Multi-zone air injection air inlet structure and multi-zone air injection system

Abstract

The invention discloses a multi-zone air injection air inlet structure and a multi-zone air injection system, the multi-zone air injection air inlet structure comprises an air inlet connecting piece and an air nozzle, and the air inlet connecting piece is connected with the air nozzle; the gas nozzle is provided with a central gas inlet path, a middle gas inlet path and an edge gas inlet path, the central gas inlet path comprises a central gas uniformizing hole and a central gas inlet hole, the middle gas inlet path comprises a middle gas uniformizing hole and a middle gas inlet hole, and the edge gas inlet path comprises an edge gas uniformizing hole and an edge gas inlet hole; and a sealing piece for independently sealing the central gas inlet path, the middle gas inlet path and the edge gas inlet path is arranged between the gas inlet connecting piece and the gas nozzle. The gas inlet structure can independently control any one of multiple paths of gas inlet, so that the gas inlet uniformity is effectively controlled, the gas inlet proportion is adjusted, the risk of arc discharge is reduced, and gas deposition and particle generation are reduced.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a process gas intake structure of semiconductor processing equipment such as a plasma processing chamber. The present invention also relates to an injection system provided with the multi-zone injection intake structure. Background Art

[0002] When etching materials on wafers and depositing materials on wafers, a plasma processing chamber is used. In actual use, a process gas nozzle is generally installed through the opening of the dielectric window at the top of the plasma processing chamber. The center hole on the upper surface of the plasma processing chamber cooperates with the gas nozzle to spray the process gas into the interior of the plasma processing chamber. Therefore, the gas intake structure of the nozzle has a great influence on ensuring the uniformity of etching and deposition.

[0003] In etching equipment, most nozzles have two air intake modes: center and edge. To ensure the uniformity of air intake in etching equipment and prevent arc discharge from causing wafer defects, most nozzles have two air intake paths: center and edge to achieve uniform air intake.

[0004] For example, some nozzles eliminate the central air inlet path as an optical access channel to allow light to enter and exit the process chamber. This type of nozzle structure has the risk of arc discharge due to the bowl-shaped gas uniformity structure in the middle.

[0005] Some other nozzles have an optical access channel in the middle where no gas flows. The edge is divided into two air intake channels: the edge center and the edge periphery. There is no air intake in the middle, and the central optical access channel does not flow gas, which is prone to deposition and cannot be cleaned, causing particle contamination.

[0006] Some nozzles are provided with two-way air inlet at the edge and an inner cavity with an optical access path. The inner cavity is provided with an access area, and the access area is configured to flow process gas and transmit an optical access signal with a desired signal-to-noise ratio. The diaphragm contained in the inner cavity divides the access area of ​​the inner cavity into at least two independent through holes, and at least two independent through holes extend parallel to the optical path pointing to the optical access window. And each of the two through holes is configured to cooperate with the other through holes to flow the process gas and transmit the desired optical access signal through the optical access window, and the structure is extremely complex.

[0007] It can be seen that in the relevant technology, the air intake structure of the nozzle is a two-way air intake, namely, center air intake and edge air intake or edge center air intake and edge periphery air intake. The performance in terms of air intake uniformity and uniform air regulation is very limited, which will have an adverse effect on the uniformity of etching and deposition. Summary of the invention

[0008] The purpose of the present invention is to provide a multi-zone air injection structure. The air intake structure can independently control any one of the multiple air intakes, thereby effectively controlling the uniformity of the air intake, adjusting the air intake ratio, reducing the risk of arc discharge, reducing gas deposition and particle generation, and thus improving the production quality of semiconductor chips.

[0009] The object of the present invention is to provide a multi-zone jet system provided with the multi-zone jet intake structure.

