Double-layer space independent parallel driving double-capillary-core micro-channel heat exchanger

Abstract

According to the double-layer space independent parallel driving double-capillary-core micro-channel heat exchanger, the double-layer space independent parallel driving double-capillary-core micro-channel heat exchanger is evenly divided into the upper-layer space and the lower-layer space through the middle interlayer, the compensation cavity, the phase change area and the gas collection chamber are independently arranged in each layer of space, and compared with a conventional single-layer capillary-core micro-channel heat exchanger, the overall space utilization rate is effectively increased; multi-layer space utilization in the micro-channel heat exchanger is realized, and meanwhile, the phenomena that liquid supply distribution of a conventional double-layer capillary core heat exchanger is not uniform, and a capillary core and a steam channel are easy to immerse and even generate air blockage are avoided; due to the characteristics of a layered structure and miniature precise flow control valves arranged at the upper and lower liquid inlets and the upper and lower steam outlets, precise flow control, active independent liquid supply and independent gas transmission are realized, so that micro-electronic thermal control requirements and conditions of different heat flux densities are met.

Description

Technical Field

[0001] The invention belongs to the field of thermal control management of microelectronic devices, and in particular relates to a double-capillary core microchannel heat exchanger with double-layer spaces independently driven in parallel. Background Art

[0002] The microelectronics industry is developing rapidly. The current trend of microelectronics technology is that the feature size of micro-integrated electronic systems and micro-semiconductor systems is constantly decreasing and the integration is continuously increasing. Although the power of each component is very small, the high integration makes the heat flux density increase sharply, which poses a challenge to the reasonable design of thermal control management technology.

[0003] Conventional single-layer capillary wick microchannel heat exchangers usually have a compensation chamber and a steam channel, with a capillary wick layer between them. The driving effect of capillary force is used to provide transportation power for the steam generated by the vaporization of the liquid working medium. However, when the high heat flux density interface of the high-power thermal control object is temperature-controlled and heat-dissipated, it is often easy to cause insufficient liquid storage in the compensation chamber and dry burning due to the intense evaporation degree and the limited volume space provided by the single-layer structure for the gas-liquid two-phase working medium. At the same time, the heat exchange area provided for the evaporation of the working medium is very limited, and several common steam channel structures cannot smoothly realize the active transportation and collection of steam. On the contrary, the randomness of the steam transportation path is relatively large, so that the steam cannot be discharged in time, and even steam blockage occurs, which causes a sharp increase in local temperature. Therefore, for the microchannel heat exchanger with a single-layer capillary wick structure, although the mechanical pump drive mode greatly shortens the startup time and greatly improves the operating stability compared to the capillary force self-starting mode, the overall effective utilization rate of the space inside the heat exchanger is low, and the uniformity and stability of the gas-liquid two-phase transport need to be further improved. In addition, when dealing with high heat flux density heat dissipation conditions, the effectiveness of the heat exchanger is seriously problematic.

[0004] Conventional multi-layer capillary wick microchannel heat exchangers usually have a capillary wick and a steam channel symmetrically arranged on the upper and lower sides of the interior (two capillary wicks on the inner side and two steam channels on the outer side), and a compensation cavity is set between the two capillary wicks to supply liquid to the capillary wicks adjacent to the upper and lower interfaces. Although this structure helps to enhance the steam working medium's transmission power and improve the effective utilization of space to a certain extent, it is easy for the heat dissipation function of the lower half of the heat exchanger to fail, that is, when the compensation cavity supplies liquid to the capillary wick adjacent to the lower side, the liquid working medium is easy to immerse the entire capillary wick channel on the lower side under the action of gravity, thereby blocking the steam generating hole. At the same time, the liquid working medium will pass through the capillary wick and continue to immerse the steam channel at the bottom, thereby increasing the steam flow resistance, and ultimately resulting in poor heat exchange effect in the lower space of the microchannel heat exchanger.

