Ink jet type electric induction imprinting equipment and method

Abstract

The embodiment of the invention provides ink-jet type electric induction imprinting equipment and method, which are applied to the technical field of nano imprinting in micro-nano manufacturing, and comprise an electric induction system and an ink-jet imprinting module, the electric induction system comprises an upper electrode and a lower electrode, external voltage is arranged between the upper electrode and the lower electrode, and the lower electrode is used for bearing a substrate material; the ink jet imprinting module is used for depositing nano imprinting glue liquid drops on a substrate material corresponding to a cavity interval of the nano imprinting template; the electric induction system is used for adjusting an external voltage to be a first voltage, so that the nanoimprint glue liquid drops are uniformly spread on the substrate material; the substrate material is positioned between the upper electrode and the lower electrode; the ink jet imprinting module is used for imprinting the nano imprinting template; and the electric induction system is used for adjusting the external voltage to be second voltage in the imprinting process, so that the nanoimprinting glue liquid drops are uniformly diffused in the cavity of the nanoimprinting template until the nanoimprinting template is attached to the nanoimprinting glue liquid.

Description

Technical Field

[0001] The present invention relates to the field of micro-nano manufacturing nano-imprinting technology, and in particular to an inkjet type electrically induced imprinting device and method. Background Art

[0002] Nanoimprinting is an effective technology for replicating nanoscale structural features, and is used in the fields of electronics, photonics, semiconductors, and biology. Nanoimprinting is done by depositing a low-viscosity imprinting glue on a substrate and lowering a patterned template into the imprinting glue fluid. The imprinting glue fluid quickly fills into the pattern of the template through capillary force, and finally the imprinting glue is cross-linked under UV radiation, and then the template is removed, leaving the patterned imprinting glue on the substrate.

[0003] However, in the process of uniformly distributing the imprint glue on the substrate, the imprint glue will inevitably be wasted due to the effect of centrifugal force. The post-processing of the wasted imprint glue will also bring about energy consumption and environmental pollution problems. At the same time, since the centrifugal force on the substrate surface cannot be the same, it is easy to cause uneven glue thickness on the substrate surface and affect the imprinting accuracy. Summary of the invention

[0004] The embodiments of the present application provide an inkjet electrically induced nanoimprinting device and method for depositing nanoimprinting glue droplets at fixed points and in fixed quantities on a substrate material corresponding to a cavity area of ​​the nanoimprinting template according to a specific shape of the nanoimprinting template, thereby avoiding unnecessary waste of nanoimprinting glue.

[0005] In a first aspect, an embodiment of the present application provides an inkjet electrically induced nanoimprinting device, comprising: an electrically induced system and an inkjet imprinting module;

[0006] The electric induction system comprises an upper electrode and a lower electrode, an external voltage is provided between the upper electrode and the lower electrode, and the lower electrode is used to carry the substrate material; the upper electrode and the lower electrode are separate whole electric plates;

[0007] The inkjet imprinting module is used to deposit nanoimprint glue droplets on the substrate material corresponding to the cavity interval of the nanoimprint template;

[0008] The electric induction system is used to adjust the external voltage to a first voltage so that the nanoimprint glue droplets are spread evenly on the substrate material under the action of the electric field force; the substrate material is located between the upper electrode and the lower electrode;

[0009] The inkjet imprinting module is also used to imprint the nanoimprint template;

[0010] The electric induction system is also used to adjust the external voltage to a second voltage during the imprinting process, so that the nanoimprint glue droplets are evenly diffused in the cavity of the nanoimprint template under the action of the electric field force until the nanoimprint template and the nanoimprint glue are attached; the first voltage and the second voltage have opposite voltage directions.

[0011] This application deposits nanoimprint glue droplets on the substrate material corresponding to the cavity interval of the nanoimprint template through an inkjet imprint module, realizes the fixed-point and quantitative deposition of nanoimprint glue droplets according to the specific shape of the nanoimprint template, accurately controls the amount of nanoimprint glue, improves the accuracy of the nanoimprint replication process, and saves time and cost. Compared with the general glue-leveling method, the nanoimprint glue droplets of this application are more evenly distributed, and avoids unnecessary waste of imprint glue during the glue-leveling method; thus making nanoimprinting more green and accurate. In addition, in this application, an electric induction system is used to act on the nanoimprint glue droplets on the substrate material twice to regulate the spreading morphology of the nanoimprint glue in the substrate material and the nanoimprint template cavity, which is conducive to the discharge of the air between the nanoimprint glue droplets and the nanoimprint template cavity, thereby achieving a faster nanoimprint template and nanoimprint glue bonding.

