An integrated test system and test method for a semiconductor gas transmission combination device

Abstract

The present invention discloses an integrated test system and a test method for a semiconductor gas transmission combination device. The system has a first channel and a second channel, and the first channel and the second channel are used to access the semiconductor gas transmission combination device to be tested; the other end of the first channel is connected to a 5N-HE gas source through a first valve, connected to a 9N-N2 gas source through a second valve, and connected to a 5N-N2 gas source through a third valve; the other end of the second channel is simultaneously connected to a trace oxygen analyzer and a trace water analyzer through a fourth valve, connected to a particle counter through a fifth valve, and connected to a helium mass spectrometer through a sixth valve. The test system of the present application can realize seamless switching of different test items, quickly complete the test of the semiconductor gas transmission combination device, and comprehensively improve the test efficiency.

Description

Technical Field

[0001] The present invention relates to the technical field of equipment detection, and more specifically, to an integrated test system and test method for a gas transmission combination device. Background Art

[0002] In the field of semiconductor manufacturing, the performance of the gas transmission system directly affects the quality and reliability of semiconductor devices. As a key unit in the gas transmission system, the importance of the GAS BOX is self-evident. After the traditional semiconductor gas transmission process is assembled, multiple strict tests need to be carried out to ensure the airtightness, purity, and functionality of the system.

[0003] However, the existing test methods have the following deficiencies:

[0004] Low efficiency: Traditional test methods usually require each test to be carried out separately, and each test requires a large amount of time to prepare and switch the test gas source and equipment;

[0005] Complex operation: Due to the large number of test items, the operator needs to frequently switch different test gas sources and test equipment, which not only increases the complexity of the operation but also raises the possibility of errors;

[0006] Resource waste: Each test requires separate preparation of the gas source and equipment, resulting in unnecessary waste of resources;

[0007] Long test cycle: Due to the above reasons, the entire test process has a long cycle, affecting production efficiency.

[0008] In view of the above problems, how to provide a multifunctional integrated test system is an urgent problem to be solved by those skilled in the art. Summary of the Invention

[0009] In view of this, the present invention provides an integrated test system and test method for a semiconductor gas transmission combination device to solve the deficiencies in the prior art.

[0010] To achieve the above object, the present invention adopts the following technical solutions:

[0011] First, an integrated test system for a semiconductor gas transmission combination device has a first channel and a second channel, and the first channel and the second channel are used to connect the semiconductor gas transmission combination device to be tested;

[0012] The other end of the first channel is connected to a 5N-HE gas source through a first valve, simultaneously connected to a 9N-N2 gas source through a second valve, and connected to a 5N-N2 gas source through a third valve;

[0013] The other end of the second channel is simultaneously connected to a trace oxygen analyzer and a trace water analyzer through a fourth valve, connected to a particle counter through a fifth valve, and connected to a helium mass spectrometer through a sixth valve.

[0014] Preferably, the first valve is connected to a 5N-HE gas source through a first filter, and the third valve is connected to a 5N-N2 gas source through a second filter to provide a clean, dry, and pollution-free gas environment and ensure the reliability of detection.

[0015] Preferably, the second valve is connected to a 5N-N2 gas source through a purifier, which is used to directly purify 5N-N2 into 9N-N2, thereby making the test system more economical and efficient.

[0016] Preferably, the other end of the first channel is also connected to a first spare interface through a seventh valve, and the other end of the second channel is also connected to a second spare interface through an eighth valve to improve the flexibility of the test system and be applicable to a wider range of application scenarios.

[0017] Preferably, the first channel and the second channel are respectively connected to a semiconductor gas transmission combination device through a first main valve and a second main valve.

[0018] Preferably, the 9N-N2 gas source is simultaneously connected to a trace oxygen analyzer and a trace water analyzer through a pressure reducing valve, a flow restrictor, and a ninth valve. This application enables low-flow 9N-N2 to continuously purge the trace water analyzer and the trace oxygen analyzer, keeping the pipelines inside the trace water analyzer and the trace oxygen analyzer clean, extending the equipment life, improving the detection efficiency, and simultaneously monitoring the trace oxygen content and trace water content of the background gas.