[0005] Therefore, for multi-capillary microchannel heat exchangers, special attention should be paid to the problem of independent liquid supply and gas transmission in the internal structure of the space. At the same time, when multiple layers of compensation cavities are set up, how to achieve active liquid supply in each layer and further solve the problem of uneven liquid distribution are still problems to be solved. Summary of the invention

[0006] In response to the defects of the prior art or the need for improvement, the present invention proposes a double-layer space independently parallel driven double capillary wick microchannel heat exchanger, which not only helps to improve the technical defects of the prior art such as uneven liquid distribution, easy immersion of the capillary wick and steam channel and even steam blockage, and excessive flow resistance generated by the channel, but also is expected to greatly improve the heat dissipation capacity of the heat exchanger.

[0007] In order to achieve the above object, the technical solution adopted by the present invention is as follows:

[0008] The invention provides a double-layer space independently parallel-driven double capillary core microchannel heat exchanger, comprising an upper end cover, a lower end cover and a middle partition.

[0009] The heat exchanger is clamped by the fixing groove of the upper end cover and the fixing protrusion of the lower end cover to form an internal space. The middle partition is fixed in the internal space through the inner wall surfaces of the upper and lower end covers, and divides the internal space into upper and lower double spaces.

[0010] The middle partition is provided with an upper air collecting chamber baffle, a lower air collecting chamber baffle and a lower compensation chamber baffle. The upper end cover is provided with an upper air collecting chamber baffle slot, and the lower end cover is provided with a lower air collecting chamber baffle slot and a lower compensation chamber baffle slot.

[0011] The upper air collecting chamber baffle, the lower air collecting chamber baffle and the lower compensation chamber baffle are fixed in corresponding slots respectively, and the middle partition layer is placed on the inner wall surface of the lower end cover, and the middle partition layer is fixed in the horizontal direction at the same time.

[0012] The middle partition layer divides the upper space into an upper compensation cavity, an upper phase change zone and an upper gas collection chamber, and divides the lower space into a lower compensation cavity, a lower phase change zone and a lower gas collection chamber.

[0013] The double-layer space independently parallel-driven double capillary wick microchannel heat exchanger provided by the present invention has the following significant features when applied to a high heat flux density microelectronic device thermal control management system:

[0014] 1) Realize independent layered liquid supply and gas transmission, precise and controllable

[0015] The microchannel heat exchanger provided by the present invention is evenly divided into an upper and lower double-layer space by a middle partition, and a compensation cavity, a phase change zone and a gas collecting chamber are independently arranged in each layer of the space. Compared with the conventional single-layer capillary wick microchannel heat exchanger, the overall space utilization rate is effectively improved, and the multi-layer space utilization inside the microchannel heat exchanger is realized, while the phenomenon of uneven liquid supply distribution, easy immersion of the capillary wick and the steam channel and even steam blockage in the conventional double-layer capillary wick heat exchanger is avoided; due to the characteristics of the layered structure and the miniature precision flow control valves arranged at the upper and lower liquid inlets and the upper and lower steam outlets, precise control of the flow, active independent liquid supply and independent gas transmission are realized to cope with the microelectronic thermal control needs and situations of different heat flux densities.

[0016] 2) Improve the heat dissipation capacity of the heat exchanger

[0017] The upper and lower end covers of the microchannel heat exchanger provided by the present invention are both made of high thermal conductivity metal material, the top of the upper end cover is the heating surface, and since the upper and lower double-layer spaces are independently provided with phase change zones, heat is transferred from the upper and lower steam channels to the upper and lower capillary cores, and the liquid working fluid in the double-layer capillary core can share the heat of the heat source, increase the evaporation intensity, and increase the steam volume, thereby improving the heat dissipation capacity of the heat exchanger.

[0018] 3) Improve the startup speed of the heat exchanger

[0019] Since the liquid working fluid in the upper and lower capillary wicks undergoes phase change to produce steam, the pressure on the steam side of the upper and lower gas collecting chambers increases more rapidly than that of conventional single-layer capillary wick microchannel heat exchangers, that is, the conditions for successful system startup are achieved more quickly: the pressure difference on both sides of the evaporation interface is sufficient to overcome the flow resistance of the working fluid in the system. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 is an assembly diagram of a microchannel heat exchanger provided by the present invention;

[0021] Figure 2 is a stereoscopic diagram of a microchannel heat exchanger provided by the present invention;

