Die bonder bonding head perpendicularity adjusting device

Abstract

The invention relates to the technical field of semiconductors, in particular to a die bonder bonding head perpendicularity adjusting device which comprises a first adjusting piece. The second adjusting piece is arranged at the bottom of the first adjusting piece along the first direction and is used for fixing the bonding head; the first adjusting piece is adjustably connected with the second adjusting piece through the multiple sets of fine adjustment assemblies in the first direction, the fine adjustment assemblies are in threaded connection with the first adjusting piece, the fine adjustment assemblies are detachably connected with the second adjusting piece, and the fine adjustment assemblies are screwed relative to the first adjusting piece so as to adjust the distance and angle between the second adjusting piece and the first adjusting piece. According to the fine adjustment assembly, the first adjusting piece is screwed in a threaded mode so as to adjust the distance between the second adjusting piece around the first adjusting piece and the first adjusting piece, the multiple fine adjustment assemblies are matched so as to control the second adjusting piece to generate angle and / or distance changes relative to the first adjusting piece, and the perpendicularity of the binding head fixed to the second adjusting piece is adjusted; and the precision and the stability of chip mounting operation are improved.

Description

Technical Field

[0001] The invention relates to the field of semiconductor technology, and in particular to a device for adjusting the verticality of a bonding head of a die bonding machine. Background Art

[0002] In the field of modern electronic manufacturing, the die bonding process is a crucial technical link, and its accuracy is directly related to the performance and reliability of electronic products. In the die bonding process, the die bonding head, as a key component of the equipment, plays the role of accurately bonding the chip to the specified position of the substrate. The movement accuracy and stability of the die bonding head are crucial to ensure the die bonding accuracy, and the verticality of the die bonding head is also a technical parameter that cannot be ignored. The verticality of the die bonding head specifically refers to the vertical relationship between the die bonding head in the XY motion plane and the die bonding head rotating rod.

[0003] Large verticality errors of the bonding head will affect the position accuracy of the chip. During the bonding process, the bonding head needs to be accurately moved to the specified position and place the chip on the substrate pad. If there is a deviation in the verticality of the bonding head, the actual bonding position of the chip will be offset from the expected position, resulting in poor electrical connection between the chip and the substrate, and even causing serious problems such as short circuits. This will not only reduce the yield of the product, but also increase the cost of rework and scrapping.

[0004] Large verticality errors of the bonding head will also affect the angle accuracy of the chip. The bonding head rotating rod is responsible for adjusting the chip mounting angle to ensure that the chip is accurately aligned with the substrate. If there is a deviation in the verticality of the bonding head, the rotating rod will produce additional tilt or twist when adjusting the chip angle, resulting in an inaccurate chip mounting angle. This will also reduce the yield and reliability of the product, and may even cause the entire product to fail. Summary of the invention

[0005] The purpose of the present invention is to provide a device for adjusting the verticality of a die bonding machine bond head, so as to solve the problem in the prior art that the large verticality error of the bond head leads to low chip placement accuracy.

[0006] The technical solution of the present invention is: a device for adjusting the verticality of a bonding head of a die bonder, comprising: a first adjusting piece; a second adjusting piece, arranged at the bottom of the first adjusting piece along a first direction, for fixing the bonding head; a fine-tuning assembly, wherein the first adjusting piece is adjustably connected to the second adjusting piece along the first direction through a plurality of groups of the fine-tuning assemblies, the fine-tuning assembly is threadedly connected to the first adjusting piece, the fine-tuning assembly is detachably connected to the second adjusting piece, and the fine-tuning assembly is screwed relative to the first adjusting piece to adjust the spacing and angle between the second adjusting piece and the first adjusting piece.

[0007] Preferably, the first adjusting member is provided with a first threaded hole, the second adjusting member is provided with a second threaded hole, and the first threaded hole and the second threaded hole are coaxial along the first direction; the fine-tuning assembly includes a calibration member and a fastening bolt, the calibration member is threadedly connected in the first threaded hole, the fastening bolt portion is movably inserted in the calibration member, and the fastening bolt portion is threadedly connected to the first threaded hole.