[0019] Preferably, the pressure of the pressure reducing valve is not higher than 10 psig.

[0020] Second, a comprehensive test method for a semiconductor gas transmission combination device, which accesses the semiconductor gas transmission combination device to be tested through the first channel and the second channel in the comprehensive test system of the semiconductor gas transmission combination device as described above; the test steps include:

[0021] Leak detection: Open the first main valve and the first valve, open the second main valve and the sixth valve, fill 5N-HE into the semiconductor gas transmission combination device to be tested, and use a helium mass spectrometer to perform internal leak and external leak detection in sequence;

[0022] Trace water / oxygen detection: Close the first main valve, open the second main valve, open all the internal valves of the semiconductor gas transmission combination device to be tested and the sixth valve, use a helium mass spectrometer to continuously evacuate, then close the sixth valve, open the first main valve, the second valve, and the fourth valve, and fill 9N-N2 into the semiconductor gas transmission combination device to be tested for trace water and trace oxygen detection;

[0023] Pressure holding test: Open the first main valve, open all the valves inside the semiconductor gas transmission combination device to be tested and the third valve. After reaching a certain pressure value, close the first main valve and conduct a pressure holding test on the semiconductor gas transmission combination device to be tested;

[0024] Particle detection: Open the first main valve and the second main valve, open all the valves inside the semiconductor gas transmission combination device to be tested, the third valve and the fifth valve, and fill 5N-N2 into the semiconductor gas transmission combination device to be tested for particle testing.

[0025] Preferably, after each test is completed, close the valves opened in the comprehensive test system of the current semiconductor gas transmission combination device in a timely manner.

[0026] Preferably, use a helium mass spectrometer to conduct internal leakage and external leakage detection in sequence, including:

[0027] Open the first main valve, the second main valve and the first valve, open all the valves inside the semiconductor gas transmission combination device to be tested, and use a helium mass spectrometer to conduct external leakage detection;

[0028] And open all the valves inside the semiconductor gas transmission combination device to be tested, close each valve to be tested inside in sequence according to requirements, and use a helium mass spectrometer to conduct internal leakage detection.

[0029] Preferably, during the whole process of the test, keep the pressure reducing valve, the flow limiter and the ninth valve in the open state.

[0030] It can be seen from the above technical solutions that the present invention discloses a comprehensive test system and a test method for a semiconductor gas transmission combination device. Compared with the prior art, the following are respectively achieved:

[0031] Integrated design: Integrate all necessary test gas sources and test equipment on a test system, simplify the test process, and reduce the space occupied by the equipment;

[0032] Background test and continuous purging: The integrated system can conduct background tests and continuous purging, ensuring the stability of the test environment and the accuracy of the test results;

[0033] Vacuum replacement: The integrated system has a vacuum replacement function, can quickly switch different test gas sources, and reduces the test preparation time;

[0034] Seamless test switching: Through an optimized process design, seamless switching between different test items is achieved, greatly shortening the overall test time.

[0035] The technical solution of the present invention can quickly complete the test of the semiconductor gas transmission combination device, comprehensively improve the test efficiency, and is of great significance for improving the production efficiency of semiconductor manufacturing equipment and reducing production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only the embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained according to the provided drawings.

[0037] Figure 1 It is a schematic structural diagram of the comprehensive test system for the semiconductor gas transmission combination device provided by the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0038] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present invention.

[0039] The test system disclosed in the embodiments of the present invention integrates a variety of test gas sources and a variety of test devices, can realize seamless switching of different test items, greatly shorten the test time, simplify the test procedures and steps, quickly complete the test of the semiconductor gas transmission combination device, and thus comprehensively improve the test efficiency.

[0040] In the comprehensive test system of the present application, there are a first channel and a second channel, and the first channel and the second channel are used to access the semiconductor gas transmission combination device to be tested;

[0041] The other end of the first channel is connected to a 5N-HE gas source through a first valve, and at the same time is connected to a 9N-N2 gas source through a second valve, and is connected to a 5N-N2 gas source through a third valve;

[0042] The other end of the second channel is simultaneously connected to a trace oxygen analyzer and a trace water analyzer through a fourth valve, is connected to a particle counter through a fifth valve, and is connected to a helium mass spectrometer through a sixth valve.

