An inkjet electrolithographic printing apparatus and method

Abstract

The embodiment of the application provides an inkjet type electrically induced imprinting device and method, which are applied in the field of micro-nano manufacturing nano-imprinting technology, and comprise an electrically induced system and an inkjet imprinting module; the electrically induced system comprises an upper electrode and a lower electrode, an external voltage is arranged between the upper electrode and the lower electrode, and the lower electrode is used for bearing a substrate material; the inkjet imprinting module is used for depositing a nano-imprinting glue droplet on the substrate material corresponding to a cavity region of a nano-imprinting template; the electrically induced system is used for adjusting the external voltage to be a first voltage, so that the nano-imprinting glue droplet is uniformly spread on the substrate material; the substrate material is located between the upper electrode and the lower electrode; the inkjet imprinting module is used for imprinting the nano-imprinting template; and the electrically induced system is used for adjusting the external voltage to be a second voltage during the imprinting process, so that the nano-imprinting glue droplet is uniformly diffused in the cavity of the nano-imprinting template, and the nano-imprinting template is attached to the nano-imprinting glue.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of micro-nano manufacturing nano-imprinting technology, and particularly relates to an inkjet electrically induced imprinting device and method. BACKGROUND

[0002] Nano-imprinting is an effective technology for replicating nano-scale structural features, and is applied in the fields of electronics, photonics, semiconductors and biology. Nano-imprinting is performed by depositing a low viscosity imprinting glue on a substrate, and lowering a patterned template into the imprinting glue fluid, which is rapidly filled into the pattern of the template by capillary force, and then the imprinting glue is cross-linked under UV radiation, and the template is removed, leaving a patterned imprinting glue on the substrate.

[0003] However, in the process of uniformly distributing the imprinting glue on the substrate, the imprinting glue will inevitably be wasted due to the action of centrifugal force, and the post-processing of the wasted imprinting glue will also cause energy consumption and environmental pollution problems; at the same time, since the centrifugal force acting on the surface of the substrate cannot be the same, it is easy to cause uneven thickness of the glue on the surface of the substrate and affect the imprinting precision. SUMMARY

[0004] The embodiments of the present application provide an inkjet electrically induced nano-imprinting device and method, which is used for depositing nano-imprinting glue droplets on a substrate material corresponding to the cavity interval of a nano-imprinting template according to the specific shape of the nano-imprinting template, so as to avoid unnecessary waste of nano-imprinting glue.

[0005] In a first aspect, the embodiments of the present application provide an inkjet electrically induced nano-imprinting device, comprising: an electrically induced system and an inkjet imprinting module;

[0006] The electrically induced system comprises an upper electrode and a lower electrode, and an external voltage is arranged between the upper electrode and the lower electrode, and the lower electrode is used for carrying a substrate material; the upper electrode and the lower electrode are separately arranged as an integral electrode plate;

[0007] The inkjet imprinting module is used for depositing nano-imprinting glue droplets on a substrate material corresponding to the cavity interval of a nano-imprinting template;

[0008] The electrically induced system is used for adjusting the external voltage to be a first voltage, so that the nano-imprinting glue droplets are uniformly spread on the substrate material under the action of electric field force; the substrate material is located between the upper electrode and the lower electrode;

[0009] The inkjet imprinting module is also used for imprinting the nano-imprinting template;

[0010] The electric induction system is further used to adjust the external voltage to a second voltage during the imprinting process, so that the nanoimprint glue droplets are evenly diffused in the cavity of the nanoimprint template under the action of the electric field force until the nanoimprint template and the nanoimprint glue are bonded; the first voltage and the second voltage have opposite voltage directions.

[0011] The present application deposits nanoimprint glue droplets on the substrate material corresponding to the cavity interval of the nanoimprint template through an inkjet imprint module, thereby achieving the fixed-point and quantitative deposition of the nanoimprint glue droplets according to the specific shape of the nanoimprint template, accurately controlling the amount of nanoimprint glue, improving the accuracy of the nanoimprint replication process, and saving time and cost. Compared with the general uniform glue method, the nanoimprint glue droplets of the present application are more evenly distributed, and avoid the unnecessary waste of imprint glue during the uniform glue method; thus making nanoimprinting more green and accurate. In addition, the present application uses an electric induction system to act on the nanoimprint glue droplets on the substrate material twice to regulate the spreading morphology of the nanoimprint glue in the substrate material and the nanoimprint template cavity, which is conducive to discharging the air between the nanoimprint glue droplets and the nanoimprint template cavity, thereby achieving faster nanoimprint template and nanoimprint glue bonding.

