Preparation method of aluminum evaporation material

Abstract

The invention provides a preparation method of an aluminum evaporation material, and the preparation method comprises the following steps: providing an aluminum blank which is provided with at least two surfaces to be treated; carrying out first machining and second machining on any to-be-treated surface in sequence to form a cutting surface, and carrying out shielding treatment on the cutting surface; sequentially carrying out first machining and second machining on the rest to-be-treated surfaces until all the to-be-treated surfaces form cutting surfaces, so as to obtain the aluminum evaporation material; a thread opening blade is adopted in the first machining, and a finish turning tool is adopted in the second machining. The problem that the surface of the low-hardness raw material is damaged in the lathe machining process is solved, and the use requirement of the aluminum evaporation material is met.

Description

Technical Field

[0001] The invention belongs to the technical field of mechanical processing and relates to a method for preparing aluminum evaporation material. Background Art

[0002] The evaporation material used in semiconductor integrated circuits is an indispensable raw material for wafers. In recent years, with the rapid development of the integrated circuit industry, the demand for aluminum evaporation materials has increased, and the purity requirements for evaporation materials have also increased. When surface treatment is performed on high-purity (purity>4N) aluminum raw materials, lathes are often used for processing. However, due to the low hardness of pure aluminum and the small size of the evaporation material, it is not easy to fix. If it is not clamped properly, it is easy to produce clamp marks on the surface of the raw material, and it may also cause the product to fall off during processing.

[0003] The traditional lathe aluminum ingot processing method can reduce the fixture replacement time and shorten the processing cycle, but this process can only be used for aluminum sheets with a certain thickness, and is not suitable for smaller aluminum workpieces. It has certain disadvantages and a limited scope of use. In addition, for aluminum raw materials with lower hardness, scratches or clamp marks are easily generated during the processing, and the product quality cannot be guaranteed.

[0004] Therefore, how to avoid damage to the surface of low-hardness raw materials during lathe processing is very important for improving product quality and meeting the use requirements of evaporative materials. Summary of the invention

[0005] In view of the shortcomings of the prior art, the purpose of the present invention is to provide a method for preparing aluminum evaporation material. Based on tool selection and adjustment of processing parameters, the problem of scratching of aluminum evaporation material with lower hardness during the preparation process is solved, pinch marks or knife marks are prevented from appearing on the surface of the evaporation material, and the product yield is improved.

[0006] To achieve this object, the present invention adopts the following technical solutions:

[0007] The present invention provides a method for preparing an aluminum evaporation material, the preparation method comprising:

[0008] Providing an aluminum blank having at least two surfaces to be processed;

[0009] Performing a first machining process and a second machining process in sequence on any surface to be processed to form a cutting surface, and performing a masking process on the cutting surface;

[0010] Then, the first machining and the second machining are sequentially performed on the remaining surfaces to be processed until all the surfaces to be processed form cutting surfaces, thereby obtaining aluminum evaporation materials;

[0011] The first machining process uses a thread cutting blade, and the second machining process uses a finishing tool.

[0012] The present invention adopts two kinds of cutting tools to machine one side surface of the aluminum billet in sequence, and then shields the machined side surface, thereby avoiding damage to the surface of the aluminum billet during subsequent machining. The surface of the prepared aluminum evaporation material is smooth and scratch-free, and the product yield is greatly improved.

[0013] It should be noted that the present invention does not specifically limit the shape of the aluminum billet, which may be in the shape of a sheet, a column, a block, a regular polyhedron or an irregular polyhedron, etc. The number of the surfaces to be processed of the corresponding aluminum billet may be two, three, four, five, six, etc., but is not limited to the listed values. The present invention forms a first cutting surface after completing the first machining and the second machining of the first surface to be processed, and performs a masking treatment on it; then performs the first machining and the second machining on the second surface to be processed to form a second cutting surface, and performs a masking treatment on it; then processes the third surface to be processed, thereby completing the processing of all surfaces to be processed, and obtaining aluminum evaporation material.

[0014] As a preferred technical solution of the present invention, the purity of the aluminum billet is ≥99.99%.

[0015] Preferably, the Vickers hardness of the aluminum billet is 35-50HV, for example, it may be 35HV, 36HV, 38HV, 40HV, 43HV, 45HV, 46HV, 48HV or 50HV, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0016] Preferably, the aluminum blank is in a block structure.