[0043] In a preferred embodiment, the test system as a whole includes three major modules:

[0044] Module 1: Inlet gas source module, including 5N-N2, 5N-HE, and the integrated purification and filtration part;

[0045] Module 2: Test Equipment Interface Module: including helium mass spectrometer, particle counter, trace water analyzer, and trace oxygen analyzer;

[0046] Module 3: Background Gas Continuous Purge Module, which uses low-flow 9N-N2 to continuously purge the trace water analyzer and the trace oxygen analyzer.

[0047] Specifically, as Figure 1 , the first valve 1 is connected to the 5N-HE gas source through the first filter, and the third valve 3 is connected to the 5N-N2 gas source through the second filter, which is used to provide a clean, dry, and pollution-free gas environment to ensure the reliability of detection; the second valve 2 is connected to the 5N-N2 gas source through the purifier, which is used to directly purify 5N-N2 into 9N-N2, thereby making the test system more economical and efficient.

[0048] In one embodiment, the other end of the first channel is connected to the first spare interface through the seventh valve 7, and the other end of the second channel is connected to the second spare interface through the eighth valve 8 to improve the flexibility of the test system, so as to be applicable to a wider range of application scenarios.

[0049] In one embodiment, the first channel and the second channel are respectively connected to the semiconductor gas transmission combination device through the first main valve and the second main valve.

[0050] In one embodiment, the 9N-N2 gas source is simultaneously connected to the trace oxygen analyzer and the trace water analyzer through a pressure reducing valve, a flow restrictor, and the ninth valve 9. This application enables low-flow 9N-N2 to continuously purge the trace water analyzer and the trace oxygen analyzer, keeping the pipelines in the trace water analyzer and the trace oxygen analyzer clean, extending the equipment life, improving the detection efficiency, and simultaneously monitoring the trace oxygen content and the trace water content of the background gas.

[0051] Preferably, the pressure of the pressure reducing valve is not higher than 10 psig.

[0052] To further optimize the above technical solution, this application also provides a comprehensive test method for a semiconductor gas transmission combination device. This method accesses the semiconductor gas transmission combination device to be tested through the first channel and the second channel in the comprehensive test system of the semiconductor gas transmission combination device described above; and the test items include: leak detection, trace water / oxygen detection, pressure holding detection, and particle detection;

[0053] Among them, each detection step includes:

[0054] Leak detection: Open the first main valve and the first valve 1, open the second main valve and the sixth valve 6, and fill the semiconductor gas transmission combination device to be tested with 5N-HE. Use a helium mass spectrometer to perform internal and external leak detections in sequence; preferably, open the first main valve, the second main valve, and the first valve 1, open all the valves inside the semiconductor gas transmission combination device to be tested, and use a helium mass spectrometer to perform external leak detection;

[0055] And open all the valves inside the semiconductor gas transmission combination device to be tested, close each valve to be tested inside in sequence as required, and use a helium mass spectrometer to perform internal leak detection;

[0056] Trace water / oxygen detection: Close the first main valve, open the second main valve, open all the valves inside the semiconductor gas transmission combination device to be tested and the sixth valve 6, use a helium mass spectrometer to continuously evacuate, then close the sixth valve 6, open the first main valve, the second valve 2, and the fourth valve 4, and fill the semiconductor gas transmission combination device to be tested with 9N-N2 for trace water and trace oxygen detection;

[0057] Pressure holding detection: Open the first main valve, open all the valves inside the semiconductor gas transmission combination device to be tested and the third valve 3. After reaching a certain pressure value, close the first main valve and perform a pressure holding test on the semiconductor gas transmission combination device to be tested;

[0058] Particle detection: Open the first main valve, the second main valve, open all the valves inside the semiconductor gas transmission combination device to be tested, the third valve 3, and the fifth valve 5, and fill the semiconductor gas transmission combination device to be tested with 5N-N2 for particle testing.