[0012] Optionally, the inkjet imprinting module includes an inkjet printing module and an imprinting module;

[0013] The inkjet printing module is specifically used to deposit nanoimprint glue droplets on the substrate material corresponding to the cavity area of ​​the nanoimprint template;

[0014] The imprint module is specifically used to imprint the nanoimprint template.

[0015] Optionally, the imprint module includes a pressurizing unit and a curing unit;

[0016] The pressurizing unit is specifically used to apply pressure to the nanoimprint template pair;

[0017] The curing unit is specifically used to cure the nanoimprint glue droplets in the cavity of the nanoimprint template.

[0018] Optionally, the direction of the first voltage is from the upper electrode to the lower electrode;

[0019] The direction of the second voltage is from the lower electrode to the upper electrode.

[0020] Optionally, the viscosity of the nanoimprint glue droplets ranges from 0.1 to 100 centipoise, the content of impurities smaller than 200 nm in the nanoimprint glue droplets does not exceed 1 ppm, the curing time of the nanoimprint glue droplets is less than 60 seconds, the volume of the nanoimprint glue droplets is 1 to 10 picoliters, and the spacing between each nanoimprint glue droplet is 40 to 150 microns.

[0021] Optionally, the voltage value of the external voltage ranges from 0 to 50 volts, the resistivity of the upper electrode and the lower electrode is less than 2 ohms, and the mechanical strength of the lower electrode is greater than 120 MPa.

[0022] In a second aspect, an embodiment of the present application provides an inkjet electrically induced nanoimprinting method, which is applicable to an inkjet electrically induced nanoimprinting device including an electrically induced system and an inkjet imprinting module, including:

[0023] The inkjet imprinting module deposits nanoimprint glue droplets on the substrate material corresponding to the cavity area of ​​the nanoimprint template;

[0024] The electric induction system adjusts the external voltage between the upper electrode and the lower electrode to a first voltage so that the nanoimprint glue droplets are spread evenly on the substrate material under the action of the electric field force; the substrate material is located between the upper electrode and the lower electrode, and the upper electrode and the lower electrode are separate whole electric plates;

[0025] During the process of the inkjet imprinting module imprinting the nanoimprint template, the electrical induction system adjusts the external voltage between the upper electrode and the lower electrode to a second voltage, so that the nanoimprint glue droplets are evenly diffused in the cavity of the nanoimprint template under the action of the electric field force until the nanoimprint template and the nanoimprint glue are attached; the first voltage and the second voltage are opposite in voltage direction.

[0026] This application deposits nanoimprint glue droplets on the substrate material corresponding to the cavity interval of the nanoimprint template through an inkjet imprint module, realizes the fixed-point and quantitative deposition of nanoimprint glue droplets according to the specific shape of the nanoimprint template, accurately controls the amount of nanoimprint glue, improves the accuracy of the nanoimprint replication process, and saves time and cost. Compared with the general glue-leveling method, the nanoimprint glue droplets of this application are more evenly distributed, and avoids unnecessary waste of imprint glue during the glue-leveling method; thus making nanoimprinting more green and accurate. In addition, in this application, an electric induction system is used to act on the nanoimprint glue droplets on the substrate material twice to regulate the spreading morphology of the nanoimprint glue in the substrate material and the nanoimprint template cavity, which is conducive to the discharge of the air between the nanoimprint glue droplets and the nanoimprint template cavity, thereby achieving a faster nanoimprint template and nanoimprint glue bonding.

[0027] Optionally, the inkjet imprinting module includes an inkjet printing module and an imprinting module, and the imprinting module includes a pressurizing unit;

[0028] The inkjet imprinting module deposits nanoimprint glue droplets on a substrate material corresponding to a cavity area of ​​a nanoimprinting template, comprising:

[0029] The inkjet printing module deposits nanoimprint glue droplets on the substrate material corresponding to the cavity area of ​​the nanoimprint template;

[0030] The inkjet imprinting module performs imprinting on the nanoimprint template, comprising:

[0031] A pressure is applied to the nanoimprint template by a pressure unit to enhance the adhesion between the nanoimprint template and the nanoimprint glue.

