A water-cooled plug valve for a single crystal furnace

Abstract

The present invention discloses a water-cooled plug valve for a single crystal furnace that is easier to close or open, has better sealing performance, and the water pipe is not prone to loosening or leaking. The adopted technical solution includes: a valve housing, a plug slidably disposed in the valve housing, and a cylinder disposed outside the valve housing to drive the sliding of the plug. The rear end of the valve housing is provided with a rear cover, and the upper and lower ends are respectively provided with a first flange and a second flange. The bottom of the plug is connected with a water-cooled shaft through a support plate, the surface is provided with a first water-cooling channel and a first sealing plate covering the first water-cooling channel, and at least two first water pipe joints communicating with the first water-cooling channel are provided on the side surface. The rear end of the water-cooled shaft extends out of the rear cover and is connected with the cylinder.

Description

Technical Field

[0001] The present invention belongs to the field of semiconductor material preparation, and particularly relates to a water-cooled gate valve for a single crystal furnace. Background Art

[0002] A single crystal furnace is a device specifically used for preparing single crystal materials. It mainly operates in an inert gas (such as nitrogen, helium) environment, uses a graphite heater to melt polycrystalline materials (such as polysilicon), and grows dislocation-free single crystals by the Czochralski method. A gate valve is installed between the water-cooled pumping pipeline of the single crystal furnace and the single crystal furnace chamber. Since the temperature in the single crystal furnace chamber is relatively high, if the gate valve does not have a cooling system, it is easy to cause deformation or melting of the internal sealing ring, resulting in poor sealing. The structure of the traditional gate valve with a cooling system is shown in, for example, the Chinese invention patent with the application publication number "CN 116677792 A" and the name "A high-temperature water-cooled gate valve". Its solution includes: a valve housing, a gate plate slidably arranged in the valve housing, and a cylinder arranged outside the valve housing to drive the gate plate to slide. The cylinder is connected to the gate plate through a connecting shaft. Flanges are respectively arranged at the upper and lower ends of the valve housing, and when the gate plate is inserted, it closes with one of the flanges. To achieve sealing, sealing rings that are hermetically matched with the gate plate and the connecting shaft are respectively arranged on the flanges and the valve housing. To achieve cooling: a water pipe is arranged in the valve housing, and the two ends of the water pipe are respectively connected to the water pipe connectors of the gate plate and the valve housing. The existing disadvantages are: 1. Since the gate plate needs to slide back and forth frequently during use, it will cause the water pipe to shake back and forth, which is likely to lead to loosening or leakage between the water pipe and the water pipe connector. In addition, when the overlong water pipe sags, it will directly stick to the inner wall of the valve housing. If the cooling system lacks water or is forgotten to be turned on, it is easy to cause melting of the water pipe; 2. The sealing ring outside the connecting shaft cannot be cooled, which is likely to cause leakage at the connecting shaft; 3. The closing or opening between the gate plate and the flange is usually hard friction, which not only has a large resistance but also easily causes wear of the flange sealing ring. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to provide a water-cooled gate valve for a single crystal furnace in which the closing or opening of the gate plate is easier, the sealing performance is better, and the water pipe is not easily loosened or leaked.

[0004] To solve the above problems, the technical solution adopted by the present invention includes: a valve housing, a plug plate slidably disposed within the valve housing, and a cylinder disposed outside the valve housing to drive the plug plate to slide. The rear end of the valve housing is provided with a rear cover, and the first flange and the second flange are respectively provided at the upper and lower ends. The bottom of the plug plate is connected to a water-cooled shaft through a support plate, the surface is provided with a first water-cooling channel and a first sealing plate covering the first water-cooling channel, and at least two first water pipe joints communicating with the first water-cooling channel are provided on the side. The rear end of the water-cooled shaft extends out of the rear cover and is connected to the cylinder. Two axially extending water passing holes are provided within the water-cooled shaft, two first water nozzles respectively communicating with the water passing holes are provided at the outer end, and two second water pipe joints respectively communicating with the water passing holes are provided at the inner end; a first sealing ring for sealing cooperation with the first sealing plate is provided at the upper end of the second flange, and a water pipe is connected between the first water pipe joint and the second water pipe joint.