[0059] It should be noted that after each test is completed, promptly close the valves opened in the current integrated test system of the semiconductor gas transmission combination device.

[0060] In a preferred embodiment, the pressure reducing valve, the flow restrictor, and the ninth valve 9 are kept open throughout the test process. Preferably, the pressure reducing valve can be provided with a pressure gauge. By observing the pressure gauge reading and adjusting the pipeline pressure, a certain pressure is always maintained on the ninth valve 9, thereby achieving continuous purging.

[0061] In an exemplary embodiment, after all the functional detections of the semiconductor gas transmission combination device are qualified, start to perform tests sequentially using the integrated test system;

[0062] First, perform initial settings on the test system, including preparing the gas source and adjusting the pressure of the pressure reducing valve to an appropriate test pressure. In this embodiment, the set pressure is not higher than 10 psig.

[0063] Then, helium mass spectrometry leak detection - internal and external leakage is carried out to check whether there is a leakage problem with the product. The steps include keeping all the valves on the test platform closed except the pressure reducing valve and the ninth valve 9, opening all the valves of the combined device to be tested, simultaneously opening the first valve 1 and the first main valve, as well as the second main valve and the sixth valve 6 for external leakage detection. After the external leakage test is completed, close all the valves on the product to be tested, and then open the valves on the product to be tested one by one in sequence for internal leakage detection;

[0064] In this embodiment, the trace water and oxygen tests are carried out simultaneously, including keeping all the valves on the test platform closed except the pressure reducing valve and the ninth valve 9, opening all the valves of the product to be tested, opening the sixth valve 6 and the second main valve to evacuate to a vacuum degree of 0.01 Pa and then continuously evacuating for another 30 min. Then, after closing the sixth valve 6, open the second valve 2, the first main valve and the fourth valve 4, and directly test with a trace water analyzer and a trace oxygen analyzer.

[0065] The water content in 5N-HE is generally 3 PPM. By using vacuum replacement, the water content can be reduced by about 1 / 10000, and the gas in the pipeline can reach about 0.03 PPB level. If it is purged under positive pressure, it will take about 4 h. In addition, H2O is a polar substance, and stainless steel pipelines, valves, etc. will adsorb part of the water. Vacuum evacuation can also quickly replace this part of the water.

[0066] Further pressure holding test: Keep all the valves on the test platform closed except the pressure reducing valve and the ninth valve 9, open all the valves of the product to be tested, open the third valve 3 and the first main valve to introduce 5N-N2 at a specified pressure. After the pressure is stable, close the third valve 3 and the first main valve, hold the pressure for 12 hours, and then carry out leakage detection.

[0067] Similarly, during the particle test, still keep all the valves on the test platform closed except the pressure reducing valve and the ninth valve 9, open all the valves of the product to be tested, as well as open the third valve 3, the first main valve, the second main valve and the fifth valve 5. The 5N-N2 directly enters the semiconductor gas transmission combined device to be tested after passing through the second filter for particle test.

[0068] In this application, the 9N-N2 continuously purges throughout the test process, and there is no need to shut off the pressure reducing valve and the ninth valve 9.

[0069] Compared with the prior art, the beneficial effects of this application include:

[0070] 1. A continuous purge pipeline is designed, and the background gas can be tested at any time. A flow limiter is set to avoid the influence of too high flow rate on the test. The protection of the trace water analyzer and the trace oxygen analyzer is achieved through continuous purge of the background gas. Traditional tests require separate determination of the background gas, wasting part of the test time.

[0071] 2. The entire testing process is carried out in a closed environment without secondary pollution. In traditional testing, it is carried out in batches, and air will mix into the system during each test, affecting the testing efficiency.

[0072] 3. Using vacuum replacement instead of traditional purging replacement greatly improves the testing efficiency. Traditional testing uses purging replacement, which has two drawbacks. One is that the replacement time is slow, and the other is that the dead zone cannot be purged.

