Cutting assembly of integrated circuit chip

Abstract

The invention discloses a cutting assembly of an integrated circuit chip, and relates to the technical field of chip processing, the cutting assembly comprises a cutting box body, and further comprises a cutting mechanism, a polishing mechanism, a reciprocating mechanism and a filtering mechanism, the cutting mechanism comprises a translation frame and a motor frame, the two ends of the translation frame are fixedly installed on the left side wall and the right side wall in the cutting box body through bolts. The cutting grinding wheel is driven to rotate to cut an integrated circuit chip, meanwhile, the shaft sleeve is driven to rotate so as to polish the edge of the chip cut by the cutting grinding wheel, the movable frame is driven to drive the shaft sleeve to reciprocate on the wheel shaft, and the shaft sleeve drives the polishing wheel to reciprocate while rotating, so that the edge of the chip is polished. And the rotating arm drives the wheel shaft to rotate, so that the bottom end of the shaft sleeve can be attached to the surface of the wafer in a self-adaptive mode, and the cutting assembly can be suitable for wafers of different thicknesses.

Description

Technical Field

[0001] The invention relates to the technical field of chip processing, in particular to a cutting assembly for an integrated circuit chip. Background Art

[0002] The manufacture of integrated circuit chips is a complex and delicate process involving many key process steps, such as cleaning, photolithography, etching, ion implantation, metallization, cutting, etc. These processes play a vital role in the performance and reliability of the chip. The Chinese patent application with application number 202320568851.0 discloses "a cutting component for integrated circuit chips, belonging to the field of circuit chip processing, a cutting component for integrated circuit chips, including a working platform, a working frame is arranged on the top of the working platform, and a cutting component storage is installed on the top of the working platform and on the inner side of the working frame. A rack, a plurality of installation bins are arranged on the top of the working platform and on one side of the cutting component storage rack, a cutting gun is arranged on the inner side of the cutting component storage rack, an air supply cylinder is arranged on the top of the working rack, an inner bin is arranged on the inner side of the working rack and near the top, a blower mechanism is arranged on the inner side of the inner bin, and the blower mechanism is used to change the position of the wind force of the air supply cylinder; it can remove the residual dirt on it by wind gas, avoid the phenomenon that cleaning such as brush or liquid causes damage to the chip, so as to remove the residue on the surface of the circuit chip efficiently, safely and environmentally friendly, and improve the performance and life of the circuit chip.

[0003] This technical solution only solves the problem that the brush easily scratches and damages the chip surface. The cutting of integrated circuit chips is an important link in the semiconductor manufacturing process. It mainly cuts the entire wafer of the chip into single chip grains according to the chip size. Mechanical cutting is usually adopted, using physical tools such as diamond blades or grinding wheel slicers to cut the wafer by high-speed rotation or movement. However, burrs are easily generated on the cut edges, and during the cutting process, cooling nozzles are required to supply water to cool the blades and remove the heat generated at the cutting point, while removing pollutants and silicon powder particles generated during the cutting process. Therefore, a large amount of cooling water is required during the cutting process, resulting in large water resource consumption in production. Summary of the invention

[0004] The object of the present invention is to provide a cutting assembly for integrated circuit chips to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solution: a cutting assembly for integrated circuit chips, comprising a cutting box, a cutting mechanism, a grinding mechanism, a reciprocating mechanism and a filtering mechanism:

[0006] The cutting mechanism comprises a translation frame and a motor frame. Both ends of the translation frame are fixedly mounted on the left and right side walls of the cutting box by bolts. There are two motor frames, both of which are mounted inside the translation frame by sliding movement.

[0007] The grinding mechanism comprises a fixed frame, a connecting frame and a wheel frame, wherein the fixed frame is fixedly mounted on one side of the motor frame near the middle of the translation frame by bolts, the connecting frame is movably arranged at the bottom end of the fixed frame, and the wheel frame is fixedly mounted on the bottom end of the connecting frame by bolts;

[0008] A reciprocating mechanism, the reciprocating mechanism comprising a movable frame, the movable frame being movably arranged inside the wheel frame;

[0009] The filter mechanism comprises a filter box, and the filter box is fixedly installed at the inner bottom end of the filter box by bolts.

[0010] Preferably, the cutting mechanism includes a translation slot, a translation block, a translation rack, a translation gear and a translation motor, there are two translation slots in total and they are respectively opened at the two ends of the translation frame, there are two translation blocks in total and they are respectively installed in the two translation slots by sliding movements, the two translation blocks are respectively fixedly installed in the middle of one side of the two motor frames close to the translation frame by bolts, there are two translation racks in total and one end away from the translation frame is respectively fixedly installed at the top and bottom ends of the two motor frames close to the translation frame by bolts, the translation gear is movably installed in the middle of the front side of the translation frame through a bearing, the translation motor is fixedly installed in the middle of the rear side of the translation frame by bolts, and the output shaft of the translation motor is fixedly connected to the translation gear by bolts.

