A gas-liquid spray system and a gas-liquid supply management method thereof

Abstract

The present invention provides a gas-liquid spray system and a gas-liquid supply management method thereof, wherein the system includes a gas-liquid management module, a product spray module and an equipment maintenance output module. The gas-liquid management module integrates nitrogen, compressed air, pure water, chemical solution and circulating water input modules, and is connected in parallel to the product spray module and the equipment maintenance module through a first connecting pipe to realize rapid medium switching and mixed supply; the input spray module of the product spray module is connected to the output recovery module, and the output recovery module realizes liquid circulation, pure water reuse and directional discharge of waste liquid through a classified recovery valve unit; the equipment maintenance module realizes online cleaning through an independent switch valve. The management method includes a single, alternating or mixed medium flushing mode, dynamically adjusting the gas-liquid flow ratio to control the turbulence intensity, and automatically switching the liquid circulation based on the concentration threshold. The present invention relates to the field of TGV gas-liquid spray technology.

Description

Technical Field

[0001] The present invention relates to the technical field of TGV gas-liquid spraying, and in particular to a gas-liquid spraying system and a gas-liquid supply management method thereof. Background Art

[0002] As semiconductor packaging technology evolves towards three-dimensional integration and high-density interconnection, through-glass via (TGV) technology has gradually become a key process in the field of advanced packaging due to its excellent electrical performance and mechanical stability. In the TGV manufacturing process, wet processing steps (such as cleaning, developing, stripping, flash etching, etc.) require the precise supply and switching of chemical liquids, pure water, gases and other media through a gas-liquid spray system, while taking into account the convenience of equipment maintenance and the efficient recycling of resources. However, the existing gas-liquid spray system still faces multiple technical bottlenecks when dealing with the high-precision, high-efficiency and environmental protection requirements of the TGV process.

[0003] Traditional gas-liquid spray systems usually use multiple sets of independent pipelines to transport different media (such as nitrogen, compressed air, pure water, chemical liquids, etc.). There is a lack of coordinated control mechanism between the pipelines, which leads to the frequent opening and closing of multiple valves when switching processes, limiting the process response speed and significantly increasing the process time. In addition, chemical liquids and pure water are often discharged directly after a single use, which not only causes waste of resources, but also increases the cost of waste liquid treatment, making it difficult to meet the needs of green manufacturing. Although some systems have tried to introduce recycling functions, the recycling path design is complex, the liquid reuse rate is low, and the concentration fluctuations or cross-contamination caused by the mixing of residual media during the circulation process affect the process stability. In terms of equipment maintenance, the existing system needs to be shut down and switched to a dedicated cleaning pipeline, which has low maintenance efficiency and cannot quickly complete online cleaning between production, restricting the continuous operation capacity of the production line.

[0004] Therefore, the inventors designed a gas-liquid spray system and a gas-liquid supply management method thereof to solve the above problems. Summary of the invention

[0005] In view of the defects of the above-mentioned prior art, the present invention provides a gas-liquid spray system and a gas-liquid supply management method thereof, aiming to solve the problems of slow process switching response, waste of resources, high waste liquid treatment cost and inconvenient equipment maintenance in the prior art gas-liquid spray system.

[0006] To achieve the above-mentioned purpose, the technical solution adopted by the present invention is: a gas-liquid spray system, including a gas-liquid management module, a product spray module and an equipment maintenance output module; the gas-liquid management module includes at least one gaseous medium input module and at least one liquid medium input module, the gaseous medium input module includes at least one of a nitrogen input module and a compressed air input module, the liquid medium input module includes at least one of a pure water input module and a chemical solution input module, the output ends of each input module are connected through a first connecting pipe, and the output ends of the first connecting pipe are respectively connected to the product spray input switch valve unit and the product spray input switch valve unit of the product spray module. The equipment maintenance output module comprises an equipment spray maintenance input switch valve unit, and the product spray module comprises an input spray module and an output recovery module. The input end of the input spray module is connected to the product spray input switch valve unit, and the output recovery module is connected to the discharge end of the input spray module through a second connecting pipe; the product spray input switch valve unit and the equipment spray maintenance input switch valve unit are designed for electrical interlocking; in the equipment maintenance scenario, the product spray input switch valve unit is closed, and the equipment spray maintenance input switch valve unit is opened, and the spray system is cleaned online by selecting a gaseous medium or a liquid medium through an external maintenance device.

