Vacuum coating equipment

Abstract

The present invention provides a vacuum coating device, comprising an outer cavity, one end of which is provided with a first opening, and the other end is provided with an outer layer exhaust port protruding away from the first opening and connecting the downstream equipment with the inside of the outer cavity; a middle layer isolation tube, which is arranged in the outer cavity, one end of which is provided with a second opening, and the other end is provided with a middle layer outlet embedded in the outer layer exhaust port; an inner layer isolation tube, which is arranged in the middle layer isolation tube, one end of which is provided with a third opening, and the other end is provided with an inner layer outlet embedded in the middle layer outlet; a material carrier, two opposite ends of which are respectively provided with an air inlet opening and an air outlet opening, and the material carrier enters and exits the inner layer isolation tube through the first opening, the second opening and the third opening, and when the material carrier is placed in the inner layer isolation tube, the air inlet opening and the air outlet opening are respectively facing the first opening and the outer layer exhaust port; a furnace door cover, which is installed at the first opening; a spray device, which is arranged in the outer cavity and located between the first opening and the second opening, and is used to spray reaction gas onto a target substrate in the material carrier.

Description

Technical Field

[0001] The invention relates to the technical field of photovoltaic cell vacuum coating equipment, and in particular to vacuum coating equipment. Background Art

[0002] With the continuous development of the photovoltaic industry, the technology of solar cells has been updated and iterated, and atomic layer deposition technology (ALD) has been increasingly used in the production process of solar cells. ALD technology can achieve large-area film formation on the surface of solar cells, and its coating uniformity is good, and it has the advantages of dense film formation and no pinholes. In addition, high-efficiency crystalline silicon cells are an important development trend in the photovoltaic cell industry. Adding the ALD coating process to its manufacturing process to passivate its surface can effectively increase the photoelectric conversion efficiency of such solar cells.

[0003] However, existing vacuum coating equipment, including ALD coating equipment, has the following defects:

[0004] (1) In the existing vacuum coating equipment, the reaction chamber is prone to reaction and deposition of reaction dust in different states, and the reaction chamber is prone to contact with residual precursors (reaction gases), thereby causing pollution of the reaction chamber and shortening the maintenance cycle of the equipment. In severe cases, it is even easy to cause the process effect to deteriorate and the yield rate of the product to decrease. To solve this problem, the reaction chamber of the vacuum coating equipment is usually set as a double-chamber structure in the prior art, in which the inner cavity area is used as the reaction area, and an inert gas is introduced into the outer cavity to seal it, so as to limit the deposition of the reaction-generated dust in the inner cavity, so as to achieve the effect that the reaction chamber only needs to maintain the inner cavity (the inner cavity layer does not need to withstand an atmospheric pressure and has a lighter structure, which is easier to maintain than the outer cavity and has a lower maintenance cost). However, when this type of vacuum coating equipment is actually used, the sealing of its inert gas is not reliable, resulting in its outer cavity still being easily polluted by the dust deposition generated by the reaction, resulting in the need for frequent and synchronous maintenance of its inner and outer cavities.

[0005] (2) In the existing ALD vacuum coating equipment, after different precursors (reaction gases) are output from the special gas pipeline, they are easily encountered in time and overlapped in space in certain areas in the transmission path before entering the reaction area in the reaction chamber. If different precursors encounter each other in time, they will directly react, thereby generating dust in the relevant and subsequent reaction areas, causing the reaction chamber to be blocked, affecting the process effect and even making the coating process ineffective; and in the existing technology of spatial overlap, an extended purge process is usually used to reduce the generation of dust, but this extended purge process cannot completely avoid dust generation, and it will lead to an extension of the coating cycle and a reduction in production capacity.

[0006] Therefore, how to reduce the contact between reaction dust and precursors and the reaction chamber to reduce the maintenance cycle of ALD vacuum coating equipment is a technical problem that needs to be solved urgently in this field. Summary of the invention

[0007] The present invention provides a vacuum coating device to solve the technical problem that reaction dust and precursors in the existing ALD vacuum coating device are easily in contact with the reaction chamber, thereby extending the maintenance period of the device.

[0008] To solve the above problems, the technical solution adopted by the present invention is:

[0009] The present invention provides a vacuum coating device, comprising:

[0010] The outer cavity has a first opening at one end and an outer layer air extraction port protruding outwardly away from the first opening and connecting the downstream equipment with the inner part of the outer cavity at the other end thereof;

[0011] A middle-layer isolation cylinder is arranged in the outer cavity, one end of which is provided with a second opening, and the other end of which is provided with a middle-layer air outlet embedded in the outer-layer air extraction port;

[0012] The inner layer isolation tube is arranged in the middle layer isolation tube, one end of which is provided with a third opening, and the other end thereof is provided with an inner layer air outlet embedded in the middle layer air outlet;

[0013] The material carrier has an air inlet opening and an air outlet opening at opposite ends thereof, and enters and exits the inner isolation cylinder through the first opening, the second opening, and the third opening. When the material carrier is placed in the inner isolation cylinder, the air inlet opening and the air outlet opening face the first opening and the outer exhaust port, respectively;

[0014] A furnace door cover, installed at the first opening, for opening and closing the outer cavity;

[0015] The spraying device is arranged in the outer cavity and located between the first opening and the second opening, and is used for spraying reaction gas to the target substrate carried in the material carrier.

[0016] Preferably, an outer compartment is formed between the outer cavity and the middle isolation tube, a middle compartment is formed between the middle isolation tube and the inner isolation tube, and an inner compartment is formed between the inner isolation tube and the material carrier when the material carrier is placed in the inner isolation tube; a core reaction chamber for carrying the target substrate is formed inside the material carrier;

[0017] The second opening is connected to the outer compartment and the middle compartment, and is spaced apart from the first opening; the third opening is connected to the middle compartment and the inner compartment, and is spaced apart from the second opening; the air inlet opening and the air outlet opening are both connected to the inner compartment and the core reaction chamber, and are spaced apart from the third opening and the inner air outlet, respectively.

[0018] Preferably, the outer air extraction port comprises:

[0019] An outer layer air outlet pipe is convexly arranged at the other end of the outer cavity relative to the first opening away from the first opening, and the inner part of the outer layer air outlet pipe forms an outer layer air extraction hole connecting the corresponding exhaust gas pipeline of the downstream equipment and the outer layer compartment;

[0020] The middle layer air outlet comprises: a middle layer air outlet pipe, which is protruding away from the second opening and embedded in the outer layer air extraction hole and is arranged at the other end of the middle layer isolation tube relative to the second opening, and the middle layer air outlet hole is formed inside the middle layer air outlet pipe to communicate with the outer layer air extraction hole and the middle layer compartment;

[0021] The inner layer air outlet includes: an inner layer air outlet pipe, which protrudes away from the third opening and is embedded in the middle layer air outlet hole and is arranged at the other end of the inner layer isolation tube relative to the third opening. The inner layer air outlet pipe forms an inner layer air outlet hole connecting the middle layer air outlet hole and the inner layer compartment.

