Large plate electroplating bath

Abstract

The invention discloses a large plate electroplating bath, and relates to the technical field of electroplating equipment, the large plate electroplating bath comprises an electroplating bath body and an electroplating assembly, the electroplating assembly comprises a square-frame-shaped guide frame, the guide frame is fixed in a bath of the electroplating bath body and located at the middle position in the bath, and a square-frame-shaped hanging tool is fixed in a frame of the guide frame; a conductive copper bar is fixed to one side of the hanging tool, anode titanium plates are arranged on the front side and the rear side of the guide frame correspondingly, and adjusting structures used for adjusting the distance between the anode titanium plates and the guide frame are arranged on the front side and the rear side of the electroplating bath correspondingly. The distance between the anode titanium plate and the guide frame can be adjusted according to the actual production condition, excessive ion concentration or excessive sparseness is avoided, meanwhile, the number of passing metal ions can be controlled by means of different numbers (achieved by replacing the honeycomb plate) on the honeycomb plate holes, the flowing mode of electrode liquid can be hindered through a shutter, and the service life of the anode titanium plate is prolonged. Therefore, the passing quantity of the metal ions is controlled.

Description

Technical Field

[0001] The invention relates to the technical field of electroplating equipment, in particular to a large plate electroplating tank. Background Art

[0002] Electroplating chips generally use crystal plating technology. Crystal plating refers to the process of electroplating on crystals to form a layer of metal film. Crystal plating is an important process in the microelectronics industry. It is a technology that plates a layer of metal on the surface of semiconductor silicon wafers. Crystal plating is divided into pre-plating and post-plating;

[0003] The pre-plating process is to first apply a layer of chemical cleaning solution on the crystal, and then use a chemical etchant to etch grooves on the surface of the silicon wafer; for the photolithography process, the pre-plating process requires exposure, that is, a layer of photosensitive drum needs to be printed on the silicon wafer, and a uniform film is formed between the surface of the photosensitive drum and the surface of the crystal, so as to expose the pattern after photolithography. Generally, the chip is placed in the plating solution for electroplating.

[0004] After searching, the Chinese patent with the announcement number CN111893544B discloses an electroplating device, including an electroplating tank, a stirring plate, a swing mechanism and a cover assembly. The electroplating tank is open at one end, and the stirring plate is movably arranged in the electroplating tank. The stirring plate is connected to the swing mechanism by transmission, and the stirring plate is driven by the swing mechanism to make a directional movement to achieve uniform stirring. The cover assembly includes a first cover part, a second cover part and a driving part. The driving part is connected to the first cover part and the second cover part by transmission. The first cover part and the second cover part are respectively arranged on both sides of the opening of the electroplating tank to achieve the opening or closing of the electroplating tank. The patent provides an electroplating device, in which a cover assembly is arranged at the opening end of the electroplating tank. After the cover assembly is closed, it can effectively prevent the electroplating liquid from splashing upwards. On the one hand, the electroplating liquid can be fully utilized, and on the other hand, the surrounding environment of the opening of the electroplating tank is ensured to be clean and tidy; after the cover assembly is opened, it is convenient to take and put the hanger, which is convenient and practical.

[0005] The above patent can be used for the pre-plating process, fixing the chip on the plate (the plate has slots, and the chip is placed in the slots), so that the plate is stretched and swung back and forth in the electrolyte, so that the coating is more uniform, but it does not consider the effect of the electrolyte flow rate per unit time on the coating, mainly because when the flow rate (flow rate per unit time) is large, the electrolyte is easy to form eddy currents on the anode surface, which will cause uneven thickness of the electroplating layer. Therefore, in order to ensure the uniformity of the electroplating layer, it is necessary to control the flow rate. Summary of the invention

[0006] The object of the present invention is to provide a large plate electroplating tank to solve the problems raised in the above background technology.

