Silicon square rod detection equipment

Abstract

The invention discloses silicon square rod detection equipment. The silicon square rod detection equipment comprises a rack, a size appearance detection device and a control module. The size appearance detection device comprises a plurality of first sensors, each of the plurality of first sensors corresponds to one edge of the silicon square rod in the detection process of the silicon square rod, and the plurality of first sensors can detect the edges of the silicon square rod in the preset direction to obtain point cloud data corresponding to each edge. And the control module is connected with the size appearance detection device and is used for judging whether the silicon square rod has a size defect or not based on the point cloud data. Through the arrangement, the verticality of the silicon square rod can be detected, so that the detection accuracy of the silicon square rod is improved.

Description

Technical Field

[0001] The present application relates to the technical field of silicon square rod processing, and in particular to a silicon square rod detection device. Background Art

[0002] As an important component of semiconductor materials, silicon square rods are widely used in the manufacture of electronic devices. Their quality directly affects the performance and reliability of the final product.

[0003] In the prior art, the size detection of square silicon bars is measured by contact sensors, and point contact detection is performed on the surface of the square silicon bars through a number of contact sensors. The amount of data collected by the above size detection method is limited, resulting in inaccurate size detection results. In addition, the verticality of the square silicon bars cannot be detected by point contact detection, resulting in inaccurate detection results.

[0004] Therefore, how to improve the detection accuracy of silicon square rods is a technical problem that technical personnel in this field urgently need to solve. Summary of the invention

[0005] In order to solve the deficiencies of the prior art, the purpose of the present application is to provide a silicon square rod detection device that can improve detection accuracy.

[0006] To achieve the above objectives, this application adopts the following technical solutions: A silicon square rod detection device, the silicon square rod detection device includes a frame, a size appearance detection device and a control module. The frame has a guide rail extending along a preset direction. At least part of the size appearance detection device is installed on the guide rail and can move relative to the frame along the preset direction. The size appearance detection device includes a plurality of first sensors. During the detection of the silicon square rod, each of the plurality of first sensors corresponds to an edge of the silicon square rod. The plurality of first sensors can detect the edges of the silicon square rod along the preset direction to obtain point cloud data corresponding to each edge. The control module is connected to the size appearance detection device, and the control module is used to determine whether the silicon square rod has size defects based on the point cloud data.

[0007] Furthermore, the control module executes the step of determining whether the silicon square rod has size defects based on the point cloud data, including: obtaining first point cloud data corresponding to the first edge, second point cloud data corresponding to the second edge, and third point cloud data corresponding to the third edge; fitting the first side between the first edge and the second edge based on the first point cloud data and the second point cloud data; fitting the second side between the second edge and the third edge based on the second point cloud data and the third point cloud data; determining the verticality of the silicon square rod according to the angle between the first side and the second side, and determining whether the silicon square rod has size defects.

[0008] Furthermore, the control module executes the step of determining whether the silicon square rod has size defects based on the point cloud data, including: obtaining first point cloud data corresponding to the first edge; determining two side edges adjacent to the first edge based on the first point cloud data; determining the verticality of the silicon square rod according to the angle between the two side edges, and determining whether the silicon square rod has size defects.

[0009] Furthermore, the control module executes the step of determining whether the silicon square rod has size defects based on the point cloud data, including: obtaining first point cloud data corresponding to the first edge; determining two side edges adjacent to the first edge based on the first point cloud data; determining the normal lines of the two side edges to obtain the angle between the two normal lines; determining the verticality of the silicon square rod according to the angle between the two normal lines, and determining whether the silicon square rod has size defects.

[0010] Furthermore, the control module executes the step of determining whether the silicon square rod has size defects based on the point cloud data, including: obtaining first point cloud data corresponding to the first edge, second point cloud data corresponding to the second edge, third point cloud data corresponding to the third edge, and fourth point cloud data corresponding to the fourth edge; fitting a first side between the first edge and the second edge based on the first point cloud data and the second point cloud data; fitting a third side between the third edge and the fourth edge based on the third point cloud data and the fourth point cloud data; and determining whether the silicon square rod has size defects based on the parallelism of the first side and the third side.

[0011] Furthermore, the first sensor is also used to obtain a brightness image of the edge, and the control module is used to determine whether there is an appearance defect on the edge based on the brightness image.

[0012] Furthermore, the dimensional appearance detection device also includes a second sensor, which performs detection on one side surface of the silicon square rod to obtain surface point cloud data corresponding to the surface; the control module determines the curvature of the surface based on the surface point cloud data, and if the curvature of the surface is outside the set threshold range, it is determined that the silicon square rod has a dimensional defect.

[0013] Furthermore, the size and appearance detection device also includes a plurality of surface detection cameras, each of which corresponds to a surface of the silicon square rod, and each surface detection camera is configured with two light sources, and the two light sources are directed toward the surface of the silicon square rod at different irradiation angles.

[0014] Furthermore, the control module is electrically connected to the surface detection camera and the two light sources respectively. During the detection process of the silicon square rod, the control module can control the two light sources to illuminate the surface of the silicon square rod in turn at set intervals. The control module can control the surface detection camera to generate two images with different lighting angles at set intervals. If there is a light spot in any of the two images, the control module determines that there is an appearance defect on the side of the silicon square rod.

[0015] Furthermore, the silicon square rod detection equipment also includes a hidden crack detection device, which includes an infrared light source and an infrared camera. The infrared light source and the infrared camera are arranged relative to each other so that the infrared camera can obtain light emitted from the infrared light source and passing through the silicon square rod to generate an infrared image; the control module is electrically connected to the infrared camera, and the control module can determine whether there are hidden cracks inside the silicon square rod based on the grayscale value of the silicon square rod in the infrared image.

[0016] Furthermore, the silicon square rod detection equipment also includes a lifting assembly and two clamping assemblies arranged along a preset direction. The lifting assembly is installed on the frame, and the lifting assembly is used to support the silicon square rod and can move relative to the frame in the height direction. The lifting assembly is located between the two clamping assemblies, and the two clamping assemblies cooperate to clamp the silicon square rod set on the lifting assembly. The clamping assembly includes a fixing mechanism and a driving mechanism. The driving mechanism is installed on the frame, and the driving mechanism is used to drive the fixing mechanism to approach or move away from the silicon square rod along a preset direction; the fixing mechanism has a contact surface abutting against the end of the silicon square rod, and the fixing mechanism is provided with a movable part, defining a longitudinal plane perpendicular to the preset direction, and adjusting the angle between the contact surface and the longitudinal plane based on the movable part.

