Intelligent conveying mechanism for hanging and conveying silicon carbide wafer finished products

Abstract

The invention discloses a conveying mechanism for intelligently suspending and conveying silicon carbide wafer finished products, and particularly relates to the technical field of intelligent suspending and conveying, which comprises a suspending outer grooved rail, two sleeving plates, a rotating shaft, a pinion and an intelligent linkage energy-saving lubricating conveying assembly, the intelligent linkage energy-saving lubricating conveying assembly comprises a large gear, a sealing hole ring, a hole disc, a rubber hole ring, a lubricating oil pipe, a lower discharging pipe and a butt joint through hole. According to the intelligent linkage energy-saving lubrication conveying assembly, lubrication can be achieved through a power source driven by a servo motor, equipment and electric energy are saved, the lubrication speed can be adjusted according to the conveying speed driven by a rotating shaft, and therefore the function of intelligent energy-saving lubrication adjustment is achieved through conveying transmission force; and therefore, the problems that intelligent energy-saving adjustment and lubrication are difficult to realize by utilizing the transmission force of conveying, and the intelligent linkage of conveying is poor are solved.

Description

Technical Field

[0001] The present invention relates to the technical field of intelligent suspension conveying, and more specifically, to a conveying mechanism for intelligent suspension conveying of finished silicon carbide wafers. Background Art

[0002] The intelligent suspension conveying system moves materials through the suspension carrier, achieving efficient transportation of finished silicon carbide wafers. This transportation method is not only fast, but also reduces the tediousness and errors of manual handling and improves production efficiency. At the same time, the intelligent automation system can accurately transport according to the preset suspension path and speed, ensuring the stability and consistency of the wafer during the processing.

[0003] In the existing public documents, patent publication number CN118637267A discloses an intelligent circulation hanging device for a clothing production line. This technology can realize the reciprocating tensioning and reciprocating tensioning and leveling of the conveyed clothing by reciprocating changes in the angles of two hanging rods. On the other hand, when the rocking shaft rotates, the rocking shaft and the vibration frame shake up and down, which can not only realize the vibration leveling and vibration wrinkle removal of the clothing fabric, but also reciprocately change the heating angle and heating position of the clothing fabric. However, this technology has the following defects.

[0004] When the intelligent suspension conveying mechanism conveys the finished silicon carbide wafers, it needs to guide and convey them in the suspended track. In order to reduce friction during transportation, the maintenance personnel need to lubricate the track regularly. However, the lubrication position is inconvenient to operate at high altitudes. In addition, during the transportation process, the intelligent suspension conveying mechanism needs to adjust different conveying speeds according to the conveying requirements. It is difficult to quickly supply lubricating oil to achieve sufficient lubrication during high-speed transportation. It is difficult to supply lubricating oil at a low speed when the conveying speed is low, so as to achieve the function of saving lubricating oil. The oil supply speed is difficult to be intelligently matched and adjusted according to the conveying speed, and it is difficult to use the transmission force of the conveying to achieve intelligent energy-saving adjustment of lubrication. The intelligent linkage of the conveying is poor. Therefore, an intelligent suspension conveying mechanism for conveying finished silicon carbide wafers is required. Summary of the invention

[0005] In order to overcome the above-mentioned defects of the prior art, the present invention provides the following technical solutions: a conveying mechanism for intelligently hanging and conveying finished silicon carbide wafers, comprising a hanging outer groove rail, two socket plates are fixedly connected to the upper surface of the hanging outer groove rail, each of the socket plates is rotatably connected to a rotating shaft, the outer wall of the rotating shaft and the upper surface of the socket plate are fixedly connected to a small gear, and the outer wall of the small gear is provided with an intelligent linkage energy-saving lubrication conveying component; the intelligent linkage energy-saving lubrication conveying component comprises a large gear meshingly connected to the outer wall of the small gear, a sealing hole ring is fixedly connected to the upper surface of the sealing hole ring, a hole plate is fixedly connected to the upper surface of the sealing hole ring, and a rubber hole ring is fixedly connected to the upper surface of the hole plate; a lubricating oil pipe is slidably provided on the upper surface of the rubber hole ring, and a lower row pipe is slidably connected to the lower surface of the sealing hole ring near its edge line, and a docking through hole is opened on the inner wall of the hole plate.