[0005] The inner wall of the second flange is provided with a second water-cooling channel and a second sealing plate covering the second water-cooling channel, and at least two second water nozzles communicating with the second water-cooling channel are provided on the outer wall.

[0006] The plug plate is floatingly mounted on the support plate through a screw assembly. The screw assembly includes a screw, a gasket, and a spring sequentially provided on the screw. Longitudinal screw grooves for sliding cooperation with the screw are provided at the four corners of the support plate, and the screw passes through the longitudinal screw grooves and is fastened to the plug plate.

[0007] A groove is provided at the center of the lower end surface of the support plate, and an inclined surface for applying pressure is provided at one end of the groove. A tapered groove is provided at the center of the upper end surface of the plug plate. A steel ball is provided between the inclined surface and the tapered groove. When the plug plate is inserted in place, the support plate can continue to slide forward and is pressed against the plug plate through the cooperation of its inclined surface and the steel ball.

[0008] An L-shaped positioning block is provided at the end of the valve housing. The L-shaped positioning block includes a lower positioning portion and an upper positioning portion. When the plug plate is inserted in place, it is positioned at the lower positioning portion, and when the support plate is inserted in place, it is positioned at the upper positioning portion.

[0009] Upper guide strips and lower guide strips are respectively provided on both sides inside the valve housing, and pulleys are provided on both sides of the support plate and are placed between the upper guide strips and the lower guide strips.

[0010] The inner wall of the first flange is provided with a third water-cooling channel and a third sealing plate covering the first water-cooling channel, and at least two third water nozzles communicating with the third water-cooling channel are provided on the outer wall.

[0011] On the upper end face of the valve housing, there is a first water isolation strip, and on the side, there is a second water isolation strip. A first water isolation strip cover is sealed on the first water isolation strip, and a second water isolation strip cover plate is sealed on the second water isolation strip. On the first water isolation strip cover plate, there are at least two fourth water nozzles communicating with the inner cavity of the first water isolation strip, and on the second water isolation strip cover plate, there are at least two fifth water nozzles communicating with the inner cavity of the second water isolation strip.

[0012] The cylinder is connected to the water-cooled shaft through a pull plate. U-shaped locking openings are provided on both sides of the pull plate, and a locking rod hinged to the rear cover is locked with the U-shaped locking openings.

[0013] On both sides of the support plate, there are backing plates, and the upper end faces of the backing plates are close to the inner wall of the valve housing.

[0014] A water-cooled shaft flange connected to the rear cover is sleeved on the water-cooled shaft, and a group of second sealing rings are provided inside the water-cooled shaft flange.

[0015] The advantages of the water-cooled plug valve for a single crystal furnace of the present invention are as follows: 1. The water pipe is connected between the water-cooled shaft and the plug. Since the water-cooled shaft and the plug move synchronously, the back-and-forth sliding of the plug will not cause the back-and-forth shaking of the water pipe, and thus will not cause loosening or leakage between the water pipe joints. Moreover, the water pipe can be made very short and will not stick to the inner wall of the valve housing; 2. Since a water-cooled shaft is used instead of a traditional connecting shaft, the sealing ring outside the water-cooled shaft can be cooled at the same time; 3. The plug is installed on the support plate in a floating manner, and through the cooperation of the groove on the end face of the support plate, the taper on the end face of the plug and the steel ball, the plug is closed or opened in a lifting manner, and thus has small resistance, good sealing performance and the sealing ring is not easily worn.