[0011] Preferably, the cutting mechanism includes a cutting motor, a protective cover, a cutting grinding wheel and a water spray pipe. There are two cutting motors and they are respectively fixedly installed on one end of the two motor frames away from the translation frame by insertion. There are two protective covers and they are respectively fixedly installed on the opposite sides of the two motor frames by bolts. There are two cutting grinding wheels and they are respectively fixedly sleeved on the output shafts of the two cutting motors by bolts and are respectively located in the two protective covers. There are two water spray pipes and they are respectively fixedly installed on one end of the two motor frames close to the translation frame by bolts.

[0012] Preferably, the grinding mechanism includes a movable groove, a movable block, a spring rod and a return spring, the movable groove is opened at the top of the fixed frame, the movable block is installed in the movable groove by sliding, one end of the spring rod close to the movable block is fixed by bolts in the middle of one side of the movable block close to the translation frame, one end of the spring rod close to the translation frame is installed in the movable groove close to the translation frame by insertion, and the return spring is movably sleeved on the spring rod.

[0013] Preferably, the grinding mechanism includes a lifting rod, a wheel axle, an axle groove and a shaft sleeve, the lifting rod is movably installed inside the movable block by insertion, the connecting frame is fixed to the bottom end of the lifting rod by bolts, the two ends of the wheel axle are movably installed at the bottom end of the wheel frame through bearings, the axle groove is opened in the middle of the wheel axle, and the shaft sleeve is movably connected to the wheel axle.

[0014] Preferably, the grinding mechanism includes an axis plate, a grinding wheel, a rotating arm and a first transmission belt, the axis plate is fixedly installed in the middle of the axis sleeve by bolts, and is movably installed in the axis plate by insertion, the grinding wheel is fixedly sleeved in the middle of the axis sleeve by bolts, the bottom end of the rotating arm is movably sleeved on the bottom end of the wheel frame close to the motor frame through a bearing, the top end of the rotating arm is movably sleeved on one end of the protective cover close to the motor frame through a bearing, the top end of the first transmission belt is movably sleeved on the output shaft of the cutting motor, the bottom end of the first transmission belt is movably sleeved on one end of the wheel axle close to the motor frame, and the bottom end of the movable frame is movably sleeved on both ends of the axis sleeve.

[0015] Preferably, the reciprocating mechanism includes a frame groove, a support rod, a reciprocating groove, a reciprocating wheel and a reciprocating rod, the frame groove is opened at the top end of the wheel frame, the support rod is fixedly installed in the inside of the frame groove by bolts, the top end of the movable frame is movably installed in the frame groove by insertion, the top end of the movable frame is movably sleeved on the support rod, the reciprocating groove is opened in the middle of the top end of the movable frame, the reciprocating wheel is movably installed in the middle of the wheel frame through a bearing, the bottom end of the reciprocating rod is fixedly installed on the top end of the reciprocating wheel by bolts, and the reciprocating rod is movably installed in the reciprocating groove by insertion.

[0016] Preferably, the reciprocating mechanism includes a transmission shaft, a worm wheel, a second transmission belt, a worm and a third transmission belt, the bottom end of the transmission shaft is movably mounted on the top end of the wheel frame via a bearing, the worm wheel is fixedly sleeved on the top end of the transmission shaft via bolts, the two ends of the second transmission belt are movably sleeved on the bottom end of the reciprocating wheel and the bottom end of the transmission shaft respectively, the worm is movably mounted on the top end of the wheel frame via a bearing, the worm is movably connected to the side of the worm wheel away from the movable frame via meshing, the top end of the third transmission belt is movably sleeved on an end of the worm away from the worm wheel, and the bottom end of the third transmission belt is movably sleeved on an end of the wheel axle away from the rotating arm.

[0017] Preferably, the filtering mechanism includes an inclined plate, a filter layer, a suction box, a partition and a piston, the inclined plates having two pieces in total and being fixedly mounted on the front and rear sides of the top of the filter box by bolts, the filter layer being fixedly arranged in the filter box, the suction box being fixedly mounted on the rear side of the filter box by bolts, the suction box being fixedly mounted in the middle of the interior of the suction box by bolts, and the pistons having two pieces in total and being respectively mounted on the two ends of the interior of the suction box by sliding movement.

