A material loading and clamping tool for PVD coating

Abstract

The present invention relates to the field of PVD coating feeding technology, specifically to a loading and clamping tool for PVD coating, including a coating frame, a coating unit and a film material box, one side of the coating frame is fixedly connected to a first feed cover, the other side of the coating frame is fixedly connected to a second feed cover, one end of the first feed cover and the second feed cover are fixedly connected to a discharge side frame, and a lifting slot is provided at the top of the discharge side frame. The present invention can enable the equipment to switch the loading and unloading of materials to achieve continuous and efficient PVD coating production operation of the equipment. In actual use, the staff first starts the telescopic push rod at the bottom of the lifting plate inside the discharge side frame at one end of the first feed cover or the second feed cover, so that it drives the top lifting plate together with the loading mold frame as a whole to extend from the lifting slot of the discharge side frame.

Description

Technical Field

[0001] The invention relates to the technical field of PVD film feeding, in particular to a feeding and clamping tool for PVD film coating. Background Art

[0002] Physical vapor deposition, abbreviated as PVD technology, refers to the technology of using physical methods to vaporize the surface of the material source into gaseous atoms or molecules, or partially ionize into ions under vacuum conditions, and deposit a thin film with some special functions on the surface of the substrate through a low-pressure gas process. Physical vapor deposition is one of the main surface treatment technologies. PVD coating technology is mainly divided into three categories: vacuum evaporation coating, vacuum sputtering coating and vacuum ion coating. The main methods of physical vapor deposition are: vacuum evaporation, sputtering coating, arc plasma coating, ion plating and molecular beam epitaxy, etc. The corresponding vacuum coating equipment includes vacuum evaporation Coating machine, vacuum sputtering coating machine and vacuum ion coating machine. With the improvement of deposition methods and technologies, physical vapor deposition technology can not only deposit metal films and alloy films, but also deposit compounds, ceramics, semiconductors, polymer films, etc. The physical vapor deposition technology has a simple process, improves the environment, is pollution-free, consumes less materials, forms a uniform and dense film, and has a strong bonding force with the substrate. This technology is widely used in aerospace, electronics, optics, machinery, construction, light industry, metallurgy, materials and other fields, and can prepare film layers with wear-resistant, corrosion-resistant, decorative, conductive, insulating, photoconductive, piezoelectric, magnetic, lubricating, superconducting and other properties.

[0003] For example, a patent document with the announcement number CN 117026196 B discloses a loading and clamping tool for PVD coating, including a base, a moving structure, a placement structure, a clamping structure, a chassis, a turntable, a driving structure, a rotating structure, a positioning block and a mounting hole. The moving structure can realize the placement and removal of pipe fittings in large quantities, avoiding the need for multiple removal and placement of pipe fittings. In the process of placing the pipe fittings in the placement structure, the clamping structure can be pressed, and then the component for placing the pipe inside the placement structure can be rotated. When the placement component is rotated, the adjacent placement components can be avoided from resisting the pipe fittings, thereby facilitating the placement and removal of the pipe fittings. When the placement component inside the placement structure is produced, the distance between two adjacent placement components can be shortened, so that the placement structure can place more pipe fittings, thereby effectively improving the use effect.

[0004] However, when this structure is used for actual PVD coating loading, due to the limitation of its own structure, it can only complete the loading and unloading operations of the coating material by switching on and off the PVD coating equipment. The overall operation mode causes the PVD coating equipment to be shut down for a long time, waiting for the completion of loading and unloading, and cannot realize fast switching loading and unloading operations, and cannot realize the continuous and efficient completion of PVD coating operations by the equipment. In addition, during the coating process, it is impossible to realize more precise clamping and fixing of the PVD coating operation. At the same time, the equipment cannot quickly remove the material inside the coating equipment, and cannot remove the excess coating material on the surface of the material, and cannot meet the daily use needs. Therefore, it is urgent to design a loading and clamping tooling for PVD coating to solve the above problems. Summary of the invention