[0008] Preferably, the calibration piece is provided with a guide hole, and the fastening bolt includes a fastening head and a fastening screw, the fastening screw is slidably inserted into the guide hole, the diameter of the fastening screw is smaller than the diameter of the guide hole, the fastening screw is threadedly connected to the second threaded hole, and the bottom surface of the fastening head abuts against the top surface of the calibration piece.

[0009] Preferably, the calibration member comprises a threaded section and a screw-on section, the threaded section is threadedly connected to the first threaded hole, the screw-on section is fixed to one end of the threaded section away from the second adjustment member, and the screw-on section is located outside the first adjustment member.

[0010] Preferably, the calibration part also includes an upper curved surface segment and a lower curved surface segment, the upper curved surface segment, the screw-on segment, the threaded segment and the lower curved surface segment are fixedly connected in sequence, the top end surface of the upper curved surface segment and the bottom end surface of the lower curved surface segment are both arc surfaces; a first gasket is provided between the calibration part and the fastening head, and a second gasket is provided between the calibration part and the second adjustment part, the fitting surface between the first gasket and the upper curved surface segment is an arc surface, and the fitting surface between the second gasket and the lower curved surface segment is an arc surface.

[0011] Preferably, the fine-tuning components are in three groups, and the three groups of fine-tuning components are distributed in a triangular shape in a plane perpendicular to the first direction.

[0012] Preferably, the verticality adjustment device of the bonding head of the die bonder is provided with a stabilizing component for single-point fixing of the first adjustment member and the second adjustment member, the stabilizing component and the two groups of the fine-tuning components are distributed in a right triangle, and the stabilizing component is located at the foot of the vertical point.

[0013] Preferably, the stabilizing component includes a positioning bolt, a first fixing member and a second fixing member, the first fixing member, the first adjusting member and the second fixing member have a first channel internally constructed, the positioning bolt is movably inserted in the first channel, the diameter of the first channel is larger than the diameter of the positioning bolt, and the end of the positioning bolt is threadedly connected to the second adjusting member.

[0014] Preferably, the positioning bolt is movably sleeved with a third gasket and a fourth gasket, the third gasket is located between the positioning bolt and the first fixing member, the lower end surface of the third gasket and the upper end surface of the first fixing member are both arc surfaces, the fourth gasket is located between the second fixing member and the second adjusting member, the upper end surface of the fourth gasket and the lower end surface of the second fixing member are both arc surfaces.

[0015] Preferably, the first gasket and the third gasket are located in the same plane, and the second gasket and the fourth gasket are located in the same plane.

[0016] Compared with the prior art, the advantages of the present invention are:

[0017] (1) Multiple groups of fine-tuning components cooperate to adjust the positional relationship of the second adjustment member relative to the first adjustment member. The fine-tuning components are screwed together with the first adjustment member to adjust the spacing of the second adjustment member around the first adjustment member relative to the first adjustment member. Multiple groups of fine-tuning components cooperate to control the angle and / or spacing changes of the second adjustment member relative to the first adjustment member, thereby adjusting the verticality of the header fixed on the second adjustment member to ensure that the verticality error of the header is within the allowable range, thereby improving the accuracy and stability of the patch operation, improving the product qualification rate, and reducing the cost of rework and scrapping, thereby improving the overall economic benefits.

[0018] (2) The fastening screw is slidably inserted into the guide hole. The diameter of the fastening bolt is smaller than the diameter of the guide hole, so as to allow the fastening screw to have a certain inclination angle in the guide hole. When it is necessary to fine-tune the second adjusting member, the fastening bolt can be rotated to tilt it in the guide hole, thereby achieving fine adjustment of the position of the second adjusting member. Compared with direct deformation of the bolt, this inclination adjustment method has higher adjustment accuracy and stability.