[0018] Preferably, the filter mechanism comprises a suction rod, a synchronous frame, a water inlet pipe, a water inlet valve plate, a water outlet pipe and a water outlet valve plate, the suction rods have two in total and are respectively installed in the middle of the two ends of the suction box by insertion, the suction rod one end located in the suction box is fixedly installed in the middle of the side of the piston away from the partition by bolts, the synchronous frame has two in total and are respectively fixedly installed on the side of the two translation blocks away from the motor frame by bolts, the bottom end of the synchronous frame is fixedly sleeved on the end of the suction rod away from the partition by bolts, the water inlet pipes have two in total and are respectively fixedly installed in the middle of the side of the suction box close to the filter box by insertion, and are respectively located on both sides of the partition, the two filter boxes are fixedly installed in the filter box by insertion, and are located below the filter layer, the water inlet valve plate is movably arranged inside the water inlet pipe, the water outlet pipes have two in total and are respectively fixedly installed in the middle of the side of the suction box away from the filter box by insertion, and are respectively located on both sides of the partition, and the water outlet valve plate is movably arranged inside the water outlet pipe.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] 1. The present invention is designed and installed with a cutting mechanism, a grinding mechanism and a reciprocating mechanism. The cutting wheel is driven to rotate to cut the integrated circuit chip, and the sleeve is driven to rotate to grind the edge of the chip after the cutting wheel is completed. The sleeve is driven to reciprocate on the axle by driving the movable frame, and the grinding wheel is driven to reciprocate while rotating by the sleeve, which further improves the grinding effect of the grinding wheel. The axle is driven to rotate by the rotating arm, so that the bottom end of the sleeve can adaptively adhere to the surface of the wafer, so that the cutting assembly can be suitable for wafers of different thicknesses.

[0021] 2. The present invention is designed and installed with a filtering mechanism, and the water sprayed from the water spray pipe is filtered through the filtering layer in the filtering box, and the piston is driven to move in the suction box through the synchronous frame while the translation block moves, so that the water in the filtering box is sucked into the suction box and then discharged. By sucking the filtered water into the suction box and then discharging it, the filtering effect is improved, and the water discharged from the water outlet pipe can be sprayed out again through the water spray pipe, so that the water used for cutting integrated circuit chips can be recycled. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 Provides an overall structural diagram for an embodiment of the present invention;

[0023] Figure 2 A schematic diagram of the internal structure of a cutting box provided by an embodiment of the present invention;

[0024] Figure 3 A schematic diagram of a cutting mechanism provided by an embodiment of the present invention;

[0025] Figure 4A schematic diagram of the connection between the cutting mechanism and the grinding mechanism provided in an embodiment of the present invention;

[0026] Figure 5 A schematic diagram of the connection between the protective cover and the rotating arm provided in an embodiment of the present invention;

[0027] Figure 6 A schematic diagram of a grinding mechanism provided in an embodiment of the present invention;

[0028] Figure 7 A schematic diagram of the internal structure of the movable slot provided by an embodiment of the present invention;

[0029] Figure 8 A schematic diagram of a reciprocating mechanism provided in an embodiment of the present invention;

[0030] Fig. 9 A schematic diagram of the shaft groove structure provided by an embodiment of the present invention;

[0031] Fig.10 A schematic diagram of the shaft plate structure provided by an embodiment of the present invention;

[0032] Fig.11 A schematic diagram of the internal structure of the filter box and the suction box provided in an embodiment of the present invention;

[0033] Fig.12 A schematic diagram of the internal structure of a water inlet pipe and a water outlet pipe provided in an embodiment of the present invention.

[0034] In the figure: 1, cutting box; 2, cutting mechanism; 201, translation frame; 202, translation slot; 203, motor frame; 204, translation block; 205, translation rack; 206, translation gear; 207, translation motor; 208, cutting motor; 209, protective cover; 210, cutting grinding wheel; 211, water spray pipe; 3, grinding mechanism; 301, fixed frame; 302, movable slot; 303, movable block; 304, spring rod; 305, reset spring; 306, lifting rod; 307, connecting frame; 308, wheel frame; 309, wheel shaft; 310, shaft groove; 311, shaft sleeve; 312, shaft plate; 313, grinding wheel; 3 14. Rotating arm; 315. First transmission belt; 4. Reciprocating mechanism; 401. Movable frame; 402. Frame slot; 403. Support rod; 404. Reciprocating slot; 405. Reciprocating wheel; 406. Reciprocating rod; 407. Transmission shaft; 408. Worm wheel; 409. Second transmission belt; 410. Worm; 411. Third transmission belt; 5. Filter mechanism; 501. Filter box; 502. Inclined plate; 503. Filter layer; 504. Suction box; 505. Partition; 506. Piston; 507. Suction rod; 508. Synchronous frame; 509. Water inlet pipe; 510. Water inlet valve plate; 511. Water outlet pipe; 512. Water outlet valve plate. DETAILED DESCRIPTION

[0035] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0036] See also Figures 1 to 12 The present invention provides a technical solution: a cutting assembly for an integrated circuit chip, comprising a cutting box 1, a cutting mechanism 2, a grinding mechanism 3, a reciprocating mechanism 4 and a filtering mechanism 5:

[0037] The cutting mechanism 2 includes a translation frame 201 and a motor frame 203. The two ends of the translation frame 201 are fixedly mounted on the left and right side walls of the cutting box 1 by bolts. There are two motor frames 203, both of which are mounted inside the translation frame 201 by sliding movement.

