Vacuum coating clamp with drying and biasing functions

Abstract

The invention relates to the technical field, and discloses a vacuum coating clamp with drying and biasing functions, which comprises a mounting seat and a lifting seat, the mounting seat is provided with a lifting driving mechanism, the upper end surface of the lifting seat is provided with a first connecting flange, the first connecting flange is connected with a rotating mechanism, and the upper part of the rotating mechanism is connected with a substrate bracket; the middle part is connected with a drying mechanism and a bias part, and the lower part is connected with a rotary driving mechanism; the first connecting flange is provided with a sealing mechanism and comprises a corrugated pipe, the rotating mechanism is sleeved with the corrugated pipe, the two ends of the corrugated pipe are each provided with a second connecting flange, one second connecting flange is connected with the first connecting flange, and the other second connecting flange is connected with the film coating cavity. The lifting mechanism, the drying mechanism and the rotating mechanism are all integrally arranged on the lifting base, the lifting mechanism and part of the rotating mechanism are all located outside the coating cavity, the space of the coating cavity cannot be occupied, the coating efficiency is improved, the coating device cannot be polluted by a coating target material, and disassembly and maintenance are convenient and fast.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum coating, in particular to a vacuum coating fixture with drying and biasing functions. Background Art

[0002] At present, vacuum coating refers to a method of heating metal or non-metal materials under vacuum conditions to evaporate and condense on the surface of the coated workpiece to form a thin film. A general vacuum coating device includes a coating chamber, which is connected to a turntable and a driving mechanism. The turntable is used to fix the vacuum coating fixture, and the driving mechanism is used to drive the turntable to rotate to improve the coating uniformity of the workpiece in the vacuum coating chamber. Some vacuum coating devices are also equipped with a lifting component and a heating component in the coating chamber. The lifting component is used to adjust the height of the turntable, and then adjust the distance between the vacuum coating fixture and the evaporation source, further improving the coating uniformity of the workpiece to be plated; the heating component is used to heat the workpiece after coating to remove moisture, solvents or other volatile substances on the surface of the workpiece to be plated.

[0003] The above-mentioned vacuum coating device, lifting assembly and heating assembly are all integrated and installed on the vacuum coating device, which has the disadvantages of occupying a large coating chamber space, being easily contaminated by the target material after long-term use, and requiring disassembly of the vacuum coating device for installation and maintenance, which is complicated.

[0004] In addition, for some coating workpieces that require bias voltage, general vacuum coating devices are difficult to meet the requirements, and vacuum coating devices with built-in bias voltage functions are required, which have low adaptability and high cost of use. Summary of the invention

[0005] To solve the above problems, the technical solution adopted by the present invention is:

[0006] A vacuum coating fixture with drying and biasing functions, comprising a mounting seat and a lifting seat, wherein the lifting seat is slidably connected to the mounting seat, the mounting seat is provided with a lifting driving mechanism for driving the lifting seat to move up and down, the upper end surface of the lifting seat is provided with a first connecting flange, the center of the first connecting flange is connected with a coaxial rotating mechanism, the upper part of the rotating mechanism is connected with a substrate bracket for placing a coating workpiece, the middle part of the rotating mechanism is connected with a drying mechanism and a biasing member, the drying mechanism is located below the substrate bracket, and the lower part of the rotating mechanism is connected with a rotating driving mechanism;

[0007] The first connecting flange is provided with a sealing mechanism which is sleeved on the rotating mechanism. The sealing mechanism includes a bellows which is sleeved on the rotating mechanism. Second connecting flanges are provided at both ends of the bellows. One of the second connecting flanges is adapted to be connected to the first connecting flange, and the other second connecting flange is connected to the coating cavity.

[0008] Further, the rotating mechanism comprises a rotating shaft, a first sleeve and a second sleeve, the lower part of the rotating shaft is connected to the rotating driving mechanism through a coupling, and the upper part of the rotating shaft is coaxially fixedly connected to the substrate bracket;

[0009] The first sleeve and the second sleeve are coaxially sleeved on the rotating shaft, and the rotating shaft is rotatably connected to the second sleeve through a bearing;

[0010] Both ends of the first sleeve and both ends of the second sleeve are provided with third connecting flanges, the third connecting flange at one end of the first sleeve is adaptively connected to the third connecting flange at one end of the second sleeve, and an insulating member is provided between the two third connecting flanges; the third connecting flange at the other end of the first sleeve is adaptively connected to the first connecting flange, the third connecting flange at the other end of the second sleeve is connected to a fourth connecting flange, and an insulating member is provided between the third connecting flange and the fourth connecting flange;

[0011] The upper end surface of the fourth connecting flange is connected to the drying mechanism through a support.

