Device and method for preparing lubricating layer on surface of steel ball based on ion beam technology

Abstract

The invention discloses a device and method for preparing a lubricating layer on the surface of a steel ball based on the ion beam technology, and relates to the field of solid lubricating coating preparation.The device comprises a vacuum chamber, a workpiece containing assembly is arranged in the vacuum chamber, and the workpiece containing assembly comprises a first rotating shaft, a first sliding rail, a second sliding rail, a second rotating shaft, a tray and a workpiece table; a driving gear is arranged on the first rotating shaft, a driven gear meshed with the driving gear is arranged on the second rotating shaft, the bottom end of the second rotating shaft is rotationally connected with a first sliding seat on the first sliding rail, the top end of the second rotating shaft penetrates through the tray to be fixedly connected with the workpiece table, and the bottom of the tray is fixedly connected with a second sliding seat on the second sliding rail. And the workpiece table is rotationally connected with the top surface of the tray and is obliquely arranged towards the magnetic filtering outlet, and magnetic hemispherical holes are uniformly distributed in the workpiece table. According to the device and method for preparing the lubricating layer on the surface of the steel ball based on the ion beam technology, the thin and uniform lubricating layer can be prepared.

Description

Technical Field

[0001] The invention relates to the field of solid lubricating coating preparation, and in particular to a device and method for preparing a lubricating layer on the surface of a steel ball based on ion beam technology. Background Art

[0002] In the prior art, rolling bearings will fail due to large wear under high temperature and high load conditions. Therefore, solid lubrication layers must be used to lubricate rolling bearings under high temperature and high load conditions. Metallic silver has the characteristics of wear resistance and strong film-based bonding at high temperatures, and is a good high-temperature solid lubrication film. Foreign technology mainly uses magnetron sputtering technology to prepare lubrication layers. The working principle of magnetron sputtering is that low-pressure inert gas forms plasma under the action of a strong electric field, and the plasma undergoes sputtering, transport, and nucleation processes in the target. However, the above method has the following problems: 1. The coating has poor bonding and uniformity, and there are blank areas in the film layer, which affects the service life; 2. The density is poor and the service life is short; 3. The surface roughness is high, and large particles occasionally exist, which affects actual use.

[0003] In order to solve the above problems, it is necessary to provide a method and equipment for preparing a lubricating layer to solve technical problems such as insufficient bonding strength of the solid lubricating layer, large surface roughness and insufficient uniformity. Summary of the invention

[0004] The purpose of the present invention is to provide a device and method for preparing a lubricating layer on the surface of a steel ball based on ion beam technology, so as to solve the problems of poor bonding force, poor uniformity, poor density and high surface roughness of the lubricating layer existing in the prior art.

[0005] To achieve the above-mentioned purpose, the present invention provides a device for preparing a lubricating layer on the surface of a steel ball based on ion beam technology, comprising a vacuum chamber, a magnetic filtration outlet on a side wall of the vacuum chamber is connected to an anode cylinder through a magnetic filtration channel, a workpiece placement component is arranged in the vacuum chamber, the workpiece placement component comprises a first rotating shaft, a first slide rail, a second slide rail, a second rotating shaft, a tray and a workpiece table, a driving gear is arranged on the first rotating shaft, the first slide rail and the second slide rail are both fixed on the bottom plate of the vacuum chamber with the first rotating shaft as the center, a passive gear meshing with the driving gear is arranged on the second rotating shaft, the bottom end of the second rotating shaft is rotatably connected to the first slide seat on the first slide rail, the top end of the second rotating shaft passes through the tray and is fixedly connected to the workpiece table, the bottom of the tray is fixedly connected to the second slide seat on the second slide rail, the workpiece table is rotatably connected to the top surface of the tray and is tilted toward the magnetic filtration outlet, and uniformly distributed magnetic hemispherical holes are arranged on the workpiece table.

