A manipulator drive structure and a wafer loading system

Abstract

The present invention discloses a manipulator driving structure and a wafer loading system, including: at least two adjacent pulleys with parallel axes; a transmission belt wound between the pulleys to form a closed-loop drive; a tension adjustment assembly including an anchor point and a swing base pivotally connected to the anchor point, the swing base being connected to one of the pulleys and driving it to swing around the anchor point to change the axial distance between adjacent pulleys; wherein, the connection line between the pulley to be adjusted and the anchor point is defined as the first connection line, and the connection line between the other pulley and the anchor point is defined as the second connection line. When the first connection line and the second connection line are collinear, the axial distance obtains the minimum value, and when the second connection line extends along the reverse extension line of the first connection line, the axial distance obtains the maximum value, forming a pre-tightening force self-locking interval. With the above solution, it is used to adjust the tension between adjacent pulleys when the output pulley of the power is rigidly fixed.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor wafer transfer equipment, and in particular to a manipulator drive structure and a wafer loading system. Background Art

[0002] In semiconductor processing, a dual-selective compliant articulated robotic arm can be used to transfer wafers / silicon wafers to and from semiconductor processing modules. The dual-selective compliant articulated robotic arm generally allows for rapid exchange of substrates to and from the processing module, where rapid exchange can be referred to as removing one substrate from the processing module and immediately placing another different substrate onto the same processing module.

[0003] In the deceleration mechanism of the existing selective compliant articulated robotic arm, the rotational speed is reduced and the output torque is increased through the deceleration mechanism; generally, the deceleration and torque increase are achieved by increasing the transmission levels, and the torque is transmitted between the pulleys through a timing belt. In order to ensure the stable operation of the timing belt, it needs to be tensioned, and generally, the tension of the conveyor belt is adjusted by changing the radial distance between two adjacent pulleys; however, in the prior art, the power output pulley is usually rigidly fixed to the flange base through bearings, resulting in an inability to adjust its radial position. Additionally, in the existing tension adjustment mechanism, during the tension adjustment process, it is necessary to move the radial position of the power input pulley or the power output pulley, which is a cumbersome process and cannot ensure the stable transmission of torque after tension adjustment.

[0004] Therefore, it is necessary to provide a manipulator drive structure and a wafer loading system to solve the above problems existing in the prior art. Summary of the Invention

[0005] The purpose of the present invention is to provide a manipulator drive structure and a wafer loading system to solve the technical problem of difficult adjustment of the tension between adjacent pulleys when the power output pulley is rigidly fixed.

[0006] To achieve the above purpose, the technical solution of the present invention is as follows:

[0007] First aspect: A manipulator drive structure, comprising:

[0008] At least two adjacent pulleys with parallel axes;

[0009] A transmission belt, wound between the pulleys to form a closed-loop drive;

[0010] A tension adjustment assembly, including an anchor point and a swinging base pivotally connected to the anchor point. The swinging base is connected to one of the pulleys and drives it to swing around the anchor point to change the center distance between adjacent pulleys;

[0011] Among them, the line connecting the pulley to be adjusted and the anchor point is defined as the first line, and the line connecting the other pulley and the anchor point is defined as the second line. When the first line and the second line are collinear, the axial distance reaches the minimum value. When the second line extends along the reverse extension line of the first line, the axial distance reaches the maximum value, forming a pre-tightening force self-locking interval.

[0012] The beneficial effect of a manipulator drive structure provided by the present invention lies in that: through the action of the tension adjustment component on one of the pulleys to pivot it around the anchor point, the axial distance of the pulley relative to another adjacent pulley is changed, thereby realizing the adjustment of the tension of the transmission belt. The above solution avoids the limitation that the power output pulley is rigidly fixed and its radial position cannot be adjusted. It does not directly change the radial position of the power output pulley, but achieves the purpose of tensioning the transmission belt by changing the axial distance between adjacent pulleys. And compared with the prior art that requires radial movement of the power input pulley and the power output pulley, the operation is relatively simpler, reducing the complex steps required in the adjustment process and improving the adjustment efficiency.

