Method and system device for producing quartz glass through vacuum continuous melting

Abstract

The invention relates to the technical field of quartz glass production, and particularly discloses a method and system device for producing quartz glass through vacuum continuous melting, the system device comprises an automatic feeding device, the feeding quantity is set through a controller, the system device is automatically stopped when the feeding quantity reaches a set value, and the automatic feeding device comprises a controller body; the invention provides a method and a system device for producing quartz glass through vacuum continuous melting. A tungsten or molybdenum crucible in a vacuum melting cabin is not oxidized, molten quartz glass does not carry hydroxyl (pollution of hydrogen), gas-liquid inclusions in quartz particles are easy to remove, and a dehydroxylation process does not need to be additionally added; through the separation of the melting cabin and the forming cabin, the optimal control of the temperature of each function is realized, an adjustable forming mold is used, various series of quartz glass materials are flexibly produced, and the current continuous process under the protection of normal-pressure hydrogen filling and nitrogen filling is improved into a continuous process under the protection of no hydrogen filling, so that the period is greatly shortened, the cost is reduced, and the melting quality is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of quartz glass production, and in particular relates to a method and a system device for producing quartz glass by vacuum continuous melting. Background Art

[0002] Quartz glass is a glass made of pure silicon dioxide. It has high heat resistance, with a regular operating temperature of 1100℃-1200℃ and a short-term operating temperature of up to 1400℃. Its linear expansion coefficient is extremely small, which is 1 / 10-1 / 20 of that of ordinary glass, and it has good thermal shock resistance. It has good acid resistance to general acids except hydrofluoric acid and hot phosphoric acid, and its corrosion to alkali and alkaline earth compounds is also very small. At the same time, it will not be damaged by radiation. Quartz glass has good electrical insulation properties. Quartz glass can transmit ultraviolet and infrared rays, and has excellent transmittance in the continuous wavelength range from ultraviolet to infrared radiation, making it the best of all ultraviolet-transmitting materials.

[0003] Its mechanical properties are higher than those of ordinary glass; its hardness can reach Mohs level 7.

[0004] The prior art does not have a vacuum charging cabin, and melting and forming are carried out in one furnace. The melting furnace is at normal pressure and is filled with nitrogen, hydrogen, and helium as protective gases. The quartz glass produced by this process has a higher hydroxyl content due to the introduction of hydrogen.

[0005] The main process steps of the prior art are: feeding - high temperature and atmospheric pressure furnace (filled with nitrogen, hydrogen, helium protection) - continuous melting of quartz sand raw materials in the furnace - continuous pulling of quartz glass materials from the molding die at the lower end of the furnace - continuous production of shaped quartz glass materials by controlling a series of parameters - cutting quartz glass products according to length - cooling to room temperature - subsequent dehydroxylation process;

[0006] However, the existing process has the following technical disadvantages:

[0007] 1. Hydrogen is filled in the vacuum furnace. Hydrogen will enter the quartz melt and turn into hydroxyl form. The hydroxyl content in the quartz glass will reduce the high temperature resistance of the glass. In some applications, the hydroxyl needs to be removed. This process is called dehydroxylation. Dehydroxylation takes a long time and consumes a lot of energy. In some cases, the cost of the dehydroxylation process is higher than that of melting quartz. It is difficult to completely remove the hydroxyl from thicker glass using traditional dehydroxylation methods.

[0008] Second, the melting and molding of quartz sand raw materials are carried out in the same furnace. The gas-liquid inclusions in the quartz sand raw materials cannot be completely removed by normal pressure melting, and the melting temperature usually needs to be very high, while the molding temperature needs to be controlled to a certain extent (not too high). These two are contradictory, and traditional processes are difficult to control well, and one loses the other.

[0009] 3. Subsequent dehydroxylation requires high energy consumption.

[0010] The present invention provides a method and system device for producing quartz glass by continuous vacuum melting, which solves the problems currently faced in the quartz glass production process, that molten quartz glass is easy to bring in hydroxyl groups (hydrogen pollution), that gas-liquid inclusions naturally enclosed in quartz particles of quartz raw materials are difficult to remove, that melting and molding temperatures cannot be uniformly controlled, that process control is not balanced, that quartz glass materials need to be subsequently dehydroxylated, that the dehydroxylation cost is high, and that the intrinsic melting quality of quartz glass cannot reach the best;

[0011] By adding a vacuum transition chamber, the vacuum melting chamber is not filled with nitrogen, hydrogen or helium, and a quartz glass melt without additional hydroxyl is obtained. The vacuum allows the gas-liquid inclusions naturally wrapped inside the quartz particles to be fully removed. Through the innovative use of adjustable forming molds, various types of quartz glass materials can be flexibly produced, such as: large and small round tubes, round rods, special-shaped tubes, special-shaped rods, plates, thick-walled tubes, solid lumps (quartz glass ingots). The current discontinuous production process is made continuous through automation or appropriate adjustments, reducing the subsequent additional dehydroxylation process, greatly shortening the production cycle and reducing costs. Summary of the invention

[0012] The object of the present invention is to provide a method and system device for producing quartz glass by vacuum continuous melting to solve the problems raised in the above background technology.

[0013] To achieve the above object, the present invention provides the following technical solutions:

[0014] A method and system device for producing quartz glass by vacuum continuous melting, comprising: an automatic feeding device, wherein the feeding quantity is set by a controller, and the feeding stops automatically when the feeding quantity reaches the set value, and the automatic feeding device comprises a controller body, and a first pipeline and a second pipeline are arranged on the controller body;

[0015] A normal pressure tank device, wherein the first main body tank on the normal pressure tank device is loaded with materials through an automatic loading device, the normal pressure tank device comprises a first sand position sensor, a first automatic plug valve, a first image observation and a first quartz sand, the other end of the first pipe is inside the first quartz sand, and the other end of the second pipe is installed directly above the normal pressure tank device, the first sand position sensor is used to sense the height of the first quartz sand and transmit the data to the controller body, the first automatic plug valve is opened or closed through the controller body, and the first image observation is used to observe the internal situation of the normal pressure tank device;

[0016] As can be seen from the above, when the first automatic gate valve is opened, the first quartz sand flows into the interior of the vacuum transition tank device.

