Automatic cutting equipment for semiconductor equipment positioning plate

Abstract

The invention relates to semiconductor equipment positioning plate automatic cutting equipment which comprises a workbench, a plurality of feeding rollers are rotationally connected to the workbench, a cutting assembly is arranged on the workbench, a limiting piece is arranged on the workbench and is a positioning plate arranged on the workbench in a sliding mode, and a groove matched with the positioning plate in a sliding mode is formed in the workbench. A lifting assembly for driving the positioning plate to extend out of the groove is arranged in the workbench, and when the plate cannot move under limiting of the positioning plate, the position, needing to be cut, of the plate is located below the cutting assembly. And due to the arrangement of the positioning plate, fixed-length cutting of the plates is achieved, a worker does not need to conduct line drawing operation before each plate is cut, and the overall cutting time is shortened. The plate cutting device has the effect of improving the plate cutting efficiency.

Description

Technical Field

[0001] The present application relates to the technical field of plate cutting, and in particular to an automatic cutting device for positioning plates of semiconductor equipment. Background Art

[0002] Semiconductor equipment usually refers to equipment used to produce semiconductor materials, and the positioning plate is an important component of semiconductor equipment. It is usually used to determine and fix the position of semiconductor elements, wafers or other related components. The positioning plate raw material is usually in the shape of a long strip. In order to ensure the accuracy of the length of the positioning plate, the positioning plate raw material needs to be cut using a cutting device before use to obtain a positioning plate of specific specifications.

[0003] However, in the prior art, when cutting plate-like raw materials, workers are required to draw a cutting line on the surface of the plate according to the required cutting length before cutting, and then manually push the plate to the cutting position. When the saw blade is aligned with the drawn cutting line, the cutting equipment is started to perform the cutting operation. After cutting a plate, the worker needs to measure and mark the cutting line position of the next plate again, and repeat the above pushing and cutting steps.

[0004] Therefore, in conventional plate cutting devices, workers are required to frequently draw lines when cutting each new plate material, which prolongs the overall cutting time of the plate, thereby reducing the cutting efficiency of the plate material, which is an obvious disadvantage. Summary of the invention

[0005] In order to improve the cutting efficiency of plate materials, the present application provides an automatic cutting device for positioning plates of semiconductor equipment.

[0006] The present application provides a semiconductor device positioning plate automatic cutting device that adopts the following technical solutions: An automatic cutting device for positioning plates of semiconductor equipment comprises a workbench, wherein the workbench is divided into a conveying area, a cutting area and a discharging area in sequence along the length direction, wherein a plurality of feeding rollers for conveying plates are rotatably arranged in the conveying area, a cutting assembly for cutting plates is arranged in the cutting area, a limiting member, a discharging assembly and a collecting assembly are arranged in the discharging area, wherein the limiting member limits the length of the plates, and the discharging assembly conveys the cut plates to the collecting assembly; The cutting assembly comprises a gantry arranged on the workbench, a driving cylinder for driving the gantry to lift is arranged on the opposite outer surface of the workbench, a screw is rotatably connected to the gantry, a connecting block is threadedly connected to the screw, a cutting disc is rotatably connected to the connecting block, a cutting motor for driving the cutting disc to rotate is arranged on the connecting block, a sliding groove for slidingly cooperating with the connecting block is opened on the inner side wall of the gantry, and a moving motor for driving the screw to rotate is arranged on the outer surface of the gantry; The limiting member is a positioning plate slidably arranged on the workbench, a groove slidably matched with the positioning plate is provided on the workbench, and a lifting component driving the positioning plate to extend out of the groove is arranged in the unloading area.

[0007] By adopting the above technical scheme, when it is necessary to cut the plate raw material, the plate is first placed on the workbench, and then the feeding roller conveys the plate along the length direction of the workbench. During the conveying process of the plate, the lifting component pushes the positioning plate out of the groove. When the plate cannot move under the limit of the positioning plate, the driving device that drives the feeding roller to rotate is turned off. At this time, the position where the plate needs to be cut is located below the cutting component, and the driving cylinder is started to drive the gantry to move downward, and then the cutting motor is started to drive the cutting disk to rotate, and then the moving motor is started to drive the screw to rotate. The screw rotation drives the cutting disk to move through the connecting block and cuts the plate. After cutting, under the unloading of the unloading component, the cut plate is conveyed to the collecting component, and then the feeding roller continues to start to push the plate to continue moving until the entire plate is cut. The setting of the positioning plate realizes fixed-length cutting of the plate, and there is no need for workers to draw lines before cutting each plate, which shortens the overall cutting time and improves cutting efficiency.

[0008] Optionally, the lifting assembly includes a pushing plate slidably connected to the workbench, and the workbench is provided with mounting plates on both sides of the positioning plate. A first airbag filled with gas is provided on the two mounting plates, and the first airbag is an elastic airbag. The first airbag is provided on the pushing plate at one end away from the mounting plate, and a second airbag connected to the two first airbags through an air pipe is provided inside the groove. When the second airbag is not inflated, the bottom surface of the positioning plate abuts against the surface of the second airbag, and the top surface of the positioning plate is provided inside the groove. When the pushing plate moves to abut against the positioning plate, the cutting position of the plate is set below the cutting assembly, and the first airbag is compressed to the maximum extent.

[0009] By adopting the above technical scheme, the plate enters the unloading area under the transmission of the feeding roller, and as the plate moves, the plate first contacts the pushing plate and pushes the pushing plate to move, and the movement of the pushing plate toward the positioning plate causes the first airbag to be squeezed, and the gas in the first airbag is pressed into the second airbag, and the second airbag gradually expands and pushes the positioning plate out of the groove. When the pushing plate moves to abut against the positioning plate, the cutting position of the plate is just below the cutting component, thereby achieving the limitation of the length of the plate. The setting of the lifting component realizes the lifting and lowering of the positioning plate inside the groove, avoiding the risk of collision, wear and other damage that the positioning plate may suffer when it is directly exposed to the surface of the workbench. At the same time, the state in which the first airbag is compressed to the maximum extent can be used as a feedback signal whether the length of the plate is qualified, which is convenient for the operation of the subsequent unloading component.

[0010] Optionally, multiple unloading rollers are rotatably connected in the unloading area, and the length direction of the unloading rollers is parallel to the width direction of the workbench. The collecting assembly includes a qualified box and a waste box relatively arranged on the outer surface of the workbench, and a transmission cavity and a driving cavity are opened inside the workbench. One end of each of the unloading rollers extends into the transmission cavity and is coaxially provided with a synchronous wheel, and the other end extends into the driving cavity and is coaxially provided with a first gear. A synchronous belt is commonly sleeved on the outer surfaces of the multiple synchronous wheels, and the driving cavity is provided with a rotating assembly and a switching assembly. The rotating assembly is used to drive the unloading roller to rotate, and the switching assembly is used to switch the rotation direction of the rotating assembly.