[0006] Preferably, the pinion is rotatably connected to the socket plate, the sealing hole ring is slidably connected to the pinion, and the inner wall center point of the lubricating oil pipe is in the same vertical line as the inner wall center point of the lower row pipe. The lower row pipe is fixedly connected to the suspension outer groove rail, and the rubber hole ring and the sealing hole ring are both connected to the docking through hole; the cross-sectional shape of the docking through hole is circular. The inner wall of the large gear is fixedly connected with a linkage shaft, and a socket shaft bar is provided below the large gear. The socket shaft bar is fixedly connected to the socket plate, and the socket shaft bar is slidably connected to the rotating shaft; the socket shaft bar is rotatably connected to the linkage shaft. The top of the lubricating oil pipe is fixedly connected with a receiving barrel, and a bracket is provided on one side of the outer wall of the receiving barrel, and the suspension outer groove rail and the receiving barrel are fixedly connected to the bracket. The upper surface of the socket plate and near its two ends are fixedly connected with a suspension mounting rod, and the suspension mounting rod is made of carbon fiber material.

[0007] When this technology is used for transportation, when the shaft rotates at high speed, the shaft will drive the small gear to rotate at high speed, and the large gear will drive the linkage shaft to rotate. The large gear drives the sealing hole ring to rotate, the hole plate drives the rubber hole ring to rotate, and the sealing hole ring moves along the upper surface of the lower row pipe. When the docking through hole on the hole plate is located between the lubricating oil pipe and the lower row pipe, the lubricating oil pipe and the lower row pipe are connected through the docking through hole. The lubricating oil inside the container barrel can enter the hole position of the rubber hole ring along the lubricating oil pipe, enter the hole position of the sealing hole ring through the docking through hole, and the sealing hole ring drips the lubricating oil into the lower row pipe. It is discharged to the groove body inside the hanging outer groove rail through the lower row pipe. When the controller starts the servo motor to drive the shaft to rotate at a low speed, the shaft drives the small gear to drive at a low speed, so that the rotation speed of the hole plate is also low, so that the docking through hole on the hole plate can pass through the bottom of the lubricating oil pipe a few times within the specified time, so as to slowly discharge the lubricating oil into the groove body inside the hanging outer groove rail.

[0008] Preferably, a guide block is fixedly connected to the top of the inner wall of the hanging outer groove rail and located below the lower row of pipes, a gap is provided between the guide block and one side of the inner wall of the hanging outer groove rail, and a lubrication guide assembly is provided on the upper inclined surface of the guide block; the lubrication guide assembly includes two limit blocks fixedly arranged on the upper inclined surface of the guide block, two strip holes are provided on the inner wall of the guide block, and a plurality of block blocks are provided on the lower surface of each of the strip holes, and the plurality of block blocks are fixedly connected to the guide block, and a lower drip column is fixedly connected to the lower surface of each block block. The vertical cross-section shape of the two limit blocks is a triangle, and the upper inclined surface of the guide block is a smooth surface.

[0009] When this technology is used for transportation, the lubricating oil is discharged along the lower discharge pipe to the inclined surface of the guide block, and the lubricating oil is discharged along the guide block, so as to fit the gap between the guide block and the inner wall of the suspension outer groove rail. The graphene slider passes through the lubrication position inside the suspension outer groove rail and can be automatically lubricated. At the same time, another part of the lubricating oil flows down along the strip hole to the block, and the lower drip column drips the lubricating oil to the bottom surface of the inner part of the suspension outer groove rail.

[0010] Preferably, a controller is fixedly connected to one side of one of the socket plates, a servo motor is installed at the top of one of the rotating shafts, the controller is electrically connected to the servo motor, the output end of the servo motor is fixedly connected to one of the rotating shafts, a reinforcement frame is provided on one side of the servo motor, the socket plate and the servo motor are fixedly connected to the reinforcement frame, a pulley is fixedly connected to the outer wall of the rotating shaft near its bottom end, the lower surface of the pulley is slidably connected to a hanging inner groove rail, and the two socket plates are fixedly connected to the upper surface of the hanging inner groove rail.

