A wireless ultrasonic measurement system and construction method thereof

Abstract

The present invention discloses a wireless ultrasonic measurement system and a construction method thereof, wherein the measurement system includes a sensing module and a detection module; the sensing module includes a piezoelectric layer on the surface of the detection object, a first lead-out electrode structure, a first grounding electrode structure, a first insulating plate, and a sensing coil; the first insulating plate is provided with a first opening; the first lead-out electrode structure includes a first lead-out electrode on the top of the piezoelectric layer and a second lead-out electrode in the first opening; the first grounding electrode structure includes a first grounding electrode and a second grounding electrode; the second lead-out electrode and the second grounding electrode are respectively connected to the first lead-out electrode and the first grounding electrode; the sensing coil is provided at the top of the first insulating plate. The detection system of the present invention uses an insulating plate to isolate the sensing coil away from the surface of the detection object, which is conducive to the sensing coil generating a non-zero induced voltage U ind , thereby enhancing the signal of the receiving coil, and realizing contactless ultrasonic signal reception with a receiving distance of up to 20mm.

Description

Technical Field

[0001] The present invention relates to the technical field of ultrasonic measurement, and in particular to a wireless ultrasonic measurement system and a construction method thereof. Background Art

[0002] Traditional ultrasonic wireless measurement systems utilize an excitation coil, a receiving coil, and a ceramic coil to achieve wireless ultrasonic transmission and reception. This allows for ultrasonic frequencies up to 5 MHz, enabling measurement. However, the large size of the ceramic coil (>65 mm) limits its application in some scenarios.

[0003] To this end, researchers have made a number of improvements. For example, CN116558838A discloses a wireless ultrasonic measurement system and its design method, in which a piezoelectric coating and a sensor coil are prepared on the surface of a turbine blade, and a transmitting coil and a receiving coil are used above the sensor coil to achieve wireless reception of pulse signals. However, this system directly deposits the sensor coil on the upper end of the sample to be measured, making the obtained signal insufficient. In addition, the transmitting coil is placed closer to the sample to be measured. Due to the shielding effect, the receiving coil cannot efficiently receive the signal from the sensor coil, which greatly reduces the signal of the receiving coil. At the same time, this patent does not mention the preparation method of the transmitting / receiving coil.

[0004] It is necessary to adjust and improve the structure of the existing wireless ultrasonic measurement system. Summary of the Invention

[0005] The purpose of this invention is to improve the structure of the wireless ultrasonic measurement system to achieve wireless ultrasonic transmission and reception over a wide temperature range and long distance, and to be applied to the measurement of load and temperature of large equipment in the fields of aerospace, nuclear power, new energy, etc.

[0006] In order to achieve the above object, the present invention provides an infinite ultrasonic measurement system, comprising a sensing module and a detection module;

[0007] The sensing module includes a piezoelectric layer on the surface of the detection object, a first lead-out electrode structure, a first grounding electrode structure, a first insulating plate and a sensing coil;

[0008] The first insulating plate is provided with a first opening;

[0009] The first extraction electrode structure includes a first extraction electrode on the top of the piezoelectric layer and a second extraction electrode in the first opening;

[0010] The first grounding electrode structure includes a first grounding electrode and a second grounding electrode, wherein the first grounding electrode and the second grounding electrode are used to ground the piezoelectric layer and the first insulating plate respectively;

[0011] The second extraction electrode and the second ground electrode are connected to the first extraction electrode and the first ground electrode respectively;

[0012] The sensing coil is arranged on the top of the first insulating plate;

[0013] The detection module is used to transmit electromagnetic signals to the sensing module and receive feedback electromagnetic signals, thereby realizing contactless infinite ultrasonic measurement.

[0014] Furthermore, the detection module includes a transmitting component and a receiving component;

[0015] The transmitting component includes a transmitting structure and a generator. The transmitting structure includes a second insulating plate with a second opening, a transmitting coil, a third extraction electrode, a fourth extraction electrode, and a third grounding electrode. The transmitting coil and the third grounding electrode are provided at one end of the second insulating plate, and the third extraction electrode is provided at the other end. The fourth extraction electrode is provided in the second opening. The generator is electrically connected to the third extraction electrode and the fourth extraction electrode.