[0006] Preferably, the angle between the workpiece table and the horizontal plane is 30-60 degrees, and the center of the workpiece table is 100-200 mm away from the magnetic filtering outlet.

[0007] Preferably, the first slide rail and the second slide rail are both connected to the bottom plate of the vacuum chamber by insulating screws, and the distance between the first slide rail and the second slide rail is 10-100 mm, and the length is 30-50 mm.

[0008] Preferably, the bottom end of the first rotating shaft passes through the bottom plate of the vacuum chamber and the power device, and a magnetic fluid seal is provided between the first rotating shaft and the vacuum chamber.

[0009] Preferably, a copper sealing gasket is provided between the workpiece table and the tray.

[0010] The method for preparing a lubricating layer according to the device for preparing a lubricating layer on the surface of a steel ball based on ion beam technology comprises the following steps:

[0011] Step 1: Use ultrasonic cleaning equipment to perform ultrasonic cleaning on the surface of the steel ball;

[0012] Step 2, using 1keV-2keV high-energy high-current silver ion beam to clean the surface of the steel ball: placing the steel ball that has completed surface ultrasonic cleaning in the magnetic hemispherical hole of the workpiece table, using 1keV-2keV high-energy high-current silver ion beam to clean the surface of the steel ball, the surface cleaning process includes two stages: the first hemispherical surface cleaning stage and the second hemispherical surface cleaning stage, in both stages, the first rotating shaft rotates to drive the workpiece table to revolve around the first rotating shaft along the second slide rail, and the workpiece table rotates with the second rotating shaft as the rotation center, and the revolution and rotation motion of the workpiece table are used to ensure the comprehensiveness of the steel ball surface cleaning, and the steel ball needs to be manually turned over when the first hemispherical surface cleaning stage transitions to the second hemispherical surface cleaning stage;

[0013] Step 3, using a low-energy small-beam silver ion beam of 1eV-30eV to deposit metal Ag on the steel ball: convert the silver ion beam into a low-energy small-beam Ag ion beam of 1eV-30eV to deposit metal Ag on the steel ball. The metal Ag deposition process includes two stages: the first hemisphere metal Ag deposition stage and the second hemisphere metal Ag deposition stage. In both stages, the first rotating shaft rotates to drive the workpiece table to revolve around the first rotating shaft along the second slide rail, and at the same time, the workpiece table rotates with the second rotating shaft as the rotation center. The revolution and rotation of the workpiece table are used to ensure the comprehensiveness of the metal Ag deposition on the surface of the steel ball. When the first hemisphere metal Ag deposition stage transitions to the second hemisphere metal Ag deposition stage, the steel ball needs to be manually turned over.

[0014] Preferably, in step 1, the surface ultrasonic cleaning time is 20-30 minutes, and the cleaning power is 10KW.

[0015] Preferably, in step 2, the arc starting current is 100-150A, the beam intensity is 800-1200mA, and the cleaning time is 1-5min; no metal Ag is deposited during the cleaning process, and shallow injection is allowed.

[0016] Preferably, in step 3, the arc starting current is 100-150A, the beam current intensity is 300-400mA, and the deposition time is 1-30min; and metal Ag particles are deposited during the deposition process.

[0017] The present invention adopts the above-mentioned structure of the device and method for preparing a lubricating layer on the surface of a steel ball based on ion beam technology, which can prepare a thin and uniform lubricating layer on the surface of the steel ball, so that the lubricating layer has high bonding strength, good uniformity, high density, low surface roughness, long overall service life, and high equipment deposition efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic structural diagram of an embodiment of the present invention.

