Wafer taking and placing device

Abstract

The invention provides a wafer taking and placing device which is used for taking and placing a wafer on a suction cup. The wafer taking and placing device comprises a plurality of bearing columns which are used for penetrating through the through holes in the suction cup and are configured to eject the wafer out of the top surface of the suction cup through lifting and place the wafer at the top end on the suction cup; the supporting disc is connected with the bottom ends of the multiple bearing columns; the connecting piece is connected with the supporting disc and extends towards the radial outer side of the sucking disc; the lifting seat is arranged on the part, extending out of the supporting disc, of the connecting piece; the limiting seat is provided with a limiting guide rail arranged in the vertical direction, the lifting seat is matched with the limiting guide rail through a sliding block so that the lifting track of the sliding block and the lifting seat can be limited through the limiting guide rail, and the limiting seat is fixed to the working area through a plurality of first adjusting jackscrews. A ball head lever mechanism is omitted while lifting of the bearing column is achieved, so that the problems generated by the ball head lever mechanism are avoided, and the parallel degree of the supporting disc relative to the suction cup can be flexibly adjusted by adjusting the limiting seat through the first adjusting jackscrew.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to a wafer placing and retrieving device. Background Art

[0002] In the process of processing or testing the wafer, in order to keep the wafer stable, it is usually necessary to place the wafer on a wafer suction cup, and the wafer is fixed by the wafer suction cup. After the processing or testing operation is completed, the wafer is removed from the wafer suction cup. At present, the device for taking and placing the wafer from the wafer suction cup generally includes a plurality of bearing columns, a support plate and a ball head lever. The plurality of bearing columns are fixed on the support plate, and a through hole for the bearing columns to pass through is provided on the wafer suction cup. During operation, the ball head of the ball head lever uses the lever principle to lift the support plate, so that the bearing column passes through the through hole on the wafer suction cup, thereby lifting the wafer on the suction cup.

[0003] Since the existing pick-and-place device uses a lever mechanism, there is friction between the ball head of the ball head lever and the support plate. After long-term work, the contact position between the ball head and the support plate is easily worn, which not only causes a decrease in accuracy, but also generates powder particles near the wafer suction cup, causing pollution to the working area. Summary of the invention

[0004] An object of the present invention is to provide a wafer placing device that can solve any of the above problems.

[0005] In particular, the present invention provides a wafer placing device for placing and picking up a wafer on a suction cup, and the wafer placing and picking up device comprises:

[0006] A plurality of supporting columns, used to pass through the through holes on the suction cup, with the top ends thereof used to place the wafer, and configured to eject the wafer from the top surface of the suction cup by lifting and lowering and to place the wafer at the top end on the suction cup;

[0007] A support plate connected to the bottom ends of the plurality of bearing columns;

[0008] A connecting member connected to the supporting plate and extending from the supporting plate to the radial outside of the suction cup;

[0009] A lifting seat is arranged on the portion of the connecting member extending from the supporting plate and is lifted and lowered together with the connecting member;

[0010] The limit seat is provided with a limit guide rail arranged vertically. The lifting seat cooperates with the limit guide rail through a slider to use the limit guide rail to limit the lifting trajectory of the slider and the lifting seat, and the limit seat is provided with multiple first adjustment top screws to be fixed to the working area through the multiple first adjustment top screws.

[0011] Optionally, the lifting seat is provided with a plurality of second adjusting top screws, and the lifting seat is fixedly connected to the slider through the plurality of second adjusting top screws, so that the inclination of the lifting seat relative to the slider can be adjusted through the plurality of second adjusting top screws, and the adjustment directions of the plurality of second adjusting top screws are perpendicular to the adjustment directions of the plurality of first adjusting top screws.

[0012] Optionally, the thread density of the second adjusting top screw is greater than the thread density of the first adjusting top screw.

[0013] Optionally, the lifting seat includes a connecting plate and a supporting plate which are perpendicular to each other, the connecting plate is arranged facing the slider, the supporting plate is arranged on the side of the connecting plate away from the slider, the top surface of the supporting plate is connected to the connecting piece, and at least one second adjusting top screw passes through the connecting plate and is connected to the slider.

[0014] Optionally, the connecting plate is provided with two external ears, which protrude respectively to the two sides of the slider, and a reset elastic member is arranged between each external ear and the limit seat, and the lifting seat is configured to stretch the reset elastic member during the rising process, so that the reset elastic member provides an external force to drive the lifting seat to descend.

