Power combining device and radio frequency power supply system

Abstract

The application provides a power synthesis device and a radio frequency power supply system. The power synthesis device comprises a first radio frequency power amplifier module, a second radio frequency power amplifier module, a first power synthesis module, a second power synthesis module and an output terminal. The first power synthesis module is used for being turned on in a positive half cycle of the first radio frequency electric energy and the second radio frequency electric energy, and performing power synthesis on the first radio frequency electric energy and the second radio frequency electric energy when being turned on, so as to obtain a positive half cycle radio frequency electric energy. The second power synthesis module is used for being turned on in a negative half cycle of the first radio frequency electric energy and the second radio frequency electric energy, and performing power synthesis on the first radio frequency electric energy and the second radio frequency electric energy when being turned on, so as to obtain a negative half cycle radio frequency electric energy. The positive half cycle radio frequency electric energy and the negative half cycle radio frequency electric energy are mixed into a complete cycle radio frequency electric energy at the output terminal, and output to a load. The application can realize synthesis of two sub radio frequency electric energies with different amplitudes.

Description

Technical Field

[0001] The present application relates to the field of radio frequency technology, and in particular to a power synthesis device and a radio frequency power supply system. Background Art

[0002] With the rapid development of RF power technology, the requirements for RF power systems that provide power to loads such as plasma loads are becoming increasingly stringent. In particular, RF power systems often need to provide high-power RF power. However, current research on power synthesis has encountered difficulties in combining sub-RF power with different amplitudes, resulting in the inability to synthesize the required high-power RF power. Therefore, how to combine two sub-RF power with different amplitudes to obtain the high-power RF power required by the load has become a problem that needs to be considered. Summary of the Invention

[0003] The present application provides a power synthesis device and a radio frequency power supply system, which can realize the synthesis of two sub-radio frequency electrical energies with different amplitudes.

[0004] In a first aspect, a power combining device is provided, comprising a first RF power amplifier module, a second RF power amplifier module, a first power combining module, a second power combining module, and an output terminal. The first RF power amplifier module is configured to receive and amplify a first RF signal to generate first RF power; the second RF power amplifier module is configured to receive and amplify a second RF signal to generate second RF power; the first RF power and the second RF power have the same phase angle and different amplitudes. The first power synthesis module is connected to the first RF power amplifier module, the second RF power amplifier module, and the output end. The first power synthesis module is configured to conduct during the positive half-cycle of the first RF power energy and the second RF power energy, and to synthesize the first RF power energy and the second RF power energy during conduction to obtain positive half-cycle RF power energy. The second power synthesis module is connected to the first RF power amplifier module, the second RF power amplifier module, and the output end. The second power synthesis module is configured to conduct during the negative half-cycle of the first RF power energy and the second RF power energy, and to synthesize the first RF power energy and the second RF power energy during conduction to obtain negative half-cycle RF power energy. The positive half-cycle RF power energy and the negative half-cycle RF power energy are mixed at the output end into a complete cycle of RF power and output to a load.

[0005] In one possible implementation, the first power combining module is further configured to disconnect during a negative half-cycle of the first RF power energy and the second RF power energy, and to stop inputting the first RF power energy and the second RF power energy when disconnected. The second power combining module is further configured to disconnect during a positive half-cycle of the first RF power energy and the second RF power energy, and to stop inputting the first RF power energy and the second RF power energy when disconnected.

[0006] In a possible implementation, the amplitudes of the positive half-cycle RF power energy and the negative half-cycle RF power energy are the same, and the amplitudes of the positive half-cycle RF power energy and the negative half-cycle RF power energy are both the sum of the amplitudes of the first RF power energy and the second RF power energy.

[0007] In one possible implementation, the first power synthesis module includes a first diode, a second diode, and a first transformer. The first transformer includes a first winding and a second winding. The anode of the first diode is connected to the first RF power amplifier module, the cathode of the first diode is connected to the same-name end of the first winding, the anode of the second diode is connected to the second RF power amplifier module, the cathode of the second diode is connected to the opposite-name end of the second winding, the opposite-name end of the first winding is connected to the output end, and the same-name end of the second winding is connected to the first potential.

[0008] In a possible implementation, the second power synthesis module includes a third diode, a fourth diode, and a second transformer. The second transformer includes a third winding and a fourth winding. The cathode of the third diode is connected to the first RF power amplifier module, the anode of the third diode is connected to the same-name end of the third winding, the cathode of the fourth diode is connected to the second RF power amplifier module, the anode of the fourth diode is connected to the opposite-name end of the fourth winding, the opposite-name end of the third winding is connected to the output end, and the same-name end of the fourth winding is connected to the first potential.

[0009] In a possible implementation, the end of the load not connected to the output end is connected to a second potential, wherein the voltage values ​​of the first potential and the second potential are different.

[0010] In a possible implementation manner, the difference between the voltage value of the second potential and the voltage value of the first potential is greater than a first voltage threshold.

[0011] In a possible implementation, the first radio frequency power amplifier module comprises a first radio frequency power amplifier configured to perform power amplification on the first radio frequency signal to obtain the first radio frequency electric energy. The second radio frequency power amplifier module comprises a phase shift control circuit and a second radio frequency power amplifier connected in sequence. The phase shift control circuit is configured to selectively shift or not shift the phase angle of the second radio frequency signal. The second radio frequency power amplifier is configured to perform power amplification on the shifted or unshifted second radio frequency signal to obtain the second radio frequency electric energy.