[0038] The grinding mechanism 3 includes a fixed frame 301, a connecting frame 307 and a wheel frame 308. The fixed frame 301 is fixedly mounted on one side of the motor frame 203 close to the middle of the translation frame 201 by bolts, the connecting frame 307 is movably arranged at the bottom end of the fixed frame 301, and the wheel frame 308 is fixedly mounted on the bottom end of the connecting frame 307 by bolts;

[0039] The reciprocating mechanism 4 includes a movable frame 401, and the movable frame 401 is movably arranged inside the wheel frame 308;

[0040] The filter mechanism 5 includes a filter box 501 , and the filter box 501 is fixedly mounted at the inner bottom end of the filter box 501 by bolts.

[0041] The cutting mechanism 2 includes a translation slot 202, a translation block 204, a translation rack 205, a translation gear 206 and a translation motor 207. There are two translation slots 202, which are respectively opened at both ends of the translation frame 201. There are two translation blocks 204, which are respectively installed in the two translation slots 202 by sliding. The two translation blocks 204 are respectively fixed by bolts in the middle of the two motor frames 203 close to the translation frame 201. There are two translation racks 205, and one end away from the translation frame 201 is respectively fixed by bolts on the two motor frames 203. The top and bottom ends of the frame 203 are close to the translation frame 201. The translation gear 206 is movably installed in the middle of the front side of the translation frame 201 through a bearing. The translation motor 207 is fixedly installed in the middle of the rear side of the translation frame 201 through bolts. The output shaft of the translation motor 207 is fixedly connected to the translation gear 206 through bolts. By starting the translation motor 207, the translation gear 206 is driven to rotate. When the translation gear 206 rotates, the two motor frames 203 are driven to move toward the middle of the wafer at the same time through the two translation racks 205 to adjust the cutting position.

[0042] The cutting mechanism 2 includes a cutting motor 208, a protective cover 209, a cutting grinding wheel 210 and a water spray pipe 211. There are two cutting motors 208, which are respectively fixedly installed on one end of the two motor frames 203 away from the translation frame 201 by insertion. There are two protective covers 209, which are respectively fixedly installed on the opposite side of the two motor frames 203 by bolts. There are two cutting grinding wheels 210, which are respectively fixedly sleeved on the output shafts of the two cutting motors 208 by bolts and are respectively located in the two protective covers 209. There are two water spray pipes 211, which are respectively fixedly installed on one end of the two motor frames 203 close to the translation frame 201 by bolts. The cutting grinding wheel 210 is protected by the protective cover 209, and cooling water is sprayed through the water spray pipe 211 to rinse the wafer and cool the cutting grinding wheel 210.

[0043] The grinding mechanism 3 includes a movable groove 302, a movable block 303, a spring rod 304 and a reset spring 305. The movable groove 302 is opened at the top of the fixed frame 301, and the movable block 303 is installed in the movable groove 302 by sliding movement. The end of the spring rod 304 close to the movable block 303 is fixedly installed in the middle of the side of the movable block 303 close to the translation frame 201 by bolts, and the end of the spring rod 304 close to the translation frame 201 is installed on the side of the movable groove 302 close to the translation frame 201 by insertion. The reset spring 305 is movably sleeved on the spring rod 304; the connecting frame 307 is installed through the fixed frame 301 and the lifting rod 306. When the movable groove 302 moves in the direction away from the cutting wheel 210, the reset spring 305 is continuously compressed. When the cutting is completed, the shaft sleeve 311 is reset by the elastic force of the reset spring 305;

[0044] The grinding mechanism 3 includes a lifting rod 306, a wheel axle 309, an axis groove 310 and a sleeve 311. The lifting rod 306 is movably installed inside the movable block 303 by insertion. The connecting frame 307 is fixedly installed at the bottom end of the lifting rod 306 by bolts. Both ends of the wheel axle 309 are movably installed at the bottom end of the wheel frame 308 through bearings. The axis groove 310 is opened in the middle of the wheel axle 309, and the sleeve 311 is movably sleeved on the wheel axle 309. The wheel axle 309 is driven to rotate by the rotating arm 314, so that the connecting frame 307 is raised and moved in a direction away from the cutting grinding wheel 210. The movable groove 302 is driven to move in a direction away from the cutting grinding wheel 210 by the lifting rod 306, so that the bottom end of the sleeve 311 can adaptively adhere to the surface of the wafer, so that the cutting assembly can be suitable for wafers of different thicknesses.

