Automatic gas filling control method and device for a gas laser

Abstract

The present invention discloses an automatic gas filling control method and device for a gas laser. The method includes: after laser output, starting an energy calibration process to ensure that the real-time energy value meets the preset requirements. During energy calibration, if the real-time energy value is less than the preset energy value, it is judged whether the voltage value reaches the maximum value. If not, the voltage value is increased. If so, it is prompted that the working air pressure is insufficient and the gas filling process is entered. After entering the gas filling process, it is judged whether the real-time air pressure of the laser is less than the maximum air pressure. If it is less than the maximum air pressure, the main valve is opened for cyclic gas filling. After each gas filling, energy calibration is carried out and it is judged whether the real-time energy value is less than the preset energy value. If it is less than the preset energy value, it is judged whether the energy difference between the real-time energy value and the energy value before gas filling is within the preset range. If it is not within the preset range, cyclic gas filling continues. The present invention realizes precise automatic control of the gas filling process by monitoring and comparing the energy values of the laser before and after gas filling in real time.

Description

Technical Field

[0001] The present invention relates to the technical field of gas lasers, and particularly to an automatic gas filling control method and device for a gas laser. Background Art

[0002] An excimer laser uses a mixed gas as a working medium to generate laser light. Its main structure includes the mixed gas in the discharge chamber, the laser cavity, and the excitation source. In practical application scenarios, to generate inert gas halides with extremely short lifetimes and unstable ground states such as ArF, KrF, XeF, XeCl, etc., a high-voltage short pulse is required to discharge and excite the mixed gas. However, this working mode inevitably causes chronic loss of halogen gas, seriously affecting the energy output performance of the laser. Therefore, frequently and regularly replenishing gas for the laser has become a key link to maintain its stable operation. In actual operation, the original gas is often completely discharged, and the cavity is repeatedly cleaned with inert gas, and then all new gases are re-proportioned, resulting in great waste and unnecessary pollution.

[0003] Currently, the gas replenishment of excimer lasers mainly relies on manual operation, and the volume of gas to be replenished is extremely small, often in the range of a few to dozens of millibars, which leads to many drawbacks. First of all, manual gas filling consumes a large amount of manpower, and the accuracy is difficult to guarantee. Affected by subjective factors and experience differences, the gas filling volume and time are prone to deviation. Insufficient gas filling volume will cause the laser to not reach the optimal operating state, resulting in unstable laser energy output; excessive gas filling will waste gas resources, change the internal pressure environment of the laser, cause abnormal output energy, and also have an adverse impact on its performance. Secondly, it is difficult to scientifically control the frequency of manual gas filling. Too long a gas filling interval will accelerate equipment aging and shorten the service life. Too frequent gas filling will increase labor costs, and may also introduce impurities or reduce the sealing performance due to frequent equipment startup. Finally, manual operation lacks systematicness and real-time monitoring and evaluation of the energy state of the laser before and after gas filling, and it is impossible to compare the energy values before and after gas filling in real time, making it difficult to discover problems in time and take effective adjustment measures.

[0004] To solve the above problems, the present invention proposes an automatic gas filling control method for a gas laser to achieve precise automatic control of the gas filling process by real-time monitoring and comparing the energy values of the laser before and after gas filling. Summary of the Invention

[0005] In view of the above problems, the present invention provides an automatic gas filling control method and device for a gas laser.

[0006] According to one aspect of the present invention, an automatic gas filling control method for a gas laser is provided, and the method process includes:

[0007] Turn on the laser power supply and start the circuit self-check; wherein, the circuit self-check is used to ensure that the input voltage and the discharge circuit meet the preset requirements;

[0008] After the circuit self-check is normal, output laser and start energy calibration to ensure that the real-time energy value of the output laser meets the preset requirements;

[0009] During the energy calibration operation, if the real-time energy value is greater than or equal to the preset energy value, it is determined that the device is working normally; if the real-time energy value is less than the preset energy value, it is judged whether the voltage value reaches the maximum value. If not, the voltage value is increased. If so, it is prompted that the working air pressure is insufficient, and the automatic gas filling device is started to enter the gas filling process;

[0010] After entering the gas filling process, it is judged whether the real-time air pressure in the laser cavity of the laser is less than the maximum air pressure. If it is greater than or equal to the maximum air pressure, energy calibration is performed; if it is less than the maximum air pressure, the main valve is opened for cyclic gas filling. Among them, after each gas filling, energy calibration is performed and it is judged whether the real-time energy value is less than the preset energy value;

[0011] If it is greater than or equal to the preset energy value, it is determined that the device is working normally; if it is less than the preset energy value, it is judged whether the energy difference between the real-time energy value and the energy before gas filling is within the preset range. If it is within the preset range, it is prompted to request manual maintenance. If it is not within the preset range, cyclic gas filling continues.