[0016] The receiving component includes a receiving structure and a detector. The receiving structure includes a third insulating plate with a third opening, a receiving coil, a fifth lead-out electrode, a sixth lead-out electrode, and a fourth grounding electrode. The receiving coil and the fourth grounding electrode are provided at one end of the third insulating plate, and the fifth lead-out electrode is provided at the other end. The sixth lead-out electrode is provided in the third opening, and the detector is electrically connected to the fifth lead-out electrode and the sixth lead-out electrode.

[0017] Furthermore, the third ground electrode and the fourth ground electrode are connected to form a common ground electrode, and the transmitting structure and the receiving structure are formed into a composite structure. The receiving coil of the receiving component in the composite structure is closer to the sensing coil of the sensing module than the transmitting coil of the transmitting structure, so as to enhance the signal received by the receiving coil.

[0018] The distance between the sensing coil and the receiving coil is 0-20 mm.

[0019] Furthermore, when the second extraction electrode and the second ground electrode are connected to the first extraction electrode and the first ground electrode respectively, a first gap exists between the first insulating plate and the piezoelectric layer, and / or,

[0020] When the transmitting structure and the receiving structure form a composite structure, the second gap between the second insulating plate and the third insulating plate is filled with insulating glue, and the insulating glue can withstand a temperature of 200°C-1400°C.

[0021] Furthermore, the thickness of the first insulating plate, the second insulating plate and the third insulating plate is 0.5-10 mm;

[0022] The first opening, the second opening and the third opening are circular openings with a diameter of 0.5-1.5 mm.

[0023] Furthermore, the first insulating plate, the second insulating plate, and the third insulating plate are made of ceramic material.

[0024] Furthermore, the coil widths of the sensing coil, transmitting coil and receiving coil are 0.1-0.5 mm, the distance between adjacent coils is 0.1-0.2 mm, and the number of coil turns is 3-10.

[0025] Furthermore, the piezoelectric layer has a thickness between 2 and 30 μm;

[0026] The first extraction electrode, the second extraction electrode, the third extraction electrode, the fourth extraction electrode, the fifth extraction electrode, the sixth extraction electrode, the first grounding electrode, the second grounding electrode, the third grounding electrode, and the fourth grounding electrode are made of a metal element or a metal alloy with a melting point higher than 800° C. and a thickness between 5 μm and 50 μm;

[0027] The thickness of the third ground electrode is greater than the thickness of the transmitting coil and the fourth lead-out electrode.

[0028] It should be noted that the objects to be detected in the present invention are not strictly limited and may, for example, be steel plates, bolts, aircraft engine turbine blades, etc. The material of the piezoelectric layer is not strictly limited and may, for example, be at least one of AlN, ZnO, LiNbO3, and doped piezoelectric materials thereof. The ceramic material of the first, second, and third insulating plates is not strictly limited and may, for example, be at least one of Al2O3, SiO2, and ZrO2.

[0029] The present invention also provides a method for constructing a wireless ultrasonic measurement system, comprising:

[0030] Prepare a piezoelectric layer on the surface of the object being measured, and prepare a first lead-out electrode and a first ground electrode on the top of the piezoelectric layer;

[0031] A sensing coil and a second ground electrode are prepared on a surface of a first insulating plate having a first opening, and a second lead-out electrode is formed at the first opening;

[0032] Connecting the second lead electrode and the second ground electrode to the first lead electrode and the first ground electrode respectively to form a sensing module;

[0033] A detection module is set up, which is used to transmit electromagnetic signals to the sensing module and receive feedback electromagnetic signals to achieve contactless unlimited ultrasonic measurement.

[0034] Furthermore, the erection detection module includes:

[0035] A transmitting coil and a third ground electrode are prepared at one end of a second insulating plate having a second opening, a third lead-out electrode is prepared at the other end, and a fourth lead-out electrode is formed at the second opening to obtain a transmitting component;

[0036] A receiving coil and a fourth ground electrode are prepared at one end of a third insulating plate with a third opening, a fifth lead-out electrode is prepared at the other end, and a sixth lead-out electrode is formed at the second opening to obtain a receiving component;

[0037] The third ground electrode and the fourth ground electrode are connected to form a common ground electrode, and the transmitting structure and the receiving structure are formed into a composite structure. The receiving coil of the receiving component in the composite structure is closer to the sensing coil of the sensing module than the transmitting coil of the transmitting structure, so as to enhance the signal received by the receiving coil;

[0038] The generator is electrically connected to the third lead-out electrode and the fourth lead-out electrode, and the detector is electrically connected to the fifth lead-out electrode and the sixth lead-out electrode.