[0011] The outer wall of the pulley is provided with a transmission toothed belt, and the two pulleys are meshed and connected with the transmission toothed belt. A plurality of linkage blocks are fixedly connected to both sides of the transmission toothed belt, and a support shaft is fixedly connected to one side of the linkage block. The outer wall of the support shaft is rotatably connected with a moving roller, and the moving roller is rollingly connected to the inner wall of the hanging outer groove rail. One end of the support shaft is fixedly connected with a graphene slider, and the graphene slider is slidingly connected to the hanging outer groove rail; the lower surface of the linkage block is fixedly connected with a suspension rod, and the suspension rod is slidingly connected to the hanging outer groove rail, and a conveying box is fixedly installed at the bottom end of the suspension rod. The outer walls of the moving roller and the graphene slider are both smooth surfaces, and the moving roller and the graphene slider are both made of graphene material.

[0012] When this technology is used for transportation, the servo motor is started to drive the shaft to rotate at a high speed, the shaft rotates inside the socket plate, the pulley rotates within the internal limit of the suspension inner groove rail, the transmission toothed belt drives multiple linkage blocks to move, the support shaft drives the moving roller to move, and the moving roller rolls along the inner wall groove of the suspension outer groove rail. The graphene slider slides along the inner wall groove of the suspension outer groove rail, the suspension rod slides along the suspension outer groove rail, and the suspension rod drives the conveyor box to move.

[0013] Technical effects and advantages of the present invention:

[0014] 1. The present invention uses an intelligent linkage energy-saving lubrication and delivery component. The servo motor drives the rotating shaft to rotate at a high speed. The docking through-hole on the orifice plate can pass through the bottom of the lubricating oil pipe for multiple times within a specified time, thereby quickly discharging the lubricating oil into the internal groove body of the outer groove rail of the suspension for high-speed lubrication. The servo motor drives the rotating shaft to rotate at a low speed, and the rotating shaft drives the pinion gear to also be driven at a low speed. The docking through-hole can pass through the bottom of the lubricating oil pipe for a few times within a specified time, and slowly discharge the lubricating oil into the internal groove body of the outer groove rail of the suspension. Not only can the power source driven by the servo motor be used for lubrication to save equipment and electric energy, but the lubrication speed can also be adjusted according to the delivery speed driven by the rotating shaft to realize intelligent linkage energy-saving lubrication of the internal groove body of the outer groove rail of the suspension, thereby utilizing the transmission force of the delivery to realize intelligent energy-saving adjustment of lubrication, making the delivery intelligent linkage better.

[0015] 2. The present invention adopts a lubricating guide component. The lubricating oil is discharged along the lower discharge pipe to the inclined surface of the guide block, and is limited on both sides by two limit blocks. The lubricating oil can lubricate the side of the internal groove body of the hanging outer groove rail, and the other part of the lubrication flows down to the stopper. The lower drip column drips the lubricating oil to the bottom surface of the inner part of the hanging outer groove rail to lubricate the moving roller and the graphene slider, making the transportation smoother and reducing transportation wear.

[0016] 3. The present invention drives multiple linkage blocks to move through a transmission toothed belt, the linkage block drives the support shaft to move, the moving roller rolls along the inner wall groove of the suspension outer groove rail, the support shaft drives the graphene slider to move, the graphene slider slides along the inner wall groove of the suspension outer groove rail, the suspension rod drives the conveying box to move, and the conveying box drives the silicon carbide wafer finished product to be suspended and conveyed, so that the graphene slider and the moving roller can achieve double lubrication, reduce transportation wear, and have better transportation durability. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the main structure of the conveying mechanism for intelligently hanging and conveying finished silicon carbide wafers of the present invention.

[0018] Figure 2 It is a schematic diagram of the partial structure of the connection between the suspension outer groove rail and the sleeve plate of the present invention.

[0019] Figure 3 It is a schematic diagram of the vertical cross-sectional structure of the conveying mechanism for intelligently hanging and conveying finished silicon carbide wafers of the present invention.