[0012] Furthermore, the biasing member includes a conductive sheet and a first conductive rod, one end of the conductive sheet is fixedly connected to the outer wall of the second sleeve, and the other end is connected to one end of the first conductive rod, and the other end of the first conductive rod is connected to the first connecting flange through a fifth connecting flange.

[0013] Furthermore, the drying mechanism includes a heating plate and a heat-insulating shielding cover, the heating plate is sleeved inside the heat-insulating shielding cover, the positive and negative electrodes of the heating plate are connected to the heat-insulating shielding cover through a connecting column, one end of the connecting column is connected to a second conductive rod, and the other end of the second conductive rod is connected to the first connecting flange through a fifth connecting flange;

[0014] The lower end of the heat insulation shield is connected to the fourth connecting flange through a support.

[0015] Furthermore, it also includes a temperature measuring component, which is connected to the first connecting flange via a fifth connecting flange, and a temperature measuring end of the temperature measuring component passes through the heat insulation shielding cover and extends to the top of the heating plate.

[0016] Further, the rotation drive mechanism comprises a transmission shaft, a third sleeve and a rotation drive motor, one end of the third sleeve is connected to the first connection flange through a third connection flange, and the other end is connected to the mounting seat through a third connection flange;

[0017] The transmission shaft is rotatably connected to the third sleeve via a bearing inner sleeve, one end of the transmission shaft is connected to the coupling, and the other end is connected to the rotation drive motor via a transmission assembly.

[0018] Furthermore, the transmission shaft is connected with a coaxial encoder.

[0019] Furthermore, a magnetic fluid seal is provided between the transmission shaft and the third sleeve.

[0020] Furthermore, the lifting drive mechanism comprises a lifting drive motor, the output shaft of the lifting drive motor is provided with a screw rod, and the screw rod is threadably matched with the lifting seat.

[0021] Beneficial effects of the present invention:

[0022] 1. The lifting mechanism, drying mechanism and rotating mechanism are all integrated on the lifting seat. When the workpiece is coated, the lifting mechanism and part of the rotating mechanism are located outside the coating chamber, which will not occupy the space of the coating chamber, improve the coating efficiency and will not be contaminated by the coating target material; at the same time, when it is necessary to maintain and repair the lifting mechanism, drying mechanism and rotating mechanism, only the second connecting flange and the flange plate need to be disassembled, and the fixture can be removed as a whole without disassembling the vacuum coating device. The operation is simple, convenient and fast.

[0023] 2. The biasing part is installed on the rotating mechanism. After the fixture is installed on a general vacuum coating device, the biasing function of the plated part can also be realized, with high adaptability and low use cost.

[0024] 3. The coupling is an insulating coupling with a snap-fit ​​structure and is equipped with insulating parts to prevent the leakage of biased external voltage and improve the safety of the fixture.

[0025] 4. The transmission shaft and the third sleeve are sealed by magnetic fluid. The transmission shaft and the third sleeve are sealed by magnetic fluid. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the application and, together with the description, serve to explain the principles of the invention.

[0027] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0028] Figure 1 It is a structural schematic diagram of the present invention;

[0029] Figure 2 This is a schematic diagram of the structure of the present invention without the bellows;

[0030] Figure 3 is a cross-sectional view of the present invention;

[0031] Figure 4 It is a partial structural schematic diagram of the present invention;

[0032] Figure 5 for Figure 3 A magnified view of part A;

[0033] Figure 6 is a cross-sectional view of the drying mechanism;

[0034] Figure 7 It is a schematic diagram of the structure of the heating plate;

[0035] Figure 8 is a cross-sectional view of the rotating mechanism;

[0036] Fig. 9 is a cross-sectional view of the coupling;

[0037] Fig.10 is a schematic diagram of the structure of the transmission component;

[0038] Fig.11 It is a schematic structural diagram of the first connecting flange.