[0013] Furthermore, it includes an installation housing. The installation housing has an accommodation space inside. The installation housing is fixedly connected to the anchor point. The pulley and the tension adjustment component are arranged in the accommodation space. The pulley includes a power input pulley, a power output pulley and a secondary pulley. The power input pulley and the power output pulley are located on the first side of the installation housing, and the secondary pulley is located on the second side of the installation housing. The secondary pulley includes a coaxial double-pulley group, and the double-pulley group is respectively connected to the power input pulley and the power output pulley through independent transmission belts.

[0014] By adopting the above technical solution, the structure of arranging the power input pulley and the power output pulley on the same side, setting the secondary pulley on the opposite side and integrating the coaxial double transmission pulleys, combined with the design of fixing the anchor point to the housing, when the secondary pulley swings, the trajectory direction of its pivoting around the anchor point forms an angle with the pulling force directions of the power input pulley and the power output pulley, thereby converting the originally bidirectional and co-directional pulling forces acting on the secondary pulley into opposite-direction component forces, reducing the risk of pulley inclination; at the same time, the opposite-side layout allows synchronous adjustment of the axial distances of the transmission belts on the input side and the output side through a single pivoting action, realizing two-way tension linkage compensation, and improving the adjustment efficiency on the premise of avoiding the change of the position of the power output pulley.

[0015] Furthermore, the tension adjustment component includes:

[0016] The swing base is connected to the secondary pulley. The swing base can swing around the anchor point. A swing hole is formed in the swing base along the direction parallel to the axis of the secondary pulley, and a swing hole is also formed in the swing base along its own height direction. The swing base is further provided with a driving hole along the depth direction perpendicular to the swing hole. The swing hole and the driving hole are perpendicularly communicated with each other;

[0017] The adjusting member has an adjusting portion and a driving portion. The adjusting portion is located in the swing hole and is connected to the mounting housing. The driving portion can extend into the driving hole to abut against the adjusting portion, and the driving portion drives the adjusting portion to move in the swing hole by means of threaded cooperation or linear pushing.

[0018] By adopting the above technical solution, through the collaborative design of the swing base and the adjusting member, linear drive is converted into swing adjustment, realizing precise control of tension and self-locking stability. When the driving portion enters the driving hole, the axial thrust generated by it acts on the adjusting portion, forcing the swing base to generate a controllable arc swing around the anchor point, thereby synchronously changing the center distance between the secondary pulley and the power input / output pulley.

[0019] Further, the adjusting portion includes an adjusting column, one end of the adjusting column is fixedly connected to the mounting housing, the driving portion includes a driving bolt, internal threads are provided on the inner wall of the driving hole, and the driving bolt is threadedly connected to the driving hole and extends into the swing hole to abut against the adjusting column.

[0020] By adopting the above technical solution, the self-locking effect of the threaded cooperation and the sliding constraint of the swing hole on the adjusting portion can effectively prevent loosening caused by vibration during operation, ensuring long-term stability of the tension.

[0021] Further, the swing hole is a strip-shaped hole, and the diameter of the adjusting column is smaller than the width of the swing hole to form a swing gap.

[0022] Further, the swing base further includes an extension portion. The extension portion is close to the anchor point. An arc-shaped hole is formed in the extension portion. The arc-shaped hole is distributed along the extension direction of an arbitrary circumference of the anchor point. The radian of the arc-shaped hole matches the swing track of the swing base. A limiting column is slidably connected in the arc-shaped hole, and one end of the limiting column is fixedly connected to the mounting housing.

[0023] By adopting the above technical solution, through the motion coupling constraint between the arc-shaped hole and the limit post, dynamic limitation of the swing trajectory of the secondary pulley is formed. When the swing base pivots around the anchor point, the sliding path of the limit post in the arc-shaped hole strictly limits the swing angle range, ensuring that the secondary pulley can only swing within a preset plane and eliminating the risk of lateral deviation caused by unbalanced bidirectional tension. The fixed connection between the limit post and the installation housing further disperses the force on the swing base to the rigid structure of the housing, so that the torque of the swing base is offset by the lateral support force of the limit post, preventing tilting.

[0024] Further, the swing base includes a first region, a second region, a third region, and a fourth region;

[0025] The tension adjustment assembly further includes a bearing part, which is arranged in the first region, the anchor point is arranged in the second region, the adjustment part is arranged in the third region, and the extension part is arranged in the fourth region.

