Substrate bearing device

Abstract

The substrate bearing device comprises a tray and a frame, the frame comprises a frame body, the frame body comprises a supporting beam body, the supporting beam body extends in the first direction, the supporting beam body comprises a metal beam part and two clamping plate beam parts, the two clamping plate beam parts are made of different materials from the metal beam part, and the two clamping plate beam parts are made of different materials from the metal beam part. The two clamping plate beam parts are located on the two sides, in the second direction, of the metal beam part respectively, the two clamping plate beam parts are connected with the metal beam part, the two end faces, in the third direction, of the metal beam part are a first connecting face and a second connecting face respectively, the first connecting face makes contact with the tray, and the second connecting face makes contact with the tray. The second connecting surface is in contact with a grounding component, and included angles are formed among the first direction, the second direction and the third direction. The bearing device can have high wear resistance, and the grounding effect is relatively good.

Description

Technical Field

[0001] The invention relates to the technical field of photovoltaic cell manufacturing, and in particular to a substrate carrying device. Background Art

[0002] The carrier of the plasma enhanced chemical vapor deposition (PECVD) equipment includes a tray and a frame. The tray is used to carry the substrate to be processed, and the frame is used to carry the tray. In the case of plasma process, the frame will contact the roller or the lower heating plate to serve as a ground electrode. Therefore, the conductivity of the tray and the frame is very important. Summary of the invention

[0003] The object of the present invention is to provide a substrate bearing device, which can have higher wear resistance and relatively better grounding effect.

[0004] To solve the above technical problems, the present invention provides a substrate carrying device, including a tray and a frame, the frame including a frame body, the frame body including a support beam body, the support beam body extending along a first direction, the support beam body including a metal beam portion and two clamping plate beam portions, the material of the two clamping plate beam portions is different from that of the metal beam portion, the two clamping plate beam portions are respectively located on both sides of the metal beam portion in a second direction, and the two clamping plate beam portions are connected to the metal beam portion, the two end surfaces of the metal beam portion in a third direction are respectively a first connecting surface and a second connecting surface, the first connecting surface is in contact with the tray, the second connecting surface is in contact with a grounding component, and the first direction, the second direction and the third direction are all arranged at an angle.

[0005] In the embodiment of the present invention, the support beam is specifically connected to the tray through the first connection surface of the metal beam part, and connected to the grounding component through the second connection surface. The metal beam part is made of metal. Compared with general non-metallic materials, it has relatively better conductivity, which can improve the grounding effect of the bearing device and can largely avoid the adverse effects caused by poor grounding. At the same time, the metal beam part can also have relatively good wear resistance. When the metal beam part contacts the roller and generates rolling friction, it is not easy to generate dust; in this way, on the one hand, the possibility of damage to the bearing device can be reduced, which is conducive to ensuring the service life of the bearing device. On the other hand, it can also reduce the impact on the quality of substrate coating.

[0006] Optionally, the cross-section of the metal beam portion perpendicular to the first direction is T-shaped, including a horizontal plate and a vertical plate arranged along the third direction, the horizontal plate includes two supporting plate portions, the two supporting plate portions are respectively located on both sides of the vertical plate in the second direction, the two clamping plate beam portions are respectively abutted against the two supporting plate portions along the third direction, and the two clamping plate beam portions are both abutted against the vertical plate along the second direction, the side of the vertical plate facing away from the horizontal plate is the first connecting surface, and the side of the horizontal plate facing away from the vertical plate is the second connecting surface.

[0007] Optionally, a first connecting component is further included, and the first connecting component is used to connect the support plate part and the clamping plate beam part located on the same side in the second direction.

[0008] Optionally, a second connecting component is further included, which includes a connecting bolt, a connecting nut and an elastic pad, the connecting bolt includes a head and a rod, the rod passes through the two clamping beams and the metal beam, and the connecting nut is connected to the rod; the elastic pad is located between the supporting beam body and the head; or, the elastic pad is located between the connecting nut and the supporting beam body.

[0009] Optionally, the elastic pad is a butterfly spring.

[0010] Optionally, both of the two clamping plate beam parts are made of non-metallic conductive material.