[0022] Preferably, the outer layer air extraction holes, the middle layer air outlet holes, the inner layer air outlet holes, the outer cavity, the middle layer isolation tube, the inner layer isolation tube and the material carrier are coaxially arranged, and the inner layer projection area of ​​the inner layer air outlet holes in the axial direction is greater than or equal to the difference between the middle layer projection area and the inner layer projection area of ​​the middle layer air outlet holes in the axial direction, and the difference between the middle layer projection area and the inner layer projection area is greater than or equal to the difference between the outer layer projection area and the middle layer projection area of ​​the outer layer air extraction holes in the axial direction.

[0023] Preferably, the outer cavity, the middle isolation tube, the inner isolation tube and the material carrier are all in the shape of a rectangular parallelepiped, the material carrier comprises a pair of parallel and spaced side plates and a top plate connected between the corresponding top ends of the pair of side plates, the corresponding ends of the pair of side plates and the top plate respectively form an air inlet opening and an air outlet opening, and the corresponding bottom ends of the pair of side plates form a bottom opening connecting the air inlet opening and the air outlet opening;

[0024] When the material carrier is placed in the inner isolation tube, the corresponding bottom ends of a pair of side plates are supported on the top surface of the bottom wall of the inner isolation tube, so that the bottom wall of the inner isolation tube closes the bottom opening.

[0025] Preferably, an end of the bottom wall of the inner isolation cylinder corresponding to the third opening is provided with an extension portion extending out of the third opening, and a width of the extension portion is greater than or equal to a width of the top wall of the inner isolation cylinder;

[0026] When the material carrier is placed in the inner isolation tube, the air inlet opening is flush with the third opening, and the air outlet opening is spaced apart from the inner air outlet.

[0027] Furthermore, at least one set of first air supply channels and first air return channels are provided at the end of one side wall of the middle isolation tube corresponding to the second opening, and at least one set of second air supply channels and second air return channels are provided at the end of the other side wall of the middle isolation tube corresponding to the second opening;

[0028] Vacuum coating equipment also includes:

[0029] A first reaction gas source is disposed on one side of the outer cavity and is connected to the first gas supply channel and the first gas return channel through a first gas supply pipeline and a first gas return pipeline respectively;

[0030] A second reaction gas source is disposed on the other side of the outer cavity and is connected to the second gas supply channel and the second gas return channel through a second gas supply pipeline and a second gas return pipeline respectively;

[0031] The spraying device includes:

[0032] The movable spray plate is installed at one end of the furnace door cover facing the outer exhaust port, and the side of the movable spray plate facing away from the furnace door cover is respectively provided with a first spray air inlet hole, a first spray air return hole, a second spray air inlet hole and a second spray air return hole corresponding to the first air supply channel, the first air return channel, the second air supply channel and the second air return channel;

[0033] A first gas pipeline connecting the first spray air inlet hole and the first spray air return hole is provided in the movable spray plate, and at least one first spray pipeline connected to the first gas pipeline, and a plurality of first spray holes penetrating the side of the movable spray plate facing away from the furnace door cover are distributed on the first spray pipeline;

[0034] The movable spray plate is also provided with a second gas pipeline connected to the second spray air inlet hole and the second spray air return hole, and at least one second spray pipeline connected to the second gas pipeline, and a plurality of second spray holes are distributed on the second spray pipeline and pass through the side of the movable spray plate facing away from the furnace door cover;

[0035] When the furnace door cover is closed, the movable spray plate is connected in parallel to cover the second opening, and the first air supply channel, the first air return channel, the second air supply channel and the second air return channel are respectively connected to the first spray air inlet hole, the first spray air return hole, the second spray air inlet hole and the second spray air return hole.

[0036] Preferably, the first gas pipeline and the second gas pipeline are arranged in parallel and at intervals at opposite ends of the movable spray plate, a plurality of first spray pipelines are vertically connected to the first gas pipeline in parallel and at intervals, a plurality of second spray pipelines are vertically connected to the second gas pipeline in parallel and at intervals, and each first spray pipeline is alternately arranged with the second spray pipeline;

[0037] When the furnace door cover is closed, the projection of the spray area formed by the corresponding first spray holes on each first spray pipeline and the corresponding second spray holes on the second spray pipeline falls into the cross-sectional area of ​​the air inlet opening and completely covers the cross-sectional area of ​​the target substrate contained in the material carrier, so that most of the first reaction gas and the second reaction gas respectively introduced from the first reaction gas source and the second reaction gas source enter the material carrier through the air inlet opening.

[0038] Furthermore, the vacuum coating equipment also includes:

[0039] The special gas filtering device is connected to the outer layer gas extraction port and is used to filter the residual reaction gas discharged from the outer layer gas extraction port;

[0040] A vacuum pump is connected to the downstream position of the special gas filter device relative to the outer exhaust port, and is used to evacuate the interior of the outer cavity;

[0041] The tail gas treatment device is connected to the downstream position of the vacuum pump relative to the special gas filtering device, and is used to treat the tail gas generated by the reaction gas reaction and discharge the treated gas to the downstream equipment.

[0042] Preferably, the vacuum coating equipment is ALD coating equipment.

[0043] Compared with the prior art, the present invention has the following beneficial effects:

[0044] The vacuum coating equipment provided by the present invention confines the reaction gas (precursor) to the interior of the material carrier for reaction as much as possible, and utilizes a multi-level gas isolation structure that is arranged layer by layer outside the material carrier to gradually introduce the reaction gas escaping from the air inlet end of the material carrier into the corresponding isolation structure, and respectively guides the unreacted reaction gas and the waste gas generated by the reaction from the interior of the corresponding isolation structure and the outlet end of the outer layer exhaust port of the corresponding isolation structure embedded in the outer cavity to the outer layer exhaust port, and then discharges the unreacted reaction gas and waste gas to the downstream equipment through the outer layer exhaust port, so as to avoid excessive reaction gas, waste gas and dust from leaking into the outer cavity and contacting and polluting the outer cavity. Therefore, only the isolation structure and the material carrier of the outer layer of the material carrier need to be maintained, and the maintenance amount of the outer cavity is low and maintenance-free, so as to reduce the difficulty of equipment maintenance and shorten the maintenance cycle. At the same time, the gas supply circuit, spray pipeline and return gas circuit of different reaction gases of the vacuum coating equipment do not interfere with each other and are independent of each other, so as to prevent different reaction gases from meeting in time and overlapping in space in the equipment, and to avoid dust pollution caused by the meeting of special gases. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] In order to more clearly illustrate the technical solution proposed by the present invention, the present invention is described in detail in combination with the embodiments and drawings. It should be understood that the embodiments and drawings described in the following specific implementation methods and the drawings in the specification are only some embodiments of the present invention, and for those of ordinary skill in the art, these drawings can be changed under the conception of the present invention.