[0017] The vacuum transition tank device is used to load the second main body tank on the vacuum transition tank device by opening the atmospheric pressure tank device, and the vacuum transition tank device is used to load the second main body tank by opening the first automatic plug-in valve;

[0018] The vacuum transition tank device includes a first vacuum pump, a first pressure relief port, a first pressure gauge, a second image observation, a second quartz sand, a second automatic plug-in valve, a first electric three-way valve and a second sand level sensor. The first electric three-way valve is connected to the first vacuum pump, the first pressure relief port and the first pressure gauge. The other end of the first pressure relief port is connected to the atmosphere through an air filter.

[0019] As can be seen from the above, when the first automatic plug-in valve and the second automatic plug-in valve are closed at the same time, the first electric three-way valve is connected to the first pressure gauge and the vacuum transition tank device through the electric adjustment of the first vacuum pump, and the first vacuum pump is turned on. After the pressure value displayed by the first pressure gauge is ≤ the preset value, the first vacuum pump is turned off (otherwise the vacuum pump is turned on), and the second automatic plug-in valve is waited for to be opened. After the second automatic plug-in valve is opened, the second quartz sand flows out of the vacuum transition tank device. After the second sand level sensor senses the lowest value, the second automatic plug-in valve is closed in sequence, the first automatic plug-in valve is opened, the first quartz sand flows into the vacuum transition tank device, the first automatic plug-in valve is closed, and the first vacuum pump is turned on.

[0020] The vacuum feeding bunker device is opened through the vacuum transition bunker device to feed the third main bunker on the vacuum feeding bunker device. The vacuum feeding bunker device includes a second vacuum pump, a second pressure relief port, a second pressure gauge, a third image observation, a third quartz sand, an electric broadcast wheel, a second electric three-way valve, a third sand level sensor and a funnel. The other end of the second pressure relief port is connected to the atmosphere through an air filter. The second automatic plug-in valve, the electric broadcast wheel and the second electric three-way valve are controlled by the controller body.

[0021] As can be seen from the above, when the second automatic plug-in valve is closed, the second electric three-way valve is connected to the second vacuum pump through the electric adjustment vacuum feeding bunker device, the second vacuum pump is turned on, and the second vacuum pump is turned off after the pressure value displayed by the second pressure gauge is ≤ the preset value, and the electric broadcast wheel starts to rotate (if the pressure value displayed by the second pressure gauge is greater than the preset value during the process, the electric broadcast wheel stops rotating and the second vacuum pump is turned on), the electric broadcast wheel rotates to broadcast the third quartz sand into the funnel, and it falls freely. When the third sand level sensor senses the set low value, the second automatic plug-in valve is opened in turn, the second quartz sand flows into the vacuum feeding bunker device, and after the second sand level sensor senses the lowest value, the second automatic plug-in valve is closed, the second vacuum pump is turned on, and the feeding is circulated in sequence.

[0022] A vacuum melting chamber device and a first melt are used to melt a plurality of quartz sands into a melt. The vacuum melting chamber device comprises a third vacuum pump, a third pressure gauge, a fourth image observation, a cooling medium inlet, a cooling medium outlet, a spreader, a tungsten or molybdenum crucible, a heater, a refractory brick, a first melt, a wet seal, a non-matching seal, a heat preservation and a temperature sensor. The cooling medium inlet and the heater are controlled by a controller body. A tungsten or molybdenum flange is provided between the tungsten or molybdenum crucible and the refractory brick. A furnace body is provided below the refractory brick. A non-matching seal is provided between the furnace body and the tungsten or molybdenum flange. A wet seal is provided between the tungsten or molybdenum crucible and the first melt. A welding seal is provided between the tungsten or molybdenum flange and the tungsten or molybdenum crucible.

[0023] As can be seen from the above, the cooling medium enters from the cooling medium inlet, and the cooling medium flows out from the cooling medium outlet to take out the heat, thereby controlling the internal temperature of the vacuum melting chamber device. The funnel collects the quartz sand and flows it into the top of the spreader. The spreader has guide grooves and guide holes, which evenly divert the quartz sand and spread it on the first melt to melt it, and allow the first melt to flow into the interior of the secondary molding chamber device.

[0024] A secondary molding chamber device, used for solidifying the molten first melt into a solid with a preset specification shape, the secondary molding chamber device comprises a first nitrogen filling port, a fourth pressure gauge, a fifth image observation, a secondary molding tungsten or molybdenum crucible, a second melt, a molding mold, a sixth image observation, a first nitrogen outlet, a diameter thickness laser measuring instrument and a driven drawing roller, the first nitrogen filling port and the first nitrogen outlet are controlled by a controller body, and the first nitrogen filling port and the first nitrogen outlet are connected to the secondary molding chamber device;

[0025] As can be seen from the above, nitrogen enters the secondary molding tungsten or molybdenum crucible from the first nitrogen filling port, covers and protects the liquid surface of the second melt, and flows out from the first nitrogen outlet. The second melt flows out from the gap of the molding mold and solidifies into a solid with a preset specification shape, which is guided vertically downward by the driven drawing roller and driven clamping.