[0011] Optionally, the splint beam portion is made of graphite material or carbon composite material, and the thermal expansion coefficient of the metal beam portion matches that of the splint beam portion.

[0012] Optionally, the frame body also includes other beams, which include side beams. The number of the side beams and the number of the support beams are both two. The two side beams are arranged at intervals along the first direction, and the two support beams are arranged at intervals along the second direction. The two side beams are connected to the two support beams to form an outer frame of the frame body.

[0013] Optionally, the other beam bodies also include an inner beam body, which is connected to the outer frame and located on the inner side of the outer frame; along the third direction, the side where the second connecting surface of the supporting beam body is located protrudes from the inner beam body.

[0014] Optionally, the frame also includes an elastic conductive component, which is installed on the frame body, and at least a portion of the elastic conductive component can be elastically deformed along the third direction; along the third direction, one end of the elastic conductive component is in contact with the tray, and the other end of the elastic conductive component is used to contact the grounding component.

[0015] Optionally, the elastic conductive component includes a first spring sheet, the first spring sheet includes a first deformation portion and a second deformation portion, the first deformation portion and the second deformation portion are arranged along the third direction, the first deformation portion is used to elastically contact with the tray, and the second deformation portion is used to elastically contact with the grounding component.

[0016] Optionally, the elastic conductive component includes a support plate and a second spring sheet, the support plate is connected to the frame body, the second spring sheet is pressed onto the support plate and the frame body, the support plate is in contact with the tray, and the second spring sheet is used to elastically contact the grounding component.

[0017] Optionally, the second spring piece includes a U-shaped main body and a flange portion, the main body includes a bottom plate portion and two side plate portions, the flange portions are connected to one side of the two side plate portions facing away from the bottom plate portion, and the bottom plate portion is pressed between the support plate and the frame body. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A partial structural diagram of a substrate carrying device provided by an embodiment of the present invention;

[0019] Figure 2 for Figure 1 Partial structural diagram of the middle frame;

[0020] Figure 3 is a cross-sectional view of the support beam body perpendicular to the first direction;

[0021] Figure 4 It is a connection structure diagram of the supporting beam body, the second connection member and the transition angle member;

[0022] Figure 5 for Figure 2 The connection structure diagram of the middle elastic conductive component, the tray and the lower heating plate;

[0023] Figure 6 A partial structural diagram of a frame in another substrate carrying device provided by an embodiment of the present invention;

[0024] Figure 7 for Figure 6 Connection structure diagram of the middle elastic conductive component, tray and lower heating plate.

[0025] Reference numerals:

[0026] 1000-pallet;

[0027] 2000-frame; 2100-frame body; 2110-support beam; 2111-metal beam; 2111A-horizontal plate; 2111A1-support plate; 2111A2-second connection surface; 2111B-vertical plate; 2111B1-first connection surface; 2112-ply beam; 2113-first connection member; 2120-side beam; 2130-inner beam; 2131-first beam; 2132-second beam; 2140-transition angle piece; 2 141-connecting plate; 2150-second connecting component; 2151-connecting bolt; 2152-connecting nut; 2153-elastic pad; 2200-elastic conductive component; 2210-first spring sheet; 2211-first deformation portion; 2212-second deformation portion; 2220-third connecting component; 2230-supporting plate; 2240-second spring sheet; 2241-body; 2241A-bottom plate; 2241B-side plate; 2242-flange portion;

[0028] 3000 - lower heating plate. DETAILED DESCRIPTION

[0029] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0030] In the embodiments of the present invention, the terms "first", "second", and "third" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first", "second", and "third" may explicitly or implicitly include one or more of the features.

[0031] In the description of the embodiments of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense. For example, "connection" can be a detachable connection or a non-detachable connection; it can be a direct connection or an indirect connection through an intermediate medium.

[0032] The directional terms mentioned in the embodiments of the present invention, such as "inside", "outside", etc., are only references to the directions of the drawings. Therefore, the directional terms used are for better and clearer description and understanding of the embodiments of the present invention, rather than indicating or implying that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limitations on the embodiments of the present invention. In addition, unless otherwise specified in this application, the "plurality" mentioned in this application refers to two or more; and when "plurality" is used to express the number of different components, it does not indicate the relationship between the quantities of these components.