[0007] The technical solution of the present invention is: a large plate electroplating tank, comprising an electroplating tank body and an electroplating assembly, wherein the electroplating assembly comprises a square frame-shaped guide frame, the guide frame is fixed in the tank of the electroplating tank body and is located in the middle position of the tank, a square frame-shaped hanger is fixed in the frame of the guide frame, a conductive copper strip is fixed on one side of the hanger, anode titanium plates are arranged on the front and rear sides of the guide frame, and adjustment structures for adjusting the distance between the anode titanium plate and the guide frame are arranged on the front and rear sides of the electroplating tank;

[0008] Among them, titanium plate frames are arranged on the front and rear sides of the guide frame, and telescopic components for moving the titanium plate frames up and down are arranged on both sides of the top of the guide frame. A plurality of pads are fixed to the outside of the titanium plate frame, and each pad is commonly fixed with the same blind. A honeycomb panel is arranged between the blind and the guide frame, and the honeycomb panel is fixed to the guide frame.

[0009] Preferably, a plurality of clamps are provided on both inner side walls of the hanger, and the type of the clamps is a two-finger clamp.

[0010] Preferably, the adjustment structure includes an anode bottom plate and two plug-in plates, the two plug-in plates are respectively fixed on both sides of the slot of the electroplating tank body, and a plurality of slots are provided on opposite sides of the two plug-in plates. The anode bottom plate is frame-shaped, and the anode titanium plate is embedded and fixed in the frame of the anode bottom plate. The two sides of the anode bottom plate are respectively slidably inserted into two aligned slots.

[0011] Preferably, a titanium mesh is fixed to the plate surface of the anode titanium plate.

[0012] Preferably, the surface of the anode base plate is provided with four sunshade baffles, and the four sunshade baffles are respectively arranged on the outer walls around the anode base plate, and the surface of the sunshade baffle is provided with a plurality of straight slots, and bolts are arranged inside the straight slots, and the bolts are fixed to the anode base plate.

[0013] Preferably, the telescopic assembly includes a tubular linear motor, vertical slots are provided on both sides of the top of the plate surface of the guide frame, and a cross block is slidably arranged inside the vertical slot. The two ends of the cross block are respectively fixed to two titanium plate frames, the motor housing of the tubular linear motor is fixed on the guide frame, and one end of the gas rod of the tubular linear motor is fixed to the cross block.

[0014] Preferably, a plurality of guide blocks are fixed on both sides of the plate surface of the guide frame, two groups of rollers are rotatably mounted on the outer sides of the guide blocks, and the titanium plate frame is arranged between the two groups of rollers and in contact with the rollers.

[0015] Preferably, the telescopic assembly is replaced by a reciprocating assembly, the reciprocating assembly includes a cross plate and a cross frame, the cross frame is fixed to the electroplating tank body, and a reciprocating mechanism for making the cross plate move back and forth in a straight line is arranged on the cross frame, fixed frames are fixed on both sides of the electroplating tank body, a connecting rod is slidably inserted inside the fixed frame, a connecting plate is fixed to the outside of the connecting rod, a spring is sleeved on the outside of the connecting rod, the connecting plates on the two connecting rods are rotatably installed with the same contact roller, the connecting rod is fixed to the cross block, an inclined plate is rotatably installed at one end of the cross plate, a small electric push rod is arranged between the inclined plate and the cross plate, and both ends of the small electric push rod are rotatably installed on the inclined plate and the cross plate respectively.

[0016] Preferably, the reciprocating mechanism includes a double-sided toothed plate, two driven gears, two incomplete gears and an intermediate gear. Directional sleeves are fixed at both ends of the cross frame. Both ends of the double-sided toothed plate are slidably inserted into the two directing sleeves respectively. The double-sided toothed plate and the cross plate are fixed with the same connecting frame. Both the driven gear and the intermediate gear are shaft gears. One end of the driven gear is rotatably mounted on the cross frame, and one end of the intermediate gear is rotatably mounted on the cross frame. The driven gear is meshed with the intermediate gear. The two incomplete gears are coaxially fixed with the two driven gears respectively, and the incomplete gears are adapted to the double-sided toothed plate.

