Angle dimension linkage detection method based on laser interference technology

Abstract

The invention relates to an angle dimension linkage detection method based on a laser interference technology. The method comprises the following steps: modeling according to a laser interference principle of three-dimensional space deformation: measuring tiny deformation of an object surface through the laser interference technology; designing a three-dimensional deformation model based on spatial geometric analysis, predicting various deformation modes by integrating equipment, and establishing a mathematical relationship with laser interference data; through combination of multi-beam reflection, displacement of interference fringes and deformation distribution conditions, deformation vectors in a three-dimensional space are obtained; arranging a plurality of laser interference sensors to cover the area of the object to be measured; a three-dimensional space splicing algorithm is utilized, and local data measured by the multiple sensors are synthesized into a three-dimensional deformation model through a coordinate conversion and registration technology; installing a deformation monitoring system, and inputting real-time data into a real-time compensation control system; a compensation result is transmitted to a control system in real time, and deformation compensation is controlled; and self-adaptive interference fringe optimization and dynamic error correction are carried out.

Description

Technical Field

[0001] The invention relates to the field of precision measurement, and in particular to an angle dimension linkage detection method based on laser interference technology. Background Art

[0002] At present, although the angle-size linkage detection method based on laser interferometry technology has shown high accuracy and efficiency in many application fields, it still has some shortcomings and disadvantages. Compared with other methods based on laser ranging technology, such as the Chinese invention patent publication number CN118131247A "Electronic glass laser ranging module and straightness and size detection method", these shortcomings are particularly prominent.

[0003] First, the traditional laser interferometer technology has poor adaptability to complex environmental factors during implementation. Although the laser interferometer method has the advantage of high precision, it is highly sensitive to the external environment (such as temperature, humidity, air pressure, etc.). In high-precision angular dimension measurement, temperature and load changes often lead to measurement errors. Compared with the laser rangefinder module system in CN118131247A, this technology does not have an effective dynamic compensation mechanism to adjust the errors caused by environmental factors in real time. The laser rangefinder in CN118131247A uses a distributed layout and multiple laser sensors to reduce the environmental impact of individual sensors, and can obtain the distance changes between adjacent laser detectors in real time, so as to better control and correct the errors of the system. On the contrary, laser interferometer technology usually relies on a single sensor to obtain data. Although it has high precision, its stability and accuracy in complex working environments are often disturbed by changes in the external environment.

[0004] Secondly, laser interferometry technology has certain limitations in monitoring and compensating deformation of objects over a large range. The measurement area of ​​laser interferometers is usually small, making it difficult to achieve efficient deformation detection and compensation on large-scale equipment or structures. Although a larger measurement area can be covered by multiple laser interferometer sensors, data fusion and splicing between these sensors still face certain challenges. The accuracy of data fusion directly affects the accuracy of the compensation model. Compared with CN118131247A, the latter uses 16 laser rangefinders distributed at different positions on the glass substrate, which can simultaneously measure the size and angle of multiple points, and perform corrections to the right angle and size through the comprehensive calculation of these data. This approach effectively avoids the problem of sensor limitations in interference technology. However, due to the small measurement area, traditional laser interferometry technology needs to rely on more complex splicing and optimization algorithms to obtain an accurate three-dimensional deformation model, which often has high computing costs and real-time problems, resulting in the inability to meet high-precision requirements in rapidly changing industrial production environments.

[0005] In summary, although the angle-size linkage detection method based on laser interferometry technology has significant advantages in high-precision measurement, it also faces shortcomings such as poor environmental adaptability, limited measurement range, high surface requirements, high computational complexity and high system cost. Compared with the laser ranging technology in CN118131247A, the latter has greater advantages in real-time, adaptability, measurement range and system cost, and is especially suitable for large-scale and rapid size and angle detection. Therefore, to further improve the feasibility of the angle-size linkage detection method based on laser interferometry technology, it is necessary to improve the system adaptability, reduce computational complexity, and optimize costs. Summary of the invention

[0006] The purpose of the present invention is to provide an angle dimension linkage detection method based on laser interference technology, so as to solve some of the drawbacks and shortcomings pointed out in the background technology.

[0007] The present invention solves the above-mentioned technical problems by adopting the following technical solution: an angle dimension linkage detection method based on laser interference technology, comprising the following steps:

[0008] S1. Modeling of laser interference principle of three-dimensional spatial deformation:

[0009] S1.1. Measure the tiny deformation of the surface of an object through laser interference technology; add a three-dimensional coordinate transformation model to the change of the laser interference fringes to calculate the deformation in each direction of X, Y, and Z;

[0010] S1.2. Design a three-dimensional deformation model based on spatial geometric analysis, integrate equipment predictions of various deformation modes including bending, twisting, stretching, and compression, and establish a mathematical relationship between the model and the laser interferometer data;

[0011] S1.3, by combining the multi-beam reflection, the displacement of the interference fringes and the deformation distribution, the deformation vector in the three-dimensional space is obtained;

[0012] S2. Spatial fusion and splicing technology of multi-point laser interferometry data:

[0013] S2.1. Arrange multiple laser interferometer sensors to cover the area of ​​the object to be measured; at each measuring point, the laser interferometer sensor collects local interference fringe data and calculates the corresponding deformation vector;

[0014] S2.2, using a three-dimensional space stitching algorithm, synthesizing a three-dimensional deformation model by using coordinate transformation and registration technology to combine local data measured by multiple sensors;

[0015] S3, Real-time deformation monitoring and compensation algorithm:

[0016] S3.1. Install a deformation monitoring system; use a laser interferometer to monitor the structural deformation in real time, and continuously feedback the deformation information through sensors;

[0017] S3.2. Input the real-time data into the real-time compensation control system, and use the particle swarm optimization advanced algorithm to predict and correct the deformation; adjust the compensation parameters according to the actual working state and deformation data;

[0018] S3.3, combined with the control system of the equipment including the robot arm, machine tool or processing equipment, the compensation result is transmitted to the control system in real time, and the equipment position is adjusted through the servo motor or hydraulic system to control the compensation of deformation;

[0019] S4, Adaptive interference fringe optimization and dynamic error correction:

[0020] S4.1. Monitor the changing trend of interference fringes through real-time data analysis system; identify the noise and error in the fringes;

[0021] S4.2, using adaptive algorithms to dynamically adjust the interference fringe analysis process, and optimizing the collection and processing of interference fringes according to the deformation rate and direction of the object;

[0022] S5. Deformation compensation model based on boundary conditions and real-time feedback:

[0023] S5.1. In the deformation compensation process, the physical properties of the object including the elastic modulus and thermal expansion coefficient of the material and the external environment including temperature change and load change are comprehensively considered; the deformation behavior of the object under different conditions is simulated by establishing a dynamic compensation model based on boundary conditions;

[0024] S5.2. Combined with the real-time feedback control system, the deformation data collected by the sensor is compared with the physical model to calculate the correction amount; the deformation of the equipment is corrected in real time through the compensation algorithm including the finite element analysis FEA numerical simulation method.