[0033] In the description of the embodiments of the present invention, the terms "comprises", "includes" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the presence of other identical elements in the process, method, article or device including the element.

[0034] Please refer to Figure 1-Figure 7 , Figure 1 A partial structural diagram of a substrate carrying device provided by an embodiment of the present invention; Figure 2 for Figure 1 Partial structural diagram of the middle frame; Figure 3 is a cross-sectional view of the support beam body perpendicular to the first direction; Figure 4 It is a connection structure diagram of the supporting beam body, the second connection member and the transition angle member; Figure 5 for Figure 2 The connection structure diagram of the middle elastic conductive component, the tray and the lower heating plate; Figure 6 A partial structural diagram of a frame in another substrate carrying device provided by an embodiment of the present invention; Figure 7 for Figure 6 Connection structure diagram of the middle elastic conductive component, tray and lower heating plate.

[0035] like Figure 1 As shown, an embodiment of the present invention provides a substrate carrying device, which is mainly used in PECVD equipment and the like, and includes a tray 1000 and a frame 2000 .

[0036] The tray 1000 is used to carry the substrate to be processed, and the substrate may be, for example, a silicon wafer. The tray 1000 may be an integrated structure. Alternatively, the tray 1000 may be a split structure, including a plurality of split parts, which are then assembled and spliced ​​together. The specific assembly and splicing method may be, for example, welding, clamping, screw connection, riveting, etc., which is not limited here, as long as it can meet the reliability requirements of the connection.

[0037] The frame 2000 is used to carry the tray 1000. Figure 2 The frame 2000 includes a frame body 2100, and the frame body 2100 includes a supporting beam body 2110 and other beam bodies.

[0038] For ease of description, in the embodiment of the present invention, a first direction X, a second direction Y, and a third direction Z may be defined. The first direction X is the extension direction of the support beam 2110. The third direction Z is the docking direction of the frame 2000 and the pallet 1000; in a conventional use state, the third direction Z is specifically the up-down direction, and the pallet 1000 may be arranged on the upper side of the frame 2000 so that the frame 2000 can stably carry the pallet 1000. The second direction Y and the first direction X and the third direction Z are all arranged at an angle, and the angle may be, for example, 90 degrees. Of course, it may also be other angle values, which are not limited here.

[0039] Other beams may include side beams 2120, and the side beams 2120 may extend along the second direction Y. In practical applications, the number of the side beams 2120 and the supporting beams 2110 may be two, the two side beams 2120 may be spaced apart along the first direction X, and the two supporting beams 2110 may be spaced apart along the second direction Y. Both side beams 2120 may be connected to the two supporting beams 2110 to form an outer frame of the frame body 2100, and the outer frame may be roughly a quadrilateral structure, such as a rectangular structure.

[0040] Other beam bodies may further include an inner beam body 2130 . The inner beam body 2130 may be disposed on the inner side of the outer frame and used to be connected to the outer frame so as to improve the structural strength of the frame 2000 .

[0041] In some optional implementations, the inner beam body 2130 may include a first beam body 2131 and a second beam body 2132, and the number of the first beam body 2131 and the second beam body 2132 may be multiple. The first beam body 2131 may extend along the second direction Y, and the second beam body 2132 may extend along the first direction X. Each first beam body 2131 may be connected to two supporting beam bodies 2110. Each second beam body 2132 may be connected to two side beam bodies 2120. The first beam body 2131 and the second beam body 2132 may also be connected to ensure the structural strength of the inner beam body 2130.

[0042] Here, the embodiment of the present invention does not limit the connection method between the first beam 2131 and the supporting beam 2110, between the second beam 2132 and the side beam 2120, between the first beam 2131 and the second beam 2132, and between the supporting beam 2110 and the side beam 2120. In practical applications, those skilled in the art can select according to specific needs as long as they can meet the requirements of use. For example, the beams can be connected by various connection methods such as welding, clamping, riveting, and bolting.

