Ion source device

Abstract

The invention discloses an ion source device, the ion source device comprises two electrode structures and a communicating piece, each electrode structure comprises a cathode and an anode, and an electric field is formed between the cathode and the anode of each electrode structure; the communicating piece is connected between the two electrode structures, an ion generation cavity is formed between the two cathodes of the two electrode structures, the communicating piece is provided with an ion outlet, and the ion outlet is located in the middle of the communicating piece and communicates with the ion generation cavity; at least part of the ion source device is suitable for being installed in an accelerator, and the communicating piece is located in the center area of the accelerator. According to the ion device, the two electrode structures are located at the two ends of the communicating piece, and only the communicating piece occupies the space of the central area of the accelerator, so that the occupied space of the central area of the accelerator is reduced, and the phenomenon of discharge sparking is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of ion sources, and in particular to an ion source device. Background Art

[0002] Ion source is a science and technology with wide applications, many types, many sciences involved, strong process technology, and rapid development. Its main function is to ionize neutral atoms or molecules and draw ion beams from them. It is an indispensable component of various types of ion accelerators, mass spectrometers, electromagnetic isotope separators, ion implanters, ion beam etching devices, ion thrusters, and neutral beam injectors in controlled fusion devices.

[0003] When the ion source is installed in the accelerator, the main function of the ion source in the accelerator is to generate an ion beam and provide a particle beam for the accelerator. The ion source ionizes neutral atoms or molecules to form an ion beam, which is then introduced into the accelerator for various physical and chemical experiments and research. However, the ion source device in the prior art occupies a large space in the central area of ​​the accelerator, resulting in a small distance between the ion source and the central area of ​​the accelerator, a high potential difference, and a discharge spark phenomenon. Summary of the invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides an ion source device, wherein two electrode structures are located at both ends of a connecting piece, and only the connecting piece occupies the space in the central area of ​​the accelerator, thereby reducing the occupied space in the central area of ​​the accelerator and reducing the phenomenon of discharge sparking.

[0005] According to an embodiment of the present invention, the ion source device includes: two electrode structures and a connecting piece, the electrode structure includes a cathode and an anode, and an electric field is formed between the cathode and the anode of each electrode structure; the connecting piece is connected between the two electrode structures, and an ion generating chamber is formed between the two cathodes of the two electrode structures, the connecting piece is provided with an ion outlet, and the ion outlet is located in the middle of the connecting piece and is connected to the ion generating chamber, at least part of the ion source device is suitable for installation in an accelerator, and the connecting piece is located in the central area of ​​the accelerator.

[0006] According to the ion source device of the embodiment of the present invention, an electric field is generated between the cathode and the anode, an electric field is formed between the cathode and the anode of each electrode structure, and electrons are emitted. The electrons perform cyclotron motion under the constraint of the magnetic field. When they move to the vicinity of the cathode of one electrode structure, they are returned to the cathode of the other electrode structure by the electric field of the other electrode structure, and the motion is repeated. After hydrogen is introduced into the ion generating chamber, the electrons emitted by the electric field collide with the hydrogen to ionize and generate plasma. The ion source device is arranged in an accelerator, and the magnetic field of the accelerator is used to form an ion beam required for the experiment or ions requiring energy. In the embodiment of the present invention, the two electrode structures are arranged at both ends of the connecting piece, and only the connecting piece is located in the center of the accelerator, thereby avoiding the problem of large space occupation caused by the electrode structure integrated in a cavity being located in the center of the accelerator, reducing the space occupied by the central area of ​​the accelerator, thereby reducing the phenomenon of discharge and sparking.

[0007] According to the ion source device of the embodiment of the present invention, the cross-sectional area of ​​the connecting piece is smaller than the cross-sectional area of ​​the electrode structure.

[0008] According to the ion source device of the embodiment of the present invention, the cathode is detachably connected to the electrode structure, and the anode is detachably connected to the end of the electrode structure.

[0009] According to the ion source device of the embodiment of the present invention, a cooling element is provided in each of the electrode structures, and the cooling element is suitable for cooling the cathode and / or the anode.