[0012] In a possible implementation, the power combining device further comprises a phase difference acquisition unit and a control unit. The phase difference acquisition unit is connected to the first radio frequency power amplifier and the second radio frequency power amplifier, and the control unit is connected to the phase shift control circuit. The phase difference acquisition unit is configured to acquire a first phase difference between the phase angle of the first radio frequency electric energy and the phase angle of the second radio frequency electric energy. The control unit is configured to control the phase shift control circuit to shift or not shift the phase angle of the second radio frequency signal according to the first phase difference.

[0013] In a possible implementation, the power combining device further comprises a phase difference acquisition unit and a control unit. The phase difference acquisition unit is connected to the first radio frequency power amplifier and the second radio frequency power amplifier, and the control unit is connected to the phase shift control circuit. The phase difference acquisition unit is configured to acquire a first phase difference between the phase angle of the first radio frequency electric energy and the phase angle of the second radio frequency electric energy. The control unit is configured to control the phase shift control circuit to shift or not shift the phase angle of the second radio frequency signal according to the first phase difference.

[0014] The power synthesizing device and the radio frequency power supply system of the present application can synthesize the first radio frequency electric energy and the second radio frequency electric energy with the same phase angle and different amplitudes, and can obtain the radio frequency electric energy with the complete period by mixing the positive half cycle radio frequency electric energy and the negative half cycle radio frequency electric energy, so as to realize the power synthesis of the two sub radio frequency electric energies with different amplitudes and obtain the high-power radio frequency electric energy required by the load. BRIEF DESCRIPTION OF DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background art, the drawings needed to be used in the embodiments of the present application or the background art will be described below.

[0016] Figure 1 The block diagram of the power synthesizing device in some embodiments of the present application.

[0017] Figure 2 The circuit diagram of the first power synthesizing module and the second power synthesizing module in some embodiments of the present application.

[0018] Figure 3 The block diagram of the first radio frequency power amplifier module and the second radio frequency power amplifier module in some embodiments of the present application.

[0019] Figure 4 The block diagram of the phase shift control circuit in some embodiments of the present application.

[0020] Figure 5 The circuit diagram of the phase shift control circuit in an embodiment of the present application.

[0021] Figure 6 The circuit diagram of the phase shift control circuit in another embodiment of the present application.

[0022] Figure 7 The block diagram of the radio frequency power supply system in some embodiments of the present application.

[0023] Explanation of reference signs: 1000, radio frequency power supply system, RF1, first radio frequency signal, RF2, second radio frequency signal, 10, power combining device, PA1, first radio frequency power amplifier module, 110, first radio frequency power amplifier, RF3, first radio frequency electric energy, PA2, second radio frequency power amplifier module, 120, phase shift control circuit, 121, first phase shift unit, R1, first resistor, C1, first capacitor, S1, first switch, S3, third switch, S4, fourth switch, RF6, intermediate radio frequency signal, 122, second phase shift unit, R2, second resistor, C2, second capacitor, S2, second switch, RF7, target radio frequency signal, 130, second radio frequency power amplifier, RF4, second radio frequency electric energy, 210, first power combining module, D1, first diode, D2, second diode, T1, first transformer, W1, first winding, W2, second winding, 220, second power combining module, D3, third diode, D4, fourth diode, T2, second transformer, W3, third winding, W4, fourth winding, RF+, positive half cycle radio frequency electric energy, RF-, negative half cycle radio frequency electric energy, RF5, radio frequency electric energy, 300, phase difference acquisition unit, A1, first phase difference, 400, control unit, Out, output terminal, E1, first potential, E2, second potential, GND, ground. DETAILED DESCRIPTION

[0024] The technical solutions in the embodiments of the present application will be clearly and completely described in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the present application.

[0025] In the description of the embodiments of the present application, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected", "connected" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0026] Hereinafter, the terms "first", "second", "third", "fourth" are only for description purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first", "second", "third", "fourth" can explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, unless otherwise specified, the meaning of "multiple" is two or more.

[0027] In addition, the terms "include" and "have" and any variations thereof are intended to cover a non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, product, or device.

[0028] Conventional methods often combine multiple RF power sub-energy sources with the same power value, such as 0.5kW, 1kW, 1.5kW, and 2kW. This makes it difficult to combine RF power RF5 to meet the actual load needs. Conventional power combining circuits, composed of passive components such as inductors and capacitors, are unable to combine two RF power sub-energy sources with different amplitudes, that is, they cannot combine two RF power sub-energy sources with different power values.