[0017] As a preferred technical solution of the present invention, in the first machining, the rotation speed of the wire cutting blade is 500-700rpm, for example, it can be 500rpm, 520rpm, 540rpm, 550rpm, 560rpm, 600rpm, 630rpm, 650rpm, 660rpm, 680rpm or 700rpm, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0018] Preferably, the feed rate of the wire cutting blade is 0.1-0.2 mm / min, for example, it can be 0.1 mm / min, 0.11 mm / min, 0.12 mm / min, 0.13 mm / min, 0.14 mm / min, 0.15 mm / min, 0.16 mm / min, 0.17 mm / min, 0.18 mm / min, 0.19 mm / min or 0.2 mm / min, but it is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0019] Preferably, the cutting depth of the wire cutting blade is 0.2-0.5 mm / blade, for example, it can be 0.2 mm / blade, 0.22 mm / blade, 0.24 mm / blade, 0.25 mm / blade, 0.28 mm / blade, 0.3 mm / blade, 0.32 mm / blade, 0.35 mm / blade, 0.36 mm / blade, 0.38 mm / blade, 0.4 mm / blade, 0.42 mm / blade, 0.45 mm / blade, 0.46 mm / blade, 0.48 mm / blade or 0.5 mm / blade, but it is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0020] Preferably, the wire cutting blade is made of any one of tungsten carbide-based cemented carbide, titanium carbide-based cemented carbide or diamond, or a combination of at least two of them.

[0021] As a preferred technical solution of the present invention, in the second machining, the rotation speed of the finishing tool is 600-800rpm, for example, it can be 600rpm, 620rpm, 640rpm, 650rpm, 680rpm, 700rpm, 720rpm, 740rpm, 750rpm, 780rpm or 800rpm, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0022] Preferably, the feed rate of the finishing tool is 0.05-0.07 mm / min, for example, it can be 0.05 mm / min, 0.052 mm / min, 0.053 mm / min, 0.054 mm / min, 0.055 mm / min, 0.056 mm / min, 0.058 mm / min, 0.06 mm / min, 0.062 mm / min, 0.063 mm / min, 0.064 mm / min, 0.065 mm / min, 0.066 mm / min, 0.068 mm / min or 0.07 mm / min, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0023] Preferably, the cutting depth of the finishing tool is 0.02-0.1 mm / tool, for example, it can be 0.02 mm / tool, 0.025 mm / tool, 0.03 mm / tool, 0.035 mm / tool, 0.04 mm / tool, 0.045 mm / tool, 0.05 mm / tool, 0.055 mm / tool, 0.06 mm / tool, 0.065 mm / tool, 0.07 mm / tool, 0.075 mm / tool, 0.08 mm / tool, 0.085 mm / tool, 0.09 mm / tool, 0.095 mm / tool ​​or 0.1 mm / tool, but it is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0024] Preferably, the material of the finishing tool is any one of tungsten carbide-based cemented carbide, titanium carbide-based cemented carbide or diamond, or a combination of at least two of them.

[0025] As a preferred technical solution of the present invention, the masking process includes: wrapping the cutting surface with a protective tape.

[0026] After the processing of one side surface is completed, the present invention shields and protects the side surface to prevent scratches, thereby ensuring that the outer surface of the aluminum blank is smooth and flat.

[0027] As a preferred technical solution of the present invention, the width of the protective tape is ≤25 mm.

[0028] Preferably, the thickness of the protective tape is 0.05-0.5 mm, for example, it can be 0.05 mm, 0.1 mm, 0.15 mm, 0.2 mm, 0.25 mm, 0.3 mm, 0.35 mm, 0.4 mm, 0.45 mm or 0.5 mm, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0029] Preferably, the protective tape is Teflon tape.

[0030] The protective tape used in the present invention is resistant to high temperatures, not easy to break, and has appropriate viscosity, thereby avoiding damage to the outer surface of the aluminum blank.

[0031] As a preferred technical solution of the present invention, the preparation method further comprises: after the second machining is completed, removing the protective tape on the cutting surface and cleaning the aluminum evaporation material.

[0032] Preferably, the cleaning process is ultrasonic cleaning.