[0039] In the figure:

[0040] 1. Mounting seat; 2. Lifting seat; 3. First connecting flange; 4. Substrate bracket; 5. Bellows; 6. Rotating shaft; 7. First sleeve; 8. Second sleeve; 9. Coupling; 10. Insulating member; 11. Fourth connecting flange; 12. Pillar; 13. Conductive sheet; 14. First conductive rod; 15. Fifth connecting flange; 16. Heating sheet; 17. Heat insulation shield; 18. Connecting column; 19. Second conductive rod; 20. Bearing; 21. Transmission shaft; 22. Third sleeve; 23. Rotating drive motor; 24. Second connecting flange; 25. Third connecting flange; 26. Transmission assembly; 27. Encoder; 28. Lifting drive motor; 29. ​​Screw. DETAILED DESCRIPTION

[0041] In order to make the purpose, technical solution and advantages of the embodiments of the present disclosure clearer, the technical solution of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0042] Unless otherwise defined, the technical terms or scientific terms used in the present disclosure should be understood by people with ordinary skills in the field to which the present disclosure belongs. The "first", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. "Include" or "comprise" and similar words mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0043] like Figure 1-Figure 11 Shown

[0044] A vacuum coating fixture with drying and biasing functions includes a mounting seat 1 and a lifting seat 2. The lifting seat 2 is slidably connected to the mounting seat 1 and can be an existing slide rail type sliding connection. A sliding guide rail is installed on the side of the mounting seat 1. The end face of the lifting seat 2 is fixedly connected to a slider on the sliding guide rail. The lifting seat 2 can slide up and down relative to the mounting seat 1 to facilitate adjusting the height of the lifting seat 2.

[0045] The mounting base 1 is provided with a lifting drive mechanism for driving the lifting base 2 to move up and down, and the lifting drive mechanism is used to provide power for the lifting of the lifting base 2. A first connecting flange 3 is provided on the upper end surface of the lifting base 2, and a coaxial rotating mechanism is connected to the center of the first connecting flange 3. The upper part of the rotating mechanism is connected to a substrate holder 4 for placing the coated workpiece, and the middle part of the rotating mechanism is connected to a drying mechanism and a biasing member. The drying mechanism is located below the substrate holder 4, and the lower part of the rotating mechanism is connected to a rotating drive mechanism.

[0046] The first connecting flange 3 is provided with a sealing mechanism which is sleeved on the rotating mechanism, and the sealing mechanism includes a bellows 5, and the bellows 5 is sleeved on the rotating mechanism. Second connecting flanges 24 are provided at both ends of the bellows 5, one of the second connecting flanges 24 is adaptively connected to the first connecting flange 3, and the other second connecting flange 24 is connected to the outer wall of the top or bottom of the coating chamber, and the drying mechanism and the substrate holder 4 are located in the coating chamber to realize evaporation of the evaporation source from bottom to top or from top to bottom.

[0047] The rotating drive mechanism is used to provide power for the rotating mechanism, so that the substrate holder 4 rotates in the speed range of 3 to 30 rpm, thereby improving the uniformity of the coating on the workpiece; the drying mechanism is used to remove moisture, solvents or other volatile substances on the surface of the plated workpiece, improve the quality and adhesion of the coating, and improve the density of the film layer; the biasing member is used to increase the energy of the charged particles in the vacuum plasma, which helps to clean the substrate and improve the density, hardness and bonding properties of the film layer.

[0048] In the present invention, only a flange plate that matches the second connecting flange 24 is provided at the outer wall of the top or bottom of the vacuum coating chamber to realize the rapid installation and removal of the fixture, which is convenient and quick to use; and the flange plate, the first connecting flange 3 and the second connecting flange 24 can all use vacuum sealing flanges to ensure the sealing of the fixture as a whole and ensure the vacuum after the fixture is connected to the coating chamber. In addition, the lifting mechanism, the drying mechanism and the rotating mechanism are all integrated on the lifting seat 2. When the workpiece is coated, the lifting mechanism and part of the rotating mechanism are all located outside the coating chamber, which will not occupy the space of the coating chamber, improve the coating efficiency and will not be contaminated by the coating target material; at the same time, when the lifting mechanism, the drying mechanism and the rotating mechanism need to be maintained and repaired, only the second connecting flange 24 and the flange plate need to be disassembled, and the fixture can be removed as a whole without disassembling the vacuum coating device, which is simple, convenient and quick to operate. In addition, the biasing member is installed on the rotating mechanism, and the biasing function of the plated workpiece can be realized after the fixture is installed on a general vacuum coating device, which has high adaptability and low use cost.

