Eccentricity adjusting device and method

Abstract

The invention provides an eccentric adjusting device and method.The eccentric adjusting device comprises a bearing support and a plurality of clamping assemblies which are used for clamping the periphery of a crystal bar and arranged side by side, each clamping assembly comprises two clamping arms and two clamping jaws, and the two clamping jaws are oppositely arranged and connected to the two clamping arms correspondingly; the two clamping arms are connected to the bearing support and can synchronously get close to and get away from each other in the first direction so that the clamping assembly can clamp and loosen the crystal bar through the two clamping jaws. In the multiple clamping assemblies, at least one clamping arm is provided with an adjusting mechanism, and the adjusting mechanism is connected with the clamping jaw and can drive the clamping jaw to move relative to the clamping arm in the first direction so as to adjust the clamping axis of the multiple clamping assemblies. Therefore, the structure is simple, the operation process is simple, the control logic is simple, and the working efficiency is improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to an eccentricity adjustment device and method. Background Art

[0002] Before being processed into wafers, single crystal silicon rods need to be rounded, cut and cut. Rounding is to process the main body of the single crystal silicon rod into a shape with equal diameter to ensure that the true roundness of the crystal rod meets the requirements. In order to meet the true roundness after processing, it is necessary to ensure that the coaxiality between the center of the crystal rod and the chuck meets the standard during loading. If the coaxiality is abnormally eccentric, the crystal rod will appear elliptical after rounding. Therefore, the eccentricity of the crystal rod needs to be adjusted before rounding.

[0003] At present, the rounding equipment uses a robot to clamp the crystal rod on the loading trolley and rotate it to place it on the processing machine. The crystal rod is clamped and rounded by the clamping mechanism (headstock and tailstock) on the processing machine. Due to abnormal bending of the crystal rod itself or improper loading, the crystal rod will be eccentric relative to the clamping mechanism. When adjusting the eccentricity, the operator needs to control the robot to repeatedly load and unload materials to correct the eccentricity of the wafer. The operation is cumbersome and the work efficiency is poor. Summary of the invention

[0004] In view of this, the present application provides an eccentricity adjustment device and method, which have a simple structure, simple operation procedures, and are easy to control.

[0005] In order to achieve the above objectives, this application provides the following technical solutions:

[0006] An eccentricity adjustment device comprises a bearing support and a plurality of clamping assemblies arranged side by side for clamping the outer periphery of a crystal rod, each of the clamping assemblies comprises two clamping arms and two clamping claws, the two clamping claws are arranged facing each other and are respectively connected to the two clamping arms, the two clamping arms are connected to the bearing support and can be synchronously approached and separated along a first direction, so that the clamping assembly clamps and releases the crystal rod through the two clamping claws;

[0007] Among the multiple clamping assemblies, at least one clamping arm is provided with an adjustment mechanism, which is connected to the clamping jaw and can drive the clamping jaw to move relative to the clamping arm along the first direction to adjust the clamping axes of the multiple clamping assemblies.

[0008] Optionally, the adjustment mechanism is provided on one of the clamping arms of the clamping assembly.

[0009] Optionally, each of the clamping assemblies includes a clamping screw having two threaded portions with opposite thread directions, and the two threaded portions are respectively threadedly connected to the two clamping arms, so that the two clamping arms can be driven to synchronously approach and move away along the first direction by rotating the clamping screw.

[0010] Optionally, the adjustment mechanism includes a driving member and a transmission structure, the driving member is arranged on the clamping arm, and the transmission structure is connected to the driving member and the clamping jaw so that the driving member can drive the clamping jaw to move relative to the clamping arm along the first direction.

[0011] Optionally, the transmission structure includes:

[0012] An adjusting screw rod extending along the first direction and drivingly connected to the driving member;

[0013] The adjusting nut is threadedly connected to the adjusting screw and connected to the clamping jaw; the driving member drives the adjusting screw to rotate relative to the adjusting nut, so that the adjusting nut is displaced along the adjusting screw, thereby driving the clamping jaw to displace along the first direction relative to the clamping arm.