[0012] After energy calibration, it is judged whether the real-time energy value is less than the preset energy value. If it is less than the preset energy value, it is judged whether the voltage value has reached the maximum value; otherwise, it is judged that the device is working normally.

[0013] If the voltage value has reached the maximum value, it is prompted to request manual maintenance. Otherwise, the voltage value is increased and the real-time energy is tested.

[0014] In an alternative manner, the method further includes:

[0015] The automatic gas filling device includes a laser cavity, a main valve, a gas filling cavity, a solenoid valve and a pressure sensor; wherein, when the solenoid valve is closed and the main valve is open, the air pressure value in the laser cavity is obtained; when the solenoid valve is open and the main valve is closed, the air pressure value in the gas filling cavity is obtained.

[0016] In an alternative manner, the method further includes:

[0017] Based on the voltage, working duration, output real-time energy value, gas pressure and temperature in the laser cavity and the corresponding gas replenishment amount data during the operation of the laser, train a gas replenishment amount prediction model; wherein, the gas replenishment amount prediction model includes a TPE sub-model and a GBDT sub-model;

[0018] Input the current voltage, working duration, output energy value, laser cavity gas pressure, and temperature into the gas replenishment amount prediction model to predict the required gas replenishment amount; control the automatic gas filling device to replenish gas according to the predicted gas replenishment amount.

[0019] According to another aspect of the present invention, an automatic gas filling control device for a gas laser is provided, including:

[0020] A laser device startup module, configured to turn on the laser power supply and start circuit self-checking. The circuit self-checking is used to ensure that the input voltage and the discharge circuit meet the preset requirements.

[0021] A main controller module, configured to start an energy calibration process, compare the real-time energy value with the preset energy value. If the real-time energy value is less than the preset energy value, determine whether the voltage value reaches the maximum value. If it does not reach the maximum value, increase the voltage value. If it reaches the maximum value, prompt that the working air pressure is insufficient and enter the gas filling process.

[0022] A gas filling control module, after starting the gas filling process, determines whether the real-time air pressure of the laser is less than the maximum air pressure. If it is less than the maximum air pressure, open the main valve for cyclic gas filling. Among them, after each gas filling, energy calibration is performed and it is determined whether the real-time energy value is less than the preset energy value. If it is less than the preset energy value, determine whether the energy difference between the real-time energy value and the energy value before gas filling is within the preset range. If it is within the preset range, prompt for maintenance request. If it is not within the preset range, continue cyclic gas filling.

[0023] A voltage control module, configured to adjust the voltage value of the gas laser excitation source.

[0024] An energy calibration module, configured to obtain the real-time energy value of the output laser, determine the difference between the real-time energy value and the rated value, and provide it to the main controller module for energy calibration.

[0025] According to the solution provided by the present invention, the laser power supply is turned on and the circuit self-check is started. The circuit self-check is used to ensure that the input voltage and the discharge circuit meet the preset requirements. After the circuit self-check is normal, the laser output is started and the energy calibration is started. The energy calibration is used to obtain the real-time energy value; the real-time energy value is compared with the preset energy value. If the real-time energy value is less than the preset energy value, it is judged whether the voltage value reaches the maximum value. If not, the voltage value is increased. If so, it is prompted that the working air pressure is insufficient, and the gas filling process is entered through the automatic gas filling device. After entering the gas filling process, it is judged whether the real-time air pressure of the laser is less than the maximum air pressure. If it is less than the maximum air pressure, the main valve is opened for cyclic gas filling. Among them, after each gas filling, the energy calibration is carried out and it is judged whether the real-time energy value is less than the preset energy value. If the real-time energy value is less than the preset energy value, it is judged whether the energy difference between the real-time energy value and the energy before gas filling is within the preset range. If it is within the preset range, it is prompted to request manual maintenance. If it is not within the preset range, the cyclic gas filling continues. The present invention realizes the precise automatic control of the gas filling process by real-time monitoring and comparing the energy values of the laser before and after gas filling, not only enables the long-term stable output of the energy of the excimer laser, ensures its stability and reliability in various applications, but also significantly reduces the manual maintenance and management costs, and improves the overall operation efficiency.