[0005] The purpose of the present invention is to provide a loading and clamping tool for PVD coating, so as to solve the problem that the existing structure proposed in the above background technology can only start and stop the PVD coating equipment first, and then complete the loading and unloading operations of the coating material due to its own structural limitations when it is used for actual PVD coating. The overall operation mode causes the PVD coating equipment to be shut down for a long time, waiting for the completion of loading and unloading, and cannot achieve fast switching loading and unloading operations, and cannot achieve continuous and efficient PVD coating operations of the equipment. In addition, during the coating process, it is impossible to achieve more precise clamping and fixing of the PVD coating operation. At the same time, the equipment cannot quickly remove the material inside the coating equipment, and cannot remove the excess coating material on the surface of the material, and cannot meet the daily use needs.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a loading and clamping tool for PVD coating, comprising a coating frame, a coating unit is arranged at the top of the coating frame, a film material box is fixedly connected to the top of the coating unit, a first material feeding cover is fixedly connected to one side of the coating frame, a second material feeding cover is fixedly connected to the other side of the coating frame, one end of the first material feeding cover and the second material feeding cover are both fixedly connected to a discharge side frame, a lifting groove is provided at the top of the discharge side frame, a feeding bracket is movably connected to the inner bottom walls of the coating frame, the first material feeding cover and the second material feeding cover, outer cover arc connecting plates are fixedly connected to the two ends of the surface of the feeding bracket, lifting plates are arranged on both sides between the outer cover arc connecting plates, and a telescopic push rod is arranged at the bottom end of the lifting plate; A conveying frame, the bottom end of the coating frame is fixedly connected to the conveying frame, one end of the conveying frame is provided with a driving motor, the bottom center of the conveying frame is fixedly connected to an air control base, both sides of the air control base are fixedly connected to conveying side tubes, the top end of the conveying side tube is fixedly connected to a shrinking frame, and the side of the shrinking frame is fixedly connected to a shrinking cover.

[0007] Preferably, a top-fixing airbag is provided inside the shrinkage frame, one end of the top-fixing airbag is fixedly connected to a top-connecting plate, and a fitting rubber pad is provided on the surface of the top-connecting plate.

[0008] Preferably, a suction frame is provided at the top of the shrinkage frame, a suction unit is provided inside the suction frame, a collecting filter element is provided at the bottom end of the suction frame, one end of the collecting filter element is fixedly connected to a diversion pipe, both ends of the diversion pipe are fixedly connected to a suction ring seat, a sealing top cover is movably connected to the surface of the suction ring seat, and a suction ring grille is provided on the inner wall of the suction ring seat.

[0009] Preferably, an air control unit is arranged inside the air control base, air control mesh grooves are provided at both ends of the air control base, and an air delivery valve port is arranged at the top end of the delivery side pipe.

[0010] Preferably, a reciprocating screw rod is arranged inside the conveying frame through a driving motor, and a movable shaft is arranged at one end of the reciprocating screw rod.

[0011] Preferably, a center frame is fixedly connected to the center of the surface of the feed bracket, inner cover arc connecting plates are fixedly connected to both sides of the center frame, and a clamping groove is provided between the inner cover arc connecting plates and the connecting blocks.

[0012] Preferably, the bottom end of the feed bracket is fixedly connected to a limiting slide bar, and a reciprocating sleeve is arranged inside the limiting slide bar.

[0013] Preferably, a loading mold frame is provided at the bottom of the lifting plate, a connecting block is fixedly connected to the inner wall of the inner cover arc plate, one end of the connecting block is fixedly connected to a limiting ring sleeve, and a fitting rubber ring is provided between the limiting ring sleeve and the lifting plate.

[0014] Preferably, the inner wall of the coating frame is provided with a material mixing liner, and the top of the material mixing liner is provided with a feed grid.

[0015] Preferably, a conveying groove is provided inside the coating frame, the first material conveying cover and the second material conveying cover, and a limiting sliding groove is provided on the inner bottom wall of the conveying groove.