[0043] For the implementation method using bolt connection, such as Figure 2As shown, the frame body 2100 may also be provided with a transition angle piece 2140. Figure 4 The transition angle piece 2140 can be roughly L-shaped, including two connecting plate portions 2141 set at an angle. The two connecting plate portions 2141 can be connected to two beams extending in different directions through bolts, respectively, so as to achieve indirect fixation between the two beams extending in different directions.

[0044] It should be understood that, for the inner beam body 2130, the first beam body 2131 is not limited to extending along the second direction Y, and the second beam body 2132 is not limited to extending along the first direction X. In practical applications, those skilled in the art can flexibly adjust the extension directions of the first beam body 2131 and the second beam body 2132, and thus can form inner beam bodies 2130 of different structural forms, as long as they can meet requirements such as reliability.

[0045] The supporting beam body 2110 includes a metal beam portion 2111 and two plywood beam portions 2112. The material of the two plywood beam portions 2112 is different from that of the metal beam portion 2111. The two plywood beam portions 2112 are respectively located on both sides of the metal beam portion 2111 in the second direction Y, and the two plywood beam portions 2112 are connected to the metal beam portion 2111. The two end surfaces of the metal beam portion 2111 in the third direction Z are respectively a first connecting surface 2111B1 and a second connecting surface 2111A2. The first connecting surface 2111B1 is in contact with the tray 1000, and specifically, the contact between the first connecting surface 2111B1 and the tray 1000 is ensured after the tray 1000 and the frame 2000 are connected. The second connecting surface 2111A2 is used to contact with a grounding component. The grounding component may specifically be a roller, or Figure 5 as well as Figure 7 The lower heating plate 3000 is shown.

[0046] In the embodiment of the present invention, the support beam 2110 is specifically connected to the tray 1000 and the grounding component through the metal beam portion 2111. The metal beam portion 2111 is made of metal material, which has relatively better conductivity than general non-metallic materials, can improve the grounding effect of the load-bearing device, and can largely avoid the adverse effects caused by poor grounding. The adverse effects include uneven coating thickness, abnormal sparking, etc.

[0047] At the same time, the metal beam 2111 can also have relatively good wear resistance, and it is not easy to generate dust when the metal beam 2111 contacts the roller and generates rolling friction. In this way, on the one hand, the possibility of damage to the bearing device can be reduced, which is conducive to ensuring the service life of the bearing device, and on the other hand, it can also reduce the impact on the quality of the substrate coating.

[0048] Here, the embodiment of the present invention does not limit the specific material type of the metal beam 2111. In practical applications, those skilled in the art can make a selection based on the conductivity, cost and other related conditions of different materials, as long as they can meet the requirements of use. For example, Table 1 shows the conductivity of silver, copper, aluminum, titanium and stainless steel. At 20°C, the conductivity relationship between the metals is: silver>copper>aluminum>titanium>stainless steel. Based on this, if only the conductivity parameter is used, the metal beam 2111 can be made of silver, copper, etc.

[0049] Table 1 Comparison of conductivity of different materials at the same temperature

[0050] Material Temperature(℃) Conductivity (S / m) silver 20 <![CDATA[62.9×10 6 ]]> copper 20 <![CDATA[59.5×10 6 ]]> aluminum 20 <![CDATA[37.7×10 6 ]]> titanium 20 <![CDATA[2.5×10 6 ]]> Stainless steel 20 <![CDATA[1.5×10 6 ]]>

[0051] The splint beam portion 2112 may be specifically made of non-metallic material, which can effectively reduce the weight of the support beam body 2110 so as to achieve lightweight support beam body 2110 .

[0052] In some optional implementations, the clamping plate beam portion 2112 may be made of a non-metallic conductive material. In this way, the clamping plate beam portion 2112 may also have conductive properties, which can ensure the grounding effect of the support beam body 2110 to a greater extent.

[0053] Here, the embodiment of the present invention does not limit the specific types of the above non-metallic conductive materials. In practical applications, those skilled in the art can select them according to specific needs, as long as they can meet the requirements of use. For example, the non-metallic conductive material can be a graphite material or a carbon composite material. The graphite material and the carbon composite material can not only have relatively good electrical conductivity, but also have better high temperature resistance and corrosion resistance. When used in a high temperature environment, they also have relatively good mechanical strength. They cooperate with the metal beam part 2111 to greatly improve the structural strength of the support beam body 2110 and the frame 2000.