[0017] Preferably, the drive assembly includes a worm, a worm wheel and a servo motor, the housing of the servo motor is fixed to the cross frame, the output shaft of the servo motor is coaxially fixed to the worm, the worm wheel is coaxially fixed to one of the driven gears, and the worm is meshed with the worm wheel.

[0018] The present invention provides a large plate electroplating tank by improvement, which has the following beneficial effects compared with the prior art:

[0019] First, the distance between the anode titanium plate of the present invention and the guide frame can be adjusted according to the actual production situation to avoid excessive ion concentration or sparseness. At the same time, the number of metal ions passing through can be controlled by using the different numbers of holes on the honeycomb plate (realized by replacing the honeycomb plate). The number of metal ions passing through can also be controlled by blocking the flow of the electrode liquid through the shutter. The honeycomb plate can change the turbulent liquid into laminar flow, so that the cations can be evenly deposited on the workpiece.

[0020] Second, the reciprocating assembly of the present invention can make the blinds move upward or downward at a uniform speed, ensure that the honeycomb panel can evenly block the ions, ensure that the subsequent outflowing ions can flow evenly, and ensure that the ions can be evenly plated on the electroplated parts. Compared with the tubular linear motor, the control is more stable. This is mainly because the tubular linear motor is electromagnetically controlled, and its control accuracy is affected by environmental factors such as temperature and humidity, resulting in large fluctuations in the reciprocating speed. The reciprocating assembly of the present invention is composed of a motor and a mechanical structure, and is less affected by environmental factors such as temperature and humidity.

[0021] Thirdly, the up and down reciprocating distance of the reciprocating assembly of the present invention can be adjusted by mechanical adjustment. Compared with the tubular linear motor which adjusts the reciprocating distance by changing the current, the visibility is low and the current needs to be adjusted continuously to meet the requirements. The reciprocating assembly of the present invention only needs to adjust the inclination of the inclined plate, and the inclined plate is on the outside, so it has better visibility and is convenient for workers to quickly observe the size of the reciprocating distance. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0024] Figure 2 It is a perspective structural diagram of the electroplating tank of the present invention;

[0025] Figure 3 It is a schematic diagram of the three-dimensional structure of the electroplating tank of the present invention;

[0026] Figure 4 It is a schematic diagram of the top view of the electroplating tank body of the present invention;

[0027] Figure 5 It is a schematic diagram of the three-dimensional structure of the electroplating assembly of the present invention;

[0028] Figure 6 It is a perspective structural schematic diagram of the guide frame of the present invention;

[0029] Figure 7 for Figure 6 The enlarged structural diagram at A in the middle;

[0030] Figure 8 It is a schematic diagram of the three-dimensional structure of the anode bottom plate, sunshade baffle, anode titanium plate and titanium mesh of the present invention;

[0031] Fig. 9 It is a schematic diagram of the three-dimensional structure of the hanger of the present invention (the perspective part is a plate-shaped workpiece);

[0032] Fig.10 It is a schematic diagram of the three-dimensional structure of the titanium plate frame and the shutter of the present invention from a first-view perspective;

[0033] Fig.11 It is a schematic diagram of the three-dimensional structure of the titanium plate frame and the shutter of the present invention from a second viewing angle;

[0034] Fig.12 for Fig.11 A schematic diagram of the enlarged structure at B;

[0035] Fig.13 It is a schematic diagram of the structure of the reciprocating assembly of the present invention;

[0036] Fig.14 It is a schematic diagram of the side view structure of the reciprocating assembly of the present invention;

[0037] Fig.15 for Fig.14 The enlarged structural diagram at C in the middle;

[0038] Fig.16 It is a schematic diagram of the three-dimensional structure of the reciprocating assembly and the horizontal plate of the present invention;

[0039] Fig.17 It is a schematic diagram of the three-dimensional structure of the reciprocating assembly of the present invention from a first viewing angle;

[0040] Fig.18 It is a schematic diagram of the three-dimensional structure of the reciprocating assembly of the present invention from a second viewing angle;

[0041] Fig.19 It is a schematic diagram of the top view of the reciprocating assembly of the present invention;

[0042] Fig. 20 It is a schematic structural diagram of the reciprocating assembly of the present invention without a double-sided tooth plate.