[0029] See also Figure 1 , Figure 1 FIG. 1 is a block diagram of a power synthesis device in some embodiments of the present application. Figure 1 As shown, the present application provides a power combining device 10, which includes a first RF power amplifier module PA1, a second RF power amplifier module PA2, a first power combining module 210, a second power combining module 220, and an output terminal Out. The first RF power amplifier module PA1 is configured to receive and amplify a first RF signal RF1 to obtain first RF power RF3; the second RF power amplifier module PA2 is configured to receive and amplify a second RF signal RF2 to obtain second RF power RF4; wherein the first RF power RF3 and the second RF power RF4 have the same phase angle but different amplitudes. The first power combining module 210 is connected to the first RF power amplifier module PA1, the second RF power amplifier module PA2, and the output terminal Out. The first power combining module 210 is configured to conduct during the positive half-cycle of the first RF power RF3 and the second RF power RF4, and to combine the first RF power RF3 and the second RF power RF4 during conduction to obtain positive half-cycle RF power RF+. The second power combining module 220 is connected to the first RF power amplifier module PA1, the second RF power amplifier module PA2, and the output terminal Out. The second power combining module 220 is configured to conduct during the negative half-cycle of the first RF power RF3 and the second RF power RF4, and to combine the first RF power RF3 and the second RF power RF4 during conduction to obtain negative half-cycle RF power RF-. The positive half-cycle RF power RF+ and the negative half-cycle RF power RF- are combined at the output terminal Out to form a complete cycle of RF power RF5, which is then output to the load.

[0030] Thus, the power synthesis device 10 in the present application, by setting the first power synthesis module 210 and the second power synthesis module 220 to be connected to the first RF power amplifier module PA1 and the second RF power amplifier module PA2, can perform power synthesis on the first RF power RF3 and the second RF power RF4 with the same phase angle and different amplitudes in the positive half cycle and the negative half cycle respectively, so as to obtain the positive half-cycle RF power RF+ and the negative half-cycle RF power RF- respectively, and then the positive half-cycle RF power RF+ and the negative half-cycle RF power RF- are mixed into the complete cycle RF power RF5 at the output end Out, so as to realize the power synthesis of two sub-RF energies with different amplitudes, and obtain the high-power RF power RF5 required by the load.

[0031] Particularly, the frequencies of the first radio frequency power RF3 and the second radio frequency power RF4 are also the same.

[0032] See also Figure 2 , Figure 2 Schematic diagram of the circuit of the first power synthesis module and the second power synthesis module in some embodiments of the present application. Figure 2 As shown, the first power combining module 210 is further configured to disconnect during the negative half cycle of the first RF power RF3 and the second RF power RF4, and stop inputting the first RF power RF3 and the second RF power RF4 when disconnected. The second power combining module 220 is further configured to disconnect during the positive half cycle of the first RF power RF3 and the second RF power RF4, and stop inputting the first RF power RF3 and the second RF power RF4 when disconnected.

[0033] Thus, the above-mentioned power synthesis device 10 in the present application corresponds to the first power synthesis module 210 being disconnected during the negative half cycle of the first RF power RF3 and the second RF power RF4, and stopping the input of the first RF power RF3 and the second RF power RF4 when being disconnected, and the second power synthesis module 220 being disconnected during the positive half cycle of the first RF power RF3 and the second RF power RF4, and stopping the input of the first RF power RF3 and the second RF power RF4 when being disconnected, which can effectively avoid the occurrence of abnormalities in the RF power RF5 mixed into a complete cycle at the output end Out.

[0034] The amplitudes of the positive half-cycle radio frequency power RF+ and the negative half-cycle radio frequency power RF- are the same, and the amplitudes of the positive half-cycle radio frequency power RF+ and the negative half-cycle radio frequency power RF- are both the sum of the amplitudes of the first radio frequency power RF3 and the second radio frequency power RF4.

[0035] Therefore, in the power synthesis device 10 in the present application, the amplitudes of the positive half-cycle RF power RF+ and the negative half-cycle RF power RF- can both be the sum of the amplitudes of the first RF power RF3 and the second RF power RF4, thereby improving the efficiency of power synthesis and preventing power loss.

[0036] It should be noted that the phases of the positive half-cycle radio frequency power energy RF+ and the negative half-cycle radio frequency power energy RF- can be considered to be the same, or to have a phase difference of π / 2, that is, the waveform of the positive half-cycle radio frequency power energy RF+ includes the waveform of the positive half-cycle of the sine wave, and the waveform of the negative half-cycle radio frequency power energy RF- includes the waveform of the negative half-cycle of the sine wave.

[0037] like Figure 2 As shown, the first power synthesis module 210 includes a first diode D1, a second diode D2 and a first transformer T1. The first transformer T1 includes a first winding W1 and a second winding W2. The anode of the first diode D1 is connected to the first RF power amplifier module PA1, the cathode of the first diode D1 is connected to the same-name end of the first winding W1, the anode of the second diode D2 is connected to the second RF power amplifier module PA2, the cathode of the second diode D2 is connected to the opposite-name end of the second winding W2, the opposite-name end of the first winding W1 is connected to the output end Out, and the same-name end of the second winding W2 is connected to the first potential E1.

[0038] Thus, the power synthesis device 10 in the present application, by providing the first power synthesis module 210 including the first diode D1, the second diode D2, the first transformer T1 and the corresponding connection relationship, can make the voltage amplitude on one side of the first winding W1 equal to the sum of the amplitudes of the first radio frequency power RF3 and the second radio frequency power RF4 during the positive half cycle of the first radio frequency power RF3 and the second radio frequency power RF4.