[0032] Optionally, the imprint module further includes a curing unit; after the pressure is applied to the nanoimprint template by the pressurizing unit, the method further includes:

[0033] The nanoimprint glue droplets in the cavity of the nanoimprint template are solidified by the solidification unit.

[0034] Optionally, the functional groups of the nanoimprint glue droplets include a hydrophilic end and a lipophilic end;

[0035] The nanoimprint glue droplets are spread evenly on the substrate material under the action of the electric field force, comprising:

[0036] Under the action of the electric field force of the first voltage, the hydrophilic end of the nanoimprint glue droplet is forced to expand outward on the substrate material;

[0037] The nanoimprint glue droplets are uniformly diffused in the cavity of the nanoimprint template under the action of the electric field force, comprising:

[0038] Under the action of the electric field force of the second voltage, the hydrophilic end of the nanoimprint glue droplet is forced to aggregate into the cavity of the nanoimprint template. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0040] Figure 1 A schematic diagram of the molecular structure of an embossing glue droplet provided in an embodiment of the present invention;

[0041] Figure 2 A schematic diagram of a flow chart of an inkjet type electrically induced imprinting method provided by an embodiment of the present invention;

[0042] Figure 3 A schematic diagram of an embossing glue droplet on a substrate material provided by an embodiment of the present invention;

[0043] Figure 4 A schematic diagram of the diameter of a embossing glue droplet provided by an embodiment of the present invention;

[0044] Figure 5 A schematic diagram of an embossing glue droplet on a substrate material provided by an embodiment of the present invention;

[0045] Figure 6 A schematic diagram of different droplet spacings of an embossing glue droplet provided by an embodiment of the present invention;

[0046] Figure 7 A schematic diagram of a flow chart of an inkjet type electrically induced imprinting method provided by an embodiment of the present invention;

[0047] Figure 8 A schematic structural diagram of an inkjet electrically induced embossing device provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0048] In order to make the purpose, technical scheme and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0049] First, the nouns mentioned in this application are further explained:

[0050] Functional group degree: In a condensation reaction, the number of functional groups in a molecule that can participate in the reaction is called functionality. The functionality of a monomer When a monomer molecule undergoes a condensation reaction, the number of functional groups that participate in the reaction is called functionality, that is, the number of monomer functional groups that actually react in the reaction system.

[0051] In the prior art, nanoimprinting is an effective technology for replicating nanoscale structural features, and has great potential in various fields, such as electronics, photonics, semiconductors, and biological applications. Nanoimprinting is performed by depositing a low-viscosity imprinting glue on a substrate, lowering a patterned template into the imprinting glue fluid, and then the imprinting glue fluid is quickly filled into the pattern of the template through capillary force. Finally, the imprinting glue fluid is cross-linked and cured under ultraviolet radiation (UV), and then the template is removed, leaving a patterned imprinting glue on the substrate.

[0052] Compared with photolithography, nanoimprint technology has higher resolution and can replicate template patterns over a larger area and faster. However, in the process of evenly distributing the imprint glue on the substrate, the imprint glue will inevitably be wasted due to the centrifugal force. The post-processing of the wasted imprint glue will also cause energy consumption and environmental pollution problems. At the same time, since the centrifugal force on the substrate surface is different, it is easy to cause uneven glue thickness on the substrate surface and affect the final imprint accuracy.

[0053] A good solution is to use the on-demand inkjet method. In this application, on-demand inkjet refers to the deposition of imprint glue at fixed points and in fixed quantities on the substrate according to the shape of the template. This can not only ensure uniform glue thickness, but also solve the problems of material waste and energy consumption. However, on-demand inkjet often requires that the imprint glue droplets are small and can be evenly distributed on the local part of the substrate, but small droplets often have local distribution mismatch on the substrate due to the influence of surface tension, which seriously affects the pattern replication process of nanoimprinting. Therefore, evenly distributed small droplets need to be evenly spread on the substrate. Therefore, we propose an inkjet-type electrically induced nanoimprinting method to assist the diffusion of nanoimprint glue droplets.