[0046] Figure 1 A schematic diagram of a top cross-sectional structure of an embodiment of a vacuum coating device provided by the present invention;

[0047] Figure 2 for Figure 1A schematic diagram of a top-view cross-sectional structure of a vacuum coating device with some structures hidden and enlarged;

[0048] Figure 3 for Figure 2 A schematic diagram of a partially enlarged structure of a vacuum coating device;

[0049] Figure 4 for Figure 3 A schematic diagram of the projection cross section of the outer layer exhaust hole, the middle layer exhaust hole and the inner layer exhaust hole of the vacuum coating equipment in the axial direction;

[0050] Figure 5 A schematic diagram of the assembled three-dimensional structure of a material carrier and a middle-layer isolation cylinder of an embodiment of the vacuum coating equipment provided by the present invention;

[0051] Figure 6 for Figure 1 A schematic diagram of the cross-sectional structure of the vacuum coating equipment along the AA direction;

[0052] Figure 7 for Figure 1 Schematic diagram of the cross-sectional structure of the movable spray plate of the vacuum coating equipment along the BB direction.

[0053] Among them, the main marks of the drawings in the figure are as follows:

[0054] 1. outer cavity; 11. first opening; 12. outer layer air extraction port; 121. outer layer air outlet pipe; 122. outer layer air extraction hole; 13. heating device; 2. middle layer isolation tube; 21. second opening; 22. middle layer air outlet; 221. middle layer air outlet pipe; 222. middle layer air outlet hole; 23. first air supply channel; 24. first air return channel; 24. second air supply channel; 25. second air return channel; 3. inner layer isolation tube; 31. third opening; 32. inner layer air outlet; 321. inner layer air outlet pipe; 322. inner layer air outlet hole; 33. bottom wall; 331. extension part; 34. top wall; 4. material carrier; 41. air inlet opening; 42. air outlet opening; 43. top plate; 44. side plate; 45. Bottom opening; 5. Furnace door cover; 51. Connecting bracket; 6. Spray device; 61. Movable spray plate; 611. First spray air inlet hole; 612. First spray air return hole; 613. Second spray air inlet hole; 614. Second spray air return hole; 615. First gas pipeline; 616. First spray pipeline; 6161. First spray hole; 617. Second gas pipeline; 618. Second spray pipeline; 6181. Second spray hole; 7. First reaction gas source; 71. First gas supply pipeline; 72. First return air pipeline; 8. Second reaction gas source; 81. Second gas supply pipeline; 82. Second return air pipeline; 9. Special gas filtering device; 10. Vacuum pump; 101. Exhaust gas treatment device.

[0055] Among them, the other marks in the figure are as follows:

[0056] C, axis direction; D, outer compartment; E, middle compartment; F, inner compartment; G, core reaction chamber; H, spray area; L, total length; M, carrier length; N, extension length; S 1 , inner layer projection area; S 2 , middle layer projection area; S 3 , outer projection area. DETAILED DESCRIPTION

[0057] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the following is a summary of the technical problems, technical solutions and beneficial effects to be solved by the present invention. Figure 1-7 The present invention is further described in detail with reference to the accompanying drawings and embodiments.

[0058] Please also read Figure 1-7 The vacuum coating equipment provided by the present invention comprises:

[0059] An outer cavity 1, one end of which is provided with a first opening 11, and the other end of which is provided with an outer layer air extraction port 12 which protrudes outward away from the first opening 11 and connects the downstream equipment with the interior of the outer cavity 1; a middle layer isolation tube 2, which is arranged in the outer cavity 1, one end of which is provided with a second opening 21, and the other end of which is provided with a middle layer air outlet 22 embedded in the outer layer air extraction port 12; an inner layer isolation tube 3, which is arranged in the middle layer isolation tube 2, one end of which is provided with a third opening 31, and the other end of which is provided with an inner layer air outlet 32 ​​embedded in the middle layer air outlet 22; a material carrier 4, the opposite ends of which are provided with air inlet openings 41 and 42, respectively. 1 and an air outlet opening 42, the material carrier 4 enters and exits the interior of the inner isolation tube 3 through the first opening 11, the second opening 21 and the third opening 31, and when the material carrier 4 is placed in the inner isolation tube 3, the air inlet opening 41 and the air outlet opening 42 are spaced toward the first opening 11 and the outer exhaust port 12 respectively at corresponding intervals; a furnace door cover 5, installed at the first opening 11, for opening and closing the internal accommodation space of the outer cavity 1; a spray device 6, arranged in the outer cavity 1 and located between the first opening 11 and the second opening 21, for spraying reaction gas onto a target substrate (not shown in the figure) carried in the material carrier 4, so as to passivate the surface of the target substrate and achieve the coating process effect of the vacuum coating equipment.

[0060] The above-mentioned material carrier 4, inner isolation tube 3 and middle isolation tube 2 constitute a three-level isolation structure which is stacked from the inside to the outside and arranged in sequence inside the outer cavity 1. Through the multi-level (three-layer) isolation structure (material carrier 4, inner isolation tube 3 and middle isolation tube 2), the reaction gas escaping from the air inlet end of the material carrier 4 is introduced into the corresponding isolation structure step by step, and the unreacted reaction gas and the waste gas generated by the reaction of the reaction gas are respectively guided from the inside of the corresponding isolation structure and the outlet end of the corresponding isolation structure embedded in the outer exhaust port 12 to the outer exhaust port 12, and then the unreacted reaction gas and the waste gas generated by the reaction are discharged to the downstream equipment through the outer exhaust port 12.

[0061] Therefore, the vacuum coating equipment provided by the present invention can limit the reaction gas sprayed by the spray device 6 onto the target substrate carried in the material carrier 4 to the interior of the material carrier 4 as much as possible, greatly reducing the degree of leakage of the reaction gas and the dust generated by the reaction from the air inlet end of the material carrier 4 to the interior of the outer cavity 1, avoiding a large amount of dust and precursors (reaction gas) generated by the reaction from contacting the reaction cavity and contaminating the cavity, thereby reducing the maintenance difficulty and cycle of the vacuum coating equipment.

