Clamping device for clamping workpiece, bearing equipment and semiconductor detection system

Abstract

The embodiment of the invention provides a clamping device for clamping a workpiece, bearing equipment and a semiconductor detection system. The clamping device comprises an air floating chuck, a self-locking cam and a clamping jaw, the self-locking cam is installed on one side of the air floating chuck, and the side, away from the self-locking cam, of the air floating chuck is used for blowing out air so that a workpiece can be suspended above the side, away from the self-locking cam, of the air floating chuck. The self-locking cam is provided with a cam groove, one end of the clamping jaw is connected with the cam groove, the other end of the clamping jaw is used for abutting against the peripheral wall of the workpiece, the cam groove comprises a self-locking groove section, and the included angle theta between the self-locking groove section and the radial direction of the self-locking cam meets the following condition: theta < lt >; and the arctan mu is the friction coefficient between the self-locking cam and the clamping jaw, and the self-locking groove section is used for locking the clamping jaw.

Description

Technical Field

[0001] This application relates to the field of mechanical technology, and particularly to a clamping device for clamping workpieces, a carrying device, and a semiconductor detection system. Background Art

[0002] With the development of semiconductor technology, while the channel is miniaturized, the requirements for particulate contamination are becoming increasingly strict. For some machines with requirements for double-sided cleanliness detection, the common chuck for detection is an air-floating workpiece clamping mechanism. To improve the detection efficiency of workpieces, spiral scanning without repeated acceleration and deceleration is commonly used. This scanning method requires extremely high rotational speeds, usually above 1000 rpm. Since the workpiece is in an air-floating state, it is impossible to drive the workpiece through the frictional force of the upper surface of the chuck against the workpiece. The workpiece will only rotate under the action of the edge clamping force. When the jaws rotate at high speeds, they will be subjected to a great centrifugal force, which will cause the jaws to loosen, affecting the clamping reliability. Summary of the Invention

[0003] Embodiments of this application provide a clamping device for clamping workpieces, a carrying device, and a semiconductor detection system, so as to improve the clamping reliability.

[0004] In a first aspect, an embodiment of this application provides a clamping device. The clamping device includes an air-floating chuck, a self-locking cam, and jaws. The self-locking cam is installed on one side of the air-floating chuck. The side of the floating chuck背离 the self-locking cam is used to blow out gas so that the workpiece floats above the side of the air-floating chuck背离 the self-locking cam. The self-locking cam is provided with a cam groove. One end of the jaw is connected to the cam groove, and the other end of the jaw is used to abut against the peripheral wall of the workpiece. The cam groove includes a self-locking groove section. The angle θ between the self-locking groove section and the radial direction of the self-locking cam satisfies the following condition: θ < arctanμ, where μ is the friction coefficient between the self-locking cam and the jaw. The self-locking groove section is used to lock the jaw. In the clamping device provided in this application, since the angle θ between the self-locking groove section and the radial direction of the self-locking cam satisfies the following condition: θ < arctanμ, the jaw can be self-locked in the self-locking groove section, reducing the possibility that the jaw loosens the workpiece due to centrifugal force during high-speed rotation of the cam, the jaw, and the workpiece, and improving the clamping reliability of the clamping device.

[0005] According to the first aspect, in a possible implementation, the cam groove further includes an opening and closing groove section connected to the self-locking groove section. The friction angle of the self-locking groove section is less than the friction angle of the opening and closing groove section. When the jaw is connected to the opening and closing groove section, the jaw can move along the radial direction of the self-locking cam to abut against or loosen the peripheral wall of the workpiece.

[0006] According to the first aspect, in a possible implementation, the cam groove passes through the self-locking cam, and the clamping jaw includes an arm body, a connecting portion and a clamping portion. One end of the arm body is fixedly connected to the connecting portion, and the other end of the arm body is fixedly connected to the clamping portion. The connecting portion and the clamping portion are arranged on the same side of the arm body facing the air flotation chuck, and the connecting portion passes into the cam groove from the side of the cam groove away from the air flotation chuck. In this way, part of the arm body is located on the side of the self-locking cam away from the air flotation chuck, which is beneficial to reducing the contact area between the clamping jaw and the air flotation chuck, reducing the friction when the clamping jaw moves relative to the air flotation chuck, and improving the smoothness of the movement of the clamping jaw relative to the air flotation chuck.

[0007] According to the first aspect, in a possible implementation, the air flotation chuck also includes a first guide portion provided on the side of the air flotation chuck facing the self-locking cam, and the clamp also includes a second guide portion provided on the arm body facing the air flotation chuck, one of the first guide portion and the second guide portion includes a guide rail, and the other of the first guide portion and the second guide portion includes a guide groove, the guide groove extends along the radial direction of the self-locking cam, and the guide rail is slidably connected to the guide groove.

[0008] In this possible implementation, the first guide portion is used to cooperate with the clamping jaw to guide and limit the radial movement of the clamping jaw along the self-locking cam, thereby improving the stability and smoothness of the opening and closing movement of the clamping jaw.

