Device and method for detecting appearance defects of semiconductor heating plate

Abstract

The invention discloses a semiconductor heating plate appearance defect detection device and a detection method thereof, and relates to the technical field of defect detection.The semiconductor heating plate appearance defect detection device comprises a conveyor, an industrial camera is arranged above the conveyor, a pushing air cylinder is fixedly arranged on the side of the conveyor, a box body is fixedly arranged on the side of the conveyor, and a circular notch is formed in the top of the box body; a conveying assembly and a storage assembly are arranged in the box body, the storage assembly comprises a storage lifting plate, the top of the storage lifting plate is rotationally connected with a rotating disc, the rotating disc can rotate, a plurality of vertically-stacked storage boxes are arranged on the rotating disc, and a plurality of storage grooves matched with semiconductor heating discs are annularly formed in the storage boxes. The storage box is used for storing the semiconductor heating disc, and the semiconductor heating disc enters the box body through the circular notch, so that the problems that in the prior art, workers possibly need to frequently move between an auxiliary workbench and a collecting area, the labor cost and the time cost are increased, and the overall production efficiency is reduced are solved.

Description

Technical Field

[0001] The present invention relates to the technical field of defect detection, and in particular to a device and method for detecting appearance defects of a semiconductor heating disk. Background Art

[0002] The semiconductor heating plate is a device that works by utilizing the resistance heating effect of semiconductor materials. Its appearance defects may affect its performance and service life. The semiconductor heating plate appearance defect detection device is a device specially used to detect appearance defects of semiconductor heating plates.

[0003] The existing semiconductor heating plate appearance defect detection system transmits the semiconductor heating plate to be tested through a conveying mechanism. The system deploys an industrial camera above the conveying path. The industrial camera is responsible for capturing image data on the surface of the semiconductor heating plate to detect potential appearance defects. Once the semiconductor heating plate being transmitted below is found to have appearance defects, the industrial camera will immediately trigger a signal to the central control system. Since the semiconductor heating plate cannot be directly introduced into the storage container at the bottom to avoid damage, the central control system needs to activate the drive mechanism to translate the defective semiconductor heating plate to an auxiliary workbench at the same level as the conveying mechanism. This operation is intended to facilitate subsequent staff to manually collect and process this batch of defective semiconductor heating plates.

[0004] Defects of existing technology: Existing technology requires manual intervention to collect and process defective products, which increases labor and time costs and reduces overall production efficiency. If the number of defective products is large, workers may need to move frequently between the auxiliary workbench and the collection area, further affecting efficiency.

[0005] Therefore, the present application provides a semiconductor heating plate appearance defect detection device and a detection method thereof to meet the needs. Summary of the invention

[0006] The purpose of the present application is to provide a semiconductor heating plate appearance defect detection device and detection method, which solves the problem that the existing technical workers may need to move frequently between the auxiliary workbench and the collection area, which increases the manpower cost and time cost and reduces the overall production efficiency.

[0007] To solve the above problems, the present application provides the following technical solutions: a device for detecting the appearance defects of a semiconductor heating plate, comprising: a conveyor, an industrial camera is arranged above the conveyor, a pushing cylinder is fixedly arranged on the side of the conveyor, a box is fixedly arranged on the side of the conveyor, a circular notch is opened on the top of the box, a conveying component and a storage component are arranged inside the box, the storage component comprises a storage lifting plate, a turntable is rotatably connected to the top of the storage lifting plate, the turntable can rotate, a plurality of vertically stacked storage boxes are arranged on the turntable, a plurality of storage slots adapted to the semiconductor heating plate are opened in a ring shape on the storage box, the storage box is used to store the semiconductor heating plate, after the semiconductor heating plate enters the interior of the box through the circular notch, it can enter one of the storage boxes under the transportation of the conveying component, a supplementary component is arranged inside the box, the supplementary component is used to provide unused storage boxes to the storage component, the supplementary component comprises a supplementary lifting plate, a plurality of unused storage boxes are arranged on the supplementary lifting plate, a transmission component is also arranged on the box, the transmission component can make the supplementary lifting plate rise vertically and the storage lifting plate fall vertically, and a pushing cylinder is fixedly arranged inside the box.

[0008] Preferably, a cross beam is provided above the conveyor, with both ends of the cross beam extending to both sides of the conveyor respectively and fixedly installed on the ground, an industrial camera is fixedly installed on the bottom of the cross beam, a support block is fixedly provided on the side of the conveyor, a push cylinder is fixedly installed on the top of the support block, the output end of the push cylinder is fixedly connected to a push plate, and a switch door is hinged at the front end of the box.