[0054] In specific practice, the thermal expansion coefficient of the metal beam portion 2111 can match that of the clamping plate beam portion 2112, that is, the thermal expansion coefficients of the two can be close. In this way, after the metal beam portion 2111 and the clamping plate beam portion 2112 are connected, thermal stress is not easily generated between the two, which is more conducive to ensuring a reliable connection between the metal beam portion 2111 and the clamping plate beam portion 2112, so that the support beam body 2110 can have relatively good thermal stability and reliability.

[0055] Here, the embodiment of the present invention does not limit the closeness of the thermal expansion coefficients of the metal beam portion 2111 and the clamping plate beam portion 2112. In practical applications, those skilled in the art can make a selection according to specific needs, as long as it can meet the requirements of use. For example, when the clamping plate beam portion 2112 is made of the aforementioned graphite material or carbon composite material, the metal beam portion 2111 can be made of invar alloy, or aluminum-silver-nickel alloy, etc., so as to balance the thermal expansion coefficients between the metal beam portion 2111 and the clamping plate beam portion 2112.

[0056] by Figure 2 For reference, among other beams of the embodiment of the present invention, at least the side beam 2120 connected to the support beam 2110 and the first beam 2131 may be made of the same material as the clamping beam 2112. During installation, the side beam 2120 and the first beam 2131 may be connected to the clamping beam 2112, so that thermal expansion is not easily generated between the side beam 2120 and the support beam 2110, and between the first beam 2131 and the support beam 2110, which can improve the connection reliability and thermal stability of the frame 2000 to a greater extent.

[0057] Of course, in some other implementations of the present invention, the side beam 2120 and the first beam 2131 may be made of different materials from the clamping beam 2112. This is also feasible. For example, the side beam 2120 and the clamping beam 2112 may be made of two different materials with similar thermal expansion coefficients, which can also reduce the thermal expansion between the side beam 2120 and the support beam 2110.

[0058] In some optional implementations, the frame body 2100 may further include a second connecting component 2150 .

[0059] The second connection member 2150 may include a connection bolt 2151, a connection nut 2152, and an elastic pad 2153. The connection bolt 2151 may include a head and a rod, wherein the rod may pass through the two clamping plate beams 2112 and the metal beam 2111 along the second direction Y, and the connection nut 2152 may be connected to the rod. The elastic pad 2153 may be located between the support beam body 2110 and the head; or, the elastic pad 2153 may be located between the connection nut 2152 and the support beam body 2110.

[0060] Through the cooperation of the connecting bolts 2151, the connecting nuts 2152 and the elastic pads 2153, the metal beam 2111 and the two clamping plate beams 2112 can be locked in the second direction Y, which can ensure the reliable connection between the metal beam 2111 and the two clamping plate beams 2112. In addition, the elastic pads 2153 have the elastic deformation ability along the second direction Y, which can compensate for the thermal deformation of the support beam 2110 in the second direction Y, thereby improving the thermal stability of the support beam 2110, so as to ensure the structural performance of the entire frame 2000.

[0061] Combination Figure 4 In a specific solution, the elastic pad 2153 may be disposed between the connecting nut 2152 and the supporting beam 2110. Furthermore, for a solution in which the first beam 2131 and the supporting beam 2110 are connected by using the transition angle piece 2140, the elastic pad 2153 may be located between the connecting nut 2152 and the connecting plate 2141.

[0062] The elastic pad 2153 can be specifically a butterfly spring. In practical applications, one second connecting member 2150 can be provided with only one butterfly spring, or two or more butterfly springs can be provided for use. For example, the butterfly springs can be used in pairs, so that the effect of compensating for thermal deformation can be better achieved.

[0063] In some optional implementations, a cross section of the metal beam portion 2111 perpendicular to the first direction X may be T-shaped.

