A growth device for silicon carbide crystal

Abstract

The present invention relates to the technical field of crucibles, and more specifically discloses a growth device for silicon carbide crystals, comprising a crucible wall pushing assembly, a crucible wall assembly is installed on the top of the crucible wall pushing assembly, a crucible cover is arranged on the top of the crucible wall pushing assembly, a material tray is arranged on the top of the crucible wall pushing assembly, the crucible wall pushing assembly comprises a bottom positioning circular plate, a threaded rod is fixedly connected to the top of the bottom positioning circular plate, a positioning base assembly is fixedly connected to the top of the threaded rod, a lifting pushing assembly is movably sleeved on the outer side of the threaded rod, and an arc-shaped positioning plate is fixedly connected to the outer side of the lifting pushing assembly; after the processing is completed, the crucible wall assembly is rotated and unfolded to facilitate cleaning of the inner side of the crucible, and the material tray can be taken out for cleaning, which is convenient for removing unreacted raw materials, and the crucible can be quickly cleaned so that the crucible can be used a second time.

Description

Technical Field

[0001] The present invention relates to the technical field of crucibles, and more particularly to a growth device for silicon carbide crystals. Background Art

[0002] Seed crystal sublimation method or improved Lely method is the mainstream method for commercial growth of SiC substrates. The basic principle is: at a high temperature above 1800℃, SiC will decompose and sublimate into a variety of gas phase components (such as silicon atoms, SiC2 molecules and Si2C molecules, etc.), and these gas phase components will react when transported to a lower temperature and recrystallize to form solid phase SiC. The specific growth process is as follows:

[0003] High-purity silicon powder and carbon powder (usually 5-6N purity) are mixed in a certain proportion and placed at the bottom of the graphite crucible in the single crystal furnace, and the silicon carbide seed crystal is bonded to the top of the crucible cover.

[0004] By means of electromagnetic induction heating or resistance heating, the temperature in the crucible is raised to above 2000°C, and an axial temperature gradient is formed in the crucible, so that the temperature at the seed crystal is slightly lower than that at the powder.

[0005] Driven by the temperature gradient, the gaseous substances decomposed from the silicon carbide powder are transported from the high-temperature zone (powder) to the low-temperature zone (seed crystal), and the atoms are arranged regularly on the carbon surface of the seed crystal according to the crystal type of the seed crystal (such as 4H-SiC or 6H-SiC), so that the crystal gradually thickens and then grows into a silicon carbide ingot.

[0006] There are some shortcomings in the use of existing graphite crucibles, as follows:

[0007] During the processing, high-purity silicon powder and carbon powder need to be placed at the bottom of the graphite crucible, but some raw materials will remain on the bottom and side walls of the crucible after the processing is completed. It is not convenient to clean the graphite crucible after the processing is completed, so it is not convenient to reuse the graphite crucible. Summary of the invention

[0008] In order to overcome the above-mentioned defects of the prior art, the present invention provides a growth device for silicon carbide crystals to solve the problems existing in the above-mentioned background technology.

[0009] The present invention provides the following technical solution: a growth device for silicon carbide crystals, comprising a crucible wall pushing assembly, a crucible wall assembly is installed on the top of the crucible wall pushing assembly, a crucible cover is arranged on the top of the crucible wall pushing assembly, a material tray is arranged on the top of the crucible wall pushing assembly, the crucible wall pushing assembly comprises a bottom positioning circular plate, a threaded rod is fixedly connected to the top of the bottom positioning circular plate, a positioning base assembly is fixedly connected to the top of the threaded rod, a lifting pushing assembly is movably sleeved on the outer side of the threaded rod, a curved positioning plate is fixedly connected to the outer side of the lifting pushing assembly, and a rotating handle is fixedly connected to the outer side of the curved positioning plate.

[0010] Furthermore, the positioning base assembly includes a base body, a positioning groove is provided on the top of the base body, a lifting circular hole is provided on the bottom of the positioning groove, a rotating groove is provided on the outer side of the base body, and a rotating positioning rod is fixedly connected to the inner side of the rotating groove.