[0019] (3) The top and bottom end surfaces of the upper curved surface segment and the lower curved surface segment are both arc surfaces, which can effectively disperse the stress during tightening. When the fastening bolts are tightened, the pressure generated will gradually disperse to other parts of the calibration component along the arc surface instead of concentrating on a certain point or area. This helps to reduce stress concentration and reduce the risk of component damage. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The present invention will be further described below in conjunction with the accompanying drawings and embodiments:

[0021] Figure 1 It is a structural schematic diagram of a device for adjusting the verticality of a bonding head of a die bonding machine according to the present invention;

[0022] Figure 2 It is a cross-sectional schematic diagram of a device for adjusting the verticality of a bonding head of a die bonding machine according to the present invention;

[0023] Figure 3It is a partial exploded schematic diagram of the cross-sectional structure of a device for adjusting the verticality of a die bonding machine bonding head according to the present invention;

[0024] Figure 4 It is a schematic diagram of the exploded structure of the fine-tuning assembly of the present invention;

[0025] Figure 5 This is a schematic diagram of the structure of Embodiment 2 of the present invention;

[0026] Figure 6 It is a partial exploded schematic diagram of the cross-sectional structure of Example 2 of the present invention;

[0027] Figure 7 It is a cross-sectional structural schematic diagram of Embodiment 2 of the present invention;

[0028] Figure 8 It is a schematic exploded view of the stabilizing assembly of the present invention.

[0029] Description of reference numerals:

[0030] 1. First adjusting member; 11. First threaded hole; 12. First positioning hole; 13. First positioning slot; 14. Third positioning slot; 15. Adjusting slot; 16. Adjusting bolt; 2. Second adjusting member; 21. Second threaded hole; 22. Accommodating slot; 23. Second positioning hole; 24. Second positioning slot; 3. Fine-tuning assembly; 31. Calibration member; 311. Threaded section; 312. Screw-on section; 313. Guide hole; 314. Upper curved section; 315. Lower curved section; 32. Fastening bolt; 321. Fastening head; 322. Fastening screw; 33. First gasket; 34. Second gasket; 4. Stabilizing assembly; 41. Positioning bolt; 411. Positioning head; 412. Positioning screw; 42. First fixing member; 43. Second fixing member; 44. First channel; 45. Second channel; 46. Third gasket; 47. Fourth gasket. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the specific embodiments of the present invention and the corresponding drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0032] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0033] like Figure 1 and Figure 2 As shown, a device for adjusting the verticality of a die bonder head is used for fine-tuning the verticality of the head to ensure that the verticality of the head is within an error range, and includes a first adjustment member 1, a second adjustment member 2 and a fine-tuning assembly 3. The first adjustment member 1 and the second adjustment member 2 are arranged along a first direction, and the second adjustment member 2 is used to fix the head. The first adjustment member 1 is adjustably connected to the second adjustment member through the fine-tuning assembly 3 to adjust the position of the second adjustment member relative to the first adjustment member 1, thereby controlling the verticality of the head. The fine-tuning assembly 3 is threadedly connected to the first adjustment member 1, and the fine-tuning assembly 3 is detachably connected to the second adjustment member 2. The fine-tuning assembly 3 rotates relative to the first adjustment member 1, and the fine-tuning assembly 3 forces the second adjustment member 2 to approach or move away from the first adjustment member 1 in the fine-tuning assembly 3 to adjust the spacing and angle between the second adjustment member 2 and the first adjustment member 1 around the fine-tuning assembly 3.

[0034] It is worth noting that the first direction refers to a specific spatial direction, which determines the relative position or arrangement of the first adjustment member 1 and the second adjustment member 2 in space, so as to clarify and specify the layout or configuration of the two adjustment members in space. The first direction is a direction in a three-dimensional space, which can be horizontal, vertical or inclined, depending on the actual application scenario and needs. In this embodiment, the first direction is specifically a vertical direction.

[0035] The second adjusting part 2 is located at the bottom of the first adjusting part 1. Both the first adjusting part 1 and the second adjusting part 2 are plate-like structures. The first adjusting part 1 is fixed on the gantry platform, that is, the fixed part of the first adjusting part 1. The second adjusting part 2 is fine-tuned with the first adjusting part 1 through the fine-tuning component 3. The second adjusting part 2 is fixed to the band head. When the second adjusting part 2 is adjusted relative to the first adjusting part 1, the rotation or translation of the band head can be adjusted.