[0054] Since nanoimprint glue is made of organic molecules, it contains a variety of groups, and the sensitivity of various groups to the electric field is different. Therefore, the voltage can be adjusted according to the structural characteristics of the imprint glue to achieve spreading. Figure 1 The nanoimprint glue droplets shown include a lipophilic end and a hydrophilic end, wherein the hydrophilic end is also called a hydrophilic group, which usually includes a carboxylic acid group, a sulfonic acid group, a phosphoric acid group, a hydroxyl group, an amino group, a quaternary ammonium group, and a block polyether; the lipophilic end is also called a hydrophobic group, which usually includes a carbon chain, a hydrocarbon group containing aromatic groups, esters, ethers, amines, amides, and the like; some nanoimprint glue droplets also include UV-active groups: unsaturated polyesters, acrylates, epoxy acrylates, polyurethane acrylates, polyester acrylates, vinyl ethers, and the like.

[0055] like Figure 2 As shown, an inkjet electrically induced nanoimprinting method provided in an embodiment of the present application specifically comprises the following steps:

[0056] Step S201, the inkjet imprinting module deposits imprinting glue droplets on the substrate material corresponding to the cavity area of ​​the imprinting template;

[0057] Specifically, the imprint template is divided into cavity areas and non-cavity areas. Since the structures of the cavity areas of different imprint templates are different, each imprint template will have cavity areas of different sizes and shapes. The inkjet imprint module deposits the droplet-shaped nanoimprint glue on the position of the substrate material corresponding to the cavity area according to the shape and size of the cavity area of ​​each imprint template. The nanoimprint glue droplets deposited at the corresponding position of each cavity area should be evenly distributed, that is, the corresponding nanoimprint glue droplets under the same cavity area are equidistant; the amount of nanoimprint glue deposited on the substrate material corresponding to different cavity areas of the same imprint template is different.

[0058] Step S202, the electric induction system adjusts the external voltage between the upper electrode and the lower electrode to a first voltage, so that the imprint glue droplets are evenly spread on the substrate material under the action of the electric field force; the substrate material is located between the upper electrode and the lower electrode, and the upper electrode and the lower electrode are separate and arranged whole electric plates;

[0059] Specifically, after the inkjet imprinting module drops imprinting glue droplets on the substrate material according to a certain droplet spacing, the electrical induction system energizes the upper electrode above the imprinting glue droplets and the lower electrode below the substrate material, and the external voltage between the upper electrode and the lower electrode is recorded as the first voltage.

[0060] Due to the molecular characteristics of the embossing glue droplets, the embossing glue droplets will spread evenly on the substrate material under the action of the electric field force generated by the first voltage. Figure 3 As shown, the embossed glue droplet is affected by the electric field force generated by the first voltage, that is, the embossed glue droplet is affected by the electric field force in the direction pointed by the arrow, and will change from the shape of the left figure to the spreading state of the right figure. The magnitude of the first voltage can be adjusted according to the structural characteristics of the nano-imprint glue.

[0061] like Figure 4 As shown, it is a real-object microscope optical photograph of a printed glue droplet provided by the present application spreading under the action of the electric field force generated by the first voltage, that is, the printed glue droplet is spread under the action of the electric field force in the direction pointed by the arrow, wherein Figure a shows that the diameter of the printed glue droplet under non-electric induction is 10μm; Figure b shows that the diameter of the printed glue droplet under electric induction is 45μm.

[0062] In some possible embodiments, the voltage value of the external voltage between the upper electrode and the lower electrode ranges from 0 to 50 V. In the implementation process of the present application, since the properties of the nanoimprint glue used in each imprinting process are different, the external voltage can be adjusted according to the structural characteristics of the nanoimprint glue.

[0063] The resistivity of the upper electrode and the lower electrode is less than 2 ohms. The mechanical strength of the lower electrode is greater than 120 MPa. The upper electrode and the lower electrode can be made of metal-deposited PET thin film or epoxy resin + PEDOT.

[0064] Step S203, during the process of the inkjet imprinting module imprinting the imprinting template, the electric induction system adjusts the external voltage between the upper electrode and the lower electrode to a second voltage, so that the imprinting glue droplets are evenly diffused in the cavity of the imprinting template under the action of the electric field force until the imprinting template and the nanoimprinting glue are bonded; the first voltage and the second voltage are in opposite directions.

