Novel high-speed semiconductor ceramic device nondestructive scanning detection equipment

Abstract

The invention relates to the technical field of semiconductors, and discloses novel high-speed semiconductor ceramic device nondestructive scanning detection equipment which comprises a Y-direction movement mechanism, a Z-direction movement mechanism and an X-direction movement mechanism, the X-direction movement mechanism is installed on the front face of the Z-direction movement mechanism, and the Y-direction movement mechanism is installed on the front face of the Z-direction movement mechanism. The Y-direction movement mechanism is installed at the bottom of the Z-direction movement mechanism and used for Z-direction movement of the Z-direction movement mechanism. The X-direction movement mechanism comprises an X-direction fixing plate, and the upper side and the lower side of the front face of the X-direction fixing plate are each provided with two X-direction linear guide rails. According to the novel high-speed semiconductor ceramic device nondestructive scanning detection equipment, X-direction and Y-direction movement of detection scanning is driven by a high-speed and high-precision linear motor, so that the movement time of detection scanning is greatly shortened, the movement speed is increased, high-precision and high-efficiency nondestructive scanning detection of the semiconductor ceramic device is realized, and the detection efficiency is improved. Finally, the product inspection time is shortened, and the requirement for efficient inspection of a large number of products is met.

Description

Technical Field

[0001] The invention relates to the field of semiconductor technology, in particular to a novel high-speed nondestructive scanning detection device for semiconductor ceramic devices. Background Art

[0002] In the semiconductor manufacturing industry, ceramic devices are widely used in various electronic devices due to their excellent properties, such as high hardness, high wear resistance, high corrosion resistance and good insulation performance. However, with the continuous development of semiconductor technology, the complexity and integration of ceramic devices are also increasing, which puts higher requirements on the quality inspection of ceramic devices.

[0003] The existing detection equipment uses a screw transmission system for the movement in the three vertical directions of scanning. At the same time, the vertical Z-direction movement moves together with the scanning direction, which makes the motion structure unable to meet the high-speed motion requirements of operation. The scanning operation speed is low, and the time taken for a single plane scan and multi-layer scan is too long. It cannot meet the inspection requirements of a large number of products. Therefore, a new high-speed semiconductor ceramic device non-destructive scanning detection equipment is urgently needed. Summary of the invention

[0004] The purpose of the present invention is to provide a novel high-speed nondestructive scanning detection device for semiconductor ceramic devices to solve the problems raised in the above background technology.

[0005] In order to solve the above technical problems, the present invention provides the following technical solutions: a new type of high-speed semiconductor ceramic device non-destructive scanning detection equipment, including a Y-axis motion mechanism, a Z-axis motion mechanism and an X-axis motion mechanism,

[0006] The X-direction motion mechanism is installed on the front side of the Z-direction motion mechanism, and the Y-direction motion mechanism is installed on the bottom side of the Z-direction motion mechanism for Z-direction motion of the Z-direction motion mechanism;

[0007] The X-axis motion mechanism includes an X-axis fixed plate, two X-axis linear guides are installed on the upper and lower sides of the front side of the X-axis fixed plate, X-axis sliders are slidably arranged on the two X-axis linear guides, the same X-axis moving plate is fixed on the two X-axis sliders, a mover of a linear motor is fixed on the rear side in the middle of the X-axis moving plate, a probe mounting plate is fixed on the front side of the X-axis moving plate, an amplifier mounting seat is fixedly connected to the front side of the probe mounting plate, a pulse transmitter and receiver is fixedly connected to the amplifier mounting seat, a detection probe is installed on the front side of the probe mounting plate, and a stator of the linear motor is installed in the middle of the X-axis fixed plate.

[0008] Preferably, the detection probe controls the current of the moving coil of the linear motor through a motion controller to achieve high-speed and high-precision movement of the detection probe in the X direction to detect the product below.