[0009] Preferably, the conveying assembly includes a conveying pipe fixedly arranged inside the box body, the top and bottom ends of the conveying pipe are open, the interior of the conveying pipe is hollow, the top opening of the conveying pipe is fixed inside the circular notch, through openings are opened on both sides of the conveying pipe and close to the bottom thereof, vertical rectangular notches are opened on both sides of the conveying pipe, the through openings are connected with the rectangular notches, an upper moving unit and a lower moving unit are arranged inside the conveying pipe, the upper moving unit is slidably arranged above the lower moving unit, when the upper moving unit catches the semiconductor heating plate, the upper moving unit and the lower moving unit as a whole can move vertically downward, the upper moving unit releases the semiconductor heating plate after running to the through opening position, and the semiconductor heating plate enters one of the storage boxes through the lower moving unit and the bottom opening of the conveying pipe.

[0010] Preferably, the upper moving unit includes two receiving plates symmetrically arranged. The receiving plates are arranged inside the conveying pipe. Circular grooves are formed on the sides of the two receiving plates close to each other. A same spring is arranged between the two receiving plates. One end of the spring is fixedly connected to the groove wall of one of the circular grooves, and the other end of the spring is fixedly connected to the groove wall of the other circular groove. Upper extension rods are fixedly connected to the sides of the two receiving plates away from each other. Moving notches are formed on the upper extension rods. Fixed shafts are fixedly connected to the front and rear sides of the upper extension rods. The ends of the fixed shafts are rotatably connected with movable wheels. The lower moving unit includes a fixed ring arranged inside the conveying pipe. Lower extension rods are fixedly connected to both sides of the fixed ring. The lower extension rods and the upper extension rods penetrate through the corresponding rectangular notches. The bottom of the upper extension rod is slidably connected to the top of the lower extension rod.

[0011] Preferably, the conveying assembly further includes a surrounding plate. The surrounding plate is in a "U" shape. The top of the surrounding plate is fixedly connected to the top wall of the box body. The conveying pipe penetrates through the bottom of the surrounding plate. Two vertical conveying screws are symmetrically and rotatably connected to the surrounding plate. The two conveying screws are respectively on both sides of the conveying pipe. Two conveying motors are fixedly installed on the top of the box body. The output ends of the conveying motors penetrate through the top wall of the box body and are fixedly connected to the corresponding conveying screws. The conveying screws penetrate through the corresponding moving notches and lower extension rods. The conveying screws are threadedly connected to the corresponding lower extension rods. Two slide rail groups are symmetrically arranged on the surrounding plate. Each slide rail group includes two slide rails. The slide rail is composed of a vertical part and an arc part. The bottom of the arc part of the slide rail is fixed to the surrounding plate. The vertical part of the slide rail is fixedly connected to the top of the arc part of the slide rail. The vertical part of the slide rail is fixed to the top of the box body. The slide rails are arranged in one-to-one correspondence with the movable wheels. The movable wheels are arranged in cooperation with the inner sides of the slide rails. The arc part of the slide rail is arranged in cooperation with the through opening.

[0012] Preferably, the storage component includes a right screw rotatably connected inside the box body and a plurality of right guide rods fixedly connected inside the box body. A same storage lifting plate is arranged on the right screw and the right guide rods. The storage lifting plate is threadedly connected to the right screw and slidably connected to the right guide rods. Both the right screw and the right guide rods penetrate through the storage lifting plate. The storage lifting plate can move vertically. A servo motor is fixedly installed at the bottom of the storage lifting plate. The output end of the servo motor penetrates through the storage lifting plate and is fixedly connected to a turntable. The bottom of the turntable is rotatably connected to the top of the storage lifting plate. The diameter of the turntable is the same as the diameter of the storage box. A plurality of electric push rods are fixedly arranged at the bottom of the storage lifting plate and away from the replenishment component. The plurality of electric push rods are arc-shaped and distributed on the outer edge of the turntable.

[0013] Preferably, the supplementary component includes a left screw rotatably connected to the inside of the box and a plurality of left guide rods fixedly connected to the inside of the box; the left screw and the left guide rod are jointly provided with a same supplementary lifting plate; the supplementary lifting plate is threadedly connected to the left screw; the supplementary lifting plate is slidably connected to the left guide rod; the left screw and the left guide rod both penetrate the supplementary lifting plate; the supplementary lifting plate can move vertically; an arc-shaped plate is fixedly connected to the inner bottom of the box; the arc-shaped surface of the arc-shaped plate is adapted to the storage box, and the arc-shaped plate penetrates the supplementary lifting plate.

[0014] Preferably, a mounting block is fixedly provided inside the box, a pushing cylinder is fixedly installed on the top of the mounting block, the output end of the pushing cylinder faces the supplementary lifting plate and is fixedly connected with a pushing piece, a fixing plate is fixedly provided inside the box, a vertical plate is fixedly connected to the bottom of the fixing plate, the vertical plate is fixed to the inner bottom of the box, the fixing plate is arranged in an arc shape close to the side of the storage lifting plate, and a passage gap is opened on the storage lifting plate for the fixing plate to pass through.

