Communication control method of pulse power supply and related device

Abstract

The embodiment of the invention provides a communication control method of a pulse power supply, which comprises the following steps: monitoring a noise signal sensed by a target pin of an analog-to-digital converter and interruption information of a control module through a controller of the pulse power supply, obtaining noise information based on the monitored noise signal, and obtaining a noise level based on the noise information and the interruption information; and finally, the communication parameters of the control module are configured based on the noise levels, so that the purpose of configuring corresponding communication parameters under different noise levels is achieved, the control module can communicate with other hardware modules based on different communication parameters under different noise levels, adaptive adjustment of the communication parameters along with the noise levels is achieved, and the communication efficiency is improved. Normal communication between the communication module and other hardware modules in different noise environments can be guaranteed, the probability that the working state of the pulse power supply is abnormal due to abnormal communication in a strong noise environment is reduced, and the anti-noise level of the pulse power supply is improved.

Description

[0001] This application claims the priority of the Chinese patent application filed with the China Patent Office on August 21, 2024, with application number 202411150830.2 and invention name “A communication control method and related devices”, the entire contents of which are incorporated by reference in this application. Technical Field

[0002] The present invention relates to the field of semiconductor technology, and more specifically, to a communication control method and related devices for a pulse power supply. Background Art

[0003] Pulsed Power Supply can provide short, high-energy current or voltage pulses and is widely used in semiconductor, medical, scientific research and other fields. Taking the semiconductor field as an example, pulsed power supply is widely used in semiconductor process equipment such as plasma cleaning equipment, pulsed laser deposition (PLD) equipment and atomic layer etching (ALE) equipment.

[0004] In some cases, especially for fast pulse power supplies with operating frequencies above 5 MHz, the pulse power supply may need to operate in an area with high electromagnetic interference (EMI) noise, which places high demands on the anti-noise level of the pulse power supply. Summary of the invention

[0005] The embodiments of this specification provide a communication control method and related devices for a pulse power supply to achieve the purpose of improving the anti-noise capability of the pulse power supply.

[0006] To achieve the above technical objectives, the embodiments of this specification provide the following technical solutions:

[0007] One embodiment of the present specification provides a communication control method of a pulse power supply, which is applied to a controller of a pulse power supply in a semiconductor process equipment, wherein the semiconductor process equipment includes an electrostatic chuck and a chuck base, the pulse power supply also includes a pulse generator, the controller includes a control module and an analog-to-digital converter, the controller and the pulse generator are arranged in an inner cavity surrounded by the electrostatic chuck and the chuck base, and the communication control method of the pulse power supply includes:

[0008] Acquire a noise signal induced by a target pin of the analog-to-digital converter, and obtain noise information based on the noise signal;

[0009] Acquire interrupt information of the control module, wherein the interrupt information includes triggered information of a target interrupt triggered by noise in the control module, wherein the triggered information includes the number of triggered times and / or the triggered frequency;

[0010] Based on the noise information and the interruption information, communication parameters of the control module are configured.

[0011] Optionally, configuring the communication parameters of the control module based on the noise information and the interruption information includes:

[0012] Obtaining a noise level based on the noise information and the interruption information;

[0013] Based on the noise level, communication parameters of the control module are configured, wherein the communication parameters include at least one of an IO speed, a baud rate, an oversampling point, a number of retransmissions, and a timeout period.

[0014] Optionally, the target pin includes a first pin and a second pin, the first pin and the second pin are both suspended pins of the analog-to-digital converter, the first pin is close to a noise generation location, and the second pin is far from the noise generation location;

[0015] The acquiring of the noise signal induced by the target pin of the analog-to-digital converter and obtaining the noise information based on the noise signal comprises:

[0016] Acquire a first noise signal sensed by a first pin of the analog-to-digital converter, and obtain first noise information based on the first noise signal;

[0017] A second noise signal sensed by a second pin of the analog-to-digital converter is acquired, and second noise information is obtained based on the second noise signal.

[0018] Optionally, the first pin corresponds to a near interference source coefficient, and the second pin corresponds to a far radiation coefficient;

[0019] The obtaining of the noise level based on the noise information and the interruption information comprises:

[0020] The noise level is calculated based on target information, weights corresponding to the information included in the target information, the near interference source coefficient and the far radiation coefficient; the target information includes the first noise information, the second noise information and the interruption information.

[0021] Optionally, the calculating the noise level based on the target information, the weights corresponding to the information included in the target information, the near interference source coefficient and the far radiation coefficient includes:

[0022] Substituting the target information, the weights corresponding to the information included in the target information, the near interference source coefficient and the far radiation coefficient into a first target formula to calculate the noise level;

[0023] The first target formula includes:

[0024] NOISE_LV(n)=CNT×Ki+(NV_MAX1×K1+DV_MAX1×K2)×e K5 +

[0025] (NV_MAX2×K3+DV_MAX2×K4)×e K6 ; Wherein, NOISE_LV(n) represents the noise level of the current cycle, e represents a natural constant, CNT represents the interruption information, Ki represents the weight corresponding to the interruption information, NV_MAX1 represents the noise amplitude information in the first noise information, DV_MAX1 represents the frequency information of the noise spectrum in the first noise information, NV_MAX2 represents the noise amplitude information in the second noise information, DV_MAX2 represents the frequency information of the noise spectrum in the second noise information, K1, K2, K3 and K4 are the weights corresponding to NV_MAX1, DV_MAX1, NV_MAX2 and DV_MAX2 respectively, K5 represents the near interference source coefficient, and K6 represents the far radiation coefficient.

[0026] Optionally, the first pin corresponds to a near interference source coefficient, and the second pin corresponds to a far radiation coefficient;

[0027] The obtaining of the noise level based on the noise information and the interruption information comprises:

[0028] Substituting the historical noise level, the weight corresponding to the historical noise level, the target information, the weights corresponding to the information included in the target information, the near interference source coefficient and the far radiation coefficient into the second target formula, the noise level is calculated; the historical noise level includes the noise level of the previous cycle and the noise level of the previous cycle;

[0029] The second target formula includes: NOISE_LV(n)=CNT×Ki+(NV_MAX1×K1+DV_MAX1×K2)×e K5 +(NV_MAX2×K3+DV_MAX2×K4)×e K6 +K10×NOISE_LV(n-1)+K11×(NOISE_LV(n-1)-NOISE_LV(n-2));

[0030] Among them, NOISE_LV(n) represents the noise level of the current cycle, e represents a natural constant, CNT represents the interruption information, Ki represents the weight corresponding to the interruption information, NV_MAX1 represents the noise amplitude information in the first noise information, DV_MAX1 represents the frequency information of the noise spectrum in the first noise information, NV_MAX2 represents the noise amplitude information in the second noise information, DV_MAX2 represents the frequency information of the noise spectrum in the second noise information, K1, K2, K3 and K4 are the weights corresponding to NV_MAX1, DV_MAX1, NV_MAX2 and DV_MAX2 respectively; NOISE_LV(n-1) represents the noise level of the previous cycle, NOISE_LV(n-2) represents the noise level of the previous cycle, K11 and K12 are the weights corresponding to NOISE_LV(n-1) and NOISE_LV(n-2) respectively, K5 represents the near interference source coefficient, and K6 represents the far radiation coefficient.