[0026] A cooling chamber device is used to allow the solidified solid to enter the interior of the cooling chamber device, so that it is cooled and shaped into a quartz glass tube, a quartz glass lump, a quartz glass rod and a quartz glass plate. The cooling chamber device includes a quartz glass raw material, a seventh image observation and an electric drawing roller. The electric drawing roller is the main power for traction and drawing. The wall thickness and diameter of the quartz glass raw material are controlled by the drawing speed of the electric drawing roller.

[0027] As can be seen from the above, the second melt flows out of the forming mold and solidifies into a solid. It is vertically guided downward by the driven clamping of the driven drawing roller to enter the cooling chamber for cooling and shaping into quartz glass raw materials. The quartz glass raw materials descend and are actively pulled downward by the clamping of the electric drawing roller to enter the interior of the tube drawing and synchronous cutting chamber device.

[0028] The tube-pulling synchronous cutting chamber device is used for laser cutting of the quartz sand solid after cooling and shaping. The tube-pulling synchronous cutting chamber device includes a second nitrogen filling port, a fifth pressure gauge, a vertically movable dynamic laser cutting machine, an eighth image observation, a second nitrogen outlet and an infrared sensor. The second nitrogen filling port, the vertically movable dynamic laser cutting machine and the second nitrogen outlet are all controlled by the controller body. The second nitrogen filling port and the second nitrogen outlet are connected to the tube-pulling synchronous cutting chamber device.

[0029] As can be seen from the above, the quartz glass raw material goes down through the clamping and traction of the electric drawing roller and enters the interior of the tube drawing synchronous cutting cabin device, and the quartz glass raw material is held by the clamp of the up and down dynamic laser cutting machine. At this time, the head of the up and down dynamic laser cutting machine goes down with the quartz glass raw material. During the downward process, the laser is turned on to cut around the circumference of the quartz glass raw material. After the cutting is completed, the laser of the up and down dynamic laser cutting machine is turned off, the clamp is released, and the quartz glass raw material falls to the shuttle vehicle. At the same time, the head of the up and down dynamic laser cutting machine can be reset in multiple axes.

[0030] The docking and stacking device moves the cooled and shaped quartz sand solid to the stacking area. The docking and stacking device includes a docking vehicle, a slide rail, a mechanical arm and a pallet. The docking vehicle is equipped with a weight switch to control the sliding start of the docking vehicle.

[0031] As can be seen from the above, limit switches are installed at both ends A and B of the slide rail. The limit switch at the A end controls the sliding stop of the shuttle vehicle and the start of the grabbing and stacking of the robotic arm, and the limit switch at the B end controls the sliding stop of the shuttle vehicle;

[0032] The quartz glass raw materials fall into the shuttle car, the weight switch closes and the shuttle car slides (the limit switch at the B end is disconnected). When it reaches point A of the slide rail, the limit switch closes and the shuttle car stops sliding. Then the robotic arm starts to grab the quartz glass raw materials and stack them on the pallet. At the same time, the weight switch of the quartz glass raw materials is disconnected because they leave the shuttle car, and the shuttle car starts to slide. When it reaches point B of the slide rail, the limit switch closes and the shuttle car stops, waiting for the quartz glass raw materials to be cut and fall into the shuttle car for repeated cycles.

[0033] In summary, adding a normal pressure tank device, a vacuum transition tank device, and a vacuum feeding tank device can remove the air in the tank, further remove the gas and pollutants in the air, reduce the pollution to the quartz sand raw material, and thus improve the purity of the quartz glass;

[0034] The vacuum melting chamber device does not contain nitrogen, hydrogen or helium, thereby reducing the oxidation of the tungsten or molybdenum crucible and lowering the hydroxyl content in the quartz glass;

[0035] The secondary molding chamber device is separated from the vacuum melting furnace, which can increase the maximum outer diameter of the quartz tube to 1 meter. The molding mold can be flexibly changed to realize the production of different types of quartz glass materials, improve the variety of product types, and change the single disadvantage of the existing process. It has high flexibility. At the same time, large-sized quartz tubes can save the cost of subsequent tube expansion processes. Because the outer diameter required for the final application of general quartz tubes is much larger than the drawn tube, the existing process cannot draw extra-large-sized quartz tubes. This process can meet this demand;

[0036] The tube drawing synchronous cutting cabin device adopts automated cutting technology and automatically stacks quartz glass, which improves production efficiency and capacity.

[0037] A method for producing a quartz glass device by vacuum continuous melting, comprising:

[0038] Step 1: Open the controller body to make it work. When the first automatic gate valve is opened, the first quartz sand flows into the interior of the vacuum transition tank device;

[0039] Step 2: When the first automatic gate valve and the second automatic gate valve are closed at the same time, the first electric three-way valve electrically adjusts the first vacuum pump to communicate with the first pressure gauge and the vacuum transition tank device, and turns on the first vacuum pump;

[0040] Step 3: When the second automatic plug-in valve is closed, the second electric three-way valve is connected to the second vacuum pump through the electric adjustment vacuum feeding cabin device, and the second vacuum pump is turned on;

[0041] Step 4: The cooling medium enters from the cooling medium inlet, and flows out from the cooling medium outlet to take out the heat, thereby controlling the internal temperature of the vacuum melting chamber device;

[0042] Step 5: Nitrogen enters the secondary molding tungsten or molybdenum crucible from the first nitrogen filling port, covers and protects the liquid surface of the second melt, and flows out from the second nitrogen outlet;

[0043] Step 6: The second melt flows out of the forming mold and solidifies into a solid, and is guided vertically downward by the driven clamping of the driven drawing roller to enter the cooling chamber for cooling and shaping into a quartz glass raw material;

[0044] Step 7: The quartz glass raw material goes down and is clamped and pulled by the electric drawing roller into the interior of the tube drawing synchronous cutting cabin device, and the quartz glass raw material is held by the clamp of the dynamic laser cutting machine that moves up and down;

[0045] Step 8: Limit switches are installed at both ends A and B of the slide rail. The limit switch at end A controls the slide stop of the shuttle vehicle and the start of the grabbing and stacking of the robotic arm, and the limit switch at end B controls the slide stop of the shuttle vehicle.

