Method for increasing pressure of furnace tube and prolonging service life of furnace tube

Abstract

The invention discloses a method for increasing the pressure of a furnace tube and prolonging the service life of the furnace tube. The method comprises the following steps: measuring the square resistance of a diffusion layer, evaluating the uniformity and doping concentration of a boron diffusion layer, observing the surface appearance and interface quality of the diffusion layer, and finely adjusting the deposition rate and diffusion process parameters so as to realize the optimal junction making effect; the service life of the furnace tube is prolonged by controlling the pressure of the furnace tube, the influence of the pressure on a furnace tube material is analyzed, process parameters are optimized, and temperature control and flow adjustment are carried out. According to the method for improving the pressure of the furnace tube and prolonging the service life of the furnace tube, by improving the pressure of the boron diffusion furnace tube, finely controlling technological parameters and implementing regular maintenance and detection, the service life of the boron diffusion furnace tube is remarkably prolonged, meanwhile, the production efficiency and the product quality are guaranteed, the contribution is made to sustainable development of the photovoltaic industry, and the method is worthy of popularization and application. Operation environment of the furnace tube is optimized, service life of the furnace tube is prolonged, maintenance cost is reduced, and production efficiency is improved.

Description

Technical Field

[0001] The invention relates to the technical field of furnace tube process improvement, and in particular to a method for increasing furnace tube pressure and extending furnace tube service life. Background Art

[0002] A method to extend the service life of furnace tubes is to extend the service life by improving the furnace tube pressure through boron diffusion. In the photovoltaic cell manufacturing process, the boron diffusion step is crucial to forming an efficient PN junction. The performance and life of the boron diffusion furnace, as the core equipment of this step, directly affect production efficiency and cost control. With the continuous development of science and technology, people's requirements for methods to extend the service life of furnace tubes are getting higher and higher.

[0003] The existing furnace tube processing methods have certain drawbacks when used. In view of the fact that the boron expansion furnace operates in a high temperature, high pressure and corrosive gas environment, the furnace tube and its sealing structure are easily damaged, resulting in a shortened life. Therefore, this scheme aims to optimize the internal pressure of the boron expansion furnace by adjusting the process formula, and combine other auxiliary measures to effectively improve the service life of the furnace tube. To this end, we propose a method to increase the furnace tube pressure and extend the service life of the furnace tube. Summary of the invention

[0004] Technical problem to be solved: In view of the shortcomings of the prior art, the present invention provides a method for increasing the furnace tube pressure and extending the service life of the furnace tube. By increasing the pressure of the boron expansion furnace tube, finely controlling the process parameters and implementing regular maintenance and inspection, the method aims to significantly improve the service life of the boron expansion furnace, while ensuring production efficiency and product quality, contributing to the sustainable development of the photovoltaic industry, optimizing the operating environment of the furnace tube, extending the service life of the furnace tube, reducing maintenance costs, and improving production efficiency, which can effectively solve the problems in the background technology.

[0005] Technical solution: To achieve the above purpose, the technical solution adopted by the present invention is: a method for increasing the furnace tube pressure and extending the service life of the furnace tube, comprising the following steps: S1: Material preparation: Prepare the materials needed for furnace tube processing, including N-type silicon wafers, boron trichloride as a boron source, nitrogen, and oxygen; S2: Equipment preparation: Prepare the equipment needed for furnace tube processing, including diffusion furnace, vacuum system, gas flow meter, temperature controller, four-probe resistance tester, microscope; S3: Sample testing and analysis: Use a four-probe resistance tester to measure the sheet resistance of the diffusion layer, evaluate the uniformity and doping concentration of the boron diffusion layer, observe the surface morphology and interface quality of the diffusion layer through a microscope, and fine-tune the deposition rate and diffusion process parameters based on the test results to achieve the best bonding effect; S4: Extend the service life of the furnace tube by controlling the pressure of the furnace tube, analyze the influence of pressure on the furnace tube material, optimize the process parameters, and perform temperature control and flow adjustment; S5: Experimental tracking: After uniformly mixing the sheets, ensure that the single variable principle does not change, including materials, process formula, and experimental environment. After reaching the screen, compare the data before and after the experiment to ensure the accuracy of the experimental data; S6: Experimental result analysis: Analyze the experimental results. The experimental results show that there is basically no difference in efficiency before and after the experiment. Check the experimental result yield; S7: Preventive maintenance: Develop a detailed furnace tube maintenance plan, including regular cleaning, checking sealing performance, and replacing worn parts to ensure that the equipment is always in optimal working condition; S8: Online monitoring: Introduce online monitoring technology, including infrared thermal imaging and vibration analysis, to monitor the operation status of furnace tubes in real time, and promptly detect and deal with potential problems; S9: Extending furnace tube life: Through the above measures, it is expected that the service life of the furnace tube can be increased by at least 20%, significantly reducing replacement costs, reducing downtime caused by furnace tube failure, and improving overall production efficiency.