[0014] Optionally, the adjusting screw and the adjusting nut are connected via a ball bearing thread.

[0015] Optionally, the clamping arm is provided with an adjustment hole extending along the first direction, the adjustment nut is slidably disposed in the adjustment hole, and the adjustment hole can prevent the adjustment nut from rotating relative to the clamping arm.

[0016] Optionally, a detection component is included, and the detection component is used to detect the eccentricity of the crystal rod on the clamping mechanism of the processing machine.

[0017] Optionally, a control component is included, and the detection component and the adjustment mechanism are both communicatively connected to the control component. The control component can enable the adjustment mechanism to drive the clamping jaw to move relative to the clamping arm along the first direction according to the eccentricity.

[0018] An eccentricity adjustment method, based on the eccentricity adjustment device as described in any one of the above items, comprising:

[0019] Obtaining the eccentricity of the crystal rod on the clamping mechanism of the processing machine;

[0020] Rotating the crystal rod so that the eccentric direction of the crystal rod is parallel to the first direction;

[0021] The adjusting mechanism drives the clamping jaw to move relative to the clamping arm along the first direction according to the eccentricity;

[0022] The clamping mechanism cancels the clamping of the crystal rod, and clamps the crystal rod through a plurality of clamping components, so that the crystal rod and the clamping mechanism are coaxial.

[0023] The eccentricity adjustment device and method provided by the present application has an adjustment mechanism connected between the clamping arm and the clamping claw, and the clamping claw can be driven to move relative to the clamping arm in a first direction through the adjustment mechanism. When the two clamping arms approach each other synchronously along the first direction, since the position of the clamping claw changes relative to the clamping arm where it is located, the axis of the crystal rod clamped by the clamping assembly through the two clamping claws will also change, and then the position of the clamping claw relative to the clamping arm can be adjusted through the adjustment mechanism, thereby adjusting the clamping axis of the clamping assembly. When the eccentricity of the crystal rod is adjusted, the crystal rod is set on the clamping mechanism of the working machine and clamped by the headstock and the tailstock of the clamping mechanism. The eccentricity of the crystal rod relative to the clamping mechanism is first determined, and the eccentricity direction of the crystal rod is adjusted to be consistent with the first direction. Then, the relative positions of the clamping claws and the clamping arms are adjusted through the adjustment mechanism according to the offset of the crystal rod, so that the clamping axes of multiple clamping components are consistent with the axis of the clamping mechanism. By clamping the crystal rod with multiple clamping components, the axis of the crystal rod can be adjusted to be consistent with the axis of the clamping mechanism, thereby completing the eccentricity adjustment of the crystal rod relative to the clamping mechanism. The operation process is simple, the control logic is simple, and it is conducive to improving work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0025] Figure 1 A side view of an eccentric adjustment device shown for some embodiments;

[0026] Figure 2 A bottom view of an eccentric adjustment device shown in some embodiments;

[0027] Figure 3 A front view of an eccentric adjustment device shown in some embodiments;

[0028] Figure 4 It is a schematic diagram showing some embodiments of rotating the eccentric direction of the crystal rod to be parallel to the first direction.

[0029] In the figure: 1. load-bearing bracket; 2. rotating shaft; 3. clamping arm; 4. clamping claw; 5. clamping screw; 6. driving member; 7. adjusting screw; 8. adjusting nut; 9. ball bearing; 10. crystal rod; 11. headstock; 12. tailstock. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0031] like Figure 1-Figure 4 As shown, an embodiment of the present application provides an eccentric adjustment device, including a bearing bracket 1 and a clamping assembly, wherein a rotating shaft 2 is provided on the bearing bracket 1, and the bearing bracket 1 can be driven to rotate and displace through the rotating shaft 2, thereby adjusting the position and angle of the bearing bracket 1, for example, the mechanical arm is connected to the bearing bracket 1 through the rotating shaft 2. The clamping assembly is connected to the bearing bracket 1, and the bearing bracket 1 can be driven to displace through the bearing bracket 1. The clamping assembly is used to clamp the outer periphery of the crystal rod 10, and multiple clamping assemblies are provided, and are arranged side by side along the axial direction of the crystal rod 10, so that multiple clamping assemblies can be clamped at different axial positions of the crystal rod 10 at the same time. For example, two clamping assemblies are provided, and they are respectively clamped at the outer peripheries of both ends of the crystal rod 10, or three clamping assemblies are provided, one of which is clamped at the middle outer periphery of the crystal rod 10, and the other two are respectively clamped at the outer peripheries of both ends of the crystal rod 10. The following is an example of two clamping assemblies being provided.