[0031] Optionally, the IO speed, baud rate, oversampling point, number of retransmissions and timeout period each correspond to a configuration value that matches the level;

[0032] The configuring the communication parameters of the control module based on the noise level includes:

[0033] Based on the noise level and the number of levels of the configuration values ​​corresponding to each of the communication parameters, normalizing and rounding the noise level to obtain the normalized level corresponding to each of the communication parameters;

[0034] Based on the normalization levels corresponding to the communication parameters, configuration values ​​corresponding to the normalization levels of the communication parameters are determined.

[0035] Optionally, the target interrupt comprises at least one of a noise flag interrupt, an overflow flag interrupt and a frame error interrupt.

[0036] In a second aspect, an embodiment of the present specification provides a pulse power supply, comprising: a controller and a pulse generator; wherein the controller comprises a control module and an analog-to-digital converter, and the controller and the pulse generator are arranged in an inner cavity surrounded by an electrostatic chuck and a chuck base of a semiconductor process equipment;

[0037] The control module is configured to: acquire a noise signal induced by a target pin of the analog-to-digital converter, and obtain noise information based on the noise signal, wherein the noise information includes noise amplitude information and / or frequency information of a noise spectrum;

[0038] Acquire interrupt information of the control module, wherein the interrupt information includes triggered information of a target interrupt triggered by noise in the control module, wherein the triggered information includes the number of triggered times and / or the triggered frequency;

[0039] configuring communication parameters of the control module based on the noise information and the interruption information;

[0040] sending a control instruction to the pulse generator based on the configured communication parameters;

[0041] The pulse generator is configured to generate a pulse signal in response to the control instruction.

[0042] In a third aspect, an embodiment of the present specification further provides a semiconductor process equipment, comprising: an electrostatic chuck, a chuck base and a pulse power supply as described in any one of the above; wherein,

[0043] The electrostatic chuck and the chuck base form an inner cavity, and the controller and the pulse generator of the pulse power supply are arranged in the inner cavity.

[0044] In a fourth aspect, an embodiment of the present specification also provides a computing device, including a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor implements the communication control method of the pulse power supply as described above when executing the computer program.

[0045] In a fifth aspect, an embodiment of the present specification further provides a computer-readable storage medium having a computer program stored thereon, and when the computer program is executed by a processor, the communication control method of the pulse power supply as described above is implemented.

[0046] In a sixth aspect, an embodiment of the present specification provides a computer program product or a computer program, wherein the computer program product includes a computer program, and the computer program is stored in a computer-readable storage medium; the processor of the computer device reads the computer program from the computer-readable storage medium, and the processor implements the steps of the above-mentioned pulse power supply communication control method when executing the computer program.

[0047] It can be seen from the above technical scheme that the communication control method of the pulse power supply provided in the embodiment of this specification monitors the noise signal induced by the target pin of the analog-to-digital converter and the interrupt information of the control module through the controller of the pulse power supply, obtains noise information based on the monitored noise signal, and configures the communication parameters of the control module based on the noise information and the interrupt information, thereby achieving the purpose of configuring corresponding communication parameters under different noise levels, so that the control module can communicate with other hardware modules based on different communication parameters under different noise levels, and realizes adaptive adjustment of communication parameters with noise level, which is conducive to ensuring the normal communication of the communication module with other hardware modules in different noise environments, and reducing the probability of abnormal working state of the pulse power supply due to communication abnormality in a strong noise environment, thereby improving the anti-noise level of the pulse power supply.

[0048] In addition, the noise information and the interruption information evaluate the intensity of the noise from different angles. The noise level obtained based on the noise information and the interruption information can more accurately reflect the noise level, which is conducive to the accurate evaluation of the noise level. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] In order to more clearly illustrate the embodiments of this specification or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this specification. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0050] Figure 1 A schematic diagram of the arrangement positions of a controller and a pulse generator of a pulse power supply provided in one embodiment of the present specification;

[0051] Figure 2 A flow chart of a communication control method of a pulse power supply provided in one embodiment of the present specification;

[0052] Figure 3 A flow chart of another communication control method of a pulse power supply provided as an embodiment of the present specification;

[0053] Figure 4 A schematic diagram of the structure of a control module provided for one embodiment of this specification;

[0054] Figure 5 A schematic diagram of the structure of a pulse power supply provided for one embodiment of this specification;

[0055] Figure 6 A schematic diagram of the structure of a computing device provided for one embodiment of the present specification. DETAILED DESCRIPTION

[0056] Unless otherwise defined, the technical terms or scientific terms used in the embodiments of this specification shall have the common meanings understood by persons with ordinary skills in the field to which this specification belongs. The words "first", "second" and similar words used in the embodiments of this specification do not indicate any order, quantity or importance, but are only used to avoid confusion of constituent elements.

[0057] Unless the context requires otherwise, throughout the specification, "plurality" means "at least two", and "including" is interpreted as an open, inclusive meaning, that is, "including, but not limited to". In the description of the specification, the terms "one embodiment", "some embodiments", "exemplary embodiments", "examples", "specific examples" or "some examples" are intended to indicate that a particular feature, structure, material or characteristic associated with the embodiment or example is included in at least one embodiment or example of the specification. The schematic representation of the above terms does not necessarily refer to the same embodiment or example.

[0058] The following will be combined with the drawings in the embodiments of this specification to clearly and completely describe the technical solutions in the embodiments of this specification. Obviously, the described embodiments are only part of the embodiments of this specification, not all of the embodiments. Based on the embodiments in this specification, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this specification.