[0016] Compared with the prior art, the present invention has the following beneficial effects: The feeding and clamping fixture for PVD coating, through the arranged coating frame, coating unit, film material box, first feeding cover, second feeding cover, discharge side frame, lifting trough, feeding bracket, outer cover arc plate, lifting plate, telescopic push rod, conveying frame, driving motor, reciprocating screw rod, movable shaft, center frame, inner cover arc plate, clamping groove, limit slide bar, reciprocating shaft sleeve, feeding mold frame, connecting block, limit ring sleeve, fitting rubber ring, material leveling liner, feeding grid, conveying trough and limit slide groove, can make the equipment realize continuous and efficient PVD coating production operation through material switching loading and unloading, in actual During use, the staff first starts the telescopic push rod at the bottom of the lifting plate inside the discharge side frame at one end of the first feed cover or the second feed cover, so that it drives the top lifting plate together with the loading mold frame as a whole to extend from the lifting slot of the discharge side frame, and then evenly arranges and stacks the materials that need to be PVD coated at the loading mold frame at the bottom of the lifting plate, and then retracts the loading mold frame into the inside of the discharge side frame through the lifting plate and the telescopic push rod. When the loading mold frame is lifted, it can be positioned through the limit ring sleeve connected to the inner wall connecting block of the inner cover arc plate, and the limit ring sleeve and the lifting plate are connected. The fitting rubber ring between the two is used for positioning and fitting operation. At this time, the driving motor at one end of the conveying frame can be started to drive the reciprocating screw inside the conveying frame to rotate and adjust around the movable shaft. Then, the feeding bracket, with the assistance of the bottom limiting slide bar and the reciprocating shaft sleeve, performs the limited sliding operation at the limiting slide groove on the bottom wall of the conveying trough, and quickly feeds the loading mold frame carrying the PVD coating material into the inner center of the coating frame. At this time, it is only necessary to start the coating unit and the film material box on the top of the coating frame, and the PVD coating gas material can be evenly fed into the interior of the coating frame through the material mixing liner and the feeding grid. The PVD coating operation of all materials inside the feeding mold frame is performed in pairs, and the driving motor is started subsequently, so that the feed bracket as a whole can be quickly switched and used inside the coating frame, the first feed cover and the second feed cover, and the two sets of lifting plates are quickly switched around the inside of the coating frame. During the switching process, the inner cover arc plates on both sides of the center frame cooperate with the outer cover arc plates at both ends of the feed bracket surface to perform rapid sealing and docking operations on both sides of the coating frame to ensure the air-material tightness of the PVD coating, greatly improve the equipment's production efficiency of continuous PVD coating of materials, and reflect the practicality of the equipment design.

[0017] The feeding and clamping tooling for PVD coating further improves the overall use effect of the equipment through the coating frame, coating unit, film material box, first material feeding cover, second material feeding cover, material discharge side frame, air control base, conveying side pipe, shrinkage frame, shrinkage cover, top solid air bag, top connecting plate, bonding rubber pad, suction frame, suction unit, collection filter element, diverter pipe, suction ring seat, sealing top cover, suction ring grille, air control unit, air control mesh slot and air delivery valve port. In daily use, when the delivery When the material bracket carries two sets of loading mold frames to switch PVD coating operations inside the coating frame, the air control unit inside the air control base can be started to suck air from the air control mesh slots at both ends, and then the air filling and deflation adjustment operations are performed to the top solid airbags inside the shrink frame and the shrink cover through the conveying side pipe and the air supply valve at the top, and the top connecting plate and the fitting pad at one end are adaptively docked to the clamping grooves of the outer cover arc connecting plate and the inner cover arc connecting plate to align the top plate and the top solid airbags inside the coating frame. The positioning and clamping operation at the lifting plate of the upper part ensures the stability of the lifting plate during PVD coating. At the same time, the collecting filter element at the bottom of the suction frame can be started daily, and then the shunt pipe at one end and the suction ring seats at both ends of the shunt pipe are cooperated to perform continuous suction operation to achieve uniform annular suction operation at the suction ring grille, and the lifting plate inside the discharge side frame at one end of the first feed hood and the second feed hood is covered as a whole. When the telescopic push rod at the bottom of the lifting plate is started, driving the feeding mold frame and all the PVD coating materials to extend at the lifting slot, the lifting plate can adapt and lift the sealing top cover on the surface of the suction ring seat, and then the continuous suction at the suction ring grille can remove the excess gas attached to the surface of the material in the feeding mold frame during PVD coating, and the removed gas quickly follows the shunt pipe and the suction frame, and is collected inside the suction unit, thereby greatly improving the PVD coating effect of the equipment and reflecting the comprehensiveness of the equipment design. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a three-dimensional schematic diagram of the structure of the present invention; Figure 2 It is an overall schematic diagram of the coating frame structure of the present invention; Figure 3 It is an overall schematic diagram of the material conveying bracket structure of the present invention; Figure 4 It is an overall schematic diagram of the lifting plate structure of the present invention; Figure 5 It is an overall schematic diagram of the conveyor frame structure of the present invention; Figure 6 It is an overall schematic diagram of the air control base structure of the present invention; Figure 7 It is an overall schematic diagram of the shrinkage frame structure of the present invention; Figure 8 It is an overall schematic diagram of the shunt pipe structure of the present invention; Fig. 9 For the present invention Figure 1 A magnified schematic diagram of the structure at center A; Fig.10 For the present invention Figure 1 A magnified schematic diagram of the structure at B in the figure.