[0016] The present invention will be further described below with reference to the accompanying drawings of the specification. Description of the Drawings

[0017] Figure 1 is a schematic structural diagram of the water-cooled plug valve for a single crystal furnace of the present invention;

[0018] Figure 2 is a rear view of the water-cooled plug valve for a single crystal furnace of the present invention;

[0019] Figure 3 is Figure 2 a sectional view taken along the A-A direction of

[0020] Figure 4 is Figure 2 a sectional view taken along the B-B direction of

[0021] Figure 5 is an assembly schematic diagram between the plug, the support plate and the water-cooled shaft of the present invention;

[0022] Figure 6It is an exploded view of the plug board, the support plate and the water-cooled shaft of the present invention;

[0023] Figure 7 is Figure 3 a partially enlarged view of. Specific embodiments

[0024] Referring to Figures 1 - 7 As shown, the water-cooled plug valve for a single crystal furnace of the present invention includes a valve housing 1, a plug 2 slidably disposed in the valve housing 1, and a cylinder 3 disposed outside the valve housing 1 to drive the plug 2 to slide. A rear cover 4 is provided at the rear end of the valve housing 1, and a first flange 5 and a second flange 6 are respectively provided at the upper and lower ends of the valve housing 1. The bottom of the plug 2 is connected to a water-cooled shaft 8 through a support plate 7. A first water-cooling channel 9 and a first sealing plate 10 covering the first water-cooling channel 9 are provided on the surface of the plug 2. Two first water pipe connectors 11 communicating with the first water-cooling channel 9 are provided on the side surface of the plug 2. The rear end of the water-cooled shaft 8 extends out of the rear cover 4 and is connected to the cylinder 3. Two axially extending water passing holes 12 are provided in the water-cooled shaft 8. Two first water nozzles 13 respectively communicating with the water passing holes 12 are provided at the outer end of the water-cooled shaft 8. Two second water pipe connectors 14 respectively communicating with the water passing holes 12 are provided at the inner end of the water-cooled shaft 8. The first water nozzles 13 are respectively used for connecting with the water inlet pipe and the water outlet pipe of an external water circulation system. A first sealing ring 15 for sealing cooperation with the first sealing plate 10 is provided at the upper end of the second flange 6. A water pipe 16 is connected between the first water pipe connector 11 and the second water pipe connector 14.

[0025] Preferably, a second water-cooling channel 17 and a second sealing plate 18 covering the second water-cooling channel 17 are provided on the inner wall of the second flange 6. Two second water nozzles 19 communicating with the second water-cooling channel 17 are provided on the outer wall of the second flange 6. The second water nozzles 19 are also respectively connected to the water inlet pipe and the water outlet pipe of the external water circulation system. So that the second flange 6 also has a cooling function to further improve the cooling effect.

[0026] Preferably, a third water-cooling channel 33 and a third sealing plate 34 covering the first water-cooling channel 9 are provided on the inner wall of the first flange 5. Two third water nozzles 35 communicating with the third water-cooling channel 33 are provided on the outer wall of the first flange 5. The third water nozzles 35 are also respectively connected to the water inlet pipe and the water outlet pipe of the external water circulation system. So that the third water nozzles 35 also have a cooling function to further improve the cooling effect.

[0027] Preferably, a first water isolation strip 36 is provided on the upper end surface of the valve housing 1, and a second water isolation strip 37 is provided on the side surface of the valve housing 1. A first water isolation strip cover plate 38 is covered on the first water isolation strip 36, and a second water isolation strip cover plate 39 is covered on the second water isolation strip 37, so that water cooling channels are formed in the inner cavities of the first water isolation strip 36 and the second water isolation strip 37. Two fourth water nozzles 40 communicating with the inner cavity of the first water isolation strip 36 are provided on the first water isolation strip cover plate 38, and two fifth water nozzles 41 communicating with the inner cavity of the second water isolation strip 37 are provided on the second water isolation strip cover plate 39. The fourth water nozzles 40 and the fifth water nozzles 41 are also respectively connected to the water inlet pipe and the water outlet pipe of the external water circulation system. Thus, the upper end surface and the side surface of the valve housing 1 both have a cooling function, so as to further improve the cooling effect.