[0036] like Figure 3 As shown, the first adjusting member 1 is provided with a plurality of first threaded holes 11, and the plurality of first threaded holes 11 are all through holes along the first direction. The fine-tuning assembly 3 includes a calibration member 31, and the calibration member 31 is threadedly connected to the first threaded hole 11. Specifically, the calibration member 31 is screwed into the first threaded hole 11 from the end face of the first adjusting member 1 facing away from the second adjusting member 2. The length of the calibration member 31 is greater than the thickness of the first adjusting member 1, so that after the calibration member 31 is screwed into the first threaded hole 11, the calibration member 31 can extend out of the first adjusting member 1 and abut against the second adjusting member 2, and the calibration member 31 forces the second adjusting member 2 to be relatively displaced or even deformed relative to the first adjusting member 1.

[0037] like Figure 3 and Figure 4As shown, the calibration member 31 includes a threaded section 311 and a screwing section 312. The threaded section 311 is screwed with the first threaded hole 11. The screwing section 312 is fixed to one end of the threaded section 311 away from the second adjustment member 2. The screwing section 312 is located outside the first adjustment member 1. The operator controls the feed amount of the threaded section 311 by rotating the screwing section 312. In this embodiment, the outer circumference of the screwing section 312 is hexagonal, so that the operator can use a tool such as a wrench or pliers to clamp the screwing section 312 to drive the calibration member 31 to rotate as a whole. In other embodiments, the outer circumference of the screwing section 312 can be set to a butterfly-shaped protrusion, and the operator can rotate it manually without using tools.

[0038] Preferably, the thread of the threaded segment 311 is M10×0.5, that is, the diameter of the threaded segment 311 is 10mm, the pitch of the threaded segment 311 is 0.5mm, and the calibration piece 31 can rotate 500um for each rotation of the calibration piece 31. For example, an inclinometer or a rotation angle measuring instrument is used to control the rotation angle of the calibration piece 31, thereby controlling the feeding accuracy of the calibration piece 31, so that the feeding accuracy of the calibration piece 31 can reach an accuracy of less than 10um. While ensuring the adjustment accuracy, the method for adjusting the verticality of the bungee is simple and easy to operate.

[0039] The calibration piece 31 is movably connected with a fastening bolt 32. Specifically, the calibration piece 31 is provided with a guide hole 313, which is a through hole along the length direction of the calibration piece 31. The central axis of the guide hole 313 is coaxial with the rotational central axis of the calibration piece 31. The inner wall of the guide hole 313 is a smooth curved surface, and the fastening bolt 32 is slidably connected to the guide hole 313.

[0040] The second adjusting member 2 is provided with a second threaded hole 21, the rotation center axis of the second threaded hole 21 is coaxial with the rotation center axis of the calibration member 31. In this embodiment, the second threaded hole 21 is a threaded through hole along the first direction. The fastening bolt 32 is threadedly connected to the calibration member 31 after being slidably connected to the second threaded hole 21.

[0041] Specifically, the fastening bolt 32 includes a fastening head 321 and a fastening screw 322. The fastening head 321 is fixedly connected to one end of the fastening screw 322. The diameter of the fastening head 321 is larger than the diameter of the fastening screw 322. When the fastening screw 322 is movably inserted into the guide hole 313, the fastening head 321 abuts against the upper end of the calibration member 31. Preferably, the fastening bolt 32 is a semi-threaded fastening bolt 32, that is, the portion of the fastening screw 322 in the guide hole 313 is a smooth rod, and the portion of the fastening screw 322 in the second threaded hole 21 is a threaded rod.

[0042] The inner diameter of the guide hole 313 is larger than the outer diameter of the fastening screw 322, and the fastening screw 322 has a certain adjustable angle in the guide hole 313, that is, when the calibration member 31 adjusts the angle of the second adjustment member 2, the fastening screw 322 can be tilted in the guide hole 313, reducing the interference of the guide hole 313 on the fastening screw 322. Since the position adjustment of the fastening screw 322 replaces the deformation of the fastening screw 322, the internal stress and potential fatigue problems of the fastening screw 322 caused by the deformation are reduced, and the force generated by the deformation of the fastening screw 322 will counteract the fine adjustment amount of the calibration member 31 on the second adjustment member 2, increasing the fine adjustment error. Therefore, by tilting the fastening screw 322 relative to the guide hole 313, the first adjustment member 1 and the second adjustment member 2 can be maintained in the adjusted state.