[0010] To achieve the above-mentioned objectives, the present invention provides a multi-zone jet air intake structure, comprising an air intake connector located at an upper portion and a gas nozzle located at a lower portion, wherein the air intake connector and the gas nozzle are interconnected; the gas nozzle is provided with a central air intake path, an intermediate air intake path and an edge air intake path, the central air intake path comprises a central air uniforming hole and a central air intake hole connected to the lower end of the central air uniforming hole, the intermediate air intake path comprises an intermediate air uniforming hole and an intermediate air intake hole connected to the lower end of the intermediate air uniforming hole, and the edge air intake path comprises an edge air uniforming hole and an edge air intake hole connected to the lower end of the edge air uniforming hole; a sealing member is provided between the air intake connector and the gas nozzle for independently sealing the central air intake path, the intermediate air intake path and the edge air intake path.

[0011] In one embodiment, the air inlet connector is provided with a central air uniforming groove, an intermediate air uniforming groove and an edge air uniforming groove, the central air uniforming groove is connected to the central air uniforming hole, the intermediate air uniforming groove is connected to the intermediate air uniforming hole, the edge air uniforming groove is connected to the edge air uniforming hole, and the central air uniforming groove, the intermediate air uniforming groove and the edge air uniforming groove are respectively provided with independent air inlets.

[0012] In one embodiment, the air intake connector is provided with a central air intake pipe, an intermediate air intake pipe and an edge air intake pipe corresponding to the gas nozzle, the diameters of the central air intake pipe, the intermediate air intake pipe and the edge air intake pipe increase from the inside to the outside and are nested with each other, the central air intake pipe is connected to the central air uniforming hole, the annular channel formed between the intermediate air intake pipe and the central air intake pipe is connected to the intermediate air uniforming hole, the annular channel formed between the intermediate air intake pipe and the edge air intake pipe is connected to the edge air uniforming hole, and the central air intake pipe, the intermediate air intake pipe and the edge air intake pipe are respectively provided with independent air inlets.

[0013] In one embodiment, the central air inlet path is provided with a central air uniformity buffer channel at the upper portion of the central air uniformity hole.

[0014] In one embodiment, the central gas homogenizing buffer channel is also used as an optical access channel, and the air inlet connector is provided with a corresponding optical access window.

[0015] In one embodiment, a shielding body is provided in the inner cavity of the central gas uniforming buffer channel, and the shielding body divides the access area of ​​the inner cavity into at least two independent through holes, and the at least two independent through holes extend parallel to the optical path pointing to the optical access window.

[0016] In one embodiment, the central air inlet hole of the central air inlet passage is vertically downward.

[0017] In one embodiment, the central air inlet passage is provided with two circles of concentric central air uniforming holes, and at least two independent central air inlet holes are respectively provided at the lower end of each circle of central air uniforming holes.

[0018] In one embodiment, the middle air inlet hole of the middle air inlet path forms a set angle α with the center line of the gas nozzle.

[0019] In one embodiment, an angle α between the middle air inlet hole of the middle air inlet path and the center line of the gas nozzle is 30°-60°.

[0020] In one embodiment, the angle α between the middle air inlet hole of the middle air inlet path and the center line of the gas nozzle is 45°.

[0021] In one embodiment, the edge air inlet holes of the edge air inlet gas path form a set angle β with the center line of the gas nozzle, and β>α.

[0022] In one embodiment, an angle β formed between the edge air inlet hole of the edge air inlet gas path and the center line of the gas nozzle is 60°-90°.

[0023] In one embodiment, the angle β between the edge air inlet hole of the edge air inlet gas path and the center line of the gas nozzle is 90°.

[0024] In one embodiment, the middle air intake passage is inclined inward from top to bottom, interlaced with the edge air intake passage, and not in the same plane.

[0025] In one embodiment, the inner end of the gas nozzle is provided with a chamfered portion, and the outer peripheral surface thereof is provided with a step portion.

[0026] In one embodiment, the central air inlet hole is located at the lower end surface of the gas nozzle, the middle air inlet hole is located at the chamfered portion of the gas nozzle, and the edge air inlet hole is located at the outer peripheral surface of the gas nozzle.

[0027] In one embodiment, the central air inlet hole and the middle air inlet hole are located at the lower end surface of the gas nozzle, and the edge air inlet hole is located at the chamfered portion of the gas nozzle.

