An electrostatic powder coaxial capacitor

Abstract

The technical field of atomic layer deposition of the present invention relates to an electrostatic powder coaxial capacitor, comprising: an outer cylinder for accommodating an inner cylinder; an inner cylinder for forming an electric field together with the outer cylinder; the inner cylinder is arranged in the outer cylinder; an insulating portion for insulating the outer cylinder and the inner cylinder; the insulating portion is connected to the outer cylinder and the inner cylinder respectively; wherein the outer cylinder is connected to the negative pole of a power source, and the inner cylinder is connected to the positive pole of the power source. The electrostatic powder coaxial capacitor provided by the present application improves the dispersion uniformity of the powder during the atomic layer deposition process, thereby improving the quality of the film; reduces the powder agglomeration phenomenon, and avoids equipment blockage and operation interruption caused by agglomeration; improves the working efficiency and stability of the powder ALD equipment through electrostatic assisted dispersion; the technology can be extended to other industrial fields that require powder dispersion, and has broad application prospects.

Description

Technical Field

[0001] The invention relates to the technical field of atomic layer deposition, and in particular to an electrostatic powder coaxial capacitor. Background Art

[0002] Atomic layer deposition (ALD) is a technique used to fabricate ultra-thin films by alternately introducing different chemical vapor precursors onto the substrate surface to achieve precisely controlled film growth.

[0003] In the powder atomic layer deposition process, uniform dispersion of powder is crucial to the quality and performance of the film. However, existing powder dispersion technologies often have problems of powder agglomeration and uneven dispersion, which limits the application of atomic layer deposition technology in powder materials. Summary of the invention

[0004] In view of this, the present invention provides an electrostatic powder coaxial capacitor.

[0005] Specifically, the present invention is achieved through the following technical solutions:

[0006] According to a first aspect of the present invention, there is provided an electrostatic powder coaxial capacitor, comprising:

[0007] An outer cylinder, used to accommodate the inner cylinder;

[0008] An inner cylinder, used to form an electric field together with the outer cylinder; the inner cylinder is arranged in the outer cylinder;

[0009] An insulating part, used for insulating the outer cylinder and the inner cylinder; the insulating part is connected to the outer cylinder and the inner cylinder respectively;

[0010] Wherein, the outer cylinder is connected to the negative pole of the power supply, and the inner cylinder is connected to the positive pole of the power supply.

[0011] Optionally, the outer cylinder includes: a base, the inner cylinder is arranged on the base, and the inner cylinder and the base are connected through the insulating part.

[0012] Optionally, the outer cylinder further includes: a side wall, and the side wall is arranged on the base and extends circumferentially with the center of the inner cylinder as the axis.

[0013] Optionally, the outer cylinder further includes: an inclined wall, which is arranged to extend circumferentially at the end of the side wall with the center of the inner cylinder as the axis.

[0014] Optionally, the inclined wall extends in a direction away from the side wall in a trend of gradually approaching the inner cylinder.

[0015] Optionally, the outer cylinder further includes: an opening, and the end of the inclined wall extends circumferentially with the center of the inner cylinder as the axis to form the opening.

[0016] Optionally, an insulating layer is provided on the outer wall of the inner cylinder.

[0017] Optionally, the insulating part is made of Teflon or ceramic.

[0018] Optionally, the insulating layer is made of Teflon or ceramic.

[0019] Optionally, the voltage range of the power supply is 1-10 kV.

[0020] The technical solution provided by the present invention brings at least the following beneficial effects:

[0021] An electrostatic powder coaxial capacitor provided in the present application improves the dispersion uniformity of powder during the atomic layer deposition process, thereby improving the quality of the film; reduces powder agglomeration, avoiding equipment blockage and operation interruption caused by agglomeration; improves the working efficiency and stability of the powder ALD equipment through electrostatic assisted dispersion; this technology can be extended to other industrial fields that require powder dispersion and has broad application prospects. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and, together with the description, serve to explain the principles of the invention.

[0023] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or related technical descriptions are briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0024] Figure 1 A schematic structural diagram of a first embodiment of an electrostatic powder coaxial capacitor provided by an embodiment of the present invention;

[0025] Figure 2 A schematic structural diagram of a second embodiment of an electrostatic powder coaxial capacitor provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0027] Figure 1 An electrostatic powder coaxial capacitor suitable for an embodiment of the present invention is schematically shown.

[0028] Reference Figure 1-2 As shown, the present application provides an electrostatic powder coaxial capacitor, comprising:

[0029] The outer cylinder 1 is used to accommodate the inner cylinder 2;

[0030] The inner cylinder 2 is used to form an electric field together with the outer cylinder 1; the inner cylinder 2 is arranged in the outer cylinder 1;

[0031] An insulating part 3, used for insulating the outer cylinder 1 and the inner cylinder 2; the insulating part 3 is connected to the outer cylinder 1 and the inner cylinder 2 respectively;

[0032] The outer column 1 is connected to the negative pole of the power supply, and the inner column 2 is connected to the positive pole of the power supply.