[0012] Optionally, the inkjet imprinting module includes an inkjet printing module and an imprinting module;

[0013] The inkjet printing module is specifically used to deposit nanoimprint glue droplets on the substrate material corresponding to the cavity area of ​​the nanoimprint template;

[0014] The imprint module is specifically used to imprint the nanoimprint template.

[0015] Optionally, the imprint module includes a pressurizing unit and a curing unit;

[0016] The pressurizing unit is specifically used to apply pressure to the nanoimprint template pair;

[0017] The curing unit is specifically used to cure the nanoimprint glue droplets in the cavity of the nanoimprint template.

[0018] Optionally, the direction of the first voltage is from the upper electrode to the lower electrode;

[0019] The direction of the second voltage is from the lower electrode to the upper electrode.

[0020] Optionally, the viscosity of the nanoimprint glue droplets is in the range of 0.1 to 100 centipoise, the content of impurities smaller than 200 nm in the nanoimprint glue droplets does not exceed 1 ppm, the curing time of the nanoimprint glue droplets is less than 60 seconds, the volume of the nanoimprint glue droplets is 1 to 10 picoliters, and the spacing between each nanoimprint glue droplet is 40 to 150 microns.

[0021] Optionally, the voltage value of the external voltage ranges from 0 to 50 volts, the resistivity of the upper electrode and the lower electrode is less than 2 ohms, and the mechanical strength of the lower electrode is greater than 120 MPa.

[0022] In a second aspect, embodiments of the present application provide an inkjet electrically induced nanoimprinting method, applicable to an inkjet electrically induced nanoimprinting device including an electrical induction system and an inkjet imprinting module, comprising:

[0023] The inkjet imprinting module deposits nanoimprint glue droplets on the substrate material corresponding to the cavity area of ​​the nanoimprint template;

[0024] The electric induction system adjusts the external voltage between the upper electrode and the lower electrode to a first voltage so that the nanoimprint glue droplets are evenly spread on the substrate material under the action of the electric field force; the substrate material is located between the upper electrode and the lower electrode, and the upper electrode and the lower electrode are separately provided as a whole electric plate;

[0025] During the process of the inkjet imprinting module imprinting the nanoimprint template, the electrical induction system adjusts the external voltage between the upper electrode and the lower electrode to a second voltage, so that the nanoimprint glue droplets are evenly diffused in the cavity of the nanoimprint template under the action of the electric field force until the nanoimprint template and the nanoimprint glue are adhered; the first voltage and the second voltage are in opposite directions.

[0026] The present application deposits nanoimprint glue droplets on the substrate material corresponding to the cavity interval of the nanoimprint template through an inkjet imprint module, thereby achieving the fixed-point and quantitative deposition of the nanoimprint glue droplets according to the specific shape of the nanoimprint template, accurately controlling the amount of nanoimprint glue, improving the accuracy of the nanoimprint replication process, and saving time and cost. Compared with the general uniform glue method, the nanoimprint glue droplets of the present application are more evenly distributed, and avoid the unnecessary waste of imprint glue during the uniform glue method; thus making nanoimprinting more green and accurate. In addition, the present application uses an electric induction system to act on the nanoimprint glue droplets on the substrate material twice to regulate the spreading morphology of the nanoimprint glue in the substrate material and the nanoimprint template cavity, which is conducive to discharging the air between the nanoimprint glue droplets and the nanoimprint template cavity, thereby achieving faster nanoimprint template and nanoimprint glue bonding.

[0027] Optionally, the inkjet imprinting module includes an inkjet printing module and an imprinting module, and the imprinting module includes a pressurizing unit;

[0028] The inkjet imprinting module deposits nanoimprint glue droplets on a substrate material corresponding to the cavity area of ​​the nanoimprint template, including:

[0029] The inkjet printing module deposits nanoimprint glue droplets on the substrate material corresponding to the cavity area of ​​the nanoimprint template;

[0030] The inkjet imprinting module imprints the nanoimprint template, comprising:

[0031] A pressure is applied to the nanoimprint template by a pressure unit to enhance the adhesion between the nanoimprint template and the nanoimprint glue.