[0015] Optionally, the limit seat is provided with three first adjustment top screws, and the connecting lines of the three first adjustment top screws at the setting positions of the limit seat form a triangle; and / or,

[0016] The lifting seat is provided with three second adjusting top screws, and the connecting lines of the three second adjusting top screws at the setting positions of the lifting seat form a triangle.

[0017] Optionally, the bearing column comprises:

[0018] A top post, configured to pass through a through hole on the chuck to contact the wafer; and

[0019] The bottom column is arranged at the bottom end of the top column and is threadedly connected with the top column.

[0020] Optionally, the bearing column further includes a pre-tightening elastic member, which is disposed between the top column and the bottom column, and is configured to provide an upward pre-tightening force for the top column.

[0021] Optionally, the wafer placing device further comprises an active component, which is arranged at one end of the connecting component away from the supporting plate and is used to provide power to drive the connecting component to rise.

[0022] Optionally, the active member includes a first driving part and a second driving part, the first driving part is used to directly contact the connecting member, the second driving part is arranged at the bottom end of the first driving part, and a pressure sensor is provided between the first driving part and the second driving part.

[0023] The wafer pick-and-place device of the present invention sets a limiting guide rail on the limiting seat, so that the lifting seat cooperates with the limiting guide rail through the slider, so as to limit the lifting trajectory of the slider and the lifting seat by using the limiting guide rail. The lifting seat is connected to the connecting member, the connecting member is connected to the support plate, and the support plate is connected to multiple bearing columns, that is, the slider, the lifting seat, the connecting member, the support plate and the multiple bearing columns can be lifted and lowered along the limiting guide rail as a whole. In other words, the limiting guide rail limits the lifting trajectory of the whole composed of the slider, the lifting seat, the connecting member, the support plate and the multiple bearing columns. In this way, on the basis of being able to realize the lifting of multiple bearing columns, the ball head lever mechanism is cancelled, thereby avoiding the situation that the ball head lever mechanism is reduced in precision due to wear at the ball head and the generation of powder particles to cause pollution of the working area. In addition, the limiting seat is fixed in the working area by multiple first adjusting top screws, so that the inclination of the top surface of the limiting seat relative to the horizontal plane can be adjusted by using the first adjusting top screw, that is, the vertical inclination of the limiting guide rail is adjusted, thereby adjusting the lifting trajectory of the whole composed of the slider, the lifting seat, the connecting member, the support plate and the three bearing columns. In other words, the degree of parallelism of the support plate relative to the suction cup can be flexibly adjusted by adjusting the limit seat, so as to cope with the situation where the surface of the support plate deviates greatly from the parallel plane of the suction cup during use, thereby ensuring good contact between the three supporting columns and the wafer, and then ensuring smooth placement of the wafer.

[0024] Furthermore, the wafer placement device of the present invention fixes the lifting seat to the slider through a plurality of second adjusting top screws, so that on the basis of being able to adjust the lifting trajectory of the whole composed of the slider, the lifting seat, the connecting piece, the support plate and the three supporting columns by adjusting the limit seat through the first adjusting top screw, the lifting seat can also be adjusted by adjusting the lifting seat through the second adjusting top screw, so that the parallelism of the support plate with respect to the suction cup can be adjusted from two parts, which helps to increase the adjustment range and is conducive to dealing with more complex situations.

[0025] Based on the following detailed description of specific embodiments of the present invention in conjunction with the accompanying drawings, those skilled in the art will become more aware of the above and other objects, advantages and features of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Hereinafter, some specific embodiments of the present invention will be described in detail in an exemplary and non-limiting manner with reference to the accompanying drawings. The same reference numerals in the accompanying drawings indicate the same or similar components or parts. It should be understood by those skilled in the art that these drawings are not necessarily drawn to scale. In the accompanying drawings:

[0027] Figure 1 is a schematic diagram of a wafer handling device and a suction cup according to an embodiment of the present invention;

[0028] Figure 2is a schematic diagram of a wafer pick-and-place device in a raised state according to an embodiment of the present invention;

[0029] Figure 3 is a schematic diagram of a wafer pick-and-place device in a falling state according to an embodiment of the present invention;

[0030] Figure 4 is a partial schematic diagram of a wafer handling device according to an embodiment of the present invention;

[0031] Figure 5 is a schematic diagram of a lifting seat part in a wafer placing device according to an embodiment of the present invention;

[0032] Figure 6 is a schematic diagram of a limit seat part in a wafer placing device according to an embodiment of the present invention;

[0033] Figure 7 It is a partial schematic diagram of a supporting column of a wafer handling and placing device according to an embodiment of the present invention.