[0046] Compared with the prior art, the present invention has the following beneficial effects:

[0047] The present invention provides a method and system device for producing quartz glass by continuous vacuum melting, which solves the problems currently faced in the quartz glass production process, namely, that tungsten or molybdenum crucibles in vacuum melting chambers are easily oxidized, the production type of quartz glass materials is single, molten quartz glass is easily introduced with hydroxyl groups (hydrogen pollution), gas-liquid inclusions inside quartz raw material quartz particles are difficult to remove, the production cycle of quartz glass materials is long, the cost is high, and the melting quality is not high;

[0048] By adding a vacuum transition chamber, the vacuum melting chamber is not filled with nitrogen, hydrogen or helium, and low-hydroxy quartz glass melt is obtained. Through the innovative use of adjustable forming molds, various types of quartz glass materials can be flexibly produced, such as: large and small round tubes, round rods, special-shaped tubes, special-shaped rods, plates, thick-walled tubes, solid lumps (quartz glass ingots). The current discontinuous production process can be made continuous through automation or appropriate adjustments, reducing the subsequent additional dehydroxylation process, greatly shortening the production cycle and reducing costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] Figure 1 It is a structural diagram of the present invention;

[0050] Figure 2 For the present invention Figure 1 Enlarged structural diagram of point A.

[0051] In the figure: 1. Automatic feeding device; 101. Controller body; 102. First pipeline; 103. Second pipeline; 2. Normal pressure tank device; 201. First sand level sensor; 202. First automatic gate valve; 203. First image observation; 204. First quartz sand; 3. Vacuum transition tank device; 301. First vacuum pump; 302. First pressure relief port; 303. First pressure gauge; 304. Second image observation; 305. Second quartz sand; 306. Second automatic gate valve; 307. First electric three-way valve; 308 , second sand level sensor; 4, vacuum feeding chamber device; 401, second vacuum pump; 402, second pressure relief port; 403, second pressure gauge; 404, third image observation; 405, third quartz sand; 406, electric broadcast wheel; 407, second electric three-way valve; 408, third sand level sensor; 409, funnel; 5, vacuum melting chamber device; 501, third vacuum pump; 502, third pressure gauge; 503, fourth image observation; 504, cooling medium inlet; 505, cooling medium outlet; 506, spreader; 507 , tungsten or molybdenum crucible; 508, heater; 509, refractory brick; 510, melt; 511, wet seal; 512, insulation; 513, temperature sensor; 514, tungsten or molybdenum flange; 515, non-matching seal; 516, furnace body; 517, welding seal; 6, secondary molding chamber device; 601, first nitrogen filling port; 602, fourth pressure gauge; 603, fifth image observation; 604, secondary molding tungsten or molybdenum crucible; 605, melt; 606, molding mold; 607, sixth image observation; 608, first nitrogen outlet; 6 09. Diameter and thickness laser measuring instrument; 610. Driven drawing roller; 7. Cooling chamber device; 701. Quartz glass raw materials; 702. Seventh image observation; 703. Electric drawing roller; 8. Pulling tube synchronous cutting chamber device; 801. Second nitrogen filling port; 802. Fifth pressure gauge; 803. Up and down dynamic laser cutting machine; 804. Eighth image observation; 805. Second nitrogen outlet; 806. Infrared sensor; 9. Docking and stacking device; 901. Docking vehicle; 902. Slide rail; 903. Robotic arm; 904. Pallet. DETAILED DESCRIPTION

[0052] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0053] like Figure 1 , Figure 2As shown, a device for producing quartz glass by vacuum continuous melting includes: an automatic feeding device 1, the feeding quantity is set by a controller, and the feeding stops automatically when the feeding quantity reaches the set value, and the automatic feeding device 1 includes a controller body 101, and the controller body 101 is provided with a first pipe 102 and a second pipe 103;

[0054] like Figure 1 , Figure 2 As shown, the atmospheric pressure tank device 2 is loaded with materials into the first main tank on the atmospheric pressure tank device 2 through the automatic loading device 1. The atmospheric pressure tank device 2 includes a first sand position sensor 201, a first automatic plug-in valve 202, a first image observation 203 and a first quartz sand 204. The other end of the first pipe 102 is inside the first quartz sand 204, and the other end of the second pipe 103 is installed directly above the atmospheric pressure tank device 2. The first sand position sensor 201 is used to sense the height of the first quartz sand 204 and transmit the data to the controller body 101. The first automatic plug-in valve 202 is opened or closed by the controller body 101. The first image observation 203 is used to observe the internal situation of the atmospheric pressure tank device 2.

[0055] As can be seen from the above, when the first automatic gate valve 202 is opened, the first quartz sand 204 flows into the interior of the vacuum transition tank device 3 .

[0056] like Figure 1 , Figure 2 As shown, the vacuum transition tank device 3 loads the second main tank on the vacuum transition tank device 3 by opening the atmospheric pressure tank device 2, and the vacuum transition tank device 3 loads the second main tank by opening the first automatic plug-in valve 202;

[0057] like Figure 1 , Figure 2 As shown, the vacuum transition tank device 3 includes a first vacuum pump 301, a first pressure relief port 302, a first pressure gauge 303, a second image observation 304, a second quartz sand 305, a second automatic plug-in valve 306, a first electric three-way valve 307 and a second sand level sensor 308. The first electric three-way valve 307 is connected to the first vacuum pump 301, the first pressure relief port 302 and the first pressure gauge 303. The other end of the first pressure relief port 302 is connected to the atmosphere through an air filter.