[0064] like Figure 2 and Figure 3 As shown, the metal beam portion 2111 may include a horizontal plate 2111A and a vertical plate 2111B arranged along the third direction Z. The horizontal plate 2111A may include two supporting plate portions 2111A1, and the two supporting plate portions 2111A1 may be respectively located on both sides of the vertical plate 2111B in the second direction Y. The two clamping plate beam portions 2112 may be respectively located on both sides of the vertical plate 2111B in the second direction Y, and the two clamping plate beam portions 2112 may be attached to the vertical plate 2111B along the second direction Y, and the two clamping plate beam portions 2112 may also abut against the two supporting plate portions 2111A1 along the third direction Z. The side of the vertical plate 2111B facing away from the horizontal plate 2111A may be a first connecting surface 2111B1, and the side of the horizontal plate 2111A facing away from the vertical plate 2111B may be a second connecting surface 2111A2.

[0065] With such arrangement, the two support plate portions 2111A1 can respectively support the two clamping plate beam portions 2112 in the third direction Z, which can reduce the possibility of displacement of the clamping plate beam portions 2112 and the metal beam portion 2111 in the third direction Z. Accordingly, the possibility of the second connecting member 2150 being subjected to shear force along the third direction Z can be reduced, which is conducive to ensuring the service life of the second connecting member 2150 and ensuring the reliable connection between the clamping plate beam portions 2112 and the metal beam portion 2111. In addition, the support of the clamping plate portion 2111A1 for the clamping plate beam portions 2112 can also avoid the contact between the clamping plate beam portions 2112 and the roller, which can fundamentally avoid the possibility of the clamping plate beam portions 2112 and the roller contacting and generating dust.

[0066] Still Figure 3 As shown, the support beam body 2110 may further include a first connecting component 2113, and the first connecting component 2113 is used to connect the support plate portion 2111A1 and the clamping plate beam portion 2112 located on the same side in the second direction Y.

[0067] Specifically, the first connecting component 2113 can be a screw, etc., which can pass through the supporting plate portion 2111A1 along the third direction Z and can be connected to the clamping beam portion 2112, so as to achieve the locking of the clamping beam portion 2112 and the metal beam portion 2111 along the third direction Z, which can enhance the structural stability of the supporting beam body 2110 to a greater extent.

[0068] It should be understood that the cross section of the metal beam portion 2111 perpendicular to the first direction X is not limited to the T-shape described above. In some other implementations of the embodiments of the present invention, the cross section may also be in other shapes as long as they meet the requirements of use. For example, the cross section may also be in a straight line shape, that is, the metal beam portion 2111 may only include the aforementioned vertical plate 2111B. For another example, the cross section may also be in an L-shape, in which case the metal beam portion 2111 may include the aforementioned vertical plate 2111B and a support plate portion 2111A1.

[0069] Combination Figure 4 , along the third direction Z, the side where the second connection surface 2111A2 of the support beam 2110 is located can protrude from the inner beam 2130. In this way, when the carrying device provided by the embodiment of the present invention is being transported, for example, when the second connection surface 2111A2 contacts the roller for rolling transport, it is not easy to get stuck due to heating deformation or the presence of foreign matter, and is more conducive to ensuring stability and smoothness during the transport process.

[0070] In fact, along the third direction Z, the side where the second connection surface 2111A2 of the support beam 2110 is located can also protrude from the side beam 2120. In other words, the side where the second connection surface 2111A2 of the support beam 2110 is located can protrude from all other beams, so that the transmission jam can be avoided to a greater extent.

[0071] In some optional implementations, the frame 2000 may further include an elastic conductive component 2200. The elastic conductive component 2200 may be installed on the frame body 2100, for example, it may be installed on other beams such as the side beam 2120 and the inner beam 2130, and at least a portion of the elastic conductive component 2200 may be elastically deformed along the third direction Z. Along the third direction Z, one end of the elastic conductive component 2200 may be in contact with the tray 1000, and the other end of the elastic conductive component 2200 may be used to contact with a grounding component, specifically, may be in contact with the lower heating plate 3000.