[0032] Each clamping assembly includes two clamping arms 3 and two clamping jaws 4. The two clamping jaws 4 are arranged facing each other and are respectively arranged on the two clamping arms 3. The two clamping arms 3 are connected to the supporting bracket 1. The supporting bracket 1 can drive the two clamping arms 3 to move so that the two clamping arms 3 are respectively located on both sides of the crystal rod 10. Moreover, the two clamping arms 3 can synchronously approach and move away from the supporting bracket 1 along the first direction, thereby driving the two clamping jaws 4 to approach and move away from the first direction. When the two clamping arms 3 approach along the first direction, the clamping assembly can clamp the crystal rod 10 through the two clamping jaws 4. When the two clamping arms 3 move away from each other along the first direction, the clamping assembly can release the crystal rod 10 through the two clamping jaws 4.

[0033] Specifically, the two clamping arms 3 are slidably connected to the supporting bracket 1, and the extending direction of the clamping arms 3 is perpendicular to the sliding direction of the clamping arms 3 (i.e., the first direction), and the distance between the two clamping arms 3 can be increased or decreased by sliding the two clamping arms 3. When the two clamping arms 3 are synchronously moved closer or farther away, the displacement distances of the two clamping arms 3 relative to the supporting bracket 1 are consistent, so that when the clamping assembly clamps the crystal rod 10 through the two clamping jaws 4, the axis of the crystal rod 10 (i.e., the clamping axis of the multiple clamping assemblies) remains consistent.

[0034] It should be noted that the first direction is Figure 1, 3 , X direction in 4. Figure 1 As shown, when the clamping assembly clamps the crystal rod 10 , the two clamping arms 3 are respectively located at the upper and lower sides of the crystal rod 10 . At this time, the first direction is the vertical direction, that is, the two clamping arms 3 can approach and move away from the supporting bracket 1 along the vertical direction.

[0035] In the above-mentioned multiple clamping assemblies, an adjustment mechanism is provided on one clamping arm 3 in at least one clamping assembly, wherein both clamping arms 3 in each clamping assembly may be provided with an adjustment mechanism, or one clamping arm 3 in one of the clamping assemblies may be provided with an adjustment mechanism. Here, preferably, one clamping arm 3 in each clamping assembly is provided with an adjustment mechanism, which can simplify the structure, optimize the adjustment logic and adjustment process, improve work efficiency, and improve the flexibility of adjustment.

[0036] The adjustment mechanism is connected between the clamping arm 3 and the clamping jaw 4. The adjustment mechanism can drive the clamping jaw 4 to move relative to the clamping arm 3 in the first direction. The displacement can be that the clamping jaw 4 moves away from the clamping arm 3 or that the clamping jaw 4 moves closer to the clamping arm 3. When the two clamping arms 3 approach each other synchronously in the first direction, since the position of the clamping jaw 4 changes relative to the clamping arm 3, the axis of the crystal rod 10 clamped by the clamping assembly through the two clamping jaws 4 will also change. Then, the position of the clamping jaw 4 relative to the clamping arm 3 can be adjusted by the adjustment mechanism, thereby adjusting the clamping axes of the multiple clamping assemblies.

