 drives the support plate 45 to move the slide plate 42 around the ring 49. During the process, the slide plate 42 drives the pad 50 to make the reinforcing plate 51 stretch the fourth spring 52. At this time, the pad 50 moves along the outer arc surface of the disengagement guide rail 44, and the pad 50 pulls the sleeve 31 to gradually disengage from the plug-in hole 23 through the reinforcing plate 51. The sleeve 31 squeezes the third spring 39, and the sleeve 31 gradually disengages from the blocking ring 25. The first spring 26 gradually resets and pushes the blocking ring 25 to move along the guide cylinder 24. After the sleeve 31 is separated from the blocking ring 25, the blocking ring 25 completes the encirclement of the first air guide hole 27. At this time, the sleeve 31 squeezes the linkage plate 41 to make the blocking cylinder 34 squeeze the second spring 33, and the blocking cylinder 34 blocks the first air guide groove 35. In the reset section, after the sleeve 31 is separated from the plug hole 23, the fourth spring 52 is reset, and the reinforcing plate 51 is pulled so that the pad 50 drives the slide plate 42 to reset. During this process, the third spring 39 pushes the sleeve 31 to reset, and the second spring 33 pushes the blocking cylinder 34 to reset, thereby blocking the first air guide groove 35. In the docking section, as the carrier plate 16 continues to rotate, the gas storage cylinder 18 adjacent to the gas phase output member 10 approaches the rotating docking member 11 on the gas phase output member 10, and the gas storage cylinder 18 drives the arc guide plate 22 to squeeze the sleeve 31 on the rotating docking member 11, and the sleeve 31 squeezes the third spring 39. When the sleeve 31 moves to the plug hole 23, the third spring 39 pushes the sleeve 31 to insert into the plug hole 23, and the second spring 33 pushes the blocking cylinder 34 to fit with the end surface of the guide cylinder 24. Since the elastic force of the third spring 39 is greater than the elastic force of the first spring 26, the sleeve 31 squeezes the blocking ring 25 to the first The spring 26 is squeezed to make the first air guide groove 35 communicate with the first air guide hole 27, and the second air guide groove 36 communicates with the second air guide hole 38. The stepper motor 14 completes one stroke and starts the gas delivery pump 2. The silane and ammonia mixed gas in the gas storage cylinder 18 passes through the second connecting hole 29, the first connecting hole 28, the first air guide hole 27, the first air guide groove 35, the air guide channel 37, the second air guide groove 36, the second air guide hole 38 and the flange butt pipe 30 in sequence and enters the first hose 3, and then is transported to the composite plasma reaction tank 1 by the gas delivery pump 2 and catalyzed by the electric arc to generate nano silicon nitride and hydrogen. Step 3. In the process of the carrier plate 16 driving the gas cylinder 18 to rotate in step 2, the gas cylinder 18 drives the small gear 20 to move along the surface of the positioning large gear 13, the small gear 20 drives the stirring shaft 19 to rotate, and the stirring shaft 19 drives the curved stirring plate frame 21 to stir the silane and ammonia in the gas cylinder 18 to achieve premixing.

[0037] In the docking section of step 2, the air storage cylinder 18 drives the arc-shaped extrusion block 58 to move, and the arc-shaped extrusion block 58 squeezes the U-shaped insertion rod 57 to move outward, and the U-shaped insertion rod 57 stretches the fifth spring 59. When the sleeve 31 is inserted into the insertion hole 23, the short rod portion of the U-shaped insertion rod 57 is separated from the pin plate 60 with a hole; In the separation section of step 2, the support plate 45 drives the U-shaped rod 57 to move together, so that one side of the transition portion of the U-shaped rod 57 slides on the outer arc surface of the arc guide plate 61; In the reset section of step two, the slide plate 42 drives the support plate 45 to reset the U-shaped rod 57. After the adapter portion of the U-shaped rod 57 is separated from the arc guide plate 61, the fifth spring 59 is reset, pulling the U-shaped rod 57 to reset, so that the short rod portion of the U-shaped rod 57 is inserted into the pin plate 60 with holes.

Claims

1. A composite plasma method nano silicon nitride preparation device, comprising a composite plasma reaction tank (1) and a gas delivery pump (2) connected thereto, characterized in that: The input end of the gas delivery pump (2) is connected to a gas phase premixing assembly (4) via a first hose (3). The gas phase premixing assembly (4) comprises an assembly plate (5). A rotating delivery assembly (7) is fixedly mounted on the assembly plate (5) via a support frame (6). Four gas mixing delivery members (8) are evenly spaced on the rotating delivery member (7). A gas phase introduction member (9) and a gas phase output member (10) are also arranged on the assembly plate (5). The output end of the gas phase introduction member (9) and the input end of the gas phase output member (10) are both provided with a rotating docking member (11). The gas mixing delivery member (8) is provided with a guide docking member (12) that matches the rotating docking member (11).