[0011] Furthermore, the lifting and pushing assembly includes a rotating lifting ring, the top of the rotating lifting ring is fixedly connected with a positioning bearing, the top of the positioning bearing is fixedly connected with a pulling ring, the bottom of the inner side of the pulling ring is fixedly connected with a supporting positioning ring, the top of the supporting positioning ring is fixedly connected with a lifting column, the top of the lifting column is fixedly connected with a circular limit plate, the top of the rotating lifting ring is provided with a threaded hole, and the top of the supporting positioning ring is provided with a circular hole.

[0012] Furthermore, the crucible wall assembly includes a crucible wall body, a rotating block is fixedly connected to the bottom of the crucible wall body, rotating fillets are provided on both sides of the rotating block, a positioning notch is provided on the top of the crucible wall body, a pulling arm is provided on the outer side of the crucible wall body, rotating positioning blocks are movably connected on both sides of the pulling arm, the rotating positioning block on the side of the pulling arm close to the crucible wall body is fixedly connected to the outer side of the crucible wall body, the rotating positioning block on the side of the pulling arm away from the crucible wall body is fixedly connected to the inner side of the pulling ring, a sealing strip is fixedly connected to the front side of the crucible wall body, and a clamping block is fixedly connected to the outer side of the positioning notch.

[0013] Furthermore, a rounded corner is provided on the top of the outer side of the rotation groove, and the diameter of the rounded corner on the top of the outer side of the rotation groove is the same as the thickness of the rotation groove. The thread groove on the inner side of the threaded hole cooperates with the thread on the outer side of the threaded rod.

[0014] Furthermore, the ratio of the diameter of the threaded hole to the diameter of the circular hole is three to four, the diameter of the outer side of the lifting column and the diameter of the lifting circular hole are clearance matched, the diameter of the outer side of the circular limiting plate and the diameter of the positioning groove are clearance matched, the depth of the positioning groove is the same as the thickness of the circular limiting plate, and there is a distance of three millimeters between the bottom of the supporting positioning ring and the top of the rotating lifting ring.

[0015] Furthermore, a circular positioning hole is provided on the front of the rotating block, the rotating block is connected to the rotating positioning rod through a bearing, the center of the rotating fillet is on the same line as the center of the circular positioning hole of the rotating block, and the pulling arm is connected to the rotating positioning block through a positioning shaft and a bearing.

[0016] Furthermore, the diameter of the outer side of the crucible wall body is the same as the diameter of the top of the crucible cover, the bottom diameter of the crucible cover is gap-matched with the diameter of the outer side of the positioning notch, and the depth of the positioning notch is the same as the height of the bottom diameter of the crucible cover.

[0017] Technical effects and advantages of the present invention:

[0018] 1. During the use of the present invention, the arc-shaped positioning plate is first rotated by rotating the rotating handle, and then the rotating lifting ring is driven to rotate relative to the pulling ring under the positioning of the positioning bearing so that the threaded hole descends along the thread on the outer side of the threaded rod, and the rotating handle is rotated three to five times, and then the positioning base assembly and the circular hole can be driven to descend, and then the rotating positioning block is pulled by the pulling ring, and then the pulling arm, the crucible wall body and the rotating block are pulled to rotate along the rotating positioning rod, and then the crucible cover can be removed, and after the crucible cover is removed, the rotating handle is continuously rotated until the inner side of the crucible wall body and the top of the base body are on the same plane, and then the material tray can be placed on the top of the circular limiting plate. , and then rotate the handle in the opposite direction to push it back until there are three to five turns left to fully tighten, and then stop rotating. Then pour the mixed raw materials into the inner side of the crucible wall assembly, and then fall on the top of the material tray, and then put the crucible cover on the inner side of the crucible wall assembly. At this time, the bottom of the crucible cover will fall on the positioning notch, and then continue to rotate the handle to make the threaded rod rotate close to the crucible cover. The crucible cover is clamped by the clamping block, which can quickly complete the positioning and removal of the crucible cover, and can ensure the sealing of the inner side of the crucible wall assembly, so as to quickly take out the processed silicon carbide crystals, and to avoid the collision of the processed silicon carbide with the inner wall of the crucible when taking out.

