Cathode sputtering object shielding device

Abstract

The invention relates to a cathode sputtering object shielding device, and belongs to the technical field of magnetron sputtering. The single-side pressing strip is used for the outer side edges of the target materials, the double-side pressing strip is used for fixing the inner side edges of the adjacent target materials at the same time, the single-side pressing strip and the double-side pressing strip are each provided with a set of countersunk mounting holes, and stainless steel screws are installed in the countersunk mounting holes so that the single-side pressing strip, the double-side pressing strip and a cathode base can be fixedly connected and the target materials can be clamped, pressed and fixed; the outer side of the single-side pressing strip is connected with a covering piece, and the covering piece covers the area where the countersunk mounting holes of the single-side pressing strip are located. The double-side pressing strip is provided with a set of inverted-T-shaped grooves formed in the length direction of the double-side pressing strip, fixing bolts with the stud ends facing upwards and exposed are installed in the inverted-T-shaped grooves, caps are connected to the fixing bolts in a threaded mode, a protection plate is clamped between the caps and the double-side pressing strip, and the protection plate covers the countersunk mounting holes of the double-side pressing strip and the areas where the inverted-T-shaped grooves are located. The target sputtering object is prevented from covering the fastener, so that the target is replaced, and the fastener is detached simply and easily.

Description

Technical Field

[0001] The invention relates to the technical field of magnetron sputtering, and in particular to a cathode sputtering object shielding device. Background Art

[0002] In the practical application of magnetron sputtering technology, magnetron sputtering planar cathode has become a commonly used magnetron sputtering core equipment. Magnetron sputtering technology is a technology that uses energetic particles to bombard the target surface in a vacuum, so that the bombarded particles are deposited on the substrate. The principle is that the substrate is used as the anode, argon or other inert gas is introduced into the vacuum chamber, and the cathode (target) generates glow discharge under the action of negative DC high voltage or radio frequency voltage. The ionized argon ions bombard the target surface, causing the target atoms to sputter and deposit on the substrate to form a thin film.

[0003] When target atoms are deposited on the substrate, they will also be deposited on the target pressure strips and fixing screws near the target. In this way, a thick layer of target sputtering will be deposited on the pressure strips and hexagon socket fixing screws in one target cycle, blocking the hexagon socket holes of the screws and the countersunk holes on the pressure strips, making it difficult to disassemble when replacing the target, affecting maintenance efficiency and destroying the owner's experience. Summary of the invention

[0004] In order to solve the technical problem of difficulty in disassembling and replacing target materials in the prior art, the present invention provides a cathode sputtering material shielding device.

[0005] It adopts the following technical solutions: A cathode sputtering material shielding device comprises a single-sided pressure strip for fixing the outer edge of a target material, and a double-sided pressure strip for simultaneously fixing the inner edges of adjacent target materials, wherein a group of countersunk mounting holes are provided on the single-sided pressure strip and the double-sided pressure strip, and stainless steel screws are installed in the countersunk mounting holes to form a fixed connection between the single-sided pressure strip and the double-sided pressure strip and a cathode base and clamp and fix the target material; a covering piece is connected to the outer side of the single-sided pressure strip, and the covering piece covers the area where the countersunk mounting holes of the single-sided pressure strip are located; the double-sided pressure strip has a group of inverted T-grooves arranged along its length direction, and fixing bolts with stud ends facing upward and exposed are installed in the inverted T-grooves, and caps are screwed on the fixing bolts, and a protective plate is sandwiched between the cap and the double-sided pressure strip, and the protective plate covers the countersunk mounting holes of the double-sided pressure strip and the area where the inverted T-grooves are located.

[0006] Furthermore, the double-sided pressure strip is composed of two groups of single-sided pressure strips placed in parallel and side by side, and the inverted T-shaped groove is located at the joint of the two single-sided pressure strips.

[0007] Furthermore, the covering member is a plate body with an inverted L-shaped cross-section composed of a connected horizontal plate and a vertical plate, and the horizontal plate covers the area where the countersunk mounting hole of the single-side pressure strip is located.

[0008] Furthermore, the distance between the horizontal plates and the corresponding targets is 2-4 mm.