[0026] The above description is only an overview of the technical solution of the present invention. In order to be able to understand the technical means of the present invention more clearly, it can be implemented according to the content of the specification. And in order to make the above and other purposes, features and advantages of the present invention more obvious and understandable, the following specifically illustrates the specific embodiments of the present invention. Brief Description of the Drawings

[0027] By reading the following detailed description of the preferred embodiments, various other advantages and benefits will become clear to those of ordinary skill in the art. The drawings are only for the purpose of showing the preferred embodiments and are not considered to be a limitation of the present invention. And throughout the drawings, the same reference numerals are used to represent the same components. In the drawings:

[0028] Figure 1 Shows the flow schematic diagram of the automatic gas filling control method of the gas laser according to the embodiment of the present invention;

[0029] Figure 2 Shows the structural schematic diagram of the gas filling device according to the embodiment of the present invention Figure 1 ;

[0030] Figure 3 Shows the structural schematic diagram of the gas filling device according to the embodiment of the present invention Figure 2 ;

[0031] Figure 4 Shows the working flow schematic diagram of the main controller module according to the embodiment of the present invention;

[0032] Figure 5 The schematic diagram of the framework of the automatic gas filling control device of the gas laser according to the embodiment of the present invention is shown. Detailed implementation manners

[0033] Hereinafter, the exemplary embodiments of the present invention will be described in more detail with reference to the accompanying drawings. Although the exemplary embodiments of the present invention are shown in the drawings, it should be understood that the present invention can be implemented in various forms and should not be limited by the embodiments set forth herein. On the contrary, these embodiments are provided so that the present invention can be more thoroughly understood and the scope of the present invention can be fully conveyed to those skilled in the art.

[0034] Figure 1 The schematic diagram of the process of the automatic gas filling control method of the gas laser according to the embodiment of the present invention is shown. Specifically, as Figure 1 shown, the following steps are included:

[0035] Step S101, turn on the laser power supply and start the circuit self-check. Among them, the circuit self-check is used to ensure that the input voltage and the discharge circuit meet the preset requirements.

[0036] In this embodiment, the input voltage abnormality or the discharge circuit failure is detected in time through the circuit self-check. Only when the preset requirements are met can the safe start and stable operation of the laser be ensured, and the damage of the laser or the safety accident caused by the power problem can be avoided.

[0037] The energy calibration provides the output light energy of the laser excited after the laser is started, as the basis for subsequent automatic gas filling judgment, to ensure that the laser reaches the expected performance level.

[0038] Step S102, the energy calibration calibrates the output laser energy with the acquired real-time energy value of the laser output light of the laser. The energy calibration compares the real-time energy value with the preset energy value. If the real-time energy value is less than the preset energy value, it is judged whether the voltage value reaches the maximum value. If not, the voltage value is increased. If so, it is prompted that the working air pressure is insufficient, and the automatic gas filling device is started to enter the gas filling process.

[0039] In this embodiment, the real-time energy value is used as the basis for subsequent automatic gas filling judgment.

[0040] In this embodiment, as Figure 4 shown, it is judged whether the performance of the laser reaches the standard by comparing the real-time energy with the preset value. If the real-time energy value is greater than or equal to the preset energy value, it is judged that the device is working normally. If the energy is insufficient, the voltage is preferentially increased to increase the laser output without changing the air pressure in the laser cavity. Only when the voltage reaches the maximum value and the real-time energy value of the laser output light is still insufficient, the gas filling process is started, avoiding unnecessary gas consumption and reducing the operation cost. By automatically starting the gas filling process, the manual intervention is reduced and the operation efficiency is improved.

[0041] In this embodiment, as Figure 4 shown, if the real-time energy value is greater than or equal to the preset energy value, there is no need to perform operations such as voltage adjustment or gas filling. It can be confirmed that the device is in a normal working state, reducing device loss and extending service life.

[0042] The automatic gas filling device includes a laser cavity, a main valve, a gas filling cavity, a solenoid valve, and a pressure sensor;

[0043] Among them, when the solenoid valve is closed and the main valve is open, the air pressure value of the laser cavity is obtained; when the solenoid valve is open and the main valve is closed, the air pressure value of the gas filling cavity is obtained.