[0059] Overview

[0060] In radio frequency semiconductor process equipment, the signal output by the pulse power supply can be a pulse signal with an adjustable duty cycle. The rising and falling edge widths of this pulse signal can be less than 5ns. In this case, the harmonic frequency generated during the operation of the pulse power supply will be as high as 100MHz to 200MHz or even higher. At high frequencies, the inductive reactance of the parasitic inductance of the line will increase linearly, and the impedance difference between different frequencies will cause inconsistent voltage attenuation of each harmonic frequency, and then the waveform fed into the process chamber will be distorted, making the pulse signal output by the pulse power supply unable to meet the process requirements. In addition, the pulse power supply placed outside the process chamber will feed the signal to the electrode in the process chamber through the coaxial cable. The coaxial cables are connected into one strand, which will cause common-mode noise to interfere with each other, thereby leading the noise outside the process chamber. In order to solve this problem, the applicant found that some components of the pulse power supply can be placed in the process chamber, referring to Figure 1 , the pulse power supply mainly includes a DC power supply, a controller ( Figure 1The controller, pulse generator 1, pulse power component 2 and pulse output component 3 are not shown in the figure. The controller, pulse generator 1, pulse power component 2 and pulse output component 3 can be placed in the process chamber, specifically in the inner cavity surrounded by the electrostatic chuck 5 (ESC) and the chuck base 4, and located directly below the electrostatic chuck 5, so that the parasitic inductance can be greatly reduced to avoid the above problems. However, since the area where the electrostatic chuck is located is a high electromagnetic interference (EMI) noise area, and the noise level may change with the process progress, this puts forward higher requirements on the anti-noise performance of the pulse power supply.

[0061] In order to solve this problem, the applicant has found that in addition to improving the anti-noise performance of the pulse power supply through hardware means, it is also possible to monitor the noise level of the environment in which the pulse power supply is located and adaptively adjust the communication parameters of the control module in the controller of the pulse power supply, so that the control module can communicate with other hardware modules based on different communication parameters under different noise levels, which is conducive to ensuring the normal communication between the communication module and other hardware modules in different noise environments, and reducing the probability of abnormal working state of the pulse power supply due to communication abnormalities in a strong noise environment, thereby improving the anti-noise level of the pulse power supply.

[0062] In order to accurately evaluate the noise level of the environment in which the pulse power supply is located, the noise signal induced by the target pin of the analog-to-digital converter inside the pulse power supply can be obtained, and noise information including noise amplitude information and / or frequency information of the noise spectrum can be obtained based on the noise signal. The noise information is obtained based on the directly induced noise signal, and the noise level is reflected through the relevant information of the noise signal itself; in addition, in order to ensure that its own working state and / or communication state are normal, the control module can set a corresponding interrupt (Interrupt). When the working state and / or communication state of the control module is abnormal, the corresponding interrupt can be triggered, and the interrupt service routine (Interrupt Service Routine) of the control module will be used to handle the abnormality. Routine, ISR) and other corresponding interrupt handling programs respond to interrupts and perform corresponding fault processing or restart operations to ensure the normal operation of the control module. Among these interrupts, some interrupts are noise-related interrupts. In this embodiment, the interrupt triggered by noise is called a target interrupt. By detecting the interrupt information including the triggered information of the target interrupt, the interrupt information related to the noise level can be captured from the existing interrupt mechanism of the control module, so as to obtain the noise level by combining the noise information and the interrupt information that evaluate the intensity of the noise from different angles. In this way, the noise level can more accurately reflect the noise level, which is conducive to the accurate evaluation of the noise level.

[0063] Based on the above concept, an embodiment of the present specification provides a communication control method for a pulse power supply. The communication control method for a pulse power supply provided in the embodiment of the present specification will be exemplarily described below in conjunction with the accompanying drawings.

[0064] Exemplary Methods

[0065] Some embodiments of this specification exemplify the communication control method of the pulse power supply, which mainly includes a DC power supply, a controller, a pulse generator, a pulse power component, and a pulse output component. The controller, the pulse generator, the pulse power component, and the pulse output component are placed in the process chamber. The controller may include a control module and an analog-to-digital converter, such as Figure 2 As shown, the communication control method of the pulse power supply includes:

[0066] S101: Acquire a noise signal induced by a target pin of an analog-to-digital converter, and obtain noise information based on the noise signal, where the noise information includes noise amplitude information and / or frequency information of a noise spectrum;

[0067] S102: Obtain interrupt information of the control module, where the interrupt information includes triggered information of a target interrupt triggered by noise in the control module, where the triggered information includes the number of triggered times and / or the triggered frequency;

[0068] S103: configuring communication parameters of the control module based on the noise information and the interruption information.

[0069] It is understood that in the various implementations of this specification, the size of the sequence number of each process does not mean the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the implementation of this specification. Figure 2 As described above, S101 and S102 are not used to limit the order of execution of the two steps. In some embodiments, S101 and S102 can be executed sequentially in sequence, or simultaneously, or S102 can be executed first and then S101. This manual does not limit this, and it depends on the actual situation.

[0070] In this specification, noise refers to noise defined in the field of communication technology, for example, it can refer to any unwanted, random physical phenomenon or electrical effect that interferes with signal transmission. Noise is a kind of useless energy that is not a signal source. Noise can be superimposed on useful signals, reducing the quality of the signal, thereby affecting the quality and reliability of communication.

[0071] During operation, the target pin of the analog-to-digital converter in the pulse power supply can sense noise, sample the noise using the analog-to-digital converter, and obtain a noise signal containing noise information through the analog-to-digital conversion function of the analog-to-digital converter. The noise signal can be a digital signal, so that the control module of the controller can process the noise signal in the form of a digital signal to obtain noise information. In the noise information, the noise amplitude information can be obtained by sampling the peak maximum value in a section of the noise signal or the average peak maximum value in a section of the noise signal, and the noise amplitude information can be used to characterize the voltage information of the noise. The frequency information of the noise frequency in the noise information can be obtained by sampling the frequency of the rising edge or falling edge of the noise signal. The target pin can refer to a pin in the analog-to-digital converter that is not designed to transmit the working signal of the pulse power supply. In order to better sense the noise, the target pin can include a suspended (unconnected or floating) pin in the analog-to-digital converter. The suspended pin is equivalent to an uncontrolled input, which is easily affected by external electromagnetic interference, electrostatic discharge or coupling effects of adjacent signal lines. Therefore, by sensing noise through the suspended pin, a more realistic noise level can be sensed, and the noise information obtained based on the corresponding noise signal can more accurately characterize the real noise level.

[0072] In an optional implementation, a feasible process for configuring communication parameters is provided. Specifically, based on noise information and interruption information, configuring the communication parameters of the control module includes:

[0073] Based on the noise information and the interruption information, a noise level is obtained;

[0074] Based on the noise level, communication parameters of the control module are configured, where the communication parameters include at least one of an IO speed, a baud rate, an oversampling point, a number of retransmissions, and a timeout period.