[0043] like Figure 4 As shown, the calibration member 31 further includes an upper curved surface segment 314 and a lower curved surface segment 315. The upper curved surface segment 314, the fastening head 321, the fastening screw 322 and the lower curved surface segment 315 are fixedly connected in sequence, and the guide hole 313 is a through hole that penetrates the upper curved surface segment 314, the fastening head 321, the fastening screw 322 and the lower curved surface segment 315. Preferably, the upper end surface of the upper curved surface segment 314 is an arc surface, and the lower end surface of the lower curved surface segment 315 is an arc surface. More preferably, the upper end surface of the upper curved surface segment 314 is a spherical surface, and the lower end surface of the lower curved surface segment 315 is a spherical surface. Specifically, the arc surface of the upper curved surface segment 314 is convex upward, and the arc surface of the lower curved surface segment 315 is convex downward.

[0044] A first gasket 33 is provided between the fastening head 321 and the upper curved section 314. The first gasket 33 is movably sleeved on the fastening screw 322. The upper end surface of the first gasket 33 is a plane, and the lower end surface of the first gasket 33 is an arc surface that fits the upper end surface of the upper curved section 314, that is, the lower end surface of the first gasket 33 is recessed inside. The lower end surface of the fastening head 321 that protrudes from the fastening screw 322 is a plane, and the lower end surface of the fastening head 321 fits the upper end surface of the first gasket 33.

[0045] The upper end surface of the first adjusting member 1 is concave to form a receiving groove 22. In this embodiment, the receiving groove 22 is a cylindrical groove body, the bottom of the receiving groove 22 is a plane, the bottom of the receiving groove 22 is connected to the second threaded hole 21, and the central axis of the receiving groove 22 is coaxial with the central axis of the second threaded hole 21. A second gasket 34 is arranged in the receiving groove 22, the lower end surface of the second gasket 34 is a plane, the bottom of the second gasket 34 is in contact with the receiving groove 22, and the outer peripheral side of the second gasket 34 is in contact with the inner side wall of the receiving groove 22, so that the second gasket 34 is restricted in the receiving groove 22. The upper end surface of the second gasket 34 is an arc surface in contact with the lower end surface of the lower curved surface section 315, that is, the upper end surface of the second gasket 34 is concave relative to the inside thereof. The lower curved surface section 315 can slide relative to the second gasket 34, and the upper curved surface section 314 can slide relative to the first gasket 33. After the calibration part 31 and the fastening bolt 32 are relatively offset, the fastening bolt 32 can stably lock the calibration part 31, the first adjustment part 1 and the second adjustment part 2 in the adjusted state.

[0046] It is worth noting that the "relative offset between the calibration member 31 and the fastening bolt 32" refers to a state in which the two are in an angle change. For the sake of convenience, in this embodiment, the central axis of the calibration member 31 is arranged in the vertical direction, the first adjustment member 1 is in a stationary state, and the calibration member 31 is screwed relative to the first adjustment member 1, that is, the calibration member 31 moves relative to the first adjustment member 1 in the vertical direction, and the calibration member 31 forces the second adjustment member 2 to have a spacing and / or angle change relative to the first adjustment member 1. At this time, the fastening bolt 32 threadedly connected to the second threaded hole 21 moves with the second adjustment member 2, and the fastening bolt 32 is tilted relative to the calibration member 31. In this process, the upper end surface of the first gasket 33 always fits the lower end surface of the fastening head 321, the lower end surface of the first gasket 33 slides relative to the upper end surface of the upper curved surface segment 314, the upper end surface of the second gasket 34 slides relative to the lower end surface of the lower curved surface segment 315, and the upper curved surface segment 314 and the lower curved surface segment 315 are symmetrical about the moving direction. After the adjustment is completed, the fastening bolt 32 is tightened with the second adjustment member 2, and the first adjustment member 1, the first gasket 33, the calibration member 31, the second gasket 34 and the second adjustment member 2 are locked in the adjusted state. The above arrangement ensures that the stresses between the components of the fine-tuning assembly 3 are balanced and safe. In this state, each component can not only effectively resist the action of external forces and maintain its overall integrity and stability, but also avoid material damage or failure caused by stress concentration or excessive stress.