[0009] According to the first aspect, in a possible implementation, there are multiple cam grooves, and the multiple cam grooves are arranged at intervals along the circumference of the self-locking cam. There are multiple clamping jaws, and the multiple clamping jaws are arranged at intervals along the circumference of the clamping jaws, and each clamping jaw is connected to the corresponding cam groove. For two adjacent cam grooves, in the circumference of the self-locking cam, the self-locking groove section of one cam groove is arranged adjacent to the opening and closing groove section of the other cam groove, and the clamping parts of the multiple clamping jaws are used to abut against the peripheral wall of the workpiece to cooperate with each other to clamp or release the workpiece.

[0010] In this possible implementation, the plurality of clamping jaws are arranged along the circumferential direction, which can improve the force balance when the workpiece is clamped by the clamping device.

[0011] According to the first aspect, in a possible implementation, the clamping device further includes a driving mechanism connected to the self-locking cam, the driving mechanism being used to drive the self-locking cam to rotate. Thus, the self-locking cam is driven to move by the driving mechanism, which is conducive to improving the automation of the clamping device.

[0012] According to the first aspect, in a possible implementation, the driving mechanism also includes a bracket, a driving member, a first transmission member, and a second transmission member. The bracket is fixed to the side of the air-floating chuck facing the self-locking cam, and the bracket and the air-floating chuck form a receiving space. The driving member is fixed to the side of the bracket facing away from the receiving space. Part of the first transmission member is received in the receiving space and is movably connected to the air-floating chuck. The first transmission member is connected to the driving member, the second transmission member is connected to the self-locking cam, and the second transmission member is transmission-connected to the first transmission member.

[0013] In this possible implementation, the driving member is fixed to a side of the bracket facing away from the receiving space, and part of the first transmission member is received in the receiving space. In other words, the first transmission member is located between the air-floating chuck and part of the bracket to reduce the layout area of ​​the driving mechanism on the air-floating chuck.

[0014] According to the first aspect, in a possible implementation manner, the first transmission member includes a transmission gear, and the second transmission member includes a transmission rack, and the transmission gear is meshed with the transmission rack.

[0015] In this possible implementation, transmission is performed by means of a transmission gear and a transmission rack, which has the characteristics of high transmission efficiency and compact structure.

[0016] According to the first aspect, in a possible implementation, the air flotation chuck is provided with a first air inlet and a second air inlet. The driving mechanism includes a driving member, and the driving member is provided with a third air inlet and a fourth air inlet. The clamping device also includes a switching member, a first pipeline, a second pipeline, a third pipeline and a fourth pipeline. The switching member includes a first switching inlet, a second switching inlet, a first switching outlet, a second switching outlet, a third switching outlet and a fourth switching outlet. The first switching inlet is used to communicate with the first gas flow outlet of the air slip ring, and the second switching inlet is used to communicate with the second gas flow outlet of the air slip ring, and the air slip ring is arranged on a turntable for driving the air flotation chuck to move. The first pipeline is connected between the first switching outlet and the first air inlet, the second pipeline is connected between the second switching outlet and the second air inlet, the third pipeline is connected between the third switching outlet and the third air inlet, and the third pipeline is connected between the fourth switching outlet and the fourth air inlet.

[0017] In this possible implementation, the two air paths of the air slip ring are divided into four air paths through an adapter, so as to supply air to the air floating chuck and the driving member, simplify the pipeline structure of the clamping device, and help reduce the installation space.

[0018] According to the first aspect, in a possible implementation, the clamping device further includes a first flow-limiting gasket and a second flow-limiting gasket. The first flow-limiting gasket is arranged in the first pipeline, the first flow-limiting gasket is located in the first pipeline, and the first flow-limiting gasket is used to regulate the pressure of the gas in the first pipeline. The second flow-limiting gasket is arranged in the second pipeline, and the second flow-limiting gasket is used to regulate the pressure of the gas in the second pipeline.

[0019] In a second aspect, an embodiment of the present application further provides a carrying device, which includes a turntable and a clamping device provided according to any possible implementation of the first aspect, and the turntable is used to drive the air-floating chuck of the clamping device to rotate.

[0020] In a second aspect, the present application provides a semiconductor inspection device, which includes a movable table, an optical inspection device and a carrying device provided according to the first aspect, wherein the movable table is used to carry and move a clamping device, and the optical inspection device is used to perform optical inspection on a workpiece clamped by the clamping device. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A schematic structural diagram of a semiconductor testing device provided in one embodiment of the present application;

[0022] Figure 2 A three-dimensional schematic diagram of a clamping device clamping a workpiece provided in one embodiment of the present application;

[0023] Figure 3 A three-dimensional schematic diagram of a clamping device provided in one embodiment of the present application from another perspective;

[0024] Figure 4 A schematic plan view of a self-locking cam provided in one embodiment of the present application;

[0025] Figure 5 A schematic diagram of the air circuit connection between the air flotation chuck, the driving member, the adapter, the air slip ring, and the air supply device according to one embodiment of the present application;

[0026] Figure 6 A schematic diagram of an adapter provided in one embodiment of the present application;

[0027] Figure 7 for Figure 6 A schematic diagram of the adapter shown from another perspective.