[0017] The silicon square rod detection device can obtain point cloud data corresponding to each edge through the size appearance detection device, and then determine whether there are defects in the size of the silicon square rod based on the point cloud data through the control module, so as to improve the detection accuracy of the silicon square rod. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the overall structure of the silicon square rod testing equipment provided in this application; Figure 2 A schematic diagram of a combination of a first sensor, a second sensor and a motion detection device of a silicon square rod detection device provided in the present application; Figure 3 A schematic diagram of the structure of the silicon square rod provided in this application; Figure 4 A schematic diagram of a silicon square rod figure fitted by a control module of a silicon square rod detection device provided in the present application; Figure 5 A schematic diagram of the process of detecting the verticality of a silicon square bar by the silicon square bar detection device provided in this application; Figure 6 A schematic diagram of a second process for detecting the verticality of a silicon square bar by the silicon square bar detection device provided in the present application; Figure 7 A third flow chart of the silicon square bar detection device provided in the present application for detecting the verticality of the silicon square bar; Figure 8A schematic diagram of fitting a first normal line graph and a second normal line graph to a control module of a silicon square rod detection device provided in the present application; Fig. 9 A schematic diagram of the process of detecting the parallelism of silicon square bars by the silicon square bar detection device provided in this application; Fig.10 Schematic diagram of the process of detecting the surface curvature of the silicon square rod by the silicon square rod detection equipment provided in this application Fig.11 A schematic diagram of a combination of a surface detection camera, a light source, and a detection motion device for a silicon square rod detection device provided in this application; Fig.12 A schematic diagram of a combination of a first light source, a second light source, a surface detection camera and a silicon square bar of a silicon square bar detection device provided in the present application; Fig.13 A schematic diagram of the combination of an infrared light source, an infrared camera and a silicon square rod of the silicon square rod detection device provided in this application; Fig.14 A schematic diagram of the structure of the clamping assembly of the silicon square bar detection device provided in this application; Fig.15 This is a schematic diagram of the structure of the fixing mechanism of the silicon square rod detection equipment provided in this application.

[0019] Among them, 100, silicon square rod detection equipment; 11, rack; 111, guide rail; 12, size appearance detection device; 121, first sensor; 122, second sensor; 123, surface detection camera; 124, light source; 1241, first light source; 1242, second light source; 125, infrared light source; 126, infrared camera; 13, moving component; 14, detection motion device; 15, lifting component; 16, clamping component; 161, fixing mechanism; 1611, contact surface; 1612, movable part; 1613, Fixed end; 162, driving mechanism; 101, longitudinal plane; 200, silicon square rod; 21, first edge; 22, second edge; 23, third edge; 24, fourth edge; 25, first surface; 251, first side; 2511, first normal; 26, second surface; 261, second side; 2611, second normal; 27, third surface; 271, third side; 28, fourth surface; 281, fourth side; α, first angle; β, second angle; γ, third angle; δ, fourth angle; ε, angle. DETAILED DESCRIPTION

[0020] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the specific implementation manner of the present application will be clearly and completely described below in conjunction with the drawings in the implementation manner of the present application.

[0021] It should be noted that the words "first", "second" and similar words used in the specification and claims of this application do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one" or "a" do not indicate a quantitative limitation, but indicate the existence of at least one. "Multiple" or "several" means at least two. Unless otherwise specified, words such as "front", "back", "left", "right", "bottom" and / or "top" are only for the convenience of description and are not limited to one position or one spatial orientation. Words such as "include" or "comprise" mean that the elements or objects appearing before "include" or "comprise" include the elements or objects listed after "include" or "comprise" and their equivalents, and do not exclude other elements or objects. Words such as "connect" or "connected" are not limited to physical or mechanical connections, and may include electrical connections, whether direct or indirect.

[0022] The singular forms "a", "said" and "the" used in this specification and the appended claims are also intended to include the plural forms, unless the context clearly indicates otherwise. It should also be understood that the term "and / or" used herein refers to and includes any or all possible combinations of one or more of the associated listed items.

[0023] In order to clearly illustrate the technical solution of this application, the following is also defined: Figure 1 The front, back, up, down, left and right directions are shown.

[0024] like Figure 1 and Figure 2As shown, the present application discloses a silicon square rod detection device 100, which is used to detect the appearance and size of a square silicon square rod 200. Specifically, the silicon square rod detection device 100 includes a frame 11, a size appearance detection device 12 and a control module (not shown). Among them, the frame 11 constitutes the basic frame of the silicon square rod detection device 100 and is used to support the size appearance detection device 12. The size appearance detection device 12 is used to detect the size and appearance data of the silicon square rod 200. The control module is connected to the size appearance detection device 12, and the control module is used to determine whether the silicon square rod 200 has size and appearance defects based on the detection data of the size appearance detection device 12. The control module can be a controller integrated on the silicon square rod detection device 100, or the control module can be a separately set terminal, which is connected to the size appearance detection device 12 through a data bus. In this way, the size defects and appearance defects of the silicon square rod 200 can be detected by a silicon square rod detection device 100, which is conducive to improving the quality inspection efficiency of the silicon square rod 200. In addition, there is no need to arrange two devices in the venue to respectively detect the size defects and appearance defects of the silicon square rod 200, which is conducive to reducing the space occupied by the silicon square rod detection device 100. More silicon square rod detection devices 100 can be arranged in a limited space to further improve the detection efficiency of the silicon square rod 200.

[0025] More specifically, the frame 11 has a guide rail 111 extending along a preset direction, and at least a portion of the size appearance detection device 12 is mounted on the guide rail 111 and can move relative to the frame 11 along the preset direction. In the embodiment of the present application, the preset direction is the front-to-back direction of the silicon square rod detection device 100. With such an arrangement, the guide rail 111 can guide the movement of the size appearance detection device 12 on the frame 11, thereby improving the movement stability of the size appearance detection device 12 on the frame 11. Secondly, the silicon square rod 200 is supported by the frame 11, and the extension direction of the silicon square rod 200 is consistent with the preset direction, so that the size appearance detection device 12 can detect the silicon square rod 200 as a whole during the movement along the preset direction.