[0047] In this embodiment, there are three groups of fine-tuning components 3, which are distributed in a triangle, and the central axes of the three groups of fine-tuning components 3 are all arranged along the vertical direction. Preferably, the three groups of fine-tuning components 3 form a right triangle, that is, one of the fine-tuning components 3 is located at the foot of the vertical. The two fine-tuning components 3 located on one of the right-angled sides are adjusted first, and after the second fine-tuning component 3 is adjusted in the direction of the right-angled side, the last fine-tuning component 3 is adjusted to adjust the angle of the second adjustment member 2, thereby adjusting the verticality of the bungee fixed on the second adjustment member 2.

[0048] Example 2

[0049] like Figure 5 and Figure 6 As shown, the difference between this embodiment and embodiment 1 is that the first adjustment member 1 located at the vertical foot is provided with a stabilizing component 4, and the stabilizing component 4 replaces the fine-tuning component 3 located at the vertical foot in embodiment 1. The first adjustment member 1 is provided with a first positioning hole 12 and a first positioning groove 13. The first positioning hole 12 is a through hole along the vertical direction, and the inner wall of the first positioning hole 12 is a smooth curved surface. The first positioning groove 13 is formed by being concave from the upper end surface of the first adjustment member 1. The first positioning groove 13 is connected with the first positioning hole 12. Specifically, the first positioning groove 13 is a cylindrical groove, and the central axis of the first positioning groove 13 and the central axis of the first positioning hole 12 are both on the vertical foot.

[0050] The second adjusting member 2 is provided with a second positioning hole 23 and a second positioning groove 24. The second positioning hole 23 is a through hole in the vertical direction, and the inner wall of the second positioning hole 23 is a threaded surface. The second positioning groove 24 is formed inwardly from the upper end surface of the second adjusting member 2, and the second positioning groove 24 is connected with the second positioning hole 23. The bottom surface of the first adjusting member 1 is concavely provided with a third positioning groove 14. Specifically, the second positioning groove 24 and the third positioning groove 14 are both cylindrical grooves, and the first positioning groove 13, the first positioning hole 12, the third positioning groove 14, the second positioning groove 24, and the second positioning hole 23 are connected in sequence.

[0051] like Figure 6As shown, the stabilizing assembly 4 includes a positioning bolt 41 , a first fixing member 42 and a second fixing member 43 . The first fixing member 42 is movably connected to the first positioning groove 13 , and the second fixing member 43 is movably connected to the second positioning groove 24 and the third positioning groove 14 . Specifically, the top end surface of the second fixing member 43 abuts against the bottom surface of the third positioning groove 14, the bottom end surface of the second fixing member 43 abuts against the bottom surface of the second positioning groove 24, the side wall of the second fixing member 43 located in the third positioning groove 14 abuts against the inner wall of the third positioning groove 14, and the side wall of the second fixing member 43 located in the second positioning groove 24 abuts against the inner wall of the second positioning groove 24, and the length of the second fixing member 43 in the vertical direction is greater than the sum of the depth of the third positioning groove 14 and the depth of the second positioning groove 24 in the vertical direction. That is, when both ends of the second fixing member 43 are in a tight state, there is a spacing between the first adjusting member 1 and the second adjusting member 2 in the vertical direction, and the second fixing member 43 plays a role in supporting the first adjusting member 1 and the second adjusting member 2, so that the first adjusting member 1 and the second adjusting member 2 maintain a specific distance.

[0052] like Figure 7 and Figure 8 As shown, the positioning bolt 41 includes a positioning head 411 and a positioning screw 412. The positioning screw 412 is movably inserted in the first fixing member 42, the first adjusting member 1 and the second fixing member 43 in sequence. The second fixing member 43 is provided with a through hole in the vertical direction to form a first channel 44. The inner wall of the first channel 44 is a smooth curved surface. The second adjusting member 2 is provided with a second channel 45 connected to the first channel 44 in the vertical direction. The second channel 45 is a threaded hole. The diameter of the first channel 44 is larger than the diameter of the positioning screw 412. The positioning screw 412 can adjust the angle and position in the first channel 44. The positioning screw 412 and the second adjusting member 2 are threadedly connected to the second channel 45. The diameter of the positioning head 411 is larger than the diameter of the positioning screw 412. The bottom end surface of the positioning head 411 abuts against the first fixing member 42.

