Electric ultrahigh vacuum shutter for vacuum coating and control method

Abstract

The invention discloses an electric ultrahigh vacuum shutter for vacuum coating and a control method. The electric ultrahigh vacuum shutter comprises an alternating current servo motor, a planetary reducer, a supporting weldment, a coupler, a sealing magnetic fluid, a shutter flange weldment, a pressing block, a short rocker arm, a hinge pin, a long rocker arm, a rotating shaft and blades. The alternating-current servo motor is connected with the planetary reducer, the supporting weldment, the sealing magnetic fluid and the rotating shafts are all arranged on the shutter flange weldment, the planetary reducer is connected with the sealing magnetic fluid through the coupler, the rotating shafts are covered with the pressing blocks, each rotating shaft is provided with one blade, and the long rocker arm is connected with each short rocker arm through the hinge pin. According to the method, the alternating-current servo motor drives the blades to rotate in different directions to open and close the electric vacuum louver and adjust the opening and closing angle of the electric vacuum louver. According to the invention, the pumping speed of the main pump to the sputtering chamber is influenced by adjusting different opening and closing angles of the shutter, so that the vacuum degree of the sputtering chamber reaches a dynamic balance, and the feasibility of a coating process is ensured.

Description

Technical Field

[0001] The invention relates to the field of magnetron sputtering, and in particular to an electric ultra-high vacuum shutter for vacuum coating and a control method thereof. Background Art

[0002] Magnetron sputtering coating technology is a type of physical vapor deposition (PVD). It uses energetic particles to bombard the target surface in a vacuum and deposit the bombarded particles on the substrate. It has the advantages of simple equipment structure, easy operation and control, large coating area and strong adhesion. It is usually used to prepare thin films of various materials such as metals, insulators and semiconductors. Magnetron sputtering is a high-speed sputtering under low pressure. For this purpose, it is necessary to increase the ionization rate of the gas so that the gas forms a plasma.

[0003] As an important auxiliary gas, argon can dilute and cool, improve the quality and uniformity of the coating, and by stably existing in a vacuum environment and providing an active mode for the reaction surface, the reaction process is made more stable and controllable.

[0004] The current test results show that when the vacuum degree of the sputtering chamber is maintained between 0.1 and 0.2 Pa during magnetron sputtering coating, the coating deposition rate is the highest. When using a mass flow meter to fill the sputtering chamber with argon at a certain flow rate, sometimes the main pumping speed is too high, resulting in the input argon being rapidly pumped away, resulting in a low argon concentration in the sputtering chamber and difficulty in maintaining the vacuum degree between 0.1 and 0.2 Pa. Summary of the invention

[0005] The purpose of the present invention is to propose an electric ultra-high vacuum shutter and control method for vacuum coating in response to the above-mentioned technical problems. By adjusting the different opening and closing angles of the shutter, the pumping speed of the main pump to the sputtering chamber is affected, so that the vacuum degree of the sputtering chamber reaches a dynamic balance, thereby ensuring the feasibility of the coating process.

[0006] An electric ultra-high vacuum shutter for vacuum coating, comprising an AC servo motor, a planetary reducer, a supporting weldment, a coupling, a sealing magnetic fluid, a shutter flange weldment, a pressing block, a short rocker arm, a hinge pin, a long rocker arm, a rotating shaft, and blades; The AC servo motor is connected to the planetary reducer, the supporting weldment, the sealed magnetic fluid, and the rotating shaft are all arranged on the shutter flange weldment, the planetary reducer is connected to the sealed magnetic fluid through a coupling, the rotating shaft is covered by a pressing block, a blade is arranged on each rotating shaft, and the long rocker arm is respectively connected to each short rocker arm through a hinge pin.

[0007] Furthermore, an electric ultra-high vacuum shutter for vacuum coating, the AC servo motor is connected to the planetary reducer by screws, and the supporting weldment and the sealing magnetic fluid are fixed to the shutter flange weldment by screws.

[0008] Further, an electric ultra-high vacuum shutter for vacuum coating, the rotating shaft includes a rotating shaft 1, a rotating shaft 2, a rotating shaft 3, and a rotating shaft 4; The first rotating shaft, the second rotating shaft, the third rotating shaft and the fourth rotating shaft are all placed in the grooves of the shutter flange welding parts, and the rotating shafts can rotate freely after being covered by the pressing blocks.

[0009] Furthermore, an electric ultra-high vacuum shutter for vacuum coating is provided, wherein the sealed magnetic fluid is fixed to a rotating shaft four, and an AC servo motor drives the rotating shaft four to rotate.

[0010] Further, an electric ultra-high vacuum shutter for vacuum coating, the blades include blade one, blade two, blade three, and blade four; The blade one, blade two, blade three and blade four are respectively fixed on the rotating shaft one, rotating shaft two, rotating shaft three and rotating shaft four by screws.