[0043] Reference numerals:

[0044] 1. Electroplating tank; 2. Electroplating assembly; 3. Insert plate; 4. Guide frame; 5. Tubular linear motor; 6. Titanium plate frame; 7. Honeycomb plate; 8. Horizontal block; 9. Anode bottom plate; 10. Titanium mesh; 11. Hanger; 12. Clamp; 13. Conductive copper strip; 14. Guide block; 15. Roller; 16. Shutter; 17. Pad; 18. Anode titanium plate; 19. Reciprocating assembly; 20. Fixed frame; 21. Horizontal frame; 22. Connecting frame; 23. Horizontal plate; 24. Inclined plate; 25. Small electric push rod; 26. Driving assembly; 27. Connecting rod; 28. Spring; 29. ​​Connecting plate; 30. Double-sided tooth plate; 31. Orienting sleeve; 32. Incomplete gear; 33. Driven gear; 34. Intermediate gear; 35. Servo motor; 36. Worm wheel; 37. Worm; 38. Sunshade. DETAILED DESCRIPTION

[0045] The present invention is described in detail below, and the technical solutions in the embodiments of the present invention are clearly and completely described. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0046] The present invention provides a large plate electroplating tank by improvement. The technical solution of the present invention is:

[0047] Embodiment 1

[0048] like Figures 1 to 12 As shown, the embodiment of the present invention provides a large plate electroplating tank, including an electroplating tank body 1 and an electroplating assembly 2. Here, the electroplating tank body 1 is supplemented with a description: both the front and rear sides of the electroplating tank body 1 are plugged and fixed with through pipes connected to the inside thereof, and the electroplating liquid can flow from the through pipe on one side to the through pipe on the other side. The bottom of the electroplating tank body 1 is plugged and fixed with a drain pipe, and the drain pipe is used to discharge the electroplating liquid;

[0049] The electroplating assembly 2 includes a square frame-shaped guide frame 4, which is fixed in the slot of the electroplating tank body 1 and is located in the middle position of the slot. A square frame-shaped hanger 11 is fixed in the frame of the guide frame 4, and a plate-shaped workpiece is arranged in the frame of the hanger 11. A conductive copper strip 13 is fixed on one side of the hanger 11, and the conductive copper strip 13 is used to connect with the negative electrode of direct current so that the workpiece in the hanger 11 attracts cations. Anode titanium plates 18 are arranged on the front and rear sides of the guide frame 4, and the anode titanium plates 18 are connected to the positive electrode of direct current, and the anode titanium plates 18 release cations. Adjustment structures for adjusting the distance between the anode titanium plates 18 and the guide frame 4 are arranged on the front and rear sides of the electroplating tank.

[0050] Among them, titanium plate frames 6 are provided on the front and rear sides of the guide frame 4, and telescopic components for moving the titanium plate frame 6 up and down are provided on both sides of the top of the guide frame 4. A plurality of pads 17 are fixed on the outer side of the titanium plate frame 6, and each pad 17 is fixed with the same shutter 16. The shutter 16 hinders the flow of cations by reciprocating up and down, thereby controlling the flow rate per unit time of the cation flow (the flow rate per unit time of cations flowing to the workpiece = the flow rate per unit time of unimpeded cations - the amount of obstruction of the shutter 16 per unit time), thereby adjusting the deposition amount. A honeycomb panel 7 is provided between the shutter 16 and the guide frame 4. The honeycomb panel 7 is used to limit the flow rate of cations, change the turbulent liquid into laminar flow, so that the cations can be evenly deposited on the workpiece, and the honeycomb panel 7 is fixed to the guide frame 4.

[0051] Specifically, in combination with Fig. 9 As shown, a plurality of clamps 12 are disposed on the two inner side walls of the hanger 11 . The type of the clamps 12 is a two-finger clamp, and the clamps 12 are used to clamp a plate-shaped workpiece.