[0045] The grinding mechanism 3 includes a shaft plate 312, a grinding wheel 313, a rotating arm 314 and a first transmission belt 315. The shaft plate 312 is fixedly installed in the middle of the shaft sleeve 311 by bolts, and is movably installed in the shaft plate 312 by insertion. The grinding wheel 313 is fixedly sleeved in the middle of the shaft sleeve 311 by bolts. The bottom end of the rotating arm 314 is movably sleeved on the bottom end of the wheel frame 308 close to the motor frame 203 through a bearing. The top end of the rotating arm 314 is movably sleeved on the end of the protective cover 209 close to the motor frame 203 through a bearing. The first transmission belt 315 The top end of the first transmission belt 315 is movably sleeved on the output shaft of the cutting motor 208, the bottom end of the first transmission belt 315 is movably sleeved on one end of the wheel shaft 309 close to the motor frame 203, and the bottom end of the movable frame 401 is movably sleeved on both ends of the shaft sleeve 311; the wheel shaft 309 is driven to rotate by the first transmission belt 315, and when the wheel shaft 309 rotates, the shaft plate 312 is inserted into the shaft groove 310, so that the shaft sleeve 311 rotates with the wheel shaft 309, and the grinding wheel 313 is driven to rotate through the shaft sleeve 311 to grind the edge of the chip after the cutting of the cutting wheel 210 is completed;

[0046] The reciprocating mechanism 4 includes a frame slot 402, a support rod 403, a reciprocating slot 404, a reciprocating wheel 405 and a reciprocating rod 406. The frame slot 402 is opened at the top of the wheel frame 308, the support rod 403 is fixedly installed inside the frame slot 402 by bolts, the top of the movable frame 401 is movably installed in the frame slot 402 by insertion, the top of the movable frame 401 is movably sleeved on the support rod 403, the reciprocating slot 404 is opened in the middle of the top of the movable frame 401, the reciprocating wheel 405 is movably installed in the middle of the wheel frame 308 through a bearing, and the bottom end of the reciprocating rod 406 is fixedly installed by bolts. At the top of the reciprocating wheel 405, the reciprocating rod 406 is installed in the reciprocating groove 404 by being inserted and movably mounted; the reciprocating wheel 405 is driven to rotate by the second transmission belt 409, so that the reciprocating rod 406 rotates simultaneously with the reciprocating wheel 405, and the reciprocating rod 406 is inserted into the reciprocating groove 404, driving the movable frame 401 to reciprocate in the frame groove 402, and then the movable frame 401 drives the shaft sleeve 311 to reciprocate on the wheel shaft 309, and the shaft sleeve 311 drives the grinding wheel 313 to reciprocate while rotating, thereby further improving the grinding effect of the grinding wheel 313;

[0047] The reciprocating mechanism 4 includes a transmission shaft 407, a worm wheel 408, a second transmission belt 409, a worm 410 and a third transmission belt 411. The bottom end of the transmission shaft 407 is movably mounted on the top of the wheel frame 308 through a bearing. The worm wheel 408 is fixedly sleeved on the top of the transmission shaft 407 by bolts. The two ends of the second transmission belt 409 are movably sleeved on the bottom end of the reciprocating wheel 405 and the bottom end of the transmission shaft 407 respectively. The worm 410 is movably mounted on the top of the wheel frame 308 through a bearing. At the top, the worm 410 is movably connected with the side of the worm wheel 408 away from the movable frame 401 through meshing, the top of the third transmission belt 411 is movably sleeved on the end of the worm 410 away from the worm wheel 408, and the bottom of the third transmission belt 411 is movably sleeved on the end of the axle 309 away from the rotating arm 314; the worm 410 is driven to rotate by the third transmission belt 411, and the worm wheel 408 is driven to rotate by the worm 410, so that the transmission shaft 407 rotates with the worm wheel 408;

[0048] The filter mechanism 5 includes an inclined plate 502, a filter layer 503, a suction box 504, a partition plate 505 and a piston 506. There are two inclined plates 502, which are respectively fixedly installed on the front and rear sides of the top of the filter box 501 by bolts. The filter layer 503 is fixedly arranged in the filter box 501. The suction box 504 is fixedly installed on the rear side of the filter box 501 by bolts. The suction box 504 is fixedly installed in the middle of the suction box 504 by bolts. There are two pistons 506, which are respectively installed at both ends of the suction box 504 by sliding movement. The water sprayed from the water spray pipe 211 is collected into the filter box 501 through the inclined plate 502, and the collected water is filtered through the filter layer 503.