[0015] Preferably, the transmission assembly includes a transmission motor fixed to the inner wall of the box body, the output end of the transmission motor passes through the top wall of the box body and is fixedly connected to a driving pulley, the supplementary assembly includes a left screw, the output end of the left screw passes through the top wall of the box body and is fixedly connected to a left pulley and a driven pulley, the storage assembly includes a right screw, the output end of the right screw passes through the top wall of the box body and is fixedly connected to a right pulley, an upper belt is connected between the driving pulley and the driven pulley, and a lower belt is connected between the left pulley and the right pulley.

[0016] A method for detecting appearance defects of a semiconductor heating plate comprises the following steps: S1. Multiple semiconductor heating plates are placed linearly on the conveyor. When the conveyor is running, the multiple semiconductor heating plates are transported in sequence toward the direction of the industrial camera. S2. When the industrial camera detects that the semiconductor heating plate directly below has defects in appearance, the semiconductor heating plate sends a signal to the external control device. When the defective semiconductor heating plate moves to the corresponding push-piece position, the external control device controls the push cylinder to run, and the output end of the push cylinder extends. The output end of the push cylinder drives the push piece to move toward the direction of the box body. The push piece pushes the defective semiconductor heating plate onto the box body and enters the interior of the box body through the circular notch.

[0017] In summary, the technical effects and advantages of the present invention are as follows: 1. In the present invention, the appearance defects of the semiconductor heating plate are detected by an industrial camera. When a defect is detected, a signal can be sent to an external control device. The external control device controls the operation of the push cylinder according to the received signal to push the defective product into a designated box. By setting a conveying component, the conveying pipe conveys the defective semiconductor heating plate to the storage box, so that the defective product can automatically enter the interior of the box, which not only improves the conveying efficiency but also ensures the orderly storage of the products.

[0018] 2. In the present invention, a storage component and a supplementary component are provided. The storage component receives defective semiconductor heating disks, and the semiconductor heating disks are transported to storage boxes on a storage lifting plate. Each storage box is designed with a plurality of storage slots for storing a plurality of semiconductor heating disks. The storage component ensures that the semiconductor heating disks can be accurately placed at designated positions of the storage boxes through the functions of vertical movement and horizontal rotation, and also facilitates subsequent removal and classification management. The supplementary component is responsible for providing unused storage boxes to the storage component, and these storage boxes are stacked vertically on the supplementary lifting plate. When the storage boxes on the storage component are full and need to be supplemented with the next storage box, the supplementary component lifts a new storage box to a suitable position through vertical movement, and smoothly transfers the new storage box to the storage component through the cooperation of mechanisms such as a push cylinder and an electric push rod. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without paying any creative work.

[0020] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention; Figure 2 It is a schematic diagram of the internal structure of the box of the present invention; Figure 3 It is a structural schematic diagram of the conveying assembly of the present invention; Figure 4 It is a structural schematic diagram of the upper moving unit and the lower moving unit of the present invention; Figure 5 It is a partial structural schematic diagram of the present invention; Figure 6 It is a structural schematic diagram of the storage assembly of the present invention; Figure 7 For the present invention Figure 5 Enlarged structural diagram at A in the middle.

[0021] In the figure: 1. conveyor; 2. box; 21. switch door; 22. circular notch; 23. mounting block; 3. conveying assembly; 31. conveying pipe; 311. through port; 32. upper moving unit; 321. receiving plate; 322. upper extension rod; 323. moving notch; 324. fixed shaft; 325. movable wheel; 326. circular groove; 327. spring; 33. lower moving unit; 331. fixed ring; 332. lower extension rod; 34. conveying motor; 35. conveying screw; 36. slide rail; 37. enclosure; 4. storage assembly; 41. storage lifting plate; 42. right Screw rod; 43, right guide rod; 44, turntable; 45, servo motor; 5, supplementary assembly; 51, supplementary lifting plate; 52, left screw rod; 53, left guide rod; 6, transmission assembly; 61, transmission motor; 62, driving pulley; 63, driven pulley; 64, upper belt; 65, left pulley; 66, right pulley; 67, lower belt; 7, pushing cylinder; 71, pushing plate; 8, electric push rod; 9, fixed plate; 10, industrial camera; 11, crossbeam; 12, support block; 13, pushing cylinder; 14, pushing plate; 15, storage box; 16, curved plate. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0023] Example: Reference Figure 1-Figure 7 A semiconductor heating plate appearance defect detection device shown in the figure includes: a conveyor 1, a crossbeam 11 is arranged above the conveyor 1, the two ends of the crossbeam 11 extend to the two sides of the conveyor 1 respectively and are fixedly installed on the ground, an industrial camera 10 is fixedly installed at the bottom of the crossbeam 11, and the industrial camera 10 is a prior art. A support block 12 is fixedly arranged on the side of the conveyor 1, a push cylinder 13 is fixedly installed on the top of the support block 12, and a push piece 14 is fixedly connected to the output end of the push cylinder 13, a box body 2 is fixedly arranged on the side of the conveyor 1, a switch door 21 is hinged at the front end of the box body 2, and a circular notch 22 is opened on the top of the box body 2.