[0022] Figure 3 is a three-dimensional front view cross-sectional view AA of the microchannel heat exchanger provided by the present invention;

[0023] Figure 4 is a plan elevational cross-sectional view AA of the microchannel heat exchanger provided by the present invention (without the internal filler and the external valve member);

[0024] Figure 5 It is a front view cross-sectional view of the upper end cover of the microchannel heat exchanger provided by the present invention (the dotted line indicates the placement position of the middle partition);

[0025] Figure 6 It is a three-dimensional front view cross-sectional view of the upper end cover of the microchannel heat exchanger provided by the present invention (the dotted line indicates the placement position of the middle partition);

[0026] Figure 7 This is a bottom view of the upper end cover of the microchannel heat exchanger provided by the present invention;

[0027] Figure 8 It is a front view cross-sectional view of the lower end cover of the microchannel heat exchanger provided by the present invention (the dotted line indicates the placement position of the middle partition);

[0028] Fig. 9 It is a three-dimensional front view cross-sectional view of the lower end cover of the microchannel heat exchanger provided by the present invention (the dotted line indicates the placement position of the middle partition);

[0029] Fig.10 It is a top view of the lower end cover of the microchannel heat exchanger provided by the present invention (the dotted line indicates the placement position of the middle partition);

[0030] Fig.11 It is a three-dimensional partial cross-sectional view of the middle partition of the microchannel heat exchanger provided by the present invention;

[0031] Fig.12 It is a front view of the middle partition plane of the microchannel heat exchanger provided by the present invention;

[0032] Fig.13 This is a bottom view of the middle partition plane of the microchannel heat exchanger provided by the present invention;

[0033] Fig.14 It is a stereoscopic diagram of the upper and lower capillary cores of the microchannel heat exchanger provided by the present invention;

[0034] Fig.15 It is a stereoscopic diagram of the upper and lower porous stainless steel support frames of the microchannel heat exchanger provided by the present invention.

[0035] Description of reference numerals:

[0036] 100—upper end cover, 101—upper liquid inlet, 102—outer wall liquid inlet, 103—outer wall of upper end cover, 104—fixing groove, 105—inner wall liquid inlet, 106—inner wall of upper end cover, 107—upper compensation chamber baffle, 108—upper compensation chamber baffle liquid delivery port, 109—upper steam channel, 110—upper gas collecting chamber baffle slot, 111—upper steam outlet, 112—inner wall steam outlet, 113—outer wall steam outlet, 114—upper compensation chamber, 115—upper phase change zone, 116—upper gas collecting chamber;

[0037] 200—lower end cover, 201—lower liquid inlet, 202—lower end cover outer wall, 203—upper liquid inlet lower end cover section, 204—fixing protrusion, 205—lower end cover inner wall, 206—lower compensation chamber baffle liquid delivery port, 207—lower compensation chamber baffle slot, 208—lower gas collecting chamber baffle slot, 209—upper steam outlet lower end cover section, 210—lower steam outlet, 211—lower compensation chamber, 212—lower phase change zone, 213—lower gas collecting chamber;

[0038] 300 - middle partition, 301 - upper air collecting chamber baffle, 302 - lower air collecting chamber baffle, 303 - lower steam channel, 304 - lower compensation chamber baffle, 305 - upper air collecting chamber baffle vent, 306 - lower air collecting chamber baffle vent;

[0039] 400—upper capillary core, 500—lower capillary core;

[0040] 600—upper porous stainless steel support frame, 601—upper support through hole, 602—upper support foot; 700—lower porous stainless steel support frame, 701—lower support through hole, 702—lower support foot;

[0041] 800—Micro precision flow control valve. DETAILED DESCRIPTION

[0042] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described below in conjunction with the accompanying drawings and embodiments. The specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention. In addition, the technical features involved in each embodiment of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0043] like Figure 1 and Figure 2 As shown, the present application example provides a multi-layer capillary force driven microchannel heat exchanger for solving the problem of high heat flux density interface temperature control and heat dissipation, specifically:

[0044] A double-layer space independently parallel-driven double capillary wick microchannel heat exchanger comprises an upper end cover 100, a lower end cover 200, a middle partition 300, an upper capillary wick 400, a lower capillary wick 500, an upper porous stainless steel support frame 600, a lower porous stainless steel support frame 700 and a micro precision flow control valve 800.