[0009] The X-axis motion mechanism is driven by a linear motor. The mover of the linear motor is fixed on the X-axis moving plate, and the stator is installed on the X-axis fixed plate. When the motion controller controls the current of the mover coil of the linear motor, the mover will generate corresponding electromagnetic force, thereby performing linear motion in the magnetic field generated by the stator. Since the mover is fixedly connected to the X-axis moving plate, the linear motion of the mover will drive the X-axis moving plate and all components thereon (including the probe mounting plate, amplifier mounting seat, pulse transmitter and receiver, detection probe, etc.) to move together.

[0010] Preferably, the Z-axis motion mechanism includes a Z-axis mounting plate, two Z-axis linear guides are installed on the front side of the Z-axis mounting plate, two Z-axis sliders are slidably arranged on each of the Z-axis linear guides, an upper and lower screw seats are installed on the front side of the Z-axis mounting plate, a ball screw is installed between the two screw seats, a screw nut is arranged on the outer side of the ball screw, a screw nut connecting block is installed on the bottom of the screw nut, a first synchronous wheel is fixedly connected to the top of the ball screw, a Z-axis servo motor is installed on the back side of the Z-axis mounting plate, and a second synchronous wheel is fixedly connected to the output end of the Z-axis servo motor.

[0011] Preferably, the first synchronous wheel is connected to the second synchronous wheel on the Z-direction servo motor through a synchronous belt, so that the Z-direction servo motor rotates to drive the ball screw, thereby driving the screw nut to move up and down in the Z direction.

[0012] Preferably, the front faces of the Z-direction sliding blocks on the two Z-direction linear guide rails are respectively fixedly connected to the X-direction fixing plates.

[0013] The Z-direction motion mechanism is driven by a Z-direction servo motor. The second synchronous wheel at the output end of the Z-direction servo motor is connected to the first synchronous wheel of the ball screw through a synchronous belt. When the Z-direction servo motor rotates, it will drive the synchronous belt and the first synchronous wheel to rotate together, thereby driving the ball screw to rotate. When the ball screw rotates, the screw nut thereon will make a linear motion in the spiral groove of the ball screw. The screw nut is fixedly connected to the X-direction fixed plate through a screw nut connecting block. Therefore, the linear motion of the screw nut will drive the X-direction fixed plate and all components thereon (including the X-direction motion mechanism, detection probe, etc.) to make up and down motion in the Z direction (i.e., the vertical direction) together.

[0014] Preferably, the Y-axis motion mechanism includes a table top, the top of which is fixedly connected to two mounting seats, each of which is equipped with a Y-axis linear guide, each of which is equipped with a Y-axis slider, the top of the Y-axis slider is fixedly connected to the same slider mounting plate, and the top of the slider mounting plate is bolted to two auxiliary support plates.

[0015] The Y-direction motion mechanism is realized by a Y-direction linear guide and a Y-direction slider. The Y-direction linear guide is installed on the mounting seat of the table, and the Y-direction slider slides on it. When Y-direction motion is required, the Y-direction slider can be driven by a corresponding linear motor to slide on the Y-direction linear guide. Since the slider mounting plate is fixedly connected to the Y-direction slider, the sliding of the Y-direction slider will drive the slider mounting plate and all components thereon, including the Z-direction motion mechanism, the X-direction motion mechanism, etc., to move in the Y-direction, that is, horizontal direction and perpendicular to the X-direction.

[0016] Preferably, the ends of the two auxiliary support plates that are close to each other are fixedly connected to the Z-direction mounting plate.

[0017] Preferably, the device is driven by a linear motor in each position of the X and Y directions, thereby achieving high-speed and high-precision movement of the detection probe and improving the inspection efficiency of the device.

[0018] Compared with the prior art, the beneficial effects achieved by the present invention are:

[0019] First, the present invention uses high-speed and high-precision linear motors to drive the X- and Y-direction movements of the detection scan, which greatly reduces the movement time of the detection scan, reduces the impact of the structural load on the scanning movement, and improves the movement speed, thereby achieving high-precision and high-efficiency non-destructive scanning detection of semiconductor ceramic devices, ultimately reducing the inspection time of products and meeting the needs of efficient inspection of a large number of products. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0021] Figure 2 It is a schematic diagram of the overall structure of the present invention from the rear side;

[0022] Figure 3 It is a schematic diagram of the structure of the X-axis motion mechanism of the present invention;

[0023] Figure 4 It is a schematic diagram of the structure of the Z-axis motion mechanism of the present invention.