[0049] In the present invention, after the second connecting flange 24 on the bellows 5 is connected to the coating cavity, the coating cavity is connected to the bellows 5, that is, when the workpiece is coated, the bellows 5 is in a vacuum state. Therefore, the bellows 5 uses a metal bellows and is made of stainless steel. Due to the characteristics of its metal material, it can withstand higher pressure and maintain its stability and reliability in a vacuum environment. In addition, the bellows 5 also has good elasticity and flexibility. When the lifting seat 2 moves upward, the bellows 5 will be squeezed. When the lifting seat 2 moves downward, the bellows 5 rebounds, which can effectively prevent the up and down movement of the lifting seat 2 from damaging the bellows 5.

[0050] Specifically, the lifting drive mechanism includes a lifting drive motor 28, which is fixedly mounted on the lower end surface of the mounting seat 1. The output shaft of the lifting drive motor 28 is provided with a screw 29, the other end of which is rotatably connected to the upper end surface of the mounting seat 1, and the middle of the screw 29 penetrates the lifting seat 2 and is threadedly adapted to the lifting seat 2. The screw 29 and the lifting seat 2 form a ball screw structure, and the lifting drive motor 28 uses a servo motor. The ball screw structure and the private servo motor can realize the precise lifting of the lifting seat 2 and the substrate bracket 4 as a whole, ensuring that the coating workpiece and the evaporation source can be continuously and accurately adjusted within the range of 120mm to 200mm, and then accurately adjust the evaporation distance between the coating workpiece and the evaporation source to improve the coating uniformity.

[0051] In the present invention, the rotating mechanism includes a rotating shaft 6, a first sleeve 7 and a second sleeve 8. The lower part of the rotating shaft 6 is connected to the rotating drive mechanism through a coupling 9, and the upper part of the rotating shaft 6 is coaxially fixedly connected to the substrate holder 4. The rotating shaft 6 is used to drive the substrate holder 4 to rotate synchronously, thereby driving the workpiece to rotate.

[0052] The first sleeve 7 and the second sleeve 8 are both coaxially sleeved on the rotating shaft 6, and the rotating shaft 6 is rotatably connected to the second sleeve 8 through the bearing 20. The first sleeve 7 and the second sleeve 8 are used to provide support for the rotating shaft 6 to ensure the stability of the rotating shaft 6 during rotation; in order to ensure the vacuum state in the bellows 5, the bearing 20 can use a vacuum thrust bearing to ensure the sealing between the rotating shaft 6 and the second sleeve 8.

[0053] Specifically, both ends of the first sleeve 7 and both ends of the second sleeve 8 are provided with third connecting flanges 25, the third connecting flange 25 at one end of the first sleeve 7 is adaptively connected to the third connecting flange 25 at one end of the second sleeve, and an insulating member 10 is provided between the two third connecting flanges 25; the third connecting flange 25 at the other end of the first sleeve 7 is adaptively connected to the first connecting flange 3, the third connecting flange 25 at the other end of the second sleeve 8 is connected to a fourth connecting flange 11, and an insulating member 10 is provided between the third connecting flange 25 and the fourth connecting flange 11;

[0054] The biasing member includes a conductive sheet 13 and a first conductive rod 14. One end of the conductive sheet 13 is provided with a threaded hole and is threadedly fixedly connected to the outer wall of the second sleeve 8, and the other end is connected to one end of the first conductive rod 14. The other end of the first conductive rod 14 is connected to the first connecting flange 3 through a fifth connecting flange 15 and extends the fifth connecting flange 15 for an external power supply. An external voltage is applied to the second sleeve 8 through the external power supply, and the external voltage is transmitted to the substrate bracket 4 and the coated workpiece thereon through the second sleeve 8, the bearing 20 and the rotating shaft 6, thereby realizing the biasing of the coated workpiece. The insulating member 10 is made of ceramic to prevent the external voltage from flowing from the third connecting flange 25 of the second sleeve 8 to the mounting seat 1 and the lifting seat 2, thereby improving the safety of the fixture and preventing leakage. It should be noted that since the third connecting flange 25 of the first sleeve 7 and the third connecting flange 25 of the second sleeve 7 as well as the third connecting flange 25 of the second sleeve 8 and the fourth connecting flange 11 are fixedly connected by sealing bolts, in order to prevent the external voltage from leaking through the sealing bolts, an insulating ceramic sleeve may be provided in the connecting hole of the third connecting flange 25 of the second sleeve 8 for installing the sealing bolts.