[0053] Preferably, the upper end surface of the first fixing member 42 is an arc surface, and the lower end surface of the second fixing member 43 is an arc surface. More preferably, the upper end surface of the first fixing member 42 is a spherical surface, and the lower end surface of the second fixing member 43 is a spherical surface. The upper end surface of the first fixing member 42, the lower end surface of the second fixing member 43, the upper end surface of the upper curved surface segment 314 and the lower end surface of the lower curved surface segment 315 have the same curvature.

[0054] A third gasket 46 is provided between the first fixing member 42 and the positioning head 411, the upper end surface of the third gasket 46 is a plane, the lower end surface of the positioning head 411 is a plane, the upper end surface of the third gasket 46 and the lower end surface of the positioning head 411 are in contact with each other, and the lower end surface of the third gasket 46 is an arc surface matching the upper end surface of the first fixing member 42, the third gasket 46 and the first fixing member 42 can slide relative to each other through the arc surface, so that the third gasket 46 and the first fixing member 42 are relatively misaligned.

[0055] A fourth gasket 47 is provided in the second positioning groove 24, and the bottom end face of the fourth gasket 47 is a plane, the bottom face of the fourth gasket 47 abuts against the bottom face of the second positioning groove 24, and the top end face of the fourth gasket 47 is an arc surface matching the lower end face of the second fixing member 43, and the fourth gasket 47 and the second fixing member 43 can slide relative to each other through the arc surface, so that the fourth gasket 47 and the second fixing member 43 are relatively misaligned.

[0056] Preferably, a group of stabilizing components 4 cooperates with two groups of fine-tuning components 3 to adjust the second adjustment member 2, and the three form a right-angled triangle. The stabilizing component 4 is located at the foot of the two right-angled sides. The stabilizing component 4 and one of the fine-tuning components 3 form a right-angled side, and the stabilizing component 4 and the other fine-tuning component 3 form another right-angled side.

[0057] Preferably, the first gasket 33 and the third gasket 46 are located on the same horizontal plane, the second gasket 34 and the fourth gasket 47 are located on another horizontal plane, and the two horizontal planes are parallel.

[0058] The adjustment method of this embodiment is different from the adjustment method of Embodiment 1 in that, since the stabilizing component 4 single-point positions the first adjustment member 1 and the second adjustment member 2 at the vertical foot, that is, they are only fixed at the vertical foot, other positions of the second adjustment member 2 can be adjusted by two fine-tuning components 3. The adjustment method has been described in detail in Embodiment 1 and will not be repeated here.

[0059] Example 3

[0060] The difference between this embodiment and embodiment 1 is that the first adjustment member 1 is provided with a plurality of adjustment grooves 15, which are connected to the first threaded holes 11 from the side in a one-to-one correspondence. The tension of the adjustment grooves is adjusted by adjusting bolts 16 to ensure the stability of the calibration member 31 located in the first threaded hole 11.

[0061] The above embodiments are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with this technology to understand the content of the present invention and implement it accordingly, and they cannot be used to limit the scope of protection of the present invention. For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and the present invention can be implemented in other specific forms without departing from the spirit or basic characteristics of the present invention. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the present invention is limited by the attached claims rather than the above description, and it is intended to include all changes within the meaning and scope of the equivalent elements of the claims in the present invention.

Claims

1. A device for adjusting the verticality of a die bonder, characterized in that: include: A first adjusting member (1); A second adjusting member (2) is arranged at the bottom of the first adjusting member (1) along a first direction and is used to fix the bungee; A fine-tuning assembly (3), wherein the first adjusting member (1) is adjustably connected to the second adjusting member (2) along the first direction through a plurality of groups of the fine-tuning assemblies (3), the fine-tuning assembly (3) is threadedly connected to the first adjusting member (1), the fine-tuning assembly (3) and the second adjusting member (2) are detachably connected, and the fine-tuning assembly (3) is screwed relative to the first adjusting member (1) to adjust the spacing and angle between the second adjusting member (2) and the first adjusting member (1).

