Clamping device and transportation device comprising same

Abstract

The present disclosure relates to a gripping apparatus connected to a vehicle for transporting an article to be transported in a semiconductor manufacturing plant, the gripping apparatus comprising: a base unit provided on the vehicle to be movable up and down; and a hand unit disposed on the base unit and having an adjustable pitch to fix or release an article, in which the hand unit includes: a motor; the conversion module is used for converting the rotary motion of the motor into linear motion; the clamping device is connected to the conversion module, and the distance between the clamping device and the conversion module is adjusted together.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims priority from Korean Patent Application No. 10-2023-0137416 filed on October 16, 2023 in the Korean Intellectual Property Office, and all rights and benefits therefrom under 35 U.S.C. 119, the entire contents of which are incorporated herein by reference. Technical Field

[0003] The invention relates to a clamping device and a transport device comprising the clamping device. Background Art

[0004] In order to manufacture semiconductor devices, processes such as deposition, lithography, and etching are performed using corresponding semiconductor processing equipment within a semiconductor production line. Objects such as wafers that are essential to such semiconductor manufacturing processes can be stored in containers similar to front opening unified pods (FOUPs) and delivered to each semiconductor processing equipment. After completing the semiconductor manufacturing process, the objects are returned to the containers from each semiconductor processing equipment, and then these filled containers can be transported to the outside.

[0005] These containers can be transported between manufacturing process facilities using conveying equipment such as an overhead hoist transport (OUT) system. For example, these conveying equipment may include a vehicle configured to travel on a track mounted on the ceiling of a clean room.

[0006] In a semiconductor production line, it is necessary to transport not only substrates and / or chips, but also various items (such as tapes) that need to be packed in boxes. Therefore, improvements are needed to be able to transport these items using existing facilities without requiring operators to manually lift boxes. Summary of the invention

[0007] Aspects of the present disclosure provide a gripping apparatus capable of transporting various items using a transport device generally used to transfer a substrate, and a transport device including the gripping apparatus.

[0008] However, aspects of the present disclosure are not limited to those set forth herein. The above and other aspects of the present disclosure will become apparent to those skilled in the art to which the present disclosure pertains by referring to the detailed description of the present disclosure given below.

[0009] According to aspects of the present invention, a gripping device connected to a vehicle for transporting items to be transported in a semiconductor manufacturing plant includes: a base unit, which is arranged on the vehicle so as to be able to move up and down; and a hand unit, which is arranged on the base unit and has an adjustable spacing to fix or release the item, wherein the hand unit includes: a motor; a conversion module, which converts the rotational motion of the motor into linear motion; and a gripper, which is connected to the conversion module and the spacing of the gripper is adjusted together with the conversion module.

[0010] According to another aspect of the present disclosure, a transport device includes: a vehicle for transporting items to be transported in a semiconductor manufacturing plant; and the aforementioned gripping apparatus.