[0073] 4. The testing equipment is fixed to avoid the back-and-forth handling of the equipment. In traditional testing, the equipment needs to be moved during each test, and the vibration during handling may affect the equipment and sometimes even damage it.

[0074] 5. The overall structure is compact, facilitating the operation and connection of the testers. Traditional testing uses loose wires for connection, and multiple pipeline connections need to be disassembled each time, which may also affect the service life of the seals at the connection points.

[0075] In this specification, each embodiment is described in a progressive manner. The key point of each embodiment is to illustrate the differences from other embodiments. For the same or similar parts among the embodiments, reference can be made to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and reference can be made to the description in the method part for the relevant parts.

[0076] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be obvious to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to these embodiments shown herein, but will be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A comprehensive test system for a semiconductor gas transmission combination device, characterized in that, It has a first channel and a second channel, and one ends of the first channel and the second channel are connected to the semiconductor gas transmission combination device to be tested; The other end of the first channel is connected to a 5N-HE gas source through a first valve, connected to a 9N-N2 gas source through a second valve, and connected to a 5N-N2 gas source through a third valve; the 9N-N2 gas source is connected to a trace oxygen analyzer and a trace water analyzer simultaneously through a pressure reducing valve, a flow restrictor, and a ninth valve; during the whole testing process, the pressure reducing valve, the flow restrictor, and the ninth valve are kept open; The other end of the second channel is connected to a trace oxygen analyzer and a trace water analyzer simultaneously through a fourth valve, connected to a particle counter through a fifth valve, and connected to a helium mass spectrometer through a sixth valve; The first channel and the second channel are connected to the semiconductor gas transmission combination device to be tested through a first main valve and a second main valve respectively; The testing steps include: Leak detection: Open the first main valve and the first valve, open the second main valve and the sixth valve, fill 5N-HE into the semiconductor gas transmission combination device to be tested, and use the helium mass spectrometer to detect internal leakage and external leakage in sequence; Trace water / oxygen detection: Close the first main valve, open the second main valve, open all the internal valves of the semiconductor gas transmission combination device to be tested and the sixth valve, use the helium mass spectrometer to continuously evacuate, then close the sixth valve, open the first main valve, the second valve, and the fourth valve, and fill 9N-N2 into the semiconductor gas transmission combination device to be tested for trace water and trace oxygen detection; Pressure holding detection: Open the first main valve, open all the internal valves of the semiconductor gas transmission combination device to be tested and the third valve, after reaching the preset pressure value, close the first main valve, and conduct a pressure holding test on the semiconductor gas transmission combination device to be tested; Particle detection: Open the first main valve, the second main valve, open all the internal valves, the third valve, and the fifth valve of the semiconductor gas transmission combination device to be tested, and fill 5N-N2 into the semiconductor gas transmission combination device to be tested for particle testing.

2. The comprehensive test system for the semiconductor gas transmission combination device according to claim 1, wherein The first valve is connected to the 5N-HE gas source through a first filter, and the third valve is connected to the 5N-N2 gas source through a second filter.

3. The comprehensive test system for the semiconductor gas transmission combination device according to claim 1, characterized in that, The second valve is connected to the 5N-N2 gas source through a purifier.

4. The comprehensive test system for the semiconductor gas transmission combination device according to claim 1, wherein The other end of the first channel is also connected to a first spare interface through a seventh valve, and the other end of the second channel is also connected to a second spare interface through an eighth valve.

5. The integrated test system for the semiconductor gas transmission combination device according to claim 1, characterized in that, The pressure of the pressure reducing valve is not higher than 10 psig.

6. The comprehensive test method for the semiconductor gas transmission combination device according to claim 1, wherein Using the helium mass spectrometer to detect internal leakage and external leakage in sequence includes: Open the first main valve, the second main valve, and the first valve, open all the internal valves of the semiconductor gas transmission combination device to be tested, and use the helium mass spectrometer to detect external leakage; And open all the internal valves of the semiconductor gas transmission combination device to be tested, close each internal valve to be tested in sequence as required, and use the helium mass spectrometer to detect internal leakage.

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