[0058] As can be seen from the above, when the first automatic plug-in valve 202 and the second automatic plug-in valve 306 are closed at the same time, the first electric three-way valve 307 electrically adjusts the first vacuum pump 301 to communicate with the first pressure gauge 303 and the vacuum transition tank device 3, turns on the first vacuum pump 301, and turns off the first vacuum pump 301 when the pressure value displayed by the first pressure gauge 303 is less than or equal to the preset value (otherwise turns on the vacuum pump), and waits for the second automatic plug-in valve 306 to be opened. After the second automatic plug-in valve 306 is opened, the second quartz sand 305 flows out of the vacuum transition tank device 3, and after the second sand level sensor 308 senses the lowest value, the second automatic plug-in valve 306 is closed in sequence, the first automatic plug-in valve 202 is opened, the first quartz sand 204 flows into the vacuum transition tank device 3, the first automatic plug-in valve 202 is closed, and the first vacuum pump 301 is turned on;

[0059] It should be noted that the traditional process uses hydrogen (or helium) + nitrogen as protective gas. Hydrogen protection is essentially impurity pollution, which will enter the quartz glass melt and turn into hydroxyl. During the use of quartz glass materials, hydroxyl will be released, which will reduce the high temperature resistance of the glass. In some uses, hydroxyl needs to be removed. This process is called dehydroxylation. Dehydroxylation takes a long time and is costly. In some cases, it is more expensive than molten quartz. It is difficult to remove hydroxyl from thicker glass using traditional dehydroxylation methods. At present, the optical fiber communication industry uses low-hydroxy quartz glass to draw optical fibers. Quartz glass produced using traditional chemical processes needs to be dehydroxylated during the chemical process, which causes pollution and high energy consumption.

[0060] By adding the function of the vacuum transition chamber device 3, since no hydroxyl is introduced, it has a great cost reduction and profit significance for the optical fiber industry. In the semiconductor and photovoltaic diffusion process, hydroxyl will soften the quartz glass, and this type of quartz glass also needs to be dehydroxylated. With the upgrading of semiconductor and photovoltaic products, the size of the quartz glass tube used is gradually increasing, and the volume of the diffusion tube dehydroxylation equipment required is also getting larger and larger, and the dehydroxylation cost and difficulty are also increasing. By using the process mentioned in the present invention, quartz glass with better melting quality can be obtained while saving the dehydroxylation cost.

[0061] like Figure 1 , Figure 2As shown, the vacuum feeding bunker device 4 is opened through the vacuum transition bunker device 3 to feed the third main bunker on the vacuum feeding bunker device 4. The vacuum feeding bunker device 4 includes a second vacuum pump 401, a second pressure relief port 402, a second pressure gauge 403, a third image observation 404, a third quartz sand 405, an electric broadcast wheel 406, a second electric three-way valve 407, a third sand level sensor 408 and a funnel 409. The other end of the second pressure relief port 402 is connected to the atmosphere through an air filter. The second automatic plug-in valve 306, the electric broadcast wheel 406 and the second electric three-way valve 407 are controlled by the controller body 101.

[0062] As can be seen from the above, when the second automatic plug-in valve 306 is closed, the second electric three-way valve 407 is connected to the second vacuum pump 401 through the electric adjustment vacuum feeding cabin device 4, the second vacuum pump 401 is turned on, and the second vacuum pump 401 is turned off after the pressure value displayed by the second pressure gauge 403 is ≤ the preset value, and the electric broadcast wheel 406 starts to rotate (if the pressure value displayed by the second pressure gauge 403 is greater than the preset value during the process, the electric broadcast wheel 406 stops rotating and the second vacuum pump 401 is turned on), the electric broadcast wheel 406 rotates to broadcast the third quartz sand 405 into the funnel 409, and it falls freely. When the third sand level sensor 408 senses the set low value, the second automatic plug-in valve 306 is opened in sequence, the second quartz sand 305 flows into the vacuum feeding cabin device 4, and after the second sand level sensor 308 senses the lowest value, the second automatic plug-in valve 306 is closed, the second vacuum pump 401 is turned on, and the feeding is circulated in sequence.

[0063] like Figure 1 , Figure 2 As shown, the vacuum melting chamber device 5 and the first melt 510 are used to melt a plurality of quartz sands into a melt, and the vacuum melting chamber device 5 includes a third vacuum pump 501, a third pressure gauge 502, a fourth image observation 503, a cooling medium inlet 504, a cooling medium outlet 505, a spreader 506, a tungsten or molybdenum crucible 507, a heater 508, a refractory brick 509, the first melt 510, a wet seal 511, a non-matching seal 515, a heat preservation 512 and a temperature sensor 516. 13. The cooling medium inlet 504 and the heater 508 are controlled by the controller body 101. A tungsten or molybdenum flange 514 is provided between the tungsten or molybdenum crucible 507 and the refractory brick 509. A furnace body 516 is provided below the refractory brick 509. A non-matching seal 515 is provided between the furnace body 516 and the tungsten or molybdenum flange 514. A wet seal 511 is provided between the tungsten or molybdenum crucible 507 and the first melt 510. A welding seal 517 is provided between the tungsten or molybdenum flange 514 and the tungsten or molybdenum crucible 507.

[0064] As can be seen from the above, the cooling medium enters from the cooling medium inlet 504, and flows out from the cooling medium outlet 505 to take out the heat, thereby controlling the internal temperature of the vacuum melting chamber device 5. The funnel 409 collects the quartz sand and flows into the top of the spreader 506. The spreader 506 has guide grooves and guide holes, which evenly divert the quartz sand and sprinkle it on the first melt 510 to melt it, and allow the first melt 510 to flow into the interior of the secondary molding chamber device 6.