[0032] Optionally, the imprint module further includes a curing unit; after the pressure is applied to the nanoimprint template by the pressurizing unit, the module further includes:

[0033] The nanoimprint glue droplets in the cavities of the nanoimprint template are solidified by the solidification unit.

[0034] Optionally, the functional groups of the nanoimprint glue droplets include a hydrophilic end and a lipophilic end;

[0035] The nanoimprint glue droplets are evenly spread on the substrate material under the action of the electric field force, comprising:

[0036] Under the action of the electric field force of the first voltage, the hydrophilic end of the nanoimprint glue droplet is forced to expand outward on the substrate material;

[0037] The nanoimprint glue droplets are uniformly diffused in the cavities of the nanoimprint template under the action of the electric field force, comprising:

[0038] Under the action of the electric field force of the second voltage, the hydrophilic end of the nanoimprint glue droplet is forced to aggregate into the cavity of the nanoimprint template. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0040] Figure 1 A schematic diagram of the molecular structure of an embossing glue droplet provided in an embodiment of the present invention;

[0041] Figure 2 A schematic flow chart of an inkjet electrically induced imprinting method provided by an embodiment of the present invention;

[0042] Figure 3 A schematic diagram of an embossing adhesive droplet on a substrate material provided by an embodiment of the present invention;

[0043] Figure 4 A schematic diagram of the diameter of an embossing glue droplet provided by an embodiment of the present invention;

[0044] Figure 5 A schematic diagram of an embossing adhesive droplet on a substrate material provided by an embodiment of the present invention;

[0045] Figure 6 A schematic diagram of different droplet spacings of an embossing adhesive droplet provided by an embodiment of the present invention;

[0046] Figure 7 A schematic flow chart of an inkjet electrically induced imprinting method provided by an embodiment of the present invention;

[0047] Figure 8 A schematic structural diagram of an inkjet electrically induced imprinting device provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0048] To make the objectives, technical solutions, and advantages of the present invention more apparent, the present invention will be further described in detail below with reference to the accompanying drawings. It is apparent that the embodiments described are only some, not all, of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort are intended to fall within the scope of protection of the present invention.

[0049] First, let’s further explain the nouns mentioned in this application:

[0050] Functionality: In a condensation reaction, the number of functional groups in a molecule that can participate in the reaction is called functionality. The functionality of a monomer is the number of functional groups that participate in the reaction when a monomer molecule undergoes a condensation reaction, which is the number of monomer functional groups that actually react in the reaction system.

[0051] Nanoimprinting is an effective technique for replicating nanoscale structural features, with enormous potential in various fields, such as electronics, photonics, semiconductors, and biological applications. Nanoimprinting involves depositing a low-viscosity imprinting adhesive onto a substrate and lowering a patterned template into the imprinting adhesive fluid. The imprinting adhesive fluid then rapidly fills the template pattern through capillary action. Finally, the imprinting adhesive fluid is crosslinked and cured under ultraviolet (UV) radiation, and the template is removed, leaving a patterned imprinting adhesive on the substrate.

[0052] Compared to photolithography, nanoimprinting offers higher resolution and can replicate template patterns over larger areas and faster. However, evenly distributing the imprinting adhesive on the substrate inevitably results in wasted adhesive due to centrifugal force. Post-processing of this wasted adhesive also leads to energy consumption and environmental pollution. Furthermore, because the centrifugal force applied to the substrate surface varies, uneven adhesive thickness can easily occur, affecting the final imprint accuracy.

[0053] A good solution is to use the on-demand inkjet method. In this application, on-demand inkjet refers to the deposition of imprint glue at fixed points and in fixed quantities on the substrate according to the shape of the template. This can not only ensure uniform glue thickness, but also solve the problems of material waste and energy consumption. However, on-demand inkjet often requires that the imprint glue droplets are small and can be evenly distributed on the local part of the substrate, but small droplets often have local distribution mismatch on the substrate due to the influence of surface tension, which seriously affects the pattern replication process of nanoimprinting. Therefore, it is necessary to evenly spread small droplets evenly on the substrate. Therefore, we propose an inkjet-type electrically induced nanoimprinting method to assist the diffusion of nanoimprint glue droplets.