[0034] Description of reference numerals:

[0035] 10. Wafer pick-and-place device; 20. Suction cup; 21. Through hole; 30. Mounting platform;

[0036] 100, bearing column; 110, top column; 120, bottom column; 130, preload elastic member; 200, support plate; 300, connecting member; 400, lifting seat; 410, second adjustment top screw; 420, connecting plate; 421, external ear; 430, support plate; 500, slider; 600, limit seat; 610, limit guide rail; 620, first adjustment top screw; 700, reset elastic member; 800, active member; 810, first drive unit; 820, second drive unit; 830, pressure sensor. DETAILED DESCRIPTION

[0037] It should be understood by those skilled in the art that the embodiments described below are only some embodiments of the present invention, rather than all embodiments of the present invention, and these embodiments are intended to explain the technical principles of the present invention, rather than to limit the protection scope of the present invention. Based on the embodiments provided by the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should still fall within the protection scope of the present invention.

[0038] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0039] Furthermore, it should be noted that in the description of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0040] like Figures 1 to 6 As shown, in one embodiment, the wafer placement device 10 includes three supporting columns 100, a support plate 200, a connecting member 300, a lifting seat 400, a slider 500 and a limiting seat 600. The three supporting columns 100 are used to pass through the through hole 21 on the suction cup 20, and the top end thereof is used to place the wafer, and is configured to eject the wafer from the top surface of the suction cup 20 by lifting and lowering and place the wafer at the top end on the suction cup 20. The support plate 200 is connected to the bottom ends of the three supporting columns 100. The connecting member 300 is connected to the support plate 200 and extends from the support plate 200 to the radial outside of the suction cup 20. The lifting seat 400 is arranged on the portion of the connecting member 300 extending from the support plate 200, and is lifted and lowered together with the connecting member 300. The limit seat 600 is provided with a limit guide rail 610 arranged vertically, and the lifting seat 400 cooperates with the limit guide rail 610 through the slider 500, so as to limit the lifting and lowering tracks of the slider 500 and the lifting seat 400 by the limit guide rail 610. The limit seat 600 is provided with three first adjustment top screws 620, so as to be fixed to the mounting platform 30 of the working area through the three first adjustment top screws 620, and the plurality of first adjustment top screws 620 are used to adjust the inclination of the limit seat 600 relative to the horizontal plane.

[0041] Reference Figures 1 to 6As shown, specifically, the suction cup 20 is an electrostatic suction cup or a vacuum suction cup, etc., which are well known to those skilled in the art. The suction cup 20 is in the shape of a circular plate, and the top surface is used to place the wafer. Three through holes 21 are provided on the suction cup 20, and each through hole 21 corresponds to a supporting column 100, which is used for the corresponding supporting column 100 to pass through. When the supporting column 100 passes through the through hole 21, the top of the supporting column 100 is higher than the top surface of the suction cup 20, and the wafer originally placed on the top surface of the suction cup 20 can be lifted up, that is, the wafer is removed from the suction cup 20. At the same time, when the top of the supporting column 100 is higher than the top surface of the suction cup 20, the wafer to be processed can also be placed on the top of the supporting column 100, and the supporting column 100 descends with the wafer until the top of the supporting column 100 is lower than the top surface of the suction cup 20, and the wafer at the top of the supporting column 100 will be placed on the suction cup 20.

[0042] It should be noted that, in some other embodiments, the number of the supporting columns may also be two, four or more, and those skilled in the art may adjust the number of the supporting columns as needed.

[0043] Continue to refer to Figures 1 to 6 As shown, the support plate 200 is fixedly connected to the bottom ends of the three bearing columns 100, so that the support plate 200 can drive the three bearing columns 100 to rise and fall simultaneously. The connecting member 300 is a long block structure, and the main part is in a cube shape. One end of the connecting member 300 is connected to the support plate 200, so that the connecting member 300 can drive the support plate 200 to rise and fall, and then drive the three bearing columns 100 to rise and fall. The support plate 200 is located at the bottom of the suction cup 20, that is, one end of the connecting member 300 connected to the support plate 200 is located at the bottom of the suction cup 20, and the other end of the connecting member 300 extends radially toward the outside of the suction cup 20 along the suction cup 20, and the lifting seat 400 is arranged at the part of the connecting member 300 extending from the support plate 200, that is, the part of the connecting member 300 avoiding the connection position with the support plate 200.