[0028] In one embodiment, the diameter of the central air inlet hole 22 is greater than 1.5 mm, the diameter of the middle air inlet hole 24 is less than 2 mm, and the diameter of the edge air inlet hole 26 is between 1 mm and 1.5 mm.

[0029] To achieve the above-mentioned other purpose, the present invention provides a multi-zone jet injection system, including a process gas chamber and an air intake structure arranged at the center hole of the upper surface of the process gas chamber, and the air intake structure is any of the multi-zone jet injection air intake structures described above.

[0030] In one embodiment, the central intake air path is connected to the central intake air flow control unit through a first intake pipe, the intermediate intake air path is connected to the intermediate intake air flow control unit through a second intake pipe, and the edge intake air path is connected to the edge intake air flow control unit through a third intake pipe.

[0031] The multi-zone jet air intake structure provided by the present invention is mainly composed of an air intake connector and two upper and lower parts of a gas nozzle. It has three air intake paths, namely a central air intake path, an intermediate air intake path, and an edge air intake path. The three air intake paths all enter the process chamber through an air uniforming groove, and the three air intake channels are independently sealed from each other. Any of the three air intake paths can be controlled individually, and the air intake ratio is adjustable, which can effectively control the uniformity of the air intake, reduce the risk of arc discharge, and reduce the generation of gas deposition and particles. The structure is simple and easy to maintain.

[0032] The multi-zone jet system provided by the present invention is provided with the multi-zone jet intake structure. Since the multi-zone jet intake structure has the above-mentioned technical effects, the multi-zone jet system provided with the multi-zone jet intake structure should also have corresponding technical effects. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 A schematic structural diagram of a first multi-zone jet intake structure provided by an embodiment of the present invention;

[0034] Figure 2 A schematic structural diagram of a second multi-zone jet intake structure provided by an embodiment of the present invention;

[0035] Figure 3 for Figure 2 A schematic cross-sectional view of the shielding body shown in ;

[0036] Figure 4 A schematic structural diagram of a third multi-zone jet intake structure provided by an embodiment of the present invention;

[0037] Figure 5 for Figure 1 A schematic diagram showing a structure in which the gas nozzle is installed in the center hole on the upper surface of the process gas chamber;

[0038] Figure 6A schematic structural diagram of a multi-zone jet injection system provided in an embodiment of the present invention.

[0039] In the figure:

[0040] 10. Air inlet connector 11. Central uniform air groove 111. First air inlet 13. Intermediate uniform air groove 131. Second air inlet 15. Edge uniform air groove 151. Third air inlet 20. Gas nozzle 21. Central uniform air hole 22. Central air inlet hole 23. Intermediate uniform air hole 24. Intermediate air inlet hole 25. Edge uniform air hole 26. Edge air inlet hole 27. Central uniform air buffer channel 271. Shield 28. Intermediate uniform air buffer channel 31. First sealing ring 32. Second sealing ring 33. Third sealing ring 40. Optical access window 51. Central air inlet pipe 52. Intermediate air inlet pipe 53. Edge air inlet pipe 61. Upper positioning member 62. Lower positioning member 70. Process chamber 71. Medium window 81. First air inlet pipe 82. Second air inlet pipe 83. Third air inlet pipe 91. Central air inlet flow control unit 92. Intermediate air inlet flow control unit 93. Edge air inlet flow control unit 100. Gas source DETAILED DESCRIPTION

[0041] In order to enable those skilled in the art to better understand the solution of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0042] In this article, the terms "upper, lower, inside, outside" and the like are established based on the positional relationships shown in the drawings. The corresponding positional relationships may also change depending on the drawings, and therefore cannot be understood as absolute limitations on the scope of protection; moreover, relational terms such as "first" and "second" and the like are merely used to distinguish one component from another with the same name, and do not necessarily require or imply any actual relationship or order between these components.