[0009] Furthermore, the vertical plate is provided with a mounting through hole, the cathode base is connected with an insulating mounting assembly seat, and the connecting bolts are inserted into the mounting through hole and screwed with the insulating mounting assembly seat so that the vertical plate is insulated and mounted on the cathode base.

[0010] Furthermore, the insulating mounting assembly seat includes a rigid seat body, a positioning hole and a threaded hole are provided in the rigid seat body, an insulating sleeve is installed in the positioning hole, a screw is provided in the insulating sleeve, the screw passes through the rigid seat body and is threadedly connected to the cathode base, the stud end of the screw is arranged outward and is insulated from the rigid seat body by the insulating sleeve, the threaded hole is arranged perpendicular to the axis of the insulating sleeve, and an insulating plate is sandwiched between the rigid seat body and the cathode base in the direction of the screw connection.

[0011] Furthermore, a cover body covering the positioning hole is clamped on the rigid base body.

[0012] Furthermore, the cover cap has at least a pair of parallel vertical surfaces for tool clamping and disassembly.

[0013] Compared with the prior art, the present invention has the following beneficial effects: The device provides a covering piece to cover the countersunk mounting hole of the single-sided pressure strip and a group of inverted T-slots on the double-sided pressure strip, and utilizes fixing bolts with the stud ends facing upwards installed in the inverted T-slots to clamp and fix the caps and the protective plates of the double-sided pressure strips through the action of the connected caps, covering the countersunk mounting holes of the double-sided pressure strips and the areas where the inverted T-slots are located, so as to prevent the target material sputtering from covering the fixing bolts 43 and the heads of the stainless steel screws 32, thereby making it simpler and easier to replace the target material and disassemble the fasteners. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 is a schematic diagram of a cathode sputtering shielding device according to an embodiment of the present invention; Figure 2 yes Figure 1 A schematic diagram of the cross section enlarged along the AA direction; Figure 3 yes Figure 1 A schematic diagram of the cross section enlarged along the BB direction; Figure 4 It is a schematic diagram of the exploded structure of the insulating mounting assembly seat in the embodiment of the present invention.

[0015] Explanation of the reference numerals in the accompanying drawings: 1. cathode base; 2. target material; 3. single-sided pressure strip; 31. countersunk mounting hole; 32. stainless steel screw; 4. double-sided pressure strip; 41. inverted T-slot; 43. fixing bolt; 44. cover cap; 44a. parallel vertical surface; 5. protective plate; 6. cover; 61. horizontal plate; 62. vertical plate; 63. mounting through hole; 7. insulating mounting assembly seat; 71. rigid seat body; 72. positioning hole; 73. threaded hole; 74. insulating sleeve; 75. screw; 76. insulating plate; 77. cover body; 8. connecting bolt. DETAILED DESCRIPTION

[0016] In order to make the present invention more clear, a cathode sputtering shielding device of the present invention is further described below in conjunction with the accompanying drawings. The specific embodiments described here are only used to explain the present invention and are not used to limit the present invention.

[0017] like Figures 1 to 3 As shown, a cathode sputtering shielding device is used for shielding fixed target structure. Specifically, two groups of target materials 2 arranged side by side are provided on the upper end face of a cathode base 1 with a "mountain" shaped cross section. The target material 2 is rectangular as a whole and is arranged along the length direction of the cathode base 1, and its two side edges have stepped edges. Single-sided pressure strips 3 are provided on the two outer sides of the two groups of target materials 2, and common double-sided pressure strips 4 are provided on the two adjacent inner sides. The single-sided pressure strips 3 and the double-sided pressure strips 4 both have shapes adapted to the stepped edges of the target materials 2, and a group of countersunk mounting holes 31 are provided on the single-sided and double-sided pressure strips along their length directions. The countersunk mounting holes 31 are connected to the upper end face of the cathode base 1 by inserting stainless steel screws 32, and the single-sided pressure strips 3 and the double-sided pressure strips 4 are clamped on the corresponding side edges of the target materials 2, so that the target materials 2 are fixedly connected.