[0033] In an embodiment of the present application, the coaxial capacitor includes an outer cylinder 1 connected to the negative pole of the power supply and a built-in inner cylinder 2, and the inner cylinder 2 is isolated from the outer cylinder 1 and the powder by an insulating portion 3. The built-in inner cylinder 2 is connected to the positive pole of the power supply, and the outer cylinder 1 is connected to the negative pole of the power supply to generate an electrostatic field in the powder ALD device. The powder carries the same charge during contact with the outer cylinder 1. Due to the mutual repulsion between the same charges, the powder particles are dispersed and the agglomeration phenomenon is reduced. The present application introduces an innovative design applied in the field of atomic layer deposition (ALD) technology - an electrostatic powder coaxial capacitor.

[0034] 1. The capacitor is mainly composed of the following three parts:

[0035] Outer cylinder: As the outer shell of the capacitor, it is connected to the negative pole of the power supply. It is responsible for providing a stable electric field environment.

[0036] Inner cylinder: Located inside the outer cylinder, connected to the positive pole of the power supply. An electric field is formed between the inner cylinder and the outer cylinder, which is the key area for powder dispersion.

[0037] Insulation part: ensures electrical isolation between the outer cylinder and the inner cylinder while maintaining the stability of the structure. The insulation part is connected to the outer cylinder and the inner cylinder respectively to ensure that the electric field is formed only between the outer cylinder and the inner cylinder.

[0038] 2. Working principle and advantages

[0039] Improve powder dispersion uniformity: When the powder enters the capacitor, it is affected by the strong electric field between the inner and outer cylinders, and the powder particles are dispersed by electrostatic force, reducing agglomeration. This dispersion mechanism improves the uniformity of the powder during the ALD process, thereby improving the quality and consistency of the film.

[0040] Prevent equipment clogging: Powder agglomeration is one of the main causes of equipment clogging. Through electrostatic dispersion, the formation of agglomerated particles is reduced, effectively avoiding equipment clogging and operation interruption.

[0041] Improve work efficiency and stability: Electrostatically assisted dispersion not only improves the utilization rate of powder, but also reduces the extension of deposition time and the decrease of deposition efficiency caused by agglomeration. This enables ALD equipment to operate more stably and efficiently.

[0042] Broad application prospects: This technology is not only suitable for ALD raw materials in powder form, but can also be extended to other industrial fields that require powder dispersion, such as powder metallurgy, paint spraying, etc. Its efficient and stable dispersion mechanism provides new technical solutions for these fields.

[0043] The electrostatic powder coaxial capacitor proposed in this application effectively solves the problem of powder dispersion during atomic layer deposition through innovative electric field design. It not only improves the quality and deposition efficiency of the film, but also avoids the risk of equipment blockage and operation interruption. This technology has broad application prospects and brings new development opportunities in the field of powder dispersion and film preparation.

[0044] Exemplarily, the outer cylinder 1 includes: a base 11 , the inner cylinder 2 is disposed on the base 11 , and the inner cylinder 2 and the base 11 are connected via the insulating portion 3 .

[0045] In the embodiment of the present application, the base 11 is in a sheet shape and is used to mount the insulating part 3 and the inner cylinder 2 .

[0046] Exemplarily, the outer cylinder 1 further includes: a side wall 12 , and the side wall 12 is arranged on the base 11 and extends along the circumferential direction with the center of the inner cylinder 2 as the axis.

[0047] In the embodiment of the present application, the side wall 12 is in a circular ring shape, and the center of the side wall 12 is colinear with the center of the inner cylinder 2 , and the line is perpendicular to the base 11 .

[0048] Exemplarily, the outer cylinder 1 further includes: an inclined wall 13, wherein the inclined wall 13 is arranged to extend circumferentially at the end of the side wall 12 with the center of the inner cylinder 2 as the axis.

[0049] In the embodiment of the present application, the inclined wall 13 is annular, and the center of the inclined wall 13 is colinear with the center of the inner cylinder 2, and the line is perpendicular to the base 11. The inclined wall 13 is connected to the end of the side wall 12 away from the base 11.

[0050] Exemplarily, the inclined wall 13 extends in a direction away from the side wall 12 and gradually approaches the inner cylinder 2 .

[0051] In the embodiment of the present application, in the direction gradually away from the side wall 12, the inclined wall 13 gradually approaches the inner cylinder 2. The base 11, the side wall 12 and the inclined wall 13 together form a receiving cavity, which wraps the inner cylinder 2.

[0052] Exemplarily, the outer cylinder 1 further includes: an opening 14 , and the end of the inclined wall 13 extends circumferentially with the center of the inner cylinder 2 as the axis to form the opening 14 .

[0053] In the embodiment of the present application, an opening 14 is formed on the end of the inclined wall 13 away from the side wall 12 , and the opening 14 is used for powder to enter.