[0044] It should be noted that the connecting member and the supporting plate may be integrally formed, or may be separately formed and fixedly connected.

[0045] Continue to refer to Figures 1 to 6 As shown, the limiting seat 600 is a plate-like structure, and the limiting guide rail 610 extends upward from the top surface thereof. The lifting seat 400 cooperates with the limiting guide rail 610 through the slider 500, so as to limit the lifting trajectory of the slider 500 and the lifting seat 400 by using the limiting guide rail 610. Because the lifting seat 400 is connected to the connecting member 300, the connecting member 300 is connected to the supporting plate 200, and the supporting plate 200 is connected to the three bearing columns 100, the limiting guide rail 610 limits the lifting trajectory of the whole composed of the slider 500, the lifting seat 400, the connecting member 300, the supporting plate 200 and the three bearing columns 100.

[0046] like Figures 1 to 6As shown, the main body of the limiting guide rail 610 is roughly a square column, and its two opposite side edges form depressions. The slider 500 includes a main body plate facing the limiting guide rail 610, and two matching parts protruding from the surface of the main body plate facing the limiting guide rail 610 to the side where the limiting guide rail 610 is located. It can be said that the slider 500 is roughly in the shape of a "concave". The two matching parts are respectively located on both sides of the limiting guide rail 610, so as to clamp the limiting guide rail 610 and achieve sliding cooperation with the limiting guide rail 610. The two matching parts are provided with matching depressions on the side facing the limiting guide rail 610, and the matching parts are plugged into each other with the depression of the limiting guide rail 610 using the matching depressions. The lifting seat 400 is arranged on the side of the slider 500 away from the limiting guide rail 610.

[0047] Continue to refer to Figures 1 to 6 As shown, the limit seat 600 is fixed to the installation platform 30 by three first adjustment screws 620. Therefore, by adjusting one first adjustment screw 620 alone, the height of the limit seat 600 corresponding to the first adjustment screw 620 relative to the top surface of the installation platform 30 can be changed to a certain extent, that is, the inclination degree of the top surface of the limit seat 600 relative to the horizontal plane is adjusted, and then the vertical inclination degree of the limit guide rail 610 is adjusted, that is, the overall lifting trajectory composed of the slider 500, the lifting seat 400, the connecting member 300, the support plate 200 and the three supporting columns 100 is adjusted.

[0048] In the solution of this embodiment, by setting a limiting guide rail 610 on the limiting seat 600, the lifting seat 400 cooperates with the limiting guide rail 610 through the slider 500, so that the limiting guide rail 610 is used to limit the lifting trajectory of the slider 500 and the lifting seat 400. The lifting seat 400 is connected to the connecting member 300, the connecting member 300 is connected to the support plate 200, and the support plate 200 is connected to the plurality of bearing columns 100, that is, the slider 500, the lifting seat 400, the connecting member 300, the support plate 200 and the plurality of bearing columns 100 can be lifted and lowered as a whole along the limiting guide rail 610. In other words, the limiting guide rail 610 limits the lifting trajectory of the whole composed of the slider 500, the lifting seat 400, the connecting member 300, the support plate 200 and the plurality of bearing columns 100. In this way, on the basis of being able to realize the lifting and lowering of multiple load-bearing columns, the ball head lever mechanism is eliminated, thereby avoiding the situation where the ball head lever mechanism suffers a decrease in accuracy due to wear at the ball head and generates powder particles that cause pollution to the working area.