[0065] Specifically, the inkjet imprinting module places the imprinting template on the corresponding position of the substrate material, and the imprinting glue droplets on the substrate material will enter the corresponding cavity on the imprinting template. Since there will be air between the cavity and the imprinting glue droplets, the electric induction system will energize the upper electrode above the imprinting glue droplets and the lower electrode below the substrate material, and the external voltage between the upper electrode and the lower electrode is recorded as the second voltage.

[0066] Due to the molecular characteristics of the imprint glue droplets, the imprint glue droplets will polymerize on the substrate material under the action of the electric field force generated by the second voltage, and quickly achieve the bonding of each cavity of the imprint template with the nanoimprint glue. Figure 5 As shown, the embossed glue droplet is affected by the electric field force generated by the second voltage, that is, the embossed glue droplet is affected by the electric field force in the direction pointed by the arrow, and will change from the shape in the left figure to the aggregated state in the right figure. Figure 3 As shown, since the voltage directions of the first voltage and the second voltage are opposite, the motion states of the embossed glue droplets under the electric field forces of the first voltage and the second voltage are also opposite. The magnitudes of the first voltage and the second voltage can be adjusted according to the structural characteristics of the embossed glue.

[0067] The present application deposits the imprint glue droplets on the substrate material corresponding to the cavity area of ​​the imprint template through the inkjet imprint module, thereby realizing the fixed-point and quantitative deposition of the imprint glue droplets according to the specific shape of the imprint template, accurately controlling the amount of imprint glue, improving the accuracy of the nanoimprint replication process, and saving time and cost.

[0068] Compared with the general coating method, the distribution of the embossing glue droplets in the present application is more uniform, and unnecessary waste of the embossing glue in the coating method is avoided; thus, nanoimprinting is more green and precise. In addition, the present application uses an electric induction system to act on the embossing glue droplets on the substrate material twice to regulate the spreading morphology of the embossing glue in the substrate material and the cavity of the embossing template, which is conducive to the discharge of the air between the embossing glue droplets and the cavity of the embossing template, thereby achieving faster bonding of the embossing template and the embossing glue liquid.

[0069] In a possible embodiment of the present application, the inkjet imprinting module includes an inkjet printing module and an imprinting module, the imprinting module includes a pressurizing unit; the inkjet imprinting module deposits imprinting glue droplets on a substrate material corresponding to a cavity interval of the imprinting template, including: the inkjet printing module deposits imprinting glue droplets on a substrate material corresponding to a cavity interval of the imprinting template; the inkjet imprinting module imprints the imprinting template, including: applying pressure to the imprinting template through the pressurizing unit to enhance the fit between the imprinting template and the imprinting glue.

[0070] Specifically, the inkjet imprinting module includes an inkjet printing module and an imprinting module. The inkjet printing module deposits the droplet-shaped imprinting glue at the position of the substrate material corresponding to the cavity interval according to the shape and size of each cavity interval of the imprinting template. The imprinting glue droplets deposited at the corresponding position of each cavity interval should be evenly distributed, that is, the corresponding imprinting glue droplets under the same cavity interval are equidistant; the amount of imprinting glue deposited on the substrate material corresponding to different cavity intervals of the same imprinting template is different. In addition, the imprinting module includes a pressurizing unit, which applies pressure to the imprinting template to enhance the fit between the imprinting template and the imprinting glue liquid.

[0071] The present application deposits embossing glue droplets on a substrate material corresponding to the cavity area of ​​the embossing template through an inkjet printing module, thereby achieving point-to-point and quantitative deposition of the embossing glue droplets according to the specific shape of the embossing template, accurately controlling the amount of embossing glue, improving the accuracy of the nanoimprint replication process, and saving time and cost.

[0072] The imprint module further comprises a curing unit; after the pressure is applied to the imprint template by the pressurizing unit, the method further comprises: curing the imprint glue droplets in the cavity of the imprint template by the curing unit.

[0073] Specifically, the curing unit may be an ultraviolet radiation (UV for short) device, which solidifies the embossing glue droplets in the cavity of the embossing template, so that the embossing glue liquid forms a stable structure that fits the embossing template.

[0074] The functional groups of the embossed glue droplets include a hydrophilic end and a lipophilic end; the embossed glue droplets are spread evenly on the substrate material under the action of the electric field force, including: under the action of the electric field force of the first voltage, the hydrophilic end of the embossed glue droplets is forced to expand outward on the substrate material; the embossed glue droplets are diffused evenly in the cavity of the imprint template under the action of the electric field force, including: under the action of the electric field force of the second voltage, the hydrophilic end of the embossed glue droplets is forced to aggregate into the cavity of the imprint template.