[0052] Specifically, in combination with Figure 3 and attached Figure 4 As shown, the adjustment structure includes an anode bottom plate 9 and two plug-in plates 3, the two plug-in plates 3 are respectively fixed on both sides of the slot of the electroplating tank body 1, and a plurality of slots are provided on opposite sides of the two plug-in plates 3. The anode bottom plate 9 is frame-shaped, and the anode titanium plate 18 is embedded and fixed in the frame of the anode bottom plate 9. The two sides of the anode bottom plate 9 are respectively slidably inserted into two of the aligned slots. It can be seen that the anode bottom plate 9 is inserted into the slots of the plug-in plates 3 at different positions to change the distance between the anode bottom plate 9 and the hanger 11.

[0053] Specifically, in combination with Figure 1 and attached Figure 8 As shown, a titanium mesh 10 is fixed to the surface of the anode titanium plate 18. The titanium mesh 10, as one of the electrodes, can provide the electrons required by the electroplating solution, thereby realizing the metal deposition process.

[0054] Specifically, in combination with Figure 8 As shown, the surface of the anode base plate 9 is provided with four sunshade baffles 38, and the four sunshade baffles 38 are respectively arranged on the outer walls around the anode base plate 9, and the surface of the sunshade baffle 38 is provided with a plurality of straight slots, and bolts are arranged inside the straight slots, and the bolts are fixed to the anode base plate 9. By changing the area of ​​the anode titanium plate 18 covered by the sunshade baffle 38, the amount of released cations can be changed.

[0055] Specifically, in combination with Figure 5 -Attached Figure 7As shown, the telescopic component includes a tubular linear motor 5, vertical slots are provided on both sides of the top of the plate surface of the guide frame 4, and a cross block 8 is slidably arranged inside the vertical slot. The two ends of the cross block 8 are respectively fixed to two titanium plate frames 6, and the motor housing of the tubular linear motor 5 is fixed on the guide frame 4. One end of the gas rod of the tubular linear motor 5 is fixed to the cross block 8. The tubular linear motor 5 controls the up and down movement of the cross block 8 by telescoping, and changes the up and down movement range of the cross block 8 by changing the air intake and outlet volume of the tubular linear motor 5, and changes the up and down movement speed of the cross block 8 by changing the air intake and outlet rate of the tubular linear motor 5, that is, the titanium plate frame 6 can change the up and down movement range and the up and down movement speed through the tubular linear motor 5.

[0056] Specifically, in combination with Figure 7 As shown, a plurality of guide blocks 14 are fixed on both sides of the plate surface of the guide frame 4, two groups of rollers 15 are rotatably mounted on the outer sides of the guide blocks 14, and the titanium plate frame 6 is arranged between the two groups of rollers 15 and in contact with the rollers 15. The arrangement of the guide blocks 14 and the rollers 15 is used to improve the stability of the movement of the titanium plate frame 6;

[0057] Working principle:

[0058] In the first step, the chip is fixed on a plate (the plate is provided with a slot, and the chip is placed in the slot), and then the plate-shaped workpiece is placed in the frame of the hanger 11 and clamped by the clamp 12, and the conductive copper strip 13 on the hanger 11 is connected to the negative pole of the direct current;

[0059] The second step is to insert the anode bottom plate 9 into a slot of the plug plate 3 to determine the distance between the anode bottom plate 9 and the hanger 11, and connect the anode titanium plate 18 in the anode bottom plate 9 to the positive pole of the direct current;

[0060] The third step is to determine the air inlet and outlet volume and air inlet and outlet rate of the tubular linear motor 5, so as to determine the up and down movement range and up and down movement speed of the titanium plate frame 6;

[0061] The fourth step is to start the direct current and the tubular linear motor 5. The titanium plate frame 6 drives the shutter 16 to move up and down within a certain range. The honeycomb plate 7 limits the flow of cations, changes the turbulent liquid into laminar flow, so that the cations can be evenly deposited on the workpiece. At the same time, the shutter 16 blocks the cations flowing to the workpiece to adjust the amount of cations flowing to the workpiece.