[0054] Since nanoimprint glue is made of organic molecules, it contains a variety of groups, and the sensitivity of various groups to the electric field is different. Therefore, the voltage can be adjusted according to the structural characteristics of the imprint glue to achieve spreading. Figure 1 The nanoimprint adhesive droplets shown include oleophilic and hydrophilic ends. The hydrophilic end is also called a hydrophilic group, which usually includes carboxylic acid, sulfonic acid, phosphoric acid, hydroxyl, amino, quaternary ammonium, and block polyether. The oleophilic end is also called a hydrophobic group, which usually includes a carbon chain or a hydrocarbon group containing aromatic, ester, ether, amine, or amide groups. Some nanoimprint adhesive droplets also include UV-active groups such as unsaturated polyesters, acrylates, epoxy acrylates, polyurethane acrylates, polyester acrylates, and vinyl ethers.

[0055] like Figure 2 As shown, an inkjet electrically induced nanoimprinting method provided in an embodiment of the present application specifically includes the following steps:

[0056] Step S201: The inkjet imprinting module deposits imprinting glue droplets on the substrate material corresponding to the cavity area of ​​the imprinting template;

[0057] Specifically, the imprint template is divided into cavity areas and non-cavity areas. Due to the different structures of the cavity areas of different imprint templates, each imprint template will have cavity areas of different sizes and shapes. The inkjet imprint module deposits droplets of nanoimprint glue on the substrate material according to the shape and size of the cavity area of ​​each imprint template. The nanoimprint glue droplets deposited at the corresponding positions of each cavity area should be evenly distributed, that is, the corresponding nanoimprint glue droplets in the same cavity area are equidistant. The amount of nanoimprint glue deposited on the substrate material corresponding to different cavity areas of the same imprint template is different.

[0058] In step S202, the electrical induction system adjusts the external voltage between the upper electrode and the lower electrode to a first voltage, so that the imprinting glue droplet is evenly spread on the substrate material under the action of the electric field force; the substrate material is located between the upper electrode and the lower electrode, and the upper electrode and the lower electrode are separately provided as a whole electrode plate;

[0059] Specifically, after the inkjet imprinting module drops imprinting glue droplets on the substrate material according to a certain droplet spacing, the electrical induction system energizes the upper electrode above the imprinting glue droplets and the lower electrode below the substrate material, and the external voltage between the upper electrode and the lower electrode is recorded as the first voltage.

[0060] Due to the molecular characteristics of the embossing glue droplets, the embossing glue droplets will spread evenly on the substrate material under the action of the electric field force generated by the first voltage. Figure 3 As shown, the embossed adhesive droplet changes from the shape in the left figure to the spread state in the right figure under the action of the electric field force generated by the first voltage, that is, the embossed adhesive droplet is affected by the electric field force in the direction pointed by the arrow. The magnitude of the first voltage can be adjusted according to the structural characteristics of the nanoimprint adhesive.

[0061] like Figure 4 As shown, a real-object microscope optical photograph of an embossed adhesive droplet provided by the present application spreading under the action of the electric field force generated by a first voltage, that is, the embossed adhesive droplet is affected by the electric field force in the direction indicated by the arrow, wherein Figure a shows that the diameter of the embossed adhesive droplet under non-electrical induction is 10 μm; Figure b shows that the diameter of the embossed adhesive droplet under electrical induction is 45 μm.

[0062] In some possible embodiments, the voltage value of the external voltage between the upper electrode and the lower electrode ranges from 0 to 50 V. In the implementation process of the present application, since the properties of the nanoimprint adhesive used in each imprinting process are different, the external voltage can be adjusted according to the structural characteristics of the nanoimprint adhesive.

[0063] The resistivity of the upper and lower electrodes is less than 2 ohms. The mechanical strength of the lower electrode is greater than 120 MPa. Both the upper and lower electrodes can be made of metal-deposited PET thin films or epoxy resin + PEDOT.

[0064] In step S203, during the process of the inkjet imprinting module imprinting the imprint template, the electric induction system adjusts the external voltage between the upper electrode and the lower electrode to a second voltage, so that the imprinting glue droplets are evenly diffused in the cavity of the imprinting template under the action of the electric field force until the imprinting template and the nanoimprinting glue are bonded; the first voltage and the second voltage are in opposite directions.