[0075] Specifically, due to the molecular characteristics of the imprinted glue droplets, e.g. Figure 1The functional groups of the embossed glue droplet shown include a hydrophilic end and an oleophilic end. Under the action of the electric field force generated by the first voltage, the embossed glue droplet will spread evenly on the substrate material. Figure 3 As shown in the figure, the hydrophilic end of the embossed glue droplet is affected by the electric field force generated by the first voltage, that is, the hydrophilic end of the embossed glue droplet is affected by the electric field force in the direction pointed by the arrow, and will change from the shape of the left figure to the spreading state of the right figure. The magnitude of the first voltage can be adjusted according to the structural characteristics of the embossed glue. Figure 4 As shown, it is a real-object microscope optical photograph of a printed glue droplet provided by the present application spreading under the action of the electric field force generated by the first voltage, that is, the hydrophilic end of the printed glue droplet is affected by the electric field force in the direction pointed by the arrow, wherein Figure a shows that the diameter of the printed glue droplet under non-electric induction is 10μm; Figure b shows that the diameter of the printed glue droplet under electric induction is 45μm.

[0076] Due to the molecular characteristics of the embossing glue droplets, the hydrophilic end of the embossing glue droplets is forced to aggregate into the cavity of the embossing template under the action of the electric field force generated by the second voltage, so that each cavity of the embossing template is quickly fitted with the embossing glue. Figure 5 As shown, the hydrophilic end of the embossed glue droplet changes from the shape in the left figure to the aggregated state in the right figure under the action of the electric field force generated by the second voltage, that is, the embossed glue droplet is affected by the electric field force in the direction pointed by the arrow.

[0077] The viscosity of the embossing glue droplet ranges from 0.1 to 100 centipoise; the content of impurities smaller than 200 nm in the embossing glue droplet does not exceed 1 ppm; and the curing time of the embossing glue droplet is less than 60 seconds.

[0078] Specifically, in the best implementation of this application, it is necessary to select a embossed adhesive with a viscosity range of 0.1 to 100 centipoise; the impurity content less than 200nm in the embossed adhesive droplet does not exceed 1ppm; and the curing time of the embossed adhesive droplet is less than 60 seconds. In the viscosity range of 0.1 to 100 centipoise, it can be divided into three intervals, classified as high viscosity, medium viscosity and low viscosity. Among them, high viscosity, medium viscosity and low viscosity correspond to the contact angle properties, surface energy properties, functional group degree and softness of the colloid and the surface of the substrate material. Detailed values ​​are shown in the following Table 1:

[0079] Table 1

[0080]

[0081]

[0082] Among them, high-viscosity adhesives are mainly composed of acrylate groups, have low fluorine-containing surface energy, and are mainly used as templates; medium-viscosity adhesives are mainly composed of acrylate groups, have low silicon-containing surface energy, and are mainly used for imprint etching transfer; low-viscosity adhesives are mainly composed of vinyl ether and epoxy, and are mainly used for cationic curing.

[0083] In the implementation of the present application, the volume of the embossing glue droplet is 1 to 10 picoliters, and the spacing between each embossing glue droplet is 40 to 150 micrometers. Figure 6 As shown, it is a real-object microscope optical photograph of the embossed glue droplets provided in the embodiment of the present application. The droplet spacings between the embossed glue droplets in the optical photographs from left to right are 200 μm, 120 μm, and 100 μm, respectively.

[0084] like Figure 7 As shown, it is a schematic diagram of a process of an inkjet electric induced nanoimprinting method provided in an embodiment of the present application. The process is performed by an electric induction system and an inkjet imprinting module, wherein the electric induction system includes an upper electrode, a lower electrode and a voltage control system; the inkjet imprinting module includes an inkjet printing module and an imprinting module, and the imprinting module includes a pressurizing unit and a curing unit, wherein the curing unit is an ultraviolet radiation system including:

[0085] Step S701, the inkjet printing module deposits embossing glue droplets on the substrate material corresponding to the cavity area of ​​the embossing template;

[0086] Step S702, the voltage control system adjusts the external voltage between the upper electrode and the lower electrode to a first voltage, so that the imprint glue droplets are spread evenly on the substrate material under the action of the electric field force;

[0087] Step S703, the voltage control system adjusts the external voltage between the upper electrode and the lower electrode to a second voltage, so that the embossing glue droplets are evenly diffused in the cavity of the embossing template under the action of the electric field force, and the pressure is applied to the embossing template by the pressurizing unit to enhance the adhesion between the embossing template and the embossing glue;

[0088] Step S704 , curing the embossing glue droplets in the cavities of the embossing template by using an ultraviolet radiation system.