[0065] like Figure 1 , Figure 2 As shown, the secondary molding chamber device 6 is used to solidify the molten first melt 510 into a solid with a preset specification shape. The secondary molding chamber device 6 includes a first nitrogen filling port 601, a fourth pressure gauge 602, a fifth image observation 603, a secondary molding tungsten or molybdenum crucible 604, a second melt 605, a molding mold 606, a sixth image observation 607, a first nitrogen outlet 608, a diameter thickness laser measuring instrument 609 and a driven drawing roller 610. The first nitrogen filling port 601 and the first nitrogen outlet 608 are controlled by the controller body 101, and the first nitrogen filling port 601 and the first nitrogen outlet 608 are connected to the secondary molding chamber device 6;

[0066] As can be seen from the above, nitrogen enters the secondary molding tungsten or molybdenum crucible 604 from the first nitrogen filling port 601, covers and protects the liquid surface of the second melt 605, and flows out from the second nitrogen outlet 805. The second melt 605 flows out from the gap of the molding mold 606 and solidifies into a solid with a preset specification shape, which is driven by the driven drawing roller 610 and is clamped vertically and guided downward.

[0067] like Figure 1 , Figure 2 As shown, the cooling chamber device 7 is used to allow the solidified solid to enter the interior of the cooling chamber device 7, so that it is cooled and shaped into one of a quartz glass tube, a quartz glass lump, a quartz glass rod and a quartz glass plate. The cooling chamber device 7 includes a quartz glass raw material 701, a seventh image observation 702 and an electric drawing roller 703. The electric drawing roller 703 is the main power for traction drawing. The wall thickness and diameter of the quartz glass raw material 701 are controlled by the drawing speed of the electric drawing roller 703.

[0068] As can be seen from the above, the second melt 605 flows out through the molding die 606 and solidifies into a solid. It is vertically guided downward by the driven drawing roller 610 to enter the cooling chamber for cooling and shaping into the quartz glass raw material 701. The quartz glass raw material 701 moves downward and is actively pulled downward by the electric drawing roller 703 to enter the interior of the tube drawing synchronous cutting chamber device 8.

[0069] like Figure 1 , Figure 2As shown, the tube-pulling synchronous cutting chamber device 8 is used for laser cutting of the quartz sand solid after cooling and shaping. The tube-pulling synchronous cutting chamber device 8 includes a second nitrogen filling port 801, a fifth pressure gauge 802, a vertically movable dynamic laser cutting machine 803, an eighth image observation 804, a second nitrogen outlet 805 and an infrared sensor 806. The second nitrogen filling port 801, the vertically movable dynamic laser cutting machine 803 and the second nitrogen outlet 805 are all controlled by the controller body 101. The second nitrogen filling port 801 and the second nitrogen outlet 805 are connected to the tube-pulling synchronous cutting chamber device 8;

[0070] As can be seen from the above, the quartz glass raw material 701 moves downward through the clamping and traction of the electric drawing roller 703 and enters the interior of the tube drawing synchronous cutting cabin device 8. The quartz glass raw material 701 is held by the clamp of the up-and-down dynamic laser cutting machine 803. At this time, the head of the up-and-down dynamic laser cutting machine 803 moves downward with the quartz glass raw material 701. During the downward process, the laser is turned on to cut around the circumference of the quartz glass raw material 701. After the cutting is completed, the laser of the up-and-down dynamic laser cutting machine 803 is turned off, the clamp is released, and the quartz glass raw material 701 falls to the shuttle vehicle 901. At the same time, the head of the up-and-down dynamic laser cutting machine 803 can be reset in multiple axes.

[0071] like Figure 1 , Figure 2 As shown, the docking stacking device 9 moves the cooled and shaped quartz sand solid to the stacking area. The docking stacking device 9 includes a docking vehicle 901, a slide rail 902, a mechanical arm 903 and a pallet 904. The docking vehicle 901 is equipped with a weight switch for controlling the sliding start of the docking vehicle 901.

[0072] As can be seen from the above, limit switches are installed at both ends A and B of the slide rail 902. The limit switch at the A end controls the sliding stop of the shuttle vehicle 901 and the start of the grabbing and stacking of the mechanical arm 903, and the limit switch at the B end controls the sliding stop of the shuttle vehicle 901.

[0073] The quartz glass raw material 701 falls into the shuttle trolley 901, the weight switch is closed and the shuttle trolley 901 slides (the limit switch at the B end is disconnected). When it reaches point A of the slide rail 902, the limit switch is closed, and the shuttle trolley 901 stops sliding. Then the robotic arm 903 starts to grab the quartz glass raw material 701 and stack it on the tray 904. At the same time, the weight switch of the quartz glass raw material 701 is disconnected because it leaves the shuttle trolley 901, and the shuttle trolley 901 starts to slide. When it reaches point B of the slide rail 902, the limit switch is closed and the shuttle trolley 901 stops, waiting for the quartz glass raw material 701 to be cut and fall into the shuttle trolley 901, which is repeated in a cycle.

[0074] In summary, adding the atmospheric pressure tank device 2, the vacuum transition tank device 3, and the vacuum feeding tank device 4 can remove the air in the tank, further remove the gas and pollutants in the air, reduce the pollution to the quartz sand raw material, and thus improve the purity of the quartz glass;

[0075] The vacuum melting chamber device 5 is not filled with nitrogen, hydrogen or helium, thereby reducing oxidation of the tungsten or molybdenum crucible 507 and reducing the hydroxyl content in the quartz glass;

[0076] The secondary molding chamber device 6 is separated from the vacuum melting furnace, and the maximum outer diameter of the quartz tube can be increased to 1 meter. The molding mold 606 can be flexibly changed to realize the production of different types of quartz glass materials, improve the variety of product types, and change the single disadvantage of the existing process. The flexibility is high. At the same time, the large-sized quartz tube can save the cost of the subsequent tube expansion process. Because the outer diameter required for the final application of the general quartz tube is much larger than the drawn tube, the existing process cannot draw a super-large-sized quartz tube, and this process can meet this demand;

[0077] The tube drawing synchronous cutting chamber device 8 adopts an automated cutting process and automatically stacks the quartz glass, thereby improving production efficiency and capacity.