[0010] According to the ion source device of an embodiment of the present invention, the cooling member includes a first cooling member and a second cooling member, the first cooling member is provided with a first cooling cavity and the second cooling member is provided with a second cooling cavity, the first cooling cavity is suitable for injecting cooling liquid to cool the cathode, and the second cooling cavity is suitable for injecting cooling liquid to cool the anode.

[0011] According to the ion source device of the embodiment of the present invention, the first cooling member and the second cooling member are made of metal material, and an insulating material is provided between the first cooling member and the second cooling member.

[0012] According to the ion source device of the embodiment of the present invention, the first cooling member is provided with a first groove, and the cathode is provided with a second groove, and the first cooling member and the cathode are connected at the first groove and the second groove through a connecting component.

[0013] According to the ion source device of an embodiment of the present invention, the connecting component includes a screw and a heat conductor, the heat conductor is provided with a mounting hole, the screw passes through the mounting hole and one end is threadedly connected to the first groove and the other end is threadedly connected to the second groove.

[0014] According to the ion source device of the embodiment of the present invention, the second cooling member is connected to the anode via a connecting member.

[0015] According to the ion source device of the embodiment of the present invention, the connecting piece is provided with a connecting port, and when the connecting piece is connected to the electrode structure, the connecting port is opposite to the space formed between the cathode and the anode.

[0016] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0018] Figure 1 is a schematic structural diagram of an ion source device according to an embodiment of the present invention;

[0019] Figure 2 The embodiment of the present invention Figure 1 A partial enlarged schematic diagram of

[0020] Figure 3 The embodiment of the present invention Figure 2 A further enlarged view of .

[0021] Reference numerals:

[0022] Ion source device 100, main body 101, first flange 102, second flange 103, end 104,

[0023] Connecting piece 1, ion outlet 11, electrode structure 2, cathode 3, anode 4, connecting port 41, heat conducting piece 5, first cooling piece 6, first water inlet pipe 61, first water return pipe 62, screw 7, second cooling piece 8, second water inlet pipe 81, second water return pipe 82, insulating material 9. DETAILED DESCRIPTION

[0024] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0025] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0026] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0027] Reference below Figure 1-Figure 3 The ion source device 100 according to the embodiment of the present invention is described. An electric field is generated between the cathode 3 and the anode 4 of the electrode structure 2, and after hydrogen is introduced into the ion generating chamber, the electrons emitted by the electric field collide with the hydrogen to ionize and generate plasma. The ion source device 100 is arranged in an accelerator, and the magnetic field of the accelerator is used to form an ion beam or ions requiring energy required for the experiment. In the embodiment of the present invention, the two electrode structures 2 are arranged at both ends of the connecting piece 1. Only the connecting piece 1 is located in the center of the accelerator, which avoids the problem of large space occupation caused by the two electrode structures 2 and the connecting piece 1 being located in the center of the accelerator, and reduces the space occupied by the central area of ​​the accelerator, thereby reducing the phenomenon of discharge and sparking. In addition, cooling parts are provided in both electrode structures 2, which improves the cooling effect of the cathode and anode in the electrode structure 2, thereby improving the life of the ion source device 100. And the electrode structure 2 and the connecting piece 1 are arranged as a detachable structure, and the anode 4 is detachable, and the cathode 3 can also be detached from the inside of the electrode structure 2, which increases the convenience of maintenance and reduces the maintenance cost.

[0028] like Figure 1-3 As shown, the ion source device 100 of the present invention includes: two electrode structures 2 and a connecting piece 1.

[0029] Among them, the electrode structure 2 includes a cathode 3 and an anode 4, and an electric field is formed between the cathode 3 and the anode 4 of each electrode structure 2; the connecting piece 1 is connected between the two electrode structures 2, and an ion generating chamber is formed between the two cathodes of the two electrode structures 2, and the connecting piece 1 is provided with an ion outlet 11, which is located in the middle of the connecting piece 1 and is connected to the ion generating chamber, at least part of the ion source device is suitable for installation in an accelerator, and the connecting piece 1 is located in the central area of ​​the accelerator.