[0011] According to another aspect of the present disclosure, the transport device includes: a plurality of vehicles, the plurality of vehicles are used to transport box-shaped objects to be transported in a semiconductor manufacturing plant, the objects including a first target object and a second target object, the first target object is supported on a first stand and has a first specification and a second specification, the second target object is supported on a second stand and has a third specification and a fourth specification different from the first specification and the second specification; a base unit, the base unit is arranged on the vehicle so as to be able to move up and down, the base unit includes a first plate and a second plate, the first plate is connected to one of the vehicles, and the second plate is connected to the other of the vehicles; and a hand unit, the hand unit is used to clamp or release the object, the hand unit is arranged on the base unit and has an adjustable spacing to fix or release the object, wherein the hand unit includes The present invention comprises: a first hand module, the first hand module is used to clamp or release a first target object, the first target object includes a first coupling and a first sensor, the first protrusion is arranged in the first coupling, the first sensor is used to detect the first bracket; and a second hand module, the second hand module is used to clamp or release a second target object, the second hand module includes a second coupling arranged in the arrangement groove, the first hand module includes: a first motor, the first motor includes a first shaft and a first bracket, the first shaft has a first thread formed on its outer circumferential surface, the first bracket enables the first shaft to be rotatable, and the first bracket is fixed to the first plate; a first moving module, the first moving module includes a linear motion 14. The linear motion module of claim 13, wherein the first moving block comprises a first moving block and a first connecting block, wherein the first moving block is provided at both ends of the linear motion guide and has a first through hole having a second thread engaged with the first thread formed on its inner circumference, and the first connecting block is bent toward the first motor; and a pair of first clamps, wherein the first clamps are connected to the first moving module and are provided with a first supporting plate at the bottom thereof, wherein the first supporting plate extends downward toward the first target object to contact the lower surface of the first target object, and the second clamps are provided with a first supporting plate at the bottom thereof, wherein the first supporting plate extends downward toward the first target object to contact the lower surface of the first target object, and the second clamps are provided with a first through hole having a second thread engaged with the first thread formed on its inner circumference. The module includes: a second motor provided with a second shaft having a third thread formed on an outer circumferential surface thereof; a second moving module including a second connecting block and a pair of second moving blocks, the second connecting block having a second through hole having a fourth thread engaged with the third thread, the second connecting block moving linearly by receiving a rotational force from the second motor, and the second connecting block being bent at both ends into an acute angle or an obtuse angle, the second connecting block having a guide hole formed therein, the second moving block including a cam follower sliding or pulling along the guide hole, and the spacing of the second moving block being adjustable together with the second connecting block;A pair of second grippers connected to the second moving module and including a first rod having a curved surface opposite to the circumferential surface of the second target object and an extending surface extending downward from the curved surface, a second supporting plate provided at the lower end of the first rod and extending toward the second target object to support the lower surface of the second target object, and a third supporting plate extending in a direction different from the curved surface of the first rod to be opposite to the circumferential surface of the second target object; and a fixed block including a first block connected to the second plate and contacting the second target object having the third specification, a second block connected to the second plate and contacting the second target object having the fourth specification, and a third sensor for detecting contact with the second target object. ;

[0012] It should be noted that the effects of the present disclosure are not limited to the effects described above, and other effects of the present disclosure will be apparent from the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] The above and other aspects and features of the present disclosure will become more apparent through the detailed description of exemplary embodiments of the present disclosure with reference to the accompanying drawings, in which:

[0014] Figure 1 shows how a transport device according to some embodiments of the present disclosure transports items;

[0015] Figure 2 shows a first target item transported by a transport device according to some embodiments of the present disclosure;

[0016] Figure 3 showing a second target item transported by a transport device according to some embodiments of the present disclosure;

[0017] Figure 4 A front view showing a state of a first hand module for lifting a clamping device in a transport device according to some embodiments of the present disclosure;

[0018] Figure 5 A front view showing a state in which a first hand module of a clamping device is lowered in a transport device according to some embodiments of the present disclosure;

[0019] Figure 6 A front view showing a state in which a first hand module of a clamping device in a transport device according to some embodiments of the present disclosure clamps an object to be transported;

[0020] Figure 7 A perspective view showing a first hand module of a clamping device according to a first embodiment of the present disclosure;

[0021] Figure 8A perspective view showing a state in which the interval in the first hand module of the clamping device according to the first embodiment of the present disclosure is widened;

[0022] Fig. 9 A perspective view showing a state in which the interval in the first hand module of the clamping device according to the first embodiment of the present disclosure is reduced so that the first hand module contacts the object to be transported;

[0023] Fig.10 A front view showing a second hand module of a clamping device according to some embodiments of the present disclosure;

[0024] Fig.11 is a perspective view of a state in which the interval in the second hand module of the clamping device according to the first embodiment of the present disclosure is widened; and

[0025] Fig.12 A perspective view showing a state in which a spacing in a second hand module of the gripping device according to the first embodiment of the present disclosure is reduced to grip an object to be transported. DETAILED DESCRIPTION

[0026] The following detailed description provides preferred embodiments of the present disclosure with reference to the accompanying drawings. The advantages and features of the present disclosure, as well as methods for achieving them, will become apparent with reference to the following detailed embodiments in conjunction with the accompanying drawings. However, the present disclosure is not limited to the embodiments disclosed herein, and can be implemented in various forms. The embodiments provided are intended to fully disclose the present invention and convey the full scope of the present invention to those skilled in the art. The present invention is limited only by the scope of the claims. Throughout the specification, the same reference numerals represent the same elements.