[0026] As an optional implementation, the silicon square rod detection device 100 includes a moving component 13, which is installed on the frame 11. The moving component 13 is connected to the size appearance detection device 12, and the moving component 13 is used to drive the size appearance detection device 12 to move along a preset direction on the guide rail 111.

[0027] In this embodiment, the size appearance detection device 12 includes a plurality of first sensors 121. The silicon square rod 200 has four edges extending along a preset direction, and the first sensors 121 are used to detect the edges of the silicon square rod 200. The number of the first sensors 121 is set to four, and each first sensor 121 corresponds to an edge of the silicon square rod 200.

[0028] During the detection of the silicon square rod 200, each of the first sensors 121 corresponds to an edge of the silicon square rod 200, and the first sensors 121 can detect the edges of the silicon square rod 200 along a preset direction to obtain point cloud data corresponding to each edge. In the related art, the edges of the silicon square rod are detected by point contact, and it may be that the defective points are not detected during the edge detection. However, in the embodiment of the present application, by obtaining the point cloud data representing the edges of the silicon square rod 200 through the above-mentioned setting, it is possible to avoid the omission of the edge size defect detection, which is conducive to improving the detection accuracy of the edges of the silicon square rod 200.

[0029] The control module determines whether there is a size defect in the silicon square rod 200 based on the point cloud data. Specifically, the control module can fit the corresponding silicon square rod 200 figure through the point cloud data corresponding to the edge, so as to determine whether there is a size defect in the silicon square rod 200 according to the fitted silicon square rod 200 figure, thereby improving the detection accuracy of the silicon square rod 200.

[0030] It should be noted that the point cloud data refers to a set of vectors in a three-dimensional coordinate system. Therefore, the control module can fit the corresponding silicon square rod 200 graphics based on the three-dimensional coordinates of the set of vectors, so that the control module can judge the size defects of the silicon square rod 200 according to the fitting graphics of the silicon square rod 200. In addition, by fitting the corresponding silicon square rod 200 graphics, the side length, chamfer size and length data of the silicon square rod 200 can be obtained. Therefore, the silicon square rod detection device 100 of the present application can also detect the size data of the silicon square rod 200 to improve the functionality of the silicon square rod detection device 100.

[0031] Exemplarily, four first sensors 121 are provided, and each first sensor 121 corresponds to an edge of the silicon square rod 200, so that the first sensor 121 can obtain the point cloud data of each edge of the silicon square rod 200. The control module can cut the ROI of the edge point cloud data obtained by the first sensor 121 according to the size data of the standard silicon square rod, and remove abnormal data such as imaging noise, so that the control module performs a rough screening of the edge point cloud data obtained by the first sensor 121. The control module sets the basic range of the three-dimensional coordinate threshold of the standard silicon square rod at any sampling time according to the size of the standard silicon square rod, and the control module performs a fine screening of the roughly screened edge point cloud data according to the basic range of the three-dimensional coordinate threshold, so as to remove the abnormal edge point cloud data that is too large or too small and exceeds the basic range of the three-dimensional coordinate threshold, thereby obtaining valid edge point cloud data. At any sampling moment, a relative coordinate system is constructed with the vector of the effective edge point cloud data obtained by one of the first sensors 121 as the coordinate origin. The control module fits the edge figure of the silicon square rod 200 at the sampling moment in the relative coordinate system according to the effective edge point cloud data obtained by the four first sensors 121, and fits the side figure of the silicon square rod 200 at the sampling moment in the relative coordinate system according to the fitted edge figure, so as to obtain the fitted figure of the silicon square rod 200 at the sampling moment, and then judges whether the silicon square rod 200 has size defects, such as the verticality of the silicon square rod 200 and whether the silicon square rod 200 has defects such as concave, based on the comparison of the size data of the fitted silicon square rod 200 figure with the size data of the standard silicon square rod.

[0032] It should be noted that cropping ROI refers to extracting a specific area containing important information from the original image in image processing or computer vision tasks. This area usually contains data useful for a specific task, and cropping other irrelevant parts can reduce the amount of calculation, increase processing speed, or simplify the subsequent analysis process. Therefore, by cropping the ROI of the first sensor 121, point cloud data within the basic size range of the standard silicon square rod can be extracted.

[0033] Exemplarily, the fitted silicon square rod 200 graphic can display the angle of the edges of the silicon square rod 200, so that the verticality of the silicon square rod 200 can be judged according to the angle of the edges of the silicon square rod 200, so as to detect the verticality of the silicon square rod 200, which is beneficial to improve the detection accuracy of the size of the silicon square rod 200.

[0034] It should be noted that in the present application, the edges of the silicon square rod 200 are chamfered, and the first sensor 121 obtains the point cloud data corresponding to the chamfer of each edge. Secondly, the first sensor 121 can also obtain the corresponding point cloud data for the edges of the silicon square rod 200 that are not chamfered, so the present application does not limit whether the edges of the silicon square rod 200 are chamfered. In addition, the present application takes the example of the edges of the silicon square rod 200 having chamfers as an example.

[0035] It should be noted that if Figure 3 and Figure 4 As shown, the silicon square rod 200 in the present application includes a first edge 21, a second edge 22, a third edge 23 and a fourth edge 24, and a first surface 25, a second surface 26, a third surface 27 and a fourth surface 28. The first surface 25 is arranged between the first edge 21 and the second edge 22, the second surface 26 is arranged between the second edge 22 and the third edge 23, the third surface 27 is arranged between the third edge 23 and the fourth edge 24, and the fourth surface 28 is arranged between the first edge 21 and the fourth edge 24. At any sampling moment, the first side 251 is defined between the first edge 21 and the second edge 22, the second side 261 is defined between the second edge 22 and the third edge 23, the third side 271 is defined between the third edge 23 and the fourth edge 24, the fourth side 281 is defined between the first edge 21 and the fourth edge 24, and the angle between the first side 251 and the second side 261 is defined as the first angle α, the angle between the second side 261 and the third side 271 is defined as the second angle β, the angle between the third side 271 and the fourth side 281 is defined as the third angle γ, and the angle between the first side 251 and the fourth side 281 is defined as the fourth angle δ. The verticality of the silicon square rod 200 is determined by detecting the angles of the first angle α, the second angle β, the third angle γ, and the fourth angle δ.