[0006] As a preferred technical solution of the present application, in the steps S1-S8, the furnace tube pressure is increased to optimize the operating environment of the furnace tube, extend the service life of the furnace tube, reduce maintenance costs, and improve production efficiency.

[0007] As a preferred technical solution of the present application, in the steps S1-S8, the internal pressure of the boron expansion furnace is optimized by adjusting the process formula, combined with auxiliary measures of preventive maintenance and online monitoring, to effectively improve the service life of the furnace tube.

[0008] As a preferred technical solution of the present application, airflow control is performed in the step S4. Under the high-pressure environment, the airflow is more stable, which helps to reduce gas turbulence and local overheating, thereby protecting the furnace tube.

[0009] As a preferred technical solution of the present application, chemical reaction control is performed in the step S4, and appropriate high pressure can optimize the chemical reaction conditions, reduce the occurrence of side reactions, and extend the service life of the furnace tube.

[0010] As a preferred technical solution of the present application, material strength testing is performed in the step S4. Under a high-pressure environment, the mechanical strength and corrosion resistance of the furnace tube material will be improved.

[0011] As a preferred technical solution of the present application, thermal stress detection is performed in the step S4. Appropriate pressure can reduce thermal stress and prevent the furnace tube from being damaged due to uneven thermal expansion.

[0012] As a preferred technical solution of the present application, in the step S4, the process parameters are optimized to increase the furnace tube pressure, the target pressure range is set according to theoretical analysis and experimental data, a high-precision pressure sensor is installed, the pressure changes in the furnace tube are monitored in real time, and an automatic regulating valve is used to automatically adjust the air intake volume according to sensor feedback to maintain a constant pressure.

[0013] As a preferred technical solution of the present application, the temperature curve is optimized in the step S4 to ensure the temperature uniformity of the furnace tube in the high temperature section and reduce thermal stress.

[0014] As a preferred technical solution of the present application, the gas flow rate is adjusted in the step S4 to ensure the stability of the airflow and reduce local overheating and airflow turbulence.

[0015] Beneficial effects: Compared with the prior art, the present invention provides a method for increasing furnace tube pressure and extending furnace tube service life, which has the following beneficial effects: the method for increasing furnace tube pressure and extending furnace tube service life aims to significantly increase the service life of the boron expansion furnace by increasing the boron expansion furnace tube pressure, finely controlling process parameters, and implementing regular maintenance and inspection, while ensuring production efficiency and product quality, contributing to the sustainable development of the photovoltaic industry, optimizing the operating environment of the furnace tube, extending the service life of the furnace tube, reducing maintenance costs, and improving production efficiency; Extending the life of furnace tubes: Through the above measures, it is expected that the service life of furnace tubes can be increased by at least 20%, significantly reducing replacement costs; Improve production efficiency: reduce downtime caused by furnace tube failure and improve overall production efficiency; Improved product quality: A more stable boron diffusion process helps improve the conversion efficiency and consistency of photovoltaic cells; Environmental benefits: The optimized process reduces the emission of harmful gases and meets the requirements of green manufacturing. The entire method of extending the service life of the furnace tube is simple in structure, easy to operate, and has better results than traditional methods. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 The present invention is a schematic diagram of the overall process of a method for increasing furnace tube pressure and extending furnace tube service life.

[0017] Figure 2 The present invention is a schematic structural diagram of a process recipe before adjustment in a method for increasing furnace tube pressure and extending furnace tube service life.

[0018] Figure 3 The present invention is a schematic structural diagram of an adjusted process formula in a method for increasing furnace tube pressure and extending furnace tube service life.

[0019] Figure 4The present invention is a schematic structural diagram of sample detection and analysis results in a method for increasing furnace tube pressure and extending furnace tube service life.

[0020] Figure 5 This is a schematic diagram of experimental result data in a method for increasing furnace tube pressure and extending furnace tube service life of the present invention.

