MTS heat exchanger of CVD furnace

Abstract

The MTS heat exchanger of the CVD furnace comprises a device body, the device body comprises a heat exchanger tank body, the heat exchanger tank body comprises a heat exchanger bottom cover, a lower heat exchanger, a heat exchanger middle section, an upper heat exchanger and a heat exchanger top cover, and the heat exchanger bottom cover, the lower heat exchanger, the heat exchanger middle section, the upper heat exchanger and the heat exchanger top cover are sealed through PTFE gaskets; 115 heat exchange pipes are arranged between flanges at the two ends of the lower heat exchanger and flanges at the two ends of the upper heat exchanger, MTS gas circulates through pipelines on the inner walls of the heat exchange pipes, and gaps formed between the inner wall of a cylinder of the lower heat exchanger or the upper heat exchanger and the outer walls of the heat exchange pipes are used for heating silicone oil steam of a heating medium. MTS is colorless liquid, has pungent stink, is flammable, explosive and easy to deliquesce, and is easy to decompose and produce irritant HCL gas when encountering water or air, so that silicone oil steam instead of water vapor is used for heating, all joints need to be firmly sealed, otherwise, leakage is easy to occur, and unnecessary loss is caused.

Description

Technical Field

[0001] The invention relates to the field of silicon carbide furnace equipment, and in particular to an MTS heat exchanger of a CVD furnace. Background Art

[0002] CVD furnace needs to use H in the coating process 2 、N 2 , HCL, MTS and other gases. According to the process requirements, the MTS used in the coating process is MTS gas at about 120°C, while MTS is liquid at room temperature. Based on this, we designed a heat exchanger device that can heat MTS liquid to MTS gas, and can transport MTS gas to the CVD furnace for coating. Summary of the invention

[0003] In view of the problems existing in the prior art, the present invention provides an MTS heat exchanger for a CVD furnace to solve at least one of the above technical problems.

[0004] The technical solution of the present invention is: an MTS heat exchanger for a CVD furnace, comprising a device body, characterized in that the device body comprises a heat exchanger tank body, the heat exchanger tank body comprises a heat exchanger bottom cover, a lower heat exchanger, a heat exchanger middle section, an upper heat exchanger and a heat exchanger top cover, and a PTFE pad is used between each of the two for sealing;

[0005] There are 115 heat exchange tubes between the flanges at both ends of the lower heat exchanger and the upper heat exchanger. The MTS gas flows through the inner wall of the heat exchange tube, and the gap formed between the inner wall of the lower heat exchanger or the upper heat exchanger cylinder and the outer wall of the heat exchange tube is used to pass the silicone oil vapor of the heat medium for heating.

[0006] MTS is a colorless liquid with a pungent odor. It is flammable, explosive, and deliquescent. It is easily decomposed to produce irritating HCL gas when it comes into contact with water or air. Therefore, silicone oil vapor is used for heating instead of water vapor. All joints must be sealed securely, otherwise it is easy to leak and cause unnecessary losses.

[0007] Further preferably, the MTS heat exchanger device is connected to an MTS evaporation device, and an MTS storage tank is provided in the MTS evaporation device. The MTS storage tank stores MTS liquid, and the MTS liquid flows into the MTS liquid inlet from the bottom pipe of the MTS storage tank, and the silicone oil vapor of the heat medium enters from the first heat medium inlet and flows out from the first heat medium outlet. The silicone oil vapor heats the MTS flowing through the inner wall of the heat exchange tube of the lower heat exchanger.

[0008] Further preferably, a first thermocouple is provided at the upper end of the first heat medium inlet.

[0009] Used to measure the silicone oil vapor temperature at the inlet, which is generally around 120°C.

[0010] Further preferably, a first heat medium exhaust auxiliary part is provided at the upper end of the first heat medium outlet, which is used to adjust the pressure between the inner wall of the cylinder of the lower heat exchanger and the outer wall of the heat exchange tube to be controlled at about 1ATM.