2. The composite plasma method nano-silicon nitride preparation device according to claim 1, characterized in that: The rotating conveying assembly (7) comprises a positioning gearwheel (13), the bottom of which is fixedly connected to a stepping motor (14), the output end of which is fixedly connected to a rotating shaft (15) via a coupling, and the bottom end of which is fixedly connected to a carrying plate (16); The positioning gear (13) is fixedly mounted on the top of the inner cavity of the support frame (6), the bottom of the assembly plate (5) is fixedly connected to a U-shaped reinforcement frame (17), and the bottom of the carrier plate (16) is in sliding contact with the top of the U-shaped reinforcement frame (17).

3. The composite plasma method nano-silicon nitride preparation device according to claim 2, characterized in that: The gas mixing conveying member (8) comprises an air storage cylinder (18), a stirring shaft (19) passing through the top of the air storage cylinder (18) and rotatably mounted thereon, a pinion gear (20) being fixedly connected to the top of the stirring shaft (19), and a curved stirring plate frame (21) being sleeved and fixedly connected to the outer periphery of the stirring shaft (19) located inside the air storage cylinder (18); The air storage cylinder (18) is fixedly mounted on the top of the carrier plate (16), and four air storage cylinders (18) are evenly distributed on the top of the carrier plate (16), and the outer surface of the small gear (20) is meshed with the outer surface of the positioning large gear (13); The guide docking piece (12) is arranged on the outer periphery of the air storage cylinder (18).

4. The composite plasma method nano-silicon nitride preparation device according to claim 1, characterized in that: The guide docking member (12) comprises two arc-shaped guide plates (22), the outer arc surface of the arc-shaped guide plate (22) is provided with a plug hole (23), the inside of the plug hole (23) is fixedly connected with a guide cylinder (24), a sealing ring (25) is slidably mounted between the outer periphery of the guide cylinder (24) and the inner surface of the plug hole (23), the outer periphery of the guide cylinder (24) is also sleeved with a first spring (26), the two ends of the first spring (26) are respectively fixedly connected to the plug hole (23) and the side opposite to the sealing ring (25), and the outer periphery of the guide cylinder (24) is provided with a plurality of first air guide holes (27) at even intervals, and when the first spring (26) is not subjected to a squeezing force, the sealing ring (25) is pushed to seal the plurality of first air guide holes (27); The two arc-shaped guide plates (22) are fixedly mounted on the outer circumference of the gas storage cylinder (18) in sequence from top to bottom, the interior of the plug hole (23) is connected to the guide cylinder (24) via a first connecting hole (28), and a second connecting hole (29) connected to the first connecting hole (28) is provided on the outer circumference of the gas storage cylinder (18).

5. The composite plasma method nano-silicon nitride preparation device according to claim 4, characterized in that: The rotary docking member (11) comprises a flange docking tube (30), a sleeve (31) is sleeved and slidably mounted on the outer circumference of the flange docking tube (30), an isolation plate (32) is fixedly mounted inside the flange docking tube (30), a blocking cylinder (34) is fixedly connected to one side of the isolation plate (32) via a second spring (33), and the blocking cylinder (34) is slidably mounted inside the sleeve (31), and a plurality of first air guide grooves (35) and second air guide grooves are evenly spaced on both sides of the inner surface of the sleeve (31). (36), and an air guide channel (37) communicating with the first air guide groove (35) and the second air guide groove (36) is provided inside the shell of the sleeve (31), a plurality of second air guide holes (38) are provided on the outer periphery of the flange butt joint pipe (30), and the plurality of second air guide holes (38) are all arranged on the other side of the isolation plate (32), and a third spring (39) is also sleeved on the outer periphery of the flange butt joint pipe (30), and two ends of the third spring (39) are respectively fixedly connected to the sleeve (31) and the flange portion of the flange butt joint pipe (30) on opposite sides; The second air guide hole (38) is communicated and matched with the second air guide groove (36), the first air guide hole (27) is communicated and matched with the first air guide groove (35), the diameter of the blocking cylinder (34) is set equal to the diameter of the guide cylinder (24), the inner diameter and outer diameter of the sleeve (31) are respectively set equal to the inner diameter and outer diameter of the blocking ring (25), and the sleeve (31) is used in conjunction with the outer arc surface of the arc guide plate (22); The outer circumference of the sleeve (31) is provided with a venting groove (40), the outer circumference of the blocking cylinder (34) is fixedly connected with a linkage plate (41), and the linkage plate (41) is in sliding contact with the inner surface of the venting groove (40).