[0055] It should be noted that, in the process of bias transmission, the voltage is transmitted to the substrate holder 4 through the second sleeve 8, the bearing 20 and the rotating shaft 6. In order to prevent the bias from being transmitted to the rotating drive mechanism through the rotating shaft 6, the coupling 9 is an insulating coupling with a snap-fit ​​structure, including two connecting ends and an insulating end. The insulating end is snap-fitted and clamped by the two connecting ends, wherein the two connecting ends are made of stainless steel material, which has good anti-magnetic properties while ensuring the connection strength. The two connecting ends are respectively connected to the rotating drive mechanism and the rotating shaft 6 in a one-to-one correspondence; the insulating end is made of PEEK material, ceramic material or other high temperature resistant, It is made of high-strength insulating material, which can not only meet the strength requirements for transmission, but also play an insulating role to prevent bias from flowing through, and is used to protect the rotating drive mechanism; in addition, the coupling 9 uses a snap-fit ​​structure, which is easy to replace and maintain. When one of the components is damaged or worn, the component can be replaced alone without replacing the entire coupling, thereby reducing the cost of use; and the snap-fit ​​structure also helps to achieve uniform distribution of the load. When the coupling 9 transmits torque, the contact point between the connecting end and the insulating end can disperse the stress, reduce local stress concentration, and improve the bearing capacity and service life of the coupling 9.

[0056] In the present invention, the upper end surface of the fourth connecting flange 11 is connected to the drying mechanism through the support 12. Specifically, the drying mechanism includes a heating plate 16 and a heat-insulating shielding cover 17. The heating plate 16 is sleeved in the heat-insulating shielding cover 17. The positive and negative poles of the heating plate 16 are connected to the heat-insulating shielding cover 17 through a connecting column 18. One end of the connecting column 18 is connected to a second conductive rod 19. The other end of the second conductive rod 19 is connected to the first connecting flange 3 through a fifth connecting flange 15. The lower end of the heat-insulating shielding cover 17 is connected to the fourth connecting flange 11 through the support 12.

[0057] like Figure 6 and Figure 7 As shown, the heating plate 16 is a molybdenum-Galvanized alloy heating ring. The molybdenum-Galvanized alloy has high temperature tolerance, high thermal conductivity, and good corrosion resistance. It can be heated to 800°C at most. Since the overall thickness of the molybdenum-Galvanized alloy heating ring is relatively thin, in order to ensure the overall strength of the heating ring, a reinforcement layer is also connected to the lower end surface of the heating ring. The reinforcement layer is connected to the molybdenum-Galvanized alloy heating ring through a connecting column 18, that is, the connecting column 18 passes through the thermal insulation shielding cover 17, the reinforcement layer and the molybdenum-Galvanized alloy heating ring in sequence and fixes them together. At the same time, an external power supply is connected through the second conductive rod 19 to provide power to the heating plate 16. The power supply adopts a low voltage and high current mode to generate a large amount of heat.

[0058] It should be noted that when the heating plate 16 is powered on for heating, in order to ensure safety, the reinforcing layer uses a hard high-temperature resistant insulating material, such as quartz glass, which has a hard texture and can improve the overall strength of the molybdenum alloy heating ring, has strong high-temperature stability, and can also be insulated. In addition, the connecting column 18 uses a bolt structure, so ceramic bolts can be used, but the cost is high. In order to reduce the cost, ordinary bolts can be used, and ceramic gaskets are used to insulate and separate the heat insulation shield 17 from the molybdenum alloy heating ring to avoid leakage.

[0059] The heating plate 16 generates heat radiation when heated, and the heat-insulating shielding cover 17 can gather the heat radiation and concentrate the heat under the substrate bracket 4, which can reduce the heat leakage and improve the drying efficiency of the coated workpiece. In addition, the heat-insulating shielding cover 17 can also protect the heating plate 16, block most of the evaporation target materials, and prevent excessive evaporation target materials from accumulating on the heating plate 16, affecting the service life of the heating plate 16. The heat-insulating shielding cover 17 is a multi-layer structure, preferably a three-layer structure, and is made of stainless steel.