[0011] Further preferably, a pipeline is provided between the MTS storage tank and the MTS gas inlet, and a manual valve is provided on the pipeline. When the pressure in the MTS storage tank is too high (exceeding 0.22MPa), the manual valve here is opened, and a small portion of the MTS gas flows into the MTS gas inlet, and the temperature of the MTS gas here can be relatively low because the MTS gas here flows back from the MTS liquid inlet.

[0012] For further optimization, an upper heat exchanger is provided above the middle section of the heat exchanger to further heat the MTS gas. Silicone oil vapor enters from the second heat medium inlet and flows out from the second heat medium outlet. A second thermocouple is also provided for temperature measurement, and the second heat medium exhaust auxiliary part regulates the exhaust pressure.

[0013] Further preferably, a pressure gauge and a third thermocouple are installed on the outer wall of the middle section of the heat exchanger. When the MTS gas enters the middle section of the heat exchanger, there is a pressure gauge for directly measuring the pressure of the MTS gas and a thermocouple for measuring the temperature.

[0014] More preferably, the MTS gas flows out from the MTS gas outlet, passes through the pipeline of the MTS evaporation device for pressure, temperature and flow measurement, and finally flows into the CVD furnace for coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the front side of the present invention;

[0016] Figure 2 It is a schematic diagram of the overall structure of the back side of the present invention.

[0017] In the figure: 1. Heat exchanger bottom cover 2. Lower heat exchanger 3. Heat exchanger middle section

[0018] 4. Upper heat exchanger 5. Heat exchanger cover 6. MTS gas outlet

[0019] 7. Second heat medium exhaust accessory 8. Second heat medium outlet 9. Second thermocouple

[0020] 10. Second heat medium inlet 11. MTS liquid inlet 12. MTS gas inlet

[0021] 13. Pressure gauge 14. Third thermocouple 15. First heat medium exhaust auxiliary

[0022] 16. First heat medium outlet 1 17. First thermocouple 18. First heat medium inlet DETAILED DESCRIPTION

[0023] The present invention will be further described below in conjunction with the accompanying drawings.

[0024] Reference Figure 1-Figure 2 As shown, an MTS heat exchanger of a CVD furnace includes a device body, the device body includes a heat exchanger tank body, the heat exchanger tank body includes a heat exchanger bottom cover 1, a lower heat exchanger 2, a heat exchanger middle section 3, an upper heat exchanger 4 and a heat exchanger top cover 5, and PTFE pads are used to seal between each two; 115 heat exchange tubes are arranged between the flanges at both ends of the lower heat exchanger and the upper heat exchanger, and the MTS gas circulates through the inner wall pipeline of the heat exchange tube, and the gap formed between the inner wall of the lower heat exchanger or the upper heat exchanger cylinder and the outer wall of the heat exchange tube is used to pass the silicone oil vapor of the heat medium for heating.

[0025] MTS is a colorless liquid with a pungent odor. It is flammable, explosive, and deliquescent. It is easily decomposed to produce irritating HCL gas when it comes into contact with water or air. Therefore, silicone oil vapor is used for heating instead of water vapor. All joints must be sealed securely, otherwise it is easy to leak and cause unnecessary losses.

[0026] Further preferably, the MTS heat exchanger device is connected to an MTS evaporation device, and an MTS storage tank is provided in the MTS evaporation device. The MTS storage tank stores MTS liquid, and the MTS liquid flows from the bottom pipe of the MTS storage tank to the MTS liquid inlet 11, and the silicone oil vapor of the heat medium enters from the first heat medium inlet 18 and flows out from the first heat medium outlet 16. The silicone oil vapor heats the MTS flowing through the inner wall of the heat exchange tube of the lower heat exchanger.

[0027] Further preferably, a first thermocouple 17 is provided at the upper end of the first heat medium inlet to measure the temperature of the silicone oil vapor at the inlet, which is generally around 120°C.

[0028] Further preferably, a first heat medium exhaust auxiliary part 15 is provided at the upper end of the first heat medium outlet, which is used to adjust the pressure between the inner wall of the cylinder of the lower heat exchanger and the outer wall of the heat exchange tube to be controlled at about 1ATM.