[0075] In order to comprehensively detect noise at different positions, in one embodiment of the present specification, the target pin includes a first pin and a second pin, the first pin and the second pin are both suspended pins of the analog-to-digital converter, the first pin is close to the noise generating position, and the second pin is far from the noise generating position;

[0076] Obtain the noise signal induced by the target pin of the analog-to-digital converter, and obtain the noise information based on the noise signal including:

[0077] Acquire a first noise signal sensed by a first pin of the analog-to-digital converter, and obtain first noise information based on the first noise signal;

[0078] A second noise signal sensed by a second pin of the analog-to-digital converter is acquired, and second noise information is obtained based on the second noise signal.

[0079] Due to the difference in the physical positions of different pins in the control module, some pins are relatively close to the noise occurrence position, while some pins are relatively far from the noise occurrence position. In order to comprehensively evaluate the noise level at different positions, in this embodiment, based on the first noise signal induced by the first pin and the second noise signal induced by the second pin, the first noise information and the second noise information are respectively obtained. In this way, when evaluating the noise level, the noise level can be evaluated based on the interrupt information and the noise information including the first noise information and the second noise information. The noise level obtained in this way comprehensively considers the noise level at different positions of the control module, so that the obtained noise level can accurately characterize the real noise level of the area where the control module is located. The noise occurrence position may include the position where the switch node, power device, etc. in the pulse power supply are located. In some embodiments, the noise occurrence position can be obtained by instrument measurement or theoretical calculation, etc., which is not limited in this specification and depends on the actual situation. Optionally, the noise occurrence position may refer to the position where the pulse power component in the pulse power supply is located. When the switch device in the pulse power component switches rapidly, transient voltage and current changes will occur. These changes will generate electromagnetic fields in space and time, thereby causing electromagnetic interference.

[0080] In an optional implementation, the first pin corresponds to a near interference source coefficient, and the second pin corresponds to a far radiation coefficient;

[0081] Based on the noise information and interruption information, the noise level is obtained including:

[0082] The noise level is calculated based on the target information, the weights corresponding to the information included in the target information, the near interference source coefficient and the far radiation coefficient; the target information includes the first noise information, the second noise information and the interruption information.

[0083] In this embodiment, by assigning corresponding weight coefficients (near interference source coefficient and far radiation coefficient) to the first pin and the second pin and assigning corresponding weights to the target information, in the process of calculating the noise level, the different contributions of the first noise information, the second noise information and the interruption information to the noise level assessment are considered, which is conducive to obtaining a noise level that accurately characterizes the noise level.

[0084] Optionally, based on the target information, the weights corresponding to the information included in the target information, the near interference source coefficient and the far radiation coefficient, the noise level is calculated to include:

[0085] Substituting the target information, the weights of the information included in the target information, the near interference source coefficient and the far radiation coefficient into the first target formula, and calculating the noise level;

[0086] The first goal formula includes:

[0087] NOISE_LV(n)=CNT×Ki+(NV_MAX1×K1+DV_MAX1×K2)×e K5 +

[0088] (NV_MAX2×K3+DV_MAX2×K4)×e K6 ; Wherein, NOISE_LV(n) represents the noise level of the current cycle, e represents a natural constant, CNT represents interruption information, Ki represents the weight corresponding to the interruption information, NV_MAX1 represents the noise amplitude information in the first noise information, DV_MAX1 represents the frequency information of the noise spectrum in the first noise information, NV_MAX2 represents the noise amplitude information in the second noise information, DV_MAX2 represents the frequency information of the noise spectrum in the second noise information, K1, K2, K3 and K4 are the weights corresponding to NV_MAX1, DV_MAX1, NV_MAX2 and DV_MAX2 respectively, K5 represents the near interference source coefficient, and K6 represents the far radiation coefficient.

[0089] In this embodiment, a feasible method for calculating the noise level is provided. In this embodiment, not only corresponding weights are assigned to the first noise information and the second noise information respectively, so as to realize the consideration of the importance of the noise information induced at the near noise generation position and the far noise generation position, but also the importance of the first noise information and the weighted summation result thereof corresponding to the near interference source coefficient corresponding to the first pin is further considered based on the importance of the first noise information and the weighted summation result thereof corresponding to the far radiation coefficient corresponding to the second pin is further considered based on the importance of the second noise information and the weighted summation result thereof corresponding to the far noise generation coefficient, which is conducive to comprehensively considering the different influences of the noise information induced at the near noise generation position and the far noise generation position on the noise level, and is conducive to obtaining an accurate noise level.

[0090] In order to avoid overshooting of the noise level during the control process, in another optional implementation, in the process of evaluating the noise level, the historical noise level and the weight corresponding to the historical noise level are introduced to introduce a feedback mechanism in the process of calculating the noise level to avoid overshooting of the noise level. Specifically, the first pin corresponds to the near interference source coefficient, and the second pin corresponds to the far radiation coefficient;

[0091] Based on the noise information and interruption information, the noise level is obtained including:

[0092] Substitute the historical noise level, the weight corresponding to the historical noise level, the target information, the weight corresponding to the information included in the target information, the near interference source coefficient and the far radiation coefficient into the second target formula to calculate the noise level; the historical noise level includes the noise level of the previous cycle and the noise level of the previous cycle;

[0093] The second target formula includes: NOISE_LV(n)=CNT×Ki+(NV_MAX1×K1+DV_MAX1×K2)×e K5 +(NV_MAX2×K3+DV_MAX2×K4)×e K6 +K10×NOISE_LV(n-1)+K11×(NOISE_LV(n-1)-NOISE_LV(n-2));

[0094] Among them, NOISE_LV(n) represents the noise level of the current cycle, e represents a natural constant, CNT represents interruption information, Ki represents the weight corresponding to the interruption information, NV_MAX1 represents the noise amplitude information in the first noise information, DV_MAX1 represents the frequency information of the noise spectrum in the first noise information, NV_MAX2 represents the noise amplitude information in the second noise information, DV_MAX2 represents the frequency information of the noise spectrum in the second noise information, K1, K2, K3 and K4 are the weights corresponding to NV_MAX1, DV_MAX1, NV_MAX2 and DV_MAX2 respectively; NOISE_LV(n-1) represents the noise level of the previous cycle, NOISE_LV(n-2) represents the noise level of the previous cycle, K11 and K12 are the weights corresponding to NOISE_LV(n-1) and NOISE_LV(n-2) respectively, K5 represents the near interference source coefficient, and K6 represents the far radiation coefficient.

[0095] In this embodiment, in addition to assigning corresponding weights to the first noise information and the second noise information respectively, the importance of the noise information induced at the near noise generating position and the far noise generating position is considered, the importance of the weighted summation result of the first noise information and its corresponding weight is further considered based on the near interference source coefficient corresponding to the first pin, and the importance of the weighted summation result of the second noise information and its corresponding weight is further considered based on the far radiation coefficient corresponding to the second pin. In addition, historical noise levels and weights corresponding to the historical noise levels are introduced. In this way, a feedback mechanism is introduced in the noise level calculation process to avoid overshoot of the noise level.