[0019] Reference numerals

[0020] 1. Vacuum chamber; 2. Magnetic filtration outlet; 3. Magnetic filtration channel; 4. Anode cylinder; 5. First rotating shaft; 6. First slide rail; 7. Second slide rail; 8. Second rotating shaft; 9. Tray; 10. Workpiece table; 11. Driving gear; 12. Passive gear; 13. First slide seat; 14. Second slide seat; 16. Magnetic hemispherical hole; 18. Steel ball. DETAILED DESCRIPTION

[0021] The technical solution of the present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0022] like Figure 1 The device for preparing a lubricating layer on the surface of a steel ball based on ion beam technology shown in the figure comprises a vacuum chamber 1, a magnetic filtration outlet 2 on a side wall of the vacuum chamber 1 is connected to an anode cylinder 4 through a magnetic filtration channel 3, and the magnetic filtration outlet 2 is used to emit a silver ion beam. A workpiece placement assembly is arranged in the vacuum chamber 1, and the workpiece placement assembly comprises a first rotating shaft 5, a first slide rail 6, a second slide rail 7, a second rotating shaft 8, a tray 9 and a workpiece table 10. An active gear 11 is arranged on the first rotating shaft 5, and the bottom end of the first rotating shaft 5 passes through the bottom plate and the power device of the vacuum chamber 1, and a magnetic fluid seal is arranged between the first rotating shaft 5 and the vacuum chamber 1. The first slide rail 6 and the second slide rail 7 are both fixed on the bottom plate of the vacuum chamber 1 with the first rotating shaft 5 as the center of the circle, and the first slide rail 6 and the second slide rail 7 are both connected to the bottom plate of the vacuum chamber 1 through insulating screws, and the distance between the first slide rail 6 and the second slide rail 7 is 10-100 mm, and the length is 30-50 mm.

[0023] The second rotating shaft 8 is provided with a passive gear 12 meshing with the active gear 11, and the meshing connection between the passive gear 12 and the active gear 11 can drive the second rotating shaft 8 to rotate. The bottom end of the second rotating shaft 8 is rotationally connected with the first slide seat 13 on the first slide rail 6, and the second rotating shaft 8 can be rotationally connected with the first slide seat 13 through a thrust ball bearing, and the first slide seat 13 can ensure the stability of the second rotating shaft 8 when it revolves along the first slide rail 6 with the first rotating shaft 5 as the center. The top end of the second rotating shaft 8 passes through the tray 9 and is fixedly connected with the workpiece table 10, and the second rotating shaft 8 can drive the workpiece table 10 to rotate, and the second rotating shaft 8 can be rotationally connected with the tray 9 through a deep groove ball bearing. The bottom of the tray 9 is fixedly connected with the second slide seat 14 on the second slide rail 7, and the second slide seat 14 can ensure the stability of the tray 9 when it revolves along the second slide rail 7 with the first rotating shaft 5 as the center.

[0024] The work table 10 is rotatably connected to the top surface of the tray 9 and is tilted toward the magnetic filtration outlet 2. A copper sealing gasket is provided between the work table 10 and the tray 9. The angle between the work table 10 and the horizontal plane is 30-60 degrees, which can ensure the uniformity of the lubricating layer. When the angle is less than 30 degrees, the thickness of the steel ball 18 is large in the middle and small at both ends. When the angle is greater than 60 degrees, the thickness is large at both ends. At the same time, leakage plating may occur due to gravity problems. The center of the work table 10 is 100-200mm away from the magnetic filtration outlet 2 to ensure the uniformity of deposition and a high deposition rate, and the deposition rate is not less than 100nm / min. The work table 10 is provided with uniformly distributed magnetic hemispherical holes 16, which can stably fix the steel ball 18 in the magnetic hemispherical holes 16 through magnetic attraction.

[0025] The method for preparing a lubricating layer according to the device for preparing a lubricating layer on the surface of a steel ball based on ion beam technology comprises the following steps:

[0026] Step 1: Use ultrasonic cleaning equipment to perform ultrasonic cleaning on the surface of the steel ball 18. The surface ultrasonic cleaning time is 20-30 minutes and the cleaning power is 10KW.