[0025] Furthermore, the laser interference principle modeling method of three-dimensional spatial deformation includes: decomposing the device into a number of basic geometric units including beams, plates, and shells in spatial geometric analysis; the deformation of each unit is affected by different mechanical factors including bending, stretching, and compression; then, through spatial geometric transformation, the geometric shape, material properties, and external loads of the device are integrated, and a combined model based on deformation function is introduced to comprehensively describe various deformation modes in a spatial coordinate system:

[0026]

[0027] Among them: u(X,t) represents the displacement field of a point on the surface of the device at spatial position X and time t; the vector contains the displacement caused by all deformation modes in space; X = (X, Y, Z) represents the position coordinates in the spatial coordinate system, where X, Y, and Z represent the position of the device in three orthogonal directions respectively; t represents time, indicating the change of deformation over time; α i (t) represents the coefficient of the i-th deformation mode including bending and stretching changing with time; f i (X) represents the distribution function of the i-th deformation mode in space; N represents the number of deformation modes, including bending, stretching, and compression.

[0028] Furthermore, the laser interference principle modeling method of the three-dimensional spatial deformation includes: the laser interferometer generates interference fringes by monitoring the phase difference between the laser beam and the surface of the object; each deformation mode will cause different changes in the interference fringes; by calculating the optical path difference, a mathematical relationship between the laser interference fringes and the three-dimensional deformation is established; the phase change measured by the laser interferometer is associated with the displacement field of the object through the following formula:

[0029]

[0030] Where: Δφ(X) represents the phase change at spatial position X; It represents the gradient of the displacement field on the device surface; S(X) is the optical path function used to calculate the optical path difference in laser interferometry; Ω is the integration area, which represents the spatial range of interference measurement, the area on the device surface, and the measurement range of the laser interferometer; dΩ represents the tiny area element within the Ω area, and the integral sum represents the contribution of the optical path difference at all positions in the entire area to the phase change.

[0031] Furthermore, the laser interference principle modeling method of three-dimensional spatial deformation includes: determining the intensity and distribution of each deformation mode by minimizing the error between the laser interference data and the model prediction; the optimization process adopts the nonlinear least squares method to control the fitting result by adjusting the parameters of the deformation model; and the optimization objective function is used to calculate the difference between the minimized interference data and the theoretical deformation model:

[0032]

[0033] in: represents the optimized deformation data, which is the optimal deformation field obtained by minimizing the error; Δφ i represents the phase change of the i-th interference fringe; g(u i ) represents the predicted value of the deformation model for the i-th interference fringe; represents the optical path gradient of the i-th interference fringe, which is controlled by the position X of the device surface and the geometric relationship between the beam and the surface; Ω represents the spatial area of ​​the interference measurement; It means summing the errors of all interference fringes, and there are M interference fringes in total.

[0034] Furthermore, the method for constructing a deformation compensation model based on boundary conditions and real-time feedback: the deformation behavior of an object under different working conditions is simulated in real time, and the elastic modulus E and thermal expansion coefficient α of the material are dynamically adjusted. The compensation model reflects the dynamic changes of material properties with temperature, and describes the comprehensive effects of temperature changes, load changes and physical properties of the material on the deformation of the object through the following formula:

[0035]

[0036] Where ΔL is the total deformation of the object, which indicates the change in the length or size of the object; α(T) is the thermal expansion coefficient of the material at temperature T, which indicates the rate of dimensional change caused by a unit temperature change; ΔT is the temperature change experienced by the object, usually T final T initial ; L 0 is the initial length or initial size of the object; σ(T) is the stress of the material at temperature T, and E(T) is the elastic modulus at temperature T, which indicates the ability of the material to resist elastic deformation.

[0037] Furthermore, the deformation compensation model construction method based on boundary conditions and real-time feedback: introduces a dynamic boundary condition model, updates the boundary conditions including the support point position and load size in real time according to the changes in the environment; and is described and expressed by the formula:

[0038]

[0039] Among them, F(t) is the internal force of the object at time t, which represents the reaction force generated by stress and deformation inside the object; K(t) is the stiffness matrix of the object, which reflects the resistance of the object to external forces, and its value will change with the changes of environmental conditions including temperature and load; Δu(t) is the displacement of the object at time t, which represents the deformation of the object under the action of force; F ext (t) is the externally applied load, which varies with time and environmental conditions including temperature and load magnitude.

[0040] Furthermore, the deformation compensation model construction method based on boundary conditions and real-time feedback: through multi-physics field coupling analysis, the interaction between thermal, mechanical and external loads is integrated; when the temperature changes, thermal expansion changes the geometric shape of the object and the elastic modulus of the material, which in turn affects the deformation process; and the multi-physics field coupling effect is described by the following formula:

[0041]

[0042] Where: ∈ total is the total strain of the object, indicating the total deformation of the object due to thermal expansion, stress and elastic deformation; α(T) is the thermal expansion coefficient of the material at temperature T, indicating the change in geometric size caused by unit temperature change; σ(T) is the stress at temperature T, indicating the internal stress caused by load or temperature change; E(T) is the elastic modulus at temperature T, indicating the material's resistance to elastic deformation.

[0043] The angle-size linkage detection method based on laser interferometry technology of the present invention has many significant beneficial effects. First, it can monitor and compensate for equipment deformation in real time under complex working environments by accurately measuring the tiny deformation of the object surface and combining the three-dimensional spatial deformation model. This method can effectively overcome the limitations of traditional measurement technology and provide high-precision angle and size linkage detection, especially when external factors such as temperature and load changes have a greater impact on equipment deformation, it can ensure the geometric accuracy during the processing process. Secondly, the laser interferometer is used for non-contact measurement, which avoids the errors and physical interference that may be caused by traditional contact measurement, and ensures the stability and accuracy of the measurement results. In addition, the deformation compensation model based on boundary conditions and real-time feedback enables the equipment to dynamically adjust the deformation compensation parameters according to real-time monitoring data, further improving the response speed and adaptability of the system. In the manufacturing field, especially in the fields of high-precision machine tools, aerospace equipment, etc., the present invention can significantly improve the processing accuracy of the equipment, reduce the processing errors caused by deformation, reduce production costs, and enhance the quality consistency of products. Finally, this method provides a more intelligent and efficient solution for modern manufacturing, and promotes the development of intelligent manufacturing and precision processing technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] Figure 1 This is a flow chart of the angle dimension linkage detection method based on laser interference technology of the present invention.

[0045] Figure 2 This is a flow chart of the laser interference principle modeling method for three-dimensional spatial deformation of the present invention.