[0043] On etching equipment, when executing related processes, it is necessary to spray process gas onto the wafer. The applicant found in the research that in this process, the edge and center etching rates are generally different, so it is necessary to spray gas to different areas such as the center and edge of the wafer respectively. After the process is executed, the chamber needs to be plasma cleaned, and it is necessary to spray gas in multiple directions such as the side and downward. Although the traditional air inlet nozzle is set with center and edge jets, the position of the jet nozzle is fixed and cannot be controlled in different areas. It is impossible to control the downward or side jets separately, and it is impossible to control the airflow sprayed to the edge and center of the wafer separately, resulting in different uniformity performances when the etching equipment adopts different processes, and it is difficult to achieve greater improvements in uniformity.

[0044] Please refer to Figure 1 , Figure 1A schematic structural diagram of a first multi-zone jet intake structure provided in an embodiment of the present invention.

[0045] As shown in the figure, in a specific embodiment, the multi-zone jet air intake structure provided by the present invention is mainly composed of an air intake connector 10 and a gas nozzle 20, the air intake connector 10 is located at the upper part, and the gas nozzle 20 is located at the lower part. The two are interconnected and sealed, and its air intake path is three-way, namely, a central air intake path, an intermediate air intake path, and an edge air intake path.

[0046] The central air inlet route on the gas nozzle 20 is composed of a central uniform air hole 21 and a central air inlet hole 22, and the central air inlet hole 22 is connected to the lower end of the central uniform air hole 21. In order to obtain a better uniform air effect, the central uniform air hole 21 and the central air inlet hole 22 are distributed in a ring shape, and there are multiple numbers and they are independent of each other; similarly, the middle air inlet route is composed of middle uniform air holes 23 and middle air inlet holes 24, and the middle air inlet hole 24 is connected to the lower end of the middle uniform air hole 23. In order to obtain a better uniform air effect, the middle uniform air holes 23 and the middle air inlet holes 24 are distributed in a ring shape, and there are multiple numbers and they are independent of each other; the edge air inlet route is composed of edge uniform air holes 25 and edge air inlet holes 26, and the edge uniform air holes 25 and the edge air inlet holes 26 are also distributed in a ring shape, and there are multiple numbers and they are independent of each other.

[0047] In this embodiment, the diameter of the central air inlet hole 22 is greater than 1.5 mm, the diameter of the middle air inlet hole 24 is less than 2 mm, and the diameter of the edge air inlet hole 26 is between 1 mm and 1.5 mm.

[0048] The outer circumferential surface of the gas nozzle 20 is provided with a step to facilitate positioning during installation. The inner end of the gas nozzle 20 is also provided with a chamfered portion. The central air inlet hole 22 is located at the lower end surface of the gas nozzle 20 and extends vertically downward. The middle air inlet hole 24 is located at the chamfered portion of the gas nozzle 20 and extends obliquely downward. The edge air inlet hole 26 is located at the outer circumferential surface of the gas nozzle 20 and extends in a radial direction.

[0049] In this embodiment, in order to further improve the air uniformity effect, the central air intake path is provided with two circles of concentric central air uniformity holes 21, and the lower end of each circle of central air uniformity holes 21 is provided with two circles of independent central air intake holes 22. Moreover, the central air intake path is provided with a central air uniformity buffer channel 27 at the upper part of the central air uniformity holes 21 to increase the air uniformity effect.

[0050] The air intake connector 10 is provided with a central air equalizing groove 11, an intermediate air equalizing groove 13 and an edge air equalizing groove 15. The central air equalizing groove 11 is connected to the central air equalizing hole 21, the intermediate air equalizing groove 13 is connected to the intermediate air equalizing hole 23, and the edge air equalizing groove 15 is connected to the edge air equalizing hole 25. The central air equalizing groove 11 is provided with an independent first air inlet 111, the intermediate air equalizing groove 13 is provided with an independent second air inlet 131, and the edge air equalizing groove 15 is provided with an independent third air inlet 151. The three air paths can realize independent air intake.