[0019] 2. After the processing is completed, the crucible wall assembly of the present invention is rotated and unfolded to facilitate cleaning the inside of the crucible, and the material tray can be taken out for cleaning, which is convenient for scraping off the unreacted raw materials, and the crucible can be quickly cleaned so that the crucible can be used again. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0021] Figure 2 It is a schematic diagram of the overall structure of the present invention.

[0022] Figure 3 It is a schematic diagram of the overall cross-sectional structure of the present invention.

[0023] Figure 4 It is a schematic structural diagram of the crucible wall pushing assembly of the present invention.

[0024] Figure 5 It is a schematic diagram of the structure of the positioning base assembly of the present invention.

[0025] Figure 6 It is a schematic diagram of the cross-sectional structure of the lifting and pushing assembly of the present invention.

[0026] Figure 7 It is a schematic diagram of the structure of the crucible wall assembly of the present invention.

[0027] Figure 8 For the present invention Figure 7 A is an enlarged structural diagram of FIG.

[0028] Fig. 9 For the present invention Figure 7 Schematic diagram of the enlarged structure at B.

[0029] The accompanying drawings are marked as follows: 1. Crucible wall pushing assembly; 101. Bottom positioning circular plate; 102. Threaded rod; 103. Positioning base assembly; 1031. Base body; 1032. Positioning groove; 1033. Lifting circular hole; 1034. Rotating groove; 1035. Rotating positioning rod; 104. Lifting pushing assembly; 1041. Rotating lifting ring; 1042. Positioning bearing; 1043. Pulling ring; 1044. Supporting positioning ring; 1045. Lifting column; 1046. Circular limit plate; 1047. Threaded hole; 1048. Circular hole; 105. Arc-shaped positioning plate; 106. Turning handle; 2. Crucible wall assembly; 201. Crucible wall body; 202. Rotating block; 203. Positioning notch; 204. Rotating fillet; 205. Pulling arm; 206. Rotating positioning block; 207. Clamping block; 208. Sealing strip; 3. Crucible cover; 4. Material tray. DETAILED DESCRIPTION

[0030] The technical solution of the present invention will be clearly and completely described below in conjunction with the drawings in the present invention. In addition, the forms of the various structures described in the following embodiments are merely illustrative, and the growth device for silicon carbide crystals involved in the present invention is not limited to the various structures described in the following embodiments. All other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0031] Reference Figures 1 to 9The present invention provides a growth device for silicon carbide crystals, comprising a crucible wall pushing component 1, a crucible wall component 2 is installed on the top of the crucible wall pushing component 1, a crucible cover 3 is arranged on the top of the crucible wall pushing component 2, a material tray 4 is arranged on the top of the crucible wall pushing component 1, the crucible wall pushing component 1 comprises a bottom positioning circular plate 101, a threaded rod 102 is fixedly connected to the top of the bottom positioning circular plate 101, a positioning base component 103 is fixedly connected to the top of the threaded rod 102, a lifting and pushing component 104 is movably sleeved on the outer side of the threaded rod 102, an arc-shaped positioning plate 105 is fixedly connected to the outer side of the lifting and pushing component 104, and a rotating handle 106 is fixedly connected to the outer side of the arc-shaped positioning plate 105; after the processing is completed, the crucible wall component 2 is rotated and unfolded to facilitate cleaning of the inner side of the crucible, and the material tray 4 can be taken out for cleaning, which is convenient for shoveling away unreacted raw materials, and the crucible can be quickly cleaned, so that the crucible can be used for a second time.

[0032] Furthermore, the positioning base assembly 103 includes a base body 1031, a positioning groove 1032 is provided on the top of the base body 1031, a lifting circular hole 1033 is provided on the bottom of the positioning groove 1032, a rotating groove 1034 is provided on the outer side of the base body 1031, and a rotating positioning rod 1035 is fixedly connected to the inner side of the rotating groove 1034.