[0020] Figure 4 It is a schematic diagram of the local structure of the vertical section of the connection between the rotating shaft and the pulley of the present invention.

[0021] Figure 5 For the present invention Figure 4 Enlarged structural diagram at A in the middle.

[0022] Figure 6 For the present invention Figure 4 Enlarged structural diagram at B in the middle.

[0023] Figure 7 It is a bottom view structural schematic diagram of the lubrication guide assembly of the present invention.

[0024] Figure 8 This is a schematic diagram of the cross-sectional structure of the conveying mechanism for intelligently hanging and conveying finished silicon carbide wafers of the present invention.

[0025] Fig. 9 It is a schematic diagram of the partial structure of the cross section of the connection between the linkage block and the support shaft of the present invention, viewed from top view.

[0026] The accompanying drawings are marked as follows: 1. Suspension outer groove rail; 2. Socket plate; 3. Rotating shaft; 4. Small gear; 5. Large gear; 6. Sealing hole ring; 7. Hole plate; 8. Rubber hole ring; 9. Lubricating oil pipe; 10. Lower discharge pipe; 11. Docking through hole; 12. Linkage shaft; 13. Socket shaft bar; 14. Loading barrel; 15. Bracket; 16. Controller; 17. Suspension mounting rod; 18. Guide block; 19. Limit block; 20. Bar hole; 21. Block; 22. Lower drip column; 23. Servo motor; 24. Reinforcement frame; 25. Pulley; 26. Suspension inner groove rail; 27. Transmission toothed belt; 28. Linkage block; 29. ​​Support shaft; 30. Moving roller; 31. Graphene slider; 32. Suspension rod; 33. Conveying box. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0028] As attached Figure 1 - Attachment Fig. 9A conveying mechanism for intelligently hanging and conveying finished silicon carbide wafers is shown. The conveying mechanism for intelligently hanging and conveying finished silicon carbide wafers is provided with an intelligent linkage energy-saving lubrication conveying component and a lubrication guide component. The setting of each component can not only utilize the power source driven by the servo motor 23 for lubrication, saving equipment and electric energy, but also can drive the conveying speed according to the rotating shaft 3, thereby adjusting the lubrication speed, realizing intelligent linkage energy-saving lubrication. The groove body inside the outer groove rail 1 of the suspension can utilize the transmission force of the conveying to realize intelligent energy-saving adjustment of lubrication, and the intelligent linkage of the conveying is better. The specific structural settings of each mechanism and component are as follows.

[0029] In this technical solution, as shown in the attached Figure 1 - Attachment Figure 6 As shown, two socket plates 2 are fixedly connected to the upper surface of the hanging outer groove rail 1, and a rotating shaft 3 is rotatably connected to the interior of each socket plate 2. A pinion 4 is fixedly connected to the outer wall of the rotating shaft 3 and located on the upper surface of the socket plate 2, and an intelligent linkage energy-saving lubrication and conveying component is provided on the outer wall of the pinion 4; the intelligent linkage energy-saving lubrication and conveying component includes a large gear 5 meshingly connected to the outer wall of the pinion 4, and a sealing hole ring 6 is fixedly connected to the upper surface of the large gear 5.

[0030] A hole plate 7 is fixedly connected to the upper surface of the sealing hole ring 6, and a rubber hole ring 8 is fixedly connected to the upper surface of the hole plate 7. A lubricating oil pipe 9 is slidably provided on the upper surface of the rubber hole ring 8, and a lower row pipe 10 is slidably connected to the lower surface of the sealing hole ring 6 near its edge line. A docking through hole 11 is provided on the inner wall of the hole plate 7. The pinion 4 is rotatably connected to the socket plate 2, and the sealing hole ring 6 is slidably connected to the pinion 4. The center point of the inner wall of the lubricating oil pipe 9 is on the same vertical line as the center point of the inner wall of the lower row pipe 10. The lower row pipe 10 is fixedly connected to the suspension outer groove rail 1, and the rubber hole ring 8 and the sealing hole ring 6 are both connected to the docking through hole 11; the cross-sectional shape of the docking through hole 11 is circular.