[0072] Under normal conditions, that is, when the elastic conductive component 2200 is not in contact with the lower heating plate 3000, the elastic conductive component 2200 may have a protruding portion protruding from the second connection surface 2111A2 along the third direction Z, and the size of the protruding portion in the third direction Z may be, for example, between 2 mm and 3 mm. When the lower heating plate 3000 is lifted by a lifting device and then abuts against the support beam 2110 along the third direction Z, the elastic conductive component 2200 may be deformed under pressure, and the contact effect between the elastic conductive component 2200 and the tray 1000 and the lower heating plate 3000 may be better, and accordingly, the grounding effect of the bearing device provided in the embodiment of the present invention may also be better.

[0073] In some schemes, such as Figure 5 As shown, the elastic conductive component 2200 may include a first elastic piece 2210 .

[0074] The first elastic piece 2210 may be roughly in the shape of a "bow", and may be connected and fixed by a third connecting component 2220, and the third connecting component 2220 may be, for example, a bolt, a screw, etc. The first elastic piece 2210 may include a first deforming portion 2211 and a second deforming portion 2212. Under normal conditions, the first deforming portion 2211 may have a protruding portion protruding from the first connecting surface 2111B1 along the third direction Z, and the second deforming portion 2212 may have a protruding portion protruding from the second connecting surface 2111A2 along the third direction Z, and the size of the two protruding portions in the third direction Z may be between 2 mm and 3 mm.

[0075] After the tray 1000 and the frame 2000 are connected, the first deformation part 2211 can be elastically deformed, and the first deformation part 2211 can be in elastic contact with the tray 1000. After the lower heating plate 3000 is lifted, the second deformation part 2212 can be elastically deformed, and the second deformation part 2212 can be in elastic contact with the lower heating plate 3000. Since the first deformation part 2211 and the second deformation part 2212 are both elastic contacts under elastic deformation, the contact reliability of the first spring piece 2210 and the tray 1000 and the lower heating plate 3000 can be relatively high, and accordingly, the grounding effect can be better.

[0076] In other schemes, such as Figure 6 and Figure 7 As shown, the elastic conductive component 2200 may include a support plate 2230 and a second elastic sheet 2240 .

[0077] The support plate 2230 can be connected to the frame body 2100, and the specific connection method can be, for example, welding, clamping, screw connection, riveting, etc. After the support plate 2230 is installed, the support plate 2230 can realize the press-fitting of the second spring piece 2240, so as to press the second spring piece 2240 between the support plate 2230 and the frame body 2100. The support plate 2230 can be specifically prepared by aluminum alloy, coated carbon fiber, etc., so as to have relatively good electrical conductivity and mechanical strength. After the tray 1000 and the frame 2000 are connected, the support plate 2230 can contact the tray 1000.

[0078] Under normal conditions, the second elastic piece 2240 may have a protruding portion protruding from the second connecting surface 2111A2 along the third direction Z, and the size of the protruding portion in the third direction Z may also be between 2 mm and 3 mm.

[0079] In a specific application, the support plate 2230 is used to contact the tray 1000, and the second spring piece 2240 is used to contact the grounding component. After the lower heating plate 3000 is lifted, the second spring piece 2240 can be elastically deformed, and the second spring piece 2240 can be elastically contacted with the lower heating plate 3000. At this time, the contact reliability of the second spring piece 2240 and the lower heating plate 3000 can be relatively high.

[0080] Here, the embodiment of the present invention does not limit the specific structural form of the second elastic piece 2240. In practical applications, those skilled in the art can select it according to specific needs, as long as it can meet the requirements of use. Figure 7The second spring piece 2240 may include a U-shaped main body portion 2241 and a flange portion 2242. The main body portion 2241 may include a bottom plate portion 2241A and two side plate portions 2241B. The side of the two side plate portions 2241B facing away from the bottom plate portion 2241A may be connected to the flange portion 2242. The bottom plate portion 2241A may be pressed between the support plate 2230 and the frame body 2100, and the two flange portions 2242 are used for elastic contact with the lower heating plate 3000.