[0062] At the same time, since the outlet end of the middle isolation tube 2 is embedded in the outer exhaust port 12 of the outlet end of the outer cavity 1 through the middle exhaust port 22, and the outlet end of the inner isolation tube 3 is embedded in the middle exhaust port 22 through the inner exhaust port 32, the corresponding outlets of the inner isolation tube 3 and the middle isolation tube 2 are stacked from the inside to the outside and progressively penetrate into the outer exhaust port 12, so that the unreacted reaction gas and the waste gas generated by the reaction entering the inner isolation tube 3 first enter the middle exhaust port 22 from the inner exhaust port 32 at its outlet end, and then enter the external exhaust port from the middle exhaust port 22 and are discharged to the downstream equipment; at the same time, the unreacted reaction gas and the waste gas generated by the reaction entering the middle isolation tube 2 first enter the outer exhaust port 12 from the middle exhaust port 22 at its outlet end, and then are discharged to the downstream equipment from the external exhaust port.

[0063] Therefore, the vacuum coating equipment provided by the present invention can also allow the unreacted reaction gas and the waste gas generated by the reaction that enter the material carrier 4, the inner isolation tube 3 and the middle isolation tube 2 to enter the outlet of the next-level (outer layer) isolation structure through the above-mentioned corresponding outlets, thereby reducing the leakage of the unreacted reaction gas and the waste gas generated by the reaction from the outlet end of the material carrier 4 or the corresponding isolation structure to the next-level (outer layer) space area, and further reducing the degree of leakage of the reaction gas and the waste gas to the inside of the outer cavity 1, thereby avoiding a large amount of reaction gas and waste gas from contacting and contaminating the outer cavity 1, and reducing the difficulty and cycle of equipment maintenance.

[0064] Please also read Figure 1-36. In this embodiment, an outer compartment D is formed between the outer cavity 1 and the middle isolation tube 2, a middle compartment E located in the inner layer of the outer compartment D is formed between the middle isolation tube 2 and the inner isolation tube 3, and when the material carrier 4 is placed in the inner isolation tube 3, an inner compartment F located in the inner layer of the middle compartment E is formed between the inner isolation tube 3 and the material carrier 4; a core reaction chamber G located in the inner layer of the inner compartment F and used for carrying the target substrate is formed inside the material carrier 4. The spray device 6 is disposed in the outer compartment D and is located between the first opening 11 and the second opening 21.

[0065] When the material carrier 4 is placed in the inner isolation tube 3, the second opening 21 of the middle isolation tube 2 is connected to the outer compartment D and the middle compartment E, and is spaced apart from the first opening 11 of the outer cavity 1, serving as the air inlet end of the middle isolation tube 2; the third opening 31 of the inner isolation tube 3 is connected to the middle compartment E and the inner compartment F, and is spaced apart from the second opening 21, serving as the air inlet end of the inner isolation tube 3; the air inlet opening 41 and the air outlet opening 42 of the material carrier 4 are both connected to the inner compartment F and the core reaction chamber G, and are spaced apart from the third opening 31 and the inner outlet 32, respectively, serving as the air inlet end and the air outlet end of the material carrier 4, respectively.

[0066] Please also read Figure 1-3 In this embodiment, the outer air extraction port 12 includes:

[0067] The outer layer outlet pipe 121 is convexly arranged at the other end of the outer cavity 1 relative to the first opening 11 away from the first opening 11, and the inner part of the outer layer outlet pipe 121 forms an outer layer exhaust hole 122 connecting the corresponding exhaust pipeline of the downstream equipment and the outer layer compartment D.

[0068] The middle layer air outlet 22 comprises:

[0069] The middle layer air outlet pipe 221 is protruding away from the second opening 21 and embedded in the outer layer air exhaust hole 122 (extending into the outer layer air exhaust port 12) and is arranged at the other end of the middle layer isolation tube 2 relative to the second opening 21. The interior of the middle layer air outlet pipe 221 forms a middle layer air outlet hole 222 connecting the outer layer air exhaust hole 122 and the middle layer compartment E.

[0070] The inner layer air outlet 32 ​​comprises:

[0071] The inner layer air outlet pipe 321 is protruding away from the third opening 31 and embedded in the middle layer air outlet hole 222 (extending into the middle layer air outlet 22) and is arranged at the other end of the inner layer isolation tube 3 relative to the third opening 31. The interior of the inner layer air outlet pipe 321 forms an inner layer air outlet hole 322 connecting the middle layer air outlet hole 222 and the inner layer compartment F.

[0072] Please also read Figure 1-3, 5, 6, in the present embodiment, the outer cavity 1, the middle isolation tube 2, the inner isolation tube 3 and the material carrier 4 are all in the shape of a rectangular parallelepiped, the material carrier 4 comprises a pair of parallel and spaced side plates 44 and a top plate 43 connected between the corresponding top ends of the pair of side plates 44, the corresponding ends of the pair of side plates 44 and the top plate 43 respectively form the above-mentioned air inlet opening 41 and the air outlet opening 42, and the corresponding bottom ends of the pair of side plates 44 form a bottom opening 45 connecting the air inlet opening 41 and the air outlet opening 42.

[0073] When the material carrier 4 is placed in the inner isolation tube 3, the corresponding bottom ends of a pair of side plates 44 are supported on the top surface of the bottom wall 33 of the inner isolation tube 3 so that the bottom wall 33 of the inner isolation tube 3 closes the bottom opening 45, forming the above-mentioned inner compartment F between the inner isolation tube 3 and the material carrier 4.

[0074] Please also read Figure 1-4 As a preferred implementation of this embodiment, the outer layer exhaust hole 122, the middle layer outlet hole 222, the inner layer outlet hole 322, the outer cavity 1, the middle layer isolation tube 2, the inner layer isolation tube 3 and the material carrier 4 are coaxially arranged with the same central axis as the axis, and the inner layer projection area S of the inner layer outlet hole 322 in the axis direction C is 1 That is, the projection area of ​​the inner layer air outlet hole 322 along the axis direction C onto the outer layer air pumping hole 122 formed by the cross section of the outer layer air pumping hole 122 is greater than or equal to the middle layer projection area S of the middle layer air outlet hole 222 along the axis direction C. 2 (i.e., the projection cross-sectional area formed by the projection of the middle layer air outlet hole 222 along its axial direction C onto the outer layer air pumping hole 122 on the cross section of the outer layer air pumping hole 122) and the inner layer projection area S 1 The difference between the middle layer projection area S 2 and the inner projection area S 1 The difference is greater than or equal to the outer projection area S of the outer exhaust hole 122 in the axial direction C. 3 (i.e. the cross-sectional area of ​​the outer layer air extraction hole 122) and the middle layer projection area S 2 difference.