[0027] The terms used in this specification are intended to describe embodiments and are not intended to limit the present invention. In this specification, unless otherwise specified, the singular includes the plural. The terms "comprises" and / or "comprising" used herein do not exclude the presence or addition of one or more other elements, steps, operations and / or features.

[0028] Figure 1 It shows how a transport device according to some embodiments of the present disclosure transports items. Figure 2 A first target item transported by a transport device according to some embodiments of the present disclosure is shown, and Figure 3 A second target item transported by a transport device according to some embodiments of the present disclosure is shown.

[0029] First reference Figure 1 , the transport device 100 can transport the item 50 to be transported to a target location within a semiconductor manufacturing plant.

[0030] The target location may be a place in a semiconductor manufacturing plant where various items are needed, but the present disclosure is not limited thereto. There may be multiple target locations in a semiconductor manufacturing plant. A transport path may be provided to pass through the target locations in the semiconductor manufacturing plant.

[0031] The transport path may be defined by travel rails R1 and R2 connected to the ceiling. A location for loading the article 50 may be provided below the travel rails R1 and R2. The travel rails R1 and R2 include straight segments and curved segments.

[0032] The object 50 may be various types of boxes for storing various objects, but the present disclosure is not limited thereto. For example, the object 50 will be described as a box body hereinafter.

[0033] Reference Figure 2 and Figure 3 , the items 50 may include first target items 51 and 52 , and second target items 53 and 54 .

[0034] The first target items 51 and 52, and the second target items 53 and 54 may be two or more different types of boxes, but the present disclosure is not limited thereto. For example, the first target items 51 and 52 may have a first specification and a second specification, and the second target items 53 and 54 may have a third specification and a fourth specification. The first specification and the second specification may have, but are not limited to, a combined width, length, and height of 1000 mm to 1500 mm, and the third specification and the fourth specification may have, but are not limited to, a combined width, length, and height of 300 mm to less than 1000 mm.

[0035] In addition, the first target items 51 and 52 may be heavier than the second target items 53 and 54. For example, the weight of the first target items 51 and 52 may be 10kg to 25kg, and the weight of the second target items 53 and 54 may be 3kg to 9kg. In this embodiment, the first specification, the second specification, the third specification, and the fourth specification may represent four types of boxes that are different in size and weight. The first specification, the second specification, the third specification, and the fourth specification may be sequentially reduced in size and weight in their order, but the present disclosure is not limited thereto.

[0036] In addition, if Figure 2 As shown, the first target objects 51 and 52 can be supported by a first pedestal 71, and as shown in FIG. Figure 3As shown, the second target items 53 and 54 may be supported by the second base 73. For example, each of the first bases 71 may be provided with a first protrusion 71P and a first sensor bar 71B, and each of the second bases 73 may be provided with a coupling guider 73G formed with a fitting groove. However, the present disclosure is not limited to this example. Alternatively, the coupling guider 73G may be formed on each of the first bases 71, or the first protrusion 71P and the first sensor bar 71B may be formed on each of the second bases 73.

[0037] The first target items 51 and 52 on the first base 71 and the second target items 53 and 54 on the second base 73 can be transported by the transport device 100. The items 50 on the first base 71 and the second base 73 can be lifted from the surface of the floor, forming a gap thereunder, and thus, the hand units (221 and 222) of the transport device 100 can be inserted under the items 50 to be transported.

[0038] For example, the transport device 100 can be configured as an overhead transporter (OHT). The transport device 100 can travel along the travel rails R1 and R2 to transport the article 50 to the target location. Therefore, the transport device 100 can simply use the existing substrate transport system to transport the transported article 50 (provided as a box) to be transported without the need for additional separate rails or mobile equipment.

[0039] Hereinafter, the transport device 100 will be described with reference to the accompanying drawings.