[0045] like Figure 3As shown, an upper liquid inlet 101, a lower liquid inlet 201, an upper steam outlet 111 and a lower steam outlet 210 are respectively provided on the walls on both sides of the heat exchanger. The upper liquid inlet 101 and the upper steam outlet 111 are formed by respectively opening holes at the same position of the upper end cover inner wall 106, the upper end cover outer wall 103 and the fixing protrusion 204 of the lower end cover, so the upper liquid inlet is divided into three parts: the outer wall liquid inlet 102, the upper liquid inlet lower end cover section 203 and the inner wall liquid inlet 105, and the upper steam outlet is divided into three parts: the inner wall steam outlet 112, the upper steam outlet lower end cover section 209 and the outer wall steam outlet 113.

[0046] like Figure 4-Figure 7 As shown, the side wall of the upper end cover is divided into an upper end cover outer wall surface 103, a fixing groove 104 and an upper end cover inner wall surface 106, and its cross-sectional shape is like an inverted concave character. Figure 8-Figure 10 As shown, the side wall of the lower end cover is divided into a lower end cover outer wall surface 202, a fixing protrusion 204 and a lower end cover inner wall surface 205, and its cross-sectional shape is like a convex character.

[0047] Furthermore, the upper and lower end covers are both made of metal material with high thermal conductivity.

[0048] The fixing groove 104 of the upper end cover is clamped with the fixing protrusion 204 of the lower end cover, and then fixed by bolts to form a space inside the heat exchanger. Among them, the height of the inner wall surface 106 of the upper end cover is shorter than the outer wall surface 103 of the upper end cover, and the height of the inner wall surface 205 of the lower end cover is shorter than the outer wall surface 202 of the lower end cover. When the upper and lower end covers are assembled, the middle partition 300 is clamped up and down by the inner wall surface 106 of the upper end cover and the inner wall surface 205 of the lower end cover, that is, the middle partition is fixed in the vertical direction, and the internal space is evenly divided into upper and lower double-layer spaces.

[0049] like Fig.11 As shown, the middle partition is provided with an upper air collecting chamber baffle 301, a lower air collecting chamber baffle 302 and a lower compensation chamber baffle 304. Figure 5 As shown, the inner wall surface 106 of the upper end cover is provided with an upper air collecting chamber baffle slot 110. Figure 8 As shown, the lower end cover inner wall surface 205 is provided with a lower air collecting chamber baffle slot 208 and a lower compensation chamber baffle slot 207. By fixing the upper air collecting chamber baffle 301, the lower air collecting chamber baffle 302 and the lower compensation chamber baffle 304 in the corresponding slots 110, 208 and 207 respectively, the middle partition is placed on the lower end cover inner wall surface 205, and the middle partition is fixed in the horizontal direction when the upper and lower end covers are clamped.

[0050] like Figure 3As shown, an upper compensation cavity baffle 107 is provided on the lower surface of the top of the upper end cover. The upper compensation cavity baffle 107 and the upper gas collecting chamber baffle 301 of the middle partition 300 divide the upper cavity into an upper compensation cavity 114, an upper phase change zone 115 and an upper gas collecting chamber 116. A plurality of parallel micro-channels are provided on the lower surface of the top of the upper end cover to form an upper steam channel 109. An upper porous stainless steel support frame 600 and an upper capillary wick 400 are arranged in the upper phase change zone 115, and the upper capillary wick 400 is tightly connected to the upper porous stainless steel support frame 600 and the upper steam channel 109, respectively.

[0051] The lower compensation chamber baffle 304 and the lower gas collecting chamber baffle 302 of the middle partition divide the lower cavity into a lower compensation chamber 211, a lower phase change zone 212 and a lower gas collecting chamber 213. The middle partition 300 has a plurality of parallel micro-channels on the lower surface between the lower compensation chamber baffle 304 and the lower gas collecting chamber baffle 302 to form a lower steam channel 303. A lower porous stainless steel support frame 700 and a lower capillary wick 500 are provided in the lower phase change zone, and the lower capillary wick 500 is tightly connected to the lower porous stainless steel support frame 700 and the lower steam channel 303, respectively.

