Online swing type adjustable magnetic bar for magnetron sputtering

Abstract

The invention discloses an on-line swing type adjustable magnetic rod for magnetron sputtering. The on-line swing type adjustable magnetic rod comprises a shell assembly, a magnet yoke assembly and an adjusting assembly. The shell assembly is provided with a containing cavity, and the magnet yoke assembly is located below the shell assembly. The adjusting assemblies are independently controlled, are arranged in the length direction of the magnet yoke assembly and are arranged in the containing cavity. The output end of each adjusting assembly is perpendicular to the magnet yoke assembly to do linear reciprocating motion, penetrates out of the side wall of the containing cavity towards the side where the magnet yoke assembly is located and is hinged to the magnet yoke assembly so as to drive the magnet yoke assembly to partially or completely change the distance between the magnet yoke assembly and the surface of the sputtering target. The multiple adjusting assemblies are arranged, the adjusting assemblies and the magnet yoke assemblies are provided with the multiple connecting point positions, the output ends of the adjusting assemblies act to drive the magnet yoke assemblies at the corresponding point positions to locally change the distance between the magnet yoke assemblies and the surface of the sputtering target (close to or away from the surface of the sputtering target), and then the local magnetic field intensity is adjusted; the real-time online control on the coating thickness of the surface of the sputtering target is realized, so that the coating thickness of a coating product tends to be consistent.

Description

Technical Field

[0001] The invention belongs to the technical field of magnetron sputtering, and in particular relates to an online swinging adjustable magnetic rod for magnetron sputtering. Background Art

[0002] Physical vapor deposition using sputtering has become a standard technique for customizing the properties of, for example, glass sheets or other rigid or flexible materials. "Sputtering" refers to the ballistic ejection of atoms of the coating material from a sputtering target using positively charged ions, which are accelerated by an electric field directed toward the negatively charged sputtering target (usually argon ions). Positive ions are formed by impact ionization in the low-pressure gas phase. The ejected atoms impact the substrate to be coated, where a dense, well-adhered coating is formed. The disadvantage is that the magnetron must be turned on, so the vacuum must be removed to allow adjustment, and the vacuum must be reapplied after the adjustment is completed. This is very time-consuming. One of the process problems faced is that a magnetic field generator must be included in the sputtering target. The magnetic field generator, which is oriented to point to the substrate to be coated, is usually kept stationary while the cylindrical sputtering target rotates in front of it. High-performance permanent magnets based on iron-neodymium-boron (Fe-Nd-B) alloys or cobalt-samarium (Co-Sm) alloys are used to generate the magnetic field. Because the magnetic field component parallel to the sputtering target surface determines the range of electrons in the plasma, it is important to control this component along the length of the tube. Unfortunately, the magnetic induction intensity of this component (in Tesla) generally decreases at least with the square of the distance to the magnetic field generator and is therefore very sensitive to the position of the magnetic field generator relative to the sputtering target surface. The distance between the sputtering target surface and the magnetic field generator must therefore be well controlled, otherwise the plasma will exhibit local intensity variations, which in turn can lead to non-uniform coating profiles on the substrate.

[0003] In the field of magnetron sputtering, the most widely used target is the cylindrical target, whose inner diameter is 125mm. In order to obtain the best uniformity of magnetron sputtering products, online adjustable magnetic rods have become an indispensable choice for the production of high-end LowE products, especially in the LowE market. Summary of the invention

[0004] The invention aims to provide an online swingable adjustable magnetic rod for magnetron sputtering, which is intended to solve the problem.

[0005] To solve the above technical problems, the purpose of the present invention is achieved as follows: An online swingable adjustable magnetic bar for magnetron sputtering includes a shell component, a yoke component, and an adjustment component; the shell component has a containing chamber, and the yoke component is located outside the shell component; the adjustment component has multiple and independently controlled components, which are arranged along the length direction of the yoke component and are arranged in the containing chamber, and the output end thereof passes through the side wall of the containing chamber to the side where the yoke component is located, and is hinged with the yoke component, driving the yoke component to reciprocate linearly, so as to drive the yoke component to partially or completely change the distance from the sputtering target surface. By setting multiple adjustment components, the adjustment component and the yoke component have multiple connection points, and the output end of the adjustment component moves, driving the yoke component at the corresponding point to partially change the distance from the sputtering target surface to get closer or farther, thereby adjusting the local magnetic field strength, and realizing real-time online control of the coating thickness on the sputtering target surface, so that the coating thickness of the coating product tends to be consistent, which is used to improve the quality of the coating product without removing the vacuum, and can significantly improve the production efficiency.

[0006] On the basis of the above scheme and as a preferred scheme of the above scheme: it also includes a swing assembly, a first terminal assembly and a second terminal assembly; the swing assembly drives the magnetic bar to swing along its rotation axis; the first terminal assembly and the second terminal assembly are respectively arranged at both ends of the housing assembly and are coaxial with the swing axis of the magnetic bar. The first terminal assembly and the second terminal assembly are arranged coaxially with the swing axis of the magnetic bar, which will not have an adverse effect on the swing of the magnetic bar and simplify the device structure.