[0049] In addition, the limit seat 600 is fixed in the working area by a plurality of first adjusting top screws 620, so that the first adjusting top screws 620 can be used to adjust the inclination of the top surface of the limit seat 600 relative to the horizontal plane, that is, to adjust the vertical inclination of the limit guide rail 610, thereby adjusting the lifting trajectory of the whole composed of the slider 500, the lifting seat 400, the connecting piece 300, the support plate 200 and the three supporting columns 100. Because the number of components is greater after the guide rail lifting method is adopted, the coordination between different components is also more, such as the limit guide rail 610 and the slider 500 must cooperate with each other, and the lifting seat 400 and the connecting piece 300 must cooperate with each other, so during use, the surface of the support plate 200 may deviate greatly from the parallel surface of the suction cup 20 due to inadequate coordination, resulting in different heights of the multiple supporting columns 100, so that the wafer cannot be smoothly taken and placed. By adjusting the limit seat 600, the parallelism of the support plate 200 relative to the suction cup 20 can be flexibly adjusted to deal with the above situation, thereby ensuring good contact between the three supporting columns 100 and the wafer, and further ensuring smooth placement of the wafer.

[0050] It should be noted that, in some other embodiments, the number of the first adjusting top screws may be two, four or more, and those skilled in the art may adjust the number of the first adjusting top screws as needed.

[0051] like Figures 1 to 6 As shown, in one embodiment, the lifting seat 400 is provided with three second adjusting top screws 410, and the lifting seat 400 is fixedly connected to the slider 500 through the three second adjusting top screws 410, so as to adjust the inclination of the lifting seat 400 relative to the slider 500 through the plurality of second adjusting top screws 410. In addition, the adjustment directions of the plurality of second adjusting top screws 410 are perpendicular to the adjustment directions of the plurality of first adjusting top screws 620. Specifically, the first adjusting top screw 620 passes through the limiting seat 600 vertically and is connected to the mounting platform 30, and the second adjusting top screw 410 passes through the lifting seat 400 horizontally and is connected to the slider 500.

[0052] In the solution of the present embodiment, the lifting seat 400 is fixedly connected to the slider 500 through a plurality of second adjusting top screws 410, so that on the basis of being able to adjust the lifting trajectory of the whole composed of the slider 500, the lifting seat 400, the connecting member 300, the support plate 200 and the three supporting columns 100 by adjusting the limit seat 600 through the first adjusting top screw 620, the lifting seat 400 can also be adjusted by adjusting the lifting seat 400 through the second adjusting top screw 410 to adjust the lifting trajectory of the whole composed of the lifting seat 400, the connecting member 300, the support plate 200 and the three supporting columns 100, so that the parallelism of the support plate 200 with respect to the suction cup 20 can be adjusted from two parts, which helps to increase the adjustment range and is conducive to dealing with more complex situations.

[0053] It should be noted that, in some other embodiments, the number of the second adjusting top screws may also be two, four or more, and those skilled in the art may adjust the number of the second adjusting top screws as needed. In addition, at least two second adjusting top screws are arranged in the upper and lower positions.

[0054] like Figure 5 and Figure 6 As shown, in one embodiment, the thread density of the second adjusting top screw 410 is greater than the thread density of the first adjusting top screw 620, that is, the second adjusting top screw 410 can be adjusted more finely than the first adjusting top screw 620. In this way, during the adjustment process, the first adjusting top screw 620 can be used for coarse adjustment first, and then the second adjusting top screw 410 can be used for fine adjustment, which helps to adjust the support plate 200 into place more quickly.

[0055] like Figure 5 and Figure 6 As shown, in one embodiment, the connection line of the three first adjusting top screws 620 at the setting position of the limit seat 600 forms a triangle, so that the limit seat 600 can be adjusted in two directions, and it helps to improve the stability of the connection between the limit seat 600 and the mounting platform 30. In addition, the connection line of the three second adjusting top screws 410 at the setting position of the lifting seat 400 forms a triangle, so that the lifting seat 400 can be adjusted in two directions, and it helps to improve the stability of the connection between the lifting seat 400 and the slider 500.

[0056] It should be noted that the three first adjusting top screws 620 are respectively as close as possible to the edge of the limiting seat 600. In addition, the three second adjusting top screws 410 are respectively as close as possible to the edge of the lifting seat 400.

[0057] like Figures 1 to 6 As shown, in one embodiment, the lifting seat 400 includes a connecting plate 420 and a supporting plate 430 which are perpendicular to each other, the connecting plate 420 is arranged facing the slider 500, and the supporting plate 430 is arranged on the side of the connecting plate 420 away from the slider 500. The top surface of the supporting plate 430 is connected to the connecting member 300, and at least one second adjusting top screw 410 passes through the connecting plate 420 and is connected to the slider 500.