[0078] A method for producing a quartz glass device by vacuum continuous melting, comprising:

[0079] Step 1: Open the controller body 101 to make it work. When the first automatic gate valve 202 is opened, the first quartz sand 204 flows into the interior of the vacuum transition tank device 3;

[0080] Step 2: When the first automatic gate valve 202 and the second automatic gate valve 306 are closed at the same time, the first electric three-way valve 307 electrically adjusts the first vacuum pump 301 to communicate with the first pressure gauge 303 and the vacuum transition tank device 3, and turns on the first vacuum pump 301;

[0081] Step 3: When the second automatic gate valve 306 is closed, the second electric three-way valve 407 is connected to the second vacuum pump 401 through the electric adjustment vacuum feeding cabin device 4, and the second vacuum pump 401 is turned on;

[0082] Step 4: The cooling medium enters through the cooling medium inlet 504 and flows out through the cooling medium outlet 505 to remove the heat so as to control the internal temperature of the vacuum melting chamber device 5;

[0083] Step 5: Nitrogen enters the secondary molding tungsten or molybdenum crucible 604 from the first nitrogen filling port 601, covers and protects the liquid surface of the second melt 605, and flows out from the second nitrogen outlet 805;

[0084] Step 6: The second melt 605 flows out through the molding die 606 and solidifies into a solid, and is guided downward vertically by the driven drawing roller 610 to enter the cooling chamber for cooling and shaping into the quartz glass raw material 701;

[0085] Step 7: The quartz glass raw material 701 moves downward through the clamping and traction of the electric drawing roller 703 and enters the interior of the tube drawing synchronous cutting chamber device 8, and the quartz glass raw material 701 is held by the clamp of the dynamic laser cutting machine 803 that moves up and down;

[0086] Step 8: Limit switches are installed at both ends A and B of the slide rail 902. The limit switch at the A end controls the sliding stop of the shuttle vehicle 901 and the start of the grabbing and stacking of the robotic arm 903, and the limit switch at the B end controls the sliding stop of the shuttle vehicle 901.

[0087] Furthermore, the present design application is applied to the production of quartz glass. The present invention provides a method and system device for producing quartz glass by vacuum continuous melting, which solves the problems currently faced in the quartz glass production process, such as the tungsten or molybdenum crucible is easily oxidized in the vacuum melting chamber, the quartz material production type is single, the quartz raw material production cycle is long, the cost is high, and the production capacity is insufficient;

[0088] By adding a vacuum transition chamber device 3, the vacuum melting chamber device 5 is not filled with nitrogen, hydrogen or helium, and a low-hydroxy quartz glass melt is obtained. By innovatively using a variable forming mold 606, various types of quartz glass materials can be flexibly produced, such as: large and small round tubes, round rods, special-shaped tubes, special-shaped rods, plates, thick-walled tubes, solid lumps (quartz glass ingots). The current discontinuous production process is made continuous through automation or appropriate adjustments, reducing the subsequent additional dehydroxylation process, greatly shortening the production cycle and reducing costs.

[0089] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A device for producing quartz glass by continuous vacuum melting, characterized in that: include: The automatic feeding device (1) sets the feeding quantity through the controller, and stops automatically when the feeding quantity reaches the set value; The atmospheric pressure tank device (2) is used to load materials into a first main tank on the atmospheric pressure tank device (2) through an automatic loading device (1); The vacuum transition tank device (3) is configured to load materials to the second main tank on the vacuum transition tank device (3) by opening the atmospheric pressure tank device (2), and the vacuum transition tank device (3) is configured to load materials to the second main tank by opening the first automatic gate valve (202); The vacuum transition tank device (3) comprises a first vacuum pump (301), a first pressure relief port (302), a first pressure gauge (303), a second image observation (304), a second quartz sand (305), a second automatic plug-in valve (306), a first electric three-way valve (307) and a second sand level sensor (308), wherein the first electric three-way valve (307) is connected to the first vacuum pump (301), the first pressure relief port (302) and the first pressure gauge (303), and the other end of the first pressure relief port (302) is connected to the atmosphere through an air filter; A vacuum feeding bunker device (4) is used to load materials into a third main bunker on the vacuum feeding bunker device (4) by opening the vacuum transition bunker device (3). The vacuum feeding bunker device (4) comprises a second vacuum pump (401), a second pressure relief port (402), a second pressure gauge (403), a third image observation (404), a third quartz sand (405), an electric broadcast wheel (406), a second electric three-way valve (407), a third sand level sensor (408) and a funnel (409). The other end of the second pressure relief port (402) is connected to the atmosphere through an air filter. The second automatic gate valve (306), the electric broadcast wheel (406) and the second electric three-way valve (407) are controlled by a controller body (101). A vacuum melting chamber device (5) and a first melt (510) are used to melt a plurality of quartz sands into a melt, wherein the vacuum melting chamber device (5) comprises a third vacuum pump (501), a third pressure gauge (502), a fourth image observation (503), a cooling medium inlet (504), a cooling medium outlet (505), a spreader (506), a tungsten or molybdenum crucible (507), a heater (508), a refractory brick (509), a first melt (510), a wet seal (511), a non-matching seal (515), a heat preservation (512) and a temperature sensor (513), wherein the cooling The medium inlet (504) and the heater (508) are controlled by the controller body (101); a tungsten or molybdenum flange (514) is provided between the tungsten or molybdenum crucible (507) and the refractory brick (509); a furnace body (516) is provided below the refractory brick (509); a non-matching seal (515) is provided between the furnace body (516) and the tungsten or molybdenum flange (514); a wet seal (511) is provided between the tungsten or molybdenum crucible (507) and the first melt (510); and a welding seal (517) is provided between the tungsten or molybdenum flange (514) and the tungsten or molybdenum crucible (507); A secondary molding chamber device (6) is used to solidify the molten first melt (510) into a solid with a preset specification shape; A cooling chamber device (7) is used to allow the solidified solid to enter the interior of the cooling chamber device (7) so as to cool the solidified solid to form a quartz glass tube, a quartz glass lump, a quartz glass rod or a quartz glass plate; A tube-pulling synchronous cutting chamber device (8) is used to perform laser cutting on the quartz sand solid after cooling and shaping; The stacking device (9) is connected to move the quartz sand solid after cooling and shaping to the stacking area.