[0028] Reference numerals:

[0029] 100-semiconductor testing equipment; 10-moving platform; 101-base; 103-movable platform; 20-carrying equipment; 201-turntable; 203-clamping device; 22-air-floating chuck; 2242-first surface; 2244-second surface; 226-first guide portion; 227-first air inlet; 228-second air inlet; 24-self-locking cam; 242-cam groove; 2424-opening and closing groove section; 2422-self-locking groove section; 26-clamping claw; 262-arm body; 264-connecting part; 266-clamping part; 268-second guide portion; 28-driving mechanism; 282-bracket; 284-driving member; 2842-third air inlet; 2844-fourth air inlet; 286-first transmission member; 2 88-second transmission member; 291-adapter; 2911-first adaptor inlet; 2912-second adaptor inlet; 2913-first adaptor outlet; 2914-second adaptor outlet; 2915-third adaptor outlet; 2916-fourth adaptor outlet; 292-first pipeline; 293-second pipeline; 294-third pipeline; 295-fourth pipeline; 301-gas slip ring; 31-first part; 32-second part; 313-first air inlet; 314-second air inlet; 323-first gas outlet; 324-second gas outlet; 297-first flow limiting gasket; 298-second flow limiting gasket; 30-transfer device; 40-optical detection device; 50-gas supply device; 200-workpiece. DETAILED DESCRIPTION

[0030] See also Figure 1 In one embodiment of the present application, a semiconductor inspection device 100 is provided for inspecting whether a workpiece 200 has defects. The workpiece 200 may be a wafer, which is a carrier used to produce integrated circuits, that is, a wafer may be processed into various circuit element structures.

[0031] The semiconductor testing device 100 includes a moving platform 10, a carrying device 20, a transfer device 30, an optical testing device 40, and a gas supply device 50. The moving platform 10 is used to carry and move the carrying device 20.

[0032] In this embodiment, the mobile platform 10 includes a base 101 and a mobile platform 103 movably disposed on the base 101. For example, a boss may be disposed on one side of the base 101 facing the mobile platform 103, a slide groove may be disposed on the boss, and a slide rail may be disposed on one side of the mobile platform 103 facing the base 101, and the slide rail is slidably disposed in the slide groove, so that the mobile platform 103 can move relative to the base 101. The mobile platform 10 can also be a manipulator, a centrifuge, a machine tool, etc., and the mobile platform 10 can move the position of the carrier device 20.

[0033] The carrying device 20 includes a turntable 201 and a clamping device 203 disposed on the turntable 201. The turntable 201 is carried on the movable table 103. The clamping device 203 is used to clamp the workpiece 200. The transfer device 30 is used to transfer the workpiece 200 to the clamping device 203, for example, to transfer the workpiece 200 to be inspected from other positions to the position of the clamping device 203. The optical detection device 40 is used to perform optical detection on the workpiece 200 clamped on the clamping device 203 to detect whether the workpiece 200 has defects. The optical detection device 40 may include an objective lens, an illumination module, an imaging module, etc. The defects of the workpiece 200 may include unexpected contaminants, depressions, protrusions, etc. caused during the production and preparation process. The transfer device 30 may be a manipulator, a robot, etc. The gas supply device 50 is used to be connected to the clamping device 203 to supply gas to the clamping device 203. It is understood that the moving stage 10 can be omitted. For example, the optical detection device 40 is already at the preset position, and the workpiece 200 is directly transferred to the clamping device 203 at the preset position by the transfer device 30. It is understood that the clamping device 203 is not limited to clamping wafers, and the clamping device 203 can also be used to clamp other types of workpieces, such as masks. The clamping device 203 clamps the mask for defect detection.

[0034] With the development of semiconductor technology, the channel is miniaturized, and the requirements for particulate contamination are becoming more and more stringent. An air-floating workpiece clamping mechanism is often used to clamp the workpiece to maintain the cleanliness of the two opposite sides of the workpiece. The air-floating workpiece clamping mechanism includes a chuck, a cam and a fixture. The chuck is used to float the workpiece. The fixture is connected to the cam, and the cam is used to drive the fixture to clamp or release the workpiece. Since the workpiece needs to be in an air-floating state, the chuck cannot drive the workpiece through the friction between the upper surface of the chuck and the workpiece. The workpiece will only rotate when the clamp exerts a clamping force on the workpiece. The rotation speed of the chuck, the fixture and the workpiece clamped by the fixture may be as high as 1000rpm or more. When the fixture rotates at high speed, it will be subjected to a great centrifugal force, which will cause the fixture to loosen the workpiece, that is, the slide. The slide will cause the position of the workpiece to shift, thereby affecting the detection accuracy and detection quality of the optical detection device. Therefore, there is an urgent need for a workpiece clamping device that can improve the clamping reliability.

[0035] Based on this, see Figure 2 and Figure 3 The present application provides a clamping device 203 for clamping a workpiece 200, the clamping device 203 includes an air-floating chuck 22, a self-locking cam 24 and a clamping jaw 26. The self-locking cam 24 is installed on one side of the air-floating chuck 22. The side of the air-floating chuck 22 away from the self-locking cam 24 is used to blow out gas so that the workpiece 200 is suspended above the side of the air-floating chuck 22 away from the self-locking cam 24. The self-locking cam 24 is provided with a cam groove 242, and the clamping jaw 26 is connected to the cam groove 242, and the clamping jaw 26 is used to clamp the workpiece 200. Please refer to Figure 2 With Figure 4 , the cam groove 242 includes a self-locking groove section 2422. Please refer to Figure 4 The angle θ between the radial direction of the self-locking groove section 2422 and the self-locking cam 24 satisfies the following condition: θ < arctan μ, where μ is the friction coefficient between the self-locking cam 24 and the jaw 26. The self-locking groove section 2422 is used to lock the jaw 26 to restrict the movement of the jaw 26 in the radial direction of the self-locking cam 24.