[0089] Step S705, removing the imprint template.

[0090] This application deposits the embossing glue droplets on the substrate material corresponding to the cavity area of ​​the imprint template through the inkjet imprinting module, realizes the fixed-point and quantitative deposition of the embossing glue droplets according to the specific shape of the imprinting template, accurately controls the amount of embossing glue, improves the accuracy of the nanoimprint replication process, and saves time and cost. Compared with the general glue leveling method, the embossing glue droplets of this application are more evenly distributed, and avoids unnecessary waste of embossing glue during the glue leveling method; thus making nanoimprinting more green and accurate. In addition, in this application, an electric induction system is used to act on the embossing glue droplets on the substrate material twice to regulate the spreading morphology of the embossing glue in the substrate material and the embossing template cavity, which is conducive to the discharge of the air between the embossing glue droplets and the embossing template cavity, thereby achieving a faster bonding of the embossing template and the embossing glue liquid.

[0091] like Figure 8 As shown, the embodiment of the present application provides an inkjet electrically induced nanoimprinting device 800, including: an electrically induced system 801 and an inkjet imprinting module 802;

[0092] The electric induction system 801 includes an upper electrode 803 and a lower electrode 804, an external voltage is provided between the upper electrode 803 and the lower electrode 804, and the lower electrode is used to carry the substrate material 805; the upper electrode 803 and the lower electrode 804 are separate whole electric plates;

[0093] The inkjet imprinting module 802 is used to deposit the imprinting glue droplets on the substrate material 805 corresponding to the cavity area of ​​the imprinting template 806;

[0094] The electric induction system 801 is used to adjust the external voltage to a first voltage so that the imprint glue droplets are spread evenly on the substrate material 805 under the action of the electric field force; the substrate material 805 is located between the upper electrode 803 and the lower electrode 804;

[0095] The inkjet imprinting module 802 is also used to imprint the imprinting template 806;

[0096] The electric induction system 801 is also used to adjust the external voltage to a second voltage during the imprinting process, so that the imprinting glue droplets are evenly diffused in the cavity of the imprinting template 806 under the action of the electric field force until the imprinting template 806 and the imprinting glue are attached; the voltage directions of the first voltage and the second voltage are opposite.

[0097] The inkjet imprinting module 802 includes an inkjet printing module 807 and an imprinting module 808; the imprinting module 808 includes a pressurizing unit 809 and a curing unit 810;

[0098] The inkjet printing module 807 is specifically used to deposit the embossing glue droplets on the substrate material 805 corresponding to the cavity area of ​​the embossing template;

[0099] A pressurizing unit 809, specifically used to emboss the embossing template 806;

[0100] The curing unit 810 is used to cure the embossing glue droplets in the cavities of the embossing template 806 .

[0101] This application deposits the embossing glue droplets on the substrate material corresponding to the cavity area of ​​the imprint template through the inkjet imprinting module, realizes the fixed-point and quantitative deposition of the embossing glue droplets according to the specific shape of the imprinting template, accurately controls the amount of embossing glue, improves the accuracy of the nanoimprint replication process, and saves time and cost. Compared with the general glue leveling method, the embossing glue droplets of this application are more evenly distributed, and avoids unnecessary waste of embossing glue during the glue leveling method; thus making nanoimprinting more green and accurate. In addition, in this application, an electric induction system is used to act on the embossing glue droplets on the substrate material twice to regulate the spreading morphology of the embossing glue in the substrate material and the embossing template cavity, which is conducive to the discharge of the air between the embossing glue droplets and the embossing template cavity, thereby achieving a faster bonding of the embossing template and the embossing glue liquid.

[0102] Obviously, those skilled in the art can make various changes and modifications to the present application without departing from the spirit and scope of the present application. Thus, if these modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application is also intended to include these modifications and variations.