[0065] Specifically, the inkjet imprinting module places the imprinting template on the corresponding position of the substrate material, and the imprinting glue droplets on the substrate material will enter the corresponding cavity on the imprinting template. Since there is air between the cavity and the imprinting glue droplets, the electric induction system energizes the upper electrode above the imprinting glue droplets and the lower electrode below the substrate material. The external voltage between the upper electrode and the lower electrode is recorded as the second voltage.

[0066] Due to the molecular characteristics of the imprint glue droplets, the imprint glue droplets will polymerize on the substrate material under the action of the electric field force generated by the second voltage, quickly achieving the bonding of each cavity of the imprint template with the nanoimprint glue. Figure 5 As shown, the embossed glue droplet changes from the shape in the left figure to the aggregated state in the right figure under the action of the electric field force generated by the second voltage, that is, the embossed glue droplet is affected by the electric field force in the direction pointed by the arrow. Figure 3 As shown, since the first voltage and the second voltage have opposite directions, the motion states of the embossed adhesive droplets under the action of the electric field forces of the first voltage and the second voltage are also opposite. The magnitudes of the first voltage and the second voltage can be adjusted according to the structural characteristics of the embossed adhesive.

[0067] The present application uses an inkjet imprinting module to deposit imprinting glue droplets on a substrate material corresponding to the cavity area of ​​the imprinting template, thereby achieving fixed-point and quantitative deposition of imprinting glue droplets according to the specific shape of the imprinting template, accurately controlling the amount of imprinting glue used, improving the accuracy of the nanoimprint replication process, and saving time and costs.

[0068] Compared to conventional sizing methods, the present invention achieves a more uniform distribution of embossing adhesive droplets and avoids unnecessary waste of embossing adhesive during sizing, making nanoimprinting more environmentally friendly and precise. Furthermore, the present invention employs an electrical induction system to act twice on the embossing adhesive droplets on the substrate material to regulate the spreading of the embossing adhesive within the substrate material and the embossing template cavity, facilitating the expulsion of air between the embossing adhesive droplets and the embossing template cavity, thereby achieving faster bonding between the embossing template and the embossing adhesive liquid.

[0069] In a possible embodiment of the present application, the inkjet imprinting module includes an inkjet printing module and an imprinting module, and the imprinting module includes a pressurizing unit; the inkjet imprinting module deposits imprinting glue droplets on a substrate material corresponding to the cavity interval of the imprinting template, including: the inkjet printing module deposits imprinting glue droplets on the substrate material corresponding to the cavity interval of the imprinting template; the inkjet imprinting module imprints the imprinting template, including: applying pressure to the imprinting template through the pressurizing unit to enhance the fit between the imprinting template and the imprinting glue.

[0070] Specifically, the inkjet imprinting module includes an inkjet printing module and an imprinting module. The inkjet printing module deposits droplets of imprinting adhesive onto the substrate material corresponding to the shape and size of each cavity of the imprinting template. The droplets of imprinting adhesive deposited at the corresponding positions of each cavity should be evenly distributed, that is, the corresponding droplets of imprinting adhesive in the same cavity should be equidistant. The amount of imprinting adhesive deposited on the substrate material corresponding to different cavity intervals of the same imprinting template varies. In addition, the imprinting module includes a pressurizing unit that applies pressure to the imprinting template to enhance the adhesion between the imprinting template and the imprinting adhesive.

[0071] The present application uses an inkjet printing module to deposit embossing glue droplets on a substrate material corresponding to the cavity area of ​​the embossing template, thereby achieving point-to-point and quantitative deposition of the embossing glue droplets according to the specific shape of the embossing template, accurately controlling the amount of embossing glue used, improving the accuracy of the nanoimprint replication process, and saving time and costs.

[0072] The imprint module further includes a curing unit; after the pressure is applied to the imprint template by the pressurizing unit, the imprinting module further includes: curing the imprint glue droplets in the cavity of the imprint template by the curing unit.

[0073] Specifically, the curing unit may be an ultraviolet radiation (UV) device, which solidifies the embossing glue droplets in the cavity of the embossing template, so that the embossing glue forms a stable structure that fits the embossing template.