[0024] A plurality of semiconductor heating disks are placed linearly on the conveyor 1. When the conveyor 1 is running, the plurality of semiconductor heating disks are conveyed in the direction of the industrial camera 10 in sequence. When the industrial camera 10 detects that the semiconductor heating disk directly below has defects in appearance, the semiconductor heating disk sends a signal to the external control device. When the defective semiconductor heating disk runs to the position of the corresponding push piece 14, the external control device controls the push cylinder 13 to run, and the output end of the push cylinder 13 extends. The output end of the push cylinder 13 drives the push piece 14 to move in the direction of the box 2. The push piece 14 pushes the defective semiconductor heating disk onto the box 2 and enters the interior of the box 2 through the circular notch 22.

[0025] Detailed steps for the industrial camera 10 to detect that the semiconductor heating plate directly below has appearance defects: the industrial camera 10 captures the image of the semiconductor heating plate directly below through its lens, and the photosensitive sensor inside the industrial camera 10 converts these electrical signals into digital signals after amplification and analog-to-digital conversion, and stores them in the memory of the industrial camera 10. The collected digital image data is transmitted to a computer or image processing system for further processing and analysis. By comparing with preset defect samples or standards, the system can determine whether the semiconductor heating plate has appearance defects. Once the image processing system detects that the semiconductor heating plate has appearance defects, it will send a signal to the external control device.

[0026] The interior of the box body 2 is provided with a conveying component 3 and a storage component 4. The storage component 4 is provided with a plurality of vertically stacked storage boxes 15. The storage boxes 15 are used to store semiconductor heating plates. After the semiconductor heating plate enters the interior of the box body 2 through the circular notch 22, it can enter one of the storage boxes 15 under the conveyance of the conveying component 3.

[0027] The conveying assembly 3 includes a conveying pipe 31 fixedly arranged inside the box body 2, the top and bottom ends of the conveying pipe 31 are open, the interior of the conveying pipe 31 is hollow, the top opening of the conveying pipe 31 is fixed inside the circular notch 22, both sides of the conveying pipe 31 and near the bottom thereof are provided with through openings 311, both sides of the conveying pipe 31 are provided with vertical rectangular notches, the through openings 311 are connected with the rectangular notches, an upper moving unit 32 and a lower moving unit 33 are arranged inside the conveying pipe 31, the upper moving unit 32 is slidably arranged above the lower moving unit 33, when the upper moving unit 32 catches the semiconductor heating disc, the upper moving unit 32 and the lower moving unit 33 can move vertically downward as a whole, the upper moving unit 32 releases the semiconductor heating disc after running to the position of the through opening 311, and the semiconductor heating disc enters one of the storage boxes 15 through the lower moving unit 33 and the bottom opening of the conveying pipe 31; The upper moving unit 32 includes two receiving plates 321 symmetrically arranged. The receiving plates 321 are arranged inside the conveying pipe 31. Circular grooves 326 are formed on the sides of the two receiving plates 321 close to each other. A same spring 327 is arranged between the two receiving plates 321. One end of the spring 327 is fixedly connected to the groove wall of one of the circular grooves 326, and the other end of the spring 327 is fixedly connected to the groove wall of the other circular groove 326. Upper extension rods 322 are fixedly connected to the sides of the two receiving plates 321 away from each other. Moving notches 323 are formed on the upper extension rods 322. Fixed shafts 324 are fixedly connected to the front and rear sides of the upper extension rods 322. The ends of the fixed shafts 324 are rotatably connected with movable wheels 325; The lower moving unit 33 includes a fixed ring 331 arranged inside the conveying pipe 31. Lower extension rods 332 are fixedly connected to both sides of the fixed ring 331. The lower extension rods 332 and the upper extension rods 322 penetrate through the corresponding rectangular notches. The bottom of the upper extension rod 322 is slidably connected to the top of the lower extension rod 332, that is, the upper extension rod 322 and the lower extension rod 332 will not separate during the vertical movement. After the upper moving unit 32 and the lower moving unit 33 vertically move to the position of the through port 311, the upper extension rod 322 and the lower extension rod 332 move relatively; The conveying assembly 3 further includes a surrounding plate 37. The surrounding plate 37 is in a "U" shape. The top of the surrounding plate 37 is fixedly connected to the top wall of the box body 2. The conveying pipe 31 penetrates through the bottom of the surrounding plate 37. Two vertical conveying screws 35 are symmetrically rotatably connected to the surrounding plate 37. The two conveying screws 35 are respectively located on both sides of the conveying pipe 31. Two conveying motors 34 are fixedly installed on the top of the box body 2. The output ends of the conveying motors 34 penetrate through the top wall of the box body 2 and are fixedly connected to the corresponding conveying screws 35. The conveying screws 35 penetrate through the corresponding moving notches 323 and the lower extension rods 332. The conveying screws 35 are threadedly connected to the corresponding lower extension rods 332. Two slide rail groups are symmetrically arranged on the surrounding plate 37. Each slide rail group includes two slide rails 36. The slide rail 36 is composed of a vertical part and an arc part. The bottom of the arc part of the slide rail 36 is fixed to the surrounding plate 37. The vertical part of the slide rail 36 is fixedly connected to the top of the arc part of the slide rail 36. The vertical part of the slide rail 36 is fixed to the top of the box body 2. The slide rails 36 are arranged in one-to-one correspondence with the movable wheels 325. The movable wheels 325 are arranged in cooperation with the inner sides of the slide rails 36. The arc part of the slide rail 36 is arranged in cooperation with the through port 311. When the movable wheels 325 slide from the vertical part of the slide rail 36 to the arc part of the slide rail 36, the arc part of the slide rail 36 presses the corresponding movable wheels 325, so that the two movable wheels 325 move away from each other, and then the two upper extension rods 322 move away from each other.