[0019] In the figure: 1, coating frame; 2, coating unit; 3, film material box; 4, first feed cover; 5, second feed cover; 6, discharge side frame; 7, lifting slot; 8, feed bracket; 9, outer cover arc plate; 10, lifting plate; 11, telescopic push rod; 12, conveying frame; 13, driving motor; 14, air control base; 15, conveying side pipe; 16, shrinking frame; 17, shrinking cover; 18, top fixing airbag; 19, top connecting plate; 20, bonding pad; 21, suction frame; 22, suction unit; 23, collecting filter element; 24. Diverter pipe; 25. Air suction ring seat; 26. Sealing top cover; 27. Air suction ring grille; 28. Air control unit; 29. ​​Air control mesh slot; 30. Air delivery valve port; 31. Reciprocating screw rod; 32. Movable shaft; 33. Center frame; 34. Inner cover arc plate; 35. Clamping groove; 36. Limiting slide bar; 37. Reciprocating shaft sleeve; 38. Loading mold frame; 39. Connecting block; 40. Limiting ring sleeve; 41. Fitting rubber ring; 42. Material liner; 43. Feeding grille; 44. Conveying trough; 45. Limiting slide groove. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] See also Figure 1-Figure 10 , an embodiment provided by the present invention: A material loading and clamping tool for PVD coating, comprising a coating frame 1, a coating unit 2 is arranged at the top of the coating frame 1, a film material box 3 is fixedly connected to the top of the coating unit 2, a first material feeding cover 4 is fixedly connected to one side of the coating frame 1, a second material feeding cover 5 is fixedly connected to the other side of the coating frame 1, one end of the first material feeding cover 4 and the second material feeding cover 5 are fixedly connected to a discharge side frame 6, a lifting groove 7 is provided at the top of the discharge side frame 6, a material feeding bracket 8 is movably connected to the inner bottom wall of the coating frame 1, the first material feeding cover 4 and the second material feeding cover 5, and the surface of the material feeding bracket 8 is fixed at both ends. The outer cover arc connecting plate 9 is fixedly connected, and a lifting plate 10 is arranged on both sides between the outer cover arc connecting plates 9. A telescopic push rod 11 is arranged at the bottom end of the lifting plate 10. The center of the surface of the feeding bracket 8 is fixedly connected with a center frame 33, and the inner cover arc connecting plates 34 are fixedly connected on both sides of the center frame 33. A clamping groove 35 is arranged between the inner cover arc connecting plates 34 and the connecting block 39. The bottom end of the feeding bracket 8 is fixedly connected with a limited position slide 36, and a reciprocating shaft sleeve 37 is arranged inside the limited position slide 36. A feeding mold frame 38 is arranged at the bottom of the lifting plate 10, and the inner wall of the inner cover arc connecting plate 34 is fixed. A connecting block 39 is connected, one end of the connecting block 39 is fixedly connected to a limiting ring sleeve 40, a fitting rubber ring 41 is arranged between the limiting ring sleeve 40 and the lifting plate 10, the inner wall of the coating frame 1 is provided with a material lining 42, the top of the material lining 42 is provided with a feeding grid 43, the coating frame 1, the first material feeding cover 4 and the second material feeding cover 5 are provided with a conveying groove 44, and the inner bottom wall of the conveying groove 44 is provided with a limiting sliding groove 45, the driving motor 13 at one end of the conveying frame 12 is started, so that it drives the reciprocating screw rod 31 inside the conveying frame 12 to move around the movable shaft 32 After the rotation adjustment operation, the feed bracket 8, with the assistance of the bottom limit slide bar 36 and the reciprocating shaft sleeve 37, performs the limit sliding operation along the limit slide groove 45 on the bottom wall of the conveying groove 44, and quickly delivers the loading mold frame 38 carrying the PVD coating material to the inner center of the coating frame 1. At this time, it is only necessary to start the coating unit 2 and the film material box 3 at the top of the coating frame 1, and the PVD coating gas material can be evenly delivered into the interior of the coating frame 1 through the material mixing liner 42 and the feed grid 43, completing the PVD coating operation of all materials inside the loading mold frame 38.