[0046] Figure 3 This is a flow chart of the deformation compensation model construction method based on boundary conditions and real-time feedback of the present invention. DETAILED DESCRIPTION

[0047] The specific implementation modes of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0048] Combined with Figure 1The angle dimension linkage detection method based on laser interferometry technology of the present invention is an advanced technology for accurately measuring the deformation of objects in three-dimensional space. It combines the high-precision measurement capability of laser interferometry and the spatial geometric analysis model, and measures and analyzes the deformation of objects under different working conditions in real time through multi-angle and multi-directional monitoring. The core of this method is to combine laser interferometry technology with a three-dimensional spatial deformation model, which can more comprehensively capture and analyze the tiny deformation of the surface of an object under the influence of temperature changes, load changes or other external factors, and provide high-precision deformation data for error compensation and workpiece precision control. The method is divided into several main steps, including modeling of laser interferometry principle, spatial geometric analysis, and calculation of multi-beam interference and deformation vector. First, in the modeling of the laser interferometry principle of three-dimensional spatial deformation, laser interferometry technology is used to measure the tiny deformation of the surface of an object. Laser interferometry is a method for measuring surface deformation by comparing the phase difference of reflected light waves. When the laser beam is irradiated on the surface of an object, the tiny deformation of the surface will cause the phase of the reflected light wave to change, thereby forming interference fringes in the interferometer. By analyzing these interference fringes, the deformation of the surface of the object on a tiny scale can be measured. However, this interference data is usually two-dimensional, and in order to obtain the complete deformation information of the object in three-dimensional space, it is necessary to introduce a spatial coordinate transformation model to calculate the components of the deformation in the X, Y, and Z directions. Through the coordinate transformation model, the two-dimensional displacement data captured in the interference data is converted into displacement in three-dimensional space.

[0049] Next, based on spatial geometric analysis, a three-dimensional deformation model is designed to comprehensively predict various deformation modes of the equipment during operation, including bending, twisting, stretching, compression, etc. In practical applications, the deformation of objects is multi-modal, and a single deformation mode is not enough to fully describe the deformation behavior of objects. Therefore, by designing a multi-dimensional deformation model, the deformation types of objects under various working conditions can be considered at the same time, and the deformation behavior can be comprehensively modeled through spatial geometric analysis. By introducing the physical properties of the material, external loads and environmental factors (such as temperature changes, pressure changes, etc.), the three-dimensional deformation model can describe the deformation of the object under various complex working conditions. These deformations include but are not limited to elastic deformation, plastic deformation and thermal expansion caused by temperature changes of the material. Then, mathematical methods (such as finite element analysis, strain-displacement relationship, etc.) are used to establish accurate mathematical relationships between these different types of deformations and laser interferometer data, and the deformation model is further improved so that the laser interferometer data can be used to infer the precise deformation amount of the object surface in all directions.

[0050] Finally, the deformation vector of the object in three-dimensional space is obtained by combining the displacement of multi-beam reflection and interference fringes with the deformation distribution. In order to improve the accuracy of deformation measurement, laser interferometry technology often uses the method of multi-beam reflection, that is, multiple laser beams are simultaneously irradiated to the surface of the object and reflected. The phase difference of these reflected lights is recorded by the interferometer to form multiple interference fringes. The changes in these interference fringes can not only provide information on surface deformation, but also calculate the three-dimensional deformation of the object based on the displacement of the fringes. Specifically, the displacement of the interference fringes is proportional to the deformation of the object surface in different directions. By combining the displacement information of the interference fringes and the deformation distribution of the object, the deformation vector can be accurately obtained. The deformation vector is a three-dimensional vector containing displacement components in the X, Y, and Z directions, which represents the overall deformation state of the object in three-dimensional space.

[0051] The angle-size linkage detection method based on laser interference technology achieves high-precision measurement and analysis of surface deformation of objects by introducing a three-dimensional spatial deformation model and a dynamic coordinate transformation process. Through the changes in laser interference fringes, it can not only capture the slight deformation of the surface of the object in all directions, but also combine the spatial geometric model and multi-beam reflection technology to accurately derive the deformation vector of the object in three-dimensional space. This method provides strong technical support for applications such as high-precision deformation compensation, surface defect detection, and workpiece precision control.

[0052] The S2 part of the angle dimension linkage detection method based on laser interference technology mainly involves the spatial fusion and splicing technology of multi-point laser interference data. This technology aims to achieve all-round and high-precision measurement of the surface deformation of the object by deploying multiple laser interference sensors. First, multiple laser interference sensors are deployed on the surface of the object to be measured to cover the entire detection area. Each sensor unit works independently and measures the deformation of the object surface at a specific position through the principle of laser interference. Each sensor collects local interference fringe data. These fringes are caused by the phase difference between the laser beam and the surface of the object. The change of the fringes reflects the degree of deformation of the surface of the object. Then, by analyzing the displacement of these interference fringes, the deformation vector at each measurement point can be calculated. The deformation vector is a three-dimensional vector that represents the deformation information of the object in the three directions of X, Y, and Z. It can be used to describe the deformation behavior of the object surface such as bending, compression, and stretching in a specific area. However, since each sensor can only measure a small area of ​​the surface of the object and cannot provide comprehensive three-dimensional deformation information, it is necessary to fuse the data from different sensors. Next, the local data measured by multiple laser interferometer sensors are synthesized into a complete three-dimensional deformation model by using a three-dimensional spatial splicing algorithm through coordinate transformation and registration technology. The key to this process is to accurately map the data measured by different sensors to the same global coordinate system so that each local deformation data can be accurately docked in space. The coordinate transformation technology realizes the spatial docking of each local data by converting the local coordinates of the data points measured by each sensor into the corresponding position in the global coordinate system. In order to ensure the accuracy of the data, it is also necessary to adopt the registration technology, that is, by calculating the relative position relationship between different measurement points, to ensure that the data measured by different sensors can be accurately spliced ​​together. This registration process can be achieved through a variety of algorithms, such as the least squares method, the iterative closest point ICP algorithm, etc. The registered data can be seamlessly fused into a complete three-dimensional deformation model, covering the deformation information of the object surface in all directions. Through this process, the local data measured by multiple laser interferometer sensors are effectively combined to form a comprehensive three-dimensional deformation analysis result. Finally, this multi-point data spatial fusion and splicing technology provides high-precision and comprehensive three-dimensional deformation information for deformation detection, greatly improving the reliability and accuracy of the detection results.

[0053] The S3 part of the angle-size linkage detection method based on laser interferometry involves real-time deformation monitoring and compensation algorithms, which aims to ensure that the deformation of the equipment or structure during operation is effectively controlled and corrected through continuous monitoring and real-time compensation. First, a deformation monitoring system is installed, and a laser interferometer is used to perform real-time deformation monitoring of the target equipment or structure. Laser interferometry technology can accurately measure tiny deformation changes on the surface of an object and continuously feedback real-time deformation information through sensors. This information is continuously transmitted to the deformation compensation control system, providing a basis for subsequent data processing and compensation decisions. The deformation data collected by the sensor is usually based on the displacement changes of the interference fringes. By analyzing these data, specific information about the deformation, such as displacement, deformation angle, displacement component, etc., can be obtained. Next, the real-time data is input into the real-time compensation control system, which predicts and corrects the deformation through the particle swarm optimization PSO algorithm. The particle swarm optimization algorithm is an intelligent optimization method that simulates group behavior. It optimizes the parameters of the deformation model by iteratively calculating multiple "particles". The particle swarm optimization algorithm can make predictions based on the deformation data and the actual working status of the equipment, and adjust the compensation parameters to achieve the optimal compensation strategy. Specifically, the particle swarm optimization algorithm gradually finds the best deformation compensation solution by iteratively updating multiple solutions, thereby improving the accuracy and efficiency of deformation compensation. Then, the real-time compensation results are applied in conjunction with the equipment control system. For example, in a robot arm, machine tool or other processing equipment, the compensation results are transmitted to the control system in real time. These control systems usually include servo motors or hydraulic systems. These actuators can adjust the position, posture or other control parameters of the equipment in real time according to the compensation data, thereby achieving real-time compensation for deformation. Through this linkage mechanism, the equipment can adjust the working state according to the deformation data monitored in real time, reduce the impact of deformation on processing accuracy or equipment operation efficiency, and ensure that the system can still maintain high accuracy and high stability under a variety of complex working conditions.