[0026] Further, the bearing part includes a first bearing installation area opened in the first region, a hollow bearing main body protruding downward along the edge of the first bearing installation area, and a transfer body protruding downward along the bearing main body. The bearing main body is provided with an opening for the transmission belt to pass through in the direction of the power output pulley. The transfer body is fixedly connected to the bearing main body, and a second bearing installation area is formed inside the transfer body with a hollow interior.

[0027] Further, the anchor point includes an anchor shaft and a shaft hole. One end of the anchor shaft is fixedly connected to the installation housing, the shaft hole is opened in the second region along the height direction of the anchor shaft, and the anchor shaft and the shaft hole are pivotally matched.

[0028] Further, the secondary pulley includes a first pulley, a second pulley, a first shaft part, and a second shaft part. The first shaft part is located between the first pulley and the second pulley and is coaxially arranged. An installation space for accommodating the transfer body is formed by surrounding the inner periphery of the first shaft part and the first pulley; the second shaft part is located at the top of the second pulley and is coaxially arranged.

[0029] Further, a bearing part is also arranged on the secondary pulley, and the bearing part includes:

[0030] A first bearing, installed between the second shaft part and the first bearing installation area;

[0031] A second bearing; installed between the first shaft part and the second bearing installation area.

[0032] Second aspect: The present invention provides a wafer loading system, including the above-mentioned manipulator driving structure, and further including:

[0033] An arm that can telescopically move along the R-axis;

[0034] The manipulator drive structure is used to drive the arm to rotate along the T-axis. Description of the Drawings

[0035] Figure 1 Internal schematic diagram of a manipulator drive structure according to an embodiment of the present invention;

[0036] Figure 2 Schematic diagram of power transmission of a manipulator drive structure according to an embodiment of the present invention;

[0037] Figure 3 Schematic diagram of the motion state of the swing base according to an embodiment of the present invention;

[0038] Figure 4 Exploded structure schematic diagram of a manipulator drive structure according to an embodiment of the present invention;

[0039] Figure 5 Schematic diagram of the regional distribution of the swing base according to an embodiment of the present invention;

[0040] Figure 6 Schematic diagram of the structure of a wafer loading system according to an embodiment of the present invention.

[0041] Reference Numerals: 1, pulley; 11, power input pulley; 12, power output pulley; 13, secondary pulley; 131, first pulley; 132, second pulley; 133, first shaft portion; 134, second shaft portion; 135, bearing portion; 136, installation space; 2, transmission belt; 3, center distance; 31, first connection line; 32, second connection line; 4, tension adjustment assembly; 41, anchor point; 411, rotating shaft; 412, shaft hole; 42, swing base; 421, swing hole; 4211, swing gap; 422, extension portion; 4221, arc-shaped hole; 423, first region; 424, second region; 425, third region; 426, fourth region; 427, bearing portion; 4271, first bearing installation area; 4272, bearing main body; 4273, adapter body; 4274, open end; 4275, second bearing installation area; 43, adjusting member; 431, screw; 432, driving portion; 4321, driving bolt; 4322, nut; 4323, driving hole; 5, installation housing; 51, upper flange; 52, lower flange; 53, outer cover; 6, driving motor; 7, arm; 8, movement track of the center of the secondary pulley; 9, movement track of the adjusting column. Detailed Embodiments

[0042] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Apparently, the described embodiments are some, but not all, of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein shall have the ordinary meanings understood by those of ordinary skill in the art to which the present invention pertains. The words such as "including" used herein mean that the elements or objects appearing before this word cover the elements or objects listed after this word and their equivalents, without excluding other elements or objects.

[0043] The following Figure 1 - appended Figure 5 , a further detailed description will be given to the specific embodiments of the present invention.

[0044] First aspect

[0045] Referring to Figure 1 , a manipulator drive structure includes at least two adjacent pulleys 1, a transmission belt 2, and a tension adjustment assembly 4.

[0046] In some embodiments, at least two pulleys each have a central axis and are parallel to each other, and the distance between the two central axes is the axial distance 3. A transmission belt 2 for transmitting power is disposed between at least two adjacent pulleys. The transmission belt 2 is completely or partially wound around the pulleys. By the action of the tension adjustment assembly 4 on one of the pulleys to pivot it around the anchor point 41, the axial distance 3 between the pulley and an adjacent other pulley is changed, thereby realizing the adjustment of the tension of the transmission belt 2. The above solution avoids the limitation that the power output pulley 12 is rigidly fixed and its radial position cannot be adjusted, and does not need to directly change the radial position of the power output pulley 12, but achieves the purpose of tensioning the transmission belt 2 by changing the axial distance 3 between adjacent pulleys. Among them, in this embodiment, one of at least two adjacent pulleys 1 is a power input pulley 11 or a power output pulley 12, and the other is a secondary pulley 13.