[0039] like Figure 2 As shown, the second power synthesis module 220 includes a third diode D3, a fourth diode D4 and a second transformer T2. The second transformer T2 includes a third winding W3 and a fourth winding W4. The cathode of the third diode D3 is connected to the first RF power amplifier module PA1, the anode of the third diode D3 is connected to the same-name end of the third winding W3, the cathode of the fourth diode D4 is connected to the second RF power amplifier module PA2, the anode of the fourth diode D4 is connected to the opposite-name end of the fourth winding W4, the opposite-name end of the third winding W3 is connected to the output end Out, and the same-name end of the fourth winding W4 is connected to the first potential E1.

[0040] Thus, the power synthesis device 10 in the present application, by providing the second power synthesis module 220 including the third diode D3, the fourth diode D4, the second transformer T2 and the corresponding connection relationship, can make the voltage amplitude on one side of the third winding W3 during the negative half cycle of the first radio frequency power RF3 and the second radio frequency power RF4 equal to the sum of the amplitudes of the first radio frequency power RF3 and the second radio frequency power RF4.

[0041] In one or more embodiments, both the first transformer T1 and the second transformer T2 may be balun transformers.

[0042] like Figure 2 As shown, the end of the load not connected to the output end Out is used to connect to the second potential E2. The voltage values ​​of the first potential E1 and the second potential E2 are different.

[0043] Therefore, the power combining device 10 in the present application, by connecting the load to the first transformer T1 and the second transformer T2 at different potentials, can avoid the first power combining module 210 and the second power combining module 220 composed of electronic components such as diodes and transformers from raising the voltage value of the load, thereby preventing the radio frequency power RF5 from being normally transmitted to the load.

[0044] The difference between the voltage value of the second potential E2 and the voltage value of the first potential E1 is greater than the first voltage threshold.

[0045] In one or more embodiments, the voltage value of the second potential E2 may be equal to the voltage value of the ground GND.

[0046] Therefore, the power combiner 10 in the present application can further ensure the reliability of the transmission of the radio frequency power RF5 by configuring the difference between the voltage value of the second potential E2 and the voltage value of the first potential E1 to be greater than the first voltage threshold.

[0047] In one or more embodiments, the load may be a plasma load.

[0048] See also Figure 3 , Figure 3 Schematic diagram of a first RF power amplifier module and a second RF power amplifier module in some embodiments of the present application. Figure 3 As shown, the first RF power amplifier module PA1 includes a first RF power amplifier 110, which is used to amplify the power of the first RF signal RF1 to obtain first RF power RF3. The second RF power amplifier module PA2 also includes a phase shift control circuit 120 and a second RF power amplifier 130 connected in sequence. The phase shift control circuit 120 is used to selectively shift or not shift the phase angle of the second RF signal RF2. The second RF power amplifier 130 is used to power amplify the second RF signal RF2, whether shifted or not, to obtain second RF power RF4.

[0049] Therefore, the power combining device 10 in the present application can make the power combining of the plurality of sub-radio frequency electric energy RF5 not reach the expected power value when the phase angles of the plurality of sub-radio frequency electric energy are different, and the radio frequency electric energy RF5 also contains spurs, so as to not meet the needs of the load, and the second radio frequency power amplifier module PA2 further includes the phase shift control circuit 120 and the second radio frequency power amplifier 130 connected in sequence, so as to selectively move or not move the phase angle of the second radio frequency signal RF2, so that the phase angle of the second radio frequency electric energy RF4 is the same as that of the first radio frequency electric energy RF3, so as to realize the power combining of the first radio frequency electric energy RF3 and the second radio frequency electric energy RF4, and obtain the large power radio frequency electric energy RF5 required by the load.

[0050] As shown in Figure 3 The power combining device 10 further includes a phase difference obtaining unit 300 and a control unit 400, the phase difference obtaining unit 300 is connected with the first radio frequency power amplifier 110 and the second radio frequency power amplifier 130 and the control unit 400, and the control unit 400 is connected with the phase shift control circuit 120. The phase difference obtaining unit 300 is used to obtain the first phase difference A1 between the phase angle of the first radio frequency electric energy RF3 and the phase angle of the second radio frequency electric energy RF4. The control unit 400 is used to control the phase shift control circuit 120 to move or not move the phase angle of the second radio frequency signal RF2 according to the first phase difference A1.

[0051] Therefore, the power combining device 10 in the present application can determine the difference between the phase shift degree of the second radio frequency power amplifier 130 and the phase shift degree of the first radio frequency power amplifier 110 by setting the phase difference obtaining unit 300 to obtain the phase difference between the phase angle of the first radio frequency electric energy RF3 and the phase angle of the second radio frequency electric energy RF4, and then setting the control unit 400 to selectively move or not move the phase angle of the second radio frequency signal RF2 according to the first phase difference A1, so as to effectively solve the difference between the phase shift degree of the first radio frequency power amplifier 110 and the phase shift degree of the second radio frequency power amplifier 130, and avoid problems when providing the radio frequency electric energy RF5 to the load later.

[0052] In particular, even if the first radio frequency power amplifier 110 and the second radio frequency power amplifier 130 have the same circuit structure, they will have different phase shift degrees, that is, the phase angles of the signals obtained by the first radio frequency power amplifier 110 and the second radio frequency power amplifier 130 for power amplification of signals with the same phase angle may be different. And the phase shift degree of the first radio frequency power amplifier 110 and the second radio frequency power amplifier 130 can also change during operation.