[0062] Embodiment 2

[0063] Combined with Figure 13-Figure 20 As shown, based on the large plate electroplating tank provided by the first embodiment of the present application, the second embodiment of the present application proposes another large plate electroplating tank. The second embodiment is only a further embodiment of the first embodiment, and the implementation of the second embodiment will not affect the independent implementation of the first embodiment:

[0064] Combined with Fig.14 and attached Fig.15 As shown, the telescopic assembly is replaced by a reciprocating assembly 19, and the reciprocating assembly 19 includes a horizontal plate 23 and a horizontal frame 21, the horizontal frame 21 is fixed to the electroplating tank body 1, and a reciprocating mechanism for making the horizontal plate 23 reciprocate linearly move is arranged on the horizontal frame 21, and fixed frames 20 are fixed on both sides of the electroplating tank body 1, and a connecting rod 27 is slidably inserted inside the fixed frame 20, and a connecting plate 29 is fixed on the outer side of the connecting rod 27, and a spring 28 is sleeved on the outer side of the connecting rod 27, and the connecting plates 29 on the two connecting rods 27 are installed with the same contact roller for rotating together, and the connecting rod 27 is fixed to the horizontal block 8, and the spring 28 is in a compressed state when there is no external force, and the spring 28 applies a thrust to the connecting plate 29, so that the contact roller on the connecting plate 29 contacts the inclined plate 24;

[0065] An inclined plate 24 is rotatably mounted on one end of the transverse plate 23, and a small electric push rod 25 is arranged between the inclined plate 24 and the transverse plate 23. Both ends of the small electric push rod 25 are rotatably mounted on the inclined plate 24 and the transverse plate 23 respectively. The small electric push rod 25 is a threaded electric rod. The small electric push rod 25 changes the inclination between the inclined plate 24 and the transverse plate 23 by telescoping.

[0066] Specifically, in combination with Fig.17 -Attached Fig. 20 As shown, the reciprocating mechanism includes a double-sided toothed plate 30, two driven gears 33, two incomplete gears 32 and an intermediate gear 34. The two ends of the cross frame 21 are fixed with directional sleeves 31. The two ends of the double-sided toothed plate 30 are respectively slidably inserted into the two directional sleeves 31. The double-sided toothed plate 30 and the cross plate 23 are fixed with the same connecting frame 22. The driven gear 33 and the intermediate gear 34 are both shaft gears. One end of the driven gear 33 is rotatably mounted on the cross frame 21, and one end of the intermediate gear 34 is rotatably mounted on the cross frame 21. The two incomplete gears 32 are coaxially fixed with the two driven gears 33, respectively, and the incomplete gears 32 are matched with the double-sided toothed plate 30; when one of the driven gears 33 rotates, the driven gear 33 drives the other driven gear 33 through the intermediate gear 34 meshing with it, that is, the two driven gears 33 rotate synchronously and in the same direction, so that the two incomplete gears 32 rotate synchronously and in the same direction, for example, the driven gear 33 rotates at a uniform speed, that is, the incomplete gear 32 rotates at a uniform speed, combined with the attached Fig.19When the driven gear 33 on the right rotates counterclockwise, the incomplete gear 32 on the right moves the double-sided gear plate 30, and the incomplete gear 32 on the left leaves the double-sided gear plate 30. At this time, the double-sided gear plate 30 moves downward, and the teeth of the incomplete gear 32 on the right leave the double-sided gear plate 30. The incomplete gear 32 on the left just meshes with the double-sided gear plate 30. At this time, the double-sided gear plate 30 moves upward. It can be seen that the double-sided gear plate 30 can perform reciprocating and uniform linear movement.

[0067] Specifically, in combination with Fig.18 As shown, the driving assembly 26 includes a worm 37, a worm wheel 36 and a servo motor 35. The housing of the servo motor 35 is fixed to the cross frame 21. The output shaft of the servo motor 35 is coaxially fixed to the worm 37. The worm wheel 36 is coaxially fixed to one of the driven gears 33. The worm 37 is meshed with the worm wheel 36. The servo motor 35 rotates the worm 37 through the output shaft. The worm 37 drives the worm wheel 36, and the worm wheel 36 drives the driven gear 33 fixed thereto to rotate.