[0037] When the eccentricity of the crystal rod 10 is adjusted, the crystal rod 10 is set on the clamping mechanism of the working machine and clamped by the headstock 11 and the tailstock 12 of the clamping mechanism. The eccentricity of the crystal rod 10 relative to the clamping mechanism is first determined, and the eccentricity direction of the crystal rod 10 is adjusted to be consistent with the first direction. Then, the relative positions of the clamping jaws 4 and the clamping arms 3 are adjusted through the adjustment mechanism according to the offset of the crystal rod 10, so that the clamping axes of the multiple clamping components are consistent with the axis of the clamping mechanism. By clamping the crystal rod 10 through multiple clamping components, the axis of the crystal rod 10 can be adjusted to be consistent with the axis of the clamping mechanism, thereby completing the eccentricity adjustment of the crystal rod 10 relative to the clamping mechanism. The operation process is simple, the control logic is simple, and it is conducive to improving work efficiency.

[0038] In this solution, each clamping assembly includes a clamping screw 5, which has two threaded portions arranged along the axial direction, and the thread directions of the external threads provided on the two threaded portions are opposite, for example, the two threaded portions are symmetrically arranged relative to the clamping screw 5. The two threaded portions of the clamping screw 5 are respectively threadedly matched with the two clamping arms 3, for example, the clamping arm 3 is provided with an internal threaded hole, and the threaded portion is connected to the internal threaded hole. In this way, by rotating the clamping screw 5 relative to the clamping arm 3, the two clamping arms 3 can be driven to approach or move away along the first direction, thereby causing the clamping assembly to clamp or release the crystal rod 10.

[0039] In some embodiments, the adjustment mechanism includes a driving member 6 and a transmission structure, wherein the driving member 6 is connected to the clamping arm 3, and the transmission structure is transmission-connected between the driving member 6 and the clamping jaw 4, and is used to transmit the output action of the driving member 6 to the clamping jaw 4, and drive the clamping jaw 4 to move relative to the clamping arm 3 along the first direction. Among them, the driving member 6 can output a rotational action, and the transmission structure is used to convert the rotational action into a linear action along the first direction, so as to drive the clamping jaw 4 to move along the first direction. In addition, the driving member 6 can also output a linear action, and the transmission structure is used to convert the linear action into a linear action along the first direction, so as to drive the clamping jaw 4 to move along the first direction.

[0040] The transmission structure is configured as a screw nut, including an adjusting screw 7 and an adjusting nut 8, wherein the extending direction of the adjusting screw 7 is parallel to the first direction, and the adjusting screw 7 is connected to the output end of the driving member 6 by transmission, such as the driving member 6 is configured as a motor, which is used to drive the adjusting screw 7 to rotate along its own axis. The adjusting nut 8 is threadedly connected to the adjusting screw 7, and the adjusting nut 8 is connected to the clamping jaw 4. During the adjustment process, the driving member 6 can drive the adjusting screw 7 to rotate relative to the adjusting nut 8, so that the adjusting nut 8 is displaced along the axis of the adjusting screw 7, and the adjusting nut 8 drives the clamping jaw 4 to displace along the first direction relative to the clamping arm 3. In this way, the transmission structure adopts a screw nut form, has a simple structure, is easy to operate, and has the advantages of high precision, self-locking performance, high efficiency, long life, reversibility, strong bearing capacity, stable operation, easy maintenance, strong adaptability and high cost-effectiveness.

[0041] In some preferred embodiments, the clamping arm 3 is provided with an adjustment hole, the adjustment hole extends along the first direction, and the adjustment nut 8 is slidably connected in the adjustment hole. The adjustment hole can prevent the adjustment nut 8 from rotating relative to the clamping arm 3, thereby ensuring that the adjustment nut 8 can smoothly move with the adjustment screw 7 and stably and reliably slide in the adjustment hole. For example, the outer peripheral shapes of the adjustment nut 8 and the adjustment hole match each other and are both set to be polygonal.

[0042] The adjusting screw and the adjusting nut 8 are threadedly connected via a ball bearing 9, so that the transmission structure forms a ball screw pair. In this way, the transmission structure has the characteristics of high transmission efficiency, small friction loss and high precision.

[0043] In some embodiments, the eccentricity adjustment device includes a detection component, which is used to detect the eccentricity of the crystal rod 10 on the clamping mechanism of the processing machine, so as to adjust the clamping jaws 4 on the clamping component according to the eccentricity, and adjust the crystal rod 10 and the clamping mechanism to be coaxial through multiple clamping components.