[0054] The S4 part of the angle dimension linkage detection method based on laser interferometry technology involves adaptive interference fringe optimization and dynamic error correction, which aims to improve the accuracy and stability of laser interferometry measurement through real-time monitoring and intelligent algorithm optimization, and ensure that the system can accurately reflect the deformation of the object in a dynamic environment. First, a real-time data analysis system is used to monitor the change trend of the interference fringes. The change of interference fringes usually represents the real-time situation of the surface deformation of the object, and these fringes contain some noise or errors, which come from the external environment, instrument noise, vibration interference or other factors. Through the real-time data analysis system, the change of interference fringes can be effectively monitored, the noise and errors in the fringes can be identified in time, and they can be distinguished from the actual deformation data, thereby ensuring the accuracy and reliability of the measurement data. Next, an adaptive algorithm is used to dynamically adjust the analysis process of interference fringes. The adaptive algorithm can intelligently optimize the collection and processing methods of interference fringes according to the deformation rate and direction of the object. In practical applications, the deformation of objects is often not uniform, and there will be rapidly changing areas or directions. Traditional static processing methods cannot fully cope with such changes. Through the adaptive algorithm, the acquisition frequency, exposure time and resolution accuracy of the interference fringes can be dynamically adjusted according to the real-time deformation information, and the data processing process can be optimized to better adapt to the deformation characteristics under different working conditions. In addition, the algorithm can also optimize the collection and processing methods of interference fringes according to different deformation directions and rates, avoid measurement errors in fast-changing areas, and reduce calculation redundancy in static or slow-changing areas. Through this adaptive adjustment mechanism, not only can the acquisition accuracy of interference fringes be significantly improved, but also the stability and accuracy of the measurement system can be ensured in complex and dynamic working environments. Therefore, the adaptive interference fringe optimization and dynamic error correction technology, through the use of intelligent algorithms, enables laser interferometry to more accurately capture the real information of object deformation, while effectively correcting the errors generated during the measurement process, improving the performance and adaptability of the overall system.

[0055] The S5 part of the angle-size linkage detection method based on laser interferometry involves a deformation compensation model based on boundary conditions and real-time feedback. It aims to establish a dynamic and accurate deformation compensation mechanism by integrating the physical properties of the object and the changes in the external environment, combined with real-time data feedback, to ensure that the deformation of the object can be effectively corrected. In the deformation compensation process, it is first necessary to comprehensively consider the material properties of the object, including the elastic modulus and thermal expansion coefficient, as well as external environmental factors such as temperature changes and load changes. The elastic modulus E describes the material's response to stress, and the thermal expansion coefficient α measures the linear expansion of the material due to temperature changes. Changes in temperature will affect these physical properties of the material, and then affect the overall deformation behavior of the object. Changes in load will also directly affect the deformation of the object. Therefore, the compensation model must consider the combined effects of these factors at the same time. Based on these physical properties and external environmental factors, a dynamic compensation model based on boundary conditions can be established, which can simulate the deformation behavior of the object under different working conditions and make real-time corrections. Boundary conditions usually include the object's support method, constraints, etc., which will change with changes in environmental conditions. Therefore, when performing deformation compensation, the compensation model needs to be dynamically adjusted to adapt to these real-time changes. In actual operation, the deformation behavior of an object is a multi-dimensional, dynamically changing process, which requires the compensation model to not only be able to simulate the physical properties of different materials, but also be able to respond to changes in the external environment in a timely manner, such as temperature and load fluctuations. Next, by combining a real-time feedback control system, the deformation data collected by the sensor is compared with the physical model to calculate the real-time correction amount. This process usually involves real-time analysis of sensor data, and the deformation correction value is calculated in real time by comparing the algorithm with the physical model. Specifically, the sensor continuously obtains the deformation data of the object surface, transmits it to the control system, and generates the correction amount by comparing it with the preset deformation behavior in the physical model. In order to further improve the compensation accuracy, the compensation algorithm usually combines the finite element analysis FEA numerical simulation method to perform real-time correction on the deformation of the equipment. FEA simulation can provide deformation predictions of objects under various working conditions, including the influence of factors such as temperature changes and external loads. These prediction results can provide theoretical support for deformation compensation and ensure the accuracy of the compensation model. By combining these advanced numerical simulation methods, the compensation strategy can be adjusted and optimized in real time to achieve precise control of equipment deformation. Therefore, the deformation compensation model based on boundary conditions and real-time feedback can not only comprehensively consider changes in material properties, environmental factors, and external loads, but also combine feedback control systems with numerical simulations to achieve efficient correction of equipment deformation and ensure the accuracy and stability of the equipment under complex working conditions.

[0056] Example 1

[0057] Combined with Figure 2In this embodiment, it is assumed that a high-precision machine tool needs to be subjected to deformation detection during an industrial manufacturing process. When the machine tool is in working condition, the equipment structure will bend, stretch, compress and other deformations, and these deformations are affected by external environments such as temperature and load. In order to ensure the stability of the accuracy of the equipment during the processing, it is necessary to use laser interferometry technology to accurately measure the deformation and perform linkage compensation. The technical solution of the present invention can monitor and correct the deformation in real time by modeling the three-dimensional deformation of the equipment and combining laser interferometry data with multi-physical field factors to ensure that the equipment is in the best working condition.

[0058] First, in the spatial geometry analysis, the structure of the machine tool is decomposed into multiple basic geometric units. It is assumed that the main components of this machine tool are a beam, several plates and some shells. The structure is complex but can be simplified by these basic units. The deformation of each geometric unit is affected by different mechanical factors, such as bending, stretching and compression. Next, the deformation of each unit is integrated into the geometry of the entire machine tool through spatial geometric transformation. To achieve this, a combined model based on deformation functions is required to comprehensively describe these deformation modes in a three-dimensional spatial coordinate system. Specifically, the surface displacement u(X,t) of the machine tool (that is, the position change of a point on the surface of the machine tool at a certain moment) can be expressed as a linear combination of a series of deformation modes:

[0059]

[0060] u(X,t) represents the displacement field of a point on the surface of the device at the spatial position X = (X, Y, Z) and time t; X is the three-dimensional spatial coordinate; X, Y, and Z represent the position of the device in three orthogonal directions respectively; t represents time, indicating that the deformation changes with time; the coefficient α of each deformation mode i (t) represents the coefficient of the i-th deformation mode (such as bending, stretching, compression) changing with time; f i (X) represents the distribution function of the i-th deformation mode in space; N is the number of deformation modes, which usually includes deformation modes such as bending, stretching and compression.