[0031] In this technical solution, as shown in the attached Figure 2 - Attachment Figure 6 As shown, a linkage shaft 12 is fixedly connected to the inner wall of the large gear 5, and a sleeve shaft bar 13 is provided below the large gear 5. The sleeve shaft bar 13 is fixedly connected to the sleeve plate 2, and the sleeve shaft bar 13 is slidably connected to the rotating shaft 3; the sleeve shaft bar 13 and the linkage shaft 12 are rotationally connected, so that the large gear 5 drives the linkage shaft 12 to rotate, thereby ensuring that the linkage shaft 12 rotates stably inside the sleeve shaft bar 13.

[0032] The top of the lubricating oil pipe 9 is fixedly connected to a receiving barrel 14, and a bracket 15 is provided on one side of the outer wall of the receiving barrel 14. The hanging outer groove rail 1 and the receiving barrel 14 are fixedly connected to the bracket 15, so that the hanging outer groove rail 1 supports the bracket 15, and the bracket 15 supports the receiving barrel 14, thereby increasing the stability of the receiving barrel 14 when in use. A controller 16 is fixedly connected to one side of one of the socket plates 2, and a hanging mounting rod 17 is fixedly connected to the upper surface of the socket plate 2 and near its two end positions. The hanging mounting rod 17 is made of carbon fiber material, so that the hanging mounting rod 17 can be hung and fixed at the top position of the inner wall of the factory building by using expansion bolts, and the socket plate 2 is supported by the hanging mounting rod 17, and the socket plate 2 supports the controller 16, thereby increasing the stability of the controller 16.

[0033] In this technical solution, as shown in the attached Figure 6 - Attachment Figure 7 As shown, a guide block 18 is fixedly connected to the top of the inner wall of the hanging outer groove rail 1 and located below the lower row pipe 10. A gap is provided between the guide block 18 and one side of the inner wall of the hanging outer groove rail 1, and a lubrication guide assembly is provided on the upper inclined surface of the guide block 18. The lubrication guide assembly includes two limit blocks 19 fixedly arranged on the upper inclined surface of the guide block 18. Two strip holes 20 are provided on the inner wall of the guide block 18. A plurality of stop blocks 21 are provided on the lower surface of each strip hole 20. The plurality of stop blocks 21 are fixedly connected to the guide block 18. A lower drip column 22 is fixedly connected to the lower surface of each stop block 21. The vertical cross-section shape of the two limit blocks 19 is a triangle, and the upper inclined surface of the guide block 18 is a smooth surface.

[0034] In this technical solution, as shown in the attached Figure 2 - Attachment Fig. 9 As shown, a controller 16 is fixedly connected to one side of one of the socket plates 2, a servo motor 23 is installed at the top of one of the rotating shafts 3, the controller 16 and the servo motor 23 are electrically connected, the output end of the servo motor 23 is fixedly connected to one of the rotating shafts 3, a reinforcement frame 24 is provided on one side of the servo motor 23, the socket plate 2 and the servo motor 23 are fixedly connected to the reinforcement frame 24, a pulley 25 is fixedly connected to the outer wall of the rotating shaft 3 near its bottom end, the lower surface of the pulley 25 is slidably connected to a hanging inner groove rail 26, and the two socket plates 2 are fixedly connected to the upper surface of the hanging inner groove rail 26.

[0035] The outer wall of the pulley 25 is provided with a transmission toothed belt 27, and both pulleys 25 are meshed and connected with the transmission toothed belt 27. Multiple linkage blocks 28 are fixedly connected to both sides of the transmission toothed belt 27, and a support shaft 29 is fixedly connected to one side of the linkage block 28. The outer wall of the support shaft 29 is rotatably connected with a moving roller 30, and the moving roller 30 is rollingly connected to the inner wall of the hanging outer groove rail 1. One end of the support shaft 29 is fixedly connected with a graphene slider 31, and the graphene slider 31 is slidingly connected to the hanging outer groove rail 1; the lower surface of the linkage block 28 is fixedly connected with a hanging rod 32, and the hanging rod 32 is slidingly connected to the hanging outer groove rail 1, and a conveying box 33 is fixedly installed at the bottom end of the hanging rod 32. The outer walls of the moving roller 30 and the graphene slider 31 are both smooth surfaces, and the moving roller 30 and the graphene slider 31 are both made of graphene material.