[0044] In this embodiment, as Figure 2 、 Figure 3 shown, by independently controlling the solenoid valve and the main valve, the flow direction and flow rate of the gas can be precisely controlled. Among them, the gas (i.e., Figure 2 、 Figure 3 the gas medium shown) is in the laser cavity. The main valve controls the connection state between the laser cavity and the external gas system (such as Figure 2 、 Figure 3 the gas filling cavity shown). When the main valve is open, the laser cavity is connected to the external gas system, and the gas can enter or exit the laser cavity. When the main valve is closed, the laser cavity is isolated from the external gas system, and the gas cannot enter or exit the laser cavity. The gas filling cavity is used to store the gas to be added to the laser cavity, and the gas pressure in the gas filling cavity is monitored in real time by the pressure sensor. The solenoid valve controls the connection state between the gas filling cavity and the laser cavity. When the air pressure in the gas filling cavity is greater than the air pressure in the laser cavity, the solenoid valve is opened, and the gas filling cavity is connected to the laser cavity, and the gas enters the laser cavity from the gas filling cavity. When the solenoid valve is closed, the gas filling cavity is isolated from the laser cavity, and the gas cannot enter the laser cavity. The pressure sensor is used to monitor the air pressure values of the laser cavity and the gas filling cavity in real time. The output signal of the pressure sensor is connected to the main controller, and the main controller performs gas filling control according to the data of the pressure sensor.

[0045] Specifically, close the solenoid valve, open the main valve, use the pressure sensor to measure the air pressure value in the laser cavity, and transmit the measured air pressure value to the main controller. Close the main valve, open the solenoid valve, and use the pressure sensor to measure the air pressure value in the gas filling cavity. Transmit the measured air pressure value to the main controller, and according to the air pressure difference between the laser cavity and the gas filling cavity, control the opening and closing states of the solenoid valve and the main valve to perform gas filling operations.

[0046] For example, if the air pressure value in the laser cavity is lower than the preset value, open the solenoid valve and the main valve to add the gas in the gas filling cavity to the laser cavity. If the air pressure value in the gas filling cavity is lower than the preset value, close the solenoid valve and the main valve, stop the gas filling operation, and prompt the user to replenish the gas.

[0047] Among them, during the gas filling process, the upper and lower limits of the air pressure can be set. When the air pressure exceeds the upper limit or is lower than the lower limit, the solenoid valve and the main valve are automatically closed and an alarm is issued. Select the appropriate working gas according to the type and requirements of the laser.

[0048] Step S103: After entering the gas filling process, determine whether the real-time air pressure in the laser cavity is less than the maximum air pressure. If it is less than the maximum air pressure, open the main valve for circulating gas filling. Among them, after each gas filling, energy calibration is performed and it is determined whether the real-time energy value is less than the preset energy value. If it is less than the preset energy value, it is determined whether the energy difference between the real-time energy value and the energy value before gas filling is within the preset range. If it is within the preset range, a request for manual maintenance is prompted. If it is not within the preset range, continue with the circulating gas filling.

[0049] In this embodiment, the circulating gas filling method reduces the single gas filling amount and reduces the risk of overcharging. The energy change is used to distinguish whether it is simply a lack of gas or there are other faults, avoiding blind gas filling. The energy difference between the real-time energy value and the energy value before gas filling is within the preset range, indicating that even if the energy increase after gas filling is not obvious, there may be other problems inside the laser, so a request for manual maintenance is promptly prompted.

[0050] Specifically, as Figure 4 shown, first, to prevent the pressure in the laser cavity from being too high, resulting in insufficient voltage, it is determined whether the real-time air pressure in the laser cavity is less than the maximum air pressure. If the real-time air pressure is less than the maximum air pressure, the main valve is opened for gas filling. The purpose of circulating gas filling is to avoid overshoot of pressure caused by adding too much gas at one time. After each gas filling, energy calibration is performed to obtain the real-time energy value and compare it with the preset energy value. Among them, the preset energy value refers to the target energy value when the laser operates normally. If the real-time energy value is still less than the preset energy value, it is further determined whether the energy difference between the real-time energy value and the energy value before gas filling is within the preset range (such as setting the energy increase amplitude to be less than 5%). If the energy difference is within the preset range, it indicates that although gas has been filled but the energy increase is not obvious, which may indicate other problems in the laser (such as laser cavity contamination, gas leakage, optical path system deviation), so a request for manual maintenance is prompted. If the energy difference is not within the preset range, it indicates that the gas filling is effective but the energy has not reached the target value, and the circulating gas filling should continue until the real-time energy value reaches or exceeds the preset energy value.