[0039] Compared with the prior art, the present invention has the following beneficial effects:

[0040] 1. The detection system of the present invention uses an insulating plate to isolate the sensor coil away from the surface of the detection object, which is conducive to the sensor coil generating a non-zero induced voltage U ind , thereby enhancing the signal of the receiving coil;

[0041] 2. The present invention can achieve contactless ultrasonic signal reception with a receiving distance of up to 20 mm.

[0042] Other features and advantages of the present invention will be described in the following description, and in part will become apparent from the description, or will be understood by practicing the present invention. The purpose and other advantages of the present invention can be realized and obtained by the steps or devices indicated in the description and the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0044] Figure 1 shows a top view of the sensor module of Example 1;

[0045] Figure 2 shows a side view of the sensor module of Example 1;

[0046] Figure 31 shows a top view and a bottom view of the emitting component of Example 1, wherein the left side is a top view and the right side is a bottom view;

[0047] Figure 4 1 shows a top view and a bottom view of the receiving component of Example 1, wherein the left side is a top view and the right side is a bottom view;

[0048] Figure 5 shows a side view of the detection module of Example 1;

[0049] Figure 6 shows a side view of a wireless ultrasonic measurement system of an embodiment;

[0050] Figure 7 A schematic diagram showing a transmitting coil generating a first alternating current and a first alternating magnetic flux is shown;

[0051] Figure 8 A schematic diagram showing a second alternating current induced on the surface of the bolt head and generating a second magnetic flux thereof;

[0052] Figure 9 The diagram shows the electromagnetic analysis when the sensor coil is directly prepared on the bolt head;

[0053] Figure 10 shows a schematic diagram of electromagnetic analysis when the sensing coil is set away from the bolt head;

[0054] Figure 11 Showing the ultrasonic test results of Examples 1 to 6;

[0055] Figure 12 Summary Figure 11 A diagram showing the relationship between the induced voltage and the distance between the receiving coil and the sensing coil in different embodiments;

[0056] Figure 13 The ultrasonic test results of Example 1 and Comparative Example 1 are shown;

[0057] Figure 14 The ultrasonic test results of Example 1 and Comparative Example 2 are shown;

[0058] Description of reference numerals:

[0059] 10. Sensing module; 101. Bolt; 1011. Piezoelectric layer; 1012. First extraction electrode; 1013. First ground electrode; 102. First insulating plate; 1021. First opening; 1022. Sensing coil; 1023. Second ground electrode; 1024. Second extraction electrode; 20. Detection module; 201. Second insulating plate; 2011. Second opening; 2012. Transmitting coil; 2013. Third ground electrode; 2014. Three lead-out electrodes; 2015, fourth lead-out electrode; 2016, generator; 202, third insulating plate; 2021, third opening; 2022, receiving coil; 2023, fourth grounding electrode; 2024, fifth lead-out electrode; 2025, sixth lead-out electrode; 2026, detector; 203, common grounding electrode; 30, insulating glue; 40, first alternating current; 50, first alternating magnetic flux; 60, second alternating current; 70, second magnetic flux. DETAILED DESCRIPTION

[0060] The endpoints of the ranges and any values ​​disclosed herein are not limited to the precise ranges or values, and these ranges or values ​​should be understood to include values ​​close to these ranges or values. For numerical ranges, the endpoints of each range, the endpoints of each range and individual point values, and the individual point values ​​can be combined with each other to form one or more new numerical ranges, and these numerical ranges should be considered to be specifically disclosed in the present invention.

[0061] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the specific embodiments of the present invention and the accompanying drawings. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0062] In the description of this embodiment, the terms "upper", "lower", "left", "right" and other orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first", "second" and the like are only used to distinguish in the description and have no special meaning. The terms "connected", "connected" and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral whole; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0063] Example 1

[0064] A method for constructing a wireless ultrasonic measurement system, comprising the following steps:

[0065] S1. Set up sensor module 10

[0066] (1) Using radio frequency magnetron sputtering, 15 μm of AlN is deposited on the upper end surface of the bolt 101 head to form a piezoelectric layer 1011;

[0067] (2) Ag is deposited on the surface of the piezoelectric layer 1011 and then patterned to obtain a first extraction electrode 1012 and a first ground electrode 1013 at the center and edge of the piezoelectric layer 1011, respectively;

[0068] (3) Ag is deposited on the first insulating plate 102 with the first opening 1021 by radio frequency magnetron sputtering, and then patterned to form a sensing coil 1022 on the top of the first insulating plate 102, a second ground electrode 1023 on one side of the first insulating plate 102, and a second extraction electrode 1024 in the first opening 1021;