[0075] As a more preferred implementation of this embodiment, the outer layer air extraction holes 122, the middle layer air outlet holes 222, and the inner layer air outlet holes 322 are all circular holes with a circular cross section, and the inner layer projection area S 1 , middle layer projection area S 2 , outer projection area S 3 are the areas of the circular projection cross-section of the corresponding circular hole along its axial direction C, and S 1 ≥S 2 -S 1 , S 2 -S 1 ≥S 3 -S2 .

[0076] Please also read Figure 1-3 As a preferred implementation mode of this embodiment, the interval between the second opening 21 of the middle layer isolation tube 2 and the first opening 11 of the outer cavity 1 is 10-200mm, that is, the second opening 21 is retracted by 10-200mm relative to the first opening 11, so that the air inlet end of the middle layer isolation tube 2 is retracted by a certain distance relative to the air inlet end of the outer cavity 1.

[0077] The interval between the third opening 31 of the inner isolation tube 3 and the second opening 21 of the middle isolation tube 2 is 1-10mm, that is, the third opening 31 is retracted 1-10mm relative to the second opening 21, so that the air inlet end of the inner isolation tube 3 is retracted a certain distance relative to the air inlet end of the middle isolation tube 2.

[0078] Please also read Figure 1 , 2 5. In the present embodiment, an end of the bottom wall 33 of the inner isolation tube 3 corresponding to the third opening 31 is provided with an extension portion 331 extending out of the third opening 31 along the axial direction C thereof, and the width of the extension portion 331 is greater than or equal to the width of the top wall 34 of the inner isolation tube 3, and an extension length N of the extension portion 331 (i.e., the length of the extension portion 331 extending along the axial direction C of the inner isolation tube 3) is less than the distance between the second opening 21 and the third opening 31.

[0079] When the material carrier 4 is placed in the inner isolation tube 3, the air inlet opening 41 is flush with the third opening 31, the air outlet opening 42 is spaced apart from the inner air outlet 32, and the distance between the end of the extension portion 331 away from the third opening 31 and the air outlet opening 42 is greater than the distance between the air inlet opening 41 and the air outlet opening 42, that is, the distance between the end of the extension portion 331 away from the third opening 31 and the air outlet opening 42 is greater than the distance between the third opening 31 and the air outlet opening 42, that is, the total length L from the end of the extension portion 331 away from the third opening 31 to the air outlet opening 42 is greater than the carrier length M of the material carrier 4, and the total length L = carrier length M + extension length N.

[0080] Please also read Figure 1 , 6 7. In the present embodiment, at least one set of first air supply channels 23 and first air return channels 24 are provided at the end of one side wall of the middle isolation tube 2 corresponding to the second opening 21, and at least one set of second air supply channels 25 and second air return channels 26 are provided at the end of the other side wall of the middle isolation tube 2 corresponding to the second opening 21.

[0081] Vacuum coating equipment also includes:

[0082] The first reaction gas source 7 is arranged on one side of the outer cavity 1, and is connected to the first gas supply channel 23 and the first gas return channel 24 respectively after passing through the outer cavity 1 through the first gas supply pipeline 71 and the first gas return pipeline 72; the second reaction gas source 8 is arranged on the other side of the outer cavity 1, and is connected to the second gas supply channel 25 and the second gas return channel 26 respectively after passing through the outer cavity 1 through the second gas supply pipeline 81 and the second gas return pipeline 82.

[0083] The spray device 6 comprises:

[0084] The movable spray plate 61 is installed at one end facing the outer exhaust port 12 when the furnace door cover 5 is closed. The movable spray plate 61 is provided with a first spray air inlet hole 611, a first spray air return hole 612, a second spray air inlet hole 613 and a second spray air return hole 614 on one side facing away from the furnace door cover 5, which are respectively matched with the first air supply channel 23, the first air return channel 24, the second air supply channel 25 and the second air return channel 26. The movable spray plate 61 is preferably connected to one end of the furnace door cover 5 facing the outer exhaust port 12 through a connecting bracket 51.

[0085] The movable spray plate 61 is provided with a first gas pipeline 615 connected to the first spray air inlet hole 611 and the first spray air return hole 612, and at least one first spray pipeline 616 connected to the first gas pipeline 615. The first spray pipeline 616 is provided with a plurality of first spray holes 6161 penetrating the side of the movable spray plate 61 facing away from the furnace door cover 5.

[0086] The movable spray plate 61 is also provided with a second gas supply pipeline 617 connecting the second spray air inlet hole 613 and the second spray air return hole 614, and at least one second spray pipeline 618 connected to the second gas supply pipeline 617. The second spray pipeline 618 has multiple second spray holes 6181 that pass through the side of the movable spray plate 61 facing away from the furnace door cover 5.

[0087] The first gas supply pipeline 71, the first gas supply channel 23, the first gas return channel 24 and the second gas supply pipeline 81, the second gas supply channel 25, the second gas return channel 26, the first spray air inlet hole 611, the first spray air return hole 612, the first gas supply pipeline 615, the first spray pipeline 616 and the second spray air inlet hole 613, the second spray air return hole 614, the second gas supply pipeline 617, the second spray pipeline 618, and the first reaction gas source 7 and the second reaction gas source 8 are not connected to each other and are independent of each other.

[0088] When the furnace door cover 5 is closed, the movable spray plate 61 is connected in parallel and covers the second opening 21, and the first air supply channel 23, the first air return channel 24, the second air supply channel 25 and the second air return channel 26 are respectively connected to the first spray air inlet hole 611, the first spray air return hole 612, the second spray air inlet hole 613 and the second spray air return hole 614.

[0089] Please also read Figure 1 , 6 7. As a preferred implementation scheme of this embodiment, the first gas supply pipeline 615 and the second gas supply pipeline are arranged in parallel and spaced at opposite ends of the movable spray plate 61 (arranged on both sides of the axial direction C of the second isolation cylinder), a plurality of first spray pipelines 616 are vertically connected to the first gas supply pipeline 615 in parallel and spaced, a plurality of second spray pipelines 618 are vertically connected to the second gas supply pipeline 617 in parallel and spaced, and each first spray pipeline 616 and the second spray pipeline 618 are alternately arranged.