[0036] Since the angle between the self-locking groove section 2422 and the radial direction of the self-locking cam 24 is θ, let the centrifugal force acting on the jaw 26 be N. The component of the centrifugal force N in the tangential direction of the cam groove 242 is the driving force F, and the driving force F is N × cos θ. The frictional force f caused by the centrifugal force N is μ × N × sin θ. Obviously, when the frictional force f is greater than the driving force F, no matter how large the centrifugal force acting on the jaw 26 is, the jaw 26 will not slide relative to the self-locking cam, that is, the jaw 26 will not move radially along the self-locking cam to release the workpiece 200, thus achieving self-locking. Therefore, the condition for the self-locking of the clamping device 203 is μ > tan θ, in other words, θ < arctan μ.

[0037] For the clamping device 203 provided in the present application, since θ < arctan μ, the jaw 26 can be self-locked in the self-locking groove section 2422. When the self-locking cam 24, the jaw 26, and the workpiece 200 rotate at high speed, the possibility of the jaw 26 releasing the workpiece 200 due to the centrifugal force can be reduced, and the clamping reliability of the clamping device 203 can be improved.

[0038] The cam groove 242 further includes an opening and closing groove section 2424 communicating with the self-locking groove section 2422. The friction angle of the self-locking groove section 2422 is smaller than the friction angle of the opening and closing groove section 2424. When the jaw 26 is connected to the opening and closing groove section 2424, the jaw 26 can move radially along the self-locking cam 24 to clamp or release the workpiece 200. The opening and closing groove section 2424 extends along the circumferential direction of the self-locking cam 24 to increase the radial stroke of the jaw 26 on the self-locking cam 24, that is, a greater degree of opening and closing, to adapt to workpieces 200 of different sizes. For example, when the workpiece 200 is a wafer, the success rate of loading the wafer in the workpiece transfer system (Wafer Transfer System, EFEM) can be increased.

[0039] The self-locking groove section 2422 is generally an arc-shaped groove, and θ is the angle between the tangent direction of the self-locking groove section 2422 and the self-locking cam 24. The opening and closing groove section 2424 is generally an arc-shaped groove. It can be understood that the present application does not limit the structure and shape of the self-locking groove section 2422. For example, the self-locking groove section 2422 can also be a straight groove, and θ is the angle between the extension direction of the self-locking groove section 2422 and the self-locking cam 24; or, the self-locking groove section 2422 includes a straight segment and an arc segment, etc. The present application does not limit the structure and shape of the opening and closing groove section 2424. The opening and closing groove section 2424 can be a straight groove, or, the opening and closing groove section 2424 can include a straight segment and an arc segment.

[0040] Please refer to Figure 2 and Figure 3 The air flotation chuck 22 includes a first surface 2242 and a second surface 2244 that are arranged opposite to each other. The second surface 2244 is arranged toward the self-locking cam 24. The first surface 2242 is provided with air holes for outputting gas so that the workpiece 200 is suspended above the side of the first surface 2242 away from the second surface 2244. When the workpiece 200 is suspended above the first surface 2242, the workpiece 200 does not contact the first surface 2242 to prevent the workpiece 200 from being contaminated. There are multiple air holes on the first surface 2242, and the multiple air holes can be regularly arranged on the first surface 2242. For example, the multiple air holes can be divided into multiple groups, and the multiple groups of air holes are distributed along the circumferential direction of the air flotation chuck 22. The multiple air holes in each group of air holes are arranged along the radial direction of the self-locking cam 24. In this way, the force balance of the workpiece 200 can be improved. It can be understood that the present application does not limit the arrangement of the air holes, and the multiple air holes can also be arranged irregularly, and the number of air holes can be one. The turntable 201 is connected to the second surface 2244 of the air-floating chuck 22, and the turntable 201 is used to drive the air-floating chuck 22 to rotate. The self-locking cam 24 can rotate with the air-floating chuck 22, and the self-locking cam 24 and the air-floating chuck 22 are coaxially arranged.

[0041] The clamping jaw 26 includes an arm body 262, a connecting portion 264 and a clamping portion 266. One end of the arm body 262 is fixedly connected to the connecting portion 264, and the other end of the arm body 262 is fixedly connected to the clamping portion 266. The connecting portion 264 is used to be inserted into the cam groove 242 and can move along the cam groove 242. The clamping portion 266 is used to abut against the peripheral wall of the workpiece 200. In some embodiments of the present application, the connecting portion 264 and the clamping portion 266 are arranged on the same side of the arm body 262 facing the air flotation chuck 22. The connecting portion 264 is inserted into the cam groove 242 from the side of the cam groove 242 away from the air flotation chuck 22. In this way, part of the arm body 262 is located on the side of the self-locking cam 24 away from the air flotation chuck 22, which is conducive to reducing the contact area between the clamping jaw 26 and the air flotation chuck 22, reducing the friction when the clamping jaw 26 moves relative to the air flotation chuck 22, and improving the smoothness of the movement of the clamping jaw 26 relative to the air flotation chuck 22. It is understandable that the connecting portion 264 and the clamping portion 266 may also be located on different sides of the arm body 262 , the connecting portion 264 is inserted into the cam groove 242 and can move along the cam groove 242 , and the clamping portion 266 can be abutted against the workpiece 200 .