[0074] The functional groups of the embossed adhesive droplets include a hydrophilic end and a lipophilic end; the embossed adhesive droplets are evenly spread on the substrate material under the action of the electric field force, including: under the action of the electric field force of the first voltage, the hydrophilic end of the embossed adhesive droplets are forced to expand outward on the substrate material; the embossed adhesive droplets are evenly diffused in the cavity of the embossed template under the action of the electric field force, including: under the action of the electric field force of the second voltage, the hydrophilic end of the embossed adhesive droplets are forced to aggregate into the cavity of the embossed template.

[0075] Specifically, due to the molecular characteristics of the imprinted glue droplet, e.g. Figure 1The functional groups of the embossed adhesive droplet shown include a hydrophilic end and an oleophilic end. Under the action of the electric field force generated by the first voltage, the embossed adhesive droplet will spread evenly on the substrate material. Figure 3 As shown, the hydrophilic end of the embossed adhesive droplet is affected by the electric field force generated by the first voltage. That is, the hydrophilic end of the embossed adhesive droplet is affected by the electric field force in the direction indicated by the arrow, and will change from the shape in the left figure to the spread state in the right figure. The magnitude of the first voltage can be adjusted according to the structural characteristics of the embossed adhesive. Figure 4 As shown, a real-object microscope optical photograph of a stamped rubber droplet provided by the present application spreading under the action of the electric field force generated by a first voltage, that is, the hydrophilic end of the stamped rubber droplet is affected by the electric field force in the direction indicated by the arrow, wherein Figure a shows that the diameter of the stamped rubber droplet under non-electrical induction is 10 μm; Figure b shows that the diameter of the stamped rubber droplet under electrical induction is 45 μm.

[0076] Due to the molecular characteristics of the embossing glue droplets, the hydrophilic end of the embossing glue droplets is forced to aggregate into the cavity of the embossing template under the action of the electric field force generated by the second voltage, and each cavity of the embossing template is quickly fitted with the embossing glue. Figure 5 As shown, the hydrophilic end of the embossed glue droplet changes from the shape in the left figure to the aggregated state in the right figure under the action of the electric field force generated by the second voltage, that is, the embossed glue droplet is affected by the electric field force in the direction pointed by the arrow.

[0077] The viscosity of the embossing adhesive droplet ranges from 0.1 to 100 centipoise; the content of impurities smaller than 200 nm in the embossing adhesive droplet does not exceed 1 ppm; and the curing time of the embossing adhesive droplet is less than 60 seconds.

[0078] Specifically, in the best implementation of this application, it is necessary to select a embossed adhesive with a viscosity range of 0.1 to 100 centipoise; the impurity content of less than 200nm in the embossed adhesive droplet does not exceed 1ppm; and the curing time of the embossed adhesive droplet is less than 60 seconds. In the viscosity range of 0.1 to 100 centipoise, it can be divided into three intervals, namely high viscosity, medium viscosity and low viscosity. Among them, high viscosity, medium viscosity and low viscosity correspond to the contact angle properties, surface energy properties, functional group degree and softness of the colloid and the surface of the substrate material. Detailed values ​​are shown in Table 1 below:

[0079] Table 1

[0080]

[0081]

[0082] Among them, high-viscosity adhesives are mainly composed of acrylate groups, have low fluorine-containing surface energy, and are mainly used as templates; medium-viscosity adhesives are mainly composed of acrylate groups, have low silicon-containing surface energy, and are mainly used for imprint etching transfer; low-viscosity adhesives are mainly composed of vinyl ether and epoxy, and are mainly used for cationic curing.

[0083] In the implementation of the present application, the volume of the embossing glue droplet is 1 to 10 picoliters, and the spacing between each embossing glue droplet is 40 to 150 microns. Figure 6 1 and 2 are optical microscope photographs of the embossed adhesive droplets provided in an embodiment of the present application. The distances between the embossed adhesive droplets in the optical photographs from left to right are 200 μm, 120 μm, and 100 μm, respectively.

[0084] like Figure 7 FIG2 is a flow chart of an inkjet electric-induced nanoimprinting method according to an embodiment of the present invention. The flow chart is executed by an electric-induced system and an inkjet imprinting module, wherein the electric-induced system includes an upper electrode, a lower electrode, and a voltage control system; the inkjet imprinting module includes an inkjet printing module and an imprinting module, and the imprinting module includes a pressurizing unit and a curing unit, wherein the curing unit is an ultraviolet radiation system including:

[0085] Step S701: The inkjet printing module deposits embossing glue droplets on the substrate material corresponding to the cavity area of ​​the embossing template;

[0086] Step S702: The voltage control system adjusts the external voltage between the upper electrode and the lower electrode to a first voltage so that the imprinting glue droplet is evenly spread on the substrate material under the action of the electric field force.