[0090] When the furnace door cover 5 is closed, the projection of the spray area H formed by the corresponding first spray holes 6161 on each first spray pipeline 616 and the corresponding second spray holes 6181 on the second spray pipeline 618 falls into the cross-sectional area of ​​the air inlet opening 41, and completely covers the cross-sectional area of ​​the target substrate contained in the material carrier 4, so that most of the first reaction gas and the second reaction gas introduced by the first reaction gas source 7 and the second reaction gas source 8 respectively enter the core reaction chamber G inside the material carrier 4 through the air inlet opening 41, and only a small part of the first reaction gas and the second reaction gas enter the core reaction chamber G inside the material carrier 4 through the third opening 31. The first reaction gas and the second reaction gas enter the inner compartment F inside the inner isolation tube 3, while less first reaction gas and second reaction gas enter the middle compartment E inside the middle isolation tube 2 through the second opening 21, and only a trace amount of the first reaction gas and the second reaction gas enter the outer compartment D, further making most of the reaction gas sprayed by the spray device 6 to the target substrate carried in the material carrier 4 be restricted to react inside the material carrier 4, greatly reducing the degree of reaction gas leakage from the air inlet end of the material carrier 4 to the inside of the outer cavity 1, avoiding a large amount of dust and reaction gas generated by the reaction from contacting the reaction cavity and contaminating the cavity. In summary, the maintenance period of the middle isolation tube 2 is greatly extended, and the maintenance of the outer cavity 1 is extremely small or even maintenance-free.

[0091] At the same time, since the air intake and spraying range is limited to the cross-sectional area of ​​the target substrate in the material carrier 4, the amount of reaction gas (precursor) used is reduced, thereby reducing the generation of dust and extending the equipment maintenance cycle. Moreover, since the maintenance of the inner isolation cylinder 3 partially overlaps with the material carrier 4, the maintenance workload is also reduced. In addition, the inner isolation cylinder 3 is small in size, light in weight, and has a small surface area, which is relatively more convenient and easy to maintain.

[0092] Please also read Figure 1 , 67. As a more preferred implementation of the present embodiment, the projection of the spray area H formed by the corresponding first spray holes 6161 on each first spray line 616 and the corresponding second spray holes 6181 on the second spray line 618 falls within the cross-sectional area of ​​the air inlet opening 41 and is slightly smaller than the cross-sectional area of ​​the air inlet opening 41, and coincides with the cross-sectional area of ​​the target substrate in the material carrier 4.

[0093] Therefore, the vacuum coating equipment provided by the present invention only takes in air at the second opening 21 (inlet end) of the middle-layer isolation tube 2 and the movable spray plate 61 between the second opening 21 and the third opening 31, ensuring that the intake air flow of the reaction gas does not affect the coating process in the core reaction chamber G inside the material carrier 4.

[0094] In addition, the gas supply lines, spray lines and return lines of different reaction gases (precursors) do not interfere with each other and are independent of each other, preventing different reaction gases (precursors) from meeting in time and overlapping in space in the vacuum coating equipment, and avoiding dust pollution caused by the meeting of special gases.

[0095] Please also read Figure 1 , 6 7. In the present embodiment, according to actual production needs, the size of the spray area H formed by the corresponding first spray holes 6161 on each first spray pipeline 616 and the corresponding second spray holes 6181 on the second spray pipeline 618, and the number and position of the first spray pipeline 616, the first spray holes 6161, the second spray pipeline 618 and the second spray holes 6181 can be adjusted, and the first gas supply pipeline 71, the first gas supply channel 23, the first return gas channel 24, the second gas supply pipeline 81, the second gas supply channel 25, the second return gas channel 26, the first spray air inlet hole 611, the first spray air return hole 612, the first gas supply pipeline 615, the second spray air inlet hole 613, the second spray air return hole 614, the second gas supply pipeline 617, and the first reaction gas source 7 and the second reaction gas source 8 can be set as one or more groups at different positions of the movable spray plate 61, the middle isolation tube 2 or on opposite sides of the outer cavity 1, which will not be repeated here.

[0096] In other embodiments (not shown in the figures), the inner surfaces of the opposite side walls of the outer cavity 1 corresponding to the second opening 21 facing the outer compartment D are respectively provided with a pair of protrusions (not shown in the figures) extending into the outer compartment D and close to the end of the side wall corresponding to the second opening 21 of the middle isolation tube 2. In this case, at least one set of first air supply channels 23 and first air return channels 24 are arranged on the protrusions of one of the side walls of the outer cavity 1 corresponding to the second opening 21, and at least one set of second air supply channels 25 and second air return channels 26 are correspondingly arranged on the protrusions of the other side wall of the middle isolation tube 2 corresponding to the second opening 21, rather than being arranged at the ends of the two side walls of the middle isolation tube 2 corresponding to the second opening 21.

[0097] See also Figure 1 In this embodiment, the vacuum coating equipment further includes:

[0098] The special gas filtering device 9 is connected to the outer exhaust port 12, and is used to filter the residual reaction gas discharged from the outer exhaust port 12; the vacuum pump 10 is connected to the downstream position of the special gas filtering device 9 relative to the outer exhaust port 12, and is used to evacuate the inside of the outer cavity 1 to form the vacuum environment required for the vacuum coating process inside the vacuum coating equipment; the exhaust gas treatment device 101 is connected to the downstream position of the vacuum pump 10 relative to the special gas filtering device 9, and is used to treat the exhaust gas generated by the reaction of the reaction gas, and discharge the gas that can be directly discharged after treatment to the downstream equipment.

[0099] In this embodiment, the vacuum coating equipment is an ALD coating equipment.

[0100] See also Figure 1 In this embodiment, the vacuum coating equipment further includes:

[0101] The heating device 13 is distributed in the outer compartment D formed between the outer cavity 1 and the middle compartment E formed between the middle compartment 2 and the material carrier 4, and is used to heat the material carrier 4 and the core reaction chamber G of the material carrier 4 placed in the inner compartment F of the inner compartment 3 through the outer compartment D, the middle compartment 2, and the middle compartment E formed between the middle compartment 2 and the material carrier 4, so that the core reaction chamber G reaches the preset temperature required for the vacuum coating process.

[0102] In this embodiment, the heating device 13 may be an electric heater, a heating plate or other heating devices 13 commonly used in the art, which will not be described in detail here.

[0103] In this embodiment, the vacuum coating equipment further includes:

[0104] The moving device (not shown in the figure) is used to move and drive the material carrier 4 and the target substrate it carries to enter or exit the corresponding compartments inside the outer cavity 1, the middle isolation tube 2 and the inner isolation tube 3.

[0105] In this embodiment, the transport device may be a commonly used transport device in the art, such as a robot or a linear transport device, which will not be described in detail here.