[0042] The air-floating chuck 22 further includes a first guide portion 226 disposed on the second surface 2244, and the first guide portion 226 is used to cooperate with the clamping jaw 26. The clamping jaw 26 further includes a second guide portion 268, which is disposed on the side of the arm body 262 facing the air-floating chuck 22, and the second guide portion 268 is slidably connected with the first guide portion 226. The first guide portion 226 includes a guide groove, and the second guide portion 268 includes a guide rail, which extends along the radial direction of the self-locking cam 24, and at least part of the guide rail is accommodated in the guide groove, and the guide rail can move along the guide groove, and the guide groove can guide and limit the radial movement of the clamping jaw 26 along the self-locking cam 24, that is, the guide groove can limit the freedom of movement of the clamping jaw 26, thereby improving the stability and smoothness of the opening and closing movement of the clamping jaw 26.

[0043] It can be understood that in some embodiments, the air-floating chuck 22 includes a first guide portion 226 disposed on the side of the air-floating chuck 22 facing the self-locking cam 24, and the clamp 26 also includes a second guide portion 268 disposed on the arm body 262 facing the air-floating chuck 22, one of the first guide portion 226 and the second guide portion 268 includes a guide rail, and the other of the first guide portion 226 and the second guide portion 268 includes a guide groove, the guide groove extends along the radial direction of the self-locking cam 24, and the guide rail is slidably connected to the guide groove.

[0044] In this embodiment, there are multiple cam grooves 242, which are arranged at intervals along the circumference of the self-locking cam 24. In the circumference of the self-locking cam 24, the self-locking groove section 2422 of one cam groove 242 is arranged adjacent to the opening and closing groove section 2424 of another cam groove 242, and the clamping parts 266 of the multiple clamping jaws 26 are used to abut against the peripheral wall of the workpiece 200 to cooperate in clamping or releasing the workpiece 200. The multiple clamping jaws 26 are all arranged along the circumference, which can improve the force balance when the workpiece 200 is clamped by the clamping device 203. It can be understood that the number of clamping jaws 26 can be one, and the number of cam grooves 242 can be one. For example, when the number of cam grooves 242 is one, the air floating chuck 22 also includes a limiting strip, which can be protruded from the first surface 2242 or the peripheral wall of the air floating chuck 22. The peripheral wall of the workpiece 200 floated above the first surface 2242 is abutted against the limiting strip, and one clamping jaw 26 can move along the opening and closing groove section 2424 to clamp or release the workpiece 200.

[0045] The clamping device 203 includes an open state, a closed state and a self-locking state. The clamping jaw 26 moves along the radial direction of the self-locking cam 24 toward the outside of the self-locking cam 24 to put the clamping device 203 in the open state. The clamping jaw 26 moves along the radial direction of the self-locking cam 24 toward the center of the self-locking cam 24 to put the clamping device 203 in the closed state. The clamping jaw 26 is locked in the self-locking groove section 2422, and the clamping device 203 is in the self-locking state.

[0046] The clamping device 203 also includes a driving mechanism 28 connected to the self-locking cam 24, and the driving mechanism 28 is used to drive the self-locking cam 24 to rotate relative to the air floating chuck 22, so that the clamping jaws 26 can move radially along the self-locking cam 24, so that the clamping jaws 26 can clamp the workpiece 200, or release the workpiece 200, or self-lock with the self-locking cam 24.

[0047] The driving mechanism 28 includes a bracket 282, a driving member 284, a first transmission member 286 and a second transmission member 288. The bracket 282 is fixed to the second surface 2244. The bracket 282 and the air-floating chuck 22 enclose a receiving space. The driving member 284 is fixed to the side of the bracket 282 away from the air-floating chuck 22, and is used to provide a driving force to the self-locking cam 24. The self-locking cam 24 is driven to move by the driving member 284, which is conducive to improving the automation degree of the clamping device 203. The first transmission member 286 is installed on the second surface 2244, and part of the first transmission member 286 is received in the receiving space. In other words, the first transmission member 286 is located between the air-floating chuck 22 and part of the bracket 282 to reduce the layout area of ​​the driving mechanism 28 on the air-floating chuck 22. The second transmission member 288 is installed on the self-locking cam 24, the driving member 284 is connected to the first transmission member 286, and the second transmission member 288 is connected to the first transmission member 286. The driving member 284 is used to drive the self-locking cam 24 to rotate through the first transmission member 286 and the second transmission member 288 , thereby achieving radial movement of the clamping jaw 26 along the self-locking cam 24 .