[0051] In an alternative manner, the method further includes:

[0052] If the real-time air pressure in the laser cavity is greater than or equal to the maximum air pressure, energy calibration is performed.

[0053] In this embodiment, when it is detected that the real-time air pressure in the laser cavity is greater than or equal to the maximum air pressure, energy calibration is immediately performed, and even if the voltage reaches the upper limit, it is necessary to confirm whether the energy output meets the requirements.

[0054] After energy calibration, it is judged whether the real-time energy value is less than the preset energy value. If it is less than the preset energy value, it is judged whether the voltage value has reached the maximum value; otherwise, it is judged that the device is working normally.

[0055] In this embodiment, when the real-time energy value is less than the preset energy value, it is further judged whether the voltage value has reached the maximum value, avoiding safety risks caused by too high voltage, and being able to further distinguish whether manual maintenance is required, avoiding unnecessary shutdowns and maintenance operations.

[0056] If the voltage value has reached the maximum value, a request for manual maintenance is prompted; otherwise, the voltage value is increased and the real-time energy is tested.

[0057] In this embodiment, if the energy shortage is not simply due to insufficient voltage but due to other reasons (such as laser cavity contamination, gas leakage, optical path system deviation), overpressurization will only exacerbate the problem. When the voltage reaches the maximum value, it usually means that the discharge conditions of the laser have approached the limit, and continuing to increase the voltage may cause device damage. Therefore, if the voltage value has reached the maximum value, a request for manual maintenance is prompted to avoid device damage.

[0058] Based on the voltage, working duration, real-time energy value, laser cavity gas pressure and temperature during the operation of the laser, as well as the corresponding gas replenishment amount data, a gas replenishment amount prediction model is trained; wherein, the gas replenishment amount prediction model includes a TPE sub-model and a GBDT sub-model;

[0059] The current voltage, working duration, real-time energy value, laser cavity gas pressure and temperature are input into the gas replenishment amount prediction model to predict the required gas replenishment amount;

[0060] According to the predicted gas replenishment amount, an automatic gas filling device is controlled to perform gas replenishment.

[0061] In this embodiment, by training the gas replenishment amount prediction model, the required gas replenishment amount can be accurately predicted based on the voltage, working duration, real-time energy value, laser cavity gas pressure and temperature during the operation of the laser, and the best state of the gas environment inside the laser can be maintained, thereby improving the performance and stability of the laser. Among them, by optimizing the hyperparameters with TPE (Tree-structured Parzen Estimator), the best GBDT model parameters can be quickly found while saving computing power, especially suitable for controllers with poor computing power such as the main controller of a gas laser.

[0062] For the convenience of understanding the above embodiments, the following is combined with Figures 2 to 4 to be described in detail.

[0063] Such as Figure 2As shown, the automatic gas filling device includes a laser cavity, a main valve, a gas filling cavity, a gas filling valve, a solenoid valve, and a pressure sensor. Among them, when the solenoid valve is closed and the main valve is open, the air pressure value of the laser cavity is obtained; when the solenoid valve is open and the main valve is closed, the air pressure value of the gas filling cavity is obtained. As Figure 3 shown, a main controller module, an energy calibration module, a voltage control module, a gas filling control module, etc. are added. Among them,

[0064] The energy calibration module is used to obtain the real-time energy value of the output laser and judge the difference between the real-time energy value and the rated value.

[0065] The voltage control module is used to set the voltage value range U min ~U max , adjust the voltage value of the excitation source, and set the voltage application quantitative unit: U (kv / time).

[0066] The gas filling control module is used to obtain the air pressure values of the laser cavity and the gas filling cavity and perform automatic gas filling; the set air pressure value range in the laser cavity is P min ~P max ; set the gas filling quantitative unit: N (mbar / time);

[0067] The main controller module is used to judge whether the laser is working properly, whether to automatically fill gas, whether to adjust the voltage, and prompt whether manual intervention is required. The entire working process is as Figure 4 shown:

[0068] 1. Turn on the laser device:

[0069] (1) When the laser is powered on and the device is turned on, circuit self-check is started:

[0070] The circuit is unobstructed;

[0071] The input voltage is stable and meets the requirements;

[0072] The discharge circuit is stable and meets the requirements;

[0073] (2) The laser is started and energy calibration is performed. The energy calibration module obtains the real-time energy value E of the laser t . Compare the real-time energy value E t with the preset energy value E 0 .