[0021] Figure 6 This is a schematic diagram of the defect rate in a method for increasing furnace tube pressure and extending furnace tube service life according to the present invention. DETAILED DESCRIPTION

[0022] The technical scheme of the present invention will be clearly and completely described below in conjunction with the accompanying drawings and specific embodiments, but it will be understood by those skilled in the art that the following described embodiments are part of embodiments of the present invention, rather than all embodiments, and are only used to illustrate the present invention, and should not be considered as limiting the scope of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative work are within the scope of protection of the present invention. If specific conditions are not specified in the embodiments, they are carried out according to normal conditions or conditions recommended by the manufacturer. If the manufacturer is not specified in the reagents or instruments used, they are all conventional products that can be purchased commercially.

[0023] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0024] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0025] like Figure 1-6 As shown, a method for increasing furnace tube pressure and extending furnace tube service life comprises the following steps: S1: Material preparation: Prepare the materials needed for furnace tube processing, including N-type silicon wafers, boron trichloride as a boron source, nitrogen, and oxygen; S2: Equipment preparation: Prepare the equipment needed for furnace tube processing, including diffusion furnace, vacuum system, gas flow meter, temperature controller, four-probe resistance tester, microscope; S3: Sample testing and analysis: Use a four-probe resistance tester to measure the sheet resistance of the diffusion layer, evaluate the uniformity and doping concentration of the boron diffusion layer, observe the surface morphology and interface quality of the diffusion layer through a microscope, and fine-tune the deposition rate and diffusion process parameters based on the test results to achieve the best bonding effect; S4: Extend the service life of the furnace tube by controlling the pressure of the furnace tube, analyze the influence of pressure on the furnace tube material, optimize the process parameters, and perform temperature control and flow adjustment; S5: Experimental tracking: After uniformly mixing the sheets, ensure that the single variable principle does not change, including materials, process formula, and experimental environment. After reaching the screen, compare the data before and after the experiment to ensure the accuracy of the experimental data; S6: Experimental result analysis: Analyze the experimental results. The experimental results show that there is basically no difference in efficiency before and after the experiment. Check the experimental result yield; S7: Preventive maintenance: Develop a detailed furnace tube maintenance plan, including regular cleaning, checking sealing performance, and replacing worn parts to ensure that the equipment is always in optimal working condition; S8: Online monitoring: Introduce online monitoring technology, including infrared thermal imaging and vibration analysis, to monitor the operation status of furnace tubes in real time, and promptly detect and deal with potential problems; S9: Extending furnace tube life: Through the above measures, it is expected that the service life of the furnace tube can be increased by at least 20%, significantly reducing replacement costs, reducing downtime caused by furnace tube failure, and improving overall production efficiency.

[0026] By increasing the pressure of the boron expansion furnace tube, finely controlling the process parameters and implementing regular maintenance and inspection, the aim is to significantly improve the service life of the boron expansion furnace, while ensuring production efficiency and product quality, contributing to the sustainable development of the photovoltaic industry, optimizing the operating environment of the furnace tube, extending the service life of the furnace tube, reducing maintenance costs and improving production efficiency.

[0027] Furthermore, in steps S1-S8, by increasing the furnace tube pressure, the operating environment of the furnace tube is optimized, the service life of the furnace tube is extended, the maintenance cost is reduced, and the production efficiency is improved.

[0028] Furthermore, in steps S1-S8, the pressure inside the tube of the boron expansion furnace is optimized by adjusting the process recipe, and the service life of the furnace tube is effectively improved by combining the auxiliary measures of preventive maintenance and online monitoring.

[0029] Furthermore, in step S4, airflow control is performed. Under high pressure, the airflow is more stable, which helps to reduce gas turbulence and local overheating, thereby protecting the furnace tubes.

[0030] Furthermore, in step S4, chemical reaction control is performed, and appropriate high pressure can optimize chemical reaction conditions, reduce the occurrence of side reactions, and extend the service life of the furnace tube.

[0031] Furthermore, in step S4, a material strength test is performed. Under a high pressure environment, the mechanical strength and corrosion resistance of the furnace tube material will be improved.

[0032] Furthermore, thermal stress detection is performed in step S4, and appropriate pressure can reduce thermal stress and prevent the furnace tube from being damaged due to uneven thermal expansion.

[0033] Furthermore, in step S4, the process parameters are optimized to increase the furnace tube pressure. Based on theoretical analysis and experimental data, the target pressure range is set, a high-precision pressure sensor is installed, the pressure changes in the furnace tube are monitored in real time, and an automatic regulating valve is used to automatically adjust the air intake volume according to sensor feedback to maintain a constant pressure.