[0007] On the basis of the above scheme and as a preferred scheme of the above scheme: it also includes a main control component; the first terminal component is a water inlet power supply connector component, and the second terminal component is an optical fiber communication connector component; the control signal is transmitted to the main control component via the first terminal component and / or the second terminal component. Since the entire magnetic bar is in motion, and the second terminal component is coaxial with the swing axis of the magnetic bar, that is to say, the external optical communication end and the signal receiving end of the second terminal component are also located on the same axis, then no matter how the magnetic bar swings, the optical signal can be reliably transmitted, and compared with the traditional cable communication method, it avoids the problem of signal failure caused by cable twisting or fatigue damage during the activity of the magnetic bar.

[0008] On the basis of the above scheme and as a preferred scheme of the above scheme: it also includes an energy storage component, the energy storage component supplies power to the swing component, the main control component and the adjustment component; the energy storage component is arranged in the accommodating chamber. Through the energy storage component built into the housing component, it is possible to maintain continuous and stable power supply to the adjustment component and the swing component, thereby ensuring the stability and reliability of the operation of the entire device.

[0009] On the basis of the above scheme and as a preferred scheme of the above scheme: during the operation of magnetron sputtering and / or the interval of magnetron sputtering, the external power supply charges the energy storage component through the first terminal component. Since the swing component and the adjustment component consume the power of the energy storage component during the magnetron sputtering process, if the power is too low, it may be difficult to maintain reliable operation. Therefore, the energy storage component is continuously or intermittently charged by the external power supply to replenish its power in time.

[0010] On the basis of the above scheme and as a preferred scheme of the above scheme: the housing assembly includes an outer shell and an upper cover plate group, the upper end of the outer shell is provided with an opening, the opening connects the accommodating chamber with the outside; the upper cover plate group is fixedly installed at the opening of the outer shell to close the accommodating chamber. By setting the upper opening, it is convenient to install the adjustment component, energy storage component, swing component, etc. in the accommodating chamber, and the opening is closed by the upper cover plate group to isolate it from the outside during the magnetron sputtering process, so as to prevent water or other media from entering the accommodating chamber and causing damage to the equipment.

[0011] On the basis of the above scheme and as a preferred scheme of the above scheme: the adjustment component also includes a mounting seat, the outer shell is provided with a corresponding channel on the side facing the yoke assembly, the adjustment component is installed on the mounting seat, and its output end passes downward from the mounting seat, passes through the channel and is connected to the yoke assembly; the mounting seat closes the channel, and a seal is provided between the output end of the adjustment component and the mounting seat. The provision of the mounting seat facilitates the installation of the adjustment component on the one hand, and is conducive to sealing the channel on the other hand, while achieving the flexible movement of the output end of the adjustment component while maintaining the seal between the two. Of course, when the seal is aged or leaks, it can also be more convenient to disassemble and replace.

[0012] On the basis of the above scheme and as a preferred scheme of the above scheme: the adjustment assembly includes a servo motor, a transmission assembly, a nut and a screw; the axis of the servo motor is perpendicular to the axis of the screw, and the screw is hinged with the yoke assembly after passing through the mounting seat and the channel; the servo motor drives the screw to reciprocate along its axial straight line through the transmission assembly and the nut. By setting the servo motor perpendicular to the axis of the screw, the size of the entire adjustment assembly can be significantly shortened, making it easier to install it into a housing assembly with a small space.

[0013] On the basis of the above solution and as a preferred solution of the above solution: the yoke assembly includes a connecting piece, and the connecting piece is detachably connected to the screw rod. The detachable connection structure is conducive to assembly during the production process, and is also conducive to disassembly during later maintenance.

[0014] On the basis of the above scheme and as a preferred scheme of the above scheme: the connecting piece is provided with a mounting hole, the screw rod is inserted into the mounting hole, a pin shaft passes through the connecting piece and the screw rod from the side of the connecting piece, and the pin shaft is axially limited. The connecting structure of the pin shaft is simple and reliable, and the disassembly and assembly are very simple.

[0015] On the basis of the above scheme and as a preferred scheme of the above scheme: the adjustment component also includes a mounting seat, the outer shell is provided with a channel corresponding to the side where the yoke assembly is located, the adjustment component is installed on the mounting seat, and its output end passes downward from the mounting seat, passes through the channel and is connected to the yoke assembly; the mounting seat closes the channel, and a second seal is arranged between the output end of the adjustment component and the channel.

[0016] On the basis of the above scheme and as a preferred scheme of the above scheme: the second seal includes a flexible sealing sleeve, the inner edge of the sealing sleeve is connected to the output end of the regulating component, and the outer edge is connected to the outer edge of the channel, so as to seal the output end of the regulating component and the channel.

[0017] On the basis of the above scheme and as a preferred scheme of the above scheme: the cross-section of the sealing sleeve is skirt-shaped or sheet-shaped; the cross-section of part or all of the side wall of the sealing sleeve is corrugated.

[0018] On the basis of the above scheme and as a preferred scheme of the above scheme: a first support ring is fixedly provided on the inner edge of the sealing sleeve, and a second support ring is fixedly provided on the outer edge, the first support ring is detachably fixed and sealedly connected to the output end of the regulating assembly, and the second support ring is detachably fixed and sealedly connected to the outer edge of the channel.