[0007] Based on the above, the beneficial effect of a gas-liquid spray system is to solve the problems of slow process switching response, waste of resources, high waste liquid treatment cost and inconvenient equipment maintenance in the gas-liquid spray system in the prior art; it is mainly reflected in:

[0008] 1. The present invention solves the problems of low medium switching efficiency and high cross-contamination risk of the traditional system through the coordinated configuration of the nitrogen input module, the compressed air input module, the pure water input module, the circulating water input module and the chemical solution input module in the gas-liquid management module; the nitrogen input module stores nitrogen through the nitrogen storage unit, the nitrogen intake valve unit controls the nitrogen input, the nitrogen pressure detection and pressure reduction unit adjusts the pressure, the nitrogen filter unit filters impurities, the flow meter unit monitors the flow, and the nitrogen switch valve unit realizes on-off control to ensure that the nitrogen supply is stable and clean; the compressed air input module stores compressed air through the compressed air storage unit, the compressed air intake valve unit controls the input, the compressed air pressure detection and pressure reduction unit adjusts the pressure, the compressed air filter unit filters particulate matter, and the compressed air switch valve unit realizes on-off control to ensure the quality and pressure accuracy of compressed air; the pure water input module stores nitrogen through the pure water storage unit. Pure water is stored, the water inlet valve unit controls the water flow, the resistivity meter unit monitors the water purity, the pressure sensor unit detects the pipeline pressure, the flow meter unit measures the flow, and the pure water switch valve unit controls the on-off, so as to realize the real-time monitoring of pure water parameters; the circulating water input module stores and recycles pure water through the circulating water temporary storage tank unit, and the circulating water switch valve unit controls the call of the recycled pure water, so as to realize the rapid reuse of the recycled pure water and reduce the demand for external pure water supply; the chemical medicine input module stores the medicine liquid through the chemical medicine storage unit, the chemical medicine switch valve unit controls the on-off of the medicine liquid, and the medicine connecting pipe connects the recovery loop to realize the controllable supply of the medicine liquid; the media output by all modules are connected in parallel to the product spray input switch valve unit through the first connecting pipe, and the nitrogen switch valve unit, the compressed air switch valve unit, the pure water switch valve unit, the circulating water switch valve unit and the chemical medicine switch valve unit are independently controlled to realize the flexible switching and mixed supply of the media;

[0009] 2. The present invention solves the problems of waste of resources and high waste liquid treatment cost of the traditional system through the chemical solution recovery path, circulating water reuse path and waste liquid directional discharge path of the output recovery module; the chemical solution recovery path introduces the used chemical solution into the solution recovery tank through the solution recovery valve unit, and then injects it back into the solution connection pipe of the chemical solution input module through the solution circulation pipe, forming a closed-loop circulation to avoid waste of solution; the circulating water reuse path introduces the waste water in the pure water flushing stage into the circulating water temporary storage tank unit through the circulating water recovery valve unit, and is controlled by the circulating water switch valve unit to be reused in subsequent flushing processes, thereby reducing pure water consumption; the waste liquid directional discharge path transports the non-recyclable waste liquid and waste gas to the sewage and waste gas treatment equipment through the discharge valve unit, thereby achieving harmless treatment and reducing environmental risks;

[0010] 3. The present invention solves the problem of low efficiency and the need for shutdown for maintenance of traditional systems through the electrical interlocking design of the equipment spray maintenance input switch valve unit and the product spray input switch valve unit of the equipment maintenance output module. The maintenance channel is opened while closing the product spray channel, so that the maintenance equipment can be directly connected to the first connecting pipe to obtain gas or liquid, thereby realizing the physically isolated switching between production and maintenance modes.

[0011] Furthermore, the liquid medium input module also includes a circulating water input module, and the circulating water input module includes a circulating water temporary storage tank unit and a circulating water switch valve unit; the output recovery module is connected to the circulating water temporary storage tank unit through the circulating water recovery valve unit.

[0012] Based on the above, the beneficial effect of the circulating water input module is to collect the pure water after spraying into the circulating water temporary storage tank unit, and control the reuse of the recycled water through the circulating water switch valve unit, thereby reducing the demand for pure water resources, realizing efficient recycling of water resources, and reducing production costs.