[0030] In practice, the two ends of the connecting piece 1 are connected to the electrode structures 2. The internal structures of the two electrode structures 2 are the same. A cathode 3 and an anode 4 are provided in each electrode structure 2. An electric field is formed between the cathode and the anode, that is, an electric field is formed between the cathode 3 and the anode 4 of each electrode structure 2, and electrons are emitted. The electrons perform cyclotron motion under the constraint of the magnetic field. When they move to the vicinity of the cathode 3 of one electrode structure 2, they are returned to the cathode of the other electrode structure 2 by the electric field of the other electrode structure 2. This motion is repeated, and hydrogen is introduced into the ion generating chamber. The hydrogen can be introduced along the outer end of the electrode structure 2. The hydrogen collides with the electrons emitted between the cathode 3 and the anode 4, and plasma is formed under the action of the magnetic field generated by the accelerator.

[0031] When at least part of the ion source device 100 is placed inside the accelerator, the plasma will flow from the ion generating chamber and into the accelerator along the ion outlet 11. A magnetic field will be formed inside the accelerator to guide, confine and focus the ions to form an ion beam. The ion beam can be used in a wide range of fields, such as electronic manufacturing, material surface modification, biomedicine and other fields.

[0032] Among them, the ion source device 100 includes a main body 101 and end portions 104 located at both ends of the main body 101, and the main body 101 and the end portions 104 are sealed and connected by a first flange 102 and a second flange 103. When a part of the ion source device 100 is located in an accelerator, the two first flanges 102 at both ends of the main body 101 can be located inside the accelerator, and the two end portions 104 are exposed to the accelerator. In this way, it is convenient to access related structures such as wires and coolants through the two end portions 104 to cool the cathode 3 and anode 4 in the electrode structure 2, thereby improving the service life of the electrodes, and thus improving the service life of the ion source device.

[0033] In the prior art, the electrode structure 2 is integrated into one and arranged in the central area of ​​the accelerator. In the embodiment of the present invention, two electrode structures 2 are arranged, and the two electrode structures 2 are connected by a connecting piece 1. The connecting piece 1 is arranged in the central area of ​​the accelerator. The electrode structures 2 at both ends of the connecting piece 1 are located on both sides of the central area of ​​the accelerator, so that the ion source device 100 occupies less space in the central area of ​​the accelerator. The outer wall of the ion source device 100 is at zero potential. If the distance between the outer wall and the high potential in the central area of ​​the accelerator is small, the potential difference is high, and discharge sparks are generated. In the embodiment of the present invention, only the connecting piece 1 is located in the central area of ​​the accelerator, and the electrode structure 2 is arranged on both sides of the central area of ​​the accelerator. The distance between the connecting piece 1 and the high potential in the central area of ​​the accelerator is large, thereby reducing the phenomenon of discharge sparks.

[0034] Therefore, the embodiment of the present invention reduces the risk of ignition between the ion source and other components of the accelerator to a large extent. In addition, it should be noted that the diameter of the connecting piece 1 between the two electrode structures 2 can be appropriately increased, while still ensuring that the overall risk of ignition is reduced. In this case, the space of the ion generating chamber can be appropriately increased, and the electrons perform reciprocating spiral motion in the ion generating chamber, colliding with hydrogen to generate plasma. The arc flow is large, which is more conducive to increasing the electron density and ion flow intensity.

[0035] In some embodiments, the cross-sectional area of ​​the connecting member 1 is smaller than the cross-sectional area of ​​the electrode structure 2. Figure 2 As shown, the connecting piece 1 is constructed as a slender tubular structure, and the cross-sectional area of ​​the connecting piece 1 is much smaller than the cross-sectional area of ​​the two electrode structures 2. At this time, only the connecting piece 1 is located in the central area of ​​the accelerator, and the two electrode structures 2 are distributed at both ends of the connecting piece 1 along the length direction of the connecting piece 1, which avoids the electrode structure 2 and the connecting piece 1 being integrated into one and located in the middle position of the accelerator to increase the occupied space in the middle position of the accelerator. In addition, the cross-sectional area of ​​the connecting piece 1 is small, and the space inside the accelerator is large, thereby further reducing the risk of ignition.