[0096] In this embodiment, the noise level may be evaluated once every predetermined time, and the predetermined time may be referred to as the length of a cycle.

[0097] In some embodiments, the target interrupt includes a noise flag interrupt, an overflow flag interrupt, and a frame error interrupt. The noise flag interrupt is used to indicate that signal noise is detected when receiving data. During the communication process, noise can be caused by electromagnetic interference, poor signal quality, or crosstalk of adjacent signal lines. When the control module detects noise, the noise flag is set. If the noise interrupt is enabled, the control module will generate an interrupt, allowing the software to check the noise flag and take appropriate error handling measures. The overflow flag interrupt is usually associated with the receive buffer. When the receive buffer is full and new data is still coming, the receiver cannot store new data bytes, and an overflow error will occur. The frame error interrupt is used to indicate that a structural error is found in the received data frame. During the communication process, data is usually transmitted in a frame format with a start bit, a data bit, a parity bit (optional), and a stop bit. All three interrupts may be penalized due to the influence of noise, and these interrupts can reflect information such as the amplitude, average value, and spectrum of the noise.

[0098] When the target interrupt includes a noise flag interrupt, an overflow flag interrupt, and a frame error interrupt, the second target formula can be adaptively adjusted to: NOISE_LV(n)=NS_CNT×K7+OV_CNT×K8+ERR_CNT×K9+(NV_MAX1×K1+DV_MAX1×K2)×e K5 +(NV_MAX2×K3+DV_MAX2×K4)×e K6 +K10×NOISE_LV(n-1)+K11×(NOISE_LV(n-1)-NOISE_LV(n-2)); where NS_CNT, OV_CNT and ERR_CNT represent the number of times the noise flag interrupt, overflow flag interrupt and frame error interrupt are triggered respectively; K7, K8 and K9 represent the weights corresponding to the noise flag interrupt, overflow flag interrupt and frame error interrupt respectively.

[0099] In an optional embodiment, a method for configuring optional communication parameters is provided, specifically, IO speed, baud rate, oversampling point, number of retransmissions and timeout period each correspond to a configuration value matching the level;

[0100] Based on the noise level, configure the control module's communication parameters including:

[0101] Based on the noise level and the number of levels of the configuration values ​​corresponding to each communication parameter, the noise level is normalized and rounded to obtain the normalized level corresponding to each communication parameter;

[0102] Based on the normalization levels corresponding to the communication parameters, configuration values ​​corresponding to the normalization levels of the communication parameters are determined.

[0103] The IO (Input / Output) speed may affect the slope of the rising and falling edges of the signal. In some embodiments, the configuration value of the IO speed is negatively correlated with the normalized level or the noise level, that is, the higher the normalized level or the noise level, the lower the configuration value of the IO speed.

[0104] The baud rate may affect the number of changes in the signal transmitted per second. In some embodiments, the baud rate configuration value is negatively correlated with the normalized level or noise level, that is, the higher the normalized level or noise level, the lower the baud rate configuration value.

[0105] Oversampling points refer to sample points collected within a symbol period, and these sample points can be used to determine the logic state of the signal. In some embodiments, the configuration value of the oversampling point is positively correlated with the normalization level or the noise level, that is, the higher the normalization level or the noise level, the higher the configuration value of the oversampling point.

[0106] The number of retransmissions may refer to the maximum number of times the control module retransmits the same data packet when the data packet is lost or damaged. In some embodiments, the configuration value of the number of retransmissions is positively correlated with the normalized level or noise level, that is, the higher the normalized level or noise level, the higher the configuration value of the number of retransmissions.

[0107] The timeout period may refer to the maximum time that the control module waits for the receiving party to return a message of receiving the data packet after sending the data packet. After the timeout period has expired, the control module may perform operations such as retransmitting the data packet. In some implementations, the configuration value of the timeout period is positively correlated with the normalized level or the noise level, that is, the higher the normalized level or the noise level, the higher the configuration value of the timeout period.

[0108] Different configuration values ​​of these communication parameters can affect the sensitivity of the communication module to noise. By configuring the configuration values ​​of these communication parameters, the communication reliability of the communication module under different noise levels can be guaranteed. For example, when the noise level is high, the normal communication of the communication module can be guaranteed by reducing the IO speed and the baud rate.

[0109] Each communication parameter can be pre-configured with different levels of configuration values, see Table 1 below:

[0110] Table 1. The corresponding relationship between the configuration values ​​of communication parameters at different levels

[0111]

[0112] Table 1 shows the correspondence between each communication parameter and configuration values ​​of different levels. After the noise level is calculated, in order to obtain the configuration values ​​corresponding to each communication parameter under the corresponding noise level, the noise level can be normalized for different communication parameters.

[0113] For example, for the IO speed, its configuration value is divided into four levels. When configuring the value of the IO speed, the value range of the calculated noise level can be normalized to 1 to 4, and the normalized noise level can be rounded. Assuming that the calculated noise level is normalized and rounded, the normalized level is 3, then the IO speed can be configured to 10MHz. In this embodiment, the normalization level is positively correlated with the noise level, that is, the higher the normalization level, the higher the noise level, and the communication between the control module and other hardware can be ensured to proceed normally by configuring a lower IO speed.

[0114] Similarly, for the baud rate, its configuration value is divided into five levels. When configuring the baud rate, the value range of the calculated noise level can be normalized to 1 to 5, and the normalized noise level can be rounded. Assuming that the calculated noise level is 5 after normalization and rounding, the baud rate can be configured to 9kbit / s to ensure normal communication of the control module under higher noise levels.

[0115] In a specific embodiment of the present specification, a feasible execution process of a communication control method of a pulse power supply is provided, such as Figure 3 As shown, the process includes:

[0116] When the pulse power supply is started or noise monitoring begins, the noise monitoring process of the control module is initialized to start collecting the noise signal sensed by the target pins (such as IO1 and IO2) of the analog-to-digital converter. The initialization settings may include the default maximum IO speed configuration, the default maximum baud rate configuration, the default maximum number of sampling points, the default maximum number of retransmissions, the default maximum timeout time, the initialization noise judgment maximum (NOSIE_LV_MAX) and minimum value (NOSIE_LV_MIN). In this embodiment, the object of noise monitoring may be an idle analog-to-digital converter in the controller (i.e., an idle ADC, an analog-to-digital converter that is not processing working data at the current moment), so that the noise monitoring process can be prevented from affecting the normal working process of the controller.