[0028] Preferably, the insertion plate 2 is floatingly mounted on the support plate 7 through a screw rod assembly 46. The screw rod assembly 46 includes a screw rod 20, a gasket 21 and a spring 22 sequentially arranged on the screw rod 20. Long strip-shaped screw grooves 23 slidably matched with the screw rod 20 are provided at the four corners of the support plate 7. The screw rod 20 passes through the long strip-shaped screw grooves 23 and is fastened to the insertion plate 2. A groove 49 is provided at the center of the lower end surface of the support plate 7, and an inclined surface 24 for applying pressure is provided at the rear end of the groove 49. A conical groove 25 is provided at the center of the upper end surface of the insertion plate 2. A steel ball 26 is provided between the inclined surface 24 and the conical groove 25. The gap between the groove 49 and the conical groove 25 is larger than the outer diameter of the steel ball 26, and the gap between the inclined surface 24 and the conical groove 25 is smaller than the outer diameter of the steel ball 26. When the insertion plate 2 is inserted in place, the support plate 7 can continue to slide forward. During the forward sliding process of the support plate 7, the steel ball 26 will be pressed downward onto the insertion plate 2 through its inclined surface 24, so as to close the insertion plate 2 and the second flange 6. When the support plate 7 is pulled out, the steel ball 26 will roll into the other side of the groove 49. Since the gap between the groove 49 and the conical groove 25 is larger than the outer diameter of the steel ball 26, the insertion plate 2 is reset downward under the action of the spring 22 and thus is opened.

[0029] Preferably, an L-shaped positioning block 27 is provided at the end of the valve housing 1. The L-shaped positioning block 27 includes a lower positioning portion 28 and an upper positioning portion 29. When the insertion plate 2 is inserted in place, it is positioned at the lower positioning portion 28, and when the support plate 7 is inserted in place, it is positioned at the upper positioning portion 29. When closing the insertion plate 2, the insertion plate 2 reaches the L-shaped positioning block 27 prior to the support plate 7. Thus, when the insertion plate 2 is inserted in place, the support plate 7 can continue to slide forward.

[0030] Preferably, upper guide strips 30 and lower guide strips 31 are respectively arranged on two sides inside the valve housing 1, and pulleys 32 placed between the upper guide strips 30 and the lower guide strips 31 are arranged on two sides of the support plate 7. Through the sliding fit of the pulleys 32 with the upper guide strips 30 and the lower guide strips 31, the sliding of the support plate 7 becomes more stable and smooth.

[0031] Preferably, the cylinder 3 is connected to the water-cooled shaft 8 through a pull plate 42, U-shaped lock openings 43 are arranged on two sides of the pull plate 42, and a lock rod 44 locked with the U-shaped lock openings 43 is hinged on the rear cover 4. Through the locking of the lock rod 44 with the U-shaped lock openings 43, the insertion plate 2 can be prevented from being accidentally opened to improve safety.

[0032] Preferably, cushion plates 45 are arranged on two sides of the support plate 7. The upper end surfaces of the cushion plates 45 are close to the inner wall of the valve housing 1. When the support plate 7 presses on the insertion plate 2 through the steel balls 26, the upper end surfaces of the cushion plates 45 support on the inner wall of the valve housing 1 to prevent the applied pressure from directly acting on the pulleys 32, resulting in deformation of the pulleys 32.

[0033] Preferably, a water-cooled shaft flange 47 connected to the rear cover 4 is sleeved on the water-cooled shaft 8, and a group of second sealing rings 48 are arranged inside the water-cooled shaft flange 47. The second sealing rings 48 are preferably 4 in number to improve the sealing effect.