[0028] After the semiconductor heating plate enters the conveying tube 31, it is received by the two receiving plates 321 in the merged state, and the conveying motor 34 is started. The output end of the conveying motor 34 drives the conveying screw 35 to rotate, so that the lower moving unit 33 moves vertically downward, and the lower moving unit 33 drives the upper moving unit 32 to move vertically downward. The movable wheel 325 slides downward along the inner side of the corresponding slide rail 36. When the movable wheel 325 slides from the vertical part of the slide rail 36 to the arc-shaped part of the slide rail 36, the arc-shaped part of the slide rail 36 squeezes the corresponding movable wheel 325. The two movable wheels 325 move away from each other, the two upper extension rods 322 move away from each other, and then the two receiving plates 321 move away from each other. The receiving plates 321 and the upper extension rods 322 are located outside the conveying tube 31 through the corresponding through openings 311, and the spring 327 is in a stretched state until the distance between the two receiving plates 321 is larger than the size of the semiconductor heating plate. The semiconductor heating plate passes through the distance between the two receiving plates 321, the inner side of the fixing ring 331, and the bottom opening of the conveying tube 31 in turn and enters one of the storage boxes 15.

[0029] A supplementary component 5 is provided inside the box body 2, and a plurality of unused storage boxes 15 are provided on the supplementary component 5. The supplementary component 5 is used to provide unused storage boxes 15 to the storage component 4. The storage box 15 is provided with a plurality of storage slots adapted to the semiconductor heating plate in a ring shape. The storage component 4 includes a right screw 42 rotatably connected to the inside of the box body 2, and a plurality of right guide rods 43 fixedly connected to the inside of the box body 2. The right screw 42 and the right guide rod 43 are jointly provided with the same storage lifting plate 41, and the storage lifting plate 41 is threadedly connected to the right screw 42, and the storage lifting plate 41 is slidably connected to the right guide rod 43, and the right screw 42 , and the right guide rod 43 both penetrate the storage lifting plate 41, and the storage lifting plate 41 can move vertically. A servo motor 45 is fixedly installed at the bottom of the storage lifting plate 41. The output end of the servo motor 45 penetrates the storage lifting plate 41 and is fixedly connected to a turntable 44. The bottom of the turntable 44 is rotatably connected to the top of the storage lifting plate 41. A plurality of vertically stacked storage boxes 15 are arranged on the turntable 44. The diameter of the turntable 44 is the same as that of the storage boxes 15. A plurality of electric push rods 8 are fixedly arranged at the bottom of the storage lifting plate 41 and away from the supplementary component 5. The plurality of electric push rods 8 are distributed in an arc shape on the outer edge of the turntable 44.

[0030] The supplementary assembly 5 includes a left screw rod 52 rotatably connected to the inside of the box body 2 and a plurality of left guide rods 53 fixedly connected to the inside of the box body 2. The left screw rod 52 and the left guide rod 53 are commonly provided with the same supplementary lifting plate 51. The supplementary lifting plate 51 is threadedly connected to the left screw rod 52. The supplementary lifting plate 51 is slidably connected to the left guide rod 53, and the left screw rod 52 and the left guide rod 53 both penetrate the supplementary lifting plate 51. The supplementary lifting plate 51 can move vertically. A plurality of unused storage boxes 15 are arranged on the supplementary lifting plate 51. A transmission assembly 6 is also provided on the box body 2. The transmission assembly 6 can allow the left screw rod 52 and the right screw rod 42 to operate simultaneously, so that the supplementary lifting plate 51 rises vertically and the storage lifting plate 41 falls vertically. An arc plate 16 is fixedly connected to the inner bottom of the box body 2. The arc surface of the arc plate 16 is adapted to the storage box 15, and the arc plate 16 penetrates the supplementary lifting plate 51.