[0054] Exemplarily, an insulating layer 21 is provided on the outer wall of the inner cylinder 2 .

[0055] In the embodiment of the present application, the insulating layer 21 is used to isolate the powder and prevent the powder from being closely attached to the outer wall of the inner cylinder 2 .

[0056] Exemplarily, the insulating part 3 is made of Teflon or ceramic.

[0057] In the embodiment of the present application, Teflon or ceramic is an insulating material that is resistant to high temperatures and chemical corrosion, and can ensure the safety of the insulating connection between the outer cylinder 1 and the inner cylinder 2.

[0058] Exemplarily, the insulating layer 21 is made of Teflon or ceramic.

[0059] In the embodiment of the present application, Teflon or ceramic is an insulating material that is resistant to high temperatures and chemical corrosion, and can ensure stability and safety during the high-temperature ALD process.

[0060] Exemplarily, the voltage range of the power supply is 1-10 kV.

[0061] In the embodiment of the present application, according to the type of powder processing equipment required (fluidized bed, rotating bed, etc.), the outer cylinder 1 and the inner cylinder 2 are assembled to obtain a coaxial capacitor structure, ensuring that the inner cylinder 2 is substantially at the same height as the outer cylinder 1, and the surface of the inner cylinder 2 is isolated by appropriate insulating materials. The electrostatic field voltage is controlled within the range of 1 kV to 10 kV to ensure effective dispersion of the powder.

[0062] The electrostatic powder coaxial capacitor is suitable for various ALD processes that require powder dispersion, especially in situations where powder agglomeration is severe and the risk of equipment clogging is high. Its efficient powder dispersion ability and stable electric field environment make this technology have broad application prospects, such as semiconductor manufacturing, optical device preparation, energy storage material synthesis and other fields. The electrostatic powder coaxial capacitor provided in this application improves the dispersion uniformity of powder during atomic layer deposition, thereby improving the quality of the film; reduces powder agglomeration, avoiding equipment clogging and operation interruption caused by agglomeration; through electrostatic assisted dispersion, the working efficiency and stability of powder ALD equipment are improved; this technology can be extended to other industrial fields that require powder dispersion and has broad application prospects.

[0063] It should be noted that, in the present application, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings. These terms are mainly used to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0064] In addition, some of the above terms may be used to express other meanings in addition to indicating orientation or positional relationship. For example, the term "on" may also be used to express a certain dependency or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in this application can be understood according to specific circumstances.

[0065] In addition, the terms "installed", "set", "provided with", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0066] In addition, the terms "first", "second", etc. are mainly used to distinguish different devices, elements or components (the specific types and structures may be the same or different), and are not used to indicate or imply the relative importance and quantity of the indicated devices, elements or components. Unless otherwise specified, "plurality" means two or more.

[0067] The foregoing is merely a specific embodiment of the present invention, which enables those skilled in the art to understand or implement the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features claimed herein.

Claims

1. An electrostatic powder coaxial capacitor, characterized in that: include: An outer cylinder, used to accommodate the inner cylinder; An inner cylinder, used to form an electric field together with the outer cylinder; The inner cylinder is disposed in the outer cylinder; An insulating part, used for insulating the outer cylinder and the inner cylinder; the insulating part is connected to the outer cylinder and the inner cylinder respectively; Wherein, the outer cylinder is connected to the negative pole of the power supply, and the inner cylinder is connected to the positive pole of the power supply.

2. The electrostatic powder coaxial capacitor according to claim 1, characterized in that: The outer cylinder comprises a base, the inner cylinder is arranged on the base, and the inner cylinder and the base are connected via the insulating part.

3. The electrostatic powder coaxial capacitor according to claim 2, characterized in that: The outer cylinder further comprises: a side wall, and the side wall is arranged on the base and extends along the circumferential direction with the center of the inner cylinder as the axis.

4. The electrostatic powder coaxial capacitor according to claim 3, characterized in that: The outer cylinder further comprises: an inclined wall, which is arranged to extend circumferentially at the end of the side wall with the center of the inner cylinder as the axis.

5. The electrostatic powder coaxial capacitor according to claim 3, characterized in that: The inclined wall extends in a direction away from the side wall and gradually approaches the inner cylinder.

6. The electrostatic powder coaxial capacitor according to claim 4, characterized in that: The outer cylinder also includes an opening, and the end of the inclined wall extends circumferentially with the center of the inner cylinder as the axis to form the opening.

7. The electrostatic powder coaxial capacitor according to claim 1, characterized in that: An insulating layer is arranged on the outer wall of the inner cylinder.

8. The electrostatic powder coaxial capacitor according to claim 1, characterized in that: The insulating part is made of Teflon or ceramic.

9. The electrostatic powder coaxial capacitor according to claim 7, characterized in that: The insulating layer is made of Teflon or ceramic.

10. The electrostatic powder coaxial capacitor according to claim 1, characterized in that: The voltage range of the power supply is 1-10 kV.

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