[0061] In this model, several common deformation modes are specifically defined:

[0062] 1. Bending: When a part of a machine tool is subjected to external load, bending deformation usually occurs. The distribution function of bending is f bend (X) takes the form of a curve or polynomial, which is closely related to the geometric shape and mechanical properties of the device.

[0063] 2. Stretching: Stretching usually occurs when an object is subjected to external tension. The distribution function of stretching f stretch (X) varies linearly, depending on the magnitude and direction of the force.

[0064] 3. Compression: Compression deformation occurs when the device is subjected to external pressure. The distribution function of compression f compress (X) is also usually in linear or nonlinear form.

[0065] Assuming that at a certain moment, the external load of the machine tool causes bending, stretching and compression deformation of some parts, these deformations can be monitored in real time through laser interferometry technology. Specifically, the laser interferometer will emit a laser beam, and after reflecting from the surface of the object, the change of the interference fringes can reflect the slight deformation of the surface of the equipment. It is necessary to combine these fringe data with the three-dimensional deformation model in the spatial coordinate system to calculate the displacement u(X, t) in different directions, and then obtain the overall deformation of the machine tool.

[0066] For example, assuming that the stress condition of a certain part of the machine tool leads to bending deformation, its distribution function f bend (X) Form

[0067] f bend (X) = sin(kX)

[0068] Here, k is the wave number of the bend, which determines the amplitude and wavelength of the bend. In this case, the coefficient of the bend deformation, α bend (t) changes with time and is related to factors such as load size and position, temperature change, etc. The surface displacement is measured in real time by laser interferometry data and combined with the spatial geometric model to obtain the following deformation field:

[0069] u bend (X, t) = α bend (t)·sin(kX)

[0070] Similarly, for tensile and compressive deformations, there are similar distribution functions f stretch (X) and f compress (X), each deformation mode can be quantified by the corresponding coefficient and fitted with the laser interferometry data to obtain an accurate displacement field.

[0071] Assume that the displacement u(X, t) of a point on the machine tool surface is 0.005mm through laser interferometry technology, and the three-dimensional coordinates of the point are X=(100,200,300). Then the deformation at the point can be calculated by the deformation function and coefficient. At this time, there are three deformation modes: bending, stretching, and compression, and the corresponding distribution function is f bend (X) = sin(0.01X), f stretch (X) = 0.002X, and f compress (X) = 0.001X 2 , the corresponding coefficients are:

[0072] αbend (t) = 0.03

[0073] α stretch (t) = 0.02

[0074] α compress (t) = 0.01

[0075] Then the displacement of the point can be obtained according to the combined model:

[0076] u(X, t)=0.03·sin(0.01·100)+0.02·(0.002·100)+0.01·(0.001·100 2 )

[0077] u(X,t)=0.03·sin(1)+0.02·0.2+0.01·1

[0078] u(X,t)=0.03·0.841+0.004+0.01

[0079] u(X,t)=0.02523+0.004+0.01=0.03923mm

[0080] Therefore, at this position, the total displacement of the device surface is 0.03923mm, which can be measured in real time by laser interferometry technology and corresponding deformation compensation can be performed. This method can not only quantify different types of deformation, but also adjust and optimize the compensation strategy in real time to ensure that the accuracy of the device remains stable in a changing working environment.

[0081] The displacement u(X, t) of a point on the machine tool surface is set to 0.005 mm through laser interferometry technology, and the three-dimensional coordinates of the point are X = (100, 200, 300). According to the above-set deformation mode and corresponding coefficients, the displacement of the point can be calculated:

[0082] 1. Contribution of bending deformation: The distribution function of bending is f bend (X) = sin(0.01X), the corresponding coefficient is α bend (t) = 0.03, so the contribution of bending deformation is:

[0083] u bend (X, t) = α bend (t)·sin(0.01·100)=0.03·sin(1)≈0.03·0.841=0.02523mm

[0084] 2. Contribution of tensile deformation: The distribution function of stretching is f stretch (X) = 0.002X, the corresponding coefficient is α stretch(t) = 0.02, so the contribution of tensile deformation is:

[0085] u stretch (X, t) = α stretch (t)·(0.002·100)=0.02·0.2=0.004mm

[0086] 3. Contribution of compression deformation: The distribution function of compression is f compress (X) = 0.001X 2 , the corresponding coefficient is α compress (t) = 0.01, so the contribution of compression deformation is:

[0087] u compress (X, t) = α compress (t)·(0.001·100 2 )=0.01·1=0.01mm

[0088] Therefore, the total displacement of the device surface at this location is:

[0089] u(X, t) = u bend (X, t)+u stretch (X, t)+u compress (X, t)=0.02523+0.004+0.01=0.03923mm

[0090] According to the principle of laser interference, the laser interferometer generates interference fringes by monitoring the phase difference between the laser beam and the surface of the object. These phase differences are closely related to the deformation of the device surface, and the phase change Δφ(X) caused by the deformation can be calculated by the following formula:

[0091]

[0092] Where Δφ(X) represents the phase change at spatial position X, is the gradient of the displacement field on the device surface, S(X) is the optical path function used to calculate the optical path difference, Ω is the integration area (indicating the spatial range of the interference measurement), and dΩ is the tiny area element in the area. Through this formula, the phase change measured by the laser interferometer can be associated with the deformation of the device, thereby accurately measuring the surface displacement of the device.

[0093] This angle-size linkage detection method based on laser interferometry technology can accurately quantify the three-dimensional deformation of machine tools under different working conditions. Using the measurement results of laser interferometer and phase change, combined with the deformation model, the status of the equipment can be monitored in real time, and necessary deformation compensation can be performed to ensure that the processing accuracy of the equipment is always maintained at the optimal level. This method not only effectively improves the accuracy of deformation detection, but also can adjust and optimize the control strategy of the equipment in real time to ensure the high-precision operation of the machine tool in complex working environments.

[0094] In the angle dimension linkage detection method based on laser interferometry technology, by minimizing the error between laser interferometry data and model prediction, the parameters of the deformation model can be optimized and the deformation state of the equipment during operation can be accurately determined. Taking the deformation detection of machine tools as an example, the application and feasibility of the optimization process are explained in detail.

[0095] First, the laser interferometer captures deformation information by measuring the phase change of the interference fringes on the surface of the device. On the machine tool, several interference fringes have been measured by laser interferometry. The phase change of each interference fringes reflects the deformation of different positions on the surface of the device. These phase changes have a certain mathematical relationship with the geometric deformation of the device. By minimizing the error and optimizing the parameters of the deformation model, the overall deformation of the device surface can be accurately derived.

[0096] In order to optimize the deformation model, the nonlinear least squares method is used. The goal is to minimize the error between the interference data and the predicted deformation model. This optimization problem can be expressed as:

[0097]

[0098] In this formula, represents the optimized deformation data, which is the optimal deformation field obtained by minimizing the error; Δφ i represents the phase change of the i-th interference fringe. The laser interferometer measures the phase change of each interference fringe, reflecting the surface deformation at different positions. i ) is the predicted value of the deformation model for the i-th interference fringe; is the optical path gradient of the i-th interference fringe, which is controlled by the device surface position X and the geometric relationship between the beam and the surface; Ω is the integration area, which represents the spatial range of the interference measurement, It means summing the errors of all interference fringes, and there are M interference fringes in total.