[0036] The working principle of the conveying mechanism for intelligently hanging and conveying finished silicon carbide wafers of the present invention is as follows:

[0037] Step 1: When installing and placing, first use expansion bolts to hang and fix the suspension mounting rod 17 at the top position of the inner wall of the factory, so that the four suspension mounting rods 17 are hung and fixed. The suspension mounting rod 17 supports the socket plate 2, the socket plate 2 supports the suspension outer groove rail 1, and the socket plate 2 can provide support force for the suspension inner groove rail 26 to complete the suspension installation. Then place the finished silicon carbide wafer inside the conveying box 33 to realize the loading and conveying operation.

[0038] Step 2, during speed-changing conveying, the reinforcement frame 24 is supported by the socket plate 2, and the reinforcement frame 24 supports the servo motor 23. The controller 16 starts the servo motor 23 and drives the rotating shaft 3 to rotate at a high speed, wherein the high speed is 50 rpm. The rotating shaft 3 rotates inside the socket plate 2, and the rotating shaft 3 drives the pulley 25 to rotate. The pulley 25 rotates within the internal limit of the hanging inner groove rail 26. At the same time, the pulley 25 drives the transmission toothed belt 27 to engage in transmission, and the transmission toothed belt 27 drives multiple linkage blocks 28 to move, and the linkage blocks 28 drive the support shaft 29 to move, and the support shaft 29 drives the moving roller 30 to move, and the moving roller 30 rolls in the groove body along the inner wall of the hanging outer groove rail 1. At the same time, the support shaft 29 drives the graphene slider 31 to move, and the graphene slider 31 slides along the inner wall groove of the suspension outer groove rail 1, so that the linkage block 28 drives the suspension rod 32 to move, and the suspension rod 32 slides along the suspension outer groove rail 1, and the suspension rod 32 drives the conveying box 33 to move, and the conveying box 33 drives the finished silicon carbide wafer to be suspended and conveyed.

[0039] Step 3: Intelligent linkage energy-saving lubrication delivery, when the shaft 3 rotates at high speed, the shaft 3 will drive the small gear 4 to rotate at high speed, the small gear 4 drives the large gear 5 to mesh and rotate, and the large gear 5 drives the linkage shaft 12 to rotate. The sleeve plate 2 provides support force for the sleeve shaft bar 13, so as to ensure that the linkage shaft 12 rotates stably inside the sleeve shaft bar 13, the large gear 5 drives the sealing hole ring 6 to rotate, the sealing hole ring 6 drives the hole plate 7 to rotate, and the hole plate 7 drives the rubber hole ring 8 to rotate, so that the rubber hole ring 8 rotates and moves along the bottom end of the lubricating oil pipe 9.

[0040] At the same time, the sealing hole ring 6 moves along the upper surface of the lower row pipe 10. When the docking through hole 11 on the hole plate 7 is located between the lubricating oil pipe 9 and the lower row pipe 10, the lubricating oil pipe 9 and the lower row pipe 10 are connected through the docking through hole 11. In this way, the outer groove rail 1 is suspended to support the bracket 15, and the bracket 15 supports the receiving barrel 14. The lubricating oil inside the receiving barrel 14 can enter the hole position of the rubber hole ring 8 along the lubricating oil pipe 9, enter the hole position of the rubber hole ring 8 into the hole plate 7, and then enter the docking through hole 11. Enter the hole position of the sealing hole ring 6 through the docking through hole 11, and the sealing hole ring 6 drips the lubricating oil into the lower row pipe 10. The lubricating oil is discharged into the groove body inside the suspension outer groove rail 1 through the lower discharge pipe 10, so as to be located at the position of the guide block 18. When the rotating shaft 3 rotates at a high speed, the pinion 4 can also rotate at a high speed, so that the docking through hole 11 on the orifice plate 7 can pass through the bottom of the lubricating oil pipe 9 multiple times within a specified time, thereby quickly discharging the lubricating oil into the groove body inside the suspension outer groove rail 1 for high-speed lubrication.