[0060] In order to facilitate real-time detection of the temperature of the substrate holder 4 and keep the coated workpiece at the optimal drying temperature, a temperature measuring component 30 is also provided. The temperature measuring component 30 adopts a thermocouple. One end of the temperature measuring component 30 is connected to the first connecting flange 3 through the fifth connecting flange 15 and extends the fifth connecting flange 15 for an external power supply. The fifth connecting flange 15 and the first connecting flange 3 both use vacuum sealing flanges to ensure the overall sealing of the fixture; the temperature measuring end of the other end of the temperature measuring component 30 passes through the side of the heat insulation shielding cover 17 and extends to the top of the heating plate 16 for real-time detection of the temperature of the substrate holder 4.

[0061] In the present invention, the rotation drive mechanism includes a transmission shaft 21, a third sleeve 22 and a rotation drive motor 23. One end of the third sleeve 22 is connected to the first connecting flange 3 through the third connecting flange 25, and the other end is connected to the mounting seat 1 through the third connecting flange 25; the transmission shaft 21 is rotatably connected to the third sleeve 22 through the inner sleeve of the bearing 20, one end of the transmission shaft 21 is connected to the connecting end of the coupling 9, and the other end is connected to the rotation drive motor 23 through a transmission assembly 26. The transmission assembly 26 can be a belt transmission structure, a gear transmission structure, etc. In the present invention, the transmission assembly 26 uses a synchronous toothed belt, that is, a gear is provided on the transmission shaft 21, and the output shaft of the rotation drive motor 23 is connected to a planetary reducer. The output shaft of the planetary reducer is provided with a gear, and the two gears are connected by a gear belt to drive the rotation of the transmission shaft 21.

[0062] In order to ensure the sealing between the transmission shaft 21 and the third sleeve 22, and to ensure that the bellows 5 is in a vacuum state, the transmission shaft 21 and the third sleeve 22 are sealed by a magnetic fluid, such as Figure 5As shown, a positive pole shoe, a permanent magnet and a negative pole shoe are sequentially sleeved on the transmission shaft 21, and magnetic fluid is provided between the positive pole shoe and the transmission shaft 21 and between the negative pole shoe and the transmission shaft 21. The permanent magnet forms a magnetic circuit between the positive pole shoe and the negative pole shoe, allowing the magnetic fluid to adhere tightly to the transmission shaft 21, which can improve the sealing performance without affecting the normal rotation of the transmission shaft.

[0063] One end of the transmission shaft 21 connected to the transmission assembly 26 is also connected to a coaxial encoder 27, which is used to detect the rotation speed of the transmission shaft 21 in real time, so that the rotation speed of the transmission shaft 21 is maintained within the range of 3 to 30 rpm, thereby improving the uniformity of the coating.

[0064] (1) Unless otherwise defined, in the embodiments of the present disclosure and the accompanying drawings, the same reference numerals represent the same meanings.

[0065] (2) In the drawings of the embodiments of the present disclosure, only the structures related to the embodiments of the present disclosure are involved, and other structures can refer to the general design.

[0066] (3) For the sake of clarity, parts or regions are enlarged in the drawings used to describe the embodiments of the present disclosure. It is understood that when an element is referred to as being "on" or "under" another element, the element may be "directly" "on" or "under" the other element, or there may be intervening elements.

[0067] The above is only a specific embodiment of the present disclosure, but the protection scope of the present disclosure is not limited thereto. Any person skilled in the art who is familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present disclosure, which should be included in the protection scope of the present disclosure. Therefore, the protection scope of the present disclosure should be based on the protection scope of the claims.

Claims

1. A vacuum coating fixture with drying and biasing functions, comprising a mounting seat (1) and a lifting seat (2), wherein the lifting seat (2) is slidably connected to the mounting seat (1), and the mounting seat (1) is provided with a lifting drive mechanism for driving the lifting seat (2) to move up and down, characterized in that: The upper end surface of the lifting seat (2) is provided with a first connecting flange (3), the center of the first connecting flange (3) is connected to a coaxial rotating mechanism, the upper part of the rotating mechanism is connected to a substrate bracket (4) for placing a coating workpiece, the middle part of the rotating mechanism is connected to a drying mechanism and a biasing member, the drying mechanism is located below the substrate bracket (4), and the lower part of the rotating mechanism is connected to a rotating driving mechanism; The first connecting flange (3) is provided with a sealing mechanism which is externally mounted on the rotating mechanism. The sealing mechanism comprises a bellows (5). The bellows (5) is externally mounted on the rotating mechanism. Second connecting flanges (24) are provided at both ends of the bellows (5). One of the second connecting flanges (24) is adaptively connected to the first connecting flange (3), and the other second connecting flange (24) is connected to the coating cavity.