[0036] In some embodiments, the cathode 3 is detachably connected to the electrode structure 2 , and the anode 4 is detachably connected to an end of the electrode structure 2 .

[0037] In practice, the cathode 3 is a tantalum electrode. The main advantages of the tantalum electrode as a cathode include excellent corrosion resistance, high electrocatalytic activity and stability under specific conditions. The anode 4 is an anode cover. The anode cover is made of oxygen-free copper material. The anode cover has high electrical conductivity, low resistivity, excellent corrosion resistance and processing performance. The anode cover is a part of the electrode structure 2 and is used to seal the ion generating chamber of the electrode structure 2. At the same time, the anode cover can also be connected to the connecting piece 1. The anode cover can be connected to the remaining structure of the electrode structure 2 by screws or locking pieces and is used to seal the ion generating chamber. At the same time, the cathode 3 can be detachably connected to the ion generating chamber, which can be easily replaced when the anode and cathode need to be disassembled and replaced.

[0038] In some embodiments, a cooling element is disposed in each electrode structure 2 , and the cooling element is suitable for cooling the cathode 3 and / or the anode 4 .

[0039] In practice, the cathode 3 and the anode 4 can be cooled by a cooling member to prevent the cathode 3 and the anode 4 from generating too much heat during long-term operation and affecting the life of the cathode 3 and the anode 4. In other words, the cooling member can ensure the long-term normal operation of the electrode and the stability of the structure; the cooling member can be a cooling water pipe, and cooling is performed by injecting cooling water into the cooling water pipe, which is convenient, feasible, and low-cost. The electrodes in each electrode structure 2 can be fully cooled, thereby increasing the life of the ion source device.

[0040] In some embodiments, the cooling member includes a first cooling member 6 and a second cooling member 8, the first cooling member 6 is provided with a first cooling cavity and the second cooling member 8 is provided with a second cooling cavity, the first cooling cavity is suitable for injecting cooling liquid to cool the cathode 3, and the second cooling cavity is suitable for injecting cooling liquid to cool the anode 4.

[0041] Reference Figure 2 As shown, the first cooling member 6 is a first cooling water pipe, and cooling water is injected into the first cooling cavity of the first cooling water pipe. The first cooling water pipe injects cooling water into the water inlet end provided at the end 104 at both ends of the main body 101 of the ion source device 100, and the water inlet end 104 can be set at a suitable position according to actual conditions.

[0042] If you can follow Figure 1Cooling water is injected into the first cooling water pipe below the end 104, and the first cooling water pipe and the cathode 3 can be directly connected, or indirectly connected at a close distance. When cooling water is injected into the first cooling water pipe, the cooling water can cool the cathode 3, thereby ensuring the working stability of the cathode 3; the second cooling member 8 is also a second cooling water pipe, and the second cooling water pipe is located on one side of the first cooling water pipe. A water inlet can also be set at a suitable position along the end 104 of the ion source device 100, so that cooling water enters the second cooling water pipe and cools the anode 4. That is, each electrode structure 2 is provided with a cooling member capable of cooling the cathode 3 and the anode 4, thereby improving the cooling effect on the cathode 3 and the anode 4 of each electrode structure 2, thereby improving the life of the cathode 3 and the anode 4.

[0043] Specifically, the first cooling water pipe includes a first water inlet pipe 61 and a first water return pipe 62, and the length of the first water return pipe 62 is smaller than the length of the first water inlet pipe 61, the first water inlet pipe 61 and the top of the first water return pipe 62 are connected, the first water inlet pipe 61 is sleeved on the outside of the first water return pipe 62, and the water inlet end and the water outlet end of the first water inlet pipe 61 are both located at the end 104 of the ion source device 100, the cooling water enters the first water inlet pipe 61 through the water inlet end, and flows into the first water return pipe 62 through the opening above the first water return pipe 62, and returns through the water return end 104 of the end of the ion source device 100 to achieve a cooling cycle, save water resources, and continue cooling to ensure that the temperature of the cathode 3 is more appropriate and the life of the cathode 3 is increased.