[0033] Furthermore, the lifting and pushing assembly 104 includes a rotating lifting ring 1041, the top of the rotating lifting ring 1041 is fixedly connected with a positioning bearing 1042, the top of the positioning bearing 1042 is fixedly connected with a pulling ring 1043, the bottom of the inner side of the pulling ring 1043 is fixedly connected with a supporting positioning ring 1044, the top of the supporting positioning ring 1044 is fixedly connected with a lifting column 1045, the top of the lifting column 1045 is fixedly connected with a circular limit plate 1046, a threaded hole 1047 is opened at the top of the rotating lifting ring 1041, and a circular hole 1048 is opened at the top of the supporting positioning ring 1044.

[0034] Furthermore, the crucible wall assembly 2 includes a crucible wall body 201, a rotating block 202 is fixedly connected to the bottom of the crucible wall body 201, both sides of the rotating block 202 are provided with rotating fillets 204, a positioning notch 203 is provided at the top of the crucible wall body 201, a pulling arm 205 is arranged on the outer side of the crucible wall body 201, both sides of the pulling arm 205 are movably connected with rotating positioning blocks 206, the rotating positioning block 206 on the side of the pulling arm 205 close to the crucible wall body 201 is fixedly connected to the outer side of the crucible wall body 201, and the rotating positioning block 206 on the side of the pulling arm 205 away from the crucible wall body 201 is movably connected to the crucible wall body 201. The inner side of the pull ring 1043 is fixedly connected, the front side of the crucible wall body 201 is fixedly connected with a sealing strip 208, and the outer side of the positioning notch 203 is fixedly connected with a clamping block 207; during use, the arc-shaped positioning plate 105 is first rotated by rotating the rotating handle 106, and then the rotating lifting ring 1041 is driven to rotate relative to the pulling ring 1043 under the positioning of the positioning bearing 1042, so that the threaded hole 1047 descends along the thread on the outer side of the threaded rod 102, and the rotating handle 106 is rotated three to five times, and then the positioning base assembly 103 and the circular hole 1048 can be driven to descend. Then, the rotating positioning block 206 is pulled by pulling the ring 1043, and then the pulling arm 205, the crucible wall body 201 and the rotating block 202 are rotated along the rotating positioning rod 1035, and then the crucible cover 3 can be removed. After the crucible cover 3 is removed, the rotating handle 106 is continuously rotated until the inner side of the crucible wall body 201 and the top of the base body 1031 are on the same plane, and then the material tray 4 can be placed on the top of the circular limiting plate 1046, and then the rotating handle 106 can be rotated in the reverse direction to push 1021 back to stop rotating when there are three to five turns left to fully tighten, and then the mixing is completed. The raw materials are poured into the inner side of the crucible wall assembly 2 and then fall on the top of the material tray 4, and then the crucible cover 3 is placed on the inner side of the crucible wall assembly 2. At this time, the bottom of the crucible cover 3 will fall on the positioning notch 203, and then the handle 106 is continuously rotated to rotate the threaded rod 102 close to the crucible cover 3. The crucible cover 3 is clamped by the clamping block 207, so that the positioning and removal of the crucible cover 3 can be completed quickly, and the sealing of the inner side of the crucible wall assembly 2 can be ensured, so that the processed silicon carbide crystals can be quickly taken out, and it is easy to avoid the collision of the processed silicon carbide with the inner wall of the crucible when it is taken out.

[0035] Furthermore, a rounded corner is provided at the top of the outer side of the rotation groove 1034 , and the diameter of the rounded corner at the top of the outer side of the rotation groove 1034 is the same as the thickness of the rotation groove 1034 . The thread groove inside the threaded hole 1047 cooperates with the thread on the outer side of the threaded rod 102 .

[0036] Furthermore, the ratio of the diameter of the threaded hole 1047 to the diameter of the circular hole 1048 is three to four, the diameter of the outer side of the lifting column 1045 and the diameter of the lifting circular hole 1033 are clearance matched, the diameter of the outer side of the circular limiting plate 1046 and the diameter of the positioning groove 1032 are clearance matched, the depth of the positioning groove 1032 is the same as the thickness of the circular limiting plate 1046, and there is a distance of three millimeters between the bottom of the supporting positioning ring 1044 and the top of the rotating lifting ring 1041.