[0074] If E t ≥E 0 , the main controller module confirms that the laser is working properly.

[0075] If E t <E 0 , the main controller module starts the voltage control module to increase the excitation voltage.

[0076] 2. The voltage control module sets the range of the increased voltage value U min ~U max ; Set the voltage addition quantitative unit: U (kv / time),

[0077] U min is the default voltage value, and obtain the real-time energy value E of the laser t , compare E t , E 0 , if E t ≥E 0 then the main controller module confirms that the laser is working properly;

[0078] Otherwise, the main controller module starts the voltage control module and adjusts the excitation voltage energy to increase to U min +U, and obtain the real-time energy value E of the laser t ;

[0079] Compare E t , E 0 , if E t ≥E 0 then the laser is working properly; otherwise, loop until the voltage value is U max ; if E t ≥E 0 When, the main controller module confirms that the laser is working properly. If E t <E 0 When, the main controller module starts the gas filling control module to automatically fill the laser with gas.

[0080] 3. The main controller module restores the excitation energy to the default voltage value U min , and makes the laser enter the standby state, and confirms that the laser cavity has stopped running.

[0081] 4. In the gas filling control module, the set range of the air pressure value in the laser cavity is P min ~P max ; Gas filling quantity: N (mbar / time), confirm the gas filling condition:

[0082] (1) Control the main valve to open and the solenoid valve to close; obtain the real-time air pressure value P in the laser cavity T ,

[0083] If P T +N<P max When, start the next gas filling;

[0084] If P T +N≥P max When, end the gas filling,

[0085] The main controller module starts the voltage control module again until U max , if Et < E 0 The main controller module outputs a prompt message: Request for manual maintenance.

[0086] (2) Control the main valve to close and open the solenoid valve; obtain the real-time air pressure value P in the standby gas chamber T+1，

[0087] If P T+1 ≥P T When, start the next gas filling;

[0088] If P T+1 <P T When, end the gas filling, and the main controller module outputs a prompt message: Request for manual maintenance.

[0089] (3) Start gas filling:

[0090] Open the main valve, perform gas filling once, and automatically close the main valve and solenoid valve after gas filling is completed.

[0091] (4) The energy calibration module obtains the real-time energy value E of the laser after gas filling 1 , compare E 1 , E 0 .

[0092] If E 1 ≥E 0 When, the main controller module confirms that the laser is working properly.

[0093] If E 1 <E 0 When, the main controller module further determines whether the energy increases after gas filling.

[0094] ① Compare the real-time energy value E after gas filling 1 , the real-time energy value E of the laser under the default voltage value U before gas filling min t

[0095] If E 1 ≥E t When, the main controller module confirms to start the gas filling control module

[0096] If E 1 <E t When, the main controller module outputs a prompt message: Request for manual maintenance.

[0097] ② After cyclic gas filling, after each gas filling is completed, the main controller module needs to compare the real-time energy value E after gas filling 1 , E 2 ...E N ; Ensure that the energy value increases gradually after gas filling.

[0098] It can be seen that in this embodiment, the energy calibration module is used to detect the difference between the real-time energy value of the laser output and the preset energy value, and the voltage control module is used to adjust the discharge voltage to make the laser energy output stable. During the use of the laser, there is gas loss. When the voltage is adjusted to the rated maximum value but the output laser energy is still insufficient, the laser is automatically inflated through the gas filling control module, so that the gas medium pressure in the excimer laser cavity is within a suitable gas filling pressure range. And after each gas filling, through the control of the main control, the rated minimum discharge voltage is set, and at the same time, the energy value of the laser energy output is stably satisfied with the use requirements. And in subsequent use, by means of the main control's multiple micro-incremental voltage adjustments, the output time of the energy in a stable state is extended, so as to achieve the purpose of reducing manual intervention and extending the service life of the equipment.

[0099] According to the solution provided by the present invention, the laser power supply is turned on and the circuit self-check is started.

[0100] Among them, the circuit self-check is used to ensure that the input voltage and the discharge circuit meet the preset requirements.