[0018] The outer side of the single-sided pressure strip 3 is detachably connected with a cover 6, which covers the area where the countersunk mounting hole 31 of the single-sided pressure strip 3 is located, that is, covers the head of the stainless steel screw 32. Preferably, the cover 6 is a plate body with an inverted L-shaped cross-section composed of a connected horizontal plate 61 and a vertical plate 62, the horizontal plate 61 covers the area where the countersunk mounting hole 31 of the single-sided pressure strip 3 is located, and the distance between the horizontal plate 61 and the corresponding nearest target is 2-4mm. At this distance, under the premise of avoiding contact between the cover 6 and the target, the accumulation of target sputtering on the head of the stainless steel screw 32 is reduced.

[0019] The double-sided pressure strip 4 has a group of inverted T-shaped grooves 41 arranged along its length direction. The inverted T-shaped grooves 41 are staggered with the countersunk mounting holes 31 in position, and are connected from top to bottom. The length direction of the inverted T-shaped grooves 41 is consistent with the length direction of the double-sided pressure strip 4. A fixing bolt 43 with the stud end facing upward and exposed is installed in the inverted T-shaped groove 41. The bolt head of the fixing bolt 43 is just stuck in the inverted T-shaped groove 41 to form an upper limit and play an anti-rotation role. Here, the fixing bolt 43 is a stainless steel T-shaped bolt. A cap 44 is screwed on the fixing bolt 43, and a protective plate 5 is sandwiched between the cap 44 and the double-sided pressure strip 4, that is, a through hole is provided on the protective plate 5, and the stud end of the fixing bolt 43 passes through the corresponding through hole and is screwed to the cap 44. In this way, the protective plate 5 is fixed and tightly attached to the upper surface of the double-sided pressure strip 4, and at the same time covers the area where the countersunk mounting holes 31 and the inverted T-shaped grooves 41 of the double-sided pressure strip 4 are located, thereby preventing the target material sputtering from covering the fixing bolt 43 and the stainless steel screw 32 head.

[0020] Here, the double-sided pressure strip 4 can also be composed of two groups of single-sided pressure strips arranged in parallel, and the inverted T-shaped groove 41 is located at the joint of the two single-sided pressure strips.

[0021] Considering the installation and removal of the cover cap 44, the cover cap 44 has at least a pair of parallel vertical surfaces 44a for tool clamping and removal, so that the tool can be stably clamped on the cover cap 44 to drive it to rotate during installation or removal.

[0022] In some embodiments, the cover member 6 is connected to the lower area of ​​the cathode base 1, and the connection is insulated. Specifically, a mounting through hole 63 is provided on the vertical plate 62 of the cover member 6, and an insulating mounting assembly seat 7 is connected to the bottom of the cathode base 1. The connecting bolt 8 penetrates the mounting through hole 63 and is screwed to the insulating mounting assembly seat 7, so that the vertical plate 62 is insulated and mounted on the cathode base 1.

[0023] The insulating mounting assembly seat 7 includes a rigid seat body 71. Figure 2 , Figure 4As shown, the upper and lower sides of the rigid base 71 have a pair of vertically penetrating and mutually parallel positioning holes 72, and the positioning holes 72 are stepped holes with a larger upper portion and a smaller lower portion. A threaded hole 73 is provided on the front side of the rigid base 71, and the threaded hole 73 is a blind hole structure, and the threaded hole 73 is used in conjunction with the connecting bolt 8. An insulating sleeve 74 of a matching shape is installed in each positioning hole 72, and the two form a limit through their shapes. The inner hole of the insulating sleeve 74 is also a stepped hole, and a screw 75 passing through the lower end surface of the rigid base 71 is installed in the hole, and the screw 75 can be completely sunk into the insulating sleeve 74. The threaded end of the screw 75 is screwed to the cathode base 1, and in the connection direction of the screw 75, an insulating plate 76 is sandwiched between the rigid base 71 and the cathode base 1, and the rigid base 71 is insulated and connected to the cathode base 1 through the connecting action of the screw 75. Here, considering that the rigid seat body 71 is hung upside down on the bottom surface of the rigid seat body 71, the cover member 6 is located on both sides of the rigid seat body 71, so the threaded hole 73 is set perpendicular to the axis of the screw 75, that is, the positioning hole 72 is perpendicular to the axis of the threaded hole 73, so as to realize the position layout of the cover member 6. Of course, a cover body 77 covering the positioning hole 72 can also be clamped on the rigid seat body 71 to reduce foreign matter from entering the area where the screw 75 is located, which is convenient for disassembly and maintenance, and also reduces the probability of electrical conduction between the screw 75 and the rigid seat body 71.