[0052] The upper and lower porous stainless steel support frames control the liquid level of the liquid working medium, transfer heat, and support the upper capillary wick 400 and the lower capillary wick 500. The liquid working medium in the upper and lower capillary wicks absorbs heat and changes phase, and the generated steam is transported through the upper steam channel 109 and the lower steam channel 303, respectively, and then enters the upper gas collecting chamber 116 and the lower gas collecting chamber 213. The steam working medium in the upper and lower gas collecting chambers finally exits the heat exchanger through the upper steam outlet 111 and the lower steam outlet 210, and is collected and enters the external cooling device.

[0053] In this embodiment, Figure 5 and Fig.10 The cross-sections of the upper steam channel 109 and the lower steam channel 303 may be rectangular, triangular, Ω-shaped, semicircular, upper trapezoidal or lower trapezoidal, and the basic size of the channels is within the range of 1 mm×1 mm.

[0054] In this embodiment, Figure 3 The heights of the upper compensation chamber baffle 107 and the lower compensation chamber baffle 304 are both 1-2 mm lower than the upper and lower spaces, and form an upper liquid delivery port 108 and a lower liquid delivery port 206 with the upper surface of the middle partition layer 300 and the upper surface of the bottom of the lower end cover 200, respectively, for transporting the liquid working medium from the upper compensation chamber 114 and the lower compensation chamber 211 into the upper phase change zone 115 and the lower phase change zone 212.

[0055] In this embodiment, Fig.10At the positions of the upper air collecting chamber baffle 301 and the lower air collecting chamber baffle 302 corresponding to the upper steam duct 109 and the lower steam duct 303, an upper air collecting chamber baffle vent 305 and a lower air collecting chamber baffle vent 306 are respectively opened, and the steam enters the upper air collecting chamber 116 and the lower air collecting chamber 213 through the upper and lower air vents, and the cross-sectional shape of the air holes is consistent with the cross-sectional shape of the steam duct.

[0056] In this embodiment, Fig.12 and Fig.14 As shown, the upper capillary core 400 and the lower capillary core 500 are sintered from metal powder. The liquid working medium absorbs heat on the surfaces of the upper and lower capillary cores to undergo phase change, and the capillary suction force provides power for the operation of the working medium in the system.

[0057] In this embodiment, Fig.13 and Fig.15 As shown, the upper porous stainless steel support frame 600 and the lower porous stainless steel support frame 700 are evenly provided with upper support holes 601 and lower support holes 701 with slightly larger diameters on their surfaces, and their shapes can be rectangular or circular, and upper support legs 602 and lower support legs 702 are provided at the four ends. The upper and lower porous stainless steel support frame surfaces are used to support the capillary core, and the liquid working medium is evenly diverted into the capillary core through the upper and lower support holes. The height of the upper and lower support legs limits the liquid working medium level in the capillary core, so that the liquid infiltrates but does not immerse the capillary core.

[0058] In this embodiment, Figure 1 The micro precision flow control valve 800 can be fixed at the upper liquid inlet 101, the lower liquid inlet 201, the upper steam outlet 111 and the lower steam outlet 210 by welding or threaded connection, so as to independently control the flow of liquid working medium and adjust the gas transmission size according to the evaporation degree. The micro precision flow control valve is connected to external equipment such as cooling devices and pumps through a hose to play the role of shock absorption and spatial three-dimensional arrangement.

[0059] In this embodiment, the type of working fluid is reasonably selected according to the heat flux density and operating temperature of the application. Working fluids with small latent heat of vaporization such as R123 are suitable for operation in applications with low temperature and low heat flux density. Working fluids with large latent heat of vaporization such as ethanol, methanol and water are suitable for operation in applications with high temperature and high heat flux density.