[0048] In this embodiment, the driving member 284 is a rotating cylinder, the first transmission member 286 includes a transmission gear, the rotating shaft of the driving member 284 can pass through the bracket 282 and connect with the first transmission member 286, the second transmission member 288 includes a transmission rack, the transmission gear is meshed with the transmission rack, the rotation of the driving member 284 drives the first transmission member 286 to rotate, and the first transmission member 286 drives the second transmission member 288 and the self-locking cam 24 to rotate. The transmission is carried out in the form of a transmission gear and a transmission rack, which has the characteristics of high transmission efficiency and compact structure.

[0049] It can be understood that the present application does not limit the first transmission member 286 to a transmission gear, and the present application does not limit the second transmission member 288 to a transmission rack. The driving member 284 can be connected to the self-locking cam 24 through other transmission structures. The present application can also omit the bracket 282 and the second transmission member 288. In other words, the driving mechanism 28 includes the driving member 284 and the first transmission member 286. The driving member 284 drives the self-locking cam 24 to rotate through the first transmission member 286. For example, the first transmission member 286 can be a transmission shaft, and the driving member 284 is connected to the self-locking cam 24 through the transmission shaft. The present application does not limit the driving member 284 to a rotary cylinder. For example, the driving member 284 can be a linear cylinder. The driving member 284 converts the linear motion into the rotary motion through the first transmission member 286 to drive the self-locking cam 24 to rotate. The driving member 284 can also not be a cylinder. For example, the driving member 284 can be other types of driving mechanisms 28 such as a motor or a cylinder.

[0050] In the traditional technology, an air slip ring is provided in the turntable, and the air slip ring is used to connect with the air supply device and the clamping device to transport the gas from the air supply device to the clamping device. The air flotation chuck is usually provided with two air inlets, and the driving member is usually provided with two air inlets. In consideration of the volume of the turntable, the air slip ring can usually only have two inlets and two outlets, that is, the air slip ring includes two gas inlets and two gas outlets. If the air flotation chuck and the rotating cylinder need to be supplied with air at the same time, two sets of related air circuits need to be configured. In this way, the pipeline structure is complicated to arrange and requires a large installation space.

[0051] In this implementation, see Figure 4 and Figure 5 The air-floating chuck 22 is provided with a first air inlet 227 and a second air inlet 228 , and the driving member 284 is provided with a third air inlet 2842 and a fourth air inlet 2844 .

[0052] The turntable 201 is provided with an air slip ring 301, and the air slip ring 301 is used to realize the air path communication between the clamping device 203 and the air supply device 50. The air slip ring 301 includes a first part 31 and a second part 32 connected together and capable of relatively rotating. For example, the first part 31 is provided on the main body of the turntable 201, and the second part 32 is provided on the rotating shaft of the turntable 201. The rotating shaft is rotatably provided on the main body, and the rotating shaft is used to drive the air floating chuck 22 to rotate.

[0053] The first part 31 is provided with a first air inlet 313 and a second air inlet 314 , which can be connected and communicated with the air supply device 50 through a pipeline. The second part 32 is provided with a first gas outlet 323 and a second gas outlet 324 .

[0054] The clamping device 203 further includes a connecting piece 291, a first pipeline 292, a second pipeline 293, a third pipeline 294 and a fourth pipeline 295. Figure 5 , Figure 6 and Figure 7The adapter 291 includes a first adapter inlet 2911, a second adapter inlet 2912, a first adapter outlet 2913, a second adapter outlet 2914, a third adapter outlet 2915 and a fourth adapter outlet 2916. The first adapter inlet 2911 is used to communicate with the first gas outlet 323, and the second adapter inlet 2912 is used to communicate with the second gas outlet 324. The first pipeline 292 is connected between the first adapter outlet 2913 and the first gas inlet 227, and the second pipeline 293 is connected between the second adapter outlet 2914 and the second gas inlet 228. The third pipeline 294 is connected between the third adapter outlet 2915 and the third gas inlet 2842, and the third pipeline 294 is connected between the fourth adapter outlet 2916 and the fourth gas inlet 2844. In this way, the two air paths of the air slip ring 301 are divided into four air paths through the adapter 291, so as to supply air to the air floating chuck 22 and the driving member 284, simplify the pipeline structure of the clamping device 203, and help to reduce the installation space.

[0055] The driving member 284 and the air flotation chuck 22 require different gas pressures. The gas clamping device 203 further includes a first flow limiting gasket 297 and a second flow limiting gasket 298. The first flow limiting gasket 297 is disposed in the first pipeline 292, and the first flow limiting gasket 297 is used to regulate the pressure of the gas from the first pipeline 292. The second flow limiting gasket 298 is disposed in the second pipeline 293, and the second flow limiting gasket 298 is used to regulate the pressure of the gas in the second pipeline 293. In this embodiment, compared with the driving member 284, the gas pressure required by the air flotation chuck 22 is smaller. Through the first flow limiting gasket 297 and the second flow limiting gasket 298, the gas pressure of the first pipeline 292 is smaller than the gas pressure of the third pipeline 294, the gas pressure of the first pipeline 292 is smaller than the gas pressure of the fourth pipeline 295, the gas pressure of the second pipeline 293 is smaller than the gas pressure of the third pipeline 294, and the gas pressure of the second pipeline 293 is smaller than the gas pressure of the fourth pipeline 295. In this way, the workpiece 200 can be stably suspended on the air flotation chuck 22, and the driving member 284 can obtain the required driving force. It can be understood that the gas pressure of the first pipeline 292 is different from the gas pressure of the third pipeline 294, the gas pressure of the first pipeline 292 is different from the gas pressure of the fourth pipeline 295, the gas pressure of the second pipeline 293 is different from the gas pressure of the third pipeline 294, and the gas pressure of the second pipeline 293 is different from the gas pressure of the fourth pipeline 295.