[0099] In order to understand the feasibility of this optimization process, it is assumed that the machine tool surface undergoes complex deformations under external loads, including bending, stretching, and compression. These deformation modes are respectively related to the time-varying coefficient α bend (t), α stretch(t) and α compress (t) is related, and the phase change of each interference fringe can be measured by laser interferometry.

[0100] It is assumed that three deformations occur on the machine tool surface: bending, stretching and compression, and the phase changes of three interference fringes have been measured, which are:

[0101] The phase change of the first interference fringe is Δφ 1 =0.03rad;

[0102] The phase change of the second interference fringe is Δφ 2 =0.02rad;

[0103] The phase change of the third interference fringe is Δφ 3 =0.01rad.

[0104] In addition, the optical path gradient function of the device surface is set This has been obtained through preliminary geometric modeling and interference experiments. Next, optimization needs to be carried out based on these data.

[0105] In the actual optimization process, the predicted phase change g(u i ). Assuming the initial estimate, the model predicts the phase change to be:

[0106] For the first interference fringe, the predicted phase change g(u 1 )=0.032rad;

[0107] For the second interference fringe, the predicted phase change g(u 2 )=0.022rad;

[0108] For the third interference fringe, the predicted phase change g(u 3 )=0.012rad.

[0109] Using these predictions, calculate the sum of squared errors:

[0110]

[0111] The calculation results are:

[0112] E=(0.002) 2 +(0.002) 2 +(0.002) 2 =3×10 -6 rad 2

[0113] Next, the model parameter α is adjusted by nonlinear least squares methodbend (t), α stretch (t) and α compress (t), until the error is minimized, thus obtaining the optimal deformation data

[0114] Through optimization, the deformation data obtained is set It can more accurately reflect the actual deformation of the machine tool surface, and the error between the optimized deformation value and the interference data has been minimized. For example, the total displacement after optimization is 0.0391mm, while the initial estimated value is 0.03923mm. Through this optimization, the detection accuracy can be further improved.

[0115] Through the optimized deformation data, the phase change of each interference fringe is further calculated and re-substituted into the calculation formula of the optical path difference. The phase change can be calculated using the following formula:

[0116]

[0117] This calculation will take into account the displacement gradient and optical path gradient of each point on the device surface, and integrate the phase change of the entire area to accurately quantify the deformation of the device surface. In this way, more accurate displacement data can be obtained and the control strategy of the machine tool can be further optimized.

[0118] By minimizing the error between the laser interference data and the theoretical deformation model, the prediction model of the equipment surface deformation can be accurately optimized to improve the accuracy of deformation detection. During the high-precision machining process of the machine tool, this method can monitor and compensate for the deformation in real time to ensure that the equipment is always in the best working condition. This not only improves the detection accuracy, but also provides reliable technical support for precision control in industrial manufacturing.

[0119] Example 2

[0120] Combined with Figure 3 In this embodiment, it is demonstrated how to use laser interferometry technology combined with temperature changes, load changes and dynamic adjustment of material physical properties to achieve high-precision deformation detection and compensation. The practical application of this method and its calculation process are explained with the working state of a precision machine tool as the background.

[0121] Suppose a high-precision machine tool is used in a manufacturing workshop, and the machining accuracy of the machine tool is affected by temperature changes and external loads. During operation, some parts of the machine tool, especially the metal frame or beam-like structure, will produce thermal expansion due to the increase in temperature. At the same time, due to the external loads during the machining process, different deformation modes will be generated. In order to achieve deformation compensation and maintain the machining accuracy of the machine tool, these deformations need to be dynamically adjusted through real-time monitoring and the construction of compensation models.

[0122] First, the laser interferometer is used to measure the tiny deformation of the machine tool surface, and the displacement field data is obtained through the change of interference fringes, and the deformation of the equipment in the X, Y, and Z directions is calculated based on the three-dimensional deformation model. Next, external environmental factors such as temperature changes and load changes are introduced into the compensation model, and the dynamic changes of the elastic modulus and thermal expansion coefficient of the material with temperature changes are comprehensively considered.

[0123] The basic mathematical relationship of the compensation model is:

[0124]

[0125] In this formula:

[0126] ΔL represents the total deformation of the object, that is, the change in the length or size of the object;

[0127] α(T) is the thermal expansion coefficient of the material at temperature T, which indicates the rate of dimensional change caused by a unit temperature change;

[0128] ΔT=T final -T initial is the amount of temperature change experienced by the object;

[0129] L 0 is the initial length or initial size of the object;

[0130] σ(T) is the stress of the material at temperature T, which represents the internal stress caused by temperature;

[0131] E(T) is the elastic modulus of the material at temperature T, which indicates the material's ability to resist elastic deformation.

[0132] In order to better illustrate this compensation process, some setting data are set for calculation.

[0133] 1. Set the initial length L of a certain part of the machine tool 0 =1000mm, that is, the initial size of the component is 1 meter.

[0134] 2. The operating temperature of the component is from T initial =20℃ rise to T final =50°C, so the temperature change ΔT=50-20=30°C.

[0135] 3. Set the thermal expansion coefficient α(T) of the material to change with temperature as a linear function, and the value range is α(T)∈[10×10 -6 ,20×10 -6 ]1 / ℃.

[0136] 4. Set the material stress σ(T) = 50 MPa at 50°C and the material elastic modulus E(T) = 210 GPa (a common value for steel).

[0137] First, calculate the thermal expansion deformation caused by temperature change based on the thermal expansion coefficient of the material. The calculation formula for thermal expansion is:

[0138]

[0139] Since α(T) changes linearly, the calculation can be simplified and α(T) = 15 × 10 -6 1 / ℃ as the average value.

[0140] Therefore, the thermal expansion deformation is:

[0141] ΔL thermal =(15×10 -6 )×30×1000=0.45mm

[0142] This means that the temperature increase causes the length of the machine tool component to increase by 0.45 mm.

[0143] Next, calculate the deformation caused by the external load. According to elastic theory, there is the following relationship between deformation, stress and the elastic modulus of the material:

[0144]

[0145] Substitute the setting data:

[0146]

[0147] This means that the length of the machine tool component increased by 0.238 mm due to internal stress caused by temperature changes.

[0148] Finally, the deformations due to thermal expansion and stress are added together to obtain the total deformation of the object:

[0149] ΔL=ΔL thermal +ΔL stress =0.45mm+0.238mm=0.688mm

[0150] Therefore, during the temperature increase from 20°C to 50°C, the total deformation of the machine tool component is 0.688 mm.

[0151] In actual operation, the laser interferometer monitors the surface deformation of machine tool components in real time and feeds the measured data back to the real-time compensation control system. The system compares the real-time deformation data with the predetermined compensation model, calculates the correction amount of deformation, and dynamically adjusts the control system of the equipment. The compensation control system adjusts the position of machine tool components through servo motors or hydraulic systems to reduce deformation caused by thermal expansion and load changes, thereby maintaining the machining accuracy of the machine tool.