[0033] Preferably, the temperature of the cleaning treatment is 20-35°C, for example, it can be 20°C, 23°C, 24°C, 25°C, 26°C, 28°C, 30°C, 32°C, 33°C, 34°C or 35°C, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0034] Preferably, the cleaning treatment time is 10 to 20 minutes, for example, it can be 10 minutes, 11 minutes, 12 minutes, 13 minutes, 14 minutes, 15 minutes, 16 minutes, 17 minutes, 18 minutes, 19 minutes or 20 minutes, but it is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0035] As a preferred technical solution of the present invention, the preparation method further includes: clamping and fixing the aluminum billet on a lathe with a clamp, and then performing the first machining and the second machining in sequence.

[0036] Preferably, the clamp is an aluminum clamp.

[0037] The present invention selects a clamp according to the size of the aluminum billet, not only to avoid clamp marks on the surface of the aluminum billet due to excessive fixing force, but also to prevent the problem of falling off during processing due to insufficient fixing force, thereby affecting the machining effect.

[0038] As a preferred technical solution of the present invention, the second machining uses a turning fluid.

[0039] Preferably, the volume concentration of the cutting fluid is 5-10%, for example, it can be 5%, 5.5%, 6%, 6.5%, 7%, 7.5%, 8%, 8.5%, 9%, 9.5% or 10%, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0040] The turning fluid of the present invention has strong lubricity and cooling properties, reduces the friction between the fine turning tool and the aluminum billet, and cools the heat generated by the friction, thereby effectively improving the processing efficiency. The present invention does not specifically limit the type of turning fluid, and any turning fluid known to those skilled in the art can be used, and illustratively, it can be an aqueous solution of an emulsion.

[0041] As a preferred technical solution of the present invention, the roughness Ra of the outer surface of the aluminum evaporation material is 0.1 to 0.5 μm, for example, it can be 0.1 μm, 0.15 μm, 0.2 μm, 0.25 μm, 0.3 μm, 0.35 μm, 0.4 μm, 0.45 μm or 0.5 μm, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0042] The numerical range described in the present invention not only includes the point values ​​listed above, but also includes any point values ​​between the above numerical ranges that are not listed. Due to space limitations and for the sake of simplicity, the present invention no longer exhaustively lists the specific point values ​​included in the range.

[0043] Compared with the prior art, the present invention has the following beneficial effects:

[0044] The invention provides a method for preparing an aluminum evaporation material. The method improves the processing success rate of the aluminum evaporation material by controlling the lathe processing parameters. The cutting surface of the blank is shielded and protected during the processing, thereby solving the problem of product scratches. The surface of the aluminum evaporation material is smooth and complete, and has a wide range of applications. The quality of the product surface is improved while ensuring the processing efficiency. DETAILED DESCRIPTION

[0045] It should be understood that, in the description of the present invention, the terms "first", "second", etc. are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "plurality" means two or more.

[0046] The technical solution of the present invention is further illustrated below through specific implementation methods.

[0047] The present invention provides a method for preparing an aluminum evaporation material, the preparation method comprising:

[0048] (1) providing an aluminum billet, wherein the aluminum billet has a purity of ≥99.99% and a Vickers hardness of 35 to 50 HV, and the aluminum billet has at least two surfaces to be processed, selecting an aluminum fixture that matches the size of the aluminum billet, and clamping and fixing the aluminum billet on a lathe using the aluminum fixture;

[0049] (2) using a wire cutting blade to perform a first machining process on any surface to be processed of the aluminum billet, the speed of the wire cutting blade is 500-700 rpm, the feed rate is 0.1-0.2 mm / min, the cutting depth is 0.2-0.5 mm / blade, and the material of the wire cutting blade used is any one of tungsten carbide-based cemented carbide, titanium carbide-based cemented carbide or diamond, or a combination of at least two of them;

[0050] (3) performing a second machining on the surface to be processed in step (2) by using a finishing tool to form a cutting surface, wherein the rotation speed of the finishing tool is 600 to 800 rpm, the feed rate is 0.05 to 0.07 mm / min, the cutting depth is 0.02 to 0.1 mm / tool, and the material of the finishing tool is any one of tungsten carbide-based cemented carbide, titanium carbide-based cemented carbide or diamond, or a combination of at least two of them;