[0056] Please refer to Figure 1 , Figure 2 and Figure 4, assuming that the workpiece 200 is placed at the intersection position, the movable platform 10 transports the clamping device 203 to the intersection position, and the air supply device supplies air. The driving member 284 can drive the self-locking cam 24 to rotate, and one end of the clamping jaw 26 moves along the opening and closing groove section 2424 of the cam groove 242, so that the clamping jaw 26 moves toward the outside of the self-locking cam 24 along the radial direction of the self-locking cam 24, and the clamping device 203 is in an open state. The workpiece 200 is transported to the top of the air-floating chuck 22 by the transfer device 30 and suspended. The driving member 284 can drive the self-locking cam 24 to rotate, so that the clamping jaw 26 moves toward the center of the self-locking cam 24 along the radial direction of the self-locking cam 24, and the clamping device 203 is in a closed state until the clamping jaw 26 and the peripheral wall of the workpiece 200 are abutted, thereby clamping the workpiece 200. The clamping jaw 26 continues to move along the cam groove 242 and reaches the self-locking groove section 2422 , and the clamping jaw 26 is locked in the self-locking groove section 2422 , and the clamping device 203 is in a self-locking state. The moving platform 10 carrying the clamping device 203 moves to the optical detection device 40 .

[0057] The rotating shaft of the turntable 201 drives the air-floating chuck 22 to rotate at high speed, and the optical detection device 40 starts to collect images, which can also be called scanning. Because the clamping device 203 is in a self-locking state when the air-floating chuck 22 rotates at high speed, the possibility of the clamping jaws 26 loosening the workpiece 200 due to centrifugal force is avoided or reduced, thereby improving the clamping reliability of the clamping device 203.

[0058] After the scanning is completed, the transfer device 30 removes the workpiece 200, and the movable platform 10 can return to the handover position to perform the next round of workpiece 200 inspection.

[0059] It should be understood that expressions such as "including" and "may include" that may be used in the present application indicate the existence of the disclosed functions, operations, or constituent elements, and do not limit one or more additional functions, operations, and constituent elements. In the present application, terms such as "including" and / or "having" may be interpreted as indicating specific characteristics, numbers, operations, constituent elements, components, or combinations thereof, but may not be interpreted as excluding the existence or possibility of adding one or more other characteristics, numbers, operations, constituent elements, components, or combinations thereof.

[0060] In addition, in the present application, the expression "and / or" includes any and all combinations of the associated listed words. For example, the expression "A and / or B" may include A, may include B, or may include both A and B.

[0061] In the present application, expressions including ordinals such as "first" and "second" can modify each element. However, such elements are not limited by the above expressions. For example, the above expressions do not limit the order and / or importance of the elements. The above expressions are only used to distinguish one element from other elements. For example, the first user device and the second user device indicate different user devices, although the first user device and the second user device are both user devices. Similarly, without departing from the scope of the present application, the first element can be referred to as the second element, and similarly, the second element can also be referred to as the first element.

[0062] When a component is referred to as being "connected" or "accessed" to another component, it should be understood that the component is not only directly connected to or accessed to the other component, but also another component may exist between the component and the other component. On the other hand, when a component is referred to as being "directly connected" or "directly accessed" to another component, it should be understood that there is no component between them.

[0063] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A clamping device (203), characterized in that: The clamping device (203) includes an air-bearing chuck (22), a self-locking cam (24), and a jaw (26). The self-locking cam (24) is installed on one side of the air-bearing chuck (22). The side of the air-bearing chuck (22) facing away from the self-locking cam (24) is used to blow out gas so that the workpiece (200) floats above the side of the air-bearing chuck (22) facing away from the self-locking cam (24). The self-locking cam (24) is provided with a cam groove (242). One end of the jaw (26) is connected to the cam groove (242), and the other end of the jaw (26) is used to abut against the circumferential wall of the workpiece (200). The cam groove (242) includes a self-locking groove section (2422). The angle θ between the self-locking groove section (2422) and the radial direction of the self-locking cam (24) satisfies the following condition: θ < arctanμ, where μ is the friction coefficient between the self-locking cam (24) and the jaw (26). The self-locking groove section (2422) is used to lock the jaw (26).

2. The clamping device (203) according to claim 1, characterized in that: The cam groove (242) further includes an opening / closing groove section (2424) communicating with the self-locking groove section (2422). The friction angle of the self-locking groove section (2422) is smaller than the friction angle of the opening / closing groove section (2424). When the jaw (26) is connected to the opening / closing groove section (2424), the jaw (26) can move radially along the self-locking cam (24) to abut against or release the circumferential wall of the workpiece (200).