[0069] (4) The second extraction electrode 1024 and the second ground electrode 1023 are connected to the first extraction electrode 1012 and the first ground electrode 1013 respectively, and the first gap formed is filled and further fixed to obtain the following Figure 1 and Figure 2 The sensor module 10 shown;

[0070] S2, set up detection module 20

[0071] (1) Ag is deposited on the second insulating plate 201 with the second opening 2011 by radio frequency magnetron sputtering, and then patterned to form a transmitting coil 2012 and a third grounding electrode 2013 at one end of the second insulating plate 201, a third extraction electrode 2014 is formed at the other end of the second insulating plate 201, and a fourth extraction electrode 2015 is formed in the second opening 2011, thereby obtaining a transmitting component, such as Figure 3 As shown, the thickness of the third ground electrode 2013 is greater than the thickness of the transmitting coil 2012 and the fourth lead-out electrode 2015;

[0072] (2) Ag is deposited on the third insulating plate 202 with the third opening 2021 by radio frequency magnetron sputtering, and then patterned to form a receiving coil 2022 and a fourth ground electrode 2023 at one end of the third insulating plate 202, a fifth lead-out electrode 2024 is formed at the other end of the third insulating plate 202, and a sixth lead-out electrode 2025 is formed at the third opening 2021, thereby obtaining a receiving component, such as Figure 4 As shown;

[0073] (4) The third ground electrode 2013 and the fourth ground electrode 2023 are connected to form a common ground electrode 203, and the second gap formed is filled and further fixed with an insulating glue 30, so that the transmitting structure and the receiving structure form a composite structure, such as Figure 5 As shown, the receiving coil 2022 of the receiving component in the composite structure is closer to the sensing coil 1022 of the sensing module 10 than the transmitting coil 2012 of the transmitting structure;

[0074] (5) If Figure 7 As shown, the generator 2016 is electrically connected to the third lead-out electrode 2014 and the fourth lead-out electrode 2015, and the detector 2026 is electrically connected to the fifth lead-out electrode 2024 and the sixth lead-out electrode 2025, and the receiving coil 2022 of the composite structure is fixed at a position 1 mm directly above the sensing coil 1022 of the sensing module 10.

[0075] In this embodiment, the transmitting coil 2012 is located above and the receiving coil 2022 is located below. That is, the receiving coil 2022 is placed closer to the surface of the bolt 101. In this structure, the receiving coil 2022 can freely receive the signal from the sensing coil 1022. If the transmitting coil 2012 is closer to the surface of the bolt 101, it will reduce the signal of the receiving coil 2022 due to the shielding effect.

[0076] In this embodiment, the sensing coil 1022 is isolated by the first insulating plate 102 and is located away from the surface of the bolt 101 , thereby enhancing the principle of the sensing coil 1022 as follows:

[0077] (1) If Figure 7 As shown, the generator 2016 applies an AC voltage to the transmitting coil 2012 and generates a first AC current 40 and a first AC magnetic flux 50 around the transmitting coil 2012;

[0078] (2) Next, the first AC magnetic flux 50 reaches the surface of the bolt 101, inducing a second AC current 60 on the surface of the head of the bolt 101 and generating its second magnetic flux 70, as shown in FIG. Figure 8 As shown;

[0079] (3) According to Faraday's law of electromagnetic induction, the direction of the second alternating current 60 is opposite to the direction of the first alternating current 40 in the transmitting coil 2012. The intensity and direction of the second alternating current 60 are such that it attempts to make the total magnetic flux near the surface of the bolt 101 equal to zero, that is, the magnetic flux before the transmitting coil 2012 starts to generate magnetic flux;

[0080] (4) If the sensing coil 1022 is placed on the surface of the bolt 101, since the AC magnetic flux is almost compensated, its induced current and induced voltage U indClose to zero, such as Figure 9 As shown;

[0081] (5) The sensing coil 1022 is placed away from the surface of the bolt 101 through the first insulating plate 102, and the second magnetic flux 70 is low, that is, they do not compensate each other, and the total magnetic flux is not zero; in this case, the sensing coil 1022 can generate a non-zero induced voltage U ind , that is, the sensor coil 1022 signal is enhanced, such as Figure 10 shown.