[0051] (4) removing the processed aluminum billet, and covering the cut surface with a protective tape for masking. The protective tape used is a Teflon tape, and the width of the protective tape is ≤25 mm and the thickness is 0.05 to 0.5 mm;

[0052] (5) then turning over the aluminum billet, clamping the aluminum billet on the lathe again with an aluminum fixture, repeating steps (2) and (3), and sequentially performing the first machining and the second machining on the remaining surfaces to be processed of the aluminum billet until all the surfaces to be processed form cutting surfaces;

[0053] (6) The protective tape on the surface is removed to obtain an aluminum evaporation material, and the roughness Ra of the outer surface of the aluminum evaporation material is 0.1 to 0.5 μm.

[0054] In some embodiments, the preparation method further comprises: removing the protective tape on the cutting surface and cleaning the aluminum evaporation material. Specifically, the cleaning process is ultrasonic cleaning at a temperature of 20 to 35° C. for 10 to 20 minutes.

[0055] In some embodiments, the second machining process uses a turning fluid, and the volume concentration of the turning fluid is 5-10%.

[0056] Example 1

[0057] This embodiment provides a method for preparing an aluminum evaporation material, which specifically comprises the following steps:

[0058] (1) providing an aluminum billet having a purity of 99.996% and a Vickers hardness of 45 HV, and having a tetrahedral block structure and four surfaces to be processed, selecting an aluminum fixture that matches the size of the aluminum billet, and clamping and fixing the aluminum billet on a lathe using the aluminum fixture;

[0059] (2) using a wire cutting blade to perform a first machining process on any surface to be processed of the aluminum billet, the speed of the wire cutting blade is 600 rpm, the feed rate is 0.15 mm / min, the cutting depth is 0.4 mm / blade, and the material of the wire cutting blade is diamond;

[0060] (3) performing a second machining on the surface to be processed in step (2) using a finishing tool to form a cutting surface, the speed of the finishing tool being 700 rpm, the feed rate being 0.06 mm / min, the cutting depth being 0.05 mm / tool, the material of the finishing tool being diamond, and a turning fluid having a volume concentration of 8% being used in the second machining process;

[0061] (4) Remove the processed aluminum billet and cover the cut surface with Teflon tape, where the width of the Teflon tape used is 22 mm and the thickness is 0.3 mm;

[0062] (5) then turning over the aluminum billet, clamping the aluminum billet on the lathe again with an aluminum fixture, repeating steps (2) and (3), and sequentially performing the first machining and the second machining on the remaining surfaces to be processed of the aluminum billet until all four surfaces to be processed form cutting surfaces;

[0063] (6) The protective tape on the surface is removed to obtain an aluminum evaporation material, and the aluminum evaporation material is ultrasonically cleaned at a temperature of 30° C. for 15 min.

[0064] Example 2

[0065] This embodiment provides a method for preparing an aluminum evaporation material, which specifically comprises the following steps:

[0066] (1) providing an aluminum billet having a purity of 99.993% and a Vickers hardness of 35 HV, and the aluminum billet having a hexahedral block structure and six surfaces to be processed, selecting an aluminum fixture that matches the size of the aluminum billet, and clamping and fixing the aluminum billet on a lathe using the aluminum fixture;

[0067] (2) using a wire cutting blade to perform a first machining process on any surface to be processed of the aluminum billet, the speed of the wire cutting blade is 500 rpm, the feed rate is 0.2 mm / min, the cutting depth is 0.2 mm / blade, and the material of the wire cutting blade is diamond;

[0068] (3) performing a second machining on the surface to be processed in step (2) using a finishing tool to form a cutting surface, the rotation speed of the finishing tool is 600 rpm, the feed rate is 0.07 mm / min, the cutting depth is 0.02 mm / tool, the material of the finishing tool is diamond, and a turning fluid with a volume concentration of 5% is used in the second machining process;

[0069] (4) Remove the processed aluminum billet and cover the cut surface with Teflon tape, where the width of the Teflon tape used is 20 mm and the thickness is 0.05 mm;

[0070] (5) then turning over the aluminum billet, clamping the aluminum billet on the lathe again with an aluminum fixture, repeating steps (2) and (3), and sequentially performing the first machining and the second machining on the remaining surfaces to be processed of the aluminum billet until all six surfaces to be processed form cutting surfaces;

[0071] (6) The protective tape on the surface is removed to obtain an aluminum evaporation material, and the aluminum evaporation material is ultrasonically cleaned at a temperature of 25° C. for 20 min.