[0036] In addition, the present application has the same detection steps for the first angle α, the second angle β, the third angle γ and the fourth angle δ. Therefore, the present application uses the detection steps for the first angle α as an example to illustrate, and the detection steps for the second angle β, the third angle γ and the fourth angle δ are not repeated.

[0037] like Figure 5 As shown, as an implementation mode, the control module executes the step of determining whether the silicon square rod 200 has a size defect based on the point cloud data, and the step includes: S101: Obtain first point cloud data corresponding to the first edge 21 , second point cloud data corresponding to the second edge 22 , and third point cloud data corresponding to the third edge 23 .

[0038] During the movement of the size appearance detection device 12 along the preset direction, the detection direction of the first sensor 121 is toward the first edge 21. The first sensor 121 acquires the first point cloud data representing the appearance size of the first edge 21 in real time during the movement of the size appearance detection device 12. According to the above content, the first point cloud data includes a vector of a sampling point of the first edge 21 corresponding to each sampling moment in the three-dimensional coordinate system. At the same time, the first sensor 121 corresponding to the second edge 22 can acquire the second point cloud data. The first sensor 121 corresponding to the third edge 23 can acquire the third point cloud data.

[0039] S102: Fitting a first side edge 251 between the first edge 21 and the second edge 22 based on the first point cloud data and the second point cloud data.

[0040] For example, the first point cloud data includes a first vector corresponding to the first sampling moment, and the second point cloud data includes a second vector corresponding to the first sampling moment. Based on the first vector and the second vector, it can be determined that at the first sampling moment, the first side 251 between the first edge 21 and the second edge 22.

[0041] S103: fitting a second side edge 261 between the second edge 22 and the third edge 23 based on the second point cloud data and the third point cloud data; S104: Determine the verticality of the silicon square rod 200 according to the angle between the first side 251 and the second side 261, and judge whether the silicon square rod 200 has a size defect.

[0042] The control module can obtain the angle of the first angle α at the sampling moment of step S102 according to the first side 251 figure in step S102 and the second side 261 figure in step S103, thereby judging whether the first side 251 and the second side 261 of the silicon square rod 200 are perpendicular according to the angle of the first angle α, and further judging whether the corresponding first surface 25 and second surface 26 at the sampling moment are perpendicular, so as to achieve the purpose of detecting size defects of the silicon square rod 200, and further help to improve the detection accuracy of the silicon square rod 200.

[0043] like Figure 6 As shown, as another embodiment, the control module executes the step of judging whether the silicon square rod 200 has a size defect based on the point cloud data, and the step includes: S201: Obtain first point cloud data corresponding to the first edge 21.

[0044] S202: Determine two side edges adjacent to the first edge 21 based on the first point cloud data.

[0045] During the process of the first sensor 121 detecting the first edge 21, the first sensor 121 can illuminate partial areas on both sides adjacent to the first edge 21, so that the control module can fit the graphics of the first side 251 and the second side 261 according to the data of the acquired partial areas.

[0046] S203: Determine the verticality of the silicon square rod 200 according to the angle between the two sides, and judge whether the silicon square rod 200 has a size defect.

[0047] In step S203, the control module can obtain the angle of the first angle α at the sampling moment in step S201 according to the first side 251 figure and the second side 261 figure in step S202, thereby judging whether the first side 251 and the second side 261 of the silicon square rod 200 are perpendicular according to the angle of the first angle α, and further judging whether the corresponding first surface 25 and second surface 26 at the sampling moment are perpendicular, so as to achieve the purpose of detecting size defects of the silicon square rod 200.

[0048] It should be noted that, in this embodiment, when the first sensor 121 corresponding to the first edge 21 obtains the point cloud data of the first edge 21 at any sampling time, the first sensor 121 can simultaneously detect the point cloud data of the first surface 25 and the second surface 26 of the silicon square rod 200 adjacent to the first edge 21, so that the control module can fit the first side 251 figure corresponding to the first surface 25 at the sampling time according to the three-dimensional coordinate vector of the point cloud data of the first surface 25, and fit the second side 261 figure corresponding to the second surface 26 at the sampling time according to the three-dimensional coordinate vector of the point cloud data of the second surface 26, so that the control module detects the angle of the first angle α through the first side 251 figure and the second side 261 figure, so as to determine whether the first surface 25 and the second surface 26 at the sampling time are perpendicular, thereby achieving the purpose of detecting the size defects of the silicon square rod 200.

[0049] like Figure 7 and Figure 8 As shown, as another embodiment, the control module executes the step of judging whether the silicon square rod 200 has a size defect based on the point cloud data, and the step includes: S301: Obtain first point cloud data corresponding to the first edge 21.

[0050] S302: Determine two side edges adjacent to the first edge 21 based on the first point cloud data.

[0051] At any sampling moment, the control module can fit the first side 251 figure and the second side 261 figure after receiving the first point cloud data.

[0052] S303: Determine the normal lines of the two sides to obtain the angle between the two normal lines.

[0053] The control module can fit a first normal line 2511 corresponding to the first side 251 figure according to the first side 251 figure, and fit a second normal line 2611 corresponding to the second side 261 figure according to the second side 261 figure. The first angle α at the sampling moment can be obtained according to the angle ε between the first normal line 2511 and the second normal line 2611, so as to judge whether the first side 251 and the second side 261 are perpendicular according to the angle of the first angle α, and further judge whether the first surface 25 and the second surface 26 of the corresponding silicon square rod 200 are perpendicular at the sampling moment, so as to achieve the purpose of detecting size defects of the silicon square rod 200.

[0054] S304: Determine the verticality of the silicon square rod 200 according to the angle between the two normal lines, and judge whether the silicon square rod 200 has a size defect.

[0055] like Fig. 9 As shown, as an optional embodiment, the silicon square rod detection device 100 of the present application can also detect the parallelism of two opposite surfaces on the silicon square rod 200, and the detection of the parallelism of the first surface 25 and the third surface 27 is taken as an example for explanation, and the parallelism of the second surface 26 and the fourth surface 28 is not described in detail.