Claims

1. An inkjet electro-induction embossing device, characterized in that: include: Electrical induction system and inkjet imprinting module; The electrical induction system comprises an upper electrode and a lower electrode, an external voltage is provided between the upper electrode and the lower electrode, and the lower electrode is used to carry a substrate material; The inkjet imprinting module is used to deposit the imprinting glue droplets on the substrate material corresponding to the cavity area of ​​the imprinting template; The electric induction system is used to adjust the external voltage to a first voltage so that the embossing glue droplet spreads on the substrate material under the action of the electric field force, wherein the substrate material is located between the upper electrode and the lower electrode; The electric induction system is also used to adjust the external voltage to a second voltage during the imprinting process, so that the imprinting glue droplets diffuse in the cavity of the imprinting template under the action of the electric field force until the imprinting template and the imprinting glue are attached, wherein the voltage directions of the first voltage and the second voltage are opposite.

2. The device according to claim 1, characterized in that The inkjet imprinting module includes an inkjet printing module and an imprinting module; The inkjet printing module is specifically used to deposit the embossing glue droplets on the substrate material corresponding to the cavity area of ​​the embossing template; The imprinting module is used to imprint the imprinting template.

3. The device according to claim 2, characterized in that The imprint module includes a pressurizing unit and a curing unit; The pressurizing unit is specifically used to apply pressure to the imprint template pair; The curing unit is specifically used to cure the embossing glue droplets in the cavity of the embossing template.

4. The device according to claim 1, characterized in that The direction of the first voltage is from the upper electrode to the lower electrode; The direction of the second voltage is from the lower electrode to the upper electrode.

5. The device according to claim 1, characterized in that The viscosity of the embossing glue droplet is in the range of 0.1 to 100 centipoise, and the content of impurities smaller than 200 nm in the embossing glue droplet is less than or equal to 1 ppm.

6. The device according to claim 4, characterized in that The resistivity of the upper electrode and the lower electrode is less than or equal to 2 ohms.

7. An inkjet electro-induction imprinting method, characterized in that: An inkjet electro-induction imprinting device including an electro-induction system and an inkjet imprinting module, comprising: The inkjet imprinting module deposits imprinting glue droplets on the substrate material corresponding to the cavity area of ​​the imprinting template; The electrical induction system adjusts the external voltage between the upper electrode and the lower electrode to a first voltage so that the imprint glue droplet spreads on the substrate material under the action of the electric field force; the substrate material is located between the upper electrode and the lower electrode; During the process of the inkjet imprinting module imprinting the imprinting template, the electric induction system adjusts the external voltage between the upper electrode and the lower electrode to a second voltage, so that the imprinting glue droplets diffuse in the cavity of the imprinting template under the action of the electric field force until the imprinting template and the imprinting glue are attached; the first voltage and the second voltage have opposite voltage directions.

8. The method according to claim 7, characterized in that The inkjet imprinting module includes an inkjet printing module and an imprinting module, and the imprinting module includes a pressurizing unit; The inkjet imprinting module deposits imprinting glue droplets on a substrate material corresponding to a cavity area of ​​an imprinting template, including: The inkjet printing module deposits the embossing glue droplets on the substrate material corresponding to the cavity area of ​​the embossing template; The inkjet imprinting module performs imprinting on the imprinting template, comprising: The pressure is applied to the imprint template by a pressure unit to enhance the adhesion between the imprint template and the imprint glue.

9. The method according to claim 8, characterized in that The imprint module further includes a curing unit; after the pressure is applied to the imprint template by the pressurizing unit, the imprint module further includes: The embossing glue droplets in the cavity of the embossing template are solidified by the solidification unit.

10. The method according to claim 9, characterized in that The functional groups of the imprinting glue droplet include a hydrophilic end and a lipophilic end; The embossing glue droplets are spread evenly on the substrate material under the action of the electric field force, including: Under the action of the electric field force of the first voltage, the hydrophilic end of the embossing glue droplet is forced to expand outward on the substrate material; The embossing glue droplets are uniformly diffused in the cavity of the embossing template under the action of the electric field force, comprising: Under the action of the electric field force of the second voltage, the hydrophilic end of the embossing glue droplet is forced to aggregate into the cavity of the embossing template.

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