[0072] Example 3

[0073] This embodiment provides a method for preparing an aluminum evaporation material, which specifically comprises the following steps:

[0074] (1) providing an aluminum billet having a purity of 99.998% and a Vickers hardness of 50 HV, and having a tetrahedral block structure and four surfaces to be processed, selecting an aluminum fixture that matches the size of the aluminum billet, and clamping and fixing the aluminum billet on a lathe using the aluminum fixture;

[0075] (2) using a wire cutting blade to perform a first machining process on any surface to be processed of the aluminum billet, the speed of the wire cutting blade is 550 rpm, the feed rate is 0.12 mm / min, the cutting depth is 0.3 mm / blade, and the material of the wire cutting blade used is tungsten carbide-based cemented carbide;

[0076] (3) performing a second machining on the surface to be processed in step (2) using a finishing tool to form a cutting surface, the rotation speed of the finishing tool is 650 rpm, the feed rate is 0.06 mm / min, the cutting depth is 0.04 mm / tool, the material of the finishing tool is tungsten carbide-based cemented carbide, and a turning fluid with a volume concentration of 6% is used in the second machining process;

[0077] (4) Remove the processed aluminum billet and cover the cut surface with Teflon tape, where the width of the Teflon tape used is 25 mm and the thickness is 0.2 mm;

[0078] (5) then turning over the aluminum billet, clamping the aluminum billet on the lathe again with an aluminum fixture, repeating steps (2) and (3), and sequentially performing the first machining and the second machining on the remaining surfaces to be processed of the aluminum billet until all four surfaces to be processed form cutting surfaces;

[0079] (6) The protective tape on the surface is removed to obtain an aluminum evaporation material, and the aluminum evaporation material is ultrasonically cleaned at a temperature of 28° C. for 18 min.

[0080] Example 4

[0081] This embodiment provides a method for preparing an aluminum evaporation material, which specifically comprises the following steps:

[0082] (1) providing an aluminum billet having a purity of 99.995% and a Vickers hardness of 40 HV, and the aluminum billet having a hexahedral block structure and six surfaces to be processed, selecting an aluminum fixture that matches the size of the aluminum billet, and clamping and fixing the aluminum billet on a lathe using the aluminum fixture;

[0083] (2) using a wire cutting blade to perform a first machining process on any surface to be processed of the aluminum billet, the speed of the wire cutting blade is 650 rpm, the feed rate is 0.18 mm / min, the cutting depth is 0.4 mm / blade, and the material of the wire cutting blade used is tungsten carbide-based cemented carbide;

[0084] (3) performing a second machining on the surface to be processed in step (2) using a finishing tool to form a cutting surface, the rotation speed of the finishing tool is 750 rpm, the feed rate is 0.065 mm / min, the cutting depth is 0.08 mm / tool, the material of the finishing tool used is tungsten carbide-based cemented carbide, and a turning fluid with a volume concentration of 7% is used in the second machining process;

[0085] (4) Remove the processed aluminum billet and cover the cut surface with Teflon tape, where the width of the Teflon tape used is 24 mm and the thickness is 0.4 mm;

[0086] (5) then turning over the aluminum billet, clamping the aluminum billet on the lathe again with an aluminum fixture, repeating steps (2) and (3), and sequentially performing the first machining and the second machining on the remaining surfaces to be processed of the aluminum billet until all six surfaces to be processed form cutting surfaces;

[0087] (6) The protective tape on the surface is removed to obtain an aluminum evaporation material, and the aluminum evaporation material is ultrasonically cleaned at a temperature of 32° C. for 12 min.