[0060] The assembly process of the double-layer space independently parallel-driven double capillary core microchannel heat exchanger provided in the example of this application is as follows:

[0061] First, the lower porous stainless steel support frame 700 is placed on the lower phase change zone 212 of the lower end cover 200, and the lower capillary wick 500 is laid on the lower porous stainless steel support frame 700. The lower compensation cavity baffle 304 and the lower gas collecting chamber baffle 302 of the middle partition 300 are respectively aligned with the lower compensation cavity baffle slot 207 and the lower gas collecting chamber baffle slot 208 and placed, so that the middle partition is placed on the inner wall surface 205 of the lower end cover.

[0062] Afterwards, the upper porous stainless steel support frame 600 is placed on the upper phase change zone 115, and the upper capillary core 400 is laid on the upper porous stainless steel support frame. Then, the upper gas chamber baffle groove 110 on the inner wall of the upper end cover 100 is aligned with the upper gas chamber baffle 301 of the middle partition layer and inserted, and the upper end cover 100 and the lower end cover 200 are buckled together. At this time, the fixing groove 104 of the upper end cover and the fixing protrusion 204 of the lower end cover are clamped together. The inner wall surface of the upper end cover presses the middle partition layer, fixes the middle partition layer up and down, and the upper end cover and the lower end cover are fixedly connected by bolts.

[0063] Finally, the micro precision flow control valve 800 is installed at the upper and lower liquid inlets and the upper and lower steam outlets to complete the assembly.

[0064] The working process of the heat exchanger of the present invention is described in detail below:

[0065] Adjust the micro precision flow control valve 800 to the appropriate flow position so that the liquid working medium flows into the upper and lower compensation chambers from the upper and lower liquid inlets, stands evenly in the upper and lower compensation chambers, and then enters the upper and lower phase change zones through the upper and lower liquid delivery ports at the upper and lower compensation chamber baffles, and infiltrates the upper and lower capillary cores placed on the upper and lower porous stainless steel support frames.

[0066] The top of the upper cover of the heat exchanger is a heating surface, which is in direct contact with the heat load surface during operation and absorbs heat through heat conduction. The heat is quickly transferred to the upper capillary wick 400 through the fins of the upper steam channel 109 of the upper cover, causing the liquid working medium in the upper capillary wick to be heated and vaporized, and the generated steam is transported from the upper steam channel 109 and enters the upper gas collecting chamber 116 through the vent hole 305 of the upper gas collecting chamber baffle.

[0067] Due to the heat conduction phenomenon of the side wall of the heat exchanger, the heat is transferred to the lower steam channel 303 through the middle partition 300 and then to the lower capillary wick 500, causing the liquid working medium in the lower capillary wick to be heated and vaporized, and the formed steam is transported from the lower steam channel 303 and enters the lower gas collecting chamber 213 through the vent hole 306 of the lower gas collecting chamber baffle. The steam working medium in the upper and lower gas collecting chambers is respectively output from the heat exchanger through the upper and lower steam outlets, and is collected and enters the external cooling device, where it releases sensible heat and latent heat and condenses into a supercooled liquid working medium, which then flows back and enters the microchannel heat exchanger to complete the cycle.

[0068] It can be seen from the above that the double-layer space independently parallel-driven double-capillary wick microchannel heat exchanger provided by the present invention overcomes the shortcomings of the existing double-layer capillary wick heat exchanger and improves the working performance.

[0069] It will be easily understood by those skilled in the art that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A double-layer space independently parallel driven double capillary wick microchannel heat exchanger, characterized in that: It includes an upper end cover, a lower end cover and a middle partition; The heat exchanger is clamped by the fixing groove of the upper end cover and the fixing protrusion of the lower end cover, so as to form an internal space inside; the middle partition is fixed in the internal space through the inner wall surface of the upper end cover and the lower end cover, and divides the internal space into an upper and a lower double space; The middle partition is provided with an upper air collecting chamber baffle, a lower air collecting chamber baffle and a lower compensation chamber baffle; the upper end cover is provided with an upper air collecting chamber baffle slot, and the lower end cover is provided with a lower air collecting chamber baffle slot and a lower compensation chamber baffle slot; The upper air collecting chamber baffle, the lower air collecting chamber baffle and the lower compensation chamber baffle are fixed to the corresponding slots respectively, and the middle partition is placed on the inner wall surface of the lower end cover, and the middle partition is fixed in the horizontal direction at the same time; The middle partition layer divides the upper space into an upper compensation cavity, an upper phase change zone and an upper gas collection chamber, and divides the lower space into a lower compensation cavity, a lower phase change zone and a lower gas collection chamber.