[0013] Furthermore, the nitrogen input module includes a nitrogen storage unit, a nitrogen intake valve unit, a nitrogen pressure detection and pressure reduction unit, a nitrogen filter unit, a nitrogen flow meter unit and a nitrogen switch valve unit in sequence from the input end to the output end; the compressed air input module includes a compressed air storage unit, a compressed air intake valve unit, a compressed air pressure detection and pressure reduction unit, a compressed air filter unit and a compressed air switch valve unit in sequence from the input end to the output end; the pure water input module includes a pure water storage unit, a water intake valve unit, a resistivity meter unit, a pressure sensor unit, a pure water flow meter unit and a pure water switch valve unit in sequence from the input end to the output end; and the chemical solution input module includes a chemical solution storage unit and a chemical solution switch valve unit.

[0014] Based on the above, the beneficial effect of the nitrogen input module is to ensure the stability and purity of the nitrogen supply. It can not only monitor and adjust the pressure and flow of nitrogen in real time, but also effectively remove impurities that may affect the process quality; the beneficial effect of the compressed air input module is to ensure the quality and pressure accuracy of the compressed air, avoid the mixing of particulate matter and other pollutants, thereby improving the reliability of the process; the beneficial effect of the pure water input module is to achieve comprehensive monitoring of pure water parameters (such as water purity, pipeline pressure and flow), among which the resistivity meter unit is used to monitor the water purity to ensure that the pure water entering the process meets high standards, and the pressure sensor and flow meter provide precise flow control and pressure management, which helps to improve the consistency and efficiency of the process; the beneficial effect of the chemical solution storage unit and the chemical solution switch valve unit is to achieve precise control of the chemical solution supply.

[0015] Furthermore, the output recovery module includes a chemical solution recovery valve unit, a circulating water recovery valve unit and a discharge valve unit, the chemical solution recovery valve unit is connected to a chemical solution recovery tank, the chemical solution recovery tank is connected to the chemical solution connecting pipe between the chemical solution storage unit and the chemical solution switch valve unit through a chemical solution circulation pipe, and the discharge valve unit is connected to sewage and waste gas treatment equipment.

[0016] Based on the above, the medicine recovery valve unit realizes the directional recovery of chemical liquid to avoid cross contamination; the circulating water recovery valve unit guides the reusable water into the temporary storage tank for repeated use; the discharge valve unit centrally treats the non-recyclable waste liquid and waste gas to reduce environmental pollution; the medicine circulation pipe re-injects the recovered liquid into the chemical medicine input module to form a closed-loop circulation and reduce the consumption of medicines.

[0017] Furthermore, the present invention also provides a gas-liquid supply management method, the method comprising:

[0018] According to different processing scenarios, at least one of the gaseous medium input module and / or the liquid medium input module is used to supply the corresponding medium to the input spray module, perform the product surface spraying process, and finally classify and recycle or discharge the waste liquid through the output recovery module, wherein:

[0019] A: In a chemical treatment scenario, the chemical solution input module is turned on to spray the solution, and the solution is recovered through the solution recovery valve unit;

[0020] B: In the physical cleaning scenario, the gaseous medium input module is turned on for gas spraying;

[0021] C: In a mixed processing scenario, at least one of the gaseous medium input modules and at least one of the liquid medium input modules are simultaneously turned on to perform gas-liquid mixed spraying.

[0022] Furthermore, the medium supply to the input spray module includes any of the following modes:

[0023] Single gaseous medium flushing mode;

[0024] Single liquid medium flushing mode;

[0025] Alternating flushing mode of gaseous medium and liquid medium;

[0026] Mixed flushing mode of gaseous medium and liquid medium.

[0027] Based on the above, the beneficial effect of the single gaseous medium flushing mode is that it is suitable for scenarios that require high-purity gas for surface treatment or cleaning, such as nitrogen purging or compressed air cleaning. By using a single gaseous medium, tiny particles and impurities can be effectively removed to ensure surface cleanliness, which is particularly suitable for sensitive materials or high-precision processes. The beneficial effect of the single liquid medium flushing mode is that it is suitable for scenarios that require liquid medium for cleaning or chemical treatment, such as pure water flushing or chemical liquid treatment. Through flushing with a single liquid medium, effective removal or chemical reaction of specific pollutants can be achieved, ensuring process consistency and product quality; the beneficial effect of the alternating flushing mode of gaseous medium and liquid medium is that gas and liquid are used sequentially in a flushing process to achieve a more thorough cleaning effect. For example, liquid medium is used for preliminary cleaning first, and then gas medium is used for drying and final cleaning to ensure that there is no residue on the surface of the workpiece; the beneficial effect of the mixed flushing mode of gaseous medium and liquid medium is that by spraying gas and liquid at the same time to form turbulence, stubborn stains can be more effectively dispersed and removed, which is particularly suitable for complex structures or high-demand cleaning tasks.