[0011] Furthermore, in an electric ultra-high vacuum shutter for vacuum coating, the short rocker arm is fixedly connected to blade one, blade two, blade three, and blade four by screws.

[0012] A control method for an electric ultra-high vacuum shutter for vacuum coating, comprising the following sub-steps: S1: AC servo motor drives shaft 4 to rotate; S2: The fourth shaft drives the long rocker arm through the short rocker arm; S3: The long rocker arm drives the first, second and third shafts to rotate in the same direction as the fourth shaft; S4: The first shaft, the second shaft, the third shaft and the fourth shaft respectively drive the first blade, the second blade, the third blade and the fourth blade to rotate, and the electric vacuum blinds are opened and closed and the opening and closing angles of the electric vacuum blinds are adjusted by rotating in different directions.

[0013] The beneficial effects of the present invention are as follows: an electric ultra-high vacuum shutter and a control method for vacuum coating are used to solve the problem of excessive vacuum in the sputtering chamber caused by excessive pumping speed of the main pump during coating, thereby improving the feasibility of the coating process and the uniformity of the coating. The main components are made of metal materials and can be widely used in coating in ultra-high vacuum environments to ensure sealing and material strength. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 The present invention is a structural diagram of an electric ultra-high vacuum shutter for vacuum coating.

[0015] Figure 2 This is a diagram of the fully open state of an electric ultra-high vacuum shutter for vacuum coating.

[0016] Figure 3 The diagram is a fully closed state diagram of an electric ultra-high vacuum shutter for vacuum coating.

[0017] In the figure, 1-AC servo motor, 2-planetary reducer, 3-support weldment, 4-coupling, 5-sealed magnetic fluid, 6-louver flange weldment, 7-pressure block, 8-short rocker arm, 9-hinge pin, 10-long rocker arm, 11-rotating shaft one, 12-rotating shaft two, 13-rotating shaft three, 14-rotating shaft four, 15-blade one, 16-blade two, 17-blade three, 18-blade four. DETAILED DESCRIPTION

[0018] In order to have a clearer understanding of the technical features, purposes and effects of the present invention, specific embodiments of the present invention are now described with reference to the accompanying drawings.

[0019] As attached Figure 1 As shown, an electric ultra-high vacuum shutter for vacuum coating includes an AC servo motor 1, a planetary reducer 2, a supporting weldment 3, a coupling 4, a sealing magnetic fluid 5, a shutter flange weldment 6, a pressing block 7, a short rocker arm 8, a hinge pin 9, a long rocker arm 10, a rotating shaft, and blades; The AC servo motor 1 is connected to the planetary reducer 2, the supporting weldment 3, the sealed magnetic fluid 5, and the rotating shaft are all arranged on the shutter flange weldment 6, the planetary reducer 2 is connected to the sealed magnetic fluid 5 through the coupling 4, the rotating shaft is covered by the pressing block 7, a blade is arranged on each rotating shaft, and the long rocker arm 10 is respectively connected to each short rocker arm 8 through the hinge pin 9.

[0020] The long rocker arm 10 is connected to the segment rocker arm 8 on each blade through the hinge pin 9, so that the movement between the blades becomes a whole.

[0021] Furthermore, an electric ultra-high vacuum shutter for vacuum coating, the AC servo motor 1 is connected to the planetary reducer 2 by screws, and the supporting weldment 3 and the sealing magnetic fluid 5 are fixed to the shutter flange weldment 6 by screws.

[0022] Further, an electric ultra-high vacuum shutter for vacuum coating, the rotating shaft includes a rotating shaft 11, a rotating shaft 2 12, a rotating shaft 3 13, and a rotating shaft 4 14; The first rotating shaft 11, the second rotating shaft 12, the third rotating shaft 13 and the fourth rotating shaft 14 are all placed in the groove of the shutter flange welding part 6, and the rotating shafts are covered by the pressing block 7 and can rotate freely.

[0023] Furthermore, an electric ultra-high vacuum shutter for vacuum coating is provided, wherein the sealed magnetic fluid 5 is fixed to the rotating shaft four 14, and the AC servo motor 1 drives the rotating shaft four 14 to rotate.

[0024] Further, an electric ultra-high vacuum shutter for vacuum coating, the blades include blade one 15, blade two 16, blade three 17, blade four 18; The blade one 15, blade two 16, blade three 17, and blade four 18 are fixed on the rotating shaft one 11, rotating shaft two 12, rotating shaft three 13, and rotating shaft four 14 respectively by screws.