[0106] The working principle of the vacuum coating equipment provided by the present invention is as follows:

[0107] The furnace door cover 5 is opened to open the outer cavity 1, and the moving device moves the outlet opening 42 of the material carrier 4 carrying multiple target substrates toward the outer exhaust port 12, and the air inlet opening 41 of the material carrier 4 is away from the outer exhaust port 12. Under the drive of the moving device, the outlet opening 42 of the material carrier 4 passes through the first opening 11, the outer compartment D, and the second opening 21 in sequence into the middle compartment E, and then the bottom ends of a pair of side plates 44 of the material carrier 4 corresponding to the outlet opening 42 are supported on the top surface of the extension portion 331 of the bottom wall 33 of the inner isolation cylinder 3, and the material carrier 4 is pushed by the moving device. The material carrier 4 slides along the extension 331 toward the bottom wall 33 of the inner isolation tube 3, and slides along the bottom wall 33 of the inner isolation tube 3 toward the outer exhaust port 12, until the air inlet opening 41 of the material carrier 4 is completely separated from the extension 331 and is flush with the third opening 31. At this time, the material carrier 4 is completely placed on the bottom wall 33 of the inner isolation tube 3, and is completely supported on the top surface of the bottom wall 33 of the inner isolation tube 3 by the corresponding bottom ends of a pair of side plates 44, so that the bottom wall 33 of the inner isolation tube 3 closes the bottom opening 45, and the above-mentioned inner compartment F is formed between the inner isolation tube 3 and the material carrier 4. At the same time, the air inlet opening 41 and the air outlet opening 42 of the material carrier 4 are respectively spaced toward the first opening 11 and the outer exhaust port 12, and the material carrier 4 is coaxially arranged with the inner isolation tube 3, the middle isolation tube 2 and the outer cavity 1, and each target substrate is parallel to the air inlet opening 41 and the air outlet opening 42.

[0108] Close the furnace door cover 5 to seal the outer cavity 1, parallelly dock the movable spray plate 61 and cover the second opening 21, and the first air supply channel 23, the first air return channel 24, the second air supply channel 25 and the second air return channel 26 are respectively connected to the first spray air inlet hole 611, the first spray air return hole 612, the second spray air inlet hole 613 and the second spray air return hole 614.

[0109] At this time, the first reaction gas source 7 supplies the first reaction gas (precursor) to each first spray pipeline 616 through the first supply gas circuit composed of the first gas supply pipeline 71, the first gas supply channel 23, the first spray air inlet 611 and the first gas delivery pipeline 615; the second reaction gas source 8 supplies the second reaction gas (precursor) to each second spray pipeline 618 through the second supply gas circuit composed of the second gas supply channel 25, the second spray air inlet 613 and the second gas delivery pipeline 617, so that the first reaction gas source 7 and the second reaction gas source 8 respectively spray from the multiple first spray holes 6161 of each first spray pipeline 616 and the multiple second spray holes 6181 of the second spray pipeline 618 to the inside of the first opening 11, and enter the material carrier 4 through the gas inlet opening 41 to react and coat the target substrate.

[0110] At the same time, the first reaction gas source 7 can recover the unsprayed first reaction gas in the first gas supply pipeline 615 through the first recovery gas circuit formed by the first spray return hole 612, the first return gas channel 24, and the first return gas pipeline 72, and the second reaction gas source 8 can recover the unsprayed first reaction gas in the second gas supply pipeline 617 through the second recovery gas circuit formed by the second spray return hole 614, the second return gas channel 26, and the second return gas pipeline 82.

[0111] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Those skilled in the art should understand that any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A vacuum coating device, characterized in that: include: The outer cavity (1) has a first opening (11) at one end and an outer layer air extraction port (12) at the other end thereof, which is protruding away from the first opening (11) and connects the downstream equipment with the interior of the outer cavity (1); A middle-layer isolation cylinder (2) is arranged in the outer cavity (1), one end of which is provided with a second opening (21), and the other end of which is provided with a middle-layer air outlet (22) embedded in the outer-layer air extraction port (12); An inner layer isolation cylinder (3) is arranged in the middle layer isolation cylinder (2), one end of which is provided with a third opening (31), and the other end of which is provided with an inner layer air outlet (32) embedded in the middle layer air outlet (22); The material carrier (4) is provided with an air inlet opening (41) and an air outlet opening (42) at opposite ends thereof, and enters and exits the inner isolation cylinder (3) through the first opening (11), the second opening (21) and the third opening (31); and when the material carrier (4) is placed in the inner isolation cylinder (3), the air inlet opening (41) and the air outlet opening (42) are respectively oriented toward the first opening (11) and the outer exhaust port (12); A furnace door cover (5) is installed at the first opening (11) and is used to open and close the outer cavity (1); The spraying device (6) is arranged in the outer cavity (1) and located between the first opening (11) and the second opening (21), and is used for spraying reaction gas onto the target substrate carried in the material carrier (4).

2. The vacuum coating equipment according to claim 1, characterized in that: An outer compartment (D) is formed between the outer cavity (1) and the middle isolation tube (2), a middle compartment (E) is formed between the middle isolation tube (2) and the inner isolation tube (3), and an inner compartment (F) is formed between the inner isolation tube (3) and the material carrier (4) when the material carrier (4) is placed in the inner isolation tube (3); a core reaction chamber (G) for carrying the target substrate is formed inside the material carrier (4); The second opening (21) communicates with the outer compartment (D) and the middle compartment (E), and is spaced apart from the first opening (11); The third opening (31) communicates with the middle compartment (E) and the inner compartment (F), and is spaced apart from the second opening (21); The air inlet opening (41) and the air outlet opening (42) are both connected to the inner compartment (F) and the core reaction chamber (G), and are spaced apart from each other corresponding to the third opening (31) and the inner air outlet (32).

3. The vacuum coating device according to claim 2, characterized in that: The outer layer air extraction port (12) comprises: An outer layer air outlet pipe (121) is disposed at the other end of the outer cavity (1) opposite to the first opening (11) in a protruding manner away from the first opening (11), and the interior of the outer layer air outlet pipe (121) forms a corresponding exhaust gas pipeline for connecting the downstream equipment and the outer layer air extraction hole (122) of the outer layer compartment (D); The middle layer air outlet (22) comprises: A middle-layer air outlet pipe (221) is disposed at the other end of the middle-layer isolation tube (2) relative to the second opening (21) so as to protrude away from the second opening (21) and be embedded in the outer-layer air extraction hole (122); a middle-layer air outlet hole (222) is formed inside the middle-layer air outlet pipe (221) and communicates with the outer-layer air extraction hole (122) and the middle-layer compartment (E); The inner layer air outlet (32) comprises: An inner layer air outlet pipe (321) is disposed at the other end of the inner layer isolation tube (3) relative to the third opening (31), protruding outwardly away from the third opening (31) and embedded in the middle layer air outlet hole (222); an inner layer air outlet hole (322) is formed inside the inner layer air outlet pipe (321) and connects the middle layer air outlet hole (222) and the inner layer compartment (F).