2. The device for producing quartz glass by vacuum continuous melting according to claim 1, characterized in that: The automatic loading device (1) comprises a controller body (101), and a first pipeline (102) and a second pipeline (103) are arranged on the controller body (101).

3. The device for producing quartz glass by vacuum continuous melting according to claim 2, characterized in that: The atmospheric pressure tank device (2) comprises a first sand position sensor (201), a first automatic gate valve (202), a first image observation (203) and a first quartz sand (204); the other end of the first pipe (102) is inside the first quartz sand (204); the other end of the second pipe (103) is installed directly above the atmospheric pressure tank device (2); the first sand position sensor (201) is used to sense the height of the first quartz sand (204) and transmit the data to the controller body (101); the first automatic gate valve (202) is opened or closed by the controller body (101); and the first image observation (203) is used to observe the internal situation of the atmospheric pressure tank device (2).

4. The device for producing quartz glass by vacuum continuous melting according to claim 3, characterized in that: The secondary molding chamber device (6) comprises a first nitrogen filling port (601), a fourth pressure gauge (602), a fifth image observation (603), a secondary molding tungsten or molybdenum crucible (604), a second melt (605), a molding die (606), a sixth image observation (607), a first nitrogen outlet (608), a diameter thickness laser measuring instrument (609) and a driven drawing roller (610), wherein the first nitrogen filling port (601) and the first nitrogen outlet (608) are controlled by a controller body (101), and the first nitrogen filling port (601) and the first nitrogen outlet (608) are connected to the secondary molding chamber device (6).

5. The device for producing quartz glass by vacuum continuous melting according to claim 4, characterized in that: The cooling chamber device (7) comprises a quartz glass raw material (701), a seventh image observation (702) and an electric drawing roller (703), wherein the electric drawing roller (703) is the main driving force for traction and drawing, and the wall thickness and diameter of the quartz glass raw material (701) are controlled by the drawing speed of the electric drawing roller (703).

6. The device for producing quartz glass by vacuum continuous melting according to claim 5, characterized in that: The pipe-pulling and synchronous cutting cabin device (8) comprises a second nitrogen filling port (801), a fifth pressure gauge (802), a vertically movable dynamic laser cutting machine (803), an eighth image observation (804), a second nitrogen outlet (805) and an infrared sensor (806); the second nitrogen filling port (801), the vertically movable dynamic laser cutting machine (803) and the second nitrogen outlet (805) are all controlled by a controller body (101); the second nitrogen filling port (801) and the second nitrogen outlet (805) are connected to the pipe-pulling and synchronous cutting cabin device (8).

7. The device for producing quartz glass by vacuum continuous melting according to claim 6, characterized in that: The docking and stacking device (9) comprises a docking vehicle (901), a slide rail (902), a mechanical arm (903) and a pallet (904). The docking vehicle (901) is provided with a weight switch for controlling the sliding start of the docking vehicle (901).

8. A method for producing a quartz glass device by vacuum continuous melting according to any one of claims 1 to 7, comprising: Step 1: Open the controller body 101 to make it work. When the first automatic gate valve 202 is opened, the first quartz sand 204 flows into the interior of the vacuum transition tank device 3; Step 2: When the first automatic gate valve 202 and the second automatic gate valve 306 are closed at the same time, the first electric three-way valve 307 electrically adjusts the first vacuum pump 301 to communicate with the first pressure gauge 303 and the vacuum transition tank device 3, and turns on the first vacuum pump 301; Step 3: When the second automatic gate valve 306 is closed, the second electric three-way valve 407 is connected to the second vacuum pump 401 through the electric adjustment vacuum feeding cabin device 4, and the second vacuum pump 401 is turned on; Step 4: The cooling medium enters through the cooling medium inlet 504 and flows out through the cooling medium outlet 505 to remove the heat so as to control the internal temperature of the vacuum melting chamber device 5; Step 5: Nitrogen enters the secondary molding tungsten or molybdenum crucible 604 from the first nitrogen filling port 601, covers and protects the liquid surface of the second melt 605, and flows out from the second nitrogen outlet 805; Step 6: The second melt 605 flows out through the molding die 606 and solidifies into a solid, and is guided downward vertically by the driven drawing roller 610 to enter the cooling chamber for cooling and shaping into the quartz glass raw material 701; Step 7: The quartz glass raw material 701 moves downward through the clamping and traction of the electric drawing roller 703 and enters the interior of the tube drawing synchronous cutting chamber device 8, and the quartz glass raw material 701 is held by the clamp of the dynamic laser cutting machine 803 that moves up and down; Step 8: Limit switches are installed at both ends A and B of the slide rail 902. The limit switch at the A end controls the sliding stop of the shuttle vehicle 901 and the start of the grabbing and stacking of the robotic arm 903, and the limit switch at the B end controls the sliding stop of the shuttle vehicle 901.

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