[0044] The eccentricity adjustment device further includes a control component, and the detection component and the adjustment mechanism (specifically, the driving member) are both connected to the control component in communication, and the control component is used to send a control instruction to the adjustment mechanism according to the eccentricity obtained by the detection component, so that the adjustment mechanism drives the clamping jaw 4 to move relative to the clamping arm 3 along the first direction. In this way, the eccentricity of the crystal rod 10 can be automatically adjusted through the control component, further improving work efficiency and saving labor costs.

[0045] The embodiment of the present application provides an eccentricity adjustment method, based on the eccentricity adjustment device in the above embodiment, comprising the following steps:

[0046] S1, obtaining the eccentricity of the crystal rod 10 on the clamping mechanism of the processing machine;

[0047] In step S1, the eccentricity of the crystal ingot 10 can be automatically obtained by the detection component, or the eccentricity of the crystal ingot 10 can be manually measured. The eccentricity can be set as the eccentricity angle of the axis of the crystal ingot 10 relative to the axis of the clamping mechanism, or can be set as the offset distance of a specific position on the crystal ingot 10 (such as the two ends of the crystal ingot 10) relative to the axis of the clamping mechanism.

[0048] S2, rotating the crystal rod 10 so that the eccentric direction of the crystal rod 10 is parallel to the first direction;

[0049] In step S2, since the clamping mechanism needs to maintain the clamping effect on the crystal rod 10, the crystal rod 10 needs to be driven to rotate by the headstock 11 and the tailstock 12 of the clamping mechanism so that the eccentricity direction of the crystal rod 10 is parallel to the first direction, that is, the eccentricity direction of the crystal rod 10 is consistent with the displacement direction of the clamping arm 3 and the clamping jaw 4 in the clamping assembly, so as to facilitate the adjustment of the eccentricity of the crystal rod 10 by the clamping jaw 4 and the clamping arm 3.

[0050] S3, the adjustment mechanism drives the clamping jaw 4 to move relative to the clamping arm 3 along the first direction according to the eccentricity;

[0051] In step S3, the driving member 6 in the adjustment mechanism drives the adjusting screw 7 to rotate relative to the adjusting nut 8, so that the adjusting nut 8 is displaced along the axis of the adjusting screw 7 (i.e., the first direction), and drives the clamping jaw 4 to displace along the first direction relative to the clamping arm 3. Here, the first direction is taken as an example for explanation. If the first position on the crystal rod 10 is offset upward relative to the clamping mechanism, it is necessary to adjust the clamping assembly for clamping the periphery of the first position, so that the clamping jaw 4 on the clamping assembly is displaced downward by a corresponding distance relative to the clamping arm 3, so that the clamping axes of the multiple clamping assemblies match the axes of the clamping mechanism; if the first position on the crystal rod 10 is offset downward relative to the clamping mechanism, it is necessary to adjust the clamping assembly for clamping the periphery of the first position, so that the clamping jaw 4 on the clamping assembly is displaced upward by a corresponding distance relative to the clamping arm 3, so that the clamping axes of the multiple clamping assemblies match the axes of the clamping mechanism.

[0052] S4. The clamping mechanism stops clamping the crystal rod 10, and clamps the crystal rod 10 through a plurality of clamping components, so that the crystal rod 10 is coaxial with the clamping mechanism.

[0053] In step S4, the clamping effect of the clamping mechanism on the crystal rod 10 is reduced or cancelled, and the crystal rod 10 is clamped by multiple clamping components at the same time. Since the clamping axes of the multiple clamping components match the axes of the clamping mechanism, the axis of the crystal rod 10 can be adjusted by switching the crystal rod 10 to be clamped by multiple clamping components, so that the axis of the crystal rod 10 matches the axis of the clamping mechanism coaxially. In this way, the eccentricity adjustment of the crystal rod 10 is achieved, and the control logic and operation procedures are simple, which is convenient for operation and maintenance.