2. The vacuum coating fixture with drying and biasing functions according to claim 1, characterized in that: The rotating mechanism comprises a rotating shaft (6), a first sleeve (7) and a second sleeve (8); the lower part of the rotating shaft (6) is connected to the rotating drive mechanism via a coupling (9), and the upper part of the rotating shaft (6) is coaxially fixedly connected to the substrate bracket (4); The first sleeve (7) and the second sleeve (8) are coaxially mounted on the rotating shaft (6), and the rotating shaft (6) is rotatably connected to the second sleeve (8) via a bearing (20); Both ends of the first sleeve (7) and both ends of the second sleeve (8) are provided with third connecting flanges (25); the third connecting flange (25) at one end of the first sleeve (7) is adaptively connected to the third connecting flange (25) at one end of the second sleeve, and an insulating member (10) is provided between the two third connecting flanges (25); the third connecting flange (25) at the other end of the first sleeve (7) is adaptively connected to the first connecting flange (3), the third connecting flange (25) at the other end of the second sleeve (8) is connected to a fourth connecting flange (11), and an insulating member (10) is provided between the third connecting flange (25) and the fourth connecting flange (11); The upper end surface of the fourth connecting flange (11) is connected to the drying mechanism via a support (12).

3. The vacuum coating fixture with drying and biasing functions according to claim 2, characterized in that: The biasing member comprises a conductive sheet (13) and a first conductive rod (14); one end of the conductive sheet (13) is fixedly connected to the outer wall of the second sleeve (8), and the other end is connected to one end of the first conductive rod (14); and the other end of the first conductive rod (14) is connected to the first connecting flange (3) via a fifth connecting flange (15).

4. The vacuum coating fixture with drying and biasing functions according to claim 2, characterized in that: The drying mechanism comprises a heating plate (16) and a heat-insulating shielding cover (17); the heating plate (16) is sleeved inside the heat-insulating shielding cover (17); the positive and negative electrodes of the heating plate (16) are connected to the heat-insulating shielding cover (17) via a connecting column (18); one end of the connecting column (18) is connected to a second conductive rod (19); the other end of the second conductive rod (19) is connected to the first connecting flange (3) via a fifth connecting flange (15); The lower end of the heat-insulating shield (17) is connected to the fourth connecting flange (11) via a support (12).

5. The vacuum coating fixture with drying and biasing functions according to claim 4, characterized in that: It also includes a temperature measuring component (30), which is connected to the first connecting flange (3) via a fifth connecting flange (15), and a temperature measuring end of the temperature measuring component (30) passes through the heat insulation shielding cover (17) and extends above the heating plate (16).

6. The vacuum coating fixture with drying and biasing functions according to claim 2, characterized in that: The rotation drive mechanism comprises a transmission shaft (21), a third sleeve (22) and a rotation drive motor (23); one end of the third sleeve (22) is connected to the first connection flange (3) via a third connection flange (25), and the other end of the third sleeve (22) is connected to the mounting seat (1) via the third connection flange (25); The transmission shaft (21) is rotatably connected to the third sleeve (22) through the inner sleeve of the bearing (20); one end of the transmission shaft (21) is connected to the coupling (9), and the other end is connected to the rotation drive motor (23) through a transmission assembly (26).

7. The vacuum coating fixture with drying and biasing functions according to claim 6, characterized in that: The transmission shaft (21) is connected to a coaxial encoder (27).

8. The vacuum coating fixture with drying and biasing functions according to claim 6, characterized in that: A magnetic fluid seal is provided between the transmission shaft (21) and the third sleeve (22).

9. The vacuum coating fixture with drying and biasing functions according to claim 1, characterized in that: The lifting drive mechanism comprises a lifting drive motor (28), the output shaft of the lifting drive motor (28) is provided with a screw rod (29), and the screw rod (29) is threadably matched with the lifting seat (2).

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