[0087] Step S703: The voltage control system adjusts the external voltage between the upper electrode and the lower electrode to a second voltage, so that the embossing glue droplets are evenly diffused in the cavity of the embossing template under the action of the electric field force, and the pressurizing unit applies pressure to the embossing template to enhance the adhesion between the embossing template and the embossing glue;

[0088] Step S704 : solidifying the embossing glue droplets in the cavities of the embossing template through an ultraviolet radiation system.

[0089] Step S705: removing the imprint template.

[0090] The application realizes the deposition of the imprinting glue droplets according to the specific shape of the imprinting template, accurately controls the amount of the imprinting glue, improves the precision in the nano-imprint replication process, and saves time and cost. Compared with the general uniform coating method, the imprinting glue droplets are more uniformly distributed, and unnecessary waste of the imprinting glue is avoided; so that the nano-imprint is more green and accurate. In addition, the electric induction system in the application acts on the imprinting glue droplets on the substrate material twice to regulate the spreading shape of the imprinting glue in the substrate material and the cavity of the imprinting template, which is beneficial to expel the air between the imprinting glue droplets and the cavity of the imprinting template, so as to realize the lamination of the imprinting template and the imprinting glue liquid.

[0091] As shown in Figure 8 The embodiment of the application provides an inkjet electric induction nano-imprint equipment 800, which comprises an electric induction system 801 and an inkjet imprinting module 802.

[0092] The electric induction system 801 comprises an upper electrode 803 and a lower electrode 804, an external voltage is arranged between the upper electrode 803 and the lower electrode 804, and the lower electrode is used for bearing a substrate material 805; the upper electrode 803 and the lower electrode 804 are separately arranged integral electrode plates.

[0093] The inkjet imprinting module 802 is used for depositing the imprinting glue droplets on the substrate material 805 corresponding to the cavity interval of the imprinting template 806.

[0094] The electric induction system 801 is used for adjusting the external voltage to be a first voltage, so that the imprinting glue droplets are uniformly spread on the substrate material 805 under the action of the electric field force; and the substrate material 805 is located between the upper electrode 803 and the lower electrode 804.

[0095] The inkjet imprinting module 802 is also used for imprinting the imprinting template 806.

[0096] The electric induction system 801 is also used for adjusting the external voltage to be a second voltage during the imprinting process, so that the imprinting glue droplets are uniformly diffused in the cavity of the imprinting template 806 under the action of the electric field force, until the imprinting template 806 is laminated with the imprinting glue liquid; the voltage directions of the first voltage and the second voltage are opposite.

[0097] The inkjet imprinting module 802 comprises an inkjet printing module 807 and an imprinting module 808; the imprinting module 808 comprises a pressurizing unit 809 and a solidifying unit 810.

[0098] The inkjet printing module 807 is specifically used for depositing the imprinting glue droplets on the substrate material 805 corresponding to the cavity interval of the imprinting template.

[0099] The pressing unit 809 is specifically used to emboss the embossing template 806;

[0100] The curing unit 810 is used to cure the embossing glue droplets in the cavities of the embossing template 806 .

[0101] This application uses an inkjet imprinting module to deposit the imprint glue droplets on the substrate material corresponding to the cavity area of ​​the imprint template, thereby achieving the fixed-point and quantitative deposition of the imprint glue droplets according to the specific shape of the imprint template, accurately controlling the amount of imprint glue used, improving the accuracy of the nanoimprint replication process, and saving time and cost. Compared with the general leveling method, the imprint glue droplets of this application are more evenly distributed, and avoid the unnecessary waste of imprint glue during the leveling method; thus making nanoimprinting more green and accurate. In addition, in this application, an electric induction system is used to act on the imprint glue droplets on the substrate material twice to regulate the spreading morphology of the imprint glue in the substrate material and the imprint template cavity, which is conducive to the discharge of air between the imprint glue droplets and the imprint template cavity, thereby achieving faster imprint template and imprint glue bonding.