[0117] In some embodiments, when acquiring the first noise signal and the second noise signal sensed by the first pin (IO1) and the second pin (IO2) of the idle ADC, respectively, the maximum sampling rate (e.g., 12 bits) can be used. During the sampling process, the noise amplitude information is obtained based on the peak detection (maximum value) of the noise signal, and the frequency information of the noise spectrum is obtained based on the rising edge / falling edge detection (maximum differential value) of the noise signal. The corresponding weights (proportional coefficients) K1 to K4 are assigned to the noise amplitude information and the frequency information of the noise spectrum respectively included in the first noise signal and the second noise signal, and the corresponding weights (near interference source coefficient K5 and far radiation coefficient K6) are assigned to the first pin and the second pin.

[0118] In addition to obtaining the noise signal and noise information sensed by the target pin of the analog-to-digital converter, the interrupt information of the control module can also be counted. These interrupt information include noise flag interrupt, overflow flag interrupt and frame error interrupt, and these interrupt information correspond to corresponding weights (proportional coefficients) K7 to K9. These interrupt information reflect the amplitude, average value and spectrum of the noise respectively.

[0119] After obtaining the interruption information and noise information, based on the second target formula: NOISE_LV(n)=NS_CNT×K7+OV_CNT×K8+ERR_CNT×K9+(NV_MAX1×K1+DV_MAX1×K2)×e K5 +(NV_MAX2×K3+DV_MAX2×K4)×e K6 +K10×NOISE_LV(n-1)+K11×(NOISE_LV(n-1)-NOISE_LV(n-2)), the noise level is calculated.

[0120] After normalizing and rounding the noise level, the normalized level NOISE_LV_0 corresponding to each communication parameter is obtained. After the normalized level is obtained, the heartbeat data interruption triggered by the timer every 100ms can trigger the execution of the step of determining the configuration value corresponding to each communication parameter and the normalized level based on the normalized level corresponding to each communication parameter. The execution of this step can refer to the similar corresponding relationship shown in Table 1, and this specification will not be repeated here.

[0121] During the execution of the entire method, in order to improve the concurrency of the execution of each step, the noise monitoring process can execute the relevant logic of obtaining the noise signal sensed by the target pin of the analog-to-digital converter, and obtaining the noise information based on the noise signal; the data process responds to the heartbeat data interrupt and executes the relevant logic of communication parameter configuration; the functional process executes other functional logics in the communication control method of the pulse power supply (such as interrupt information acquisition logic, etc.). In this way, the three processes execute different steps of the communication control method of the pulse power supply, which is conducive to improving the concurrency of the method and improving the execution efficiency of the method.

[0122] refer to Figure 4 , Figure 4 FIG. 1 shows a hardware schematic diagram of a control module in one embodiment. Figure 4 In the example, the control module can be implemented by a single-chip microcomputer model STM32G474VET6. The functions of each pin of the single-chip microcomputer can be referred to in relevant technical literature or product documentation. Figure 4 , the signals transmitted by some pins or the connected hardware are shown, where VCC represents the voltage signal, USER-LED and LED1~4 represent different indicator lights, UARTi_RX represents the i-th (i=2, 3, 4, 5) UART (Universal Asynchronous Receiver / Transmitter) receiving signal, UARTi_TX represents the i-th UART output signal, OSC represents the oscillator signal, NRST represents the reset signal, SUBPULSE_SYNC represents the pulse synchronization signal, SWCLK represents the clock signal of the debugging / programming interface, SWDIO represents the data signal of bidirectional transmission, SPI1_SCK represents the clock signal of the SPI communication interface, and SPI1_MISO represents the SPI (Serial SPI1_MOSI represents the data signal sent from the master device to the slave device in the serial peripheral interface (Serial Peripheral Interface) communication protocol, SGND represents grounding, CHj-CHN1 / 2 represents the jth (j=1, 3, 5, 7) channel signal for sending control instructions to the pulse generator, and N=A, B, C, D.

[0123] In some implementations, after the noise information is obtained, the noise information may be derated (eg, derated by 20%) to filter out high-frequency noise in the noise information.

[0124] Exemplary Devices

[0125] In an exemplary embodiment of the present specification, a communication control device is also provided, which is applied to a controller of a pulse power supply in a semiconductor process equipment, the semiconductor process equipment includes an electrostatic chuck and a chuck base, the pulse power supply also includes a pulse generator, the controller includes a control module and an analog-to-digital converter, the controller and the pulse generator are arranged in an inner cavity surrounded by the electrostatic chuck and the chuck base, and the communication control device of the pulse power supply includes:

[0126] A noise acquisition module, used to acquire a noise signal induced by a target pin of the analog-to-digital converter, and obtain noise information based on the noise signal, wherein the noise information includes noise amplitude information and / or frequency information of a noise spectrum;

[0127] An interrupt acquisition module, used for acquiring interrupt information of a control module, wherein the interrupt information includes triggered information of a target interrupt triggered by noise in the control module, wherein the triggered information includes the number of triggered times and / or the triggered frequency;

[0128] The parameter configuration module is used to configure the communication parameters of the control module based on the noise information and the interruption information.

[0129] For the specific definition of the communication control device, please refer to the definition of the communication control method of the pulse power supply mentioned above, which will not be repeated here. Each module in the above communication control device can be implemented in whole or in part by software, hardware and a combination thereof. The above modules can be embedded in or independent of the processor in the computer device in the form of hardware, or can be stored in the memory of the computer device in the form of software, so that the processor can call and execute the operations corresponding to the above modules.

[0130] Accordingly, the embodiments of this specification also provide a pulse power supply, such as Figure 5 As shown, it includes: a controller and a pulse generator; wherein the controller includes a control module and an analog-to-digital converter, and the controller and the pulse generator are arranged in an inner cavity surrounded by an electrostatic chuck and a chuck base of a semiconductor process equipment;

[0131] The control module is configured to: acquire a noise signal induced by a target pin of the analog-to-digital converter, and obtain noise information based on the noise signal, wherein the noise information includes noise amplitude information and / or frequency information of a noise spectrum;

[0132] Acquire interrupt information of the control module, the interrupt information including triggered information of a target interrupt triggered by noise in the control module, the triggered information including the number of triggered times and / or the triggered frequency;

[0133] Based on the noise information and the interruption information, configure the communication parameters of the control module;

[0134] sending control instructions to the pulse generator based on configured communication parameters;

[0135] The pulse generator is configured to generate a pulse signal in response to a control instruction.

[0136] In some embodiments, the pulse power supply may further include a DC power supply, a power generation component and other structures. The DC power supply may be connected to the controller, and the power generation component may be connected to the pulse generator.