[0034] Furthermore, in step S4, the temperature curve is optimized to ensure the temperature uniformity of the furnace tube in the high temperature section and reduce thermal stress.

[0035] Furthermore, in step S4, the gas flow rate is adjusted to ensure stable airflow and reduce local overheating and airflow turbulence.

[0036] The role of furnace tube pressure: Airflow control: Under high pressure, the airflow is more stable, which helps to reduce gas turbulence and local overheating, thereby protecting the furnace tubes.

[0037] Chemical reaction control: Appropriate high pressure can optimize chemical reaction conditions, reduce the occurrence of side reactions, and extend the service life of furnace tubes.

[0038] Effect of pressure on furnace tube materials: Material strength: Under high pressure environment, the mechanical strength and corrosion resistance of the furnace tube material will be improved.

[0039] Thermal stress: Appropriate pressure can reduce thermal stress and prevent furnace tubes from being damaged due to uneven thermal expansion.

[0040] Current process analysis Current situation assessment: Furnace tube usage: record the current furnace tube service life, common failure points and maintenance costs.

[0041] Pressure parameters: record the pressure parameters of the current furnace tube operation to identify deficiencies and room for improvement.

[0042] Parameter optimization strategy Increase furnace tube pressure Target pressure setting: Target range: According to theoretical analysis and experimental data, set the target pressure range, for example 100-150mbar.

[0043] Pressure control technology: Pressure sensor: Install a high-precision pressure sensor to monitor the pressure changes in the furnace tube in real time.

[0044] Automatic regulating valve: Automatic regulating valve is used to automatically adjust the air intake according to sensor feedback to maintain constant pressure.

[0045] Process parameter optimization Temperature Control: Temperature curve: Optimize the temperature curve to ensure the temperature uniformity of the furnace tube in the high temperature section and reduce thermal stress.

[0046] Gas flow: Flow adjustment: Adjust the gas flow to ensure stable airflow and reduce local overheating and airflow turbulence.

[0047] Compare the process formula before adjustment with the process formula after adjustment, such as Figure 2 and Figure 3 shown.

[0048] Implementation Preparation: Materials: N-type silicon wafer, boron trichloride (BCl3) as boron source, nitrogen (N2), oxygen (O2), etc.

[0049] Equipment: diffusion furnace, vacuum system, gas flow meter, temperature controller, four-probe resistance tester, microscope, etc.

[0050] Sample testing and analysis The sheet resistance of the diffusion layer was measured using a four-probe resistance tester to evaluate the uniformity and doping concentration of the boron diffusion layer. The surface morphology and interface quality of the diffusion layer were observed using a microscope. Based on the test results, the deposition rate and diffusion process parameters were fine-tuned to achieve the best bonding effect.

[0051] like Figure 4 As shown, the uniformity within the chip is between 1.4% and 3.1%, achieving the expected effect.

[0052] Tracking process: After uniform mixing, ensure that the single variable principle (materials, process formula, experimental environment, etc.) does not change.

[0053] After reaching the screen, compare the data before and after the experiment to ensure the accuracy of the experimental data.

[0054] Experimental results analysis: like Figure 5 As shown, the experimental results show that there is basically no difference in efficiency before and after the experiment; like Figure 6 As shown, the yield rate of 99.7% is consistent with the production line, and no new defects are generated.

[0055] Regular maintenance and testing Preventive maintenance: Develop a detailed furnace tube maintenance plan, including regular cleaning, checking sealing performance, replacing worn parts, etc., to ensure that the equipment is always in the best working condition.

[0056] Online monitoring: Introduce online monitoring technologies, such as infrared thermal imaging and vibration analysis, to monitor the operation status of furnace tubes in real time and promptly discover and deal with potential problems.

[0057] Expected results and evaluation Extending furnace tube life: Through the above measures, it is expected that the service life of furnace tubes can be increased by at least 20%, significantly reducing replacement costs.

[0058] Improve production efficiency: reduce downtime caused by furnace tube failure and improve overall production efficiency.

[0059] Improved product quality: A more stable boron diffusion process helps improve the conversion efficiency and consistency of photovoltaic cells.

[0060] Environmental benefits: The optimized process reduces the emission of harmful gases and meets the requirements of green manufacturing.

[0061] It should be noted that, in this article, relational terms such as first and second (number one, number two), etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "including one..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0062] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited by the above embodiments, and the above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, and these changes and improvements all fall within the scope of the present invention to be protected.