[0044] In addition, the second cooling water pipe includes a second water inlet pipe 81 and a second water return pipe 82, and the length of the second water return pipe 82 is less than the length of the second water inlet pipe 81. The cooling water enters the second water inlet pipe 81 from the other water inlet end of the ion source device 100, and because the second water return pipe 82 is connected between the top and the second water inlet pipe 81, in the process of cooling the anode 4, after the cooling water enters the second water return pipe 82, it can flow out along the second water return pipe 82 and flow to the other water outlet end provided at the end 104 of the ion source device 100. That is, in the cooling process, it is necessary to circulate continuously, so as to ensure that the cooling water heated up after cooling is discharged from the water outlet and further cooled. When the water temperature rises, the temperature of the cooling water is ensured to be appropriate through the circulation of the cooling water, and cooling can be continuously performed to improve the cooling effect on the anode 4.

[0045] Furthermore, deionized water is used as cooling water. Deionized water is a very pure water without any impurities. It achieves a highly pure state by removing other electrolytes except hydrogen ions and hydroxide ions in the water. The deionized water can not only play a cooling role, but also separate the outer wall of the first return water pipe 62 and the inner wall of the first water inlet pipe 61, and prevent the cathode from being short-circuited to the ground. Similarly, the deionized water in the second cooling water pipe can not only play a cooling role, but also separate the inner wall of the second water inlet pipe 81 and the outer wall of the second return water pipe 82.

[0046] In some embodiments, the first cooling member 6 and the second cooling member 8 are made of metal material, and an insulating material 9 is provided between the first cooling member 6 and the second cooling member 8 .

[0047] In practice, when the first cooling member 6 and the second cooling member 8 are both made of metal materials, such as 316L stainless steel, the heat transfer effect is good, and the heat generated by the cathode 3 can be transferred to the first cooling water pipe in time, and the cooling water in the first cooling water pipe cools the heat generated by the cathode 3. At the same time, the insulating material 9 can be a ceramic insulating block, which separates the first cooling water pipe and the second cooling water pipe to avoid contact between the two metal cooling water pipes and electrical connection, which may cause a short circuit between the cathode 3 and the anode 4.

[0048] In some embodiments, the first cooling member 6 is provided with a first groove, and the cathode 3 is provided with a second groove, and the first cooling member 6 and the cathode 3 are connected at the first groove and the second groove through a connecting component.

[0049] Reference Figure 2 As shown, a first groove is provided above the first water inlet pipe 61 of the first cooling water pipe, and a second groove is provided on the cathode 3, and the connecting component is connected to both the first groove and the second groove, so that the first cooling water pipe and the cathode 3 are connected, and through the design of the first groove and the second groove, the stability of the connection between the cathode 3 and the first cooling water pipe is improved, thereby ensuring reliable cooling of the cathode 3.

[0050] In some embodiments, the connection assembly includes a screw 7 and a heat conducting member 5, the heat conducting member 5 is provided with a mounting hole, the screw 7 passes through the mounting hole and one end is threadedly connected to the first groove and the other end is threadedly connected to the second groove.

[0051] Among them, the first groove at the top of the first water inlet pipe 61 of the first cooling water pipe is provided with an internal thread, the second groove of the cathode 3 is also provided with an internal thread, and the screw 7 passes through the heat conductor 5, and one end of the screw 7 is threadedly connected to the first groove, and the other end is threadedly connected to the second groove. The heat conductor 5 can be a copper pad, and the copper pad is pressed between the cathode 3 and the first cooling water pipe. The cooling water in the first cooling water pipe cools the copper pad, and the cooled copper pad can cool the cathode 3. By setting a threaded connection between the screw 7 and the first groove and the second groove, the reliability of the connection is improved, and the cathode 3 can be detachable relative to the first cooling water pipe, so that the cathode 3 can be removed and replaced from the ion generating chamber. Moreover, the design of the copper pad can transfer the heat of the cathode 3 to the first cooling water pipe faster, and can also improve the cooling efficiency of the cooling water in the first cooling water pipe on the cathode 3.