[0047] Referring to Figure 1 and Figure 2 , in some specific embodiments, the pulley includes a power input pulley 11, a power output pulley 12, and a secondary pulley 13. The power input pulley 11 and the power output pulley 12 are located on the same side, saving the axial space of the robotic arm, and the secondary pulley 13 is disposed on the other side for power transmission. The power input pulley 11 is connected to a drive motor 6, and the drive motor 6 is used to provide power for the power input pulley 11 to drive the power input pulley 11 to rotate, and the power output pulley 12 is used to transmit the power out. The drive motor 6 employs a servo or a direct drive motor.

[0048] In some embodiments, the secondary pulley 13 is located on the other side and includes two coaxially arranged transmission belt wheels, one of which is connected to the power input pulley 11 through a transmission belt 2, and the other is connected to the power output pulley 12 through a transmission belt 2.

[0049] Although the power input pulley 11 and the power output pulley 12 are located on the same side, the axial space of the robot arm is saved. However, when it is necessary to adjust the tension of the synchronous belt between the power output pulley 12 and the secondary pulley 13, it can only be achieved by changing the installation position of the secondary pulley 13. However, during the operation of the robot arm, the secondary pulley 13 continues to bear the tension of the synchronous belt of the power output pulley 12, and the direction of the tension is consistent with the transmission direction. Since the position of the power output pulley 12 is fixed, in dynamic operation, the bidirectional tension forms a superposition effect, causing the secondary pulley 13 to bear an asymmetric lateral load. Under long-term operation, this unbalanced force will cause the secondary pulley 13 to tilt, resulting in a decrease in the stability of torque transmission, which directly affects the wafer transfer accuracy.

[0050] To this end, this example uses a design in which the anchor point 41 is fixed to the shell, so that when the secondary pulley 13 swings, the direction of its pivoting trajectory around the anchor point 41 forms an angle with the direction of the tension of the power input and output pulleys, thereby converting the bidirectional unidirectional tension originally acting on the secondary pulley 13 into unidirectional components, reducing the risk of pulley tilt; at the same time, the opposite-side layout allows the axial center distance 3 of the input and output drive belts 2 to be synchronously adjusted through a single pivoting action, thereby realizing bidirectional tension linkage compensation, and improving the adjustment efficiency while avoiding changes in the position of the power output pulley 12.

[0051] In some embodiments, the manipulator driving structure further includes a mounting housing 5, the interior of the mounting housing 5 has a containing space, wherein the pulley and the tension adjustment assembly 4 are arranged in the containing space. The tension adjustment assembly 4 includes at least one anchor point 41, and the mounting housing 5 is fixedly connected to the anchor point 41. In some embodiments, the anchor point 41 includes an anchoring shaft 411 and an axis hole 412, and one end of the anchoring shaft 411 is fixedly connected to the top of the mounting housing 5.

[0052] In some specific embodiments, the mounting housing 5 is composed of an upper flange 51, a lower flange 52 and an outer cover 53 located on the peripheral side, and the upper flange 51, the lower flange 52 and the outer cover 53 are jointly arranged to form an accommodation space. The upper flange 51, the lower flange 52 and the outer cover 53 are fixed by bolts or welding.

[0053] In some embodiments, the tension adjustment assembly 4 acts on one of the pulleys in a manner of pivoting around the anchor point 41, so as to change the center distance 3 between one pulley and the adjacent other pulley, thereby adjusting the tension of the transmission belt 2. In some embodiments, the power output pulley 12 is fixedly arranged on the mounting housing 5, as Figure 2 shown, fixedly arranged on the upper flange 51. The distance between the axis of the power output pulley 12 and the axis of the secondary pulley 13 is the center distance 3.