[0054] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, not for limitation, and the above details do not limit the present application to being implemented by adopting the above specific details.

[0055] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagram. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open words, referring to "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the words "and / or" and can be used interchangeably with them, unless the context clearly indicates otherwise. The words "such as" used here refer to the phrase "such as but not limited to", and can be used interchangeably with them.

[0056] It should also be noted that in the apparatus, device and method of the present application, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present application.

[0057] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0058] It should be understood that the qualifiers "first", "second", "third", "fourth", "fifth" and "sixth" used in the description of the embodiments of the present application are only used to more clearly explain the technical solutions and cannot be used to limit the scope of protection of the present application.

[0059] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. An eccentric adjustment device, characterized in that: It comprises a bearing support and a plurality of clamping assemblies arranged side by side for clamping the outer periphery of the crystal rod, each of the clamping assemblies comprises two clamping arms and two clamping claws, the two clamping claws are arranged facing each other and are respectively connected to the two clamping arms, the two clamping arms are connected to the bearing support and can be synchronously approached and separated along a first direction, so that the clamping assembly clamps and releases the crystal rod through the two clamping claws; Among the multiple clamping assemblies, at least one clamping arm is provided with an adjustment mechanism, which is connected to the clamping jaw and can drive the clamping jaw to move relative to the clamping arm along the first direction to adjust the clamping axes of the multiple clamping assemblies.

2. The eccentric adjustment device according to claim 1, characterized in that: The adjustment mechanism is provided on one of the clamping arms of the clamping assembly.

3. The eccentric adjustment device according to claim 1, characterized in that: Each of the clamping assemblies comprises a clamping screw having two threaded portions with opposite thread directions, the two threaded portions being threadedly connected to the two clamping arms respectively, so that the two clamping arms can be driven to synchronously approach and move away from each other along the first direction by rotating the clamping screw.

4. The eccentricity adjustment device according to claim 1, characterized in that: The adjustment mechanism includes a driving member and a transmission structure, wherein the driving member is arranged on the clamping arm, and the transmission structure is transmission-connected between the driving member and the clamping jaw, so that the driving member can drive the clamping jaw to move relative to the clamping arm along the first direction.

5. The eccentric adjustment device according to claim 4, characterized in that: The transmission structure comprises: An adjusting screw rod extending along the first direction and drivingly connected to the driving member; The adjusting nut is threadedly connected to the adjusting screw and connected to the clamping jaw; the driving member drives the adjusting screw to rotate relative to the adjusting nut, so that the adjusting nut is displaced along the adjusting screw, thereby driving the clamping jaw to displace along the first direction relative to the clamping arm.

6. The eccentric adjustment device according to claim 5, characterized in that: The adjusting screw rod and the adjusting nut are connected by a ball bearing thread.

7. The eccentric adjustment device according to claim 5, characterized in that: The clamping arm is provided with an adjustment hole extending along the first direction, the adjustment nut is slidably arranged in the adjustment hole, and the adjustment hole can prevent the adjustment nut from rotating relative to the clamping arm.

8. The eccentricity adjustment device according to claim 1, characterized in that: The invention comprises a detection component, wherein the detection component is used for detecting the eccentricity of the crystal rod on the clamping mechanism of the processing machine.

9. The eccentric adjustment device according to claim 8, characterized in that: A control component is included, and the detection component and the adjustment mechanism are both in communication connection with the control component. The control component can enable the adjustment mechanism to drive the clamping jaw to move relative to the clamping arm along the first direction according to the eccentricity.

10. An eccentricity adjustment method, characterized in that: The eccentric adjustment device according to any one of claims 1 to 9 comprises: Obtaining the eccentricity of the crystal rod on the clamping mechanism of the processing machine; Rotating the crystal rod so that the eccentric direction of the crystal rod is parallel to the first direction; The adjusting mechanism drives the clamping jaw to move relative to the clamping arm along the first direction according to the eccentricity; The clamping mechanism cancels the clamping of the crystal rod, and clamps the crystal rod through a plurality of clamping components, so that the crystal rod and the clamping mechanism are coaxial.

Images