[0068] Working principle:

[0069] In the first step, the small electric push rod 25 is a threaded electric rod, and the small electric push rod 25 changes the inclination between the inclined plate 24 and the horizontal plate 23 by telescoping;

[0070] In the second step, after determining the inclination of the inclined plate 24, the servo motor 35 is started. The servo motor 35 rotates the worm 37 through the output shaft. The worm 37 shifts the worm wheel 36, and the worm wheel 36 drives the driven gear 33 fixed thereto to rotate. The driven gear 33 shifts another driven gear 33 through the intermediate gear 34 meshing therewith, that is, the two driven gears 33 rotate synchronously and in the same direction, so that the two incomplete gears 32 rotate synchronously and in the same direction. For example, the driven gear 33 rotates at a uniform speed, that is, the incomplete gear 32 rotates at a uniform speed. When the driven gear 33 on the right side rotates counterclockwise, the incomplete gear 32 on the right side shifts the double-sided gear plate 30, and the incomplete gear 32 on the left side leaves the double-sided gear plate 30. At this time, the double-sided gear plate 30 moves forward, and the teeth of the incomplete gear 32 on the right side leave the double-sided gear plate 30. The incomplete gear 32 on the left side just meets The double-sided toothed plates 30 are meshed, and at this time the double-sided toothed plates 30 move backward. It can be seen that the double-sided toothed plates 30 can perform reciprocating and uniform linear movements, so that the double-sided toothed plates 30 drive the cross plate 23 to perform reciprocating and uniform linear movements through the connecting frame 22, and the inclined plate 24 on the cross plate 23 reciprocates to push the contact roller. Since the inclined plate 24 performs reciprocating and uniform linear movements, it can be seen that the contact roller can perform reciprocating and uniform linear movements up and down. It can be seen that the contact roller drives the connecting rod 27 to perform reciprocating and uniform linear movements, and the connecting rod 27 drives the shutter 16 to perform reciprocating and uniform linear movements. In summary, the reciprocating assembly 19 can enable the shutter 16 to perform uniform upward or downward movement, ensuring that the honeycomb panel 7 can uniformly block the ions, ensuring that the subsequent outflowing ions can flow uniformly, and ensuring that the ions can be uniformly plated on the electroplated parts.

[0071] The above description enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A large plate electroplating tank, comprising an electroplating tank body (1) and an electroplating assembly (2), characterized in that: The electroplating assembly (2) comprises a square frame-shaped guide frame (4), the guide frame (4) is fixed in the slot of the electroplating tank body (1) and is located in the middle position of the slot, a square frame-shaped hanger (11) is fixed in the frame of the guide frame (4), a conductive copper strip (13) is fixed on one side of the hanger (11), anode titanium plates (18) are arranged on the front and rear sides of the guide frame (4), and adjustment structures for adjusting the distance between the anode titanium plates (18) and the guide frame (4) are arranged on the front and rear sides of the electroplating tank; The guide frame (4) is provided with a titanium plate frame (6) on both the front and rear sides, and the top sides of the guide frame (4) are provided with telescopic components for moving the titanium plate frame (6) up and down. A plurality of pads (17) are fixed to the outer side of the titanium plate frame (6), and each pad (17) is fixed with the same blind (16). A honeycomb panel (7) is provided between the blind (16) and the guide frame (4), and the honeycomb panel (7) is fixed to the guide frame (4).

2. The large plate electroplating tank according to claim 1, characterized in that: A plurality of clamps (12) are arranged on both inner side walls of the hanger (11), and the type of the clamps (12) is a two-finger clamp.

3. The large plate electroplating tank according to claim 1, characterized in that: The adjustment structure comprises an anode bottom plate (9) and two plug plates (3), the two plug plates (3) being respectively fixed on two sides of the slot of the electroplating tank body (1), a plurality of slots being provided on opposite sides of the two plug plates (3), the anode bottom plate (9) being in the shape of a frame, the anode titanium plate (18) being embedded and fixed in the frame of the anode bottom plate (9), and the two sides of the anode bottom plate (9) being respectively slidably plugged into two of the slots being aligned therein.