[0022] The conveying frame 12 is fixedly connected to the bottom end of the coating frame 1, and a driving motor 13 is arranged at one end of the conveying frame 12. The bottom center of the conveying frame 12 is fixedly connected to an air control base 14, and both sides of the air control base 14 are fixedly connected to conveying side pipes 15. The top of the conveying side pipe 15 is fixedly connected to a shrinking frame 16, and the side of the shrinking frame 16 is fixedly connected to a shrinking cover 17. A top solid air bag 18 is arranged inside the shrinking frame 16, and one end of the top solid air bag 18 is fixedly connected to a top connecting plate 19, and a bonding rubber pad 20 is arranged on the surface of the top connecting plate 19. A suction frame 21 is arranged at the top of the shrinking frame 16, and a suction unit 22 is arranged inside the suction frame 21. A collecting filter element 23 is arranged at the bottom end of the suction frame 21, and one end of the collecting filter element 23 is fixedly connected to a shunt pipe 24, and both ends of the shunt pipe 24 are fixedly connected to a suction ring seat 25, and a sealing top cover 26 is movably connected to the surface of the suction ring seat 25. The inner wall is provided with an air suction ring grille 27, an air control unit 28 is provided inside the air control base 14, air control mesh grooves 29 are provided at both ends of the air control base 14, and an air supply valve port 30 is provided at the top of the conveying side pipe 15. A reciprocating screw rod 31 is provided inside the conveying frame 12 through a driving motor 13, and a movable shaft 32 is provided at one end of the reciprocating screw rod 31. The air control unit 28 inside the air control base 14 is started to make it perform an air suction operation from the air control mesh grooves 29 at both ends, and then the inflation and deflation adjustment operation of the top fixing air bag 18 inside the shrinking frame 16 and the shrinking cover 17 is performed through the conveying side pipe 15 and the air supply valve port 30 at the top, and the top connecting plate 19 and the bonding pad 20 at one end are adaptively connected to the clamping groove 35 of the outer cover arc connecting plate 9 and the inner cover arc connecting plate 34, and the positioning and clamping operation of the lifting plate 10 inside the coating frame 1 is performed to ensure the stability of the lifting plate 10 during PVD coating.