[0052] In some embodiments, the second cooling member 8 is detachably connected to the anode 4 via a connecting member. Figure 2 As shown, a third groove is provided at the top of the second water inlet pipe 81 of the second cooling water pipe. In the ion generating chamber, the anode 4 is connected to the third groove at the top of the second water inlet pipe 81 via a connector. The connector can pass through the anode 4 but does not pass through the top wall of the second cooling water pipe to achieve a detachable connection of the anode 4. When the anode 4 needs to be replaced, it is convenient to disassemble the anode 4.

[0053] In some embodiments, the connecting piece 1 is provided with a connection port. When the connecting piece 1 is connected to the electrode structure 2 , the connection port is opposite to the space formed between the cathode 3 and the anode 4 .

[0054] That is, a connecting port 41 for installing a connecting piece 1 is provided on the anode 4, and the connecting port 41 is opposite to the space formed between the cathode 3 and the anode 4. When the end of the connecting piece 1 is connected to the connecting port 41 of the anode 4, the connecting port of the connecting piece 1 is opposite to the space formed between the cathode 3 and the anode 4, so that the electrons emitted between the cathode 3 and the anode 4 can enter the connecting piece 1 along the connecting port more smoothly and quickly, and then flow out from the ion outlet 11 of the connecting piece 1.

[0055] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0056] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. An ion source device, characterized in that: include: Two electrode structures, the electrode structures comprising a cathode and an anode, an electric field being formed between the cathode and the anode of each electrode structure; A connecting piece, wherein the connecting piece is connected between the two electrode structures and forms an ion generating chamber between the two cathodes of the two electrode structures. The connecting piece is provided with an ion outlet, and the ion outlet is located in the middle of the connecting piece and is connected to the ion generating chamber. At least part of the ion source device is suitable for installation in an accelerator, and the connecting piece is located in the central area of ​​the accelerator.

2. The ion source device according to claim 1, characterized in that: The cross-sectional area of ​​the connecting piece is smaller than the cross-sectional area of ​​the electrode structure.

3. The ion source device according to claim 2, characterized in that: The cathode is detachably connected to the electrode structure, and the anode is detachably connected to an end of the electrode structure.

4. The ion source device according to claim 1, characterized in that: A cooling element is provided in each of the electrode structures, and the cooling element is suitable for cooling the cathode and / or the anode.

5. The ion source device according to claim 4, characterized in that: The cooling member includes a first cooling member and a second cooling member, the first cooling member is provided with a first cooling cavity and the second cooling member is provided with a second cooling cavity, the first cooling cavity is suitable for injecting cooling liquid to cool the cathode, and the second cooling cavity is suitable for injecting cooling liquid to cool the anode.

6. The ion source device according to claim 5, characterized in that: The first cooling member and the second cooling member are made of metal material, and insulating material is provided between the first cooling member and the second cooling member.

7. The ion source device according to claim 5, characterized in that: The first cooling member is provided with a first groove, and the cathode is provided with a second groove, and the first cooling member and the cathode are connected at the first groove and the second groove through a connecting component.

8. The ion source device according to claim 7, characterized in that: The connecting assembly includes a screw and a heat conducting member, the heat conducting member is provided with a mounting hole, the screw passes through the mounting hole and one end of the screw is threadedly connected to the first groove and the other end of the screw is threadedly connected to the second groove.

9. The ion source device according to claim 5, characterized in that: The second cooling member is connected to the anode via a connecting member.

10. The ion source device according to claim 1, characterized in that: The connecting piece is provided with a connecting port. When the connecting piece is connected to the electrode structure, the connecting port is opposite to the space formed between the cathode and the anode.

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