[0025] Furthermore, in an electric ultra-high vacuum shutter for vacuum coating, the short rocker arm 8 is fixedly connected to blade one 15, blade two 16, blade three 17, and blade four 18 by screws.

[0026] A control method for an electric ultra-high vacuum shutter for vacuum coating, comprising the following sub-steps: S1: AC servo motor 1 drives shaft 4 14 to rotate; S2: The rotating shaft 4 14 drives the long rocker arm 10 through the short rocker arm 8; S3: The long rocker arm 10 drives the rotating shaft 11, the rotating shaft 2 12, the rotating shaft 3 13, and the rotating shaft 4 14 to rotate in the same direction; S4: The rotating shaft 11, the rotating shaft 2 12, the rotating shaft 3 13 and the rotating shaft 4 14 respectively drive the blade 1 15, the blade 2 16, the blade 3 17 and the blade 4 18 to rotate, and the electric vacuum blinds are opened and closed and the opening and closing angles of the electric vacuum blinds are adjusted by rotating in different directions.

[0027] This solution solves the problem of excessive vacuum in the sputtering chamber caused by excessive pumping speed of the main pump during coating by using an electric ultra-high vacuum shutter and control method for vacuum coating, thereby improving the feasibility of the coating process and the uniformity of the coating. The main components are made of metal materials and can be widely used in coating in ultra-high vacuum environments to ensure sealing and material strength.

[0028] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention to be protected. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. An electric ultra-high vacuum shutter for vacuum coating, characterized in that: It includes an AC servo motor (1), a planetary reducer (2), a supporting weldment (3), a coupling (4), a sealing magnetic fluid (5), a shutter flange weldment (6), a pressure block (7), a short rocker arm (8), a hinge pin (9), a long rocker arm (10), a rotating shaft, and blades; The AC servo motor (1) is connected to the planetary reducer (2); the supporting weldment (3), the sealed magnetic fluid (5), and the rotating shaft are all arranged on the shutter flange weldment (6); the planetary reducer (2) is connected to the sealed magnetic fluid (5) via a coupling (4); the rotating shaft is covered by a pressing block (7); a blade is arranged on each rotating shaft; and the long rocker arm (10) is respectively connected to each short rocker arm (8) via a hinge pin (9).

2. The electric ultra-high vacuum shutter for vacuum coating according to claim 1, characterized in that: The AC servo motor (1) is connected to the planetary reducer (2) via screws, and the supporting weldment (3) and the sealing magnetic fluid (5) are fixed to the shutter flange weldment (6) via screws.

3. The electric ultra-high vacuum shutter for vacuum coating according to claim 1, characterized in that: The rotating shafts include a rotating shaft 1 (11), a rotating shaft 2 (12), a rotating shaft 3 (13), and a rotating shaft 4 (14); The first rotating shaft (11), the second rotating shaft (12), the third rotating shaft (13) and the fourth rotating shaft (14) are all placed in the groove of the shutter flange welding part (6), and the rotating shafts are covered by the pressing block (7) and can rotate freely.

4. The electric ultra-high vacuum shutter for vacuum coating according to claim 3, characterized in that: The sealed magnetic fluid (5) is fixed to the rotating shaft four (14), and the AC servo motor (1) drives the rotating shaft four (14) to rotate.

5. The electric ultra-high vacuum shutter for vacuum coating according to claim 3, characterized in that: The blades include blade one (15), blade two (16), blade three (17), and blade four (18); The blade one (15), blade two (16), blade three (17) and blade four (18) are respectively fixed on the rotating shaft one (11), rotating shaft two (12), rotating shaft three (13) and rotating shaft four (14) by screws.

6. The electric ultra-high vacuum shutter for vacuum coating according to claim 5, characterized in that: The short rocker arm (8) is fixedly connected to blade one (15), blade two (16), blade three (17), and blade four (18) via screws.

7. A control method for an electric ultra-high vacuum shutter for vacuum coating, based on the electric ultra-high vacuum shutter for vacuum coating according to any one of claims 1 to 6, characterized in that: It includes the following sub-steps: S1: The AC servo motor (1) drives the rotating shaft (14) to rotate; S2: The rotating shaft 4 (14) drives the long rocker arm (10) through the short rocker arm (8); S3: The long rocker arm (10) drives the first rotating shaft (11), the second rotating shaft (12), the third rotating shaft (13) and the fourth rotating shaft (14) to rotate in the same direction; S4: The rotating shaft 1 (11), the rotating shaft 2 (12), the rotating shaft 3 (13), and the rotating shaft 4 (14) respectively drive the blade 1 (15), the blade 2 (16), the blade 3 (17), and the blade 4 (18) to rotate, and the electric vacuum blinds are opened and closed and the opening and closing angles of the electric vacuum blinds are adjusted by rotating in different directions.

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