[0031] A mounting block 23 is fixedly provided inside the box body 2, and a pushing cylinder 7 is fixedly installed on the top of the mounting block 23. The output end of the pushing cylinder 7 faces the supplementary lifting plate 51 and is fixedly connected with a pushing piece 71. A fixing plate 9 is fixedly provided inside the box body 2. A vertical plate is fixedly connected to the bottom of the fixing plate 9. The vertical plate is fixed to the bottom of the box body 2. The supplementary lifting plate 51 will not interfere with the fixing plate 9 during vertical movement. The fixing plate 9 is arranged in an arc shape close to the side of the storage lifting plate 41, and a passage gap is opened on the storage lifting plate 41 for the fixing plate 9 to pass through.

[0032] In the initial state, the supplementary lifting plate 51 has a plurality of storage boxes 15, and there is no storage box 15 on the storage lifting plate 41. All the storage boxes 15 on the supplementary lifting plate 51 are in contact with the arc surface of the arc plate 16, and the fixed plate 9 is below the storage lifting plate 41. First, the first storage box 15 is added to the storage lifting plate 41, and the transmission assembly 6 is operated. The transmission assembly 6 can make the left screw 52 and the right screw 42 operate at the same time, so that the supplementary lifting plate 51 rises vertically and the storage lifting plate 41 falls vertically. The supplementary lifting plate 51 rises and the storage lifting plate 41 falls vertically. The height of the descending plate 41 is the thickness of a storage box 15. At this time, except for the storage box 15 at the top on the supplementary lifting plate 51, the other storage boxes 15 are in contact with the arc surface of the arc plate 16, and the outer edge of the turntable 44 is in contact with the arc edge of the fixed plate 9, that is, the fixed plate 9 and the turntable 44 are in the same horizontal plane. The electric push rod 8 is started, and the output end of the electric push rod 8 is extended, and the distance of the extension of the output end of the electric push rod 8 is the thickness of a storage box 15. Then the push cylinder 7 is started, and the output end of the push cylinder 7 is extended to drive the push sheet 7 1 moves in the direction of the supplementary lifting plate 51, and the push piece 71 pushes the top push piece 71 of the supplementary lifting plate 51 in the direction of the storage lifting plate 41, so that the top push piece 71 of the supplementary lifting plate 51 slides through the fixed plate 9, and then slides on the top of the turntable 44, until the supplementary lifting plate 51 stops sliding under the restriction of the output end of the electric push rod 8. The function of the arc plate 16 is to prevent the storage boxes 15 other than the top storage box 15 of the supplementary lifting plate 51 from sliding; after the appearance defect detection work of the semiconductor heating plate starts , the semiconductor heating plate of the supplementary lifting plate 51 passes through the gap between the two receiving plates 321, the inner side of the fixing ring 331, and the bottom opening of the conveying tube 31 in turn into one of the storage slots of the storage box 15, and the conveying motor 34 is started in the opposite direction. The output end of the conveying motor 34 drives the conveying screw 35 to rotate in the opposite direction, so that the upper moving unit 32 and the lower moving unit 33 move vertically upward. The upper moving unit 32 approaches each other under the rebound force of the spring 327 until it is in a merged state, and finally the upper moving unit 32 and the lower moving unit 33 are reset. Figure 3 As shown, the conveying motor 34 is started in the opposite direction and the servo motor 45 is started at the same time. The output end of the servo motor 45 drives the turntable 44 and the storage box 15 on the turntable 44 to rotate until the next storage slot of the same storage box 15 rotates to the corresponding opening position at the bottom end of the conveying tube 31. According to the above method, the second and third semiconductor heating plates fall into the remaining storage slots in turn. After all the storage slots of the above storage boxes 15 are filled, according to the above method, the second storage box 15 is added to the storage lifting plate 41.

[0033] It should be noted that the appearance defect detection of the semiconductor heating plate can be performed only when there is at least one storage box 15 on the storage lifting plate 41 .

[0034] The transmission assembly 6 includes a transmission motor 61 fixed to the inner wall of the box body 2, the output end of the transmission motor 61 passes through the top wall of the box body 2 and is fixedly connected to a driving pulley 62, the output end of the left screw rod 52 passes through the top wall of the box body 2 and is fixedly connected to a left pulley 65 and a driven pulley 63, the output end of the right screw rod 42 passes through the top wall of the box body 2 and is fixedly connected to a right pulley 66, an upper belt 64 is connected between the driving pulley 62 and the driven pulley 63, and a lower belt 67 is connected between the left pulley 65 and the right pulley 66.

[0035] Start the transmission motor 61, and the output end of the transmission motor 61 drives the active pulley 62 to rotate, and the active pulley 62 drives the driven pulley 63 to rotate through the upper belt 64, and the driven pulley 63 drives the left screw 52 and the left pulley 65 on the left screw 52 to rotate, and the left pulley 65 drives the right pulley 66 to rotate through the lower belt 67, and the right pulley 66 drives the right screw 42 to rotate, so that the left screw 52 and the right screw 42 can run at the same time, so that the supplementary lifting plate 51 rises vertically and the storage lifting plate 41 drops vertically.