[0027] Step 2: Use a 1keV-2keV high-energy, high-current silver ion beam to clean the surface of the steel ball 18, with an arc starting current of 100-150A, a beam current of 800-1200mA, and a cleaning time of 1-5min; no metal Ag is deposited during the cleaning process, and shallow injection is allowed, that is, very few anions are attached to the surface of the steel ball 18. The specific method is:

[0028] Open the side door on the vacuum chamber 1 and place the steel ball 18 that has completed the surface ultrasonic cleaning in the magnetic hemispherical hole 16 of the workpiece table 10, and use a high-energy, high-current silver ion beam of 1keV-2keV to clean the surface of the steel ball 18. The surface cleaning process includes two stages: the first hemispherical surface cleaning stage and the second hemispherical surface cleaning stage. In both stages, the first rotating shaft 5 rotates to drive the workpiece table 10 to revolve around the first rotating shaft 5 along the second slide rail 7. At the same time, the workpiece table 10 rotates with the second rotating shaft 8 as the rotation center. The revolution and rotation of the workpiece table 10 are used to ensure the comprehensiveness of the surface cleaning of the steel ball 18. When the first hemispherical surface cleaning stage transitions to the second hemispherical surface cleaning stage, the steel ball needs to be manually turned over.

[0029] Step 3, using a low-energy small-current silver ion beam of 1eV-30eV to deposit metal Ag on the steel ball 18, with an arc starting current of 100-150A, a beam intensity of 300-400mA, and a deposition time of 1-30min. During the deposition process, metal Ag particles are deposited to complete the preparation of the lubricating layer. The specific method is: converting the silver ion beam into a low-energy small-beam Ag ion beam of 1eV-30eV to deposit metal Ag on the steel ball 18. The metal Ag deposition process includes two stages: the first hemisphere metal Ag deposition stage and the second hemisphere metal Ag deposition stage. In both stages, the first rotating shaft 5 rotates to drive the workpiece table 10 to revolve around the first rotating shaft 5 along the second slide rail 7. At the same time, the workpiece table 10 rotates with the second rotating shaft 8 as the rotation center. The revolution and rotation of the workpiece table 10 are used to ensure the comprehensiveness and uniformity of the metal Ag deposition on the surface of the steel ball 18. When the first hemisphere metal Ag deposition stage transitions to the second hemisphere metal Ag deposition stage, the steel ball needs to be manually turned over.

[0030] Therefore, the present invention adopts the above-mentioned device and method for preparing a lubricating layer on the surface of a steel ball based on ion beam technology, which can prepare a thin and uniform lubricating layer on the surface of the steel ball, so that the lubricating layer has high bonding strength, good uniformity, high density, low surface roughness, long overall service life, and high equipment deposition efficiency.

[0031] The above are specific embodiments of the present invention, but the protection scope of the present invention should not be limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed by the present invention should be included in the protection scope of the present invention, so the protection scope of the present invention should be based on the protection scope defined in the claims.

Claims

1. A device for preparing a lubricating layer on the surface of a steel ball based on ion beam technology, comprising a vacuum chamber, a magnetic filter outlet on one side wall of the vacuum chamber connected to an anode cylinder through a magnetic filter channel, and a workpiece placement component provided in the vacuum chamber, characterized in that: The workpiece placement assembly includes a first rotating shaft, a first slide rail, a second slide rail, a second rotating shaft, a tray and a workpiece table. The first rotating shaft is provided with a driving gear. The first slide rail and the second slide rail are both fixed to the bottom plate of the vacuum chamber with the first rotating shaft as the center. The second rotating shaft is provided with a passive gear meshing with the driving gear. The bottom end of the second rotating shaft is rotatably connected to the first slide seat on the first slide rail. The top end of the second rotating shaft passes through the tray and is fixedly connected to the workpiece table. The bottom of the tray is fixedly connected to the second slide seat on the second slide rail. The workpiece table is rotatably connected to the top surface of the tray and is tilted toward the magnetic filtration outlet. The workpiece table is provided with evenly distributed magnetic hemispherical holes.