[0024] In this embodiment, the insulating sleeve and the insulating plate are both made of peek polyetheretherketone, a special engineering plastic, as the insulating material, which has excellent properties such as easy processing and high mechanical strength. Of course, other conventional insulating materials can also be used in the materials of the insulating sleeve and the insulating plate, which are only used as examples here.

[0025] In general, the present invention has a simple structure, is easy to process, and has low cost. After actual testing, it has a good effect in shielding sputtering objects, and it is convenient for owners to disassemble and replace the target material.

[0026] The above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the embodiments here. However, these obvious changes or modifications derived from the essential spirit of the present invention still fall within the scope of protection of the present invention.

Claims

1. A cathode sputtering material shielding device, comprising a single-sided pressure strip (3) for fixing the outer side of a target material (2), and a double-sided pressure strip (4) for fixing the inner side of an adjacent target material (2), wherein a group of countersunk mounting holes (31) are provided on the single-sided pressure strip and the double-sided pressure strip, and stainless steel screws (32) are installed in the countersunk mounting holes (31) so that the single-sided pressure strip and the double-sided pressure strip are fixedly connected to the cathode base (1) and the target material (2) is clamped and fixed; characterized in that: The outer side of the single-sided pressure strip (3) is connected to a cover member (6), and the cover member (6) covers the area where the countersunk mounting hole (31) of the single-sided pressure strip (3) is located; the double-sided pressure strip (4) has a group of inverted T-shaped grooves (41) arranged along its length direction, and a fixing bolt (43) with the stud end facing upward and exposed is installed in the inverted T-shaped groove (41), and a cover cap (44) is screwed on the fixing bolt (43), and a protective plate (5) is sandwiched between the cover cap (44) and the double-sided pressure strip (4), and the protective plate (5) covers the area where the countersunk mounting hole (31) and the inverted T-shaped groove (41) of the double-sided pressure strip (4) are located.

2. A cathode sputtering shielding device according to claim 1, characterized in that: The double-sided pressure strip (4) is composed of two groups of single-sided pressure strips placed in parallel and side by side, and the inverted T-shaped groove (41) is located at the joint of the two single-sided pressure strips.

3. A cathode sputtering shielding device according to claim 2, characterized in that: The covering member (6) is a plate body with an inverted L-shaped cross-section composed of a connected transverse plate (61) and a vertical plate (62), and the transverse plate (61) covers the area where the countersunk mounting hole (31) of the single-sided pressure strip (3) is located.

4. A cathode sputtering shielding device according to claim 3, characterized in that: The distance between the horizontal plates (61) and the corresponding target materials is 2-4 mm.

5. The cathode sputtering shielding device according to claim 3, characterized in that: The vertical plate (62) is provided with a mounting through hole (63), the cathode base (1) is connected to an insulating mounting assembly seat (7), and the connecting bolts (8) are inserted into the mounting through hole (63) and are screwed to the insulating mounting assembly seat (7) so that the vertical plate (62) is insulated and mounted on the cathode base (1).

6. The cathode sputtering shielding device according to claim 5, characterized in that: The insulating mounting assembly seat (7) comprises a rigid seat body (71), a positioning hole (72) and a threaded hole (73) being provided in the rigid seat body (71), an insulating sleeve (74) being installed in the positioning hole (72), a screw (75) being provided in the insulating sleeve (74) and passing through the rigid seat body (71) and being screwed to the cathode seat (1), the stud end of the screw (75) being arranged outward and being insulated from the rigid seat body (71) by the insulating sleeve (74), the threaded hole (73) being arranged perpendicular to the axis of the insulating sleeve (74), and an insulating plate (76) being sandwiched between the rigid seat body (71) and the cathode seat (1) in the connection direction of the screw (75).

7. The cathode sputtering shielding device according to claim 6, characterized in that: The rigid base body (71) is also clamped with a cover body (77) that covers the positioning hole (72).

8. A cathode sputtering shielding device according to any one of claims 1 to 7, characterized in that: The cover cap (44) has at least a pair of parallel vertical surfaces (44a) for tool clamping and disassembly.

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