[0081] The above are only preferred embodiments of the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A substrate carrier device, characterized in that: The invention comprises a tray and a frame, wherein the frame comprises a frame body, the frame body comprises a support beam body, the support beam body extends along a first direction, the support beam body comprises a metal beam portion and two clamping plate beam portions, the material of the two clamping plate beam portions is different from that of the metal beam portion, the two clamping plate beam portions are respectively located on both sides of the metal beam portion in a second direction, and the two clamping plate beam portions are both connected to the metal beam portion, the two end surfaces of the metal beam portion in a third direction are respectively a first connecting surface and a second connecting surface, the first connecting surface is in contact with the tray, the second connecting surface is in contact with a grounding component, and the first direction, the second direction and the third direction are all arranged at an angle.

2. The substrate carrier according to claim 1, characterized in that: The cross-section of the metal beam portion perpendicular to the first direction is T-shaped, and includes a horizontal plate and a vertical plate arranged along the third direction. The horizontal plate includes two supporting plate portions, and the two supporting plate portions are respectively located on both sides of the vertical plate in the second direction. The two clamping plate beam portions are respectively abutted against the two supporting plate portions along the third direction, and the two clamping plate beam portions are both abutted against the vertical plate along the second direction. The side of the vertical plate facing away from the horizontal plate is the first connecting surface, and the side of the horizontal plate facing away from the vertical plate is the second connecting surface.

3. The substrate carrying device according to claim 2, characterized in that: The invention further comprises a first connecting member, wherein the first connecting member is used to connect the supporting plate portion and the clamping plate beam portion which are located on the same side in the second direction.

4. The substrate carrying device according to claim 1, characterized in that: It also includes a second connecting component, which includes a connecting bolt, a connecting nut and an elastic pad, the connecting bolt includes a head and a rod, the rod passes through the two clamping plate beams and the metal beam, and the connecting nut is connected to the rod; The elastic pad is located between the support beam and the head; or, the elastic pad is located between the connecting nut and the support beam.

5. The substrate carrying device according to claim 4, characterized in that: The elastic pad is a butterfly spring.

6. The substrate carrying device according to claim 1, characterized in that: The two clamping plate beam parts are both made of non-metallic conductive materials.

7. The substrate carrying device according to claim 6, characterized in that: The clamping plate beam portion is made of graphite material or carbon composite material, and the thermal expansion coefficient of the metal beam portion matches that of the clamping plate beam portion.

8. The substrate carrying device according to any one of claims 1 to 7, characterized in that: The frame body also includes other beams, which include side beams. There are two side beams and two support beams, and the two side beams are spaced apart along the first direction. The two support beams are spaced apart along the second direction. The two side beams are connected to the two support beams to form an outer frame of the frame body.

9. The substrate carrying device according to claim 8, characterized in that: The other beams also include an inner beam, which is connected to the outer frame and located on the inner side of the outer frame; Along the third direction, the side of the support beam body where the second connecting surface is located protrudes from the inner beam body.

10. The substrate carrying device according to any one of claims 1 to 7, characterized in that: The frame further comprises an elastic conductive component, the elastic conductive component is mounted on the frame body, and at least a part of the elastic conductive component can be elastically deformed along the third direction; Along the third direction, one end of the elastic conductive component is in contact with the tray, and the other end of the elastic conductive component is used to contact with the grounding component.

11. The substrate carrying device according to claim 10, characterized in that: The elastic conductive component includes a first spring sheet, the first spring sheet includes a first deformation portion and a second deformation portion, the first deformation portion and the second deformation portion are arranged along the third direction, the first deformation portion is used to elastically contact with the tray, and the second deformation portion is used to elastically contact with the grounding component.

12. The substrate carrying device according to claim 10, characterized in that: The elastic conductive component includes a support plate and a second spring sheet, the support plate is connected to the frame body, the second spring sheet is pressed onto the support plate and the frame body, the support plate is in contact with the tray, and the second spring sheet is used to elastically contact with the grounding component.

13. The substrate carrying device according to claim 12, characterized in that: The second elastic piece includes a U-shaped main body and a flange portion, the main body includes a bottom plate portion and two side plate portions, the flange portions are connected to one side of the two side plate portions away from the bottom plate portion, and the bottom plate portion is pressed between the support plate and the frame body.

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