2. The device for preparing a lubricating layer on the surface of a steel ball based on ion beam technology according to claim 1, characterized in that: The angle between the workpiece table and the horizontal plane is 30-60 degrees, and the center of the workpiece table is 100-200mm away from the magnetic filter outlet.

3. The device for preparing a lubricating layer on the surface of a steel ball based on ion beam technology according to claim 2, characterized in that: The first slide rail and the second slide rail are both connected to the bottom plate of the vacuum chamber through insulating screws. The distance between the first slide rail and the second slide rail is 10-100 mm, and the length is 30-50 mm.

4. The device for preparing a lubricating layer on the surface of a steel ball based on ion beam technology according to claim 3, characterized in that: The bottom end of the first rotating shaft passes through the bottom plate of the vacuum chamber and the power device, and a magnetic fluid seal is arranged between the first rotating shaft and the vacuum chamber.

5. The device for preparing a lubricating layer on the surface of a steel ball based on ion beam technology according to claim 4, characterized in that: A copper sealing gasket is provided between the workpiece platform and the tray.

6. A method for preparing a lubricating layer by using an apparatus for preparing a lubricating layer on a steel ball surface based on ion beam technology according to any one of claims 1 to 5, characterized in that: The following steps are involved: Step 1: Use ultrasonic cleaning equipment to perform ultrasonic cleaning on the surface of the steel ball; Step 2, using 1keV-2keV high-energy high-current silver ion beam to clean the surface of the steel ball: placing the steel ball that has completed surface ultrasonic cleaning in the magnetic hemispherical hole of the workpiece table, using 1keV-2keV high-energy high-current silver ion beam to clean the surface of the steel ball, the surface cleaning process includes two stages: the first hemispherical surface cleaning stage and the second hemispherical surface cleaning stage, in both stages, the first rotating shaft rotates to drive the workpiece table to revolve around the first rotating shaft along the second slide rail, and the workpiece table rotates with the second rotating shaft as the rotation center, and the revolution and rotation motion of the workpiece table are used to ensure the comprehensiveness of the steel ball surface cleaning, and the steel ball needs to be manually turned over when the first hemispherical surface cleaning stage transitions to the second hemispherical surface cleaning stage; Step 3, using a low-energy small-beam silver ion beam of 1eV-30eV to deposit metal Ag on the steel ball: convert the silver ion beam into a low-energy small-beam Ag ion beam of 1eV-30eV to deposit metal Ag on the steel ball. The metal Ag deposition process includes two stages: the first hemisphere metal Ag deposition stage and the second hemisphere metal Ag deposition stage. In both stages, the first rotating shaft rotates to drive the workpiece table to revolve around the first rotating shaft along the second slide rail, and at the same time, the workpiece table rotates with the second rotating shaft as the rotation center. The revolution and rotation of the workpiece table are used to ensure the comprehensiveness of the metal Ag deposition on the surface of the steel ball. When the first hemisphere metal Ag deposition stage transitions to the second hemisphere metal Ag deposition stage, the steel ball needs to be manually turned over.

7. The method for preparing a lubricating layer by using an apparatus for preparing a lubricating layer on a steel ball surface based on ion beam technology according to claim 6, characterized in that: In step 1, the surface ultrasonic cleaning time is 20-30 minutes, and the cleaning power is 10KW.

8. The method for preparing a lubricating layer by using an apparatus for preparing a lubricating layer on a steel ball surface based on ion beam technology according to claim 7, characterized in that: In step 2, the arc starting current is 100-150A, the beam intensity is 800-1200mA, and the cleaning time is 1-5min; no metal Ag is deposited during the cleaning process, and shallow injection is allowed.

9. The method for preparing a lubricating layer by using an apparatus for preparing a lubricating layer on a steel ball surface based on ion beam technology according to claim 8, characterized in that: In step 3, the arc starting current is 100-150A, the beam intensity is 300-400mA, and the deposition time is 1-30min; metal Ag particles are deposited during the deposition process.

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