[0054] Referring to Figure 3 , in some embodiments, the connection line between the axis center of the power output pulley 12 and the anchor point 41 forms a first connection line 31, and the connection line between the secondary pulley 13 and the anchor point 41 forms a second connection line 32. When the tension adjustment assembly 4 drives the secondary pulley 13 to swing, within the range of 0° - 180°, the larger the included angle between the first connection line 31 and the second connection line 32, the larger the center distance 3; when the tension adjustment assembly 4 drives one of the pulleys to swing, within the range of 180° - 360°, the larger the included angle between the first connection line 31 and the second connection line 32, the smaller the center distance 3. When the included angle between the first connection line 31 and the second connection line 32 is 0° or 360°, that is, when they coincide, the center distance 3 is the smallest; when the included angle between the first connection line 31 and the second connection line 32 is 180°, that is, the second connection line 32 is on the extension path of the first connection line 31, at this time the center distance 3 is the largest and the tension force is the largest.

[0055] Referring to Figure 4 , in some embodiments, the tension adjustment assembly 4 includes a swing base 42 and an adjustment member 43. The swing base 42 is connected to the secondary pulley 13. The swing base 42 can swing around the anchor point 41. A swing hole 421 is formed in the swing base 42 along the direction parallel to the axis of the secondary pulley 13. A drive hole 4323 is also formed on one side of the swing base 42. The swing hole 421 and the drive hole 4323 are perpendicular to each other and communicate with each other. The adjustment member 43 has an adjustment portion and a drive portion 432. The adjustment portion is located in the swing hole 421 and is connected to the mounting housing 5. The drive portion 432 can extend into the drive hole 4323 to abut against the adjustment portion, and the drive portion 432 drives the adjustment portion to move in the swing hole 421 by means of thread engagement or linear pushing. Through the collaborative design of the swing base 42 and the adjustment member 43, the linear drive is converted into a swing adjustment, realizing precise control and self-locking stability of the tension. When the drive portion 432 enters the drive hole 4323, the axial thrust generated by it acts on the adjustment portion, forcing the swing base 42 to generate a controllable arc swing around the anchor point 41, thereby synchronously changing the center distance 3 between the secondary pulley 13 and the power output pulley 12.

[0056] In some specific embodiments, the adjusting part includes an adjusting column. One end of the adjusting column is connected to the bottom of the mounting housing 5, that is, the upper flange 51. Specifically, the connection method is a detachable connection. The adjusting column has a threaded portion that is screwed into the bottom of the upper flange 51, and the screwing depth is adjustable. In some embodiments, the adjusting column is a hexagon bolt. The driving part 432 includes a driving bolt 4321. Threads are provided on the inner wall of the driving hole 4323. The driving bolt 4321 is threadedly connected to the driving hole 4323 and extends into the swinging hole 421 to abut against the adjusting column. In some embodiments, a nut 4322 is also threadedly connected to the side of the driving bolt 4321 facing away from the adjusting hole for further fixing the driving bolt 4321 to prevent the driving bolt 4321 from loosening. Specifically, the head of the driving bolt 4321 abuts against the adjusting column. By continuously tightening the driving bolt 4321, the length of the driving bolt 4321 in the strip-shaped hole increases. Since the adjusting column is fixedly arranged, the driving bolt 4321 drives the swinging base 42 to rotate counterclockwise around the anchor point 41, increasing the distance between the secondary pulley 13 and the power output pulley 12. In addition, due to the self-locking effect generated by the threaded fit between the driving bolt 4321 and the driving hole 4323, and the sliding constraint of the swinging hole 421 on the adjusting part. Moreover, since the hexagon bolt can adjust the depth of screwing into the upper flange 51, the swinging base 42 can be further tightened, effectively maintaining the long-term stability of the tension.

[0057] In some specific embodiments, the adjusting part includes a screw 431. The upper end of the screw 431 is fixedly connected to the upper flange 51. Specifically, it can be welded or threadedly connected. The swinging hole 421 is a strip-shaped hole, and both ends of the strip-shaped hole are semicircular. The diameter of the strip-shaped hole is larger than the diameter of the adjusting column. A swinging gap 4211 for adjusting the movement of the adjusting column is formed between the adjusting column and the inner wall of the strip-shaped hole. By extending the driving part 432 into the adjusting hole and abutting against the screw 431, the swinging base 42 is driven to swing relative to the adjusting part, thereby realizing the adjustment of the center distance 3 between the secondary pulley 13 and the power output pulley 12, and finally realizing the tension adjustment of the secondary pulley 13 and the power output pulley 12. Since the strip-shaped hole is linear, while the adjusting part actually moves along an arc trajectory during the adjustment process, leaving the swinging gap 4211 can enable the adjusting part to have a certain movement space in the strip-shaped hole, so as to adapt to this arc movement trajectory, ensure that the adjusting part can move smoothly in the strip-shaped hole, realize the adjustment of the center distance 3, and then complete the tension adjustment of the transmission belt 2. If there is no swinging gap 4211, the linear strip-shaped hole will limit the arc movement of the adjusting part, resulting in abnormal adjustment.