[0051] A seal is provided between the air inlet connector 10 and the gas nozzle 20 for independently sealing the central air inlet passage, the middle air inlet passage and the edge air inlet passage.

[0052] Specifically, between the mating surfaces of the air intake connector 10 and the gas nozzle 20, a first sealing ring 31 is provided between the central air intake path and the middle air intake path, a second sealing ring 32 is provided between the middle air intake path and the edge air intake path, and a third sealing ring 33 is provided on the outer side of the edge air intake path. By providing three sealing rings, the central air intake path, the middle air intake path and the edge air intake path are sealed independently of each other.

[0053] The middle air inlet hole 24 of the middle air inlet path forms a set angle α with the center line of the gas nozzle 20. Depending on the equipment and process requirements, this angle α can be controlled at 30°-60°. In this embodiment, the value of angle α is 45°.

[0054] The edge air inlet hole 26 of the edge air inlet path forms a set angle β with the center line of the gas nozzle 20, and β>α. Depending on the equipment and process requirements, this angle β can be controlled at 60°-90°. In the present embodiment, the angle β is 90°, that is, perpendicular to the center line of the gas nozzle 20 and extending in the radial direction.

[0055] Please refer to Figure 2 , Figure 2 A schematic structural diagram of a second multi-zone jet intake structure provided in an embodiment of the present invention.

[0056] Compared with the first embodiment, the present embodiment is different in that:

[0057] The hole channel of the middle air-uniform hole 23 of the middle air inlet path is inclined inward from top to bottom, interlaced with the hole channels of the edge air-uniform holes 25, and not in the same plane. The figure shows two possible directions of the middle air inlet hole 24.

[0058] In this way, the volume of the gas nozzle can be effectively reduced, and its diameter can be designed to be smaller. Moreover, on the basis of providing a limiting step, a second step can be designed at the lower end to further reduce the diameter of the lower end and avoid the gas nozzle 20 occupying too much space. At the same time, the stepped shape helps to improve the convenience of installation.

[0059] Moreover, the central gas-uniform buffer channel 27 is also used as an optical access channel, that is, the central gas-uniform buffer channel realizes two functions at the same time, one function is to input process gas, and the other function is to serve as an optical access channel. In this way, the central gas-uniform hole 21 and the central gas inlet hole 22 can be omitted, and the central gas-uniform buffer channel 27 is always through downward, and the central gas inlet directly enters the process gas chamber from the central gas-uniform buffer channel 27, and the gas inlet connector 10 is equipped with a corresponding optical access window 40 to allow light to enter and exit the process chamber.

[0060] like Figure 3 As shown, a shielding body 271 is provided in the inner cavity of the central uniform air buffer channel 27. The cross-section of the shielding body 271 is generally cross-shaped and can be made of ceramic. The access area of ​​the inner cavity is divided into four independent through holes through the cross-shaped structure. The four independent through holes extend parallel to the optical path pointing to the optical access window 40.

[0061] In addition, compared with the first embodiment, the central air inlet 22 and the middle air inlet 24 are located at the lower end surface of the gas nozzle 20, and the edge air inlet 26 is located at the chamfered portion of the gas nozzle 20, and the positions of the three have changed. Of course, depending on the equipment and process requirements, the positions of the three can also be the same as in the first embodiment.

[0062] In this embodiment, the same parts as those in the first embodiment are given the same figure marks, and the same text descriptions are omitted.

[0063] Please refer to Figure 4 , Figure 4 This is a schematic structural diagram of a third multi-zone jet intake structure provided in an embodiment of the present invention.

[0064] Compared with the first embodiment, the present embodiment is different in that the structure of the air intake connector is changed.