[0029] Further preferably, a pipeline is provided between the MTS storage tank and the MTS gas inlet 12, and a manual valve is provided on the pipeline. When the pressure in the MTS storage tank is too high (exceeding 0.22MPa), the manual valve here is opened, and a small portion of the MTS gas flows into the MTS gas inlet, and the temperature of the MTS gas here can be relatively low because the MTS gas here flows back from the MTS liquid inlet.

[0030] As a further optimization, an upper heat exchanger is provided above the middle section of the heat exchanger to further heat the MTS gas. Silicone oil vapor enters from the second heat medium inlet 10 and flows out from the second heat medium outlet 8. A second thermocouple 9 is also provided for temperature measurement, and a second heat medium exhaust auxiliary 7 is used for pressure regulation and exhaust.

[0031] Further preferably, the outer wall of the middle section of the heat exchanger is installed with a pressure gauge 13 and a third thermocouple 14. When the MTS gas enters the middle section of the heat exchanger, there is a pressure gauge for directly measuring the pressure of the MTS gas and a thermocouple for measuring the temperature.

[0032] More preferably, the MTS gas flows out from the MTS gas outlet 6, passes through the pipeline of the MTS evaporation device for pressure, temperature and flow measurement, and finally flows into the CVD furnace for coating.

[0033] The above are only preferred embodiments of the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. An MTS heat exchanger for a CVD furnace, comprising a device body, characterized in that: The device body includes a heat exchanger tank body, which includes a heat exchanger bottom cover, a lower heat exchanger, a heat exchanger middle section, an upper heat exchanger and a heat exchanger top cover, and a PTFE pad is used between each of the two for sealing; There are 115 heat exchange tubes between the flanges at both ends of the lower heat exchanger and the upper heat exchanger. The MTS gas flows through the inner wall of the heat exchange tube, and the gap formed between the inner wall of the lower heat exchanger or the upper heat exchanger cylinder and the outer wall of the heat exchange tube is used to pass the silicone oil vapor of the heat medium for heating.

2. The MTS heat exchanger for a CVD furnace according to claim 1, characterized in that: The MTS heat exchanger device is connected to an MTS evaporation device, and an MTS storage tank is provided in the MTS evaporation device. The MTS storage tank stores MTS liquid. The MTS liquid flows into the MTS liquid inlet from the bottom pipe of the MTS storage tank, and the silicone oil vapor of the heat medium enters from the first heat medium inlet and flows out from the first heat medium outlet. The silicone oil vapor heats the MTS flowing through the inner wall of the heat exchange tube of the lower heat exchanger.

3. The MTS heat exchanger for a CVD furnace according to claim 2, characterized in that: A first thermocouple is arranged at the upper end of the first heat medium inlet.

4. The MTS heat exchanger for a CVD furnace according to claim 2, characterized in that: A first heat medium exhaust auxiliary component is arranged at the upper end of the first heat medium outlet.

5. The MTS heat exchanger for a CVD furnace according to claim 1, characterized in that: A pipeline is provided between the MTS storage tank and the MTS gas inlet, and a manual valve is provided on the pipeline. When the pressure in the MTS storage tank is too high, the manual valve here is opened, and a small amount of MTS gas flows into the MTS gas inlet. The temperature of the MTS gas here can be relatively low because the MTS gas here flows back from the MTS liquid inlet.

6. The MTS heat exchanger for a CVD furnace according to claim 1, characterized in that: Therefore, an upper heat exchanger is set above the middle section of the heat exchanger to further heat the MTS gas. Silicone oil vapor enters from the second heat medium inlet and flows out from the second heat medium outlet. At the same time, a second thermocouple is also set for temperature measurement, and the second heat medium exhaust auxiliary part regulates the exhaust pressure.

7. The MTS heat exchanger for a CVD furnace according to claim 6, characterized in that: A pressure gauge and a third thermocouple are installed on the outer wall of the middle section of the heat exchanger.

8. The MTS heat exchanger for a CVD furnace according to claim 2, characterized in that: The MTS gas flows out from the MTS gas outlet, passes through the pipeline of the MTS evaporation device for pressure, temperature and flow measurement, and finally flows into the CVD furnace for coating.

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