[0041] When the controller 16 starts the servo motor 23 to drive the rotating shaft 3 to rotate at a low speed, wherein the low speed is 20 rpm, the rotating shaft 3 drives the pinion 4 to be driven at a low speed, so that the rotation speed of the orifice plate 7 is also low, so that the docking through hole 11 on the orifice plate 7 can pass through the bottom of the lubricating oil pipe 9 a few times within a specified time, thereby slowly discharging the lubricating oil into the groove body inside the hanging outer groove rail 1. Not only can the power source driven by the servo motor 23 be utilized, but also the groove body inside the hanging outer groove rail 1 can be lubricated in an intelligent linkage energy-saving manner according to the different driving speeds of the rotating shaft 3.

[0042] Step 4: During lubrication and diversion, the lubricating oil is discharged along the lower discharge pipe 10 to the inclined surface of the guide block 18, and is limited on both sides by two limit blocks 19, so that the lubricating oil is discharged along the guide block 18, so as to fit in the gap between the guide block 18 and the inner wall of the hanging outer groove rail 1, and the lubricating oil can lubricate the side of the internal groove body of the hanging outer groove rail 1, so that the graphene slider 31 can be automatically lubricated when passing through the lubrication position inside the hanging outer groove rail 1. At the same time, another part of the lubricating oil flows down along the strip hole 20 to the block 21, and the block 21 is diverted to the lower drip column 22, and the lower drip column 22 drips the lubricating oil to the internal bottom surface of the hanging outer groove rail 1, so that the moving roller 30 can be automatically lubricated when passing through the internal bottom surface of the hanging outer groove rail 1. The transportation is smoother, the wear of the moving roller 30 and the graphene slider 31 is reduced, and the transportation durability is better.

[0043] The contents not described in detail in the specification belong to the prior art known to those skilled in the art, and the model parameters of each electrical appliance are not specifically limited, and conventional equipment can be used. In this technical solution, the electrical control components not mentioned are not shown in the figure because they belong to the prior art and will not be described here.

[0044] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A conveying mechanism for intelligently hanging and conveying finished silicon carbide wafers, comprising a hanging outer groove rail (1), wherein two sleeve plates (2) are fixedly connected to the upper surface of the hanging outer groove rail (1), and characterized in that: Each of the sleeve plates (2) is rotatably connected to a rotating shaft (3), and a pinion (4) is fixedly connected to the outer wall of the rotating shaft (3) and located on the upper surface of the sleeve plate (2), and an intelligent linkage energy-saving lubrication conveying component is provided on the outer wall of the pinion (4); The intelligent linkage energy-saving lubrication delivery assembly comprises a large gear (5) meshingly connected to the outer wall of the small gear (4), a sealing hole ring (6) is fixedly connected to the upper surface of the large gear (5), a hole plate (7) is fixedly connected to the upper surface of the sealing hole ring (6), and a rubber hole ring (8) is fixedly connected to the upper surface of the hole plate (7); A lubricating oil pipe (9) is slidably provided on the upper surface of the rubber hole ring (8), and a lower row pipe (10) is slidably connected to the lower surface of the sealing hole ring (6) near its edge line, and a docking through hole (11) is opened on the inner wall of the hole plate (7).

2. The intelligent suspension conveying mechanism for conveying finished silicon carbide wafers according to claim 1 is characterized in that: The pinion (4) is rotationally connected to the socket plate (2), the sealing hole ring (6) is slidingly connected to the pinion (4), and the center point of the inner wall of the lubricating oil pipe (9) and the center point of the inner wall of the lower row pipe (10) are on the same vertical line.

3. The intelligent suspension conveying mechanism for conveying finished silicon carbide wafers according to claim 1 is characterized in that: The lower row pipe (10) is fixedly connected to the suspension outer groove rail (1), and the rubber hole ring (8) and the sealing hole ring (6) are both connected to the docking through hole (11); The cross-sectional shape of the docking through hole (11) is circular.