[0065] The air intake connector 10 is mainly composed of a central air intake pipe 51, an intermediate air intake pipe 52 and an edge air intake pipe 53 corresponding to the gas nozzle 20. The diameters of the central air intake pipe 51, the intermediate air intake pipe 52 and the edge air intake pipe 53 increase from the inside to the outside and are nested with each other, wherein the central air intake pipe 51 is connected to the central air uniform hole 21, the annular channel formed between the intermediate air intake pipe 52 and the central air intake pipe 51 is connected to the intermediate air uniform hole 23, the annular channel formed between the intermediate air intake pipe 52 and the edge air intake pipe 53 is connected to the edge air uniform hole 25, the upper ends of the central air intake pipe 51, the intermediate air intake pipe 52 and the edge air intake pipe 53 are all closed, and independent air inlets are respectively provided on the sides of the upper ends, the upper end of the central air intake pipe 51 passes through the upper ends of the intermediate air intake pipe 52 and the edge air intake pipe 53 in turn and extends upward, and the upper end of the intermediate air intake pipe 52 passes through the upper end of the edge air intake pipe 53 and extends upward.

[0066] A first sealing ring 31 is provided between the lower end of the central air inlet pipe 51 and the central air-uniform buffer channel 27, a second sealing ring 32 is provided between the lower end of the intermediate air inlet pipe 52 and the intermediate air-uniform buffer channel 28, the gas nozzle 20 is fixed by an upper positioning member 61 and a lower positioning member 62 that are interlocked, an air-uniform space is formed between the inner top surface of the upper positioning member 61 and the upper end surface of the gas nozzle 20, an annular channel formed between the intermediate air inlet pipe 52 and the edge air inlet pipe 53 is connected to the air-uniform space through the air guide hole located at the top of the upper positioning member 61, and a third sealing ring 33 is provided between the gas nozzle 20 and the upper positioning member 61. By providing three sealing rings, the central air inlet path, the intermediate air inlet path and the edge air inlet path are sealed independently of each other.

[0067] In this embodiment, the same parts as those in the first embodiment are given the same figure marks, and the same text descriptions are omitted.

[0068] Please refer to Figure 5 , Figure 5 for Figure 1 The gas nozzle shown is installed in the central hole of the upper surface of the process gas chamber.

[0069] When in use, a sealed dielectric window 71 is provided on the top of the process chamber 70, and the gas nozzle 20 is installed in the annular groove at the center of the dielectric window 71 and sealed with a sealing ring. The central hole on the upper surface of the process chamber 70 cooperates with the three-way gas inlet gas nozzle 20 to transport the process gas to the plasma center processing chamber in three directions for etching or deposition.

[0070] As shown by the arrows in the figure, through the above-mentioned air intake structure, when executing the relevant process, the etching rate sprayed to the center and edge areas of the wafer can be controlled by controlling the air intake flow in the direction of the central air intake path and the middle air intake path, thereby adjusting the uniformity and other issues. In the plasma cleaning chamber mode, by adjusting the air intake flow in the direction of the edge air intake path, the deposits generated on the dielectric window 71, the upper cover, etc. after different processes can be properly cleaned, and by adjusting the air intake flow in the direction of the central air intake path and the middle air intake path, the deposits generated on the lower electrode, side wall, etc. of the chamber can be cleaned.

[0071] The three air inlets all enter the process chamber through the gas uniformity groove, and the three air inlet channels are independently sealed. Any of the three air inlets can be controlled separately, and the air inlet ratio is adjustable, which can effectively control the uniformity of the air intake, reduce the risk of arc discharge, and reduce the generation of gas deposition and particles. It has a simple structure and is easy to maintain.

[0072] The above embodiments are only preferred solutions of the present invention and are not limited thereto. On this basis, targeted adjustments can be made according to actual needs to obtain different implementation methods. For example, the angles of the middle air inlet and the edge air inlet can be adaptively adjusted, etc. Since there are many possible implementation methods, they will not be described one by one here.

[0073] Please refer to Figure 6 , Figure 6 A schematic structural diagram of a multi-zone jet injection system provided in an embodiment of the present invention.

[0074] In addition to the above-mentioned multi-zone jet intake structure, the present invention provides a multi-zone jet intake system, which is mainly composed of a process gas chamber 70 and an intake structure arranged in the center hole of the upper surface of the process gas chamber 70, wherein the intake structure is the multi-zone jet intake structure described above.