[0040] Figure 4 This is a front view showing a state of a first hand module for lifting a clamping device in a transport device according to some embodiments of the present disclosure. Figure 5 is a front view showing a state in which a first hand module of a clamping device is lowered in a transport device according to some embodiments of the present disclosure, and Figure 6 A front view showing a state in which a first hand module of a clamping device in a transport apparatus according to some embodiments of the present disclosure clamps an object to be transported. Figure 7 2 is a perspective view showing a first hand module of a clamping device according to a first embodiment of the present disclosure. Figure 8 is a perspective view showing a state in which the interval in the first hand module of the clamping device according to the first embodiment of the present disclosure is widened, and Fig. 9 A perspective view showing a state in which the interval in the first hand module of the gripping device according to the first embodiment of the present disclosure is reduced so that the first hand module contacts an object to be transported.

[0041] Fig.10 To illustrate a front view of a second hand module of a clamping device according to some embodiments of the present disclosure, Fig.11 is a perspective view of a state in which the interval in the second hand module of the clamping device according to the first embodiment of the present disclosure is widened, and Fig.12 It is a perspective view showing a state in which the interval in the second hand module of the clamping device according to the first embodiment of the present disclosure is reduced to clamp an object to be transported.

[0042] Reference Figures 4 to 12 , the transport device 100 may include a vehicle 110 and a gripping apparatus 200 .

[0043] The vehicle 110 may transport the object 50 to be transported within the semiconductor manufacturing plant. The vehicle 110 may be disposed between the housing 111 and the belt 113. The housing 111 may have a structure with an open bottom and open sides.

[0044] The housing 111 may be provided with an insert 111A inserted into a cylindrical guide 211SG of the clamping device 200 and a housing sensor 111B that allows a second sensor bar 211SB of the clamping device 200 to pass through to detect whether the clamping device 200 has been lifted or lowered. The belt 113 may adjust the height of the clamping device 200 based on the degree of winding.

[0045] The clamping device 200 may be connected to the vehicle 110, and may clamp the article 50. For example, the clamping device 200 may include a base unit (211 and 212) and a hand unit (221 and 222).

[0046] The base units (211 and 212) may be provided to be vertically movable within the vehicle 110. The base units (211 and 212) may be connected to the belt 113 of the vehicle 110, and the height of the base units (211 and 212) may be adjusted by adjusting the length of the belt 113. The base units (211 and 212) may be plate-shaped, and the hand units (221 and 222) may be mounted on the base units (211 and 212).

[0047] The hand unit (221 and 222) may include a first hand module 221 and a second hand module 222. The first hand module 221 may be mounted on the first board 211, and the second hand module 222 may be mounted on the second board 212.

[0048] The base unit (211 and 212) may be provided with a cylindrical guide 211SG and a second sensor bar 211SB. The cylindrical guide 211SG may accommodate the insert 111A and / or the belt 113 installed in the housing 111. The second sensor bar 211SB may pass through the housing sensor 111B of the housing 111, blocking the reflection of the laser to detect the lifting or lowering state of the hand unit (221 and 222). For example, if the housing sensor 111B of the housing 111 detects the second sensor bar 211SB, the lifting or lowering of the hand unit (221 and 222) may be terminated.

[0049] The hand units (221 and 222) may be provided on the base units (211 and 212) and may have an adjustable interval to clamp or release the article 50. Here, the interval may refer to the width of the article 50 placed in the hand units (221 and 222).

[0050] The hand units (221 and 222) can hold articles 50 having four or more specifications. For example, the hand units (221 and 222) can include a first hand module 221 and a second hand module 222.

[0051] The hand units (221 and 222) may include motors (2211M and 212M), conversion modules (2213 and 2223), and grippers (2215 and 2225). The first hand module 221 may include a first motor 2211M, a first moving module 2213, and a first pair of grippers 2215, and the second hand module 222 may include a second motor 2212M, a second moving module 2223, and a second pair of grippers 2225.

[0052] In other words, the motors (2211M and 2212M) can be divided into a first motor 2211M and a second motor 2212M. The names of the first motor 2211M and the second motor 2212M are only for ease of understanding and explanation. The first motor 2211M and the second motor 2212M can both generate a rotational force to rotate the first shaft 2211M1 and the second shaft 2212M1 similarly.