4. The intelligent suspension conveying mechanism for conveying finished silicon carbide wafers according to claim 1 is characterized in that: The inner wall of the large gear (5) is fixedly connected with a linkage shaft (12), a sleeve shaft bar (13) is provided below the large gear (5), the sleeve shaft bar (13) is fixedly connected to the sleeve plate (2), and the sleeve shaft bar (13) is slidably connected to the rotating shaft (3); The sleeve shaft (13) is rotationally connected to the linkage shaft (12).

5. The intelligent suspension conveying mechanism for conveying finished silicon carbide wafers according to claim 1 is characterized in that: The top end of the lubricating oil pipe (9) is fixedly connected to a receiving barrel (14), a bracket (15) is provided on one side of the outer wall of the receiving barrel (14), and the hanging outer groove rail (1) and the receiving barrel (14) are both fixedly connected to the bracket (15).

6. The intelligent suspension conveying mechanism for conveying finished silicon carbide wafers according to claim 1 is characterized in that: A suspension mounting rod (17) is fixedly connected to the upper surface of the sleeve plate (2) and close to its two end portions, and the suspension mounting rod (17) is made of carbon fiber material.

7. The intelligent suspension conveying mechanism for conveying finished silicon carbide wafers according to claim 1 is characterized in that: A guide block (18) is fixedly connected to the top of the inner wall of the hanging outer groove rail (1) and located below the lower row of pipes (10); a gap is provided between the guide block (18) and one side of the inner wall of the hanging outer groove rail (1); and a lubricating guide component is provided on the upper inclined surface of the guide block (18); The lubrication guide assembly comprises two limit blocks (19) fixedly arranged on the upper inclined surface of the guide block (18); the inner wall of the guide block (18) is provided with two strip holes (20); a plurality of stop blocks (21) are arranged on the lower surface of each of the strip holes (20); the plurality of stop blocks (21) are fixedly connected to the guide block (18); and a lower drip column (22) is fixedly connected to the lower surface of each of the stop blocks (21).

8. The intelligent suspension conveying mechanism for conveying finished silicon carbide wafers according to claim 7 is characterized in that: The vertical cross-sections of the two limit blocks (19) are both triangular, and the upper inclined surface of the guide block (18) is a smooth surface.

9. The intelligent suspension conveying mechanism for conveying finished silicon carbide wafers according to claim 1 is characterized in that: A controller (16) is fixedly connected to one side of one of the sleeve plates (2), a servo motor (23) is installed at the top of one of the rotating shafts (3), the controller (16) and the servo motor (23) are electrically connected, the output end of the servo motor (23) is fixedly connected to one of the rotating shafts (3), a reinforcement frame (24) is provided on one side of the servo motor (23), the sleeve plate (2) and the servo motor (23) are fixedly connected to the reinforcement frame (24), a pulley (25) is fixedly connected to the outer wall of the rotating shaft (3) near its bottom end, the lower surface of the pulley (25) is slidably connected to a hanging inner groove rail (26), and the two sleeve plates (2) are fixedly connected to the upper surface of the hanging inner groove rail (26); The outer wall of the pulley (25) is provided with a transmission toothed belt (27), and the two pulleys (25) are meshed and transmission-connected with the transmission toothed belt (27), and a plurality of linkage blocks (28) are fixedly connected to both sides of the transmission toothed belt (27), and one side of the linkage block (28) is fixedly connected to a support shaft (29), and the outer wall of the support shaft (29) is rotatably connected to a moving roller (30), and the moving roller (30) is rollingly connected to the inner wall of the suspension outer groove rail (1), and one end of the support shaft (29) is fixedly connected to a graphene slider (31), and the graphene slider (31) is slidingly connected to the suspension outer groove rail (1); The lower surface of the linkage block (28) is fixedly connected with a suspension rod (32), and the suspension rod (32) is slidably connected to the suspension outer groove rail (1), and a conveying box (33) is fixedly installed at the bottom end of the suspension rod (32).

10. The intelligent suspension conveying mechanism for conveying finished silicon carbide wafers according to claim 9 is characterized in that: The outer walls of the moving roller (30) and the graphene slider (31) are both smooth surfaces, and the moving roller (30) and the graphene slider (31) are both made of graphene material.

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