[0037] Furthermore, a circular positioning hole is opened on the front of the rotating block 202, and the rotating block 202 is connected to the rotating positioning rod 1035 through a bearing. The center of the rotating fillet 204 is on the same straight line as the center of the circular positioning hole of the rotating block 202, and the connection between the pulling arm 205 and the rotating positioning block 206 is connected through a positioning shaft and a bearing.

[0038] Furthermore, the outer diameter of the crucible wall body 201 is the same as the top diameter of the crucible cover 3 , the bottom diameter of the crucible cover 3 is gap-matched with the outer diameter of the positioning notch 203 , and the depth of the positioning notch 203 is the same as the height of the bottom diameter of the crucible cover 3 .

[0039] The working principle of the present invention is as follows: during use, the arc-shaped positioning plate 105 is first rotated by rotating the rotating handle 106, and then the rotating lifting ring 1041 is driven to rotate relative to the pulling ring 1043 under the positioning of the positioning bearing 1042, so that the threaded hole 1047 descends along the thread on the outer side of the threaded rod 102, and the rotating handle 106 is rotated three to five times, and then the positioning base assembly 103 and the circular hole 1048 can be driven to descend, and then the rotating positioning block 206 is pulled by the pulling ring 1043, and then the pulling arm 205, the crucible wall body 201 and the rotating block 202 are pulled to rotate along the rotating positioning rod 1035, and then the crucible cover 3 can be removed, and after the crucible cover 3 is removed, the rotating handle 106 is continuously rotated until the inner side of the crucible wall body 201 and the top of the base body 1031 are on the same plane, and then After that, the material tray 4 can be placed on the top of the circular limit plate 1046, and then the handle 106 can be rotated in the reverse direction to push 1021 back to stop rotating when there are three to five turns left to fully tighten, and then the mixed raw materials are poured into the inner side of the crucible wall assembly 2, and then fall on the top of the material tray 4, and then the crucible cover 3 is placed on the inner side of the crucible wall assembly 2. At this time, the bottom of the crucible cover 3 will fall on the positioning notch 203, and then the handle 106 is continuously rotated to make the threaded rod 102 rotate close to the crucible cover 3, and the crucible cover 3 is clamped by the clamping block 207, so that the positioning and removal of the crucible cover 3 can be completed quickly, and the sealing of the inner side of the crucible wall assembly 2 can be ensured, so as to facilitate the rapid removal of the processed silicon carbide crystals, and to avoid the collision of the processed silicon carbide with the inner wall of the crucible when taking out;

[0040] After the processing is completed, the crucible wall assembly 2 is rotated and unfolded to facilitate cleaning of the inside of the crucible, and the material tray 4 can be taken out for cleaning, so that unreacted raw materials can be removed and the crucible can be quickly cleaned so that the crucible can be used again.

[0041] Finally, a few points should be explained: First, in the description of this application, it should be noted that, unless otherwise specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, which may refer to mechanical connection or electrical connection, or internal communication between two components, or direct connection. "upper", "lower", "left", "right", etc. are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship may change;

[0042] Secondly: In the drawings of the embodiments disclosed in the present invention, only the structures related to the embodiments disclosed in the present invention are involved, and other structures can refer to the general design. In the absence of conflict, the same embodiment and different embodiments of the present invention can be combined with each other;

[0043] Finally: The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A device for growing silicon carbide crystals, comprising a crucible wall pushing assembly (1), characterized in that: A crucible wall assembly (2) is installed on the top of the crucible wall pushing assembly (1), a crucible cover (3) is arranged on the top of the crucible wall pushing assembly (2), a material tray (4) is arranged on the top of the crucible wall pushing assembly (1), the crucible wall pushing assembly (1) comprises a bottom positioning circular plate (101), a threaded rod (102) is fixedly connected to the top of the bottom positioning circular plate (101), a positioning base assembly (103) is fixedly connected to the top of the threaded rod (102), a lifting and pushing assembly (104) is movably sleeved on the outer side of the threaded rod (102), an arc-shaped positioning plate (105) is fixedly connected to the outer side of the lifting and pushing assembly (104), and a rotating handle (106) is fixedly connected to the outer side of the arc-shaped positioning plate (105).