6. The composite plasma method nano-silicon nitride preparation device according to claim 5, characterized in that: The gas phase output component (10) and the gas phase inlet component (9) both comprise a slide plate (42), a fixing plate (43) and a disengagement guide rail (44); the top of the slide plate (42) is fixedly connected to the bottom of the outer periphery of the flange portion of the flange butt pipe (30) via a support plate (45); the top of the assembly plate (5) is provided with an arc groove (46) concentric with the carrier plate (16); the bottom of the slide plate (42) is fixedly connected to a slide rod (47); the bottom end of the slide rod (47) passes through the arc groove (46) and is fixedly connected to a limit plate (48); the top of the limit plate (48) is in sliding contact with the bottom of the assembly plate (5); and the bottom of the slide plate (42) is in sliding contact with the top of the assembly plate (5); A circular ring (49) is fixedly connected to the top of the carrier plate (16), and one side of the slide plate (42) is in sliding contact with the outer circumference of the circular ring (49); A backing plate (50) is slidably mounted on the top of the slide plate (42), and a reinforcing plate (51) is fixedly connected to the top of the backing plate (50), the top of the reinforcing plate (51) is fixedly connected to the bottom of the outer periphery of the sleeve (31), the fixing plate (43) is fixedly connected to the top of the assembly plate (5), and a fourth spring (52) is fixedly connected between the fixing plate (43) and the reinforcing plate (51); The disengagement guide rail (44) is fixedly connected to the top of the assembly plate (5) via a connecting block, the bottom of the disengagement guide rail (44) is in sliding contact with the top of the slide plate (42), and the outer arc surface of the disengagement guide rail (44) is in sliding contact with a side of the pad (50) close to the ring (49).

7. The composite plasma method nano-silicon nitride preparation device according to claim 6, characterized in that: The input end of the gas delivery pump (2) is connected to the flange butt joint (30) in the rotary butt joint (11) on the gas phase output component (10) through a first hose (3); Two rotating docking members (11) are provided on the gas phase introduction member (9), the two sleeves (31) in the two rotating docking members (11) are fixedly connected via a first vertical plate (53), the flange parts of the two flange docking pipes (30) in the two rotating docking members (11) are fixedly connected via a second vertical plate (54), and the two flange docking pipes (30) on the gas phase introduction member (9) are both connected to a second hose (55) via a flange, and the two second hoses (55) are both provided with a control valve (56).

8. The composite plasma method nano-silicon nitride preparation device according to claim 7, characterized in that: A U-shaped plug rod (57) is penetrated and slidably mounted on one side of the support plate (45); an arc-shaped extrusion block (58) is fixedly mounted on the outer periphery of the air storage cylinder (18); a long rod portion of the U-shaped plug rod (57) penetrates the reinforcing plate (51) and is used in conjunction with the arc-shaped extrusion block (58); a fifth spring (59) is sleeved on the long rod portion of the U-shaped plug rod (57); and two ends of the fifth spring (59) are respectively fixedly connected to one side of the support plate (45) and one side of the transition portion of the U-shaped plug rod (57); a pin plate (60) with a hole is fixedly mounted on the top of the assembly plate (5); the pin plate (60) with a hole is used in conjunction with the short rod portion of the U-shaped plug rod (57); A circular arc guide plate (61) concentric with the carrier plate (16) is also fixed on the top of the assembly plate (5), and the outer arc surface of the circular arc guide plate (61) cooperates with one side of the transition portion of the U-shaped insertion rod (57).