[0053] In one or more embodiments, the phase difference acquisition unit 300 can include a plurality of voltage sensors, a plurality of operational amplifiers, and logic devices such as XOR gates, to acquire the first phase difference A1. The voltage sensors are configured to acquire the phase angle of the first RF power RF3 and the phase angle of the second RF power RF4. Each of the operational amplifiers is configured to convert the first RF power RF3 and the second RF power RF4 into square waves. The logic devices such as XOR gates are configured to perform logical operations on the square waves of the first RF power RF3 and the second RF power RF4 to obtain the first phase difference A1.

[0054] Please refer to Figure 4 , Figure 4 for a block diagram of a phase shift control circuit in some embodiments of the present application. As shown in Figure 3 、 Figure 4 , the phase shift control circuit 120 includes a first phase shift unit 121 and a second phase shift unit 122. The first phase shift unit 121 is connected to the second phase shift unit 122, and the second phase shift unit 122 is connected to the second RF power amplifier 130. The first phase shift unit 121 is configured to selectively shift or not shift the phase angle of the second RF signal RF2 to obtain an intermediate RF signal RF6. The second phase shift unit 122 is configured to selectively shift or not shift the phase angle of the intermediate RF signal RF6 to obtain a target RF signal RF7 having a target phase angle.

[0055] The target RF signal RF7 is the second RF signal RF2 that has been shifted or not shifted.

[0056] In one or more embodiments, the first phase shift unit 121 is configured to selectively be in a first connection state or a second connection state to correspondingly shift or not shift the phase angle of the second RF signal RF2. The second phase shift unit 122 is configured to selectively be in a third connection state or a fourth connection state to correspondingly shift or not shift the phase angle of the intermediate RF signal RF6. The control unit 400 is configured to control the first phase shift unit 121 to be in the first connection state or the second connection state and control the second phase shift unit 122 to be in the third connection state or the fourth connection state according to the first phase difference A1.

[0057] In one or more embodiments, when the first phase shift unit 121 is in the first connection state, the first phase shift unit 121 shifts the phase angle of the second RF signal RF2 in a first direction. When the second phase shift unit 122 is in the third connection state, the second phase shift unit 122 shifts the phase angle of the intermediate RF signal RF6 in a second direction. The first direction and the second direction are opposite.

[0058] In one or more embodiments, the first direction may be a direction that causes the phase angle of the second RF signal RF2 to advance, and correspondingly, the second direction is a direction that causes the phase angle of the second RF signal RF2 to lag. The first direction may also be a direction that causes the phase angle of the second RF signal RF2 to lag, and correspondingly, the second direction is a direction that causes the phase angle of the second RF signal RF2 to advance.

[0059] Furthermore, when the first phase shift unit 121 is in the second connection state, the first phase shift unit 121 does not shift the phase angle of the second RF signal RF2. When the second phase shift unit 122 is in the fourth connection state, the second phase shift unit 122 does not shift the phase angle of the intermediate RF signal RF6.

[0060] It should be noted that when the first phase shift unit 121 does not shift the phase angle of the second RF signal RF2, the phase angle of the obtained intermediate RF signal RF6 is the same as the phase angle of the second RF signal RF2. When the second phase shift unit 122 does not shift the phase angle of the intermediate RF signal RF6, the phase angle of the obtained target RF signal RF7 is the same as the phase angle of the intermediate RF signal RF6.

[0061] In one or more embodiments, the control unit 400 is configured to control the first phase shift unit 121 to be in the first connection state and the second phase shift unit 122 to be in the fourth connection state when the first phase difference A1 is not equal to zero, or to control the first phase shift unit 121 to be in the second connection state and the second phase shift unit 122 to be in the third connection state; and to control the first phase shift unit 121 to be in the second connection state and the second phase shift unit 122 to be in the fourth connection state when the first phase difference A1 is equal to zero.

[0062] Furthermore, the control unit 400 is configured to control the first phase shift unit 121 to be in the first connection state and the second phase shift unit 122 to be in the fourth connection state when the first phase difference A1 is greater than zero, and to control the first phase shift unit 121 to be in the second connection state and the second phase shift unit 122 to be in the third connection state when the first phase difference A1 is less than zero. Alternatively, the control unit 400 is configured to control the first phase shift unit 121 to be in the first connection state and the second phase shift unit 122 to be in the fourth connection state when the first phase difference A1 is less than zero, and to control the first phase shift unit 121 to be in the second connection state and the second phase shift unit 122 to be in the third connection state when the first phase difference A1 is greater than zero.

[0063] In one or more embodiments, the phase shift accuracy of the first phase shift unit 121 is different from the phase shift accuracy of the second phase shift unit 122. The control unit 400 can be configured to control the first phase shift unit 121 to be in the first connection state and control the second phase shift unit 122 to be in the third connection state when the first phase difference A1 is not equal to zero.

[0064] Therefore, the above-mentioned power synthesis device 10 in the present application can simultaneously place the first phase shift unit 121 in the first connection state and the corresponding second phase shift unit 122 in the third connection state, thereby solving the phase shift difference of the initial RF signal during the power amplification process of different RF power amplifiers to the greatest extent through different phase shift accuracies.