4. The large plate electroplating tank according to claim 3, characterized in that: A titanium mesh (10) is fixed on the plate surface of the anode titanium plate (18).

5. The large plate electroplating tank according to claim 3, characterized in that: The surface of the anode bottom plate (9) is provided with four sunshade baffles (38), and the four sunshade baffles (38) are respectively arranged on the outer walls around the anode bottom plate (9), and the surface of the sunshade baffle (38) is provided with a plurality of straight slots, and bolts are arranged inside the straight slots, and the bolts are fixed to the anode bottom plate (9).

6. The large plate electroplating tank according to claim 1, characterized in that: The telescopic assembly comprises a tubular linear motor (5), vertical slots are provided on both sides of the top of the plate surface of the guide frame (4), a horizontal block (8) is slidably arranged inside the vertical slot, and the two ends of the horizontal block (8) are respectively fixed to two titanium plate frames (6), the tubular linear motor (5) is fixed on the guide frame (4), and the straight rod of the tubular linear motor (5) is fixed to the horizontal block (8).

7. The large plate electroplating tank according to claim 1, characterized in that: A plurality of guide blocks (14) are fixed on both sides of the plate surface of the guide frame (4), two groups of rollers (15) are rotatably mounted on the outer sides of the guide blocks (14), and the titanium plate frame (6) is arranged between the two groups of rollers (15) and in contact with the rollers (15).

8. The large plate electroplating tank according to claim 6, characterized in that: The telescopic assembly is replaced by a reciprocating assembly (19), wherein the reciprocating assembly (19) comprises a transverse plate (23) and a transverse frame (21), wherein the transverse frame (21) is fixed to the electroplating tank body, and a reciprocating mechanism for enabling the transverse plate (23) to perform reciprocating linear movement is arranged on the transverse frame (21), both sides of the electroplating tank body are fixed with a fixed frame (20), a connecting rod (27) is slidably inserted inside the fixed frame (20), and a connecting plate (29) is fixed to the outside of the connecting rod (27), The outer side of the connecting rod (27) is sleeved with a spring (28); the connecting plates (29) on the two connecting rods (27) are rotatably mounted with a same contact roller; the connecting rod (27) is fixed to the cross block (8); one end of the cross plate (23) is rotatably mounted with an inclined plate (24); a small electric push rod (25) is arranged between the inclined plate (24) and the cross plate (23); and the two ends of the small electric push rod (25) are rotatably mounted on the inclined plate (24) and the cross plate (23), respectively.

9. The large plate electroplating tank according to claim 8, characterized in that: The reciprocating mechanism comprises a double-sided toothed plate (30), two driven gears (33), two incomplete gears (32) and an intermediate gear (34); both ends of the cross frame (21) are fixed with directional sleeves (31); both ends of the double-sided toothed plate (30) are respectively slidably plugged into the two directional sleeves (31); the double-sided toothed plate (30) and the cross plate (23) are fixed with a same connecting frame (22); both the driven gear (33) and the intermediate gear (34) are shaft gears; one end of the driven gear (33) is rotatably mounted on the cross frame (21); one end of the intermediate gear (34) is rotatably mounted on the cross frame (21); the driven gear (33) is meshed with the intermediate gear (34); the two incomplete gears (32) are respectively coaxially fixed with the two driven gears (33); and the incomplete gear (32) is adapted to the double-sided toothed plate (30).

10. The large plate electroplating tank according to claim 9, characterized in that: The driving assembly (26) comprises a worm (37), a worm wheel (36) and a servo motor (35); the servo motor (35) is fixed to the cross frame (21); the output shaft of the servo motor (35) is coaxially fixed to the worm (37); the worm wheel (36) is coaxially fixed to one of the driven gears (33); and the worm (37) is meshed with the worm wheel (36).

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