9. The composite plasma method nano-silicon nitride preparation device according to claim 8, characterized in that: The process specifically includes the following steps: Step 1: connect the external silane delivery device to the second hose (55) arranged at the top, connect the external ammonia delivery device to the second hose (55) arranged at the bottom, open the control valve (56), and deliver the silane and ammonia to the flange butt joint (30) through the second hose (55), and then pass through the second air guide hole (38), the second air guide groove (36), the air guide channel (37), the first air guide groove (35) and the first air guide hole (27) in sequence to enter the guide cylinder (24), and then pass through the first connecting hole (28) and the second connecting hole (29) in sequence to enter the gas storage cylinder (18). After the corresponding silane and ammonia are introduced according to the preset ratio, the control valve (56) on the corresponding second hose (55) is closed; Step 2: Start the stepper motor (14), rotate the output shaft of the stepper motor (14) by ninety degrees as one stroke, the stepper motor (14) drives the rotating shaft (15) to rotate the carrier plate (16) during one stroke, the carrier plate (16) drives the air storage cylinder (18) to rotate, the air storage cylinder (18) drives the arc guide plate (22) to move, the movement process of a single stroke includes a separation section - a reset section - a docking section, and a cyclic movement is achieved in a plurality of strokes, the cyclic movement process includes a separation section - a reset section - a docking section - a separation section; In the separation stage, the arc-shaped guide plate (22) drives the sleeve (31) to move the flange butt joint (30), that is, the flange butt joint (30) drives the support plate (45) to move the slide plate (42) around the ring (49). During the process, the slide plate (42) drives the pad (50) to stretch the reinforcing plate (51) to stretch the fourth spring (52). At this time, the pad (50) moves along the outer arc surface of the separation guide rail (44), and the pad (50) pulls the sleeve (31) through the reinforcing plate (51) to gradually separate from the plug hole (23). The sleeve (31) squeezes the third spring (39), the sleeve (31) gradually separates from the blocking ring (25), the first spring (26) gradually resets, and pushes the blocking ring (25) to move along the guide tube (24). After the sleeve (31) separates from the blocking ring (25), the blocking ring (25) completes the encirclement of the first air guide hole (27). At this time, the sleeve (31) squeezes the linkage plate (41) to make the blocking cylinder (34) squeeze the second spring (33), and the blocking cylinder (34) blocks the first air guide groove (35); In the reset section, after the sleeve (31) is separated from the plug hole (23), the fourth spring (52) is reset, and the reinforcing plate (51) is pulled so that the pad (50) drives the slide plate (42) to reset. During this process, the third spring (39) pushes the sleeve (31) to reset, and the second spring (33) pushes the blocking cylinder (34) to reset, thereby blocking the first air guide groove (35); In the docking section, as the carrier plate (16) continues to rotate, the gas storage cylinder (18) adjacent to the gas phase output member (10) approaches the rotating docking member (11) on the gas phase output member (10), and the gas storage cylinder (18) drives the arc-shaped guide plate (22) to squeeze the sleeve (31) on the rotating docking member (11), and the sleeve (31) squeezes the third spring (39). When the sleeve (31) moves to the insertion hole (23), the third spring (39) pushes the sleeve (31) to insert into the insertion hole (23), and the second spring (33) pushes the blocking cylinder (34) to fit the end surface of the guide cylinder (24). Since the elastic force of the third spring (39) is greater than the elastic force of the first spring (26), the sleeve (31) squeezes the blocking ring (25 ) compresses the first spring (26) so that the first gas guide groove (35) is connected to the first gas guide hole (27), and the second gas guide groove (36) is connected to the second gas guide hole (38). The stepper motor (14) completes one stroke, and the gas delivery pump (2) is started. The silane and ammonia mixed gas in the gas storage cylinder (18) passes through the second connecting hole (29), the first connecting hole (28), the first gas guide hole (27), the first gas guide groove (35), the gas guide channel (37), the second gas guide groove (36), the second gas guide hole (38) and the flange butt pipe (30) in sequence and enters the first hose (3), and is then transported to the composite plasma reaction tank (1) by the gas delivery pump (2) and catalyzed by the electric arc to generate nano silicon nitride and hydrogen; Step 3: In the process of the carrier plate (16) driving the gas cylinder (18) to rotate in step 2, the gas cylinder (18) drives the small gear (20) to move along the surface of the positioning gear (13), the small gear (20) drives the stirring shaft (19) to rotate, and the stirring shaft (19) drives the curved stirring plate frame (21) to stir the silane and ammonia in the gas cylinder (18) to achieve premixing.

10. The composite plasma method nano-silicon nitride preparation device according to claim 9, characterized in that: In the docking section of step 2, the air storage cylinder (18) drives the arc-shaped extrusion block (58) to move, and the arc-shaped extrusion block (58) squeezes the U-shaped insertion rod (57) to move outward, and the U-shaped insertion rod (57) stretches the fifth spring (59). When the sleeve (31) is inserted into the insertion hole (23), the short rod portion of the U-shaped insertion rod (57) is separated from the pin plate with holes (60); In the separation section of step 2, the support plate (45) drives the U-shaped plug rod (57) to move together, so that one side of the transition portion of the U-shaped plug rod (57) slides on the outer arc surface of the circular arc guide plate (61); In the reset section of step 2, the slide plate (42) drives the support plate (45) to reset the U-shaped plug rod (57). After the adapter portion of the U-shaped plug rod (57) is separated from the arc guide plate (61), the fifth spring (59) is reset, pulling the U-shaped plug rod (57) to reset, so that the short rod portion of the U-shaped plug rod (57) is inserted into the pin plate with a hole (60).

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