[0011] By adopting the above technical scheme, if the length of the plate does not meet the cutting length, the pushing plate cannot abut against the positioning plate under the transmission of the feeding roller. At this time, the switching component is closed, and the rotating component starts to drive the unloading roller to rotate toward the waste box direction (forward), and multiple unloading rollers rotate synchronously driven by the synchronous wheel and the synchronous belt. At this time, the unqualified plate is transported to the waste box along the width direction of the workbench; if the length of the plate meets the cutting length, at this time, the pushing plate abuts against the positioning plate, the switching component is turned on, and the switching component changes the rotation direction of multiple unloading rollers to rotate toward the qualified box direction (reverse), and the qualified plate is conveyed to the inside of the qualified box. The setting of the rotating component and the switching component realizes the change of the rotation direction of the unloading roller, and the rotation direction of the unloading roller is automatically changed according to the length of the plate, avoiding the manual classification link caused by the collection of unqualified plates and qualified plates together, thereby further improving the cutting efficiency of the plate.

[0012] Optionally, the rotating assembly includes a screw rod rotatably connected to the driving cavity, a discharge motor driving the screw rod to rotate is arranged on the outer surface of the workbench, a driving block is threadedly connected to the screw rod, a limiting groove for sliding cooperation with the driving block is opened on the inner side wall of the driving cavity, a first rack plate and a second rack plate meshing with the first gear are arranged in the driving cavity, the first rack plate and the second rack plate are relatively arranged on the upper and lower sides of the driving block, and the first rack plate and the second rack plate are both made of iron; An accommodating groove that slidably cooperates with the first rack plate is provided on the inner side wall of the driving cavity, the length direction of the accommodating groove is perpendicular to the length direction of the driving cavity, a first magnetic block that adsorbs and cooperates with the first rack plate is provided on the inner side wall of the accommodating groove, a second magnetic block that adsorbs and cooperates with the first rack plate is embedded in the driving block, and the adsorption force of the first magnetic block is greater than that of the second magnetic block; A fixing groove for slidingly cooperating with the second rack plate is provided on the bottom wall of the driving cavity, a plurality of damping rods are arranged in the fixing groove, and the telescopic ends of the plurality of damping rods abut against the surface of the second rack plate, and a third magnetic block for adsorption cooperating with the second rack plate is embedded in the driving block; When the length of the plate is unqualified, the first rack plate is adsorbed in the accommodating groove by the first magnetic block, the first rack plate is separated from the driving block, the second rack plate is adsorbed on the driving block by the third magnetic block, and the second rack plate is separated from the fixed groove. When the length of the plate is qualified, the switching component switches the connection status of the first rack plate and the second rack plate with the driving block.

[0013] By adopting the above technical solution, when the length of the plate is unqualified, since the adsorption force of the first magnetic block on the first rack plate is greater than that of the second magnetic block, the first rack plate is adsorbed in the accommodating groove and detached from the driving block. At this time, only the second rack plate is connected to the driving block under the adsorption action of the third magnetic block. When unloading, the unloading motor starts and drives the screw rod to rotate. Under the restriction of the restriction groove, the driving block cannot rotate. At this time, the rotation of the screw rod drives the second rack plate to move along the length direction of the driving cavity. During the movement, the second rack plate drives the multiple first gears to rotate in sequence from the lower end faces of the multiple first gears, thereby realizing the rotation of the unloading roller toward the waste box, and the unloading roller transfers the unqualified plates to the waste box. When the length of the plate is qualified, the switching assembly is started, the first rack plate is connected to the driving block, and the second rack plate is separated from the driving block and enters the fixed groove. Since the first rack plate and the second rack plate are arranged relative to each other, when the first rack plate moves in the same direction as the second rack plate, the first rack plate will drive the multiple first gears to rotate in the direction of the qualified box, thereby realizing the reverse rotation of the multiple unloading rollers, and conveying the qualified plates to the qualified box; such a setting realizes the automatic and precise switching of the rotation direction of the unloading rollers, and the classification and unloading operation of the plates can be completed without a complex electronic control system, reducing the subsequent processing troubles caused by misclassification, thereby improving the cutting efficiency of the plates.

[0014] Optionally, a pushing groove connected to the accommodating groove is provided on the inner side wall of the driving cavity, and the switching assembly includes a pushing block slidably connected in the pushing groove, the pushing block is arranged on the first rack plate, and a third airbag is arranged in the pushing groove for driving the pushing block to move toward the driving block. When the third airbag is inflated to the maximum extent, the first rack plate is connected to the driving block through the second magnetic block, and a pressing groove connected to the fixed groove is provided on the inner side wall of the driving cavity, and a fourth airbag is arranged inside the pressing groove. When the fourth airbag is inflated to the maximum extent, the downward thrust generated by the fourth airbag on the second rack plate is greater than the upward supporting force of the damping rod and the third magnetic block on the second rack plate, and the second rack plate is separated from the driving block and embedded in the fixed groove. An inflation assembly for inflating the third airbag and the fourth airbag is provided on the workbench, and the third airbag and the fourth airbag are both elastic airbags.

[0015] By adopting the above technical solution, when the plate is unqualified, the inflation component cannot fully inflate the third airbag and the fourth airbag, and the third airbag cannot push the push block to move to the maximum distance. At this time, the adsorption force of the first magnetic block on the first rack plate is still greater than the adsorption force of the second magnetic block. The first rack plate cannot directly contact and connect with the driving block. At the same time, the fourth airbag cannot generate sufficient downward thrust on the second rack plate. Under the support of the third magnetic block and the damping rod, the second rack plate always remains connected to the driving block. When the plate is qualified, the inflation component inflates the third airbag and the fourth airbag to the maximum expansion state. At this time, the third airbag pushes the push block to the maximum distance, the distance between the first magnetic block and the first rack plate reaches the maximum, the magnetic force of the first magnetic block reaches a critical point less than the second magnetic block, the second magnetic block adsorbs the first rack plate, and the first rack plate is connected to the driving block by the second magnetic block. At the same time, the downward thrust of the fourth airbag on the second rack plate is greater than the upward support force of the damping rod and the third magnetic block on the second rack plate. The second rack plate is embedded in the fixing groove as a whole, and the second rack plate is separated from the driving block under the pressure of the fourth airbag; When the transportation of qualified plates is completed, the third airbag and the fourth airbag are both reset to the compressed state. At this time, the expansion volume of the third airbag is reduced. When the screw drives the driving block to move to the end close to the accommodating groove and the fixed groove, the first magnetic block re-adsorbs the first rack plate into the accommodating groove, and the first rack plate is separated from the driving block. At the same time, the pressure generated by the fourth airbag on the second rack plate is reduced, and the second rack plate moves upward and is connected to the driving block, thereby realizing the reset of the first rack plate and the second rack plate.