2. The device for adjusting the verticality of a die bonder head according to claim 1, characterized in that: The first adjusting member (1) is provided with a first threaded hole (11), the second adjusting member (2) is provided with a second threaded hole (21), and the first threaded hole (11) and the second threaded hole (21) are coaxial along the first direction; The fine-tuning assembly (3) comprises a calibration piece (31) and a fastening bolt (32); the calibration piece (31) is threadedly connected in the first threaded hole (11); the fastening bolt (32) is partially movably inserted into the calibration piece (31); and the fastening bolt (32) is partially threadedly connected to the first threaded hole (11).

3. The device for adjusting the verticality of a die bonder head according to claim 2, characterized in that: The calibration piece (31) is provided with a guide hole (313), and the fastening bolt (32) includes a fastening head (321) and a fastening screw (322), and the fastening screw (322) is slidably inserted into the guide hole (313), and the diameter of the fastening screw (322) is smaller than the diameter of the guide hole (313). The fastening screw (322) is threadedly connected to the second threaded hole (21), and the bottom surface of the fastening head (321) abuts against the top surface of the calibration piece (31).

4. The device for adjusting the verticality of a die bonder head according to claim 3, characterized in that: The calibration member (31) comprises a threaded section (311) and a screw-on section (312); the threaded section (311) is threadedly connected to the first threaded hole (11); the screw-on section (312) is fixed to an end of the threaded section (311) away from the second adjustment member (2); and the screw-on section (312) is located outside the first adjustment member (1).

5. The device for adjusting the verticality of a die bonder head according to claim 4, characterized in that: The calibration piece (31) further comprises an upper curved surface segment (314) and a lower curved surface segment (315); the upper curved surface segment (314), the screwing segment (312), the threaded segment (311) and the lower curved surface segment (315) are fixedly connected in sequence; the top end surface of the upper curved surface segment (314) and the bottom end surface of the lower curved surface segment (315) are both arc surfaces; A first gasket (33) is provided between the calibration member (31) and the fastening head (321), and a second gasket (34) is provided between the calibration member (31) and the second adjustment member (2); a fitting surface between the first gasket (33) and the upper curved surface segment (314) is an arc surface, and a fitting surface between the second gasket (34) and the lower curved surface segment (315) is an arc surface.

6. The device for adjusting the verticality of a die bonder head according to claim 1, characterized in that: The fine-tuning components (3) are divided into three groups, and the three groups of fine-tuning components (3) are distributed in a triangular shape on a plane perpendicular to the first direction.

7. The device for adjusting the verticality of a die bonder head according to claim 5, characterized in that: The verticality adjustment device of the bonding head of the die bonding machine is provided with a stabilizing component (4) for single-point fixing of the first adjustment member (1) and the second adjustment member (2); the stabilizing component (4) and the two groups of fine-tuning components (3) are distributed in a right-angled triangle, and the stabilizing component (4) is located at the foot of the verticality.

8. The device for adjusting the verticality of a die bonder head according to claim 7, characterized in that: The stabilizing component (4) comprises a positioning bolt (41), a first fixing member (42) and a second fixing member (43); a first channel (44) is internally constructed within the first fixing member (42), the first adjusting member (1) and the second fixing member (43); the positioning bolt (41) is movably inserted into the first channel (44); the diameter of the first channel (44) is larger than the diameter of the positioning bolt (41); and the end of the positioning bolt (41) is threadedly connected to the second adjusting member (2).

9. The device for adjusting the verticality of a die bonder head according to claim 8, characterized in that: The positioning bolt (41) is movably sleeved with a third gasket (46) and a fourth gasket (47); the third gasket (46) is located between the positioning bolt (41) and the first fixing member (42); the lower end surface of the third gasket (46) and the upper end surface of the first fixing member (42) are both arc surfaces; the fourth gasket (47) is located between the second fixing member (43) and the second adjusting member (2); the upper end surface of the fourth gasket (47) and the lower end surface of the second fixing member (43) are both arc surfaces.

10. The device for adjusting the verticality of a die bonder head according to claim 9, characterized in that: The first gasket (33) and the third gasket (46) are located in the same plane, and the second gasket (34) and the fourth gasket (47) are located in the same plane.

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