2. The double-layer space independently parallel driven double capillary wick microchannel heat exchanger according to claim 1 is characterized in that: The lower surface of the top of the upper end cover is provided with a plurality of parallel micro grooves as upper steam grooves; the lower surface of the middle partition between the lower compensation cavity baffle and the lower air collecting chamber baffle is provided with a plurality of parallel micro grooves as lower steam grooves.

3. The double-layer space independently parallel driven double capillary wick microchannel heat exchanger according to claim 2 is characterized in that: The cross-sections of the upper steam channel and the lower steam channel are both rectangular, triangular, Ω-shaped, semicircular, upper trapezoidal or lower trapezoidal, and the basic size range of the channel is within 1mm×1mm.

4. The double-layer space independently parallel driven double capillary wick microchannel heat exchanger according to claim 3 is characterized in that: An upper vent hole is provided at a position corresponding to the upper steam channel and the upper air collecting chamber baffle, and the cross-sectional shape of the upper vent hole is consistent with the cross-sectional shape of the upper steam channel; Lower ventilation holes are respectively opened at positions corresponding to the lower air collecting chamber baffle and the lower steam channel, and the cross-sectional shape of the lower ventilation holes is consistent with the cross-sectional shape of the lower steam channel.

5. The double-layer space independently parallel-driven double capillary wick microchannel heat exchanger according to claim 2 or 3, characterized in that: The heat exchanger also includes a capillary wick and a porous support frame; The capillary wick comprises an upper capillary wick and a lower capillary wick, and the porous support frame comprises an upper porous support frame and a lower porous support frame; The upper porous support frame and the upper capillary wick are arranged in the upper phase change zone, the upper surface of the upper capillary wick is tightly connected to the upper steam channel, and the lower surface is tightly connected to the upper porous support frame; The lower porous support frame and the lower capillary wick are arranged in the lower phase change zone, the upper surface of the lower capillary wick is tightly connected to the lower steam channel, and the lower surface is tightly connected to the lower porous support frame.

6. The double-layer space independently parallel driven double capillary wick microchannel heat exchanger according to claim 5, characterized in that: The surface of the porous support frame is evenly provided with through holes for supporting the capillary core and evenly diverting the liquid working medium into the capillary core; The four ends of the porous support frame are provided with supporting feet, and the height of the supporting feet limits the liquid level of the liquid working medium in the capillary core, so that the liquid infiltrates but does not immerse the capillary core.

7. The double-layer space independently parallel driven double capillary wick microchannel heat exchanger according to claim 1, characterized in that: The heights of the upper compensation cavity baffle and the lower compensation cavity baffle are both 1-2mm shorter than the upper and lower spaces; The upper compensation chamber baffle and the upper surface of the middle partition layer form an upper liquid delivery port for delivering the liquid working medium from the upper compensation chamber into the upper phase change zone; The lower compensation chamber baffle and the upper surface of the bottom of the lower end cover form a lower liquid delivery port for delivering the liquid working medium from the lower compensation chamber into the lower phase change zone.

8. The double-layer space independently parallel driven double capillary wick microchannel heat exchanger according to claim 1, characterized in that: The walls on both sides of the heat exchanger are respectively provided with a liquid inlet and a steam outlet.

9. The double-layer space independently parallel driven double capillary wick microchannel heat exchanger according to claim 8, characterized in that: The micro precision flow control valve is fixed at the liquid inlet and steam outlet positions, and is used to autonomously control the flow of the liquid working medium and adjust the gas transmission size according to the degree of evaporation; the micro precision flow control valve is connected to the external equipment through a hose, and is used for shock absorption and three-dimensional spatial arrangement.

10. The double-layer space independently parallel driven double capillary wick microchannel heat exchanger according to claim 1, characterized in that: The upper end cover and the lower end cover are both made of metal material with high thermal conductivity.

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