[0056] Specifically, the control module executes a step of determining whether the silicon square rod 200 has a size defect based on the point cloud data, and the step includes: S401: obtaining first point cloud data corresponding to the first edge 21, second point cloud data corresponding to the second edge 22, third point cloud data corresponding to the third edge 23, and fourth point cloud data corresponding to the fourth edge 24; When the size appearance detection device 12 moves along the preset direction, the first sensor 121 corresponding to the first edge 21 can obtain the first point cloud data. The first sensor 121 corresponding to the second edge 22 can obtain the second point cloud data. The first sensor 121 corresponding to the third edge 23 can obtain the third point cloud data. The first sensor 121 corresponding to the fourth edge 24 can obtain the fourth point cloud data.

[0057] S402: fitting a first side edge 251 between the first edge 21 and the second edge 22 based on the first point cloud data and the second point cloud data; S403: fitting a third side edge 271 between the third edge 23 and the fourth edge 24 based on the third point cloud data and the fourth point cloud data; S404: Determine whether the silicon square rod 200 has a size defect based on the parallelism between the first side 251 and the third side 271.

[0058] The control module detects the parallelism between the first side 251 and the second side 261, thereby obtaining the parallelism between the first side 251 and the third side 271 at the sampling moment, and further obtaining the parallelism at the corresponding first surface 25 and the third surface 27 at the sampling moment of step S402, so as to further determine the size defects of the silicon square rod 200, thereby improving the detection accuracy of the silicon square rod 200.

[0059] As an optional implementation, in order to detect the appearance quality of the edge of the silicon square rod 200, the first sensor 121 is also used to obtain a brightness image of the edge, and the control module is used to determine whether the edge has an appearance defect based on the brightness image. In this way, when the first sensor 121 detects the edge of the silicon square rod 200, the first sensor 121 will illuminate the edge of the silicon square rod 200, so that the first sensor 121 can obtain the brightness image of the edge of the silicon square rod 200. When the edge has a defect, the light irradiated by the first sensor 121 will be refracted when passing through the defect, so that there is a light spot different from the surrounding brightness on the edge brightness image obtained by the first sensor 121. The control module determines whether the edge has a defect by detecting whether there is a light spot on the edge brightness image, so as to realize the appearance quality detection of the edge of the silicon square rod 200.

[0060] Exemplarily, the detection of whether the first edge 21 has an appearance defect is used as an example for description. The first sensor 121 obtains a brightness image of the first edge 21. When there are defects such as protrusions or depressions on the first edge 21, the light source 124 will produce scattering, reflection or refraction when irradiating the defect, so that the defect presents a light spot with a different brightness from the surrounding on the brightness image. It can be understood that by detecting the brightness image obtained by the first sensor 121, it can be determined whether the first edge 21 has an appearance defect, thereby further improving the detection accuracy of the silicon square rod 200 by the silicon square rod detection device 100.

[0061] like Figure 2 and Fig.10 As shown, in order to detect the surface dimensional quality of the silicon square rod 200, the dimensional appearance detection device 12 of the present application also includes a second sensor 122, and the second sensor 122 detects the surface of one side of the silicon square rod 200 to obtain surface point cloud data corresponding to the surface. Specifically, the control module determines the curvature of the surface based on the surface point cloud data. If the curvature is outside the set threshold range, it is determined that the silicon square rod 200 has a dimensional defect. Among them, the set threshold range is the surface curvature range of the silicon square rod 200 when it is in the standard state. In this way, the curvature of the corresponding surface of the silicon square rod 200 can be obtained by the second sensor 122 to determine whether the silicon square rod 200 has defects.

[0062] Exemplarily, four second sensors 122 are provided, and each second sensor 122 corresponds to a surface of the silicon square rod 200, so that the second sensor 122 can detect the surface of the silicon square rod 200. Take the second sensor 122 detecting the first surface 25 as an example for explanation. The control module determines the curvature of the surface based on the surface point cloud data, and determines whether the silicon square rod 200 has a size defect, which includes: S501 : Obtaining surface point cloud data corresponding to the first surface 25 .

[0063] When the size and appearance detection device 12 moves along the preset direction, the second sensor 122 acquires the surface point cloud data of the first surface 25 .

[0064] S502: Fitting a first side edge 251 based on the surface point cloud data.

[0065] At any sampling moment, the control module fits the first side edge 251 figure based on the three-dimensional coordinates of the vector in the surface point cloud data. At this time, the control module detects the curvature of the first side edge 251 figure.

[0066] S503: judging whether the silicon square rod 200 has a size defect according to whether the curvature of the first side 251 meets a set threshold range.

[0067] The control module detects whether the curvature of the first side edge 251 meets the set threshold range, thereby determining whether the curvature of the first surface 25 meets the set threshold range at the sampling time of step S502, so as to determine whether there is a size defect on the first surface 25, thereby further improving the detection accuracy of the silicon square rod 200.

[0068] like Fig.11 and Fig.12As shown, in order to detect the surface appearance quality of the silicon square rod 200, the size appearance detection device 12 of the present application also includes a plurality of surface detection cameras 123, and the surface detection cameras 123 are used to detect the surface appearance quality of the silicon square rod 200. Specifically, each of the plurality of surface detection cameras 123 corresponds to a surface of the silicon square rod 200, and each surface detection camera 123 is configured with two light sources 124. More specifically, the two light sources 124 are directed toward the surface of the silicon square rod 200 at different illumination angles. The two light sources 124 can illuminate the surface of the silicon square rod 200 so that the surface appearance detection camera can obtain the surface brightness image of the silicon square rod 200. When there are defects such as convexities or concavities on the surface of the silicon square rod 200, the light of the two light sources 124 will cause the light to be refracted when it is directed toward the defect, thereby presenting light spots with different brightness on the surface brightness image, so that the control module can determine whether there are light spots in the surface brightness image to determine whether there are defects on the surface of the silicon square rod 200, so as to further improve the detection accuracy of the silicon square rod 200.