[0049] The filter mechanism 5 includes a suction rod 507, a synchronous frame 508, an inlet pipe 509, an inlet valve plate 510, an outlet pipe 511 and an outlet valve plate 512. There are two suction rods 507, which are respectively installed in the middle of the two ends of the suction box 504 by insertion. One end of the suction rod 507 located in the suction box 504 is fixedly installed in the middle of the side of the piston 506 away from the partition 505 by bolts. There are two synchronous frames 508, which are respectively fixedly installed on the side of the two translation blocks 204 away from the motor frame 203 by bolts. The bottom end of the synchronous frame 508 is fixedly installed by bolts. The bolt is fixedly sleeved on the end of the suction rod 507 away from the partition 505. There are two water inlet pipes 509 and they are respectively fixedly installed in the middle of the side of the suction box 504 close to the filter box 501 by insertion, and are respectively located on both sides of the partition 505. The two filter boxes 501 are fixedly installed in the filter box 501 by insertion, and are located below the filter layer 503. The water inlet valve plate 510 is movably arranged inside the water inlet pipe 509. There are two water outlet pipes 511 and they are respectively fixedly installed in the middle of the side of the suction box 504 away from the filter box 501 by insertion, and are respectively The outlet valve plates 512 are movably arranged inside the outlet pipe 511 on both sides of the partition 505; the suction rod 507 is driven to move into the suction box 504 through the synchronous frame 508, and the piston 506 is driven to move toward the partition 505 through the suction rod 507. At this time, the water inlet pipe 509 is blocked by the water inlet valve plate 510, and the water in the filter box 501 cannot enter the suction box 504. At the same time, the outlet valve plate 512 is pushed open by the air pressure in the suction box 504, so that the outlet pipe 511 is connected. At this time, the piston 506 and the partition are closed. The water between 505 is discharged, and when the translation block 204 drives the synchronous frame 508 to move away from the translation gear 206, the piston 506 moves away from the partition 505. At this time, the water outlet pipe 511 is closed by the water outlet valve plate 512. At this time, negative pressure is formed between the partition 505 and the piston 506, so that the water inlet valve plate 510 is sucked open. At this time, the water inlet pipe 509 is connected, so that the filtered water in the filter box 501 is sucked into the suction box 504. By sucking the filtered water into the suction box 504 and then discharging it, the filtering effect is improved.

[0050] Working principle: When the present invention is in use, the cutting motor 208 is started, and the cutting grinding wheel 210 is driven to rotate by the cutting motor 208, and the wafer for manufacturing integrated circuit chips is cut by the rotating cutting grinding wheel 210, and the translation motor 207 is started to drive the translation gear 206 to rotate. When the translation gear 206 rotates, the two motor frames 203 are driven to move toward the middle of the wafer at the same time by the two translation racks 205 to adjust the cutting position, and the cutting grinding wheel 210 is protected by the protective cover 209, and cooling water is sprayed through the water spray pipe 211 to rinse the wafer and cool the cutting grinding wheel 210;

[0051] When the cutting motor 208 is started, the wheel shaft 309 is driven to rotate through the first transmission belt 315. When the wheel shaft 309 rotates, the shaft plate 312 is inserted into the shaft groove 310, so that the shaft sleeve 311 rotates along with the wheel shaft 309, and the grinding wheel 313 is driven to rotate through the shaft sleeve 311 to grind the edge of the chip after the cutting wheel 210 has completed the cutting. When the wheel shaft 309 rotates, the worm 410 is driven to rotate through the third transmission belt 411, and the worm wheel 408 is driven to rotate through the worm 410, so that the transmission shaft 407 rotates along with the worm wheel 408. At this time, the reciprocating wheel 405 is driven to rotate through the second transmission belt 409, so that the reciprocating rod 406 rotates along with the reciprocating wheel 405, and the reciprocating rod 406 rotates at the same time. Inserted into the reciprocating groove 404, the movable frame 401 is driven to reciprocate in the frame groove 402, and then the sleeve 311 is driven to reciprocate on the axle 309 through the movable frame 401, and the grinding wheel 313 is driven to reciprocate while rotating through the sleeve 311, so as to further improve the grinding effect of the grinding wheel 313. When the sleeve 311 contacts the surface of the wafer, the axle 309 is driven to rotate through the rotating arm 314, so that the connecting frame 307 is raised and moved away from the cutting wheel 210, and the movable groove 302 is driven to move away from the cutting wheel 210 through the lifting rod 306, so that the bottom end of the sleeve 311 can be adaptively attached to the wafer surface, so that the cutting assembly can be suitable for wafers of different thicknesses;

[0052] The water sprayed from the water spray pipe 211 is collected into the filter box 501 through the inclined plate 502, and the collected water is filtered through the filter layer 503. When the translation block 204 moves in the direction close to the translation gear 206, the suction rod 507 is driven to move into the suction box 504 through the synchronous frame 508, and the piston 506 is driven to move in the direction of the partition 505 through the suction rod 507. At this time, the water inlet pipe 509 is blocked by the water inlet valve plate 510. At this time, the water in the filter box 501 cannot enter the suction box 504. At the same time, the water outlet valve plate 512 is pushed open by the air pressure in the suction box 504, so that the water outlet pipe 511 is connected. At this time, the piston 506 and the partition 505 are closed. The water is discharged, and when the translation block 204 drives the synchronous frame 508 to move away from the translation gear 206, the piston 506 moves away from the partition 505. At this time, the water outlet pipe 511 is closed by the water outlet valve plate 512. At this time, negative pressure is formed between the partition 505 and the piston 506, so that the water inlet valve plate 510 is sucked open. At this time, the water inlet pipe 509 is conducted, so that the filtered water in the filter box 501 is sucked into the suction box 504. By sucking the filtered water into the suction box 504 and then discharging it, the filtering effect is improved, and the water discharged from the water outlet pipe 511 can be sprayed again through the water spray pipe 211, so that the water used for cutting the integrated circuit chip can be recycled.