[0065] In one or more embodiments, the first phase shift unit 121 further has a variable first phase shift parameter. When the first phase shift unit 121 is in the first connection state, the phase angle shift angle of the second RF signal RF2 by the first phase shift unit 121 varies according to the first phase shift parameter. The second phase shift unit 122 further has a variable second phase shift parameter. When the second phase shift unit 122 is in the third connection state, the phase angle shift angle of the intermediate RF signal RF6 by the second phase shift unit 122 varies according to the second phase shift parameter. The control unit 400 is further configured to adjust the first phase shift parameter of the first phase shift unit 121 or the second phase shift parameter of the second phase shift unit 122 based on the non-zero first phase difference A1 when the first phase difference A1 is non-zero.

[0066] The phase shift accuracy of the first phase shift unit 121 is the minimum change of the first phase shift parameter, and the phase shift accuracy of the second phase shift unit 122 is the minimum change of the second phase shift parameter.

[0067] Furthermore, the control unit 400 may also be configured to adjust the first phase shift parameter of the first phase shift unit 121 and the second phase shift parameter of the second phase shift unit 122 according to the non-zero first phase difference A1 when the first phase difference A1 is not zero.

[0068] Please also refer to Figure 5 , Figure 5 FIG. 1 is a circuit diagram of a phase shift control circuit in an embodiment of the present application. Figure 4 、 Figure 5As shown, the first phase shift unit 121 includes a first resistor R1, a first capacitor C1, and a first switch S1. The first resistor R1 is connected to the first capacitor C1, which is also connected to ground GND. The connection point between the first resistor R1 and the first capacitor C1 is connected to the second phase shift unit 122, and the two ends of the first switch S1 are correspondingly connected to the two ends of the first resistor R1. The first switch S1 is configured to be selectively turned on or off, thereby selectively placing the first phase shift unit 121 in the second connection state or the first connection state.

[0069] Specifically, the phase difference between the phase angle of the intermediate radio frequency signal RF6 and the phase angle of the second radio frequency signal RF2 satisfies a first preset relationship, which may be -tan -1 (R1×C1×ω), that is, the phase difference between the phase angle of the second RF signal RF2 and the phase angle of the intermediate RF signal RF6 is related to the resistance value of the first resistor R1, the capacitance value of the first capacitor C1 and the angular frequency of the second RF signal RF2, that is, the shift angle of the phase angle of the second RF signal RF2 by the first phase shift unit 121 is -tan -1 (R1×C1×ω), the first phase shift parameter of the first phase shift unit 121 is related to the resistance value of the first resistor R1, the capacitance value of the first capacitor C1, and the angular frequency of the second RF signal RF2.

[0070] Furthermore, the first resistor R1 has an adjustable resistance value and / or the first capacitor C1 has an adjustable capacitance value, and the first phase shift parameter of the first phase shift unit 121 is changed by adjusting the resistance value of the first resistor R1 and / or the capacitance value of the first capacitor C1. Figure 5 As shown, the first capacitor C1 may be an adjustable capacitor to have an adjustable capacitance value.

[0071] Please also refer to Figure 6 , Figure 6 FIG. 1 is a circuit diagram of a phase shift control circuit in another embodiment of the present application. Figure 4 、 Figure 6As shown, the first phase shift unit 121 may also include a first resistor R1, a first capacitor C1, a third switch S3, and a fourth switch S4. The first resistor R1, the first capacitor C1, and the fourth switch S4 are connected, and the fourth switch S4 is connected to the ground GND. The connection point between the first resistor R1 and the first capacitor C1 is connected to the second phase shift unit 122, and the two ends of the third switch S3 are correspondingly connected to the two ends of the first capacitor C1. The third switch S3 and the fourth switch S4 are configured to selectively be in an on or off state simultaneously, so as to selectively enable the first phase shift unit 121 to be in the second connection state or the first connection state. That is, when the third switch S3 and the fourth switch S4 are both in the on state, the first phase shift unit 121 is selectively in the second connection state, and when the third switch S3 and the fourth switch S4 are both in the off state, the first phase shift unit 121 is selectively in the first connection state.

[0072] like Figure 4 、 Figure 5 、 Figure 6 As shown, the second phase shift unit 122 includes a second resistor R2, a second capacitor C2, and a second switch S2. The second capacitor C2 and the second resistor R2 are sequentially connected between the first phase shift unit 121 and the ground GND. The connection point between the second capacitor C2 and the second resistor R2 is connected to the second RF power amplifier 130. The two ends of the second switch S2 are correspondingly connected to the two ends of the second capacitor C2. The second switch S2 is configured to be selectively in an on or off state, so as to selectively enable the second phase shift unit 122 to be in the fourth connection state or the third connection state.

[0073] Specifically, the phase difference between the phase angle of the target radio frequency signal RF7 and the phase angle of the intermediate radio frequency signal RF6 satisfies a second preset relationship, which can be tan -1 (1 / R2×C2×ω), that is, the phase difference between the phase angle of the target RF signal RF7 and the phase angle of the intermediate RF signal RF6 is related to the resistance value of the second resistor R2, the capacitance value of the second capacitor C2 and the angular frequency of the intermediate RF signal RF6, that is, the shift angle of the phase angle of the intermediate RF signal RF6 by the second phase shift unit 122 is tan -1 (1 / R2×C2×ω), the second phase shift parameter of the second phase shift unit 122 is related to the resistance value of the second resistor R2, the capacitance value of the second capacitor C2, and the angular frequency of the intermediate RF signal RF6.