[0053] The conversion module (2213 and 2223) may convert the rotational motion of the motor (2211M and 2212M) into a linear motion, and may include a first moving module 2213 and a second moving module 2223. The first moving module 2213 may be disposed in the first hand module 221, and the second moving module 2223 may be disposed in the second hand module 222.

[0054] The grippers (2215 and 2225) may be connected to the conversion modules (2213 and 2223), and the spacing between the grippers (2215 and 2225) may be adjusted together with the conversion modules (2213 and 2223). For example, the first gripper 2215 may be provided in the first hand module 221, and the second gripper 2225 may be provided in the second hand module 222.

[0055] Reference Figures 4 to 9 , the first hand module 221 can clamp the first target items 51 and 52. The first hand module 221 includes a first sensor 2211S1 that detects a first sensing bar 71B of a first stand 71 that operates similarly to the housing sensor 111B, and a first combination 2212, where a protrusion 71P is installed and a cover 221C1 can be provided.

[0056] The first hand module 221 drives the first moving module 2213 via the operation of the first motor 2211M. The first moving module 2213 can be configured to be movable in the first direction 10, allowing the first gripper 2215 to contact or separate from the first target items 51 and 52, which are the items 50 to be transported, thereby enabling the first gripper 2215 to grip or release the first target items 51 and 52.

[0057] For example, each of the first motors 2211M includes a first shaft 2211M1 having a first thread (not shown) formed on an outer circumferential surface thereof, and a first bracket 2211M2 that enables the first shaft 2211M1 to rotate and is fixed to the first plate 211. A pair of first motors 2211M may be provided to allow a pair of first moving modules 2213 to approach or separate.

[0058] A first through hole (not shown) having a second thread (not shown) on an inner circumferential surface thereof, which is engaged with a first thread of the corresponding first motor 2211M, may be formed in the corresponding first moving module 2213. Both ends of each of the first moving modules 2213 may be slidably connected to the first plate 211.

[0059] For example, each of the first moving modules 2213 may include a linear motion (LM) guide 2213A, a first moving block 2213B, and a first connecting block 2213C.

[0060] The LM guide 2213A may be fixed to the first plate 211 and may extend in the first direction 10 , wherein the first clamper 2215 approaches or separates from the object 50 , and the LM guide guides the first moving block 2213B to move in the first direction 10 .

[0061] The first moving block 2213B may be slidably disposed on the LM guide 2213A. The first moving block 2213B and the LM guide 2213A may be implemented as a slidable structure such as a rail and / or a ball bearing to achieve sliding, but the present disclosure is not limited thereto.

[0062] The first connection block 2213C may be provided with first moving blocks 2213B at both ends, and a first through hole may be formed in the first connection block 2213C to connect with the corresponding first motor 2211M. The first connection block 2213C may be bent toward the corresponding first motor 2211M to ensure that the first shaft 2211M1 of the corresponding first motor 2211M does not protrude out of the corresponding first clamper 2215.

[0063] The first clamper 2215 may be connected to the first moving module 2213. The first clamper 2215 may include a first support plate 2215A and a support rod 2215B. The first support plate 2215A may extend along the first direction 10 at the bottom of the first clamper 2215 to accommodate the article 50. The bottom surface of the first support plate 2215A may be inclined so as to easily insert the lower surface of the article 50. The end of the first support plate 2215A corresponding to (or positioned at) the corner of the article 50 may extend upward to fix the corner of the article 50.

[0064] The first support plate 2215A may be connected to the lower end of the support rod 2215B, and the first moving module 2213 may be connected to the upper end of the support rod 2215B. That is, the support rod 2215B may serve as an intermediary between the first moving module 2213 and the first support plate 2215A.

[0065] The two pairs of support bars 2215B may be provided on either side of the first target items 51 and 52, but the present disclosure is not limited thereto. Each of the pair of support bars 2215B may be provided with a transport item guide 2215B1, the width of which gradually increases toward the item 50. The transport item guide 2215B1 may extend on both sides of each of the pair of support bars 2215B, and may be formed with a bifurcated end to avoid contact with the edge or side of the item 50 (see FIG. Figure 7 ).