[0088] Example 5

[0089] This embodiment provides a method for preparing an aluminum evaporation material, which specifically comprises the following steps:

[0090] (1) providing an aluminum billet, wherein the aluminum billet has a purity of 99.995% and a Vickers hardness of 45 HV, and the aluminum billet is in a sheet structure and has a first surface and a second surface opposite to each other, selecting an aluminum fixture that matches the size of the aluminum billet, and clamping and fixing the aluminum billet on a lathe using the aluminum fixture;

[0091] (2) performing a first machining operation on the first surface by using a wire cutting blade, wherein the rotation speed of the wire cutting blade is 700 rpm, the feed rate is 0.1 mm / min, the cutting depth is 0.5 mm / blade, and the material of the wire cutting blade is tungsten carbide-based cemented carbide;

[0092] (3) performing a second machining on the first surface in step (2) using a finishing tool to form a cutting surface, the rotation speed of the finishing tool being 800 rpm, the feed rate being 0.065 mm / min, the cutting depth being 0.06 mm / tool, the material of the finishing tool being tungsten carbide-based cemented carbide, and a turning fluid having a volume concentration of 10% being used in the second machining process;

[0093] (4) Remove the processed aluminum billet and cover the cut surface with Teflon tape, where the width of the Teflon tape used is 23 mm and the thickness is 0.1 mm;

[0094] (5) then turning over the aluminum billet, clamping the aluminum billet on the lathe again using an aluminum fixture, repeating steps (2) and (3), and performing the first machining and the second machining on the second surface of the aluminum billet in sequence to form a cutting surface;

[0095] (6) The protective tape on the surface is removed to obtain an aluminum evaporation material, and the aluminum evaporation material is ultrasonically cleaned at a temperature of 35° C. for 10 min.

[0096] Example 6

[0097] This embodiment provides a method for preparing aluminum evaporation material, which differs from Embodiment 1 in that: in step (2), the rotation speed of the wire cutting blade is 450 rpm, and the remaining operating steps and process parameters are the same as those in Embodiment 1.

[0098] Example 7

[0099] This embodiment provides a method for preparing aluminum evaporation material, which differs from Embodiment 1 in that: in step (2), the rotation speed of the wire cutting blade is 750 rpm, and the remaining operating steps and process parameters are the same as those in Embodiment 1.

[0100] Example 8

[0101] This embodiment provides a method for preparing aluminum evaporation material, which differs from Embodiment 1 in that: in step (2), the feed rate of the wire cutting blade is 0.05 mm / min, and the remaining operating steps and process parameters are the same as those in Embodiment 1.

[0102] Example 9

[0103] This embodiment provides a method for preparing aluminum evaporation material, which differs from Embodiment 1 in that: in step (2), the feed rate of the wire cutting blade is 0.3 mm / min, and the remaining operating steps and process parameters are the same as those in Embodiment 1.

[0104] Example 10

[0105] This embodiment provides a method for preparing aluminum evaporation material, which differs from Embodiment 1 in that: in step (3), the rotation speed of the finishing tool is 550 rpm, and the remaining operating steps and process parameters are the same as those in Embodiment 1.

[0106] Embodiment 11

[0107] This embodiment provides a method for preparing aluminum evaporation material, which differs from Embodiment 1 in that: in step (3), the rotation speed of the finishing tool is 850 rpm, and the remaining operating steps and process parameters are the same as those in Embodiment 1.

[0108] Example 12

[0109] This embodiment provides a method for preparing aluminum evaporation material, which differs from Embodiment 1 in that: in step (3), the feed rate of the finishing tool is 0.03 mm / min, and the remaining operating steps and process parameters are the same as those in Embodiment 1.

[0110] Example 13

[0111] This embodiment provides a method for preparing aluminum evaporation material, which differs from Embodiment 1 in that: in step (3), the feed rate of the fine turning tool is 0.08 mm / min, and the remaining operating steps and process parameters are the same as those in Embodiment 1.

[0112] Comparative Example 1

[0113] This comparative example provides a method for preparing an aluminum evaporation material, which is different from Example 1 in that no protective tape is used for masking, and the remaining operating steps and process parameters are the same as those of Example 1.

[0114] Comparative Example 2

[0115] This comparative example provides a method for preparing an aluminum evaporation material, which differs from Example 1 in that in step (2), a rough turning tool is used to replace a wire cutting blade, and the remaining operating steps and process parameters are the same as those in Example 1.

[0116] Comparative Example 3

[0117] This comparative example provides a method for preparing an aluminum evaporation material, which differs from Example 1 in that: in step (3), a wire cutting blade is used to replace a fine turning tool, and the remaining operating steps and process parameters are the same as those in Example 1.