[0036] Preferably, in order to avoid two consecutive semiconductor heating plates being detected as defective, a plurality of push cylinders 13, push plates 14, and boxes 2 are arranged in the forward direction of the conveyor 1 for processing a plurality of semiconductor heating plates at the same time.

[0037] A method for detecting appearance defects of a semiconductor heating plate comprises the following steps: S1, a plurality of semiconductor heating discs are placed in a linear shape on the conveyor 1, and the conveyor 1 transports the plurality of semiconductor heating discs in sequence toward the direction of the industrial camera 10 when it is running; S2. When the industrial camera 10 detects that the semiconductor heating disk directly below has defects in appearance, the semiconductor heating disk sends a signal to the external control device. When the defective semiconductor heating disk moves to the corresponding push piece 14 position, the external control device controls the push cylinder 13 to run, and the output end of the push cylinder 13 extends. The output end of the push cylinder 13 drives the push piece 14 to move toward the direction of the box body 2. The push piece 14 pushes the defective semiconductor heating disk onto the box body 2 and enters the interior of the box body 2 through the circular notch 22.

[0038] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A semiconductor heating plate appearance defect detection device, comprising: A conveyor, an industrial camera is arranged above the conveyor, a pushing cylinder is fixedly arranged on the side of the conveyor, and the characteristic is that: a box is fixedly arranged on the side of the conveyor, a circular notch is opened on the top of the box, a conveying component and a storage component are arranged inside the box, the storage component comprises a storage lifting plate, a turntable is rotatably connected to the top of the storage lifting plate, the turntable can rotate, a plurality of vertically stacked storage boxes are arranged on the turntable, a plurality of storage slots adapted to semiconductor heating discs are arranged in a ring shape on the storage box, the storage box is used to store the semiconductor heating disc, after the semiconductor heating disc enters the interior of the box through the circular notch, it can enter one of the storage boxes under the transportation of the conveying component, a supplementary component is arranged inside the box, the supplementary component is used to provide unused storage boxes to the storage component, the supplementary component comprises a supplementary lifting plate, a plurality of unused storage boxes are arranged on the supplementary lifting plate, a transmission component is also arranged on the box, the transmission component can make the supplementary lifting plate rise vertically and the storage lifting plate fall vertically, and a pushing cylinder is fixedly arranged inside the box.

2. A semiconductor heating plate appearance defect detection device according to claim 1, characterized in that: A crossbeam is arranged above the conveyor, and both ends of the crossbeam extend to both sides of the conveyor and are fixedly installed on the ground. An industrial camera is fixedly installed at the bottom of the crossbeam. A support block is fixedly arranged on the side of the conveyor, and a push cylinder is fixedly installed on the top of the support block. A push piece is fixedly connected to the output end of the push cylinder, and a switch door is hinged at the front end of the box.

3. A semiconductor heating plate appearance defect detection device according to claim 1, characterized in that: The conveying assembly includes a conveying pipe fixedly arranged inside the box body, the top and bottom ends of the conveying pipe are open, the interior of the conveying pipe is hollow, the top opening of the conveying pipe is fixed inside the circular notch, through openings are opened on both sides of the conveying pipe and close to the bottom thereof, vertical rectangular notches are opened on both sides of the conveying pipe, the through openings are connected with the rectangular notches, an upper moving unit and a lower moving unit are arranged inside the conveying pipe, the upper moving unit is slidably arranged above the lower moving unit, when the upper moving unit catches the semiconductor heating plate, the upper moving unit and the lower moving unit as a whole can move vertically downward, the upper moving unit releases the semiconductor heating plate after running to the through opening position, and the semiconductor heating plate enters one of the storage boxes through the lower moving unit and the bottom opening of the conveying pipe.

4. A semiconductor heating plate appearance defect detection device according to claim 3, characterized in that: The upper movable unit includes two symmetrically arranged receiving plates, which are arranged inside the conveying pipe. The sides of the two receiving plates close to each other are provided with circular grooves. The same spring is arranged between the two receiving plates, one end of the spring is fixedly connected to the groove wall of one of the circular grooves, and the other end of the spring is fixedly connected to the groove wall of the other circular groove. The sides of the two receiving plates away from each other are fixedly connected with upper extension rods, and a movable notch is arranged on the upper extension rod. The front and rear sides of the upper extension rod are fixedly connected with fixed shafts, and the ends of the fixed shafts are rotatably connected with movable wheels; the lower movable unit includes a fixed ring arranged inside the conveying pipe, and the two sides of the fixed ring are fixedly connected with lower extension rods, and the lower extension rod and the upper extension rod both pass through the corresponding rectangular notches, and the bottom of the upper extension rod is slidably connected with the top of the lower extension rod.