[0028] Furthermore, in the chemical treatment scenario in A, when the concentration of the chemical solution in the chemical solution recovery tank is lower than the threshold, new chemical solution is added to the chemical solution storage unit; when the concentration reaches the threshold, the chemical solution input module is closed and switched to the chemical solution recovery branch for circulating supply.

[0029] Furthermore, the management method also includes: equipment maintenance. In the equipment maintenance scenario, the product spray input switch valve unit is closed, and the equipment spray maintenance input switch valve unit is opened, and the spray system equipment is cleaned online by selecting a gaseous medium or a liquid medium through an external maintenance device.

[0030] In order to more clearly illustrate the above features of the present invention and its intended objectives, the present invention is further described below in conjunction with the accompanying drawings and specific embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 :It is the pipeline diagram of the present invention;

[0032] Figure 2 : This is the gas-liquid supply management method of the present invention.

[0033] Description of the accompanying figures: 1-gas-liquid management module, 10-gaseous medium input module, 11-nitrogen input module, 111-nitrogen storage unit, 112-nitrogen intake valve unit, 113-nitrogen pressure detection and pressure reduction unit, 114-nitrogen filter unit, 115-nitrogen flow meter unit, 116-nitrogen switch valve unit, 12-compressed air input module, 121-compressed air storage unit, 122-compressed air intake valve unit, 123-compressed air pressure detection and pressure reduction unit, 124-compressed air filter unit, 125-compressed air switch valve unit, 20-liquid medium input module, 13-pure water input module, 131-pure water storage unit, 132-water intake valve unit, 133-resistivity meter unit, 134-pressure sensor unit, 135- Flow meter unit, 136-pure water switch valve unit, 14-circulating water input module, 141-circulating water temporary storage tank unit, 142-circulating water switch valve unit, 15-chemical solution input module, 151-chemical solution storage unit, 152-chemical solution switch valve unit, 153-chemical solution connecting pipe, 2-product spray module, 21-input spray module, 211-product spray input switch valve unit, 22-output recovery module, 221-second connecting pipe, 222-chemical solution recovery valve unit, 2221-chemical solution recovery tank, 2222-chemical solution circulation pipe, 223-circulating water recovery valve unit, 224-discharge valve unit, 2241-sewage and waste gas treatment equipment, 3-equipment maintenance output module, 31-equipment spray maintenance input switch valve unit, 4-first connecting pipe. DETAILED DESCRIPTION

[0034] See also Figure 1-Figure 2 ;

[0035] The present embodiment discloses a gas-liquid spray system, including a gas-liquid management module 1, a product spray module 2 and an equipment maintenance output module 3; the gas-liquid management module 1 includes at least one gaseous medium input module 10 and at least one liquid medium input module 20, the gaseous medium input module 10 includes at least one of a nitrogen input module 11 and a compressed air input module 12, the liquid medium input module 20 includes at least one of a pure water input module 13 and a chemical solution input module 15, the output ends of each input module are connected through a first connecting pipe 4, and the output ends of the first connecting pipe 4 are respectively connected to the product spray input switch valve unit 211 of the product spray module 2 and the equipment maintenance output module The equipment spray maintenance input switch valve unit 31 of block 3, the product spray module 2 includes an input spray module 21 and an output recovery module 22, the input end of the input spray module 21 is connected to the product spray input switch valve unit 211, and the output recovery module 22 is connected to the discharge end of the input spray module 21 through a second connecting pipe 221; the product spray input switch valve unit 211 and the equipment spray maintenance input switch valve unit 31 are electrically interlocked; in the equipment maintenance scenario, the product spray input switch valve unit 211 is closed, and the equipment spray maintenance input switch valve unit 31 is opened, and the spray system is cleaned online by selecting a gaseous medium or a liquid medium through an external maintenance device.

[0036] In this embodiment, the liquid medium input module 20 also includes a circulating water input module 14, and the circulating water input module 14 includes a circulating water temporary storage tank unit 141 and a circulating water switch valve unit 142; the output recovery module 22 is connected to the circulating water temporary storage tank unit 141 through a circulating water recovery valve unit 223.