[0024] Among them: 11, X-axis fixed plate; 12, X-axis linear guide; 13, X-axis slider; 14, X-axis moving plate; 15, mover; 16, probe mounting plate; 17, amplifier mounting seat; 18, pulse transmitter and receiver; 19, detection probe; 20, stator; 21, Z-axis mounting plate; 22, Z-axis linear guide; 23, Z-axis slider; 24, screw seat; 25, ball screw; 26, screw nut; 27, screw nut connecting block; 28, first synchronous wheel; 29, Z-axis servo motor; 30, second synchronous wheel; 31, synchronous belt; 32, table; 33, mounting seat; 34, Y-axis linear guide; 35, Y-axis slider; 36, slider mounting plate; 37, auxiliary support plate. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] The present invention provides the following technical solutions:

[0027] Embodiment 1

[0028] See also Figure 1 , Figure 2 , Figure 3 and Figure 4 , a new type of high-speed non-destructive scanning inspection equipment for semiconductor ceramic devices, including Y-axis motion mechanism, Z-axis motion mechanism and X-axis motion mechanism,

[0029] The X-direction motion mechanism is installed on the front of the Z-direction motion mechanism, and the Y-direction motion mechanism is installed on the bottom of the Z-direction motion mechanism for the Z-direction motion of the Z-direction motion mechanism;

[0030] The X-axis motion mechanism includes an X-axis fixed plate 11, two X-axis linear guides 12 are installed on the upper and lower sides of the front side of the X-axis fixed plate 11, X-axis sliders 13 are slidably arranged on the two X-axis linear guides 12, the same X-axis moving plate 14 is fixed on the two X-axis sliders 13, a mover 15 of a linear motor is fixed on the rear side in the middle of the X-axis moving plate 14, a probe mounting plate 16 is fixed on the front side of the X-axis moving plate 14, an amplifier mounting seat 17 is fixedly connected to the front side of the probe mounting plate 16, a pulse transmitter and receiver 18 is fixedly connected to the amplifier mounting seat 17, a detection probe 19 is installed on the front side of the probe mounting plate 16, and a stator 20 of a linear motor is installed in the middle of the X-axis fixed plate 11.

[0031] The detection probe 19 controls the current of the moving coil of the linear motor through the motion controller, so as to realize the high-speed and high-precision movement of the detection probe 19 in the X direction to detect the products below.

[0032] Through the above technical solution, the X-axis motion mechanism is driven by a linear motor, the mover 15 of the linear motor is fixed on the X-axis moving plate 14, and the stator 20 is installed on the X-axis fixed plate 11. When the motion controller controls the current of the mover coil of the linear motor, the mover 15 will generate corresponding electromagnetic force, thereby performing linear motion in the magnetic field generated by the stator 20. Since the mover 15 is fixedly connected to the X-axis moving plate 14, the linear motion of the mover 15 will drive the X-axis moving plate 14 and all components thereon, including the probe mounting plate 16, the amplifier mounting seat 17, the pulse transmitter and receiver 18, the detection probe 19, etc., to move together. This motion is high-speed and high-precision, and can ensure that the detection probe 19 accurately scans and detects the product below in the X-direction, that is, the horizontal direction. Since the equipment is driven by a linear motor and has power drive at each position in the X-direction, high-speed and high-precision movement of the detection probe is achieved, thereby improving the inspection efficiency of the equipment.