[0152] By combining laser interferometry technology with real-time monitoring and compensation of temperature, load, and material physical properties, the above compensation model method can achieve accurate prediction and correction of machine tool deformation under dynamic conditions. In practical applications, through real-time feedback mechanism, optimized compensation strategy and control system, the machining accuracy of machine tools can be significantly improved, and the deformation compensation problem in complex environments that traditional methods are difficult to cope with can be solved.

[0153] Dynamic Boundary Condition Model

[0154] According to the model, the boundary conditions of the object need to be updated in real time, including the position of the support points and the size of the external load. The model is described by the following formula:

[0155]

[0156] In this formula:

[0157] F(t) is the internal force of the object at time t, reflecting the reaction force generated by stress and deformation inside the object;

[0158] K(t) is the stiffness matrix of the object, which reflects the object's ability to resist external forces;

[0159] Au(t) is the displacement of the object at time t, which indicates the deformation of the object after being acted upon by an external force;

[0160] F ext (t) is the externally applied load, which varies with time and environmental conditions.

[0161] For the sake of explanation, it is assumed that the support beam of the machine tool experiences the following conditions during operation:

[0162] 1. Initial temperature and environment: The initial operating temperature of the machine tool is T initial =20℃, the temperature rises to T final =50°C, so the temperature change ΔT=30°C.

[0163] 2. Material properties: The material of the machine tool parts is set to steel, and the thermal expansion coefficient α (T) of steel is taken as the average value of 15×10 -61 / ℃, stress σ(T)=50MPa, elastic modulus E(T)=210GPa (common value for steel).

[0164] 3. Initial length: Set the initial length of the support beam to L 0 =1000mm.

[0165] 4. External load: Set the external load F that the machine tool will apply during operation. ext (t) = 1000N, and this load varies with time.

[0166] Calculation steps

[0167] As the temperature rises, the material will expand. First, we need to calculate the deformation caused by thermal expansion. The calculation formula for thermal expansion deformation is:

[0168]

[0169] Since α(T) is a constant 15×10 -6 1 / ℃, the temperature change is 30℃, the calculation can be simplified:

[0170] ΔL thermal =(15×10 -6 )×30×1000=0.45mm

[0171] This means that the length of the machine tool component increased by 0.45 mm due to temperature changes.

[0172] Next, the deformation imposed by the external load is calculated. According to elastic theory, the relationship between deformation, stress and the elastic modulus of the material is:

[0173]

[0174] Substitute the known data:

[0175] This means that external loads are applied to the machine tool components, resulting in an increase in length of 0.238 mm.

[0176] By adding the deformation caused by thermal expansion and the deformation caused by external load, the total deformation of the object is obtained:

[0177] ΔL=ΔL thermal +ΔL stress =0.45mm+0.238mm=0.688mm

[0178] Therefore, during the temperature increase from 20°C to 50°C, the total deformation of the machine tool component is 0.688 mm.

[0179] Based on laser interferometry technology, the deformation of the machine tool surface is monitored in real time. The displacement field data provided by the laser interferometer can be used to obtain the object deformation at each moment and feed it back to the real-time compensation system. The compensation system will update the boundary conditions of the support point position and load size according to the dynamic boundary condition model, and adjust the control system of the machine tool to compensate for the deformation caused by temperature changes and external loads. Through real-time calculation, it is ensured that the machine tool can maintain the required accuracy during the processing process.

[0180] In the machine tool manufacturing process, especially under the influence of environmental factors such as temperature and external loads, the deformation of the equipment is not only caused by a single factor (such as temperature change or external load), but is a complex process of interaction between thermal, mechanical and environmental conditions. In order to accurately measure and compensate for these influences, it is necessary to introduce multi-physics field coupling analysis to comprehensively model the interaction between thermal, mechanical and external load factors, thereby providing accurate data support for deformation compensation. In this case, through actual application scenarios, it will be demonstrated in detail how to achieve real-time monitoring and compensation of machine tool deformation through the angle-size linkage detection method of laser interferometry technology combined with multi-physics field coupling analysis.

[0181] Application of Multiphysics Coupled Models

[0182] These complex interactions are described by a multi-physics coupling analysis model. The model combines the effects of thermal expansion, stress, and elastic deformation and is expressed by the following formula:

[0183]

[0184] In this formula:

[0185] ∈tota l It represents the total strain of an object, reflecting the influence of thermal expansion, stress and elastic deformation on the total deformation of the object.

[0186] α(T) is the thermal expansion coefficient of the material at temperature T, with the unit of 1 / °C, which represents the change in geometric size caused by a unit temperature change.

[0187] σ(T) is the stress of a material at temperature T, which is usually caused by the combined effect of external loads and temperature changes and is expressed in Pascals (Pa).

[0188] E(T) is the elastic modulus of the material at temperature T, expressed in Pascals (Pa), which reflects the material's resistance to elastic deformation.

[0189] For ease of understanding, assume that the support beams and frames of the machine tool are made of steel and are affected by temperature and load under certain working conditions. Assume that the material parameters of the machine tool components are as follows:

[0190] Thermal expansion coefficient: The thermal expansion coefficient of steel (α(T)) is (15×10 -6 1 / ℃).

[0191] Temperature change: The operating temperature of the machine tool changes from T initial =20℃ rise to T final =50°C, so the temperature change ΔT=30°C.

[0192] Stress: The stress σ(T) due to external loads and temperature is assumed to be 50 MPa (a common value for steel).

[0193] Elastic modulus: The elastic modulus E(T) of steel at temperature T is assumed to be 210 GPa (a common value for steel).

[0194] Time interval: Assume that the time range of the analysis is from t=0 to t=100s.

[0195] Calculation steps

[0196] Step 1: Calculate the strain due to thermal expansion

[0197] First, calculate the strain caused by thermal expansion. Assume that the length of the metal part of the machine tool is L 0 =1000mm, the strain caused by thermal expansion can be calculated by the following formula:

[0198]

[0199] This means that the length of the machine tool will change by 0.45 mm due to temperature changes.

[0200] Step 2: Calculate the strain caused by stress

[0201] Next, calculate the strain caused by the external load. According to elastic theory, the relationship between the deformation caused by stress and the elastic modulus is:

[0202]

[0203] This means that the length of the machine tool component has changed by about 0.238 mm due to stresses caused by external loads and temperature.

[0204] Step 3: Calculate the total strain

[0205] Adding the strain caused by thermal expansion and the strain caused by stress, the total strain of the machine tool component is obtained:

[0206] ∈ total =∈ thermal +∈ stress =0.00045mm+2.38×10 -4 mm=0.000688mm

[0207] Therefore, the total strain of the machine tool component is 0.688 mm.

[0208] The total strain value (0.688 mm) calculated by the multi-physics field coupling model provides important data support for real-time compensation. Laser interferometry technology can accurately monitor the surface deformation of machine tool components and adjust the control parameters of the machine tool (such as position, angle, load, etc.) through real-time feedback compensation system to eliminate deformation caused by factors such as temperature and stress. This compensation method can ensure that the machine tool maintains accuracy during the processing, improve manufacturing quality, and reduce processing errors caused by deformation.