[0037] In this embodiment, the nitrogen input module 11 includes a nitrogen storage unit 111, a nitrogen intake valve unit 112, a nitrogen pressure detection and pressure reduction unit 113, a nitrogen filter unit 114, a nitrogen flow meter unit 115 and a nitrogen switch valve unit 116 from the input end to the output end; the compressed air input module 12 includes a compressed air storage unit 121, a compressed air intake valve unit 122, a compressed air pressure detection and pressure reduction unit 123, a compressed air filter unit 124 and a compressed air switch valve unit 125 from the input end to the output end; the pure water input module 13 includes a pure water storage unit 131, a water intake valve unit 132, a resistivity meter unit 133, a pressure sensor unit 134, a pure water flow meter unit 135 and a pure water switch valve unit 136 from the input end to the output end; the chemical solution input module 15 includes a chemical solution storage unit 151 and a chemical solution switch valve unit 152.

[0038] In this embodiment, the output recovery module 22 includes a chemical solution recovery valve unit 222, a circulating water recovery valve unit 223 and a discharge valve unit 224. The chemical solution recovery valve unit 222 is connected to a chemical solution recovery tank 2221. The chemical solution recovery tank 2221 is connected to the chemical solution connecting pipe 153 between the chemical solution storage unit 151 and the chemical solution switch valve unit 152 through a chemical solution circulation pipe 2222. The discharge valve unit 224 is connected to the sewage and waste gas treatment equipment 2241.

[0039] In this embodiment, when the equipment maintenance output module 3 is not in product spraying operation, it is connected to the maintenance equipment through the equipment spraying maintenance input switch valve unit 31 to spray and clean the equipment.

[0040] The present invention also discloses a gas-liquid supply management method, which comprises:

[0041] According to different processing scenarios, at least one of the gaseous medium input module 10 and / or the liquid medium input module 20 supplies the corresponding medium to the input spray module 21, performs the product surface spraying process, and finally classifies and recycles or discharges the waste liquid through the output recovery module 22, wherein:

[0042] A: In a chemical treatment scenario, the chemical solution input module 15 is turned on to spray the chemical solution, and the chemical solution is recovered through the chemical solution recovery valve unit 222;

[0043] B: In the physical cleaning scenario, the gaseous medium input module 10 is turned on for gas spraying;

[0044] C: In a mixed processing scenario, at least one of the gaseous medium input modules 10 and at least one of the liquid medium input modules 20 are simultaneously turned on to perform gas-liquid mixed spraying.

[0045] In this embodiment, the medium supply to the input spray module 21 includes any of the following modes:

[0046] Single gaseous medium flushing mode;

[0047] Single liquid medium flushing mode;

[0048] Alternating flushing mode of gaseous medium and liquid medium;

[0049] Mixed flushing mode of gaseous medium and liquid medium.

[0050] In this embodiment, in the chemical treatment scenario in A, when the concentration of the chemical solution in the chemical solution recovery tank 2221 is lower than the threshold, new chemical solution is added to the chemical solution storage unit 151; when the concentration reaches the threshold, the chemical solution input module 15 is closed and switched to the chemical solution recovery branch for circulating supply.

[0051] In this embodiment, in the mixed processing scenario in C, the mixed jet turbulence intensity control is achieved by dynamically adjusting the flow ratio of the gaseous medium and the liquid medium, wherein:

[0052] The gas-liquid flow ratio adjustment range is 1:10 to 10:1;

[0053] The corresponding relationship between turbulence intensity and flow ratio is pre-stored in the central controller of the gas-liquid spray system.

[0054] In this embodiment, the management method also includes: equipment maintenance. In the equipment maintenance scenario, the product spray input switch valve unit 211 is closed, and the equipment spray maintenance input switch valve unit 31 is opened, and the spray system equipment is cleaned online by selecting a gaseous medium or a liquid medium through an external maintenance device.

[0055] The above description is only the optimal solution embodiment of the present invention and is not intended to limit the present invention. Various modifications or substitutions made by those skilled in the art to the present invention without departing from the essence and protection scope of the present invention should also be within the protection scope of the present invention.