[0019] Compared with the prior art, the present invention has the following outstanding and beneficial technical effects: 1. By setting a plurality of adjustment components, the adjustment components and the yoke components have a plurality of connection points, and the output end of the adjustment component is actuated, driving the yoke components at the corresponding points to locally change the distance to the surface of the sputtering target, thereby adjusting the local magnetic field strength, and realizing real-time online control of the coating thickness on the surface of the sputtering target, so that the coating thickness of the coating product tends to be consistent, which is used to improve the quality of the coating product while not requiring removal of the vacuum, and can significantly improve production efficiency; by setting an energy storage component, a main control component, and a first terminal component and a second terminal component, the energy storage component is used to provide electrical energy to the swing component and the adjustment component, and the energy storage component is charged through the first terminal component. Of course, the cooling medium required for cooling is also introduced, and the second terminal component realizes optical fiber communication with the main control component, thereby improving the reliability and stability of the entire magnetic rod control. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1It is the overall structural front view of the present invention; Figure 2 It is a right view of the overall structure of the present invention; Figure 3 It is a left view of the overall structure of the present invention; Figure 4 It is the overall structure disassembly diagram of the present invention; Figure 5 It is a schematic diagram of the installation structure of the internal components of this housing assembly; Figure 6 is a schematic diagram of the structure of the regulating component; Figure 7 It is a partial cross-sectional view of the overall structure of the present invention; Figure 8 yes Figure 7 A partial enlarged view of point III in the middle; Fig. 9 is a schematic diagram of the structure of the yoke assembly; Fig.10 yes Fig. 9 The partial enlarged view of point V in the middle; Fig.11 is a disassembled diagram of the first terminal assembly; Fig.12 Schematic diagram of the target installation status; Fig.13 yes Fig.12 A partial enlarged view of the middle part; Fig.14 is a partial cross-sectional view of the overall structure of the second embodiment of the present invention; Fig.15 yes Fig.14 A partial enlarged view of the middle VI; Fig.16 is a schematic diagram of the swing assembly structure; Fig.17 It is a schematic diagram of the fixed column structure; Fig.18 It is a cross-sectional view of the swing assembly structure; Fig.19 yes Fig.18 A partial enlarged view of point Ⅻ in the middle. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical solution and advantages of this application clearer, the technical solution in the embodiment will be clearly and completely described below in conjunction with the drawings in the embodiment. Obviously, the described embodiment is only a part of the embodiment of this application, not all embodiments. Based on the given embodiments, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.

[0022] In the description of the present application, it should be understood that the terms "upper", "lower", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0023] In the description of this application, the terms "first", "second", etc. are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Example