[0209] By introducing a multi-physics field coupling analysis model and combining it with the angle-size linkage detection method of laser interferometry technology, the deformation of machine tools under complex environmental conditions can be effectively monitored and compensated. Through real-time analysis and calculation of temperature, external loads, and material properties, accurate prediction and compensation of machine tool deformation can be achieved, ensuring high precision and stability during machine tool processing. This method is not only applicable to the field of high-precision manufacturing, but can also be extended to other fields such as aerospace, precision instruments, etc.

Claims

1. Angle dimension linkage detection method based on laser interferometry technology, characterized by The following steps are involved: S1. Modeling of laser interference principle of three-dimensional spatial deformation: S1.

1. Measure the tiny deformation of the surface of an object through laser interference technology; add a three-dimensional coordinate transformation model to the change of the laser interference fringes to calculate the deformation in each direction of X, Y, and Z; S1.

2. Design a three-dimensional deformation model based on spatial geometric analysis, integrate equipment predictions of various deformation modes including bending, twisting, stretching, and compression, and establish a mathematical relationship between the model and the laser interferometer data; S1.3, by combining the multi-beam reflection, the displacement of the interference fringes and the deformation distribution, the deformation vector in the three-dimensional space is obtained; S2. Spatial fusion and splicing technology of multi-point laser interferometry data: S2.

1. Arrange multiple laser interferometer sensors to cover the area of ​​the object to be measured; at each measuring point, the laser interferometer sensor collects local interference fringe data and calculates the corresponding deformation vector; S2.2, using a three-dimensional space stitching algorithm, synthesizing a three-dimensional deformation model by using coordinate transformation and registration technology to combine local data measured by multiple sensors; S3, Real-time deformation monitoring and compensation algorithm: S3.

1. Install a deformation monitoring system; use a laser interferometer to monitor the structural deformation in real time, and continuously feedback the deformation information through sensors; S3.

2. Input the real-time data into the real-time compensation control system, and use the particle swarm optimization advanced algorithm to predict and correct the deformation; adjust the compensation parameters according to the actual working state and deformation data; S3.3, combined with the control system of the equipment including the robot arm, machine tool or processing equipment, the compensation result is transmitted to the control system in real time, and the equipment position is adjusted through the servo motor or hydraulic system to control the compensation of deformation; S4, Adaptive interference fringe optimization and dynamic error correction: S4.

1. Monitor the changing trend of interference fringes through real-time data analysis system; Identify noise and errors in fringes; S4.2, using adaptive algorithms to dynamically adjust the interference fringe analysis process, and optimizing the collection and processing of interference fringes according to the deformation rate and direction of the object; S5. Deformation compensation model based on boundary conditions and real-time feedback: S5.

1. In the deformation compensation process, the physical properties of the object including the elastic modulus and thermal expansion coefficient of the material and the external environment including temperature change and load change are comprehensively considered; the deformation behavior of the object under different conditions is simulated by establishing a dynamic compensation model based on boundary conditions; S5.

2. Combined with the real-time feedback control system, the deformation data collected by the sensor is compared with the physical model to calculate the correction amount; the deformation of the equipment is corrected in real time through the compensation algorithm including the finite element analysis FEA numerical simulation method.

2. The angle dimension linkage detection method based on laser interferometry technology according to claim 1 is characterized in that The laser interference principle modeling method of three-dimensional spatial deformation includes: In the spatial geometry analysis, the equipment is decomposed into several basic geometric units including beams, plates and shells; the deformation of each unit is affected by different mechanical factors including bending, stretching and compression; then through spatial geometry transformation, the geometric shape, material properties and external loads of the equipment are integrated, and a combined model based on deformation function is introduced to comprehensively describe various deformation modes in the spatial coordinate system: Among them: u(X,t) represents the displacement field of a point on the surface of the device at spatial position X and time t; the vector contains the displacement caused by all deformation modes in space; X = (X, Y, Z) represents the position coordinates in the spatial coordinate system, where X, Y, and Z represent the position of the device in three orthogonal directions respectively; t represents time, indicating the change of deformation over time; α i (t) represents the coefficient of the i-th deformation mode including bending and stretching changing with time; f i (X) represents the distribution function of the i-th deformation mode in space; N represents the number of deformation modes, including bending, stretching, and compression.

3. The angle dimension linkage detection method based on laser interferometry technology according to claim 2 is characterized in that The laser interference principle modeling method for three-dimensional spatial deformation includes: a laser interferometer generates interference fringes by monitoring the phase difference between a laser beam and an object surface; each deformation mode causes different changes in the interference fringes; and a mathematical relationship between the laser interference fringes and the three-dimensional deformation is established by calculating the optical path difference.

4. The angle dimension linkage detection method based on laser interferometry technology according to claim 3 is characterized in that The laser interference principle modeling method for three-dimensional spatial deformation includes: determining the intensity and distribution of each deformation mode by minimizing the error between laser interference data and model prediction; and controlling the fitting result by adjusting the parameters of the deformation model using a nonlinear least squares method in the optimization process.

5. The angle dimension linkage detection method based on laser interferometry technology according to claim 1 is characterized in that The deformation compensation model construction method based on boundary conditions and real-time feedback: The deformation behavior of the object under different working conditions is simulated in real time, and the elastic modulus E and thermal expansion coefficient α of the material are dynamically adjusted. The compensation model reflects the dynamic changes of material properties with temperature changes, and describes the comprehensive effects of temperature changes, load changes and physical properties of the material on the deformation of the object through the following formula: Where ΔL is the total deformation of the object, which indicates the change in the length or size of the object; α(T) is the thermal expansion coefficient of the material at temperature T, which indicates the rate of dimensional change caused by a unit temperature change; ΔT is the temperature change experienced by the object, usually T final T initial ; L0 is the initial length or initial size of the object; σ(T) is the stress of the material at temperature T, and E(T) is the elastic modulus at temperature T, which indicates the ability of the material to resist elastic deformation.

6. The angle dimension linkage detection method based on laser interferometry technology according to claim 5 is characterized in that The deformation compensation model construction method based on boundary conditions and real-time feedback: The dynamic boundary condition model is introduced to update the boundary conditions including the support point position and load size in real time according to the changes in the environment; it is described by the formula: Among them, F(t) is the internal force of the object at time t, which represents the reaction force generated by stress and deformation inside the object; K(t) is the stiffness matrix of the object, which reflects the resistance of the object to external forces, and its value will change with the changes of environmental conditions including temperature and load; Δu(t) is the displacement of the object at time t, which represents the deformation of the object under the action of force; F ext (t) is the externally applied load, which varies with time and environmental conditions including temperature and load magnitude.

7. The angle dimension linkage detection method based on laser interferometry technology according to claim 6 is characterized in that The method for constructing a deformation compensation model based on boundary conditions and real-time feedback: through multi-physical field coupling analysis, the interaction between thermal, mechanical and external loads is integrated; when the temperature changes, thermal expansion changes the geometric shape of the object and the elastic modulus of the material, which in turn affects the deformation process.

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