[0058] In some other specific embodiments, the driving part 432 does not adopt the driving bolt 4321, but instead adopts a linear driving element such as an air pump or an electric cylinder. When the driving part 432 adopts an air pump, its working principle is that the air pressure generated by the air pump drives the piston in the cylinder to move, converting the air pressure energy into mechanical energy. By compressing air, the piston rod in the cylinder extends or retracts. The piston rod extends into the driving hole 4323 to push the adjusting part to move in the swinging hole 421, thereby driving the swinging base 42 to swing around the anchor point 41, adjusting the center distance 3 between the belt pulleys, and realizing the adjustment of the tension of the transmission belt 2. The adoption of the linear driving method is relatively easy to achieve precise control of the moving distance, and the existence of the swinging gap 4211 avoids the direct constraint of the bar-shaped hole on the driving part 432 when driving the adjusting part to move, enabling the driving part 432 to more smoothly push the adjusting part and move in a predetermined linear manner.

[0059] In some embodiments, the swinging base 42 further includes an extension part 422. The extension part 422 is close to the anchor point 41, and an arc-shaped hole 4221 is formed on the extension part 422. The arc-shaped hole 4221 is distributed along the extending direction of an arbitrary circumference of the anchor point 41. The radian of the arc-shaped hole matches the swinging trajectory of the swinging base 42. A limiting column is slidably connected in the arc-shaped hole 4221, and one end of the limiting column is fixedly connected to the mounting housing 5. Through the motion coupling constraint between the arc-shaped hole 4221 and the limiting column, a dynamic limit to the swinging trajectory of the secondary belt pulley 13 is formed. When the swinging base 42 pivots around the anchor point 41, the sliding path of the limiting column in the arc-shaped hole 4221 strictly limits the swinging angle range, ensuring that the secondary belt pulley 13 can only swing within a preset plane, eliminating the risk of lateral deviation caused by unbalanced bidirectional tension. The fixed connection between the limiting column and the mounting housing 5 further disperses the force on the swinging base 42 to the rigid structure of the housing, enabling the torque of the swinging base 42 to be offset by the lateral supporting force of the limiting column and preventing tilting. By adopting the above solution, the technical problem in the prior art that the pulley set is stressed out of balance due to unbalanced tension and thus affects the transmission accuracy is solved.

[0060] Referring to Figure 5 , in some embodiments, such as Figure 5As shown, the swing base 42 includes a first region 423, a second region 424, a third region 425, and a fourth region 426. The tension adjustment assembly 4 further includes a bearing portion 427 disposed in the first region 423, an anchor point 41 disposed in the second region 424, an adjustment portion disposed in the third region 425, and an extension portion 422 disposed in the fourth region 426. The fourth region 426 is disposed on the side of the swing base 42 away from the power output pulley 12, further dispersing the force on the swing base 42 to the rigid structure of the housing to prevent tilting. Among them, the adjustment portion is disposed in the third region 425, and the third region 425 can be disposed on the outer side of the first region 423 away from the second region 424, thereby facilitating adjustment and making the adjustment more labor-saving. Because the farther the adjustment point is from the anchor point 41, the more labor-saving the adjustment is.

[0061] In some embodiments, the bearing portion 427 includes a first bearing installation area 4271 opened in the first region 423, a hollow bearing main body 4272 protruding downward along the edge of the first bearing installation area 4271, and an adapter body 4273 protruding downward along the bearing main body 4272. The bearing main body 4272 is provided with an opening 4274 for the transmission belt 2 to pass through in the direction of the power output pulley 12. The adapter body 4273 is fixedly connected to the bearing main body 4272, and the inside of the adapter body 4273 is hollow to form a second bearing installation area 4275. One end of the anchoring rotating shaft 411 is fixedly connected to the installation housing 5, and a shaft hole 412 is opened in the second region 424 along the height direction of the anchoring rotating shaft 411. The anchoring rotating shaft 411 and the shaft hole 412 are in rotational cooperation.