Claims

1. A gas-liquid spray system, characterized in that: The invention comprises a gas-liquid management module (1), a product spraying module (2) and an equipment maintenance output module (3); the gas-liquid management module (1) comprises at least one gaseous medium input module (10) and at least one liquid medium input module (20); the gaseous medium input module (10) comprises at least one of a nitrogen input module (11) and a compressed air input module (12); the liquid medium input module (20) comprises at least one of a pure water input module (13) and a chemical solution input module (15); the output ends of the input modules are connected via a first connecting pipe (4); the output ends of the first connecting pipe (4) are respectively connected to a product spraying input switch valve unit (211) of the product spraying module (2) and a device of the equipment maintenance output module (3); A spray maintenance input switch valve unit (31) is provided, wherein the product spray module (2) comprises an input spray module (21) and an output recovery module (22), wherein the input end of the input spray module (21) is connected to the product spray input switch valve unit (211), and the output recovery module (22) is connected to the discharge end of the input spray module (21) via a second connecting pipe (221); the product spray input switch valve unit (211) and the equipment spray maintenance input switch valve unit (31) are designed to be electrically interlocked; in an equipment maintenance scenario, the product spray input switch valve unit (211) is closed, and the equipment spray maintenance input switch valve unit (31) is opened, and the spray system is cleaned online by selecting a gaseous medium or a liquid medium through an external maintenance device.

2. A gas-liquid spray system according to claim 1, characterized in that: The liquid medium input module (20) further comprises a circulating water input module (14), wherein the circulating water input module (14) comprises a circulating water temporary storage tank unit (141) and a circulating water switch valve unit (142); the output recovery module (22) is connected to the circulating water temporary storage tank unit (141) via a circulating water recovery valve unit (223).

3. A gas-liquid spray system according to claim 1, characterized in that: The nitrogen input module (11) comprises, from the input end to the output end, a nitrogen storage unit (111), a nitrogen intake valve unit (112), a nitrogen pressure detection and pressure reduction unit (113), a nitrogen filter unit (114), a nitrogen flow meter unit (115), and a nitrogen switch valve unit (116); the compressed air input module (12) comprises, from the input end to the output end, a compressed air storage unit (121), a compressed air intake valve unit (122), a compressed air pressure detection and pressure reduction unit (123); ), a compressed air filter unit (124) and a compressed air switch valve unit (125); the pure water input module (13) comprises, from the input end to the output end, a pure water storage unit (131), a water inlet valve unit (132), a resistivity meter unit (133), a pressure sensor unit (134), a pure water flow meter unit (135) and a pure water switch valve unit (136); the chemical liquid input module (15) comprises a chemical liquid storage unit (151) and a chemical liquid switch valve unit (152).

4. A gas-liquid spray system according to claim 3, characterized in that: The output recovery module (22) comprises a chemical solution recovery valve unit (222), a circulating water recovery valve unit (223) and a discharge valve unit (224); the chemical solution recovery valve unit (222) is connected to a chemical solution recovery tank (2221); the chemical solution recovery tank (2221) is connected to a chemical solution connecting pipe (153) between the chemical solution storage unit (151) and the chemical solution switch valve unit (152) via a chemical solution circulation pipe (2222); and the discharge valve unit (224) is connected to a sewage and waste gas treatment device (2241).

5. A gas-liquid supply management method, applied to a gas-liquid spray system as claimed in claim 4, characterized in that: The method includes: According to different processing scenarios, at least one of the gaseous medium input module (10) and / or the liquid medium input module (20) supplies the corresponding medium to the input spray module (21), performs the product surface spraying process, and finally classifies and recovers or discharges the waste liquid through the output recovery module (22), wherein: A: In a chemical treatment scenario, the chemical solution input module (15) is turned on to spray the chemical solution, and the chemical solution is recovered through the chemical solution recovery valve unit (222); B: In a physical cleaning scenario, the gaseous medium input module (10) is turned on to perform gas spraying; C: In a mixed processing scenario, at least one of the gaseous medium input modules (10) and at least one of the liquid medium input modules (20) are simultaneously turned on to perform gas-liquid mixed spraying.

6. A gas-liquid supply management method according to claim 5, characterized in that: The medium supply to the input spray module (21) includes any of the following modes: Single gaseous medium flushing mode; Single liquid medium flushing mode; Alternating flushing mode of gaseous medium and liquid medium; Mixed flushing mode of gaseous medium and liquid medium.

7. A gas-liquid supply management method according to claim 5, characterized in that: In the chemical treatment scenario in A, when the concentration of the chemical solution in the chemical solution recovery tank (2221) is lower than the threshold value, new chemical solution is added to the chemical solution storage unit (151); when the concentration reaches the threshold value, the chemical solution input module (15) is closed and switched to the chemical solution recovery branch for circulating supply.

8. A gas-liquid supply management method according to claim 5, characterized in that: The management method also includes: equipment maintenance, in which, in an equipment maintenance scenario, the product spray input switch valve unit (211) is closed, the equipment spray maintenance input switch valve unit (31) is opened, and the spray system is cleaned online by selecting a gaseous medium or a liquid medium through an external maintenance device.

Images