[0137] The control module can be a processor, a single-chip microcomputer, a programmable logic controller and other hardware, and the control module can be configured to execute the communication control method of the pulse power supply as described in any of the above embodiments. In addition to the control module and the analog-to-digital converter, the controller can also include a DMA (Direct Memory Access) controller, GPIO ports 1 to 3, a GPIO clock generator, a timer and other hardware, which is not limited in this specification and depends on the actual situation.

[0138] In an optional embodiment, the pulse generator is further configured to be in an automatic communication parameter mode. In the automatic communication parameter mode, the communication parameters of the pulse generator follow the communication parameter changes of the control module.

[0139] In an exemplary embodiment of the present specification, a semiconductor process equipment is also provided, comprising: an electrostatic chuck, a chuck base and a pulse power supply as in any of the above embodiments; wherein,

[0140] The electrostatic chuck and the chuck base form an inner cavity, and the controller and the pulse generator of the pulse power supply are arranged in the inner cavity.

[0141] Exemplary Computing Devices

[0142] Another embodiment of the present application further provides a computing device, see Figure 6 As shown, an exemplary embodiment of the present specification also provides a computing device, including: a memory and a processor, the memory stores a computer program, and when the processor executes the computer program, it executes the steps of the communication control method of the pulse power supply according to various embodiments of the present specification described in the above embodiments of the present specification.

[0143] The internal structure of the computing device can be as follows Figure 6As shown, the computing device includes a processor, a memory, a network interface and an input device connected through a system bus. Among them, the processor of the computing device is used to provide computing and control capabilities. The memory of the computing device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system and a computer program. The internal memory provides an environment for the operation of the operating system and the computer program in the non-volatile storage medium. The network interface of the computing device is used to communicate with an external terminal through a network connection. When the computer program is executed by the processor, the steps in the communication control method of the pulse power supply according to various embodiments of the present specification are described in the above embodiments of the present specification.

[0144] The processor may include a main processor and may also include a baseband chip, a modem, etc.

[0145] The memory stores a program for executing the technical solution of the present invention, and may also store an operating system and other key services. Specifically, the program may include a program code, and the program code includes computer operation instructions. More specifically, the memory may include a read-only memory (ROM), other types of static storage devices that can store static information and instructions, a random access memory (RAM), other types of dynamic storage devices that can store information and instructions, a disk storage, a flash, and the like.

[0146] The processor may be a general-purpose processor, such as a general-purpose central processing unit (CPU), a microprocessor, etc., or an application-specific integrated circuit (ASIC), or one or more integrated circuits for controlling the execution of the program of the scheme of the present invention. It may also be a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field programmable gate array (FPGA) or other programmable logic device, a discrete gate or transistor logic device, or a discrete hardware component.

[0147] The input device may include a device for receiving data and information input by a user, such as a keyboard, a mouse, a camera, a scanner, a light pen, a voice input device, a touch screen, a pedometer, or a gravity sensor.

[0148] Output devices may include means that allow information to be output to a user, such as display screens, printers, speakers, etc.

[0149] The communication interface may include using any transceiver or the like to communicate with other devices or communication networks, such as Ethernet, Radio Access Network (RAN), Wireless Local Area Network (WLAN), etc.

[0150] The processor executes the program stored in the memory and calls other devices, which can be used to implement the various steps of the communication control method of any pulse power supply provided in the above embodiments of the present application.

[0151] The computing device may also include a display component and a voice component. The display component may be a liquid crystal display or an electronic ink display. The input device of the computing device may be a touch layer covered on the display component, or a button, trackball or touchpad provided on the housing of the computing device, or an external keyboard, touchpad or mouse.

[0152] Those skilled in the art will understand that Figure 6 The structure shown in the figure is only a block diagram of a part of the structure related to the scheme of this specification, and does not constitute a limitation on the computing device to which the scheme of this specification is applied. The specific computing device may include more or fewer components than shown in the figure, or combine certain components, or have a different arrangement of components.

[0153] Exemplary computer program products and storage media

[0154] In addition to the above-mentioned methods and devices, the communication control method of the pulse power supply provided in the embodiments of this specification can also be a computer program product, which includes computer program instructions. When the computer program instructions are executed by the processor, the processor executes the steps of the communication control method of the pulse power supply according to various embodiments of this specification described in the above "Exemplary Method" section of this specification.

[0155] The computer program product may be written in any combination of one or more programming languages ​​to write program code for performing the operations of the embodiments of the present specification, including object-oriented programming languages ​​such as Java, C++, etc., and conventional procedural programming languages ​​such as "C" or similar programming languages. The program code may be executed entirely on the user computing device, partially on the user device, as a separate software package, partially on the user computing device and partially on a remote computing device, or entirely on a remote computing device or server.

[0156] In addition, an embodiment of the present specification also provides a computer-readable storage medium on which a computer program is stored, and the computer program is executed by a processor to execute the steps of the communication control method of the pulse power supply according to various embodiments of the present specification described in the above "Exemplary Method" section of the present specification.

[0157] Those skilled in the art can understand that all or part of the processes in the above-mentioned embodiments can be completed by instructing the relevant hardware through a computer program, and the computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, any reference to memory, storage, database or other media used in the embodiments provided in this specification can include non-volatile and / or volatile memory. Non-volatile memory can include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM) or flash memory. Volatile memory can include random access memory (RAM) or external cache memory. As an illustration and not limitation, RAM is available in many forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double data rate SDRAM (DDRSDRAM), enhanced SDRAM (ESDRAM), synchronous link (Synchlink) DRAM (SLDRAM), memory bus (Rambus) direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and memory bus dynamic RAM (RDRAM).

[0158] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0159] The above-mentioned embodiments only express several implementation methods of this specification, and the descriptions are relatively specific and detailed, but they cannot be understood as limiting the scope of the solutions provided by the embodiments of this specification. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of this specification, which all belong to the protection scope of this specification. Therefore, the protection scope of the patent of this specification shall be based on the attached claims.

Claims

1. A communication control method for a pulse power supply, characterized in that: A controller for a pulse power supply in a semiconductor process device, wherein the semiconductor process device comprises an electrostatic chuck and a chuck base, the pulse power supply further comprises a pulse generator, the controller comprises a control module and an analog-to-digital converter, the controller and the pulse generator are arranged in an inner cavity surrounded by the electrostatic chuck and the chuck base, and the communication control method of the pulse power supply comprises: Acquire a noise signal induced by a target pin of the analog-to-digital converter, and obtain noise information based on the noise signal; Acquire interrupt information of the control module, wherein the interrupt information includes triggered information of a target interrupt triggered by noise in the control module, wherein the triggered information includes the number of triggered times and / or the triggered frequency; Based on the noise information and the interruption information, communication parameters of the control module are configured.