[0074] Furthermore, the second resistor R2 has an adjustable resistance value and / or the second capacitor C2 has an adjustable capacitance value, and the second phase shift parameter of the second phase shift unit 122 is changed by adjusting the resistance value of the second resistor R2 and / or the capacitance value of the second capacitor C2. Figure 6As shown, the second capacitor C2 may be an adjustable capacitor to have an adjustable capacitance value.

[0075] In one or more embodiments, Figure 3 The control unit 400 shown in FIG. Figure 5 、 Figure 6 One or more of the first switch S1, second switch S2, third switch S3 and fourth switch S4 shown are turned on or off to control the first phase shift unit 121 to be in the first connection state or the second connection state, and to control the second phase shift unit 122 to be in the third connection state or the fourth connection state.

[0076] In one or more embodiments, Figure 3 The control unit 400 shown in FIG. Figure 5 、 Figure 6 The capacitance value of the first capacitor C1 and / or the capacitance value of the second capacitor C2 are used to correspondingly adjust the first phase shift parameter of the first phase shift unit 121 and / or the second phase shift parameter of the second phase shift unit 122 .

[0077] In one or more embodiments, the first RF signal RF1 and the second RF signal RF2 may be emitted by the same signal source, and the corresponding first RF signal RF1 and the second RF signal RF2 are the same RF signal. The first RF signal RF1 and the second RF signal RF2 may also be emitted by different signal sources, and the corresponding first RF signal RF1 and the second RF signal RF2 are the same RF signal or different RF signals. When the first RF signal RF1 and the second RF signal RF2 are emitted by different signal sources, such as Figure 3 The control unit 400 shown can also be used to control and adjust the phase angle of either the first RF signal RF1 or the second RF signal RF2 according to the first phase difference A1 so that the phase angles of the first RF power RF3 and the second RF power RF4 are the same.

[0078] Furthermore, at least one signal source can be a crystal oscillator source, so that the waveforms of the corresponding output first RF signal RF1 and second RF signal RF2 are both sine waves, and the waveforms of the first RF power RF3 obtained according to the first RF signal RF1, the second RF power RF4 obtained according to the second RF signal RF2, and the RF power RF5 mixed into a complete cycle are also sine waves.

[0079] In one or more embodiments, the control unit 400 can be a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA) or other programmable logic devices, discrete gate logic devices, transistor logic devices and other logic control devices, or a microprocessor such as a micro control unit (MCU).

[0080] In one or more embodiments, the load may be a plasma load.

[0081] The power synthesis device 10 of the present application, through the above-mentioned structure, can effectively solve the phase shift problem and amplitude difference problem of the first RF signal RF1 and the second RF signal RF2 during the power amplification process according to actual needs, and can better perform subsequent power synthesis, thereby realizing power synthesis of two sub-RF electric energies with different amplitudes to obtain the high-power RF electric energy RF5 required by the load, and thus better provide RF electric energy RF5 to loads such as plasma loads.

[0082] See also Figure 7 , Figure 7 FIG. 1 is a block diagram of a radio frequency power supply system in some embodiments of the present application. Figure 7 As shown, the present application further provides a radio frequency power supply system 1000 , which includes the power synthesis device 10 in any of the aforementioned embodiments.

[0083] Please refer again Figure 1 .like Figure 1As shown, the power combining device 10 comprises a first radio frequency power amplifier module PA1, a second radio frequency power amplifier module PA2, a first power combining module 210, a second power combining module 220, and an output terminal Out. The first radio frequency power amplifier module PA1 is configured to receive and perform power amplification on the first radio frequency signal RF1 to obtain a first radio frequency electric energy RF3; the second radio frequency power amplifier module PA2 is configured to receive and perform power amplification on the second radio frequency signal RF2 to obtain a second radio frequency electric energy RF4; wherein the first radio frequency electric energy RF3 and the second radio frequency electric energy RF4 have the same phase angle and different amplitudes. The first power combining module 210 is connected with the first radio frequency power amplifier module PA1, the second radio frequency power amplifier module PA2, and the output terminal Out, and is configured to be turned on in the positive half cycle of the first radio frequency electric energy RF3 and the second radio frequency electric energy RF4, and to perform power combination on the first radio frequency electric energy RF3 and the second radio frequency electric energy RF4 when turned on to obtain a positive half cycle radio frequency electric energy RF+. The second power combining module 220 is connected with the first radio frequency power amplifier module PA1, the second radio frequency power amplifier module PA2, and the output terminal Out, and is configured to be turned on in the negative half cycle of the first radio frequency electric energy RF3 and the second radio frequency electric energy RF4, and to perform power combination on the first radio frequency electric energy RF3 and the second radio frequency electric energy RF4 when turned on to obtain a negative half cycle radio frequency electric energy RF-. Wherein the positive half cycle radio frequency electric energy RF+ and the negative half cycle radio frequency electric energy RF- are mixed into a complete cycle radio frequency electric energy RF5 at the output terminal Out and output to the load.

[0084] The specific structure of the power combining device 10 can refer to the related content of the power combining device 10 in any of the foregoing embodiments, and will not be described here again.

[0085] In one or more embodiments, the radio frequency power supply system 1000 can further comprise a signal source connected with the power combining device 10 to output the first radio frequency signal RF1 and the second radio frequency signal RF2 to the power combining device 10.