4. The vacuum coating equipment according to claim 3, characterized in that: The outer layer exhaust hole (122), the middle layer exhaust hole (222), the inner layer exhaust hole (322), the outer cavity (1), the middle layer isolation tube (2), the inner layer isolation tube (3) and the material carrier (4) are coaxially arranged, and the inner layer projection area (S1) of the inner layer exhaust hole (322) in the axial direction (C) is greater than or equal to the difference between the middle layer projection area (S2) of the middle layer exhaust hole (222) in the axial direction (C) and the inner layer projection area (S1), and the difference between the middle layer projection area (S2) and the inner layer projection area (S1) is greater than or equal to the difference between the outer layer projection area (S3) and the middle layer projection area (S2) of the outer layer exhaust hole (122) in the axial direction (C).

5. The vacuum coating equipment according to claim 4, characterized in that: The outer cavity (1), the middle isolation tube (2), the inner isolation tube (3) and the material carrier (4) are all in the shape of a rectangular parallelepiped; the material carrier (4) comprises a pair of parallel and spaced side plates (44) and a top plate (43) connected between corresponding top ends of the pair of side plates (44); corresponding ends of the pair of side plates (44) and the top plate (43) respectively form the air inlet opening (41) and the air outlet opening (42); corresponding bottom ends of the pair of side plates (44) form a bottom opening (45) communicating with the air inlet opening (41) and the air outlet opening (42); When the material carrier (4) is placed in the inner isolation cylinder (3), the corresponding bottom ends of a pair of side plates (44) are supported on the top surface of the bottom wall (33) of the inner isolation cylinder (3), so that the bottom wall (33) of the inner isolation cylinder (3) closes the bottom opening (45).

6. The vacuum coating equipment according to claim 5, characterized in that: An end of the bottom wall (33) of the inner isolation cylinder (3) corresponding to the third opening (31) is provided with an extension portion (331) extending out of the third opening (31), and the width of the extension portion (331) is greater than or equal to the width of the top wall (34) of the inner isolation cylinder (3); When the material carrier (4) is placed in the inner isolation cylinder (3), the air inlet opening (41) is arranged flush with the third opening (31), and the air outlet opening (42) is arranged at a distance from the inner air outlet (32).

7. The vacuum coating device according to any one of claims 1 to 6, characterized in that: The end of one side wall of the middle isolation tube (2) corresponding to the second opening (21) is provided with at least one set of first air supply channels (23) and first air return channels (24), and the end of the other side wall of the middle isolation tube (2) corresponding to the second opening (21) is provided with at least one set of second air supply channels (25) and second air return channels (26); The vacuum coating equipment also includes: A first reaction gas source (7) is disposed on one side of the outer cavity (1) and is connected to the first gas supply channel (23) and the first gas return channel (24) via a first gas supply pipeline (71) and a first gas return pipeline (72) respectively; A second reaction gas source (8) is disposed on the other side of the outer cavity (1) and is connected to the second gas supply channel (25) and the second gas return channel (26) via a second gas supply pipeline (81) and a second gas return pipeline (82) respectively; The spraying device (6) comprises: A movable spray plate (61) is installed at one end of the furnace door cover (5) facing the outer exhaust port (12), and a side of the movable spray plate (61) facing away from the furnace door cover (5) is respectively provided with a first spray air inlet hole (611), a first spray air return hole (612), a second spray air inlet hole (613) and a second spray air return hole (614) corresponding to the first air supply channel (23), the first air return channel (24), the second air supply channel (25) and the second air return channel (26); A first gas pipeline (615) communicating with the first spray air inlet hole (611) and the first spray air return hole (612) is provided in the movable spray plate (61), and at least one first spray pipeline (616) connected to the first gas pipeline (615); a plurality of first spray holes (6161) penetrating a side of the movable spray plate (61) facing away from the furnace door cover (5) are distributed on the first spray pipeline (616); The movable spray plate (61) is also provided with a second gas pipeline (617) communicating with the second spray air inlet hole (613) and the second spray air return hole (614), and at least one second spray pipeline (618) connected to the second gas pipeline (617); the second spray pipeline (618) is provided with a plurality of second spray holes (6181) penetrating a side of the movable spray plate (61) facing away from the furnace door cover (5); When the furnace door cover (5) is closed, the movable spray plate (61) is parallelly docked and covers the second opening (21), and the first air supply channel (23), the first air return channel (24), the second air supply channel (25) and the second air return channel (26) are respectively connected to the first spray air inlet hole (611), the first spray air return hole (612), the second spray air inlet hole (613) and the second spray air return hole (614).

8. The vacuum coating equipment according to claim 7, characterized in that: The first gas supply pipeline (615) and the second gas supply pipeline (615) are arranged in parallel and at intervals at opposite ends of the movable spray plate (61); a plurality of first spray pipelines (616) are vertically connected to the first gas supply pipeline (615) in parallel and at intervals; a plurality of second spray pipelines (618) are vertically connected to the second gas supply pipeline (617) in parallel and at intervals; and each of the first spray pipelines (616) and the second spray pipelines (618) are arranged alternately; When the furnace door cover (5) is closed, the projection of the spray area (H) formed by the corresponding first spray holes (6161) on each first spray pipeline (616) and the corresponding second spray holes (6181) on the second spray pipeline (618) falls within the cross-sectional area of ​​the air inlet opening (41) and completely covers the cross-sectional area of ​​the target substrate contained in the material carrier (4), so that most of the first reaction gas and the second reaction gas respectively introduced by the first reaction gas source (7) and the second reaction gas source (8) enter the material carrier (4) through the air inlet opening (41).

9. The vacuum coating device according to any one of claims 1 to 6, characterized in that: Also includes: A special gas filtering device (9), connected to the outer gas extraction port (12), and used for filtering residual reaction gas discharged from the outer gas extraction port (12); A vacuum pump (10) connected to the downstream position of the special gas filtering device (9) relative to the outer layer air extraction port (12) and used for evacuating the interior of the outer cavity (1); The tail gas treatment device (101) is connected to the downstream position of the vacuum pump (10) relative to the special gas filtering device (9), and is used to treat the tail gas generated by the reaction of the reaction gas and discharge the treated gas to the downstream equipment.

10. The vacuum coating equipment according to any one of claims 1 to 6, characterized in that: The vacuum coating equipment is ALD coating equipment.

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