[0102] Obviously, those skilled in the art may make various changes and modifications to this application without departing from the spirit and scope of this application. Thus, if these modifications and variations of this application fall within the scope of the claims of this application and their equivalents, this application is intended to include these modifications and variations.

Claims

1. An inkjet electric induction imprinting device, characterized in that: include: Electrical induction system and inkjet imprinting module; The electrical induction system includes an upper electrode and a lower electrode, an external voltage is provided between the upper electrode and the lower electrode, and the lower electrode is used to support the substrate material; The inkjet imprinting module is used to deposit imprinting glue droplets on the substrate material corresponding to the cavity area of ​​the imprinting template; The electric induction system is used to adjust the external voltage to a first voltage so that the embossing glue droplet spreads on the substrate material under the action of the electric field force, wherein the substrate material is located between the upper electrode and the lower electrode; The electric induction system is further used to adjust the external voltage to a second voltage during the imprinting process, so that the imprinting glue droplets diffuse in the cavity of the imprinting template under the action of the electric field force until the imprinting template and the imprinting glue are adhered, wherein the voltage directions of the first voltage and the second voltage are opposite.

2. The device according to claim 1, wherein The inkjet imprinting module includes an inkjet printing module and an imprinting module; The inkjet printing module is specifically used to deposit embossing glue droplets on the substrate material corresponding to the cavity area of ​​the embossing template; The imprinting module is used to imprint the imprinting template.

3. The device according to claim 2, characterized in that The imprint module includes a pressurizing unit and a curing unit; The pressurizing unit is specifically used to apply pressure to the imprint template pair; The curing unit is specifically used to cure the embossing glue droplets in the cavity of the embossing template.

4. The device according to claim 1, wherein The direction of the first voltage is from the upper electrode to the lower electrode; The direction of the second voltage is from the lower electrode to the upper electrode.

5. The device according to claim 1, wherein The viscosity of the embossing glue droplet is in the range of 0.1 to 100 centipoise, and the content of impurities smaller than 200 nm in the embossing glue droplet is less than or equal to 1 ppm.

6. The device according to claim 4, characterized in that The resistivity of the upper electrode and the lower electrode is less than or equal to 2 ohms.

7. An inkjet electric induction imprinting method, characterized in that: Applicable to inkjet electro-induction imprinting equipment including an electro-induction system and an inkjet imprinting module, including: The inkjet imprinting module deposits imprinting glue droplets on the substrate material corresponding to the cavity area of ​​the imprinting template; The electric induction system adjusts the external voltage between the upper electrode and the lower electrode to a first voltage so that the embossing glue droplet spreads on the substrate material under the action of the electric field force; the substrate material is located between the upper electrode and the lower electrode; During the process of the inkjet imprinting module imprinting the imprinting template, the electric induction system adjusts the external voltage between the upper electrode and the lower electrode to a second voltage, so that the imprinting glue droplets diffuse in the cavity of the imprinting template under the action of the electric field force until the imprinting template and the imprinting glue are in contact with each other; the first voltage and the second voltage have opposite voltage directions.

8. The method according to claim 7, wherein The inkjet imprinting module includes an inkjet printing module and an imprinting module, and the imprinting module includes a pressurizing unit; The inkjet imprinting module deposits imprinting glue droplets on the substrate material corresponding to the cavity area of ​​the imprinting template, including: The inkjet printing module deposits embossing glue droplets on the substrate material corresponding to the cavity area of ​​the embossing template; The inkjet imprinting module imprints the imprinting template, comprising: The pressure is applied to the embossing template by a pressure unit to enhance the adhesion between the embossing template and the embossing glue.

9. The method according to claim 8, wherein The imprint module further includes a curing unit; after the pressure is applied to the imprint template by the pressurizing unit, the imprint module further includes: The embossing glue droplets in the cavity of the embossing template are solidified by the solidification unit.

10. The method according to claim 9, wherein The functional groups of the embossed glue droplet include a hydrophilic end and an oleophilic end; The embossing glue droplets are evenly spread on the substrate material under the action of the electric field force, comprising: Under the action of the electric field force of the first voltage, the hydrophilic end of the embossing glue droplet is forced to expand outward on the substrate material; The embossing glue droplets are uniformly diffused in the cavity of the embossing template under the action of the electric field force, comprising: Under the action of the electric field force of the second voltage, the hydrophilic end of the embossing glue droplet is forced to aggregate into the cavity of the embossing template.

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