[0016] Optionally, the inflation component includes a support frame arranged on the workbench, the support frame is provided with a moving groove that slides together with the positioning plate, a moving plate is slidably connected in the moving groove, a fifth airbag is arranged on the moving plate, the end of the fifth airbag away from the moving plate is arranged on the top wall of the moving groove, the fifth airbag is connected to the third airbag and the fourth airbag through an air supply pipe, and when the two first airbags are compressed to the maximum extent, the fifth airbag is compressed to the maximum extent.

[0017] By adopting the above technical solution, as the plate is pushed, the pushing plate gradually approaches the positioning plate. In this process, the first airbag is gradually compressed, and the second airbag is inflated to drive the positioning plate to extend out of the workbench. At the same time, the positioning plate moves upward along the moving groove and pushes the moving plate to move, and the moving plate gradually squeezes the fifth airbag. When the plate is unqualified, the first airbag cannot reach the critical value of the maximum extrusion state. At this time, the positioning plate cannot rise to the maximum height in the moving groove, so the fifth airbag cannot be fully squeezed, and the gas in the fifth airbag cannot completely enter the third airbag and the fourth airbag through the air supply pipe. Therefore, the third airbag and the fourth airbag are both in an incompletely inflated state, and the switching component will not be triggered; When the plate is qualified, the first airbag reaches the maximum extrusion state, at which time the positioning plate rises to the maximum height in the moving groove, so the fifth airbag reaches the maximum extrusion state, the third airbag and the fourth airbag are fully expanded, and the switching component is running; When the plate leaves the workbench, the thrust on the push plate disappears, and the pressure state of the first airbag disappears. At this time, the first airbag gradually expands under the action of its own elastic force, and the gas in the second airbag flows into the first airbag again. The positioning plate gradually descends, and the fifth airbag expands again under the action of its own elastic force. The gas in the third and fourth airbags flows back to the fifth airbag through the air supply pipe, and the third and fourth airbags shrink, thereby realizing the reset of the first rack plate and the second rack plate. The setting of the inflation component realizes automatic triggering or non-triggering of the switching component based on the compression state of the first airbag. There is no need to additionally configure a complex electronic control detection and control unit to judge the qualification of the plate and control the switching of the rotation direction of the unloading roller, thereby realizing automatic classification of the plate during unloading, thereby improving the cutting efficiency of the plate.

[0018] Optionally, clamping assemblies are provided on opposite sides of the workbench, and the clamping assembly includes a rotating frame arranged on the workbench, a second gear is rotatably connected to the rotating frame, a third rack plate is meshed with one side of the second gear, the third rack plate is slidably connected to the surface of the workbench, a fourth rack plate meshed with the second gear is provided on the gantry, and rubber pads are provided on opposite end faces of the third rack plate.

[0019] By adopting the above technical solution, when it is necessary to cut the plate, the gantry descends and drives the fourth rack plate to move downward. During the descent of the fourth rack plate, the second gear is pushed to rotate, and the second gear pushes the third rack plate to move. During the movement of the third rack plate, the rubber pad gradually abuts against both sides of the plate to fix the plate in the horizontal direction, thereby preventing the plate from shaking left and right during cutting, thereby ensuring the smooth progress of the cutting operation.

[0020] Optionally, a clamping cylinder is provided on the gantry, and a clamping plate is provided on the output shaft of the clamping cylinder.

[0021] By adopting the above technical solution, when the plate is conveyed to the bottom of the cutting assembly, the clamping cylinder is started to drive the clamping plate to move downward until the clamping plate is in close contact with the surface of the plate and exerts a certain pressure to fix the plate. This setting realizes the vertical limitation of the plate when cutting. At the same time, the plate is clamped by the clamping plate so that the uncut plate is fastened in the conveying area, avoiding the plate after cutting from returning to the cutting area during the unloading process, thereby ensuring the smooth progress of subsequent unloading operations.

[0022] In summary, the present application includes at least one of the following beneficial technical effects: 1. This application sets a positioning plate, which realizes the fixed-length cutting of the plate, eliminating the need for workers to draw lines before cutting each plate, thus shortening the overall cutting time and improving the cutting efficiency; 2. The present application sets a discharge assembly, a rotating assembly and a switching assembly. When the plate is unqualified, the switching assembly is closed, and the rotating assembly is started to drive the discharge roller to rotate toward the waste bin (forward), and the discharge roller conveys the unqualified plate to the waste bin; when the length of the plate is qualified, the switching assembly is turned on, and the switching assembly changes the rotation direction of multiple discharge rollers to rotate toward the qualified bin (reverse), and the qualified plate is conveyed to the qualified bin. Such a setting realizes the change of the rotation direction of the discharge roller, avoids the manual classification link caused by the unqualified plates and qualified plates being collected together, and further improves the cutting efficiency of the plate; 3. This application sets up an inflation component, which converts the information on whether the length of the plate meets the standard into a driving source for switching the operation of the component. There is no need to configure a complex electronic control detection and control unit to judge the qualification of the plate and control the switching of the rotation direction of the unloading roller. It realizes automatic classification of the plate during unloading, thereby improving the cutting efficiency of the plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the structure of this application.

[0024] Figure 2 It is a schematic diagram of the structure of the cutting assembly and the clamping assembly in the embodiment of the present application.

[0025] Figure 3 It is a cross-sectional view of the groove in the embodiment of the present application.

[0026] Figure 4 It is a cross-sectional view of the transmission cavity in the embodiment of the present application.

[0027] Figure 5 It is a cross-sectional view of the driving cavity in the embodiment of the present application.

[0028] Figure 6 It is a schematic diagram of the connection between the second rack plate and the driving block in an embodiment of the present application.

[0029] Figure 7 It is a schematic diagram of the first rack plate disengaging from the driving block in the embodiment of the present application.

[0030] Figure 8 It is a schematic diagram of the connection between the first rack plate and the driving block in an embodiment of the present application.

[0031] Fig. 9 It is a schematic diagram of the second rack plate disengaging from the driving block in the embodiment of the present application.