[0066] In addition, the support rod 2215B may be provided with a second sensor 2211S2 for detecting the item 50. A plurality of second sensors 2211S2 may be provided to be vertically spaced apart from each other. For example, the second sensor 2211S2 may be a thrust sensor positioned at the height of the first and second specifications of the item 50 (i.e., the height of the first target items 51 and 52).

[0067] Reference Figures 10 to 12 The second hand module 222 can clamp the second target objects 53 and 54. The second hand module 222 includes a second combination body 2221, which is inserted into the placement groove of the combination body guide 73G provided on the second bracket.

[0068] The second hand module 222 is operated via the second moving module 2223 driven by the second motor 2212M.

[0069] The second motor 2212M driving the second moving module 2223 includes a second shaft 2212M1 having a third thread (not shown) formed on an outer circumferential surface thereof and a second bracket 2212M2 ensuring rotation of the second shaft 2212M1 and fixed to the second plate 212 .

[0070] The second moving module 2223 allows the second gripper 2225 to move along the first direction 10 perpendicular to the second direction 20, so that the second gripper 2225 can contact or separate from the second target objects 53 and 54, which are the objects to be transported 50. Therefore, the second gripper 2225 can grip or release the second target objects 53 and 54.

[0071] For example, the second moving module 2223 may include a second connection block 2223A, a second moving block 2223B, and fixed blocks (2223C1, 2223C2, and 2223C3).

[0072] The second connection block 2223A may receive a rotational force from the second motor 2212M and may thus move rectilinearly. The second connection block 2223A may be penetrated by the second shaft 2212M1 of the second motor 2212M and may be in the shape of a rod extending perpendicularly to the second shaft 2212M1. A second through hole (not shown) may be formed at the center of the second connection block 2223A, the second through hole having a fourth thread formed on its inner circumferential surface to engage the third thread of the second shaft 2212M1.

[0073] Both ends of the second connection block 2223A form an acute angle or an obtuse angle with respect to the second direction 20. Guide holes 2223AH may be formed at both ends of the second connection block 2223A. The guide holes 2223AH may guide a path of the cam follower 2223BF.

[0074] A pair of second moving blocks 2223B may be provided, and the spacing between the second moving blocks 2223B may be adjusted together with the second connecting block 2223A. The second moving block 2223B includes a cam follower 2223BF that slides or pulls along the guide hole 2223AH. The second moving block 2223B may be rod-shaped, and the second clamper 2225 may be fixed to both ends of the second moving block 2223B.

[0075] The fixing blocks (2223C1, 2223C2, and 2223C3) may be connected to the second board 212, and may be provided with a third sensor 2223CS for detecting contact with the second target items 53 and 54. For example, the fixing blocks (2223C1, 2223C2, and 2223C3) may include a first block 2223C1 and a second block 2223C2. The first block 2223C1 may be connected to the second board 212, and may contact the second target item 53 having a third specification. The second block 2223C2 may be connected to the second board 212, and may contact the second target item 54. The second block 2223C2 may include a connector 2223C3 connected to the second board 212, and the second block may be connected to the second board 212 through the connector 2223C3, but the present disclosure is not limited thereto.

[0076] The second holder 2225 may be connected to the second moving module 2223. The second holder 2225 may pass through the second plate 212. For example, an insertion hole 212H may be formed in the second plate 212, and thus, the second holder 2225 may be connected to both ends of the second moving module 2223 through the insertion hole 212H. For example, the second holder 2225 may include a first rod 2225A, a second supporting plate 2225B, a third supporting plate 2225C, and a sensor 2225S.

[0077] Each of the first rods 2225A may have a curved surface (not shown) opposite to the circumferential surface of the second target items 53 and 54 in the first direction 10 and an extended surface (not shown) extending downward from the curved surface. The second support plate 2225B may be provided below the first rod 2225A and may extend toward the second target items 53 and 54 to support the items 50. The third support plate 2225C may extend in a direction different from the curved surface of the first rod 2225A to be opposite to the circumferential surface of the item 50. In other words, the first rod 2225A, the second support plate 2225B, and the third support plate 2225C may be arranged to be opposite to and fixed to the outer periphery and lower surface of the second target items 53 and 54 to prevent them from escaping.