[0058] Reference Figures 1 to 6 As shown, specifically, the connecting plate 420 is a flat plate extending vertically, and the supporting plate 430 is a flat plate extending horizontally. One side surface of the connecting plate 420 faces the slider 500. The supporting plate 430 is located at the bottom end of the connecting plate 420 and is located on the surface of the connecting plate 420 facing away from the slider 500. The connecting member 300 is placed on the top surface of the supporting plate 430 and connected to the supporting plate 430. Two of the three second adjusting top screws 410 pass through the connecting plate 420 to connect to the slider 500, and one passes through the supporting plate 430 to connect to the slider 500.

[0059] Those skilled in the art can understand that, by setting the lifting seat 400 as a connecting plate 420 and a supporting plate 430 that are perpendicular to each other, the top surface of the supporting plate 430 is connected to the connecting member 300, and at least a part of the plurality of second adjusting top screws 410 passes through the connecting plate 420 to connect to the slider 500. While the supporting plate 430 is used to form a stable support for the connecting member 300, the thickness of the connecting plate 420 connected to the slider 500 is relatively thinner, so that the length of the second adjusting top screw 410 passing through the connecting plate 420 can be set to be relatively short, and the resistance during adjustment is smaller, and it is easier to adjust.

[0060] In addition, at least one second adjusting top screw 410 passes through the support plate 430 and is connected to the slider 500, so that the plurality of second adjusting top screws 410 are dispersed as much as possible, making the connection between the lifting seat 400 and the slider 500 more stable and easy to adjust.

[0061] like Figure 5 and Figure 6 As shown, the connecting plate 420 is provided with two outer ears 421, and the two outer ears 421 protrude to the two sides of the slider 500 respectively. A reset elastic member 700 is provided between each outer ear 421 and the limiting seat 600, and the lifting seat 400 is configured to stretch the reset elastic member 700 during the rising process, so that the reset elastic member 700 provides an external force to drive the lifting seat 400 to descend.

[0062] like Figure 5 and Figure 6 As shown, specifically, most of the limiting seat 600 and the lifting seat 400 are located on opposite sides of the slider 500, which are recorded as the front and rear sides for ease of explanation. The two outer ears 421 of the connecting plate 420 protrude to the left and right sides of the slider 500 respectively. In addition, the width of the limiting seat 600 in the left and right directions is greater than the width of the slider 500, so that it has parts located on the left and right sides of the slider 500. The two outer ears 421 are respectively fixed with a screw extending to the side where the limiting seat 600 is located. The reset elastic member 700 is a tension spring. For the reset elastic member 700 on the left side of the slider 500, one end is fixed to the screw on the left side of the slider 500, and the other end is fixed to the part of the limiting seat 600 located on the left side of the slider 500. During the rising process of the lifting seat 400, the reset elastic member 700 is stretched and accumulates elastic force. When the lifting seat 400 descends, the reset elastic member 700 releases the accumulated elastic force, thereby providing an external force to drive the lifting seat 400 to descend.

[0063] Those skilled in the art can understand that, by providing two external ears 421 on the connecting plate 420 and providing a reset elastic member 700 between each external ear 421 and the limiting seat 600, the lifting seat 400 stretches the reset elastic member 700 during the ascending process, so that the reset elastic member 700 provides an external force to drive the lifting seat 400 to descend, thereby making the lifting seat 400 descend faster and more stably.

[0064] It should be noted that, in some other embodiments, the screw rod may not be provided, but a portion of the outer ear portion itself extends toward the side where the limit seat is located to fix the resetting elastic member.

[0065] It should be noted that, in some other embodiments, the resetting elastic member may also be an elastic structure such as a telescopic rope.

[0066] like Figure 1 As shown, the wafer pick-and-place device 10 also includes an active member 800, which is arranged at one end of the connecting member 300 away from the supporting plate 200, and is used to provide power to drive the connecting member 300 to rise. Specifically, the active member 800 is a columnar structure, such as a hydraulic rod. An inverted "L"-shaped structure is provided at one end of the connecting member 300 away from the supporting plate 200, which is upside down on the end of the connecting member 300 away from the supporting plate 200, that is, the lateral part of the inverted "L"-shaped structure is placed on the connecting member 300, and the vertical part extends downward. The active member 800 is not connected to the connecting member 300. When the supporting column 100 needs to be raised, the active member 800 rises and abuts against the lower end of the inverted "L"-shaped structure, thereby giving an external force to the slider 500, the lifting seat 400, the connecting member 300, the supporting plate 200 and the three supporting columns 100 to form a whole body that rises along the limiting guide rail 610. When the supporting column 100 needs to be lowered, the active member 800 descends and detaches from the connecting member 300, and the whole composed of the slider 500, the lifting seat 400, the connecting member 300, the supporting plate 200 and the three supporting columns 100 descends under the action of gravity.