[0053] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0054] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A cutting assembly for integrated circuit chips, comprising a cutting box (1), characterized in that: It also includes a cutting mechanism (2), a grinding mechanism (3), a reciprocating mechanism (4) and a filtering mechanism (5): A cutting mechanism (2), the cutting mechanism (2) comprising a translation frame (201) and a motor frame (203), the two ends of the translation frame (201) being fixedly mounted on the left and right side walls inside the cutting box (1), and the motor frames (203) having two both being movably mounted inside the translation frame (201); A grinding mechanism (3), the grinding mechanism (3) comprising a fixed frame (301), a connecting frame (307) and a wheel frame (308), the fixed frame (301) being fixedly mounted on one side of the motor frame (203) close to the middle of the translation frame (201), the connecting frame (307) being movably arranged at the bottom end of the fixed frame (301), and the wheel frame (308) being fixedly mounted on the bottom end of the connecting frame (307); A reciprocating mechanism (4), the reciprocating mechanism (4) comprising a movable frame (401), the movable frame (401) being movably arranged inside the wheel frame (308); A filtering mechanism (5), wherein the filtering mechanism (5) comprises a filtering box (501), wherein the filtering box (501) is fixedly mounted at the inner bottom end of the filtering box (501).

2. The integrated circuit chip cutting assembly according to claim 1, characterized in that: The cutting mechanism (2) comprises a translation slot (202), a translation block (204), a translation rack (205), a translation gear (206) and a translation motor (207); there are two translation slots (202) respectively arranged at two ends of the translation frame (201); there are two translation blocks (204) respectively installed in the two translation slots (202) by sliding movement; the two translation blocks (204) are respectively fixed by bolts on one side of the two motor frames (203) close to the translation frame (201); The translation rack (205) has two ends, and one end away from the translation frame (201) is respectively fixedly mounted on the top and bottom ends of the two motor frames (203) close to the translation frame (201) by bolts. The translation gear (206) is movably mounted in the middle of the front side of the translation frame (201) by bearings. The translation motor (207) is fixedly mounted in the middle of the rear side of the translation frame (201) by bolts. The output shaft of the translation motor (207) is fixedly connected to the translation gear (206) by bolts.

3. The integrated circuit chip cutting assembly according to claim 2, characterized in that: The cutting mechanism (2) comprises a cutting motor (208), a protective cover (209), a cutting grinding wheel (210) and a water spray pipe (211); there are two cutting motors (208) and they are respectively fixedly installed on one end of two motor frames (203) away from the translation frame (201) by insertion; there are two protective covers (209) and they are respectively fixedly installed on the opposite side of the two motor frames (203) by bolts; there are two cutting grinding wheels (210) and they are respectively fixedly sleeved on the output shafts of the two cutting motors (208) by bolts and are respectively located in the two protective covers (209); there are two water spray pipes (211) and they are respectively fixedly installed on one end of the two motor frames (203) close to the translation frame (201) by bolts.

4. The integrated circuit chip cutting assembly according to claim 3, characterized in that: The grinding mechanism (3) comprises a movable groove (302), a movable block (303), a spring rod (304) and a reset spring (305); the movable groove (302) is opened at the top of the fixed frame (301); the movable block (303) is installed in the movable groove (302) by sliding movement; one end of the spring rod (304) close to the movable block (303) is fixedly installed in the middle of a side of the movable block (303) close to the translation frame (201) by bolts; one end of the spring rod (304) close to the translation frame (201) is installed in the side of the movable groove (302) close to the translation frame (201) by insertion movement; and the reset spring (305) is movably sleeved on the spring rod (304).

5. The integrated circuit chip cutting assembly according to claim 4, characterized in that: The grinding mechanism (3) comprises a lifting rod (306), a wheel axle (309), an axis groove (310) and a shaft sleeve (311); the lifting rod (306) is movably installed in the movable block (303) by insertion; the connecting frame (307) is fixedly installed on the bottom end of the lifting rod (306) by bolts; the two ends of the wheel axle (309) are movably installed on the bottom end of the wheel frame (308) by bearings; the axis groove (310) is opened in the middle of the wheel axle (309); and the shaft sleeve (311) is movably sleeved on the wheel axle (309).