[0023] Working principle: When in use, the user first starts the telescopic push rod 11 at the bottom of the lifting plate 10 inside the discharge side frame 6 at one end of the first feed cover 4 or the second feed cover 5, so that it drives the top lifting plate 10 together with the loading mold frame 38 as a whole, and extends from the lifting slot 7 of the discharge side frame 6, and then evenly arranges and stacks the materials that need to be PVD coated at the loading mold frame 38 at the bottom of the lifting plate 10, and then retracts the loading mold frame 38 into the inside of the discharge side frame 6 through the lifting plate 10 and the telescopic push rod 11, and when the loading mold frame 38 is lifted, it can be positioned by the limiting ring sleeve 40 connected to the inner wall connecting block 39 of the inner cover arc plate 34, and the fitting rubber ring 41 between the limiting ring sleeve 40 and the lifting plate 10 is positioned The laminating operation can be performed by starting the driving motor 13 at one end of the conveying frame 12, so that it can drive the reciprocating screw 31 inside the conveying frame 12 to rotate and adjust around the movable shaft 32, and then the feeding bracket 8, with the assistance of the bottom limiting slide bar 36 and the reciprocating shaft sleeve 37, performs the limiting sliding operation along the limiting slide groove 45 on the bottom wall of the conveying groove 44, and quickly feeds the loading mold frame 38 carrying the PVD coating material into the inner center of the coating frame 1. At this time, it is only necessary to start the coating unit 2 and the film material box 3 at the top of the coating frame 1, so that the PVD coating gas can be evenly fed into the interior of the coating frame 1 through the material mixing liner 42 and the feeding grid 43, completing the PVD coating operation of all materials inside the loading mold frame 38. The machine 13 can quickly switch the feeding bracket 8 as a whole between the coating frame 1, the first feeding cover 4 and the second feeding cover 5 for use, and quickly switch the two sets of lifting plates 10 around the coating frame 1. During the switching process, the inner cover arc plates 34 on both sides of the center frame 33 cooperate with the outer cover arc plates 9 at both ends of the surface of the feeding bracket 8 to perform a rapid sealing docking operation on both sides of the coating frame 1 to ensure the air-material tightness of the PVD coating, greatly improving the production efficiency of the equipment for continuous PVD coating of materials. In daily use, when the feeding bracket 8 carries two sets of loading mold frames 38 to switch the PVD coating operation inside the coating frame 1, the air control unit 28 inside the air control base 14 can be adapted to start the air control unit 28 from the control at both ends. The air suction operation is performed at the wind net slot 29, and then the inflation and deflation adjustment operation is performed to the top solid airbag 18 inside the shrink frame 16 and the shrink cover 17 through the conveying side pipe 15 and the air delivery valve port 30 at the top, and the top connecting plate 19 and the fitting rubber pad 20 at one end are adaptively docked to the clamping groove 35 of the outer cover arc plate 9 and the inner cover arc plate 34, and the positioning and clamping operation of the lifting plate 10 inside the coating frame 1 is performed to ensure the stability of the lifting plate 10 during PVD coating. At the same time, the collecting filter element 23 at the bottom of the suction frame 21 can be started daily, and then the shunt pipe 24 at one end and the suction ring seat 25 at both ends of the shunt pipe 24 are cooperated to perform continuous suction operation to achieve uniform annular suction operation at the suction ring grille 27.The lifting plate 10 located inside the discharge side frame 6 at one end of the first feeding cover 4 and the second feeding cover 5 is integrally covered. When the telescopic push rod 11 at the bottom of the lifting plate 10 is started, the feeding mold frame 38 and all PVD coating materials are extended at the lifting slot 7. The lifting plate 10 can adapt and lift the sealing top cover 26 on the surface of the suction ring seat 25. Then, the continuous suction at the suction ring grille 27 can remove the excess gas attached to the surface of the material in the feeding mold frame 38 during PVD coating. The removed gas quickly flows along the shunt pipe 24 and the suction frame 21, and is collected inside the suction unit 22, thereby greatly improving the effect of the equipment in performing PVD coating. The above is the entire working principle of the present invention.