[0033] Embodiment 2

[0034] See also Figure 1 , Figure 2 , Figure 3 and Figure 4 A new type of high-speed non-destructive scanning detection equipment for semiconductor ceramic devices, the Z-direction motion mechanism includes a Z-direction mounting plate 21, two Z-direction sliders 23 are slidably arranged on each Z-direction linear guide 22, and the two Z-direction linear guides 22 are slidably arranged with Z-direction sliders 23, and the front of the Z-direction mounting plate 21 is equipped with upper and lower screw seats 24, and a ball screw 25 is installed between the two screw seats 24. A screw nut 26 is arranged on the outside of the ball screw 25, and a screw nut connecting block 27 is installed at the bottom of the screw nut 26. The top of the ball screw 25 is fixedly connected with a first synchronous wheel 28, and a Z-direction servo motor 29 is installed on the back of the Z-direction mounting plate 21. The output end of the Z-direction servo motor 29 is fixedly connected with a second synchronous wheel 30.

[0035] The first synchronous wheel 28 is connected to the second synchronous wheel 30 on the Z-direction servo motor 29 through a synchronous belt 31 , so that the Z-direction servo motor 29 rotates and drives the ball screw 25 , thereby driving the screw nut 26 to move up and down in the Z direction.

[0036] The front sides of the Z-direction sliding blocks 23 on the two Z-direction linear guide rails 22 are fixedly connected to the X-direction fixing plates 11 respectively.

[0037] Through the above technical solution, the Z-direction motion mechanism is driven by the Z-direction servo motor 29, and the second synchronous wheel 30 at the output end of the Z-direction servo motor 29 is connected to the first synchronous wheel 28 of the ball screw 25 through the synchronous belt 31. When the Z-direction servo motor 29 rotates, it will drive the synchronous belt 31 and the first synchronous wheel 28 to rotate together, thereby driving the ball screw 25 to rotate. When the ball screw 25 rotates, the screw nut 26 thereon will make a linear motion in the spiral groove of the ball screw 25. The screw nut 26 is fixedly connected to the X-direction fixed plate 11 through the screw nut connecting block 27. Therefore, the linear motion of the screw nut 26 will drive the X-direction fixed plate 11 and all components thereon, including the X-direction motion mechanism, the detection probe 19, etc., to make up and down motion in the Z direction, that is, the vertical direction.

[0038] Embodiment 3

[0039] See also Figure 1 , Figure 2 , Figure 3 and Figure 4 A new type of high-speed non-destructive scanning detection equipment for semiconductor ceramic devices, the Y-axis motion mechanism includes a table 32, the top of the table 32 is fixedly connected to two mounting seats 33, each mounting seat 33 is installed with a Y-axis linear guide 34, each Y-axis linear guide 34 is installed with a Y-axis slider 35, the top of the Y-axis slider 35 is fixedly connected to the same slider mounting plate 36, and the top of the slider mounting plate 36 is bolted to two auxiliary support plates 37.

[0040] One end of the two auxiliary support plates 37 that is close to each other is fixedly connected to the Z-direction mounting plate 21 .

[0041] The device is driven by a linear motor in each position of the X and Y directions, thereby achieving high-speed and high-precision movement of the detection probe 19 and improving the inspection efficiency of the device.

[0042] Through the above technical scheme, the Y-direction motion mechanism is realized by the Y-direction linear guide 34 and the Y-direction slider 35. The Y-direction linear guide 34 is installed on the mounting seat 33 of the table 32, and the Y-direction slider 35 slides thereon. When the Y-direction motion is required, the Y-direction slider 35 can be pushed to slide on the Y-direction linear guide 34 by the corresponding linear motor drive. Since the slider mounting plate 36 is fixedly connected to the Y-direction slider 35, the sliding of the Y-direction slider 35 will drive the slider mounting plate 36 and all components thereon, including the Z-direction motion mechanism, the X-direction motion mechanism, etc., to move in the Y-direction, that is, horizontally and perpendicular to the X-direction. The equipment is driven by a linear motor at each position in the Y-direction, thereby realizing high-speed and high-precision movement of the detection probe and improving the inspection efficiency of the equipment.