[0067] Those skilled in the art will appreciate that by disposing the active member 800 at one end of the connecting member 300 away from the supporting plate 200 , the active member 800 is kept away from the area where the suction cup 20 is located, thereby providing sufficient working space for crystal source processing or detection.

[0068] like Figure 1As shown, the active member 800 includes a first driving part 810 and a second driving part 820, the first driving part 810 is used to directly contact the connecting member 300, the second driving part 820 is arranged at the bottom of the first driving part 810, and a pressure sensor 830 is arranged between the first driving part 810 and the second driving part 820. In other words, the second driving part 820 lifts the connecting member 300 by lifting the first driving part 810, thereby realizing the rise of the connecting member 300. In addition, when the second driving part 820 lifts the first driving part 810, the pressure sensor 830 will detect the pressure. Then, when the first driving part 810 lifts the connecting member 300, the gravity of the whole composed of the slider 500, the lifting seat 400, the connecting member 300, the supporting plate 200 and the three supporting columns 100 will cause the detection value of the pressure sensor 830 to change. When the supporting column 100 lifts the wafer, the gravity of the wafer will cause the detection value of the pressure sensor 830 to change. If the suction cup 20 still maintains adsorption on the wafer when the wafer is lifted up, because the wafer cannot be lifted up, the pressure exerted on the wafer by the supporting column 100 will become greater and greater. At this time, the detection value of the pressure sensor 830 will also change, but the difference is very large compared with the change when the wafer is lifted up.

[0069] Therefore, by monitoring the detection value of the pressure sensor 830, the adsorption state of the suction cup 20 on the wafer can be monitored. In this way, when it is necessary to lift the wafer from the suction cup 20, if it is determined according to the detection value of the pressure sensor 830 that the wafer has not been separated from the adsorption of the suction cup 20, the action of lifting the wafer can be stopped in time, thereby avoiding damaging the wafer. Because the active component 800 is far away from the working area where the suction cup 20 is located, the pressure sensor 830 is also far away from the working area, which is convenient for installation and replacement.

[0070] like Figures 1 to 3 ,as well as Figure 7 As shown, in one embodiment, the supporting column 100 includes a top column 110 and a bottom column 120. The top column 110 is used to pass through the through hole 21 on the suction cup 20 to contact the wafer. The bottom column 120 is disposed at the bottom end of the top column 110 and is threadedly connected to the top column 110.

[0071] It will be understood by those skilled in the art that by configuring the supporting column 100 to include a top column 110 and a bottom column 120, and threading the bottom column 120 to the top column 110, the overall length of the supporting column 100 can be adjusted by screwing the top column 110, and then each supporting column 100 can be adjusted individually to keep the top heights of the three supporting columns 100 consistent, thereby ensuring that the wafer is supported stably.

[0072] like Figures 1 to 3 ,as well as Figure 7As shown, in one embodiment, the supporting column 100 further includes a preload elastic member 130 , which is disposed between the top column 110 and the bottom column 120 , and is configured to provide an upward preload force for the top column 110 .

[0073] like Figures 1 to 3 ,as well as Figure 7 As shown, specifically, the preload elastic member 130 is a spring. The top of the bottom column 120 is provided with a threaded rod having a diameter smaller than the diameter of the main part of the bottom column 120, and the preload elastic member 130 is sleeved on the threaded rod. The bottom of the top column 110 forms a threaded hole corresponding to the threaded rod, and the bottom of the top column 110 forms a sleeve, the diameter of the sleeve matches the diameter of the main part of the bottom column 120, so that after the bottom column 120 and the top column 110 are threadedly connected, the sleeve fits on the outer surface of the main part of the bottom column 120. And, after the bottom column 120 and the top column 110 are threadedly connected, the top column 110 around the bottom surface of the threaded hole and the bottom column 120 around the top surface of the threaded column squeeze the preload elastic member 130. Specifically, within all adjustment ranges of the top column 110 and the bottom column 120, the spring as the preload elastic member 130 is always in a compressed state, that is, the upward force on the top column 110 is always maintained.