[0024] Combination Figure 1-11As shown, the present invention discloses an online swinging adjustable magnetic bar for magnetron sputtering, including a shell component 10, a yoke component 20 and an adjustment component 50; wherein the shell component 10 includes a shell body 11 and an upper cover plate group 12, the shell body 11 is hollow to form a receiving chamber 111, and an opening is provided at its upper end, the opening connects the receiving chamber 111 with the outside; the upper cover plate group 12 includes a plurality of upper cover plates, and after the adjustment component 50 and other components are installed in the receiving chamber, the upper cover plate is fixedly installed at the opening of the shell body 11, the receiving chamber 111 is closed, and the opening is closed by the upper cover plate group. By providing the upper opening, it is convenient to install the adjustment component, energy storage component, swing component, etc. in the receiving chamber, and the opening is closed by the upper cover plate group, so that it is isolated from the outside during the magnetron sputtering process, and water or other media are prevented from entering the receiving chamber, causing equipment damage. The yoke assembly 20 is located below the housing assembly 10; it includes a support plate 21 and a magnetic rod body 22, and the magnetic rod body 22 is fixedly mounted on the support plate 21; of course, a magnet accommodating cavity can also be provided on the support plate 21, and a plurality of magnets are arranged in the magnet accommodating cavity according to the magnetic field requirements, and then the magnet accommodating cavity is closed to form the yoke assembly in sequence. The adjustment assembly 50 has multiple and independently controlled components, which are arranged along the length direction of the yoke assembly 20 and are arranged in the accommodating chamber 111; the output end of each adjustment assembly 50 reciprocates vertically to the yoke assembly 20, and all pass through the side wall of the accommodating chamber 111 to the side where the yoke assembly 20 is located, and are hinged with the yoke assembly 20, and the yoke assembly is partially pushed outward or pulled inward through the output end of the adjustment assembly 50, so that the yoke assembly 20 will be elastically deformed within its elastic deformation range or within the range that the strength and shape can withstand. Since the magnetic field component parallel to the surface of the sputtering target determines the range of electrons in the plasma, it is important to control this component along the length of the tube. The magnetic induction intensity of this component (in Tesla) usually decreases at least with the square of the distance to the magnetic field generator, and is therefore very sensitive to the position of the magnetic field generator relative to the surface of the sputtering target. In the actual test process, the deformation of the magnetic bar within 4mm can fully meet the actual use requirements, thereby driving the yoke assembly 20 to partially or completely change the distance from the sputtering target surface. By setting a plurality of adjustment components, the adjustment component and the yoke component have a plurality of connection points, and the output end of the adjustment component is actuated, driving the yoke assembly at the corresponding point to partially change the distance to the sputtering target surface, thereby adjusting the local magnetic field strength, and achieving real-time online control of the coating thickness on the sputtering target surface, so that the coating thickness of the coating product tends to be consistent, which is used to improve the quality of the coating product without removing the vacuum, and can significantly improve the production efficiency.Specifically, in this embodiment, the adjustment assembly 50 includes a servo motor 51, a first bevel gear 53, a second bevel gear 54, a nut 52 and a screw rod 55; wherein the first bevel gear 53 is fixedly mounted on the main shaft of the servo motor 51, the second bevel gear 54 is fixedly connected to the nut 52, the nut 52 is threadedly connected to the screw rod 55, and the first bevel gear 53 is meshed with the second bevel gear 54 so that the axis of the servo motor 51 is perpendicular to the axis of the screw rod 55. The arrangement of the mounting seat 56 facilitates the installation of the adjustment assembly on the one hand, and is conducive to sealing the channel on the other hand, while achieving the flexible movement of the output end of the adjustment assembly while maintaining the seal between the two. Of course, when the seal is aged or leaking, it can also be disassembled and replaced more conveniently, and by arranging the servo motor perpendicular to the screw rod axis, the size of the entire adjustment assembly can be significantly shortened, making it more convenient to install it in a housing assembly with a small space. Furthermore, the preferred adjustment component 50 of this embodiment also includes a mounting seat 56, and a channel 112 is opened corresponding to the side of the outer shell 11 facing the yoke assembly 20. The nut 53 is movably mounted on the mounting seat 56, and its screw rod 55 passes downward from the middle of the mounting seat 56, passes through the channel 112 and connects with the yoke assembly 20; the mounting seat 56 is in contact with the edge of the channel 112 on the bottom surface of the accommodating chamber, and a seal is provided between the contact surface of the mounting seat 56 and the edge of the channel 112, thereby realizing that the mounting seat 56 seals the channel 112. The nut 52 is installed in the mounting hole in the middle of the mounting seat 56, and a seal, such as a skeleton oil seal, is provided between the mounting hole and the outer peripheral surface of the nut 52, so that a seal is formed between the nut 52 and the mounting seat 56. Of course, it should be noted that the threaded hole 521 on the nut 52 connected to the threaded section 552 of the screw 55 is a blind hole. Such a setting only needs to ensure reliable sealing between the outer peripheral surface of the nut 52 and the mounting seat 56, and there will be no leakage between the thread gap between the screw 55 and the threaded hole. In addition, considering that the nut 52 can rotate flexibly and can withstand a certain axial force, the present embodiment preferably provides a combination of thrust bearings and angular contact bearings between the nut 52 and the upper end surface of the mounting seat 56 and / or the mounting hole; of course, it also includes necessary axial limiters to limit the possible axial movement of the nut 52, such as. Figure 8 The limit plate 57 shown in the figure is connected to the mounting seat 56, and the axial position of the nut 52 is limited by the limit plate 57. The yoke assembly 20 in this embodiment includes a connecting member 23, which is fixedly mounted on the end surface of the support plate 21 facing the outer shell, and the connecting member 23 is detachably connected to the lower end of the screw rod 55. Specifically, as Figure 8 and Fig.10As shown, the connecting member 23 is provided with a mounting hole 231, the screw rod 55 is inserted into the mounting hole 231, a pin shaft 553 passes through the connecting member 23 and the screw rod 55 from the side of the connecting member 23, and the pin shaft 553 is axially limited by an elastic lock buckle 554. The connecting structure of the pin shaft is simple and reliable, and the disassembly and assembly are very simple.