[0101] The energy calibration is used to ensure that the real-time energy value meets the preset requirements; the real-time energy value and the preset energy value are compared. If the real-time energy value is less than the preset energy value, it is judged whether the voltage value reaches the maximum value. If not, the voltage value is increased. If so, it is prompted that the working air pressure is insufficient, and the automatic gas filling device is started to enter the gas filling process; after entering the gas filling process, it is judged whether the real-time air pressure of the laser is less than the maximum air pressure. If it is less than the maximum air pressure, the main valve is opened for circulating gas filling. Among them, after each gas filling, energy calibration is performed and it is judged whether the real-time energy value is less than the preset energy value. If the real-time energy value is less than the preset energy value, it is judged whether the energy difference between the real-time energy value and the energy before gas filling is within the preset range. If it is within the preset range, it is prompted to request manual maintenance. If it is not within the preset range, the circulating gas filling continues. The present invention realizes the precise automatic control of the gas filling process by real-time monitoring and comparing the energy values of the laser before and after gas filling, not only makes the energy of the excimer laser output stably for a long time, ensures its stability and reliability in various applications, but also significantly reduces the manual maintenance and management costs, and improves the overall operation efficiency.

[0102] Figure 5 The frame schematic diagram of the automatic gas filling control device of the gas laser according to the embodiment of the present invention is shown, including:

[0103] The laser device startup module 510 is used to turn on the laser power supply and start the circuit self-check; among them, the circuit self-check is used to ensure that the input voltage and the discharge circuit meet the preset requirements.

[0104] The main controller module 520 is used to compare the real-time energy value with the preset energy value. If the real-time energy value is less than the preset energy value, it determines whether the voltage value has reached the maximum value. If not, it increases the voltage value. If so, it prompts that the working air pressure is insufficient and starts the automatic gas filling device to enter the gas filling process.

[0105] The gas filling control module 530 is used to determine whether the real-time air pressure of the laser is less than the maximum air pressure after entering the gas filling process. If it is less than the maximum air pressure, it opens the main valve for cyclic gas filling. Among them, after each gas filling, energy calibration is performed and it is determined whether the real-time energy value is less than the preset energy value. If the real-time energy value is less than the preset energy value, it determines whether the energy difference between the real-time energy value and the energy value before gas filling is within the preset range. If it is within the preset range, it prompts to request manual maintenance. If it is not within the preset range, it continues with cyclic gas filling.

[0106] The voltage control module 540 is used to adjust the voltage value of the gas laser excitation source.

[0107] The energy calibration module 550 is used to obtain the real-time energy value of the output laser, determine the difference between the real-time energy value and the rated value, and provide it to the main controller module for energy calibration.

[0108] According to the solution provided by the present invention, the laser power supply is turned on and circuit self-check and energy calibration are started; among them, the circuit self-check is used to ensure that the input voltage and the discharge circuit meet the preset requirements, and the energy calibration is used to obtain the real-time energy value; the real-time energy value is compared with the preset energy value. If the real-time energy value is less than the preset energy value, it determines whether the voltage value has reached the maximum value. If not, it increases the voltage value. If so, it prompts that the working air pressure is insufficient and starts the automatic gas filling device to enter the gas filling process; after entering the gas filling process, it determines whether the real-time air pressure of the laser is less than the maximum air pressure. If it is less than the maximum air pressure, it opens the main valve for cyclic gas filling. Among them, after each gas filling, energy calibration is performed and it is determined whether the real-time energy value is less than the preset energy value. If the real-time energy value is less than the preset energy value, it determines whether the energy difference between the real-time energy value and the energy value before gas filling is within the preset range. If it is within the preset range, it prompts to request manual maintenance. If it is not within the preset range, it continues with cyclic gas filling. The present invention realizes precise automatic control of the gas filling process by real-time monitoring and comparing the energy values of the laser before and after gas filling, not only enables the long-term stable output of the energy of the excimer laser, ensures its stability and reliability in various applications, but also significantly reduces the manual maintenance and management costs and improves the overall operation efficiency.