[0075] The central air intake path is connected to the central air intake flow control unit 91 through the first air intake pipe 81, the intermediate air intake path is connected to the intermediate air intake flow control unit 92 through the second air intake pipe 82, and the edge air intake path is connected to the edge air intake flow control unit 93 through the third air intake pipe 83. The central air intake flow control unit 91, the intermediate air intake flow control unit 92 and the edge air intake flow control unit 93 are respectively connected to the gas source 100. When working, the gas source 100 can be connected to different injection hole groups of the gas nozzle 20 respectively, so as to realize injection in different directions of different hole groups, and realize the injection on and off and flow adjustment of different injection hole groups.

[0076] Of course, the central intake flow control unit 91, the intermediate intake flow control unit 92 and the edge intake flow control unit 93 can also be integrated into a general control unit, and this general control unit can control three intakes at the same time.

[0077] Regarding the rest of the structure of the multi-zone jet system, please refer to the prior art and will not be described in detail in this article.

[0078] The above is a detailed introduction to the multi-zone jet intake structure and multi-zone jet system provided by the present invention. Specific examples are used herein to illustrate the principles and implementation methods of the present invention, and the description of the above embodiments is only used to help understand the core idea of ​​the present invention. It should be pointed out that for ordinary technicians in this technical field, without departing from the principle of the present invention, the present invention can also be improved and modified in a number of ways, and these improvements and modifications also fall within the scope of protection of the claims of the present invention.

Claims

1. A multi-zone jet intake structure, characterized in that: The invention comprises an air intake connector (10) and a gas nozzle (20), wherein the air intake connector (10) and the gas nozzle (20) are interconnected; the gas nozzle (20) is provided with a central air intake path, an intermediate air intake path and an edge air intake path; the central air intake path comprises a central air uniforming hole (21) and a central air intake hole (22) connected to the lower end of the central air uniforming hole; the intermediate air intake path comprises an intermediate air uniforming hole (23) and an intermediate air intake hole (24) connected to the lower end of the intermediate air uniforming hole; the edge air intake path comprises an edge air uniforming hole (25) and an edge air intake hole (26) connected to the lower end of the edge air uniforming hole; a sealing member is provided between the air intake connector (10) and the gas nozzle (20) for independently sealing the central air intake path, the intermediate air intake path and the edge air intake path.

2. The multi-zone jet intake structure according to claim 1, characterized in that: The air inlet connector (10) is provided with a central air-homogenizing groove (11), an intermediate air-homogenizing groove (13) and an edge air-homogenizing groove (15); the central air-homogenizing groove (11) corresponds to the central air-homogenizing hole (21); the intermediate air-homogenizing groove (13) corresponds to the intermediate air-homogenizing hole (23); the edge air-homogenizing groove (15) corresponds to the edge air-homogenizing hole (25); and the central air-homogenizing groove (11), the intermediate air-homogenizing groove (13) and the edge air-homogenizing groove (15) are respectively provided with independent air inlets.

3. The multi-zone jet intake structure according to claim 1, characterized in that: The air intake connector (10) is provided with a central air intake pipe (51), an intermediate air intake pipe (52) and an edge air intake pipe (53) corresponding to the gas nozzle (20); the diameters of the central air intake pipe (51), the intermediate air intake pipe (52) and the edge air intake pipe (53) increase from the inside to the outside and are nested with each other; the central air intake pipe (51) is connected to the central air uniform hole (21); the annular channel formed between the intermediate air intake pipe (52) and the central air intake pipe (51) is connected to the intermediate air uniform hole (21); the annular channel formed between the intermediate air intake pipe (52) and the edge air intake pipe (53) is connected to the edge air uniform hole (25); the central air intake pipe (51), the intermediate air intake pipe (52) and the edge air intake pipe (53) are respectively provided with independent air intake ports.

4. The multi-zone jet intake structure according to claim 1, characterized in that: The central air inlet path is provided with a central air uniformity buffer channel (27) at the upper part of the central air uniformity hole (21).