[0118] The surface roughness of the aluminum evaporation materials prepared in Examples 1 to 13 of the present invention and Comparative Examples 1 to 3 is shown in Table 1. At the same time, the outer surface of the aluminum evaporation material was observed to see if there were scratches. The results are shown in Table 1.

[0119] Table 1

[0120]

[0121]

[0122] It is not difficult to see from Table 1 that in Examples 1 to 13 of the present invention, by controlling the process parameters of the first machining and the second machining, the roughness of the outer surface of the aluminum evaporation material can be effectively reduced, and the obtained aluminum evaporation material is smooth and flat without any scratches.

[0123] Compared with Example 1, Comparative Example 1 did not use protective tape to mask the cutting surface after the first machining. During the second machining process, the finishing tool scratched the cutting surface, forming scratches on the outer surface of the aluminum evaporation material, and increasing the roughness of the product.

[0124] It can be seen from Example 1, Comparative Example 1 and Comparative Example 2 that Example 1 uses a combination of a wire cutting blade and a fine turning tool to process the aluminum billet, which can more effectively reduce the roughness of the outer surface of the product to meet the use requirements.

[0125] The applicant declares that the above is only a specific implementation mode of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present invention shall fall within the protection scope and disclosure scope of the present invention.

Claims

1. A method for preparing an aluminum evaporation material, characterized in that: The preparation method comprises: Providing an aluminum blank having at least two surfaces to be processed; Performing a first machining process and a second machining process in sequence on any surface to be processed to form a cutting surface, and performing a masking process on the cutting surface; Then, the first machining and the second machining are sequentially performed on the remaining surfaces to be processed until all the surfaces to be processed form cutting surfaces, thereby obtaining aluminum evaporation materials; The first machining process uses a thread cutting blade, and the second machining process uses a finishing tool.

2. The preparation method according to claim 1, characterized in that: The purity of the aluminum billet is ≥99.99%; Preferably, the Vickers hardness of the aluminum blank is 35 to 50 HV; Preferably, the aluminum blank is in a block structure.

3. The preparation method according to claim 1 or 2, characterized in that: In the first machining, the rotation speed of the wire cutting blade is 500-700 rpm; Preferably, the feed rate of the wire cutting blade is 0.1-0.2 mm / min; Preferably, the cutting depth of the wire cutting blade is 0.2-0.5 mm / knife; Preferably, the wire cutting blade is made of any one of tungsten carbide-based cemented carbide, titanium carbide-based cemented carbide or diamond, or a combination of at least two of them.

4. The preparation method according to any one of claims 1 to 3, characterized in that In the second machining, the rotation speed of the finishing tool is 600-800 rpm; Preferably, the feed rate of the finishing tool is 0.05-0.07 mm / min; Preferably, the cutting depth of the finishing tool is 0.02-0.1 mm / tool; Preferably, the material of the finishing tool is any one of tungsten carbide-based cemented carbide, titanium carbide-based cemented carbide or diamond, or a combination of at least two of them.

5. The preparation method according to any one of claims 1 to 4, characterized in that: The masking process includes: wrapping the cutting surface with a protective tape.

6. The preparation method according to claim 5, characterized in that: The width of the protective tape is ≤25mm; Preferably, the thickness of the protective tape is 0.05 to 0.5 mm; Preferably, the protective tape is Teflon tape.

7. The preparation method according to claim 5 or 6, characterized in that: The preparation method further comprises: after the second machining is completed, removing the protective tape on the cutting surface and cleaning the aluminum evaporation material; Preferably, the cleaning process is ultrasonic cleaning; Preferably, the cleaning temperature is 20-35°C; Preferably, the cleaning process takes 10 to 20 minutes.

8. The preparation method according to any one of claims 1 to 7, characterized in that: The preparation method further comprises: clamping and fixing the aluminum blank on a lathe using a fixture, and then sequentially performing the first machining and the second machining; Preferably, the clamp is an aluminum clamp.

9. The preparation method according to any one of claims 1 to 8, characterized in that: The second machining process uses a turning fluid; Preferably, the volume concentration of the cutting fluid is 5-10%.

10. The preparation method according to any one of claims 1 to 9, characterized in that: The roughness Ra of the outer surface of the aluminum evaporation material is 0.1-0.5 μm.

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