[0025] For one application scenario of magnetron sputtering, the yoke assembly needs to swing within a certain range so that the magnetic field of magnetron sputtering can cover a larger range. At the same time, the position of the magnetic rod can be adjusted according to the actual coating thickness requirements, thereby adjusting the distribution of the magnetic field and changing the coating distribution. Then, in this embodiment, in order to realize the swing of the magnetic rod, a swing assembly 80, a driving assembly 90, a first terminal assembly 30 and a second terminal assembly 40 are arranged in the accommodating chamber 111; the first terminal assembly 30 and the second terminal assembly 40 are respectively arranged at the two ends of the housing assembly 10. See for details. Figure 16-19 As shown, the swing assembly 80 in this embodiment includes a swing motor 81, an output flange 82 and a motor fixing seat 83. The output flange 82 is fixedly mounted on the output shaft of the swing motor 81, and a flange hole is opened on the output flange 82. The output flange 82 is coaxial with the axis of the first terminal assembly 30. The motor fixing seat 83 fixes the swing motor 81 on the outer shell 10. The driving assembly 90 is fixedly mounted on the machine body, and includes a driving end 91, a spacer sleeve 92, a protective pipe 93, a driving member 94 and a transmission belt 95. The driving end 91 is fixedly connected to one end of the driving member 94 adjacent to the magnetic rod. The spacer sleeve 92 is inserted into the driving member 94, and the protective pipe 93 is inserted into the spacer sleeve 92. Preferably, a support block 933 is provided between the protective pipe 93 and the inner hole of the spacer sleeve 92. Both ends of the target 100 are clamped on the driving end 91, and a sealing ring 911 is provided between the driving end 91 and the target 100, so that a coolant channel a is formed between the target 100, the driving end 91 and the outer shell 11 of the magnetic rod. A fluid channel is provided on the support plate 31, so that a coolant channel b is formed between the fluid channel, the spacer sleeve 92 and the protective pipe 93. For details, see Fig.12 The coolant flows in the direction indicated by the arrow in the middle. Finally, the coolant enters the coolant channel a through the interface provided on the driving assembly 90 from the external pipeline, and then flows back to the external cooling device through the coolant channel b via another reflux interface on the driving assembly 90, so as to cool the target material 100 and the yoke assembly 20. The end of the protective pipe 93 near the magnetic rod is provided with a terminal 931. Figure 1 , Figure 3 , Figure 4 , Figure 5 and Fig.11As shown, the first terminal assembly 30 in this embodiment includes a first mounting plate 31, a fixing pin 32, an outer sleeve 33, a connector body 34, a bearing 36 and a sealing assembly 37. The connector body 34 is hollow and is sleeved on the outside of the outer sleeve 33. The end head 931 extends into the outer sleeve 33. The contact assembly 35 is located in the outer sleeve 33, wherein sealing rings are provided between the outer sleeve 33 and the connector body 34 and between the end head 931 and the inner wall of the outer sleeve 33. Of course, considering the positioning of the sealing ring, in this embodiment, annular grooves are preferably provided on the inner wall of the connector body 34 and the inner wall of the outer sleeve 33, and the O-ring is embedded in the annular groove; thereby, multiple seals are formed between the connector body 34, the outer sleeve 33 and the end head 931 to prevent water vapor from entering the interior of the outer shell during use. In order to realize the swing assembly driving the magnetic rod to swing, the fixing pin 32 in this embodiment is fixedly arranged at the rear end of the joint body 34, and the fixing pin 32 is inserted into the flange hole of the output flange 82 of the swing assembly 80. The joint body 34 is provided with a sealing assembly 36 and a bearing 37 on the rear end of the joint body 34, so that the outer shell can rotate relative to the joint body 34 and maintain a reliable seal; and the front end of the joint body 34 is provided with a pin head interface 341, and the spacer sleeve 92 is provided with a central support fixing pin 921. After the first terminal assembly 30 is engaged with the socket of the driving assembly 90, the central support fixing pin 921 is inserted into the pin head interface 341. Therefore, due to the fixation of the spacer sleeve 92, the swing motor 81 is fixed to the outer shell through the motor fixing seat 83, so when the output flange 82 of the swing assembly 80 rotates When the swing motor 81 is rotated, the pin head interface 341 will be driven to rotate with it. However, since the spacer sleeve 92 will limit the rotation of the joint body 34 through the cooperation of the central support fixing pin 921 and the pin head interface 341, the reaction force generated by the joint body 34 will act on the swing motor 81 through the output flange 82. Since the swing motor 81 is fixed to the outer shell through the motor fixing seat 83, the outer shell will be driven to twist around the axis of the output flange 82 under the action of the reaction force, thereby driving the entire magnetic rod to rotate, that is, achieving swing. Then, during the forward or reverse rotation of the swing motor 81, the outer shell will rotate in the opposite direction relative to the axis of the joint body 34. By controlling the rotation angle and the rotation amplitude, the magnetic rod can be driven to swing along its rotation axis.

[0026] See Figure 12-13As shown, the present embodiment further includes a contact assembly 35, the contact assembly 35 includes a first contact 351, a second contact 352 and a contact assembly 353, the contact assembly 353 includes a plurality of movable contacts 353a arranged on the end surface of the first contact 351 and a plurality of stationary contacts 353b arranged on the end surface of the second contact 352. A first contact accommodating cavity 9311 is provided on the end 931, the first contact 351 is movably arranged in the first contact accommodating cavity 9311, the movable contact 353a of the first contact 351 and the stationary contact 353b of the second contact 352 correspond to each other and contact each other; a spring 354 is arranged in the first contact accommodating cavity 9311, the spring 354 contacts one end of the first contact 351 away from the movable contact 353a, keeps the first contact 351 pressed toward the direction of the second contact 352, so that the movable contact 353a and the stationary contact 353b keep in contact. The static contact 353b is connected to the main control component 60 through a wire; the moving contact 353a is connected to the external power supply through a wire 110; it should be noted that each moving contact 353a preferably includes a contact terminal and a terminal compression spring, and a receiving hole is opened on the end face of the first contact 351, and the terminal compression spring and the contact terminal are received in the receiving hole. Of course, it is preferred that the static contact 353b on the second contact 352 is a conductive metal material distributed on the end face of the second contact 352, which is annular or fan-shaped and has a planar structure and is distributed on the end face of the second contact 352. It can be a sheet of metal fixed on the second contact 352, or it can be embedded in the end face of the second contact 352 and flush with the end face of the second contact 352. During the use of the entire magnetron sputtering system, there will be rotation and a certain degree of overall deformation. Through such a structural setting, the first contact 351 and the second contact 352 can always maintain good contact through the elastic push of the terminal compression spring on the contact terminal, thereby ensuring that it can supply power stably, thereby improving the operating stability of the entire device.