[0069] Exemplarily, the surface detection camera 123 detects the first surface 25 of the silicon square rod 200 as an example for explanation, and defines two light sources 124 as a first light source 1241 and a second light source 1242. When the first surface 25 is a smooth surface, the light of the first light source 1241 is refracted by the surface of the silicon square rod 200 and then emitted to the viewing direction of the surface detection camera 123, and the light of the second light source 1242 is refracted by the surface of the silicon square rod 200 and then does not emit to the viewing direction of the surface detection camera 123, so that the surface detection camera 123 can obtain the surface brightness image of the silicon square rod 200. When there are defects such as protrusions or depressions on the first surface 25, the light of the first light source 1241 and the second light source 1242 will produce refraction when passing through the defect, resulting in a light spot different from the surrounding brightness on the surface brightness image. In addition, the surface detection camera 123 is connected to the control module, and the control module determines whether there is a defect on the first surface 25 of the silicon square rod 200 according to whether there is a light spot on the surface brightness image, so as to realize the appearance defect detection of the first surface 25 of the silicon square rod 200.

[0070] As an optional implementation, the control module is electrically connected to the surface detection camera 123 and the two light sources 124. Specifically, during the detection of the silicon square rod 200, the control module can control the two light sources 124 to illuminate the surface of the silicon square rod 200 in sequence at a set interval, and the control module can control the surface detection camera 123 to generate two images with different lighting angles at a set interval. If there is a light spot in any of the two images, the control module determines that there is an appearance defect on the side of the silicon square rod 200.

[0071] In this embodiment, the two light sources 124 have different irradiation angles toward the surface of the silicon square rod 200, so that the surface inspection camera 123 can obtain images with different brightness, so that defects on the surface of the silicon square rod 200 can be simultaneously presented on images with different brightness, so as to avoid the situation where defects on the surface of the silicon square rod 200 are not obvious only on a single brightness image and lead to missed detection, which is beneficial to improve the accuracy of the surface of the silicon square rod 200.

[0072] For example, the surface detection camera 123 detects the first surface 25 of the silicon square rod 200, and two light sources 124 are defined as a first light source 1241 and a second light source 1242. When the first surface 25 is a smooth surface, the light of the first light source 1241 is refracted by the surface of the silicon square rod 200 and then emitted in the viewing direction of the surface detection camera 123, so that the surface detection camera 123 can obtain a bright field image with a higher brightness of the first surface 25 of the silicon square rod 200. The light of the second light source 1242 is refracted by the surface of the silicon square rod 200 and will not be emitted in the viewing direction of the surface detection camera 123, so that the surface detection camera 123 can obtain a dark field image with a lower brightness of the first surface 25 of the silicon square rod 200. The control module can control the two light sources 124 to illuminate the surface of the silicon square rod 200 in sequence at set intervals, so that defects such as protrusions, depressions or edge collapse on the first surface 25 can be displayed on both the bright field image and the dark field image, thereby avoiding the situation where the protrusions, depressions or edge collapse are obvious in the bright field image but not obvious in the dark field image, or avoiding the situation where the protrusions, depressions or edge collapse are obvious in the dark field image but not obvious in the bright field image. It can be understood that the above settings can avoid the situation where defects such as protrusions, depressions or edge collapse are not obvious in a single brightness image and thus lead to missed detection, so as to improve the detection accuracy of the silicon square rod 200 by the silicon square rod detection device 100.

[0073] It should be noted that, since the detection method of the surface detection camera 123 for the second surface 26, the third surface 27 and the fourth surface 28 of the silicon square rod 200 is consistent with the detection method for the first surface 25 of the silicon square rod 200, the detection method for the second surface 26, the third surface 27 and the fourth surface 28 of the silicon square rod 200 will not be repeated.

[0074] like Fig.13As shown, in order to detect whether there are defects inside the silicon square rod 200, the silicon square rod detection device of the present application also includes a hidden crack detection device, which includes an infrared light source 125 and an infrared camera 126. Specifically, the infrared light source 125 and the infrared camera 126 are arranged relative to each other, so that the infrared camera 126 can obtain the light emitted from the infrared light source 125 and passing through the silicon square rod 200 to generate an infrared image. In this way, the internal structure of the silicon square rod 200 can be displayed and an infrared image can be generated by the infrared light source 125 and the infrared camera 126, so that it can be judged whether there are defects inside the silicon square rod 200 by observing the infrared image, so as to realize the detection of internal defects of the silicon square rod 200.

[0075] More specifically, the control module is electrically connected to the infrared camera 126, and the control module can determine whether there is a hidden crack inside the silicon square rod 200 based on the gray value of the silicon square rod 200 in the infrared image. In this way, when there is a defect inside the silicon square rod 200, the gray value of the defect on the infrared image will be different from that of the surrounding area, thereby forming a trace of uneven gray value on the infrared image. The control module can determine whether there is a hidden crack defect inside the silicon square rod 200 based on whether there is a trace of uneven gray value on the infrared image, thereby improving the accuracy of quality inspection of the silicon square rod 200.

[0076] Exemplarily, the infrared light source 125 emits an infrared light of 1300-1700nm, and the infrared light enters the silicon square rod 200 perpendicularly to the first surface 25 of the silicon square rod 200. After the infrared light is conducted inside the silicon square rod 200, it is emitted from the third surface 27 and enters the infrared camera 126, so that the infrared camera 126 can present the internal image of the silicon square rod 200. When there are defects such as hidden cracks inside the silicon square rod 200, traces with different grayscale values ​​from the surrounding areas will appear on the infrared image. The control module determines whether there are defects such as hidden cracks inside the silicon square rod 200 by judging whether there are traces with different grayscale values ​​on the infrared image, thereby realizing defect detection inside the silicon square rod 200.

[0077] like Figure 2 and Fig.11As shown, in order to enable the silicon square rod detection device 100 to detect silicon square rods 200 of different sizes, the silicon square rod detection device 100 of the present application further includes a detection motion device 14. The detection motion device 14 is connected to at least part of the size appearance detection device 12, and the detection motion device 14 is used to drive the infrared light source 125, the infrared camera 126, the surface detection camera 123, the first sensor 121 and the second sensor 122 to move in a direction close to or away from the silicon rod. Exemplarily, the detection motion device 14 is a cylinder, which can respectively drive the infrared light source 125, the infrared camera 126, the surface detection camera 123, the first sensor 121 and the second sensor 122 to move closer to or away from the silicon rod, so that the above-mentioned components can adjust the distance between themselves and the silicon square rod 200 according to the size of the silicon square rod 200, so as to avoid the above-mentioned components being too close to the silicon square rod 200, resulting in incomplete detection of the silicon square rod 200, and also avoid the above-mentioned components being too far from the silicon square rod 200, resulting in reduced imaging clarity of the above-mentioned components detecting the silicon square rod 200, which is beneficial to improve the detection accuracy of the silicon square rod 200 by the silicon square rod detection equipment 100.