[0032] Description of the accompanying drawings: 1. workbench; 101. conveying area; 1011. feeding roller; 102. cutting area; 103. unloading area; 1031. groove; 2. cutting assembly; 21. gantry; 22. driving cylinder; 23. screw; 24. connecting block; 25. cutting disc; 26. cutting motor; 27. moving motor; 3. positioning plate; 4. lifting assembly; 41. pushing plate; 42. mounting plate; 43. first airbag; 44. second airbag; 45. air pipe; 5. unloading assembly; 51. unloading roller; 52. synchronous wheel; 53. synchronous belt; 54. first gear; 6. collecting assembly; 61. qualified box; 62. waste box; 7. clamping assembly; 71. second gear; 72. The third rack plate; 74, the fourth rack plate; 8, the clamping cylinder; 81, the clamping plate; 9, the transmission chamber; 10, the driving chamber; 11, the rotating assembly; 111, the screw rod; 112, the driving block; 1121, the second magnetic block; 1122, the third magnetic block; 113, the first rack plate; 114, the second rack plate; 12, the switching assembly; 121, the pushing block; 122, the third airbag; 123, the fourth airbag; 13, the accommodating groove; 131, the first magnetic block; 132, the pushing groove; 14, the fixing groove; 141, the damping rod; 142, the pressing groove; 15, the inflatable assembly; 151, the supporting frame; 1511, the moving groove; 152, the moving plate; 153, the fifth airbag; 154, the air supply pipe. DETAILED DESCRIPTION

[0033] The following is combined with Figure 1-9 This application is described in further detail.

[0034] The embodiment of the present application discloses an automatic cutting device for a positioning plate of a semiconductor device.

[0035] Reference Figure 1 and Figure 2 A semiconductor equipment positioning plate automatic cutting device includes a workbench 1 placed on a horizontal plane. The workbench 1 is a rectangular parallelepiped and is used to support a plate. The workbench 1 is divided into a conveying area 101, a cutting area 102 and a unloading area 103 in sequence along the length direction. A plurality of feeding rollers 1011 for conveying the plate are arranged in the conveying area 101. The length directions of the plurality of feeding rollers 1011 are parallel to the width direction of the workbench 1. The plurality of feeding rollers 1011 are rotatably connected to the workbench 1. In the present embodiment, two feeding rollers 1011 are respectively arranged on both sides of the conveying area 101 along the length direction. The driving device for driving the feeding rollers 1011 to rotate is a prior art and will not be described herein.

[0036] Reference Figure 1 and Figure 2A cutting assembly 2 for cutting the plate is provided in the cutting area 102. The cutting assembly 2 includes a gantry 21 slidably connected to the outer surface of the workbench 1. The length direction of the gantry 21 is parallel to the width direction of the workbench 1. Driving cylinders 22 are fixedly installed on the opposite outer surfaces of the workbench 1. The output shaft of each driving cylinder 22 is fixedly connected to the gantry 21. The gantry 21 is rotatably connected to a screw rod 23 along the length direction. A connecting block 24 is threadedly connected to the screw rod 23. A cutting disk 25 is rotatably connected to one end surface of the connecting block 24, and a cutting motor 26 for driving the cutting disk 25 to rotate is fixedly installed on the other end surface. A sliding groove (not shown in the figure) that slidably cooperates with the connecting block 24 is provided on the inner side wall of the gantry 21. The length direction of the sliding groove is parallel to the length direction of the gantry 21. A moving motor 27 is fixedly installed on the outer surface of the gantry 21. The output shaft of the moving motor 27 is coaxially and fixedly connected to the screw rod 23.

[0037] Reference Figure 2 and Figure 3 A limiting member (not shown in the figure) is arranged in the unloading area 103. The limiting member is a positioning plate 3 slidably connected to the workbench 1. A groove 1031 slidably matched with the positioning plate 3 is opened on the workbench 1. The length directions of the positioning plate 3 and the groove 1031 are parallel to the width direction of the workbench 1. A lifting component 4 for driving the positioning plate 3 to extend out of the groove 1031 is arranged in the unloading area 103. When the plate cannot move forward due to the obstruction of the positioning plate 3, the position of the plate to be cut is located directly below the cutting disk 25.

[0038] Reference Figure 1 , Figure 2 and Figure 3 A unloading assembly 5 and a collecting assembly 6 are provided in the unloading area 103. The unloading assembly 5 includes a plurality of unloading rollers 51 rotatably connected to the workbench 1. In the present embodiment, the number of the unloading rollers 51 is three, and the length directions of the three unloading rollers 51 are parallel to the length direction of the workbench 1. The collecting assembly 6 includes a qualified box 61 fixedly connected to the outer surface of the workbench 1, and the qualified box 61 is used to collect the cut plates.

[0039] When the plate material needs to be cut, the plate is first placed on the workbench 1, and then the feeding roller 1011 conveys the plate along the length direction of the workbench 1. During the conveying process of the plate, the lifting component 4 pushes the positioning plate 3 out of the groove 1031. When the plate cannot move under the limit of the positioning plate 3, the driving device driving the feeding roller 1011 to rotate is turned off. At this time, the position of the plate to be cut is located below the cutting component 2; Then, the driving cylinder 22 is started to drive the gantry 21 to move downward, and then the cutting motor 26 is started to drive the cutting disk 25 to rotate, and then the moving motor 27 is started to drive the screw 23 to rotate. Under the limit of the sliding groove, the connecting block 24 cannot rotate, and the screw 23 rotates through the connecting block 24 to drive the cutting disk 25 to move along the width direction of the plate and cut the plate. After cutting, under the unloading of the unloading component 5, the cut plate is conveyed to the qualified box 61, and then the feeding roller 1011 continues to start to push the subsequent plates to continue to move until the entire plate is cut. The setting of the positioning plate 3 realizes the fixed-length cutting of the plate, and there is no need for workers to draw lines before cutting each plate, which shortens the overall cutting time and improves the cutting efficiency.

[0040] Reference Figure 2 and Figure 3 The lifting assembly 4 includes a pushing plate 41 slidably connected to the workbench 1 along the length direction of the unloading area 103. The workbench 1 is fixedly connected to mounting plates 42 on both sides of the positioning plate 3. The thickness of the mounting plate 42 is less than the thickness of the positioning plate 3. The surface of the mounting plate 42 away from the cutting area 102 is flush with the surface of the positioning plate 3 away from the cutting area 102. The two mounting plates 42 are fixedly connected to a first airbag 43 filled with gas. The first airbag 43 is an elastic airbag and is corrugated. The first airbag 43 is away from the cutting area 102. One end of the mounting plate 42 is fixedly connected to the pushing plate 41, and a second airbag 44 is fixedly connected to the inner bottom wall of the groove 1031. The second airbag 44 is connected to the two first airbags 43 through the air tube 45. When the second airbag 44 is not inflated, the bottom surface of the positioning plate 3 abuts against the surface of the second airbag 44, and the top surface of the positioning plate 3 is arranged inside the groove 1031. When the pushing plate 41 moves to abut against the positioning plate 3, the cutting position of the plate is located below the cutting assembly 2, and the first airbag 43 is compressed to the maximum extent.