2. The device for growing silicon carbide crystal according to claim 1, characterized in that: The positioning base assembly (103) comprises a base body (1031), a positioning groove (1032) is provided on the top of the base body (1031), a lifting circular hole (1033) is provided on the bottom of the positioning groove (1032), a rotating groove (1034) is provided on the outer side of the base body (1031), and a rotating positioning rod (1035) is fixedly connected to the inner side of the rotating groove (1034).

3. The device for growing silicon carbide crystal according to claim 2, characterized in that: The lifting and pushing assembly (104) comprises a rotating lifting ring (1041), the top of the rotating lifting ring (1041) is fixedly connected to a positioning bearing (1042), the top of the positioning bearing (1042) is fixedly connected to a pulling ring (1043), the bottom of the inner side of the pulling ring (1043) is fixedly connected to a supporting positioning ring (1044), the top of the supporting positioning ring (1044) is fixedly connected to a lifting column (1045), the top of the lifting column (1045) is fixedly connected to a circular limiting plate (1046), the top of the rotating lifting ring (1041) is provided with a threaded hole (1047), and the top of the supporting positioning ring (1044) is provided with a circular hole (1048).

4. The device for growing silicon carbide crystal according to claim 3, characterized in that: The crucible wall assembly (2) comprises a crucible wall body (201), the bottom of the crucible wall body (201) is fixedly connected to a rotating block (202), both sides of the rotating block (202) are provided with rotating fillets (204), the top of the crucible wall body (201) is provided with a positioning notch (203), the outer side of the crucible wall body (201) is provided with a pulling arm (205), and both sides of the pulling arm (205) are movably connected to rotating positioning blocks (206). The rotating positioning block (206) on the side of the pulling arm (205) close to the crucible wall body (201) is fixedly connected to the outer side of the crucible wall body (201), the rotating positioning block (206) on the side of the pulling arm (205) away from the crucible wall body (201) is fixedly connected to the inner side of the pulling ring (1043), the front side of the crucible wall body (201) is fixedly connected to a sealing strip (208), and the outer side of the positioning notch (203) is fixedly connected to a clamping block (207).

5. The device for growing silicon carbide crystal according to claim 3, characterized in that: The top of the outer side of the rotating groove (1034) is provided with a rounded corner, the diameter of the rounded corner of the top of the outer side of the rotating groove (1034) is the same as the thickness of the rotating groove (1034), and the thread groove inside the threaded hole (1047) cooperates with the thread on the outer side of the threaded rod (102).

6. The device for growing silicon carbide crystal according to claim 3, characterized in that: The ratio of the diameter of the threaded hole (1047) to the diameter of the circular hole (1048) is three to four, the diameter of the outer side of the lifting column (1045) and the diameter of the lifting circular hole (1033) are clearance matched, the diameter of the outer side of the circular limiting plate (1046) and the diameter of the positioning groove (1032) are clearance matched, the depth of the positioning groove (1032) and the thickness of the circular limiting plate (1046) are the same, and there is a distance of three millimeters between the bottom of the supporting positioning ring (1044) and the top of the rotating lifting ring (1041).

7. The device for growing silicon carbide crystal according to claim 4, characterized in that: A circular positioning hole is provided on the front of the rotating block (202); the rotating block (202) and the rotating positioning rod (1035) are connected via a bearing; the center of the rotating fillet (204) and the center of the circular positioning hole of the rotating block (202) are on the same straight line; and the pulling arm (205) and the rotating positioning block (206) are connected via a positioning shaft and a bearing.

8. The device for growing silicon carbide crystal according to claim 4, characterized in that: The diameter of the outside of the crucible wall body (201) is the same as the diameter of the top of the crucible cover (3), the bottom diameter of the crucible cover (3) and the diameter of the outside of the positioning notch (203) are clearance-matched, and the depth of the positioning notch (203) is the same as the height of the bottom diameter of the crucible cover (3).

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