[0074] Those skilled in the art will appreciate that, because the pre-tightening elastic member 130 always maintains an upward force on the top column 110, when a wafer is placed on the top of the supporting column 100, the top column 110 is affected by the gravity of the wafer. However, due to the force of the pre-tightening elastic member 130 on the top column 110, the top column 110 can be prevented from slightly moving downward relative to the bottom column 120 under the action of the gravity of the wafer, thereby helping to maintain the high precision of the supporting column 100.

[0075] It should be noted that, in some other embodiments, the preload elastic member may also be other elastic components such as a gas spring.

[0076] At this point, those skilled in the art should recognize that, although multiple exemplary embodiments of the present invention have been shown and described in detail herein, many other variations or modifications that conform to the principles of the present invention can still be directly determined or derived based on the content disclosed in the present invention without departing from the spirit and scope of the present invention. Therefore, the scope of the present invention should be understood and recognized as covering all these other variations or modifications.

Claims

1. A wafer handling device, used for handling a wafer on a suction cup, and the wafer handling device comprises: A plurality of supporting columns, used to pass through the through holes on the suction cup, with the top ends thereof used to place the wafer, and configured to eject the wafer from the top surface of the suction cup by lifting and lowering and place the wafer at the top end on the suction cup; A support plate connected to the bottom ends of the plurality of bearing columns; A connecting member connected to the support plate and extending from the support plate to the radial outside of the suction cup; A lifting seat, which is arranged on the portion of the connecting member extending from the supporting plate and is lifted and lowered together with the connecting member; The limit seat is provided with a limit guide rail arranged vertically, and the lifting seat cooperates with the limit guide rail through a slider to use the limit guide rail to limit the lifting trajectory of the slider and the lifting seat, and the limit seat is provided with a plurality of first adjustment top screws to be fixed to the working area through the plurality of first adjustment top screws.

2. The wafer handling device according to claim 1, wherein: The lifting seat is provided with a plurality of second adjusting top screws, and the lifting seat is fixedly connected to the slider via the plurality of second adjusting top screws, so that the inclination of the lifting seat relative to the slider can be adjusted via the plurality of second adjusting top screws, and the adjustment directions of the plurality of second adjusting top screws are perpendicular to the adjustment directions of the plurality of first adjusting top screws.

3. The wafer handling device according to claim 2, wherein: The thread density of the second adjusting screw is greater than the thread density of the first adjusting screw.

4. The wafer handling device according to claim 2, wherein: The lifting seat includes a connecting plate and a supporting plate which are perpendicular to each other. The connecting plate is arranged facing the slider, and the supporting plate is arranged on a side of the connecting plate away from the slider. The top surface of the supporting plate is connected to the connecting piece, and at least one of the second adjusting top screws passes through the connecting plate and is connected to the slider.

5. The wafer handling device according to claim 4, wherein: The connecting plate is provided with two outer ears, which protrude to the two sides of the slider respectively. A reset elastic member is provided between each of the outer ears and the limit seat. The lifting seat is configured to stretch the reset elastic member during the rising process, so that the reset elastic member provides an external force to drive the lifting seat to descend.

6. The wafer handling device according to claim 2, wherein: The limit seat is provided with three first adjusting top screws, and the connecting line of the three first adjusting top screws at the setting position of the limit seat forms a triangle; and / or, The lifting seat is provided with three second adjusting top screws, and the connecting lines of the three second adjusting top screws at the setting positions of the lifting seat form a triangle.

7. The wafer handling device according to claim 1, wherein: The bearing column comprises: A top column, used for passing through the through hole on the suction cup to contact the wafer; and The bottom column is arranged at the bottom end of the top column and is threadedly connected with the top column.

8. The wafer handling device according to claim 7, wherein: The bearing column further includes a pre-tightening elastic member, which is disposed between the top column and the bottom column, and is configured to provide an upward pre-tightening force for the top column.

9. The wafer handling device according to claim 1, wherein: The wafer placing and retrieving device further comprises an active component, which is arranged at one end of the connecting component away from the supporting plate and is used to provide power for driving the connecting component to rise.

10. The wafer handling device according to claim 9, wherein: The active member includes a first driving part and a second driving part, the first driving part is used to directly contact the connecting member, the second driving part is arranged at the bottom end of the first driving part, and a pressure sensor is arranged between the first driving part and the second driving part.

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