[0041] The plate enters the unloading area 103 under the transmission of the feeding roller 1011. As the plate moves, the plate first contacts the pushing plate 41 and pushes the pushing plate 41 to move. The movement of the pushing plate 41 toward the positioning plate 3 squeezes the first airbag 43, and the gas in the first airbag 43 is continuously pressed into the second airbag 44. The second airbag 44 gradually expands and lifts the positioning plate 3. The top surface of the positioning plate 3 extends from the groove 1031 to the surface of the workbench 1. When the pushing plate 41 moves to abut against the positioning plate 3, the cutting position of the plate is just below the cutting component 2, thereby achieving the limitation of the length of the plate. The setting of the lifting component 4 realizes the lifting and lowering of the positioning plate 3 in the groove 1031, avoiding the risk of collision, wear and other damage that the positioning plate 3 may suffer when it is directly exposed to the surface of the workbench 1. At the same time, the state in which the first airbag 43 is compressed to the maximum extent can be used as a feedback signal whether the length of the plate is qualified, which is convenient for the subsequent operation of the unloading component 5.

[0042] Reference Figure 2 and Figure 3 In order to improve the stability of the plate during cutting, clamping assemblies 7 are provided on both sides of the workbench 1 along the width direction. The clamping assembly 7 includes a rotating frame (not shown in the figure) fixedly installed on the workbench 1, and a second gear 71 is rotatably connected to the rotating frame. A third rack plate 72 is meshedly provided on the side of the second gear 71 close to the surface of the workbench 1. The third rack plate 72 is slidably connected to the surface of the workbench 1 through the sliding cooperation between the slider and the slide groove. A fourth rack plate 74 meshing with the second gear 71 is fixedly connected to the inner side wall of the gantry 21 along the vertical direction, and the opposite end surfaces of the two third rack plates 72 are fixedly connected to rubber pads (not shown in the figure).

[0043] Reference Figure 2 and Figure 3 A clamping cylinder 8 is fixedly mounted on the outer surface of the gantry 21 , and a clamping plate 81 for clamping a material is fixedly connected to the output shaft of the clamping cylinder 8 .

[0044] When it is necessary to cut the plate, the gantry 21 descends and drives the fourth rack plate 74 to move downward. During the descent of the fourth rack plate 74, the second gear 71 is pushed to rotate, and the second gear 71 drives the third rack plate 72 to move. During the movement of the third rack plate 72, the rubber pad gradually abuts against both sides of the plate to achieve horizontal fixation of the plate to prevent the plate from shaking left and right during cutting. At the same time, the clamping cylinder 8 is started to drive the clamping plate 81 to move downward. The clamping plate 81 is in close contact with the surface of the plate and applies a certain pressure to fix the plate, thereby achieving vertical limitation when cutting the plate and ensuring the smooth progress of the cutting operation.

[0045] When a plate needs to be cut multiple times, the cutting length may not meet the required length specification. For example, a 10 cm long plate may be cut three times to obtain two 3 cm long qualified plates and a 1 cm long unqualified plate. When unloading is required through the unloading area 103, the unloading roller 51 transfers all the plates to the qualified box 61, which causes the subsequent workers to sort the plates in the qualified box 61 again, resulting in reduced cutting efficiency of the plates.

[0046] Reference Figure 4 , Figure 5 and Figure 6 , in order to solve the above technical problems, the collection assembly 6 also includes a waste box 62 for collecting unqualified plates, and the waste box 62 is fixedly connected to the outer side wall of the workbench 1 away from the qualified box 61; A transmission cavity 9 and a drive cavity 10 are provided inside the workbench 1 located in the unloading area 103. The length directions of the drive cavity 10 and the transmission cavity 9 are parallel to the width direction of the workbench 1. One end of each unloading roller 51 extends into the transmission cavity 9 and is coaxially fixedly connected with a synchronous wheel 52, and the other end extends into the drive cavity 10 and is coaxially provided with a first gear 54. Multiple synchronous wheels 52 are rotatably arranged in the transmission cavity 9, and a synchronous belt 53 is fixedly sleeved on the outer surface of multiple synchronous wheels 52. Under the transmission of the synchronous wheel 52 and the synchronous belt 53, the rotation of one of the unloading rollers 51 drives the synchronous belt 53 to drive the remaining unloading rollers 51 to rotate. A rotating component 11 and a switching component 12 are provided in the driving cavity 10. The rotating component 11 is used to drive the unloading roller 51 to rotate, and the switching component 12 is used to switch the rotation direction of the rotating component 11.

[0047] If the length of the plate does not meet the cutting length, the push plate 41 cannot abut against the positioning plate 3 under the transmission of the feeding roller 1011. At this time, the switching component 12 is closed, and the rotating component 11 starts to drive the discharge roller 51 to rotate toward the waste box 62 (forward). The multiple discharge rollers 51 rotate synchronously under the drive of the synchronous wheel 52 and the synchronous belt 53. At this time, the unqualified plate is transported to the waste box 62 along the width direction of the workbench 1; if the length of the plate meets the cutting length, the push plate 41 abuts against the positioning plate 3, and the switching component 12 is turned on. The switching component 12 changes the rotation direction of the multiple discharge rollers 51 to rotate toward the qualified box 61 (reverse). At this time, the qualified plate is conveyed to the inside of the qualified box 61. The setting of the rotating component 11 and the switching component 12 realizes the change of the rotation direction of the discharge roller 51, avoids the manual classification caused by the collection of unqualified plates and qualified plates together, thereby further improving the cutting efficiency of the plate.

[0048] Reference Figure 4 , Figure 5 and Figure 6 The rotating assembly 11 includes a screw rod 111 rotatably connected to the driving chamber 10, and a discharge motor (not shown in the figure) for driving the screw rod 111 to rotate is fixedly connected to the outer surface of the workbench 1, and the length direction of the screw rod 111 is parallel to the length direction of the driving chamber 10. A driving block 112 is threadedly connected to the screw rod 111, and the driving block 112 is a square block. A limiting groove (not shown in the figure) for sliding cooperation with the driving block 112 is opened on the inner side wall of the driving chamber 10. A first rack plate 113 and a second rack plate 114 engaged with the first gear 54 are provided in the driving chamber 10. The first rack plate 113 and the second rack plate 114 are relatively arranged on the upper and lower sides of the driving block 112, the first rack plate 113 is engaged with the upper end faces of the plurality of first gears 54, and the second rack plate 114 is engaged with the lower end faces of the plurality of first gears 54. The first rack plate 113 and the second rack plate 114 are both made of iron.