[0082] As an embodiment, the first insulating plate 102, the second insulating plate 201 and the third insulating plate 202 are exactly the same, and the material is Al2O3 ceramic; the shape is a circle with a cross-sectional area larger than the piezoelectric layer 1011, and the thickness is 5mm; the first opening 1021, the second opening 2011 and the third opening 2021 are circles with a diameter of 1mm.

[0083] As an embodiment, the sensing coil 1022, transmitting coil 2012, and receiving coil 2022 have the same configuration: a coil width of 0.2 mm, a distance between adjacent coils of 0.15 mm, six coil turns, and 20 μm thick silver. Too few turns will result in a weak signal, and too many turns will increase the difficulty of fabrication.

[0084] As an embodiment, the first extraction electrode 1012, the second extraction electrode 1024, the third extraction electrode 2014, the fourth extraction electrode 2015, the fifth extraction electrode 2024, the sixth extraction electrode 2025, the first grounding electrode 1013, the second grounding electrode 1023, and the fourth grounding electrode 2023 are silver with a thickness of 10 μm; the third grounding electrode 2013 is silver with a thickness of 22 μm.

[0085] As an embodiment, the insulating adhesive 30 is an inorganic adhesive that can withstand temperatures of 200-1400°C.

[0086] As an embodiment, the generator 2016 provides an alternating voltage, and the detector 2026 is an oscilloscope to measure the received signal.

[0087] The embodiment is basically the same as the first embodiment, except that the position of the receiving coil directly above the sensing coil of the sensing module is adjusted to 3 mm, 5 mm, 7 mm, 10 mm, and 15 mm respectively.

[0088] The ultrasonic measurement results of Example 1 to Example 6 are as follows Figure 11 and Figure 12As shown, it can be seen that the wireless ultrasonic measurement system constructed by the present invention can achieve contactless measurement at a distance greater than or equal to 15 mm, and in actual use, the signal can still be detected at a distance of 20 mm.

[0089] Comparative Example 1

[0090] The embodiment is basically the same as the first embodiment, except that the first insulating plate 102 is not used, that is, the sensing coil 1022 is directly deposited on the surface of the piezoelectric layer 1011 .

[0091] The received signals measured in Example 1 (with the first insulating plate 102) and Comparative Example 1 (without the first insulating plate 102) are as follows: Figure 13 It can be seen that the signal measured in comparative example 1 is almost 0, that is, the insulating plate 102 isolates the sensing coil 1022 away from the surface of the detection object, which is conducive to the sensing coil 1022 generating a non-zero induced voltage U ind , thereby enhancing the signal of the receiving coil 2022.

[0092] Comparative Example 2

[0093] The embodiment is basically the same as the embodiment 1, except that the receiving coil 2022 is located at the top and the transmitting coil 2012 is located at the bottom, that is, the transmitting coil 2012 is placed closer to the surface of the bolt 101 .

[0094] The received signals measured in Example 1 (the receiving coil 2022 is placed closer to the surface of the bolt 101) and Comparative Example 2 (the transmitting coil 2012 is placed closer to the surface of the bolt 101) are as follows: Figure 14 It can be seen that the signal measured in Comparative Example 2 is lower than that in Example 1, which is reduced by 1.8 times. That is, the receiving coil 2022 of the receiving component is closer to the sensing coil 1022 of the sensor module 10 than the transmitting coil 2012 of the transmitting structure, which can enhance the signal received by the receiving coil 2022.

[0095] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A wireless ultrasonic measurement system, characterized in that: Including sensing module and detection module; The sensing module includes a piezoelectric layer on the surface of the detection object, a first lead-out electrode structure, a first grounding electrode structure, a first insulating plate and a sensing coil; The first insulating plate is provided with a first opening; The first extraction electrode structure includes a first extraction electrode on the top of the piezoelectric layer and a second extraction electrode in the first opening; The first grounding electrode structure includes a first grounding electrode and a second grounding electrode, wherein the first grounding electrode and the second grounding electrode are used to ground the piezoelectric layer and the first insulating plate respectively; The second extraction electrode and the second ground electrode are connected to the first extraction electrode and the first ground electrode respectively; The sensing coil is arranged on the top of the first insulating plate; The detection module is used to transmit electromagnetic signals to the sensing module and receive feedback electromagnetic signals, thereby realizing contactless and unlimited ultrasonic measurement; The detection module includes a transmitting component and a receiving component; The transmitting component includes a transmitting structure and a generator. The transmitting structure includes a second insulating plate with a second opening, a transmitting coil, a third extraction electrode, a fourth extraction electrode, and a third grounding electrode. The transmitting coil and the third grounding electrode are provided at one end of the second insulating plate, and the third extraction electrode is provided at the other end. The fourth extraction electrode is provided in the second opening. The generator is electrically connected to the third extraction electrode and the fourth extraction electrode. The receiving component includes a receiving structure and a detector. The receiving structure includes a third insulating plate having a third opening, a receiving coil, a fifth lead-out electrode, a sixth lead-out electrode, and a fourth ground electrode. The receiving coil and the fourth ground electrode are provided at one end of the third insulating plate, and the fifth lead-out electrode is provided at the other end. The sixth lead-out electrode is provided in the third opening. The detector is electrically connected to the fifth lead-out electrode and the sixth lead-out electrode. The third ground electrode and the fourth ground electrode are connected to form a common ground electrode, and the transmitting structure and the receiving structure are formed into a composite structure. The receiving coil of the receiving component in the composite structure is closer to the sensing coil of the sensing module than the transmitting coil of the transmitting structure, so as to enhance the signal received by the receiving coil.