5. A semiconductor heating plate appearance defect detection device according to claim 4, characterized in that: The conveying assembly further includes a surrounding plate which is in a "U" shape. The top of the surrounding plate is fixedly connected to the top wall of the box body. The conveying pipe penetrates through the bottom of the surrounding plate. Two vertical conveying screws are symmetrically and rotatably connected to the surrounding plate. The two conveying screws are respectively on both sides of the conveying pipe. Two conveying motors are fixedly installed on the top of the box body. The output end of the conveying motor penetrates through the top wall of the box body and is fixedly connected to the corresponding conveying screw. The conveying screw penetrates through the corresponding moving notch and the lower extension rod, and the conveying screw is threadedly connected to the corresponding lower extension rod. Two slide rail groups are symmetrically arranged on the surrounding plate. Each slide rail group includes two slide rails. The slide rail is composed of a vertical part and an arc part. The bottom of the arc part of the slide rail is fixed to the surrounding plate, and the vertical part of the slide rail is fixedly connected to the top of the arc part of the slide rail. The vertical part of the slide rail is fixed to the top of the box body. The slide rails are arranged in one-to-one correspondence with the movable wheels. The movable wheels are arranged in the inner side of the slide rails in a matching manner. The arc part of the slide rail is arranged in a matching manner with the through opening.

6. The semiconductor heating plate appearance defect detection device according to claim 1, characterized in that: The storage assembly includes a right screw rotatably connected inside the box body and a plurality of right guide rods fixedly connected inside the box body. The same storage lifting plate is arranged on the right screw and the right guide rods. The storage lifting plate is threadedly connected to the right screw and slidably connected to the right guide rods. Both the right screw and the right guide rods penetrate through the storage lifting plate. The storage lifting plate can move vertically. A servo motor is fixedly installed at the bottom of the storage lifting plate. The output end of the servo motor penetrates through the storage lifting plate and is fixedly connected to a turntable. The bottom of the turntable is rotatably connected to the top of the storage lifting plate. The diameter of the turntable is the same as the diameter of the storage box. A plurality of electric push rods are fixedly arranged at the bottom of the storage lifting plate and away from the replenishment assembly. The plurality of electric push rods are arc-shaped and distributed on the outer edge of the turntable.

7. The semiconductor heating plate appearance defect detection device according to claim 1, characterized in that: The replenishment assembly includes a left screw rotatably connected inside the box body and a plurality of left guide rods fixedly connected inside the box body. The same replenishment lifting plate is arranged on the left screw and the left guide rods. The replenishment lifting plate is threadedly connected to the left screw and slidably connected to the left guide rods. Both the left screw and the left guide rods penetrate through the replenishment lifting plate. The replenishment lifting plate can move vertically. An arc-shaped plate is fixedly connected to the inner bottom of the box body. The arc surface of the arc-shaped plate is adapted to the storage box and the arc-shaped plate penetrates through the replenishment lifting plate.

8. The semiconductor heating plate appearance defect detection device according to claim 1, characterized in that: An installation block is fixedly arranged inside the box body. A pushing cylinder is fixedly installed on the top of the installation block. The output end of the pushing cylinder faces the replenishment lifting plate and is fixedly connected to a pushing piece. A fixing plate is fixedly arranged inside the box body. A vertical plate is fixedly connected to the bottom of the fixing plate. The vertical plate is fixed to the inner bottom of the box body. The side surface of the fixing plate close to the storage lifting plate is arc-shaped. A passing notch for the fixing plate to pass through is formed on the storage lifting plate.

9. The semiconductor heating plate appearance defect detection device according to claim 1, characterized in that: The transmission assembly includes a transmission motor fixed to the inner wall of the box body. The output end of the transmission motor penetrates through the top wall of the box body and is fixedly connected to a driving belt pulley. The replenishment assembly includes a left screw. The output end of the left screw penetrates through the top wall of the box body and is fixedly connected to a left belt pulley and a driven belt pulley. The storage assembly includes a right screw. The output end of the right screw penetrates through the top wall of the box body and is fixedly connected to a right belt pulley. A upper belt is connected between the driving belt pulley and the driven belt pulley, and a lower belt is connected between the left belt pulley and the right belt pulley.

10. A method for detecting shape defects of a semiconductor heating plate, using a device for detecting shape defects of a semiconductor heating plate as claimed in any one of claims 1 to 9, characterized in that: Including the following steps: S1. Multiple semiconductor heating plates are placed linearly on the conveyor. When the conveyor is running, the multiple semiconductor heating plates are transported in sequence toward the direction of the industrial camera. S2. When the industrial camera detects that the semiconductor heating plate directly below has defects in appearance, the semiconductor heating plate sends a signal to the external control device. When the defective semiconductor heating plate moves to the corresponding push-piece position, the external control device controls the push cylinder to run, and the output end of the push cylinder extends. The output end of the push cylinder drives the push piece to move toward the direction of the box body. The push piece pushes the defective semiconductor heating plate onto the box body and enters the interior of the box body through the circular notch.

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