[0078] As an embodiment, the silicon square rod detection device 100 also includes a lifting assembly 15 and a clamping assembly 16. The lifting assembly 15 is installed on the frame 11, and the lifting assembly 15 is used to support the silicon square rod 200, and the lifting assembly 15 can move relative to the frame 11 in the height direction. The height direction is the up and down direction of the silicon square rod detection device 100, and the lifting assembly 15 can drive the silicon square rod 200 to move in the up and down direction of the silicon square rod detection device 100, thereby realizing the loading and unloading of the silicon square rod 200. Two clamping assemblies 16 are provided, and the two clamping assemblies 16 are arranged along a preset direction, so that the two clamping assemblies 16 can clamp the two ends of the silicon square rod 200 along the preset direction.

[0079] More specifically, the lifting assembly 15 is located between the two clamping assemblies 16, and the two clamping assemblies 16 cooperate to clamp the silicon square rod 200 disposed on the lifting assembly 15. Such a configuration can avoid interference between the lifting assembly 15 and the two clamping assemblies 16, so that the lifting assembly 15 can drive the silicon square rod 200 to lift and lower, and the two clamping assemblies 16 can clamp the silicon square rod 200.

[0080] like Fig.14 and Fig.15As shown, in this embodiment, the clamping assembly 16 includes a fixing mechanism 161 and a driving mechanism 162. Specifically, the driving mechanism 162 is installed on the frame 11, and the driving mechanism 162 is used to drive the fixing mechanism 161 to approach or move away from the silicon square rod 200 along a preset direction. Exemplarily, the driving mechanism 162 is a linear cylinder, and the fixing mechanism 161 can be driven by the linear cylinder to approach or move away from the silicon square rod 200 along a preset direction. When the driving mechanism 162 drives the fixing mechanism 161 to approach the silicon square rod 200, the fixing mechanism 161 can clamp the silicon square rod 200, so as to facilitate the appearance inspection device to inspect the silicon square rod 200; when the driving mechanism 162 drives the fixing mechanism 161 away from the silicon square rod 200, the fixing mechanism 161 can release the silicon square rod 200, so as to facilitate the loading and unloading of the silicon square rod 200.

[0081] More specifically, the fixing mechanism 161 has a contact surface 1611 that abuts against the end of the silicon square rod 200, and the fixing mechanism 161 is provided with a movable member 1612. A longitudinal plane 101 perpendicular to the preset direction is defined, and the angle between the contact surface 1611 and the longitudinal plane 101 is adjusted based on the movable member 1612. In this way, the inclination angle between the contact surface 1611 and the longitudinal plane 101 can be adjusted, so that the contact surface 1611 can adapt to the silicon square rod 200 with an inclined end, which is conducive to increasing the contact surface 1611 area between the contact surface 1611 and the end of the silicon square rod 200 along the preset direction, and further conducive to improving the clamping stability of the fixing mechanism 161 on the silicon square rod 200.

[0082] Exemplarily, the fixing mechanism 161 includes a fixing end 1613, and the fixing end 1613 is connected to the driving mechanism 162, so that the driving mechanism 162 can drive the fixing mechanism 161 to move in a preset direction, thereby clamping and releasing the silicon square rod 200. The movable member 1612 is configured as a ball shaft, and the end of the ball shaft away from the ball head is fixedly connected to the contact surface 1611, and the ball head of the ball shaft is rotatably connected to the fixing end 1613. In this way, through the configuration of the ball shaft, the contact surface 1611 can be rotated relative to the fixing end 1613, so that the contact surface 1611 can adjust the inclination angle relative to the longitudinal plane 101, and then the contact surface 1611 can adapt to the silicon square rod 200 with an inclined end, so as to improve the clamping stability of the clamping assembly 16 on the silicon square rod 200.

[0083] It should be noted that during the cutting process of the silicon square rod 200, due to cutting errors or the silicon square rod 200 tilting during the cutting process, the two opposite end faces of the silicon square rod 200 may be inclined, so that the silicon square rod 200 with an inclined end face can be adapted by the contact surface 1611 that can adjust the inclination angle.

[0084] In the present application, the detection process of the silicon square rod 200 by the silicon square rod detection device 100 is as follows: First, the silicon square rod 200 to be inspected is placed on the lifting assembly 15. The lifting assembly 15 drives the silicon square rod 200 to move to the same horizontal height as the clamping assembly, and then the silicon square rod 200 is clamped by the clamping assembly. At this time, the lifting assembly 15 moves downward to avoid interference of the lifting assembly 15 with the inspection of the silicon square rod 200.

[0085] Then, the moving component 13 drives the size appearance detection device 12 to move forward on the guide rail 111, so that the silicon square rod detection equipment 100 performs size appearance detection on the silicon square rod 200. At this time, the verticality of the silicon square rod 200 and the parallelism of the relative surfaces of the silicon square rod 200 are detected by the first sensor 121, and the curvature of the surface of the silicon square rod 200 meets the set threshold value by the second sensor 122. At the same time, the surface detection camera 123 detects the surface appearance quality of the silicon square rod 200. The infrared camera 126 and the infrared light source 125 detect the internal quality of the silicon square rod 200. The size and appearance of the silicon square rod 200 can be detected by the above-mentioned components, so as to improve the accuracy of the detection of the size and appearance of the silicon square rod 200.

[0086] After the inspection device is completed, the size appearance inspection device 12 is reset, and the lifting assembly 15 moves upward so that the lifting assembly 15 carries the silicon square rod 200. Then, the clamping assembly releases the silicon square rod 200, and the lifting assembly 15 drives the silicon square rod 200 to move downward to realize the unloading of the silicon square rod 200, thereby completing the appearance and quality inspection of the silicon square rod 200.