[0027] Of course, in order to control the swing component 80 and the adjustment component 50 and process and execute the external control signal or feed back the execution result to the host computer, the present embodiment also includes a main control component 60 disposed in the accommodating chamber 111; the present embodiment preferably has the first terminal component 30 as a water inlet power supply connector component and the second terminal component 40 as an optical fiber communication connector component; the first terminal component 30 connects the external power supply to the main control component 60, and the control signal is transmitted to the main control component 60 via the second terminal component 40 and the internal optical fiber, and the main control component 60 analyzes and processes the signal to control the swing component 80 and the adjustment component 50 to make adaptive actions. Figure 4As shown, the second terminal assembly 40 includes a second mounting plate, a second connector body and an optical fiber assembly 41. The second connector body is fixedly mounted on the second mounting plate. The optical fiber assembly 41 can be a photoelectric conversion assembly or an optical path guiding assembly, which is used to transmit the optical signal to the main control assembly 60 in time. It is fixedly mounted in the second connector body. The second mounting plate is fixedly mounted on one end of the outer shell. Of course, the second mounting plate and or the second connector body and the mounting position of the outer shell have necessary seals to make them completely sealed after installation. At the same time, the optical fiber assembly 41 and the second connector body also have necessary seals. Since the entire magnetic rod is in a state of motion, the second terminal assembly is coaxial with the swing axis of the magnetic rod, which means that the external optical fiber communication end and the signal receiving end of the second terminal assembly are also located on the same axis. Therefore, no matter how the magnetic rod swings, the optical signal can be reliably transmitted, and compared with the traditional cable communication method, it avoids the problem of signal failure caused by cable twisting or fatigue damage during the activity of the magnetic rod. Therefore, after the optical signal transmitted to the main control component 60 through the second terminal component 40 is analyzed and processed by the main control component 60, the control and adjustment component 50 drives the magnetic yoke component at the corresponding point to locally change the distance to the sputtering target surface to get closer or farther away, thereby adjusting the local magnetic field strength to achieve real-time online control of the coating thickness on the sputtering target surface; it also includes controlling the swing component 80 so that it drives the magnetic yoke assembly to swing a certain angle according to the required angle to achieve adjustment of the magnetic field distribution range.

[0028] Of course, in the present embodiment, in order to realize communication with the main control component 60 more reliably and in multiple modes, the present embodiment further realizes charging by adaptively increasing the number and size of the moving contact 353a of the first contact 351 and the static contact 353b of the second contact 352 and adjusting the size, and adaptively selecting the size of the first contact 351 and the second contact 352, and on the one hand, realizing charging, and on the other hand, realizing data communication through the RS485 communication interface through the increased contacts, and then realizing water and electricity through the first terminal component 30 to supply power and charge the inside of the magnetic rod, realizing RS485 data communication, realizing data communication with the main control component 60 inside the adjustable magnetic rod, and then realizing the communication control of the adjustable magnetic rod by the second terminal component 40 and the first terminal component 30 in a two-choice or synchronous communication mode, thereby realizing reliable control of the magnetic rod, and at the same time, it can also improve the compatibility of the data and communication modes of the adjustable magnetic rod.

[0029] It also includes an energy storage component 70, which supplies power to the swing component 80, the main control component 60 and the adjustment component 50; the energy storage component 70 is arranged in the accommodating chamber 111. Since the entire adjustable magnetic rod is located in the cylindrical target material during use, the volume and size of the adjustable magnetic rod are greatly limited, so the installation of the energy storage component 70 also puts forward higher requirements. If a whole lithium battery is used for installation, it is obviously difficult to achieve; for this reason, the energy storage component 70 is preferably a plurality of lithium battery packs in this embodiment, which are arranged between adjacent adjustment components 50, and of course, can also be in other vacant spaces in the accommodating space. Through this small volume dispersion method, the design requirements of energy storage are met, and the requirements for installation space are reduced. The energy storage component 70 is connected to the main control component 60, and on the one hand, it supplies power to the main control component 60. Therefore, through the energy storage component built into the shell component, it can maintain continuous and stable power supply to the adjustment component and the swing component, ensuring the stability and reliability of the operation of the entire device. On the other hand, since the swing component and the adjustment component consume the power of the energy storage component during the magnetron sputtering process, if the power is too low, it may be difficult to maintain reliable operation. Therefore, during the operation of magnetron sputtering and / or the interval of magnetron sputtering, the external power supply can supply power to the main control component 60 through the first terminal component 30, and can also charge the energy storage component 70 through the main control component 60, and perform battery management and protection for its charging and discharging. The energy storage component 70 is continuously or intermittently charged by the external power supply, and its power is replenished in time, so that the energy storage component 70 is stable within the power range required by the design, ensuring the smooth operation of the entire system.

[0030] Therefore, by setting up the energy storage component 70, the main control component 60, the first terminal component 30 and the second terminal component 40, the energy storage component 70 provides electric energy to the swing component and the adjustment component 60, the energy storage component 70 is charged through the first terminal component 30 and the main control component 60, and the first terminal component 30 and / or the second terminal component 40 realize optical fiber communication with the main control component 60, thereby improving the reliability and stability of the entire magnetic rod control.