[0109] Those skilled in the art can understand that the modules in the devices in the embodiments can be adaptively changed and set in one or more devices different from the embodiments. The modules or units or components in the embodiments can be combined into one module or unit or component, and in addition, they can be divided into multiple sub-modules or sub-units or sub-components. Except that at least some of such features and / or processes or units are mutually exclusive, any combination can be used to combine all the features disclosed in this specification (including the accompanying claims, abstract, and drawings) and all the processes or units of any method or device so disclosed. Unless otherwise explicitly stated, each feature disclosed in this specification (including the accompanying claims, abstract, and drawings) can be replaced by an alternative feature that provides the same, equivalent, or similar purpose. In addition, those skilled in the art can understand that although some of the embodiments herein include certain features included in other embodiments rather than other features, the combination of the features of different embodiments means that it is within the scope of the present invention and forms different embodiments. For example, in the claims, any one of the claimed embodiments can be used in any combination. The present invention can be implemented by means of hardware including several different elements and by means of a properly programmed computer. In a unit scheme listing several devices, several of these devices can be embodied by the same hardware item. The steps in the above embodiments, unless otherwise specified, should not be construed as a limitation on the execution order.

Claims

1. A method for automatically controlling gas filling of a gas laser, characterized in that: include: Turn on the laser power supply and start the circuit self-test; the circuit self-test is used to ensure that the input voltage and discharge circuit meet the preset requirements; Start energy calibration to ensure that the real-time energy value meets the preset requirements; During the energy calibration operation, if the real-time energy value is greater than or equal to the preset energy value, the device is judged to be working normally; if the real-time energy value is less than the preset energy value, it is judged whether the voltage value has reached the maximum value. If not, the voltage value is increased. If so, it indicates that the working gas pressure is insufficient, and the automatic gas filling device is started to enter the gas filling process; After entering the gas filling process, determine whether the real-time gas pressure of the laser is less than the maximum gas pressure. If it is greater than or equal to the maximum gas pressure, perform energy calibration. If it is less than the maximum gas pressure, open the main valve for cyclic gas filling. After each gas filling, perform energy calibration and determine whether the real-time energy value is less than the preset energy value. If it is greater than or equal to the preset energy value, the equipment is judged to be working normally; if it is less than the preset energy value, it is judged whether the difference between the real-time energy value and the energy before refueling is within the preset range. If it is within the preset range, a prompt is given to request maintenance; if it is not within the preset range, the refueling cycle continues.

2. The automatic gas filling control method for a gas laser according to claim 1, characterized in that: The automatic gas filling device includes a laser cavity, a main valve, a gas filling cavity, a solenoid valve and a pressure sensor; When the electromagnetic valve is closed and the main valve is opened, the pressure value of the laser cavity is obtained; when the electromagnetic valve is opened and the main valve is closed, the pressure value of the gas filling cavity is obtained.

3. The automatic gas filling control method for a gas laser according to claim 1, characterized in that: The method further comprises: The gas replenishment prediction model is trained by the voltage, working time, output energy value, laser cavity gas pressure and temperature, and corresponding gas replenishment data of the laser during operation; wherein the gas replenishment prediction model includes a TPE sub-model and a GBDT sub-model; The current voltage, working time, output energy value, laser cavity gas pressure and temperature are input into the gas replenishment amount prediction model to predict the required gas replenishment amount; According to the predicted gas replenishment amount, the automatic gas filling device is controlled to replenish gas.

4. An automatic gas filling control device for a gas laser, characterized in that: include: The laser equipment startup module is used to connect the laser power supply and start the circuit self-test, which is used to ensure that the input voltage and discharge circuit meet the preset requirements; The main controller module is used to compare the real-time energy value with the preset energy value. If the real-time energy value is greater than or equal to the preset energy value, it is judged that the equipment is working normally; if the real-time energy value is less than the preset energy value, it is judged whether the voltage value has reached the maximum value. If not, the voltage value is increased. If so, it indicates that the working gas pressure is insufficient and enters the gas filling process; The gas filling control module, after starting the gas filling process, determines whether the real-time gas pressure of the laser is less than the maximum gas pressure, and performs energy calibration if it is greater than or equal to the maximum gas pressure; If it is less than the maximum air pressure, the main valve is opened for cyclic gas filling. After each gas filling, energy calibration is performed to determine whether the real-time energy value is less than the preset energy value. If it is greater than or equal to the preset energy value, the equipment is judged to be working normally. If it is less than the preset energy value, it is determined whether the difference between the real-time energy value and the energy before gas filling is within the preset range. If it is within the preset range, a maintenance request is prompted. If it is not within the preset range, cyclic gas filling continues. A voltage control module, used for adjusting the voltage value of the gas laser excitation source; The energy calibration module is used to obtain the real-time energy value of the output laser, determine the difference between the real-time energy value and the rated value, and provide it to the main controller module.

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