[0087] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the claims attached to this application.

Claims

1. A silicon square rod detection device, characterized in that: The silicon square rod detection equipment comprises: A frame (11), the frame (11) having a guide rail (111) extending along a preset direction; A dimension appearance detection device (12), wherein at least a portion of the dimension appearance detection device (12) is mounted on the guide rail (111) and is movable relative to the frame (11) along the preset direction, the dimension appearance detection device (12) comprising a plurality of first sensors (121), and during the detection of the silicon square rod, each of the plurality of first sensors (121) corresponds to an edge of the silicon square rod, and the plurality of first sensors (121) are capable of detecting the edges of the silicon square rod along the preset direction to obtain point cloud data corresponding to each edge; A control module is connected to the size appearance detection device (12), and is used to determine whether the silicon square rod has a size defect based on the point cloud data.

2. The silicon square bar detection equipment according to claim 1, characterized in that: The control module executes the step of determining whether the silicon square rod has a size defect based on the point cloud data, including: Obtaining first point cloud data corresponding to the first edge (21), second point cloud data corresponding to the second edge (22), and third point cloud data corresponding to the third edge (23); Fitting a first side edge (251) between the first edge (21) and the second edge (22) based on the first point cloud data and the second point cloud data; Fitting a second side edge (261) between the second edge edge (22) and the third edge edge (23) based on the second point cloud data and the third point cloud data; The verticality of the silicon square rod is determined according to the angle between the first side edge (251) and the second side edge (261), and it is judged whether the silicon square rod has a size defect.

3. The silicon square bar detection equipment according to claim 1, characterized in that: The control module executes the step of determining whether the silicon square rod has a size defect based on the point cloud data, including: Obtaining first point cloud data corresponding to the first edge (21); Determining two side edges adjacent to the first edge (21) based on the first point cloud data; The verticality of the silicon square rod is determined according to the included angle of the two side edges, and it is judged whether the silicon square rod has a size defect.

4. The silicon square bar detection equipment according to claim 1, characterized in that: The control module executes the step of determining whether the silicon square rod has a size defect based on the point cloud data, including: Obtaining first point cloud data corresponding to the first edge (21); Determining two side edges adjacent to the first edge (21) based on the first point cloud data; Determine the normal lines of the two sides to obtain the angle between the two normal lines; The verticality of the silicon square rod is determined according to the angle between the two normal lines to judge whether the silicon square rod has a size defect.

5. The silicon square bar detection equipment according to claim 1, characterized in that: The control module executes the step of determining whether the silicon square rod has a size defect based on the point cloud data, including: Obtaining first point cloud data corresponding to the first edge (21), second point cloud data corresponding to the second edge (22), third point cloud data corresponding to the third edge (23), and fourth point cloud data corresponding to the fourth edge (24); Fitting a first side edge (251) between the first edge (21) and the second edge (22) based on the first point cloud data and the second point cloud data; Fitting a third side edge (271) between the third edge edge (23) and the fourth edge edge (24) based on the third point cloud data and the fourth point cloud data; Whether the silicon square rod has a size defect is determined based on the parallelism between the first side (251) and the third side (271).

6. The silicon square bar detection equipment according to claim 1, characterized in that: The first sensor (121) is further used to obtain a brightness image of the edge, and the control module is used to determine whether the edge has an appearance defect based on the brightness image.

7. The silicon square bar detection equipment according to claim 1, characterized in that: The dimensional appearance detection device (12) further includes a second sensor (122), the second sensor (122) corresponding to one side surface of the silicon square rod for detection to obtain surface point cloud data corresponding to the surface; the control module determines the curvature of the surface based on the surface point cloud data, and if the curvature of the surface is outside a set threshold range, it is determined that the silicon square rod has a dimensional defect.

8. The silicon square bar detection equipment according to claim 1, characterized in that: The size appearance detection device (12) further comprises a plurality of surface detection cameras (123), each of the plurality of surface detection cameras (123) corresponding to a surface of the silicon square rod, each of the surface detection cameras (123) being configured with two light sources (124), the two light sources (124) respectively irradiating towards the surface of the silicon square rod at different irradiation angles.

9. The silicon square bar detection device according to claim 8, characterized in that: The control module is electrically connected to the surface detection camera (123) and the two light sources (124) respectively. During the detection process of the silicon square rod, the control module can control the two light sources (124) to illuminate the surface of the silicon square rod in sequence at a set interval. The control module can control the surface detection camera (123) to generate two images with different lighting angles at the set interval. If a light spot exists in any one of the two images, the control module determines that there is an appearance defect on the side of the silicon square rod.

10. The silicon square bar detection device according to claim 1, characterized in that: The silicon square rod detection equipment further comprises a hidden crack detection device, the hidden crack detection device comprising an infrared light source (125) and an infrared camera (126), the infrared light source (125) and the infrared camera (126) being arranged relative to each other so that the infrared camera (126) can obtain light emitted from the infrared light source (125) and passing through the silicon square rod to generate an infrared image; the control module is electrically connected to the infrared camera (126), and the control module can determine whether there is a hidden crack inside the silicon square rod based on the grayscale value of the silicon square rod in the infrared image.

11. The silicon square bar detection device according to claim 1, characterized in that: The silicon square rod detection equipment also includes: A lifting component (15), the lifting component (15) being mounted on the frame (11), the lifting component (15) being used to support the silicon square rod and being able to move relative to the frame (11) in a height direction; Two clamping assemblies (16) are arranged along the preset direction, the lifting assembly (15) is located between the two clamping assemblies (16), and the two clamping assemblies (16) cooperate to clamp the silicon square rod arranged on the lifting assembly (15); The clamping assembly (16) comprises a fixing mechanism (161) and a driving mechanism (162), wherein the driving mechanism (162) is mounted on the frame (11), and the driving mechanism (162) is used to drive the fixing mechanism (161) to move closer to or farther away from the silicon square rod along the preset direction; the fixing mechanism (161) has a contact surface (1611) abutting against an end of the silicon square rod, and the fixing mechanism (161) is provided with a movable part (1612) defining a longitudinal plane (101) perpendicular to the preset direction, and adjusting an angle between the contact surface (1611) and the longitudinal plane (101) based on the movable part (1612).

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