[0031] In addition, the driving shaft 821 of the swing assembly 80 is a hollow structure and extends toward the rear end 811 of the swing motor 81 to form a cable channel c at the front and rear ends of the swing motor 81, and the cable channel c is connected to the rear end of the second contact 352; thus, the cable led out from the second contact 352 of the first terminal assembly 30 can be directly inserted into the outer shell assembly through the cable channel c, so that it can be connected to the main control assembly 60 and / or the energy storage assembly 70 with the shortest path, thereby avoiding the problem of long cable paths, large energy and signal losses on the cables, and susceptibility to interference caused by the need for the cables to bypass various devices through the gaps. At the same time, it can also better protect the cables, avoid the problem of cable damage that may be caused by the movement of various active parts in the outer shell assembly, and reduce the difficulty of wiring.

[0032] Implementation column 2 like Figure 14-15 As shown, the difference between this embodiment and Example 1 is that: the adjustment component 50 also includes a mounting seat 56, and a channel 112 is opened on the side of the outer shell 11 facing the yoke assembly 20, and the adjustment component 50 is installed on the mounting seat 56, and its output end extends downward from the mounting seat 56, passes through the channel 112 and is connected to the yoke assembly 20; the mounting seat 56 closes the channel 112, and a second seal 120 is provided between the output end of the adjustment component 50 and the channel 112.

[0033] Specifically, in this embodiment, the second seal 120 includes a flexible sealing sleeve 121, and the sealing sleeve 121 seals the output end of the regulating assembly 50 and the channel 112. Fig.15As shown, the inner edge 1211 of the sealing sleeve 121 is fixed with a first support ring 122, and the outer edge 1212 is fixed with a second support ring 123. The first support ring 122 is detachably fixed and sealedly connected to the output end of the adjustment component 50, and the second support ring 123 is detachably fixed and sealedly connected to the outer edge of the channel 112. The first support ring 122 is sleeved on the threaded section 552 of the screw rod 55, and a pressure ring 124 is detachably connected to the threaded section 552. For example, the pressure ring 124 is threadedly connected to the threaded section 552 to limit the first support ring 122 on the threaded section 552. Of course, in order to avoid leakage between the first support ring 122 and the threaded section 552, it is preferred that the diameter of the connecting end 555 of the screw rod 55 and the connecting member 23 is larger than the threaded section 552, and an annular groove is provided on the connecting side of the connecting end 555 and the threaded section 552, and a first sealing ring 127 is embedded in the annular groove. The support ring 122 is pressed against the first sealing ring 127 by the pressure ring 124 to achieve sealing between the first support ring 122 and the threaded section 552; an annular groove is provided on the fitting surface between the first support ring 123 and the outer shell, and a second sealing ring 126 is embedded in the annular groove. The second support ring 123 is pressed against the outer shell by the screw 125, thereby achieving sealing between the second support ring 123 and the outer shell, thereby achieving connection between the inner edge of the sealing sleeve 121 and the output end of the adjustment component 50, and the outer edge is connected to the outer edge of the channel 112, thereby achieving sealing of the channel 112. Since the lower end of the screw rod 55 is connected to the connecting piece 23, and in the present embodiment, the second seal 120 is located near the connecting end of the two, in order to avoid interference between the connecting piece 23 and the sealing sleeve 121 during the movement of the screw rod 55, which may cause damage to the sealing sleeve 121, it is preferred that the cross section of the sealing sleeve 121 is skirt-shaped or sheet-shaped, and it is buckled above the connecting piece 23, thereby avoiding interference and impact on the sealing sleeve 121, and avoiding damage to the sealing sleeve 121. In addition, during the adjustment of the magnetic rod, the sealing sleeve 121 will be pulled to cause elastic deformation. Considering the stretching flexibility and range of motion of the sealing sleeve 121, it is preferred that the sealing sleeve 121 be damaged due to excessive stretching when the stroke is large. For this reason, in the present embodiment, it is preferred that part or all of the cross section of the side wall of the sealing sleeve 121 is corrugated. The active stretching range of the sealing sleeve 121 is greatly improved through the corrugated side wall structure.

[0034] The above embodiments are only preferred embodiments of the present invention and are not intended to limit the protection scope of the present invention. Therefore, any equivalent changes made based on the structure, shape, and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. An online swingable adjustable magnetic bar for magnetron sputtering, characterized in that: The invention comprises a housing component (10), a yoke component (20) and an adjustment component (50); the housing component (10) has a containing chamber (111), and the yoke component (20) is located outside the housing component (10); the adjustment component (50) has a plurality of components that are independently controlled and arranged along the length direction of the yoke component (20) and arranged in the containing chamber (111), and an output end thereof passes through the side wall of the containing chamber (111) to the side where the yoke component (20) is located, and is hinged to the yoke component (20), so as to drive the yoke component (20) to reciprocate linearly, so as to drive the yoke component (20) to partially or completely change the distance from the surface of the sputtering target.

2. The online swingable adjustable magnetic bar for magnetron sputtering according to claim 1, characterized in that: It also comprises a swing assembly (80), a first terminal assembly (30) and a second terminal assembly (40); the swing assembly (80) drives the magnetic bar to swing along its rotation axis; the first terminal assembly (30) and the second terminal assembly (40) are respectively arranged at two ends of the housing assembly (10) and are coaxial with the swing axis of the magnetic bar.