Claims

1. A method for increasing furnace tube pressure and extending furnace tube service life, characterized in that: The steps include: S1: Material preparation: Prepare the materials needed for furnace tube processing, including N-type silicon wafers, boron trichloride as a boron source, nitrogen, and oxygen; S2: Equipment preparation: Prepare the equipment needed for furnace tube processing, including diffusion furnace, vacuum system, gas flow meter, temperature controller, four-probe resistance tester, microscope; S3: Sample testing and analysis: Use a four-probe resistance tester to measure the sheet resistance of the diffusion layer, evaluate the uniformity and doping concentration of the boron diffusion layer, observe the surface morphology and interface quality of the diffusion layer through a microscope, and fine-tune the deposition rate and diffusion process parameters based on the test results to achieve the best bonding effect; S4: Extend the service life of the furnace tube by controlling the pressure of the furnace tube, analyze the influence of pressure on the furnace tube material, optimize the process parameters, and perform temperature control and flow adjustment; S5: Experimental tracking: After uniformly mixing the sheets, ensure that the single variable principle does not change, including materials, process formula, and experimental environment. After reaching the screen, compare the data before and after the experiment to ensure the accuracy of the experimental data; S6: Experimental result analysis: Analyze the experimental results. The experimental results show that there is basically no difference in efficiency before and after the experiment. Check the experimental result yield; S7: Preventive maintenance: Develop a detailed furnace tube maintenance plan, including regular cleaning, checking sealing performance, and replacing worn parts to ensure that the equipment is always in optimal working condition; S8: Online monitoring: Introduce online monitoring technology, including infrared thermal imaging and vibration analysis, to monitor the operation status of furnace tubes in real time, and promptly detect and deal with potential problems; S9: Extending furnace tube life: Through the above measures, it is expected that the service life of the furnace tube can be increased by at least 20%, significantly reducing replacement costs, reducing downtime caused by furnace tube failure, and improving overall production efficiency.

2. The method for increasing furnace tube pressure and extending furnace tube service life according to claim 1, characterized in that: In the steps S1-S8, the furnace tube pressure is increased to optimize the operating environment of the furnace tube, extend the service life of the furnace tube, reduce maintenance costs, and improve production efficiency.

3. The method for increasing furnace tube pressure and extending furnace tube service life according to claim 1, characterized in that: In the steps S1-S8, the inner tube pressure of the boron expansion furnace is optimized by adjusting the process formula, and the auxiliary measures of preventive maintenance and online monitoring are combined to effectively improve the service life of the furnace tube.

4. The method for increasing furnace tube pressure and extending furnace tube service life according to claim 1, characterized in that: In the step S4, airflow control is performed. Under high pressure environment, the airflow is more stable, which helps to reduce gas turbulence and local overheating, thereby protecting the furnace tube.

5. The method for increasing furnace tube pressure and extending furnace tube service life according to claim 1, characterized in that: In the step S4, chemical reaction control is performed, and appropriate high pressure can optimize chemical reaction conditions, reduce the occurrence of side reactions, and extend the service life of the furnace tube.

6. The method for increasing furnace tube pressure and extending furnace tube service life according to claim 1, characterized in that: In the step S4, material strength testing is performed. Under high pressure, the mechanical strength and corrosion resistance of the furnace tube material will be improved.

7. The method for increasing furnace tube pressure and extending furnace tube service life according to claim 1, characterized in that: In the step S4, thermal stress detection is performed, and appropriate pressure can reduce thermal stress and prevent the furnace tube from being damaged due to uneven thermal expansion.

8. The method for increasing furnace tube pressure and extending furnace tube service life according to claim 1, characterized in that: In the step S4, the process parameters are optimized to increase the furnace tube pressure. According to theoretical analysis and experimental data, the target pressure range is set, a high-precision pressure sensor is installed, the pressure change in the furnace tube is monitored in real time, and an automatic regulating valve is used to automatically adjust the air intake according to sensor feedback to maintain a constant pressure.

9. The method for increasing furnace tube pressure and extending furnace tube service life according to claim 1, characterized in that: In the step S4, the temperature curve is optimized to ensure the temperature uniformity of the furnace tube in the high temperature section and reduce thermal stress.

10. The method for increasing furnace tube pressure and extending furnace tube service life according to claim 1, characterized in that: In the step S4, the gas flow rate is adjusted to ensure stable air flow and reduce local overheating and air flow turbulence.

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