[0034] The above does not impose any formal restrictions on the present invention. Although the present invention has been disclosed above with preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can, within the scope of the technical solution of the present invention, make some changes or modifications to the above-disclosed structure and technical content to form equivalent embodiments of equivalent changes. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. A water-cooled gate valve for a single crystal furnace, comprising a valve housing (1), a gate (2) slidably arranged in the valve housing (1), and a cylinder (3) arranged outside the valve housing (1) for driving the gate (2) to slide, wherein a rear cover (4) is provided at the rear end of the valve housing (1), and a first flange (5) and a second flange (6) are provided at the upper and lower ends respectively, and the valve housing (1) is characterized in that: The bottom of the plug plate (2) is connected to a water-cooling shaft (8) through a supporting plate (7), the surface is provided with a first water-cooling channel (9) and a first sealing plate (10) covering the first water-cooling channel (9), and the side is provided with at least two first water pipe joints (11) connected to the first water-cooling channel (9); the rear end of the water-cooling shaft (8) extends out of the rear cover (4) and is connected to the cylinder (3); the water-cooling shaft (8) is provided with two axially extending water holes (12), the outer end is provided with two first water nozzles (13) respectively connected to the water holes (12), and the inner end is provided with two second water pipe joints (14) respectively connected to the water holes (12); the upper end of the second flange (6) is provided with a first sealing ring (15) that is sealed with the first sealing plate (10), and the first water pipe joint (11) and the second water pipe joint (14) are connected via a water pipe (16); The plug plate (2) is floatably mounted on the support plate (7) via a screw assembly (46), the screw assembly (46) comprising a screw (20) and a washer (21) and a spring (22) sequentially arranged on the screw (20), and four corners of the support plate (7) are provided with long strip screw grooves (23) that are slidably matched with the screw (20), and the screw (20) is fastened to the plug plate (2) after passing through the long strip screw grooves (23); A groove (49) is provided at the center of the lower end surface of the support plate (7), and a slope (24) for applying pressure is provided at one end of the groove (49). A conical groove (25) is provided at the center of the upper end surface of the plug plate (2), and a steel ball (26) is provided between the slope (24) and the conical groove (25). When the plug plate (2) is plugged into place, the support plate (7) can continue to slide forward and be pressed against the plug plate (2) through the cooperation between its slope (24) and the steel ball (26).

2. The water-cooled gate valve for a single crystal furnace according to claim 1 is characterized in that: The second flange (6) has an inner wall provided with a second water cooling channel (17) and a second sealing plate (18) covering the second water cooling channel (17), and an outer wall provided with at least two second water nozzles (19) in communication with the second water cooling channel (17).

3. The water-cooled gate valve for a single crystal furnace according to claim 1 is characterized in that: An L-shaped positioning block (27) is provided at the end of the valve housing (1), and the L-shaped positioning block (27) comprises a lower positioning portion (28) and an upper positioning portion (29). When the plug plate (2) is plugged into place, it is positioned at the lower positioning portion (28), and when the support plate (7) is plugged into place, it is positioned at the upper positioning portion (29).

4. The water-cooled gate valve for a single crystal furnace according to claim 1 is characterized in that: An upper guide bar (30) and a lower guide bar (31) are respectively provided on both sides of the interior of the valve housing (1), and pulleys (32) are provided on both sides of the support plate (7) and are arranged between the upper guide bar (30) and the lower guide bar (31).

5. The water-cooled gate valve for a single crystal furnace according to claim 1 is characterized in that: The first flange (5) has an inner wall provided with a third water cooling channel (33) and a third sealing plate (34) covering the first water cooling channel (9), and an outer wall provided with at least two third water nozzles (35) in communication with the third water cooling channel (33).

6. The water-cooled gate valve for a single crystal furnace according to claim 1, characterized in that: The valve housing (1) is provided with a first water barrier (36) on the upper end surface and a second water barrier (37) on the side surface; the first water barrier (36) is covered with a first water barrier cover plate (38); the second water barrier (37) is covered with a second water barrier cover plate (39); the first water barrier cover plate (38) is provided with at least two fourth water spouts (40) connected to the inner cavity of the first water barrier (36); the second water barrier cover plate (39) is provided with at least two fifth water spouts (41) connected to the inner cavity of the second water barrier (37).

7. The water-cooled gate valve for a single crystal furnace according to claim 1, characterized in that: The cylinder (3) is connected to the water-cooling shaft (8) via a pull plate (42), U-shaped lock openings (43) are provided on both sides of the pull plate (42), and a locking rod (44) is hingedly connected to the rear cover (4) and is locked to the U-shaped lock opening (43).

8. The water-cooled gate valve for a single crystal furnace according to claim 1, characterized in that: Pads (45) are provided on both sides of the support plate (7), and the upper end surfaces of the pads (45) are close to the inner wall of the valve housing (1).

9. The water-cooled gate valve for a single crystal furnace according to claim 1, characterized in that: The water-cooling shaft (8) is sleeved with a water-cooling shaft flange (47) connected to the rear cover (4), and a group of second sealing rings (48) are arranged inside the water-cooling shaft flange (47).

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