[0049] Reference Figures 6 to 9 The inner wall of the driving cavity 10 is provided with a receiving groove 13 that is slidably matched with the first rack plate 113. The length direction of the receiving groove 13 is parallel to the length direction of the workbench 1. The receiving groove 13 is located on the outer side of the outermost first gear 54. A first magnetic block 131 that is adsorbed and matched with the first rack plate 113 is fixedly connected to the inner wall of the receiving groove 13. The outer surface of the driving block 112 close to the receiving groove 13 is embedded with a second magnetic block 1121 that is adsorbed and matched with the first rack plate 113. When the first rack plate 113 is set in the receiving groove 13, the first magnetic block 131 adsorbs the first rack plate 113. The attachment force is greater than the adsorption force of the second magnetic block 1121 on the first rack plate 113. A push groove 132 connected to the receiving groove 13 is provided on the inner wall of the driving cavity 10. The length direction of the push groove 132 is parallel to the length direction of the receiving groove 13. The switching component 12 includes a push block 121 slidably connected in the push groove 132. The push block 121 is fixedly connected to the first rack plate 113. A third airbag 122 for driving the push block 121 to move toward the drive block 112 is fixedly connected on the inner wall of the push groove 132 away from the drive block 112. The third airbag 122 is an elastic airbag. In the initial state, the first rack plate 113 is adsorbed in the receiving groove 13 by the first magnetic block 131, and the first rack plate 113 is separated from the driving block 112. When the third airbag 122 is inflated to the maximum extent, the third airbag 122 pushes the first rack plate 113 out of the receiving groove 13 through the pushing block 121. The adsorption force of the second magnetic block 1121 on the first rack plate 113 is greater than the adsorption force of the first magnetic block 131 on the first rack plate 113. The first rack plate 113 is connected to the driving block 112 through the second magnetic block 1121.

[0050] Reference Figures 6 to 9 A fixing groove 14 that is slidably matched with the second rack plate 114 is provided on the inner bottom wall of the driving chamber 10, and the length direction of the fixing groove 14 is parallel to the length direction of the driving chamber 10. A plurality of damping rods 141 are fixedly connected to the inner bottom wall of the fixing groove 14, and the telescopic ends of the plurality of damping rods 141 abut against the surface of the second rack plate 114. A third magnetic block 1122 that is adsorbed and matched with the second rack plate 114 is embedded on the end surface of the driving block 112 facing the second rack plate 114. A pressing groove 142 that is connected with the fixing groove 14 is provided on the inner side wall of the driving chamber 10, and a fourth airbag 123 is fixedly connected to the inner side wall of the pressing groove 14 away from the fixing groove 14, and the fourth airbag 123 is an elastic airbag; In the initial state, the damping rod 141 is in a normal state, the second rack plate 114 is adsorbed on the driving block 112 by the third magnetic block 1122, and the second rack plate 114 is separated from the fixed groove 14. When the fourth airbag 123 is inflated to the maximum extent, the downward thrust generated by the fourth airbag 123 on the second rack plate 114 is greater than the upward supporting force of the damping rod 141 and the third magnetic block 1122 on the second rack plate 114. The second rack plate 114 is separated from the driving block 112 and embedded in the fixed groove 14. An inflation component 15 for inflating the third airbag 122 and the fourth airbag 123 is provided on the workbench 1.

[0051] Reference Figure 7 , Figure 8 and Fig. 9 The inflatable component 15 includes a support frame 151 fixedly connected to the workbench 1, a moving groove 1511 for slidingly matching the positioning plate 3 is provided in the support frame 151, a moving plate 152 is slidably connected in the moving groove 1511, a fifth airbag 153 is fixedly connected to the surface of the moving plate 152 away from the positioning plate 3, the fifth airbag 153 is filled with gas and is an elastic airbag, the end of the fifth airbag 153 away from the moving plate 152 is fixedly connected to the top wall of the moving groove 1511, the fifth airbag 153 is connected to the third airbag 122 and the fourth airbag 123 through the air supply pipe 15445, and when the two first airbags 43 are compressed to the maximum extent, the fifth airbag 153 is compressed to the maximum extent; As the plate is pushed, the pushing plate 41 gradually approaches the positioning plate 3. In this process, the first airbag 43 is gradually compressed, and the second airbag 44 is inflated to drive the positioning plate 3 to extend out of the workbench 1. At the same time, the positioning plate 3 moves upward along the moving groove 1511 and pushes the moving plate 152 to move. The moving plate 152 gradually squeezes the fifth airbag 153. The pressure of the fifth airbag 153 increases as the positioning plate 3 rises. The gas in the fifth airbag 153 gradually enters the third airbag 122 and the fourth airbag 123 along the air delivery pipe 15445. Reference Figure 6 to Figure 7When the length of the plate is unqualified, the pushing plate 41 cannot move to the state of abutting against the positioning plate 3, and the first airbag 43 cannot reach the critical value of the maximum extrusion state. At this time, the positioning plate 3 cannot rise to the maximum height in the moving groove 1511, so the fifth airbag 153 cannot be fully squeezed, and the gas in the fifth airbag 153 cannot all enter the third airbag 122 and the fourth airbag 123 through the air supply pipe 15445. Therefore, the third airbag 122 and the fourth airbag 123 are both in an incompletely inflated state. The third airbag 122 cannot push the pushing block 121 to move to the maximum distance, and the pushing block 121 cannot drive the first rack plate 113 to move to the maximum distance. Since the adsorption force of the first magnetic block 131 on the first rack plate 113 is greater than that of the second magnetic block 1121, the first rack plate 113 is adsorbed in the accommodating groove 13 and away from the driving block 11 2. At the same time, the fourth airbag 123 cannot generate sufficient downward thrust on the second rack plate 114. Under the support of the third magnetic block 1122 and the damping rod 141, the second rack plate 114 always maintains a state of being connected to the driving block 112. At this time, only the second rack plate 114 is connected to the driving block 112 under the adsorption action of the third magnetic block 1122. When unqualified plates are unloaded, the unloading motor starts and drives the screw rod 111 to rotate. Under the restriction of the limiting groove, the driving block 112 cannot rotate. At this time, the screw rod 111 rotates to drive the second rack plate 114 to move along the length direction of the driving cavity 10. During the movement, the second rack plate 114 drives the multiple first gears 54 to rotate in sequence from the lower end face of the gear, thereby realizing the rotation of the unloading roller 51 toward the waste bin 62, and the unloading roller 51 transfers the unqualified plates to the waste bin 62. Reference Figure 8 and Fig. 9When the length of the plate is qualified, the pushing plate 41 finally moves to abut against the positioning plate 3. At this time, the first airbag 43 is compressed to the maximum extent, and the gas in the first airbag 43 all enters the second airbag 44. The second airbag 44 pushes the positioning plate 3 to rise to the maximum height in the moving groove 1511. Therefore, the fifth airbag 153 reaches the maximum extrusion state, and the third airbag 122 and the fourth airbag 123 are fully expanded. At this time, the third airbag 122 pushes the pushing block 121 to the maximum distance, and the first rack plate 113 is separated from the accommodating groove 13. The distance between the first magnetic block 131 and the first rack plate 113 reaches the maximum, and the magnetic force of the first magnetic block 131 reaches a critical point less than the second magnetic block 1121. The second magnetic block 1121 adsorbs the first rack plate 113, and the first rack plate 113 is connected to the second magnetic block 1121 On the driving block 112, at the same time, the downward thrust of the fourth airbag 123 on the second rack plate 114 is greater than the upward supporting force of the damping rod 141 and the third magnetic block 1122 on the second rack plate 114, and the second rack plate 114 is integrally embedded in the fixed groove 14. The second rack plate 114 is separated from the driving block 112 under the pressure of the fourth airbag 123. When the qualified plate is unloaded, the unloading motor starts and drives the screw rod 111 to rotate. The rotation of the screw rod 111 drives the first rack plate 113 to move in the same direction as the second rack plate 114. During the movement, the first rack plate 113 drives the multiple first gears 54 to rotate in sequence from the upper end surface of the first gear 54, thereby realizing the rotation of the unloading roller 51 toward the qualified box 61, and the unloading roller 51 transfers the qualified plate to the qualified box 61; During the unloading process of the plate, the unloaded plate cannot retreat under the limit of the cutting plate at the rear, thereby preventing the unloaded plate from leaving the unloading area 103 during the unloading process, ensuring the stability of the compressed state of the fifth airbag 153. When the plate leaves the workbench 1, the thrust exerted on the push plate 41 disappears, and the compressed state of the first airbag 43 disappears. At this time, the first airbag 43 gradually expands under the action of its own elastic force, and the gas in the second airbag 44 flows into the first airbag 43 again. The positioning plate 3 gradually descends, and the fifth airbag 153 expands again under the action of its own elastic force. The gas in the third airbag 122 and the fourth airbag 123 is discharged through the air supply pipe 1 5445 flows back into the fifth airbag 153, the third airbag 122 and the fourth airbag 123 retract, and then the unloading motor drives the screw rod 111 to reverse, when the screw rod 111 drives the driving block 112 to move to the end close to the receiving groove 13 and the fixed groove 14, the first magnetic block 131 re-adsorbs the first rack plate 113 into the receiving groove 13, and the first rack plate 113 is separated from the driving block 112. At the same time, the pressure generated by the fourth airbag 123 on the second rack plate 114 is reduced, and the second rack plate 114 moves upward to separate from the fixed groove 14 and connect with the driving block 112, thereby realizing the reset of the first rack plate 113 and the second rack plate 114; After the first rack plate 113 and the second rack plate 114 are reset, the driving cylinder 22 drives the gantry 21 to move upward, the clamping assembly 7 cancels the clamping of the plate, and at the same time the clamping cylinder 8 drives the clamping plate 81 to move upward, and then the feeding roller 1011 is started to continue to convey the next section of the plate.