[0086] The power combining device 10 and the radio frequency power supply system 1000 of the present application effectively solve the phase shift problem and the amplitude difference problem of the first radio frequency signal RF1 and the second radio frequency signal RF2 in the power amplification process, and can better perform subsequent power combination, so as to realize power combination of two sub-radio frequency electric energies with different amplitudes to obtain a large power radio frequency electric energy RF5 required by the load, and further to better provide the radio frequency electric energy RF5 to the load such as the plasma load.

[0087] The above description is only a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by any person skilled in the art within the technical scope disclosed in this application should be included in the scope of protection of this application; the embodiments of this application and the features of the embodiments can be combined with each other unless there is a conflict. Therefore, the scope of protection of this application should be based on the scope of protection of the claims.

Claims

1. A power synthesis device, characterized in that: It includes a first radio frequency power amplifier module, a second radio frequency power amplifier module, a first power synthesis module, a second power synthesis module and an output end; The first radio frequency power amplifier module is used to receive and amplify the power of the first radio frequency signal to obtain first radio frequency electrical energy; The second RF power amplifier module is used to receive and power amplify the second RF signal to obtain a second RF power; wherein the first RF power and the second RF power have the same phase angle and different amplitudes; The first power synthesis module is connected to the first RF power amplifier module, the second RF power amplifier module, and the output end. The first power synthesis module is used to conduct in the positive half cycle of the first RF power energy and the second RF power energy, and when conducting, the first RF power energy and the second RF power energy are power synthesized to obtain positive half-cycle RF power energy; the second power synthesis module is connected to the first RF power amplifier module, the second RF power amplifier module, and the output end. The second power synthesis module is used to conduct in the negative half cycle of the first RF power energy and the second RF power energy, and when conducting, the first RF power energy and the second RF power energy are power synthesized to obtain negative half-cycle RF power energy. The positive half-cycle radio frequency power and the negative half-cycle radio frequency power are mixed at the output end to form a complete cycle of radio frequency power and output to the load.

2. The power combining device according to claim 1, characterized in that: The first power synthesis module is further configured to be disconnected during a negative half cycle of the first RF power energy and the second RF power energy, and to stop inputting the first RF power energy and the second RF power energy when disconnected; The second power synthesis module is further configured to be disconnected during a positive half cycle of the first RF power and the second RF power, and to stop inputting the first RF power and the second RF power when disconnected.

3. The power combining device according to claim 2, characterized in that: The amplitudes of the positive half-cycle radio frequency power energy and the negative half-cycle radio frequency power energy are the same, and the amplitudes of the positive half-cycle radio frequency power energy and the negative half-cycle radio frequency power energy are both the sum of the amplitudes of the first radio frequency power energy and the second radio frequency power energy.

4. The power combining device according to claim 2, characterized in that: The first power synthesis module includes a first diode, a second diode and a first transformer. The first transformer includes a first winding and a second winding. The positive pole of the first diode is connected to the first RF power amplifier module, the negative pole of the first diode is connected to the same-name end of the first winding, the positive pole of the second diode is connected to the second RF power amplifier module, the negative pole of the second diode is connected to the opposite-name end of the second winding, the opposite-name end of the first winding is connected to the output end, and the same-name end of the second winding is connected to the first potential.

5. The power combining device according to claim 2, characterized in that: The second power synthesis module includes a third diode, a fourth diode and a second transformer. The second transformer includes a third winding and a fourth winding. The cathode of the third diode is connected to the first RF power amplifier module, the anode of the third diode is connected to the same-name end of the third winding, the cathode of the fourth diode is connected to the second RF power amplifier module, the anode of the fourth diode is connected to the opposite-name end of the fourth winding, the opposite-name end of the third winding is connected to the output end, and the same-name end of the fourth winding is connected to the first potential.

6. The power combining device according to claim 4 or 5, characterized in that: One end of the load not connected to the output end is used to be connected to a second potential; The voltage values ​​of the first potential and the second potential are different.

7. The power combining device according to claim 6, characterized in that: A difference between a voltage value of the second potential and a voltage value of the first potential is greater than a first voltage threshold.

8. The power combining device according to claim 1, characterized in that: The first RF power amplifier module includes a first RF power amplifier, which is used to amplify the power of the first RF signal to obtain the first RF electrical energy; The second RF power amplifier module also includes a phase shift control circuit and a second RF power amplifier connected in sequence, the phase shift control circuit is used to selectively move or not move the phase angle of the second RF signal, and the second RF power amplifier is used to power amplify the second RF signal that has been moved or not to obtain the second RF electrical energy.

9. The power combining device according to claim 8, characterized in that: The power synthesis device further includes a phase difference acquisition unit and a control unit, wherein the phase difference acquisition unit is connected to the first RF power amplifier, the second RF power amplifier and the control unit, and the control unit is connected to the phase shift control circuit; The phase difference acquiring unit is used to acquire a first phase difference between the phase angle of the first radio frequency power energy and the phase angle of the second radio frequency power energy; The control unit is configured to control the phase shift control circuit to move or not move the phase angle of the second radio frequency signal according to the first phase difference.

10. A radio frequency power supply system, characterized in that: The invention comprises a power combining device as claimed in any one of claims 1 to 9.

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