[0062] In some embodiments, the secondary pulley 13 includes a first pulley 131, a second pulley 132, a first shaft portion 133, and a second shaft portion 134. The first shaft portion 133 is located between the first pulley 131 and the second pulley 132 and is coaxially arranged. An installation space 136 for accommodating the adapter body 4273 is formed by surrounding the inner periphery of the first shaft portion 133 and the first pulley 131; the second shaft portion 134 is located at the top of the second pulley 132 and is coaxially arranged. A bearing portion 135 is also provided on the secondary pulley 13, and the bearing portion 135 includes a first bearing and a second bearing. The first bearing is installed between the second shaft portion 134 and the first bearing installation area 4271; the second bearing is installed between the first shaft portion 133 and the second bearing installation area 4275.

[0063] In summary, the manipulator drive structure provided by the present invention designs a tension adjustment component 4 that pivots around a fixed anchor point 41, so that the swing trajectory direction of the secondary pulley 13 forms an angle with the pulling forces of the power input pulley 11 and the power output pulley 12, converting the originally co-directionally superimposed pulling forces into counteracting cross-directional component forces. At the same time, the arc-shaped hole 4221 of the swing base 42 is used to constrain the swing trajectory of the pulley, and a tension adjustment is achieved in combination with a screw self-locking adjustment structure. On the one hand, in the present invention, through the layout of the lever-type adjustment points away from the anchor point 41 (such as the outside of the third area 425) and the conversion of screw drive into the swing movement of the swing base 42, a single rotation of the drive bolt 4321 can change the center distance 3 between the power output pulley 12 and the secondary pulley 13, and further change the tension between the power input pulley 11 and the power output pulley 12, realizing a labor-saving operation for tension adjustment and making the adjustment more convenient. On the other hand, the cooperation and constraint between the limit post and the arc-shaped hole 4221, and the stress dispersion design of the extension part 422 can effectively resist the asymmetric load of the bidirectional pulling force, prevent the pulley from tilting, make the torque transmission more stable, and ensure the wafer transfer accuracy.

[0064] Second aspect

[0065] Referring to Figure 6 , the present invention also provides a wafer loading system, including the above-mentioned manipulator drive structure, and further including an arm 7 that extends and retracts along the R axis; the above-mentioned manipulator drive structure is used to drive the arm 7 to rotate along the T axis.

[0066] Although the embodiments of the present invention have been described in detail above, it is obvious to those skilled in the art that various modifications and changes can be made to these embodiments. However, it should be understood that such modifications and changes are all within the scope and spirit of the present invention. Moreover, the present invention described herein can have other embodiments and can be implemented or realized in various ways.

Claims

1. A manipulator drive structure, characterized in that, Comprising: At least two adjacent pulleys (1) with parallel axes; A transmission belt (2) wound between the pulleys (1) to form a closed-loop drive; A tension adjustment assembly (4), including an anchor point (41) and a swing base (42) pivotally connected to the anchor point (41), the swing base (42) being connected to one of the pulleys (1) and driving it to swing around the anchor point (41) to change the center distance (3) between adjacent pulleys (1); Wherein, the line connecting the adjusted pulley (1) and the anchor point (41) is defined as the first line, and the line connecting the other pulley (1) and the anchor point (41) is defined as the second line. When the first line and the second line are collinear, the center distance (3) reaches the minimum value, and when the second line extends along the reverse extension line of the first line, the center distance (3) reaches the maximum value, forming a pre-tightening force self-locking interval; Including an installation housing (5), the interior of the installation housing (5) has an accommodation space, the installation housing (5) is fixedly connected to the anchor point (41), the pulleys and the tension adjustment assembly (4) are arranged in the accommodation space, and the multiple pulleys are respectively a power input pulley (11), a power output pulley (12) and a secondary pulley (13). The power input pulley (11) and the power output pulley (12) are located on the first side of the installation housing (5), and the secondary pulley (13) is located on the second side of the installation housing (5). The secondary pulley (13) includes a coaxial double-pulley group, and the double-pulley group is respectively connected to the power input pulley (11) and the power output pulley (12) through independent transmission belts (2), and the swing base (42) is connected to the secondary pulley (13).