[0052] Such an arrangement realizes automatic triggering or non-triggering of the switching component 12 based on the compression state of the first airbag 43, without the need for additional configuration of a complex electronic control detection and control unit to determine the qualification of the plate and control the rotation direction switching of the unloading roller 51, thereby realizing automatic classification of the plate during unloading, thereby improving the cutting efficiency of the plate.

[0053] The implementation principle of the automatic cutting device for the positioning plate of a semiconductor device in the embodiment of the present application is as follows: when it is necessary to cut the plate material, the plate is first placed on the workbench 1, and then the feeding roller 1011 conveys the plate along the length direction of the workbench 1. During the conveying process of the plate, the lifting component 4 pushes the positioning plate 3 out of the groove 1031. When the plate cannot move under the limit of the positioning plate 3, the driving device driving the feeding roller 1011 to rotate is turned off. At this time, the position of the plate to be cut is located below the cutting component 2; Then, the driving cylinder 22 is started to drive the gantry 21 to move downward, and then the cutting motor 26 is started to drive the cutting disk 25 to rotate, and then the moving motor 27 is started to drive the screw 23 to rotate. Under the limit of the sliding groove, the connecting block 24 cannot rotate, and the screw 23 rotates through the connecting block 24 to drive the cutting disk 25 to move along the width direction of the plate and cut the plate. After cutting, under the unloading of the unloading component 5, the cut plate is conveyed to the qualified box 61, and then the feeding roller 1011 continues to start to push the subsequent plates to continue to move until the entire plate is cut. The setting of the positioning plate 3 realizes the fixed-length cutting of the plate, and there is no need for workers to draw lines before cutting each plate, which shortens the overall cutting time and improves the cutting efficiency.

[0054] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. An automatic cutting device for semiconductor device positioning plate, comprising a workbench (1), characterized in that: The workbench (1) is divided into a conveying area (101), a cutting area (102) and a discharging area (103) in sequence along the length direction; a plurality of feeding rollers (1011) for conveying plates are rotatably arranged in the conveying area (101); a cutting assembly (2) for cutting plates is arranged in the cutting area (102); a limiting member, a discharging assembly (5) and a collecting assembly (6) are arranged in the discharging area (103); the limiting member limits the length of the plates; and the discharging assembly (5) conveys the cut plates to the collecting assembly (6); The cutting assembly (2) comprises a gantry (21) arranged on the workbench (1); a driving cylinder (22) for driving the gantry (21) to rise and fall is arranged on the opposite outer surface of the workbench (1); a screw rod (23) is rotatably connected to the gantry (21); a connecting block (24) is threadedly connected to the screw rod (23); a cutting disc (25) is rotatably connected to the connecting block (24); a cutting motor (26) for driving the cutting disc (25) to rotate is arranged on the connecting block (24); a sliding groove for slidingly cooperating with the connecting block (24) is provided on the inner side wall of the gantry (21); and a moving motor (27) for driving the screw rod (23) to rotate is arranged on the outer surface of the gantry (21); The limiting member is a positioning plate (3) slidably arranged on the workbench (1); a groove (1031) slidably matched with the positioning plate (3) is provided on the workbench (1); and a lifting component (4) is provided in the unloading area (103) for driving the positioning plate (3) to extend out of the groove (1031).