[0078] The sensor 2225S may detect the second target items 53 and 54 to determine whether the second target items 53 and 54 are accommodated in the second hand module 222. For example, the second target items 53 and 54 may be provided with a reflector (e.g., a retroreflective sticker), and the sensor 2225S may emit a laser and detect any laser reflected from the reflector to determine whether the second target items 53 and 54 are accommodated in the second hand module 222.

[0079] Although the embodiments of the present invention have been described above with reference to the accompanying drawings, it will be appreciated by those skilled in the art that various modifications and changes can be made without departing from the spirit or essential features of the present invention. Therefore, the above embodiments should be considered in all aspects to be illustrative and not restrictive.

Claims

1. A gripping device connected to a vehicle for transporting an item to be transported in a semiconductor manufacturing plant, the gripping device comprising: A base unit, the base unit being provided on the vehicle so as to be movable up and down; as well as a hand unit, the hand unit being arranged on the base unit and having an adjustable spacing to fix or release an object, The hand unit includes: a motor; a conversion module, which converts the rotational motion of the motor into a linear motion; and a clamp, which is connected to the conversion module, and the spacing of the clamp is adjusted together with the conversion module.

2. The clamping device according to claim 1, wherein: The items include a first target item having a first specification and a second specification, and a second target item having a third specification and a fourth specification, and The hand unit includes a first hand module and a second hand module, the first hand module is used to clamp or release the first target object, and the second hand module is used to clamp or release the second target object.

3. The clamping device according to claim 2, wherein: The first target object is supported on a first support, The first bracket is provided with a first protrusion, and The first hand module includes a first combining body and a first sensor, the first protrusion is arranged in the first combining body, and the first sensor is used to detect the first bracket.

4. The clamping device according to claim 2, wherein: The second target object is supported on a second support, The second bracket is provided with a combination body guide having a seating groove formed therein, and The second hand module includes a second combination body, and the second combination body is inserted into the placement groove.

5. The clamping device according to claim 2, wherein: The first target object and the second target object are different in at least one of size and weight, Each of the first and second specifications is provided in the form of a box having a combined width, length and height of 1000 mm and 1500 mm, and Each of the third and fourth specifications is provided in the form of a box having a combined width, length and height of 300 mm and 1000 mm.

6. The clamping device according to claim 1, wherein: The base unit comprises a first plate, The motor comprises a first motor, The conversion module comprises a first moving module, the first moving module being configured to be movable within the base unit, The gripper includes a pair of first grippers, the first grippers are connected to the first moving module, The first motor is provided with a first shaft having a first thread formed on an outer circumferential surface thereof, A first through hole is formed in the first moving module, the first through hole having a second thread formed on an inner circumferential surface thereof, and An end portion of the first moving module is slidably connected to the first plate.

7. The clamping device according to claim 6, wherein: The first holder includes a first support plate extending downwardly toward the article at a bottom of the holder to contact a lower surface of the article.

8. The clamping device according to claim 6, wherein: The first moving module includes: a linear motion guide, which is provided on the first plate and extends in a direction in which the first clamp approaches the object or separates from the object; and a first moving block, which is provided to be able to slide on the linear motion guide.

9. The clamping device according to claim 8, wherein: The first moving module further includes a first connection block provided with the first moving block at both ends, having a first through hole formed therein, and being bent toward the first motor.

10. The clamping device according to claim 6, wherein: The first motor includes a first bracket that enables the first shaft to rotate and is fixed to the first plate.

11. The clamping device according to claim 1, wherein: The base unit comprises a second plate, The motor includes a second motor provided with a second shaft having a third thread formed on an outer circumferential surface thereof, The conversion module includes a second moving module, the second moving module moves to clamp or release the object, The gripper includes a pair of second grippers connected to the second moving module, and The second mobile module comprises: a second connection block, the second connection block having a second through hole formed at a center thereof, the second through hole having a fourth thread engaged with the third thread; the second connection block linearly moving by receiving a rotational force from the second motor; and the second connection block being bent at both ends into an acute angle or an obtuse angle, the second connection block having a guide hole formed therein; and A pair of second moving blocks, the second moving blocks include cam followers, the cam followers slide or pull along the guide holes, and the spacing of the second moving blocks can be adjusted together with the second connecting block.