6. The integrated circuit chip cutting assembly according to claim 5, characterized in that: The grinding mechanism (3) comprises a shaft plate (312), a grinding wheel (313), a rotating arm (314) and a first transmission belt (315); the shaft plate (312) is fixedly mounted in the middle of the shaft sleeve (311) by means of bolts and is movably mounted in the shaft plate (312) by means of insertion; the grinding wheel (313) is fixedly sleeved in the middle of the shaft sleeve (311) by means of bolts; the bottom end of the rotating arm (314) is movably sleeved in the wheel frame (308) near the motor frame by means of a bearing; The top end of the rotating arm (314) is movably sleeved on one end of the protective cover (209) close to the motor frame (203) through a bearing, the top end of the first transmission belt (315) is movably sleeved on the output shaft of the cutting motor (208), the bottom end of the first transmission belt (315) is movably sleeved on one end of the wheel shaft (309) close to the motor frame (203), and the bottom end of the movable frame (401) is movably sleeved on both ends of the shaft sleeve (311).

7. The integrated circuit chip cutting assembly according to claim 6, characterized in that: The reciprocating mechanism (4) comprises a frame groove (402), a support rod (403), a reciprocating groove (404), a reciprocating wheel (405) and a reciprocating rod (406); the frame groove (402) is opened at the top end of the wheel frame (308); the support rod (403) is fixedly installed in the frame groove (402) by bolts; the top end of the movable frame (401) is movably installed in the frame groove (402) by insertion; the top end of the movable frame (401) is movably sleeved on the support rod (403); the reciprocating groove (404) is opened in the middle of the top end of the movable frame (401); the reciprocating wheel (405) is movably installed in the middle of the wheel frame (308) by a bearing; the bottom end of the reciprocating rod (406) is fixedly installed on the top end of the reciprocating wheel (405) by bolts; and the reciprocating rod (406) is movably installed in the reciprocating groove (404) by insertion.

8. The integrated circuit chip cutting assembly according to claim 7, characterized in that: The reciprocating mechanism (4) comprises a transmission shaft (407), a worm wheel (408), a second transmission belt (409), a worm (410) and a third transmission belt (411); the bottom end of the transmission shaft (407) is movably mounted on the top end of the wheel frame (308) through a bearing; the worm wheel (408) is fixedly sleeved on the top end of the transmission shaft (407) through bolts; the two ends of the second transmission belt (409) are movably sleeved on the bottom end of the reciprocating wheel (405) and the transmission belt (411). The bottom end of the shaft (407), the worm (410) is movably mounted on the top end of the wheel frame (308) through a bearing, the worm (410) is movably connected to the side of the worm wheel (408) away from the movable frame (401) through meshing, the top end of the third transmission belt (411) is movably sleeved on the end of the worm (410) away from the worm wheel (408), and the bottom end of the third transmission belt (411) is movably sleeved on the end of the wheel shaft (309) away from the rotating arm (314).

9. The integrated circuit chip cutting assembly according to claim 8, characterized in that: The filtering mechanism (5) comprises an inclined plate (502), a filtering layer (503), a suction box (504), a partition plate (505) and a piston (506); the inclined plates (502) are two in total and are respectively fixedly mounted on the front and rear sides of the top of the filtering box (501) by means of bolts; the filtering layer (503) is fixedly arranged in the filtering box (501); the suction box (504) is fixedly mounted on the rear side of the filtering box (501) by means of bolts; the suction box (504) is fixedly mounted in the middle of the suction box (504) by means of bolts; and the pistons (506) are two in total and are respectively mounted on the two ends of the inside of the suction box (504) by means of sliding movement.

10. The integrated circuit chip cutting assembly according to claim 9, characterized in that: The filtering mechanism (5) comprises a suction rod (507), a synchronous frame (508), a water inlet pipe (509), a water inlet valve plate (510), a water outlet pipe (511) and a water outlet valve plate (512). There are two suction rods (507) and they are respectively installed in the middle of the two ends of the suction box (504) by insertion. One end of the suction rod (507) located in the suction box (504) is fixedly installed in the middle of the side of the piston (506) away from the partition (505) by bolts. There are two synchronous frames (508) and they are respectively fixedly installed in the side of the two translation blocks (204) away from the motor frame (203) by bolts. The bottom end of the synchronous frame (508) is fixedly sleeved on the side away from the suction rod (507) by bolts. At one end of the partition (505), there are two water inlet pipes (509) which are respectively fixedly installed by insertion in the middle of one side of the suction box (504) close to the filter box (501) and are respectively located on both sides of the partition (505); the two filter boxes (501) are fixedly installed in the filter box (501) by insertion and are located below the filter layer (503); the water inlet valve plate (510) is movably arranged inside the water inlet pipe (509); there are two water outlet pipes (511) which are respectively fixedly installed by insertion in the middle of one side of the suction box (504) away from the filter box (501) and are respectively located on both sides of the partition (505); the water outlet valve plate (512) is movably arranged inside the water outlet pipe (511).

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