2. The method according to claim 1, characterized in that The configuring the communication parameters of the control module based on the noise information and the interruption information includes: Obtaining a noise level based on the noise information and the interruption information; Based on the noise level, communication parameters of the control module are configured, wherein the communication parameters include at least one of an IO speed, a baud rate, an oversampling point, a number of retransmissions, and a timeout period.

3. The method according to claim 2, characterized in that The target pin includes a first pin and a second pin, the first pin and the second pin are both suspended pins of the analog-to-digital converter, the first pin is close to the noise generation position, and the second pin is far away from the noise generation position; The acquiring of the noise signal induced by the target pin of the analog-to-digital converter and obtaining the noise information based on the noise signal comprises: Acquire a first noise signal sensed by a first pin of the analog-to-digital converter, and obtain first noise information based on the first noise signal; A second noise signal sensed by a second pin of the analog-to-digital converter is acquired, and second noise information is obtained based on the second noise signal.

4. The method according to claim 3, characterized in that The first pin corresponds to the near interference source coefficient, and the second pin corresponds to the far radiation coefficient; The obtaining of the noise level based on the noise information and the interruption information comprises: The noise level is calculated based on the target information, the weights corresponding to the information included in the target information, the near interference source coefficient and the far radiation coefficient; The target information includes the first noise information, the second noise information, and the interruption information.

5. The method according to claim 4, characterized in that The noise level is calculated based on the target information, the weights corresponding to the information included in the target information, the near interference source coefficient and the far radiation coefficient, including: Substituting the target information, the weights corresponding to the information included in the target information, the near interference source coefficient and the far radiation coefficient into a first target formula to calculate the noise level; The first target formula includes: NOISE_LV(n)=CNT×Ki+(NV_MAX1×K1+DV_MAX1×K2)×e K5 + (NV_MAX2×K3+DV_MAX2×K4)×e K6 ; Wherein, NOISE_LV(n) represents the noise level of the current cycle, e represents a natural constant, CNT represents the interruption information, Ki represents the weight corresponding to the interruption information, NV_MAX1 represents the noise amplitude information in the first noise information, DV_MAX1 represents the frequency information of the noise spectrum in the first noise information, NV_MAX2 represents the noise amplitude information in the second noise information, DV_MAX2 represents the frequency information of the noise spectrum in the second noise information, K1, K2, K3 and K4 are the weights corresponding to NV_MAX1, DV_MAX1, NV_MAX2 and DV_MAX2 respectively, K5 represents the near interference source coefficient, and K6 represents the far radiation coefficient.

6. The method according to claim 3, characterized in that The first pin corresponds to the near interference source coefficient, and the second pin corresponds to the far radiation coefficient; The obtaining of the noise level based on the noise information and the interruption information comprises: Substituting the historical noise level, the weight corresponding to the historical noise level, the target information, the weights corresponding to the information included in the target information, the near interference source coefficient and the far radiation coefficient into the second target formula, the noise level is calculated; the historical noise level includes the noise level of the previous cycle and the noise level of the previous cycle; the target information includes the first noise information, the second noise information and the interruption information; The second target formula includes: NOISE_LV(n)=CNT×Ki+(NV_MAX1×K1+DV_MAX1×K2)×e K5 +(NV_MAX2×K3+DV_MAX2×K4)×e K6 +K10×NOISE_LV(n-1)+K11×(NOISE_LV(n-1)-NOISE_LV(n-2)); Among them, NOISE_LV(n) represents the noise level of the current cycle, e represents a natural constant, CNT represents the interruption information, Ki represents the weight corresponding to the interruption information, NV_MAX1 represents the noise amplitude information in the first noise information, DV_MAX1 represents the frequency information of the noise spectrum in the first noise information, NV_MAX2 represents the noise amplitude information in the second noise information, DV_MAX2 represents the frequency information of the noise spectrum in the second noise information, K1, K2, K3 and K4 are the weights corresponding to NV_MAX1, DV_MAX1, NV_MAX2 and DV_MAX2 respectively; NOISE_LV(n-1) represents the noise level of the previous cycle, NOISE_LV(n-2) represents the noise level of the previous cycle, K11 and K12 are the weights corresponding to NOISE_LV(n-1) and NOISE_LV(n-2) respectively, K5 represents the near interference source coefficient, and K6 represents the far radiation coefficient.

7. The method according to any one of claims 2 to 6, characterized in that: The IO speed, baud rate, oversampling point, number of retransmissions and timeout period each correspond to a configuration value that matches the level; The configuring the communication parameters of the control module based on the noise level includes: Based on the noise level and the number of levels of the configuration values ​​corresponding to each of the communication parameters, normalizing and rounding the noise level to obtain the normalized level corresponding to each of the communication parameters; Based on the normalization levels corresponding to the communication parameters, configuration values ​​corresponding to the normalization levels of the communication parameters are determined.

8. The method according to any one of claims 1 to 6, characterized in that: The target interrupt includes at least one of a noise flag interrupt, an overflow flag interrupt, and a frame error interrupt.

9. A pulse power supply, characterized in that: include: A controller and a pulse generator; wherein the controller includes a control module and an analog-to-digital converter, and the controller and the pulse generator are arranged in an inner cavity surrounded by an electrostatic chuck and a chuck base of a semiconductor process equipment; The control module is configured to: acquire a noise signal induced by a target pin of the analog-to-digital converter, and obtain noise information based on the noise signal, wherein the noise information includes noise amplitude information and / or frequency information of a noise spectrum; Acquire interrupt information of the control module, wherein the interrupt information includes triggered information of a target interrupt triggered by noise in the control module, wherein the triggered information includes the number of triggered times and / or the triggered frequency; configuring communication parameters of the control module based on the noise information and the interruption information; sending a control instruction to the pulse generator based on the configured communication parameters; The pulse generator is configured to generate a pulse signal in response to the control instruction.

10. A semiconductor process equipment, characterized in that: include: An electrostatic chuck, a chuck base and a pulse power supply as claimed in claim 7; wherein, The electrostatic chuck and the chuck base form an inner cavity, and the controller and the pulse generator of the pulse power supply are arranged in the inner cavity.

11. A computing device, characterized in that: The invention comprises a memory, a processor and a computer program stored in the memory and executable on the processor, wherein the processor implements the communication control method of the pulse power supply according to any one of claims 1 to 8 when executing the computer program.

12. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the communication control method of the pulse power supply according to any one of claims 1 to 8 is implemented.

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