2. The automatic cutting device for semiconductor device positioning plate according to claim 1, characterized in that: The lifting assembly (4) includes a pushing plate (41) slidably connected to the workbench (1), and the workbench (1) is provided with mounting plates (42) on both sides of the positioning plate (3), and the two mounting plates (42) are provided with first air bags (43) filled with gas, and the first air bags (43) are elastic air bags, and the end of the first air bags (43) away from the mounting plates (42) is arranged on the pushing plate (41), and the second air bags (44) connected to the two first air bags (43) through the air pipe (45) are arranged inside the groove (1031), when the second air bags (44) are not inflated, the bottom surface of the positioning plate (3) abuts against the surface of the second air bags (44), and the top surface of the positioning plate (3) is arranged inside the groove (1031), when the pushing plate (41) moves to abut against the positioning plate (3), the cutting position of the plate is set below the cutting assembly (2), and the first air bags (43) are compressed to the maximum extent.

3. The automatic cutting device for semiconductor device positioning plate according to claim 1, characterized in that: A plurality of discharge rollers (51) are rotatably connected in the discharge area (103), the length direction of the discharge rollers (51) being parallel to the width direction of the workbench (1), the collecting assembly (6) comprising a qualified box (61) and a waste box (62) arranged on the outer surface of the workbench (1) relative to each other, a transmission chamber (9) and a drive chamber (10) being provided inside the workbench (1), one end of each of the discharge rollers (51) extending into the transmission chamber (9) and being coaxially provided with a synchronous wheel (52), and the other end extending into the drive chamber (10) and being coaxially provided with a first gear (54), a synchronous belt (53) being commonly sleeved on the outer surfaces of the plurality of synchronous wheels (52), the drive chamber (10) being provided with a rotating assembly (11) and a switching assembly (12), the rotating assembly (11) being used for driving the discharge rollers (51) to rotate, and the switching assembly (12) being used for switching the rotation direction of the rotating assembly (11).

4. The automatic cutting device for semiconductor device positioning plate according to claim 3, characterized in that: The rotating assembly (11) comprises a screw rod (111) rotatably connected to the driving chamber (10); a discharge motor for driving the screw rod (111) to rotate is arranged on the outer surface of the workbench (1); a driving block (112) is threadedly connected to the screw rod (111); a limiting groove for slidingly matching the driving block (112) is provided on the inner side wall of the driving chamber (10); a first rack plate (113) and a second rack plate (114) meshing with the first gear (54) are arranged in the driving chamber (10); the first rack plate (113) and the second rack plate (114) are arranged on the upper and lower sides of the driving block (112) relatively to each other; the first rack plate (113) and the second rack plate (114) are both made of iron; The inner wall of the driving cavity (10) is provided with a receiving groove (13) which is slidably matched with the first rack plate (113); the length direction of the receiving groove (13) is perpendicular to the length direction of the driving cavity (10); the inner wall of the receiving groove (13) is provided with a first magnetic block (131) which is adsorbed and matched with the first rack plate (113); the driving block (112) is embedded with a second magnetic block (1121) which is adsorbed and matched with the first rack plate (113); the adsorption force of the first magnetic block (131) is greater than that of the second magnetic block (1121); A fixing groove (14) is provided on the inner bottom wall of the driving cavity (10) and is slidably matched with the second rack plate (114); a plurality of damping rods (141) are arranged in the fixing groove (14); the telescopic ends of the plurality of damping rods (141) are in contact with the surface of the second rack plate (114); and a third magnetic block (1122) is embedded in the driving block (112) and is adsorbed and matched with the second rack plate (114); When the length of the plate is unqualified, the first rack plate (113) is adsorbed by the first magnetic block (131) in the accommodating groove (13), the first rack plate (113) is separated from the driving block (112), the second rack plate (114) is adsorbed on the driving block (112) by the third magnetic block (1122), the second rack plate (114) is separated from the fixing groove (14), and when the length of the plate is qualified, the switching component (12) switches the connection state between the first rack plate (113) and the second rack plate (114) and the driving block (112).

5. The automatic cutting device for semiconductor device positioning plate according to claim 4, characterized in that: The inner wall of the driving chamber (10) is provided with a pushing groove (132) which is connected to the accommodating groove (13); the switching assembly (12) comprises a pushing block (121) which is slidably connected to the pushing groove (132); the pushing block (121) is arranged on the first rack plate (113); a third airbag (122) which drives the pushing block (121) to move toward the driving block (112) is arranged in the pushing groove (132); when the third airbag (122) is inflated to the maximum extent, the first rack plate (113) is connected to the driving block (112) via the second magnetic block (1121); the inner wall of the driving chamber (10) is provided with a pressure sensor which is connected to the fixing groove (14); A groove (142) is formed in the pressure groove (142), a fourth airbag (123) is arranged inside the pressure groove (142), when the fourth airbag (123) is inflated to the maximum extent, the downward thrust generated by the fourth airbag (123) on the second rack plate (114) is greater than the upward supporting force of the damping rod (141) and the third magnetic block (1122) on the second rack plate (114), the second rack plate (114) is separated from the driving block (112) and embedded in the fixing groove (14), an inflation component (15) for inflating the third airbag (122) and the fourth airbag (123), the third airbag (122) and the fourth airbag (123) are both elastic airbags.

6. The automatic cutting device for semiconductor device positioning plate according to claim 5, characterized in that: The inflation component (15) includes a support frame (151) arranged on the workbench (1), and a movable groove (1511) is provided in the support frame (151) for slidingly matching the positioning plate (3), and a movable plate (152) is slidably connected in the movable groove (1511), and a fifth airbag (153) is arranged on the movable plate (152), and the end of the fifth airbag (153) away from the movable plate (152) is arranged on the inner top wall of the movable groove (1511), and the fifth airbag (153) is connected to the third airbag (122) and the fourth airbag (123) through an air supply pipe (154) (45). When the two first airbags (43) are compressed to the maximum extent, the fifth airbag (153) is compressed to the maximum extent.

7. The automatic cutting device for semiconductor device positioning plate according to claim 1, characterized in that: The workbench (1) is provided with clamping assemblies (7) on opposite sides, and the clamping assembly (7) comprises a rotating frame arranged on the workbench (1), and a second gear (71) is rotatably connected to the rotating frame, and a third rack plate (72) is meshed with one side of the second gear (71), and the third rack plate (72) is slidably connected to the surface of the workbench (1), and a fourth rack plate (74) meshed with the second gear (71) is arranged on the gantry (21), and the opposite end faces of the third rack plate (72) are provided with rubber pads.

8. The automatic cutting device for semiconductor device positioning plate according to claim 1, characterized in that: A clamping cylinder (8) is provided on the gantry (21), and a clamping plate (81) is provided on the output shaft of the clamping cylinder (8).

Images