3. The clamping device (203) according to claim 2, characterized in that: The number of the cam grooves (242) is multiple, and the multiple cam grooves (242) are arranged at intervals along the circumferential direction of the self-locking cam (24). The number of the jaws (26) is multiple, and the multiple jaws (26) are arranged at intervals along the circumferential direction of the jaws (26). Each jaw (26) is connected to a corresponding cam groove (242). For two adjacent cam grooves (242), in the circumferential direction of the self-locking cam (24), the self-locking groove section (2422) of one cam groove (242) is adjacent to the opening / closing groove section (2424) of the other cam groove (242). The clamping portions (266) of the multiple jaws (26) are used to abut against the circumferential wall of the workpiece (200) to cooperate to clamp or release the workpiece (200) together.

4. The clamping device (203) according to claim 1, characterized in that: The cam groove (242) penetrates through the self-locking cam (24). The jaw (26) includes an arm body (262), a connecting portion (264), and a clamping portion (266). One end of the arm body (262) is fixedly connected to the connecting portion (264), and the other end of the arm body (262) is fixedly connected to the clamping portion (266). The connecting portion (264) and the clamping portion (266) are arranged on the same side of the arm body (262) facing the air-bearing chuck (22). The connecting portion (264) penetrates into the cam groove (242) from the side of the cam groove (242) facing away from the air-bearing chuck (22).

5. The clamping device (203) according to claim 4, characterized in that: The air-floating chuck (22) also includes a first guide portion (226) arranged on the side of the air-floating chuck (22) facing the self-locking cam (24), and the clamping jaw (26) also includes a second guide portion (268) arranged on the arm body (262) facing the air-floating chuck (22), one of the first guide portion (226) and the second guide portion (268) includes a guide rail, and the other of the first guide portion (226) and the second guide portion (268) includes a guide groove, and the guide groove extends along the radial direction of the self-locking cam (24), and the guide rail is slidably connected to the guide groove.

6. The clamping device (203) according to claim 1, characterized in that: The clamping device (203) further comprises a driving mechanism (28) connected to the self-locking cam (24), wherein the driving mechanism (28) is used to drive the self-locking cam (24) to rotate.

7. The clamping device (203) according to claim 6, characterized in that: The driving mechanism (28) comprises a bracket (282), a driving member (284), a first transmission member (286) and a second transmission member (288); the bracket (282) is fixed to the side of the air-floating chuck (22) facing the self-locking cam (24); the bracket (282) and the air-floating chuck (22) form a receiving space; the driving member (284) is fixed to the side of the bracket (282) facing away from the receiving space; a portion of the first transmission member (286) is received in the receiving space and is movably connected to the air-floating chuck (22); the first transmission member (286) is connected to the driving member (284); the second transmission member (288) is connected to the self-locking cam (24); and the second transmission member (288) is transmission-connected to the first transmission member (286).

8. The clamping device (203) according to claim 7, characterized in that: The first transmission member (286) includes a transmission gear, and the second transmission member (288) includes a transmission rack, and the transmission gear is meshed with the transmission rack.

9. The clamping device (203) according to claim 6, characterized in that: The air flotation chuck (22) is provided with a first air inlet (226) and a second air inlet (228); The driving mechanism (28) comprises a driving member (284), and the driving member (284) is provided with a third air inlet (2842) and a fourth air inlet (2844); The clamping device (203) further includes an adapter (291), a first pipeline (292), a second pipeline (293), a third pipeline (294) and a fourth pipeline (295); The adapter (291) comprises a first adapter inlet (2911), a second adapter inlet (2912), a first adapter outlet (2913), a second adapter outlet (2914), a third adapter outlet (2915) and a fourth adapter outlet (2916); the first adapter inlet (2911) is used to communicate with a first gas outlet (323) of an air slip ring (301); the second adapter inlet (2912) is used to communicate with a second gas outlet (324) of the air slip ring; the air slip ring is arranged on a turntable (201) for driving the air floating chuck (22) to move; The first pipeline (292) is connected between the first transfer outlet (2913) and the first air inlet (226), the second pipeline (293) is connected between the second transfer outlet (2914) and the second air inlet (228), the third pipeline (294) is connected between the third transfer outlet (2915) and the third air inlet (2842), and the third pipeline (294) is connected between the fourth transfer outlet (2916) and the fourth air inlet (2844).

10. The clamping device (203) according to claim 9, characterized in that: The clamping device (203) further includes a first flow-limiting gasket (297) and a second flow-limiting gasket (298); The first flow-limiting gasket (297) is arranged on the first pipeline (292); the first flow-limiting gasket (297) is located in the first pipeline (292); the first flow-limiting gasket (297) is used to regulate the gas pressure of the first pipeline (292); The second flow limiting gasket (298) is arranged on the second pipeline (293), the second flow limiting gasket (298) is located in the second pipeline (293), and the second flow limiting gasket (298) is used to regulate the gas pressure of the second pipeline (294).

11. A carrying device (20), characterized in that: The carrying device (20) comprises a turntable (201) and a clamping device (203) according to any one of claims 1 to 10, wherein the turntable (201) is used to drive an air-floating chuck (22) of the clamping device (203) to rotate.

12. A semiconductor testing system (100), characterized in that: The semiconductor inspection equipment (100) comprises a movable table (10), an optical inspection device (40) and a carrying device (20) according to claim 11, wherein the movable table (10) is used to carry and move a clamping device (203), and the optical inspection device (40) is used to perform optical inspection on a workpiece (200) clamped by the clamping device (203).

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