3. The online swingable adjustable magnetic bar for magnetron sputtering according to claim 2, characterized in that: The swing assembly (80) comprises a swing motor (81), the output end of the swing motor (81) being coaxial with the axis of the first terminal assembly (30), the swing motor (81) being fixedly mounted on the housing assembly (10), the drive assembly (90) being fixedly mounted on the machine body, and the output end of the swing motor (81) being restricted in rotation by the drive assembly (90).

4. The online swingable adjustable magnetic bar for magnetron sputtering according to claim 3, characterized in that: The first terminal assembly (30) comprises a connector body (34), a pin head interface (341) is provided at the front end of the connector body (34), and the output end of the swing motor (81) is transmission-connected to the connector body (34); the drive assembly (90) comprises a spacer sleeve (92), a central support fixing pin (921) is provided on the spacer sleeve (92), and the central support fixing pin (921) is inserted into the pin head interface (341).

5. The online swingable adjustable magnetic bar for magnetron sputtering according to claim 2, characterized in that: It also includes a main control component (60); the first terminal component (30) is a water inlet power supply connector component, and the second terminal component (40) is an optical fiber communication connector component; and a control signal is transmitted to the main control component (60) via the first terminal component (30) and / or the second terminal component (40).

6. The online swingable adjustable magnetic bar for magnetron sputtering according to claim 5, characterized in that: It also comprises an energy storage component (70), the energy storage component (70) supplies power to the swing component (80), the main control component (60) and the adjustment component (50); the energy storage component (70) is arranged in the accommodating chamber (111).

7. The online swingable adjustable magnetic bar for magnetron sputtering according to claim 6, characterized in that: During the operation of magnetron sputtering and / or during the interval of magnetron sputtering, an external power source charges the energy storage component (70) through the first terminal component (30).

8. The online swingable adjustable magnetic bar for magnetron sputtering according to claim 7, characterized in that: The first terminal assembly (30) further comprises a contact assembly (35) comprising a first contact (351), a second contact (352) and a contact assembly (353); the contact assembly (353) comprising a plurality of movable contacts (353a) arranged on the end surface of the first contact (351) and a plurality of stationary contacts (353b) arranged on the end surface of the second contact (352); and an elastic assembly presses the first contact (351) toward the second contact (352) so that the first contact (351) and the second contact (352) maintain contact.

9. The online swingable adjustable magnetic bar for magnetron sputtering according to claim 1, characterized in that: The outer shell assembly (10) comprises an outer shell (11) and an upper cover plate group (12); an opening is provided at the upper end of the outer shell (11), and the opening connects the accommodating chamber (111) with the outside; the upper cover plate group (12) is fixedly mounted at the opening of the outer shell (11) to seal the accommodating chamber (111).

10. The online swingable adjustable magnetic bar for magnetron sputtering according to claim 9, characterized in that: The adjustment component (50) further comprises a mounting seat (56); a channel (112) is provided on the outer shell (11) on the side facing the yoke component (20); the adjustment component (50) is mounted on the mounting seat (56), and an output end thereof extends downward from the mounting seat (56) and passes through the channel (112) to be connected to the yoke component (20); the mounting seat (56) closes the channel (112), and a first seal is provided between the output end of the adjustment component (50) and the mounting seat (56).

11. The online swingable adjustable magnetic bar for magnetron sputtering according to claim 10, characterized in that: The adjustment assembly (50) comprises a servo motor (51), a transmission assembly, a nut (52), and a screw rod (55); the axis of the servo motor (51) is perpendicular to the axis of the screw rod (55); the screw rod (55) passes through the mounting seat (56) and the channel (112) and is hinged to the yoke assembly (20); the servo motor (51) drives the screw rod (55) to reciprocate along its axial direction through the transmission assembly and the nut (52).

12. An online swingable adjustable magnetic bar for magnetron sputtering according to any one of claims 9 to 11, characterized in that: The adjustment component (50) further comprises a mounting seat (56); a channel (112) is provided on the outer shell (11) on the side facing the yoke component (20); the adjustment component (50) is mounted on the mounting seat (56), and an output end thereof extends downward from the mounting seat (56), passes through the channel (112), and is connected to the yoke component (20); the mounting seat (56) closes the channel (112), and a second seal (120) is provided between the output end of the adjustment component (50) and the channel (112).

13. The online swingable adjustable magnetic bar for magnetron sputtering according to claim 12, characterized in that: The second seal (120) comprises a flexible sealing sleeve (121), the inner edge of the sealing sleeve (121) being connected to the output end of the regulating component (50), and the outer edge being connected to the outer edge of the channel (112), thereby sealing the output end of the regulating component (50) and the channel (112).

14. The online swingable adjustable magnetic bar for magnetron sputtering according to claim 13, characterized in that: The cross section of the sealing sleeve (121) is skirt-shaped or sheet-shaped; the cross section of part or all of the side wall of the sealing sleeve (121) is corrugated.

15. The online swingable adjustable magnetic bar for magnetron sputtering according to claim 13, characterized in that: A first support ring (122) is fixedly provided on the inner edge of the sealing sleeve (121), and a second support ring (123) is fixedly provided on the outer edge; the first support ring (122) is detachably fixed and sealingly connected to the output end of the regulating assembly (50); and the second support ring (123) is detachably fixed and sealingly connected to the outer edge of the channel (112).

Images