[0043] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations may be made to the embodiments without departing from the principles and spirit thereof, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A new type of high-speed nondestructive scanning inspection equipment for semiconductor ceramic devices, comprising a Y-axis motion mechanism, a Z-axis motion mechanism and an X-axis motion mechanism, characterized in that: The X-direction motion mechanism is installed on the front side of the Z-direction motion mechanism, and the Y-direction motion mechanism is installed on the bottom side of the Z-direction motion mechanism for Z-direction motion of the Z-direction motion mechanism; The X-direction motion mechanism comprises an X-direction fixed plate (11), two X-direction linear guide rails (12) are installed on the upper and lower sides of the front side of the X-direction fixed plate (11), an X-direction slider (13) is slidably arranged on the two X-direction linear guide rails (12), the same X-direction movable plate (14) is fixed on the two X-direction sliders (13), a mover (15) of a linear motor is fixed on the rear side in the middle of the X-direction movable plate (14), a probe mounting plate (16) is fixed on the front side of the X-direction movable plate (14), an amplifier mounting seat (17) is fixedly connected to the front side of the probe mounting plate (16), a pulse transmitter and receiver (18) is fixedly connected to the amplifier mounting seat (17), a detection probe (19) is installed on the front side of the probe mounting plate (16), and a stator (20) of a linear motor is installed in the middle of the X-direction fixed plate (11).

2. The novel high-speed nondestructive scanning detection equipment for semiconductor ceramic devices according to claim 1 is characterized in that: The detection probe (19) controls the current of the moving coil of the linear motor through a motion controller, thereby achieving high-speed and high-precision movement of the detection probe (19) in the X direction to detect the product below.

3. The novel high-speed nondestructive scanning detection equipment for semiconductor ceramic devices according to claim 1 is characterized in that: The Z-direction motion mechanism comprises a Z-direction mounting plate (21), two Z-direction linear guide rails (22) are mounted on the front of the Z-direction mounting plate (21), two Z-direction sliders (23) are slidably mounted on each of the Z-direction linear guide rails (22), two upper and lower screw seats (24) are mounted on the front of the Z-direction mounting plate (21), a ball screw (25) is mounted between the two screw seats (24), a screw nut (26) is mounted on the outer side of the ball screw (25), a screw nut connecting block (27) is mounted on the bottom of the screw nut (26), a first synchronous wheel (28) is fixedly connected to the top of the ball screw (25), a Z-direction servo motor (29) is mounted on the back of the Z-direction mounting plate (21), and a second synchronous wheel (30) is fixedly connected to the output end of the Z-direction servo motor (29).

4. The novel high-speed nondestructive scanning detection equipment for semiconductor ceramic devices according to claim 3 is characterized in that: The first synchronous wheel (28) is connected to the second synchronous wheel (30) on the Z-direction servo motor (29) via a synchronous belt (31), so that the Z-direction servo motor (29) can rotate and drive the ball screw (25), thereby driving the screw nut (26) to move up and down in the Z direction.

5. The novel high-speed nondestructive scanning detection equipment for semiconductor ceramic devices according to claim 3 is characterized in that: The front faces of the Z-direction sliding blocks (23) on the two Z-direction linear guide rails (22) are respectively fixedly connected to the X-direction fixing plates (11).

6. The novel high-speed nondestructive scanning detection equipment for semiconductor ceramic devices according to claim 1 is characterized in that: The Y-direction motion mechanism comprises a table (32), the top of the table (32) is fixedly connected to two mounting seats (33), each mounting seat (33) is mounted with a Y-direction linear guide (34), each Y-direction linear guide (34) is mounted with a Y-direction slider (35), the top of each Y-direction slider (35) is fixedly connected to the same slider mounting plate (36), and the top of the slider mounting plate (36) is bolted to two auxiliary support plates (37).

7. The novel high-speed nondestructive scanning detection equipment for semiconductor ceramic devices according to claim 6 is characterized in that: One end of the two auxiliary support plates (37) that is close to each other is fixedly connected to the Z-direction mounting plate (21).

8. The novel high-speed nondestructive scanning detection equipment for semiconductor ceramic devices according to claim 1 is characterized in that: The device is driven by a linear motor in each position in the X and Y directions, thereby achieving high-speed and high-precision movement of the detection probe (19) and improving the inspection efficiency of the device.

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