[0024] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

Claims

1. A material loading and clamping tool for PVD coating, comprising a coating frame (1), characterized in that: A coating unit (2) is arranged at the top of the coating frame (1), a film material box (3) is fixedly connected to the top of the coating unit (2), a first material feed cover (4) is fixedly connected to one side of the coating frame (1), a second material feed cover (5) is fixedly connected to the other side of the coating frame (1), one end of each of the first material feed cover (4) and the second material feed cover (5) is fixedly connected to a discharge side frame (6), a lifting groove (7) is provided at the top of the discharge side frame (6), a material feed bracket (8) is movably connected to the inner bottom wall of the coating frame (1), the first material feed cover (4) and the second material feed cover (5), an outer cover arc connecting plate (9) is fixedly connected to the two ends of the surface of the material feed bracket (8), a lifting plate (10) is arranged on both sides between the outer cover arc connecting plates (9), and a telescopic push rod (11) is arranged at the bottom end of the lifting plate (10); A conveying frame (12), wherein the bottom end of the coating frame (1) is fixedly connected to the conveying frame (12), one end of the conveying frame (12) is provided with a driving motor (13), the bottom center of the conveying frame (12) is fixedly connected to an air control base (14), both sides of the air control base (14) are fixedly connected to conveying side tubes (15), the top end of the conveying side tube (15) is fixedly connected to a shrinking frame (16), and the side of the shrinking frame (16) is fixedly connected to a shrinking cover (17).

2. The material loading and clamping tool for PVD coating according to claim 1, characterized in that: A top-fixing airbag (18) is arranged inside the shrinkage frame (16), one end of the top-fixing airbag (18) is fixedly connected to a top-connecting plate (19), and a fitting rubber pad (20) is arranged on the surface of the top-connecting plate (19).

3. The material loading and clamping tool for PVD coating according to claim 1, characterized in that: The top of the shrinkage frame (16) is provided with an air suction frame (21), the interior of the air suction frame (21) is provided with an air suction unit (22), the bottom of the air suction frame (21) is provided with a collecting filter element (23), one end of the collecting filter element (23) is fixedly connected to a shunt pipe (24), both ends of the shunt pipe (24) are fixedly connected to an air suction ring seat (25), a sealing top cover (26) is movably connected to the surface of the air suction ring seat (25), and an air suction ring grille (27) is provided on the inner wall of the air suction ring seat (25).

4. The material loading and clamping tool for PVD coating according to claim 1, characterized in that: An air control unit (28) is arranged inside the air control base (14), air control mesh grooves (29) are provided at both ends of the air control base (14), and an air delivery valve port (30) is provided at the top end of the delivery side pipe (15).

5. The material loading and clamping tool for PVD coating according to claim 1, characterized in that: A reciprocating screw rod (31) is arranged inside the conveying frame (12) via a driving motor (13), and a movable shaft (32) is arranged at one end of the reciprocating screw rod (31).

6. The material loading and clamping tool for PVD coating according to claim 1, characterized in that: A center frame (33) is fixedly connected to the center of the surface of the material conveying bracket (8), and inner cover arc connecting plates (34) are fixedly connected to both sides of the center frame (33). A clamping groove (35) is provided between the inner cover arc connecting plates (34) and the connecting block (39).

7. The material loading and clamping tool for PVD coating according to claim 1, characterized in that: The bottom end of the material conveying bracket (8) is fixedly connected to a limit slide bar (36), and a reciprocating shaft sleeve (37) is arranged inside the limit slide bar (36).

8. The material loading and clamping tool for PVD coating according to claim 6, characterized in that: A loading mold frame (38) is provided at the bottom of the lifting plate (10), a connecting block (39) is fixedly connected to the inner wall of the inner cover arc connecting plate (34), one end of the connecting block (39) is fixedly connected to a limiting ring sleeve (40), and a fitting rubber ring (41) is provided between the limiting ring sleeve (40) and the lifting plate (10).

9. The material loading and clamping tool for PVD coating according to claim 1, characterized in that: The inner wall of the coating frame (1) is provided with a material mixing liner (42), and the top of the material mixing liner (42) is provided with a material feeding grid (43).

10. The material loading and clamping tool for PVD coating according to claim 1, characterized in that: A conveying groove (44) is provided inside the coating frame (1), the first material conveying cover (4) and the second material conveying cover (5), and a limiting sliding groove (45) is provided on the inner bottom wall of the conveying groove (44).

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