5. The multi-zone jet intake structure according to claim 4, characterized in that: The central gas-uniform buffer channel (27) is also used as an optical access channel, and the air inlet connector (11) is provided with a corresponding optical access window (40).

6. The multi-zone jet intake structure according to claim 5, characterized in that: A shielding body (271) is provided in the inner cavity of the central uniform air buffer channel (27), and the shielding body (271) divides the access area of ​​the inner cavity into at least two independent through holes, and the at least two independent through holes extend parallel to the optical path pointing to the optical access window (40).

7. The multi-zone jet intake structure according to claim 1, characterized in that: The central air inlet hole (22) of the central air inlet passage is vertically downward.

8. The multi-zone jet intake structure according to claim 7, characterized in that: The central air inlet path is provided with two circles of concentric central air-uniform holes (21), and at least two independent central air inlet holes (22) are respectively provided at the lower end of each circle of central air-uniform holes (21).

9. The multi-zone jet intake structure according to claim 1, characterized in that: The middle air inlet hole (24) of the middle air inlet path forms a set angle α with the center line of the gas nozzle (20).

10. The multi-zone jet intake structure according to claim 9, characterized in that: The angle α between the middle air inlet hole (24) of the middle air inlet path and the center line of the gas nozzle (20) is 30°-60°.

11. The multi-zone air injection intake structure according to claim 10, characterized in that: The angle α between the middle air inlet hole (24) of the middle air inlet passage and the center line of the gas nozzle (20) is 45°.

12. The multi-zone jet intake structure according to claim 9, characterized in that: The edge air inlet hole (26) of the edge air inlet gas path forms a set angle β with the center line of the gas nozzle (20), and β>α.

13. The multi-zone jet air intake structure according to claim 12, characterized in that: The angle β formed between the edge air inlet hole (26) of the edge air inlet path and the center line of the gas nozzle (20) is 60°-90°.

14. The multi-zone jet intake structure according to claim 13, characterized in that: The angle β formed between the edge air inlet hole (26) of the edge air inlet path and the center line of the gas nozzle (20) is 90°.

15. The multi-zone jet intake structure according to claim 1, characterized in that: The middle air intake path is inclined inward from top to bottom, and is interlaced with the edge air intake path, and is not in the same plane.

16. The multi-zone jet intake structure according to claim 1, characterized in that: The inner end of the gas nozzle (20) is provided with a chamfered portion, and the outer peripheral surface thereof is provided with a stepped portion.

17. The multi-zone air injection intake structure according to claim 1, characterized in that: The central air inlet hole (22) is located at the lower end surface of the gas nozzle (20), the middle air inlet hole (24) is located at the chamfered portion of the gas nozzle (20), and the edge air inlet hole (26) is located at the outer peripheral surface of the gas nozzle (20).

18. The multi-zone jet intake structure according to claim 1, characterized in that: The central air inlet hole (22) and the middle air inlet hole (24) are located on the lower end surface of the gas nozzle (20), and the edge air inlet hole (26) is located on the chamfered portion of the gas nozzle (20).

19. The multi-zone air injection intake structure according to any one of claims 1 to 18, characterized in that: The aperture of the central air inlet hole (22) is greater than 1.5 mm, the aperture of the middle air inlet hole (24) is less than 2 mm, and the aperture of the edge air inlet hole (26) is between 1 mm and 1.5 mm.

20. A multi-zone gas injection system, comprising a process gas chamber and an air intake structure provided at a central hole on an upper surface of the process gas chamber, characterized in that: The air intake structure is a multi-zone jet air intake structure as claimed in any one of claims 1 to 19.

21. The multi-zone injection system according to claim 20, characterized in that: The central air intake path is connected to a central air intake flow control unit (91) via a first air intake pipe (81), the intermediate air intake path is connected to an intermediate air intake flow control unit (92) via a second air intake pipe (82), and the edge air intake path is connected to an edge air intake flow control unit (93) via a third air intake pipe (83).

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