2. The wireless ultrasonic measurement system according to claim 1, characterized in that: The distance between the sensing coil and the receiving coil is 0-20 mm.

3. The wireless ultrasonic measurement system according to claim 1, wherein: When the second extraction electrode and the second ground electrode are connected to the first extraction electrode and the first ground electrode respectively, a first gap exists between the first insulating plate and the piezoelectric layer, and / or When the transmitting structure and the receiving structure form a composite structure, the second gap between the second insulating plate and the third insulating plate is filled with insulating glue, and the insulating glue can withstand a temperature of 200°C-1400°C.

4. The wireless ultrasonic measurement system according to claim 1, wherein: The thickness of the first insulating plate, the second insulating plate and the third insulating plate is 0.5-10 mm; The first opening, the second opening and the third opening are circular openings with a diameter of 0.5-1.5 mm.

5. The wireless ultrasonic measurement system according to claim 1, wherein: The first insulating plate, the second insulating plate and the third insulating plate are made of ceramic material.

6. The wireless ultrasonic measurement system according to claim 1, characterized in that: The coil widths of the sensing coil, transmitting coil and receiving coil are 0.1-0.5 mm, the distance between adjacent coils is 0.1-0.2 mm, and the number of coil turns is 3-10.

7. The wireless ultrasonic measurement system according to claim 1, wherein: The thickness of the piezoelectric layer is between 2 and 30 μm; The first extraction electrode, the second extraction electrode, the third extraction electrode, the fourth extraction electrode, the fifth extraction electrode, the sixth extraction electrode, the first grounding electrode, the second grounding electrode, the third grounding electrode, and the fourth grounding electrode are made of a metal element or a metal alloy with a melting point higher than 800° C. and a thickness between 5 μm and 50 μm; The thickness of the third ground electrode is greater than the thickness of the transmitting coil and the fourth lead-out electrode.

8. A method for constructing a wireless ultrasonic measurement system, characterized in that: include, Prepare a piezoelectric layer on the surface of the object being measured, and prepare a first lead-out electrode and a first ground electrode on the top of the piezoelectric layer; A sensing coil and a second ground electrode are prepared on a surface of a first insulating plate having a first opening, and a second lead-out electrode is formed at the first opening; Connecting the second lead electrode and the second ground electrode to the first lead electrode and the first ground electrode respectively to form a sensing module; A detection module is set up, which is used to transmit electromagnetic signals to the sensing module and receive feedback electromagnetic signals to achieve contactless and unlimited ultrasonic measurement; The erection detection module includes: A transmitting coil and a third ground electrode are prepared at one end of a second insulating plate having a second opening, a third lead-out electrode is prepared at the other end, and a fourth lead-out electrode is formed at the second opening to obtain a transmitting component; A receiving coil and a fourth ground electrode are prepared at one end of a third insulating plate with a third opening, a fifth lead-out electrode is prepared at the other end, and a sixth lead-out electrode is formed in the third opening to obtain a receiving component; The third ground electrode and the fourth ground electrode are connected to form a common ground electrode, and the transmitting structure and the receiving structure are formed into a composite structure. The receiving coil of the receiving component in the composite structure is closer to the sensing coil of the sensing module than the transmitting coil of the transmitting structure, so as to enhance the signal received by the receiving coil; The generator is electrically connected to the third lead-out electrode and the fourth lead-out electrode, and the detector is electrically connected to the fifth lead-out electrode and the sixth lead-out electrode.

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