2. The manipulator driving structure according to claim 1, wherein The tension adjustment assembly (4) includes: The swing base (42) can swing around the anchor point (41). A swing hole (421) is opened in the swing base (42) along its own height direction, and a drive hole (4323) is also opened in the swing base (42) along the depth direction perpendicular to the swing hole (421). The swing hole (421) and the drive hole (4323) are perpendicularly communicated with each other; An adjustment member (43), having an adjustment portion and a drive portion (432). The adjustment portion is located in the swing hole (421), the adjustment portion is fixedly connected to the installation housing (5), the drive portion (432) can extend into the drive hole (4323) to abut against the adjustment portion, and the drive portion (432) drives the adjustment portion to move in the swing hole (421) by means of threaded engagement or linear pressing.

3. The manipulator driving structure according to claim 2, characterized in that, The adjustment portion includes an adjustment column, one end of the adjustment column is connected to the installation housing (5), the drive portion (432) includes a drive bolt (4321), the inner wall of the drive hole (4323) is provided with threads, and the drive bolt (4321) is threadedly connected to the drive hole (4323) and extends into the swing hole (421) to abut against the adjustment column.

4. The manipulator driving structure according to claim 3, characterized in that, The swing hole (421) is a strip-shaped hole, and the diameter of the adjusting column is smaller than the width of the swing hole (421) to form a swing gap (4211).

5. A manipulator drive structure according to claim 2, characterized in that, The swing base (42) further includes an extension portion (422). The extension portion (422) is close to the anchor point (41). An arc-shaped hole (4221) is formed in the extension portion (422). The arc-shaped hole (4221) is distributed along the extending direction of an arbitrary circumference of the anchor point (41). The radian of the arc-shaped hole (4221) matches the swing track of the swing base (42). A limiting column is slidably connected in the arc-shaped hole (4221), and one end of the limiting column is fixedly connected to the installation housing (5).

6. The manipulator driving structure according to claim 5, wherein, The swing base (42) includes a first region (423), a second region (424), a third region (425), and a fourth region (426); The tension adjusting assembly (4) further includes a bearing portion (427). The bearing portion (427) is arranged in the first region (423), the anchor point (41) is arranged in the second region (424), the adjusting portion is arranged in the third region (425), and the extension portion (422) is arranged in the fourth region (426).

7. A manipulator drive structure according to claim 6, characterized in that, The bearing portion (427) includes a first bearing installation area (4271) formed in the first region (423), a hollow bearing main body (4272) protruding downward along the edge of the first bearing installation area (4271), and an adapter body (4273) protruding downward along the bearing main body (4272). An opening (4274) for the transmission belt (2) to pass through is formed in the bearing main body (4272) facing the power output pulley (12). The adapter body (4273) is fixedly connected to the bearing main body (4272), and a second bearing installation area (4275) is formed in the hollow interior of the adapter body (4273).

8. A manipulator driving structure according to claim 1, characterized in that, The anchor point (41) includes an anchor shaft (411) and a shaft hole (412). One end of the anchor shaft (411) is fixedly connected to the installation housing (5). The shaft hole (412) is formed in the second region (424) along the height direction of the anchor shaft (411). The anchor shaft (411) and the shaft hole (412) are pivotally matched.

9. The manipulator driving structure according to claim 7, wherein The secondary pulley (13) includes a first pulley (131), a second pulley (132), a first shaft portion (133), and a second shaft portion (134). The first shaft portion (133) is located between the first pulley (131) and the second pulley (132) and is coaxially arranged. An installation space (136) for accommodating the adapter body (4273) is formed by surrounding the inner periphery of the first shaft portion (133) and the first pulley (131); the second shaft portion (134) is located at the top of the second pulley (132) and is coaxially arranged.

10. A manipulator drive structure according to claim 9, characterized in that, A bearing portion (135) is further arranged on the secondary pulley (13). The bearing portion (135) includes: The first bearing is installed between the second shaft portion (134) and the first bearing installation area (4271); The second bearing is installed between the first shaft portion (133) and the second bearing installation area (4275).

11. A wafer loading system, comprising a robot driving structure as described in any one of claims 1-10, characterized in that, It further includes: An arm (7), the arm (7) telescoping along the R-axis direction; The manipulator drive structure for driving the arm (7) to rotate along the T-axis direction.

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