12. The clamping device according to claim 11, wherein: The second clamper includes: a first rod having a curved surface opposite to the circumferential surface of the article and an extending surface extending downward from the curved surface; a second supporting plate, which is provided at a lower end of the first rod and extends toward the article to support the lower surface of the article; and a third supporting plate extending in a direction different from the curved surface of the first rod to be opposite to the circumferential surface of the article.

13. The clamping device according to claim 12, wherein: The hand unit further includes a fixing block connected to the second plate and provided with a third sensor for detecting contact with the object.

14. The clamping device according to claim 13, wherein: The fixing block includes: a first block, which is connected to the second board and contacts the item having a third specification; and a second block, which is connected to the second board and contacts the item having a fourth specification different from the third specification, and is provided with a connector connecting the second block to the second board.

15. A transport device, comprising: A vehicle for transporting items to be transported in a semiconductor manufacturing plant; as well as The clamping device according to claim 1.

16. A transport device, comprising: A plurality of vehicles, the plurality of vehicles being used to transport box-shaped objects to be transported in a semiconductor manufacturing plant, the objects comprising a first target object and a second target object, the first target object being supported on a first support and having a first specification and a second specification, the second target object being supported on a second support and having a third specification and a fourth specification different from the first specification and the second specification; a base unit provided on the vehicle to be movable up and down, the base unit comprising a first plate connected to one of the vehicles and a second plate connected to the other of the vehicles; a hand unit, the hand unit being used to clamp or release the object, the hand unit being arranged on the base unit and having an adjustable spacing to fix or release the object, in The hand unit comprises: a first hand module, the first hand module is used to clamp or release the first target object, the first target object includes a first combination body and a first sensor, the first protrusion is arranged in the first combination body, and the first sensor is used to detect the first bracket; and a second hand module, the second hand module is used to clamp or release the second target object, the second hand module includes a second combination body, and the second combination body is placed in the placement groove, The first hand module comprises: a first motor including a first shaft having a first thread formed on an outer circumferential surface thereof and a first bracket enabling the first shaft to rotate and fixed to the first plate; a first moving module, the first moving module comprising a linear motion guide, a first moving block and a first connecting block, the linear motion guide being provided on the first plate, the first moving block being provided to be able to slide on the linear motion guide, the first connecting block being provided with the first moving blocks at both ends and having a first through hole having a second thread engaged with the first thread formed on its inner circumferential surface, and the first connecting block being bent toward the first motor; and a pair of first grippers, the first grippers being connected to the first moving module and provided with a first support plate at the bottom thereof, the first support plate extending downwardly toward the first target item to contact a lower surface of the first target item, and the second hand module comprising: a second motor, the second motor being provided with a second shaft, the second shaft having a third thread formed on an outer circumferential surface thereof; a second moving module, the second moving module comprising a second connecting block and a pair of second moving blocks, the second connecting block having a second through hole formed with a fourth thread engaged with the third thread, the second connecting block being linearly moved by receiving a rotational force from the second motor, and the second connecting block being bent at both ends into an acute angle or an obtuse angle, the second connecting block having a guide hole formed therein; the second moving block comprising a cam follower that slides or is pulled along the guide hole, and the spacing of the second moving block can be adjusted together with the second connecting block; a pair of second grippers, the second grippers being connected to the second moving module and comprising a first rod having a curved surface opposite to a circumferential surface of the second target object and an extending surface extending downward from the curved surface, a second supporting plate being provided at a lower end of the first rod and extending toward the second target object to support a lower surface of the second target object, and a third supporting plate extending in a direction different from the curved surface of the first rod to be opposite to the circumferential surface of the second target object; and A fixed block, the fixed block comprising a first block, a second block and a third sensor, the first block being connected to the second plate and contacting the second target item having the third specification, the second block being connected to the